KR102068661B1 - Pick-up device - Google Patents

Abstract

The present invention relates to a pickup device, capable of enabling an element pickup unit to ascend, descend, and rotate and accurately controlling the element pickup unit. The pickup device includes: a casing having a container-shaped body and a cover; the element pickup unit having a suction hollow shaft spatially connected to a pickup head installed on the outside of the container-shaped body; a moving module installed in the container-shaped body to rotate, ascend, or descend the pickup head and the suction hollow shaft; a picker reciprocating unit installed by being connected to the moving module based on the inside of the container-shaped body to provide an ascending force or a descending force to the moving module; a suction block installed in the upper part of the casing to provide air pressure to the suction hollow shaft (herein, the air pressure includes positive pressure or negative pressure of gas); and an encoder supported on the moving module and sensing the rotation of the suction hollow shaft by being connected to the suction hollow shaft.

Description

Pickup Device {PICK-UP DEVICE}

The present invention relates to a pickup apparatus for picking up an element.

In general, in order to perform a manufacturing and assembly process of a device such as a semiconductor chip (hereinafter, referred to as “device”), a pick and place that picks up a supplied device and moves it to a desired position is pick and place. Process is essential.

In order to perform the pick-and-place process, a pickup device including a pickup tool for holding and picking up an element and a driving unit for reciprocatingly driving the pickup tool in the vertical direction is used.

In general, the pick-up device is a pick-and-place device which is installed in a pick-and-place device that picks up an element and then transports it to a predetermined seating position, so as to adsorb the element. It is divided into vacuum adsorption method for picking up and gripper method for holding and picking up both sides of the device by a pair of grippers, but according to the development of recent technology, the devices are integrated and miniaturized, thus minimizing damage to the devices. Hazardous vacuum adsorption is mainly used.

In addition, the drive unit for reciprocating the vacuum suction type or gripper type pickup tool up and down is driven by a vacuum pressure flowing in different paths, and a pneumatic cylinder for driving the pickup shaft in which the pickup tool is installed, and picked up by electricity. It is divided into an electric actuator that drives the shaft.

In recent years, the development of a precise and durable pick-up device is urgently required for high integration and productivity improvement of semiconductor devices.

Republic of Korea Patent No. 10-0976505 (registered on August 11, 2010)

The present invention provides a pickup device capable of vertical movement while rotating the element pickup portion.

In addition, the present invention provides a pickup device that can ensure the reliability of the rotation and vertical movement of the element pickup portion.

In addition, the present invention provides a pickup device capable of efficiently dissipating internal heat while being hermetically sealed.

In order to solve the above-mentioned problem, a pickup device according to an embodiment of the present invention has a casing having a container-type body and a cover, and a suction hollow shaft spatially connected to a pickup head disposed outside the container-type body. An element pick-up unit, a movable module disposed inside the vessel-shaped body for rotation, ascending or descending the suction hollow shaft and the pickup head, and the vessel-type body to provide a lifting force or a lowering force to the movement module. A picker reciprocating drive unit disposed in connection with the moving module based on the inside, a suction block installed at the upper portion of the casing to provide pneumatic pressure (here, pneumatic pressure includes a positive pressure or negative pressure of the gas) to the suction hollow shaft, An encoder supported based on the moving module and connected to the suction hollow shaft to sense rotation of the suction hollow shaft. It can be included.

According to an embodiment of the present invention, the cover is formed with a front stepped hole facing the front of the linear motor, the container-shaped body is formed with a back stepped hole toward the rear of the linear motor, the front stepped hole And a shielding plate for shielding a magnetic field generated from the linear motor to prevent electromagnetic coupling between the plurality of pickup modules may be installed in the rear stepped hole.

According to an embodiment of the present invention, the moving module is formed on one side of the moving module is coupled to the substrate connecting portion of the picker reciprocating drive unit, and the extension frame is formed on the other side of the moving module is the installation base of the encoder And a plurality of linear guides disposed between the rear surface of the moving module and the container body based on a position between the extension frame and the substrate connection portion, wherein the linear guides are arranged along a moving direction of the suction hollow shaft. It may be disposed separately and spaced apart from each other to keep parallel to each other.

According to an embodiment of the present invention, the linear guides are respectively installed on the inner surface of the container-type body, the guide rails having different lengths, and the movable module in a state coupled to be slidably moved along each of the guide rails. And a linear scale sensor connected to each of the bogie blocks and the linear scale sensor installed on the container body based on an upper portion of the shorter guide rail among the guide rails.

According to an embodiment of the present invention, the moving module includes a bearing block rotatably supporting the suction hollow shaft, a spring contact portion formed on a bottom surface of the moving module based on a peripheral position of the bearing block, and the spring contact portion. And a spring guide installed at the bottom of the vessel-shaped body to guide the contacted spring and the compression or tension of the spring.

According to the above-described problem solving means of the present invention, the body is formed by using an aluminum material, mounting the components necessary for the operation of the pickup device inside the body and the inflow of foreign matter into the interior using a bracket, a shield member, etc. And by shielding the magnetic generation, it is possible not only to efficiently process the heat generated inside, it is possible to prevent the life of the product is shortened due to the inflow of foreign matter.

1 is a perspective view of a pickup device according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along the line AA shown in FIG. 1. FIG.
3 is an exploded perspective view of the pickup device shown in FIG.
4 is an exploded perspective view illustrating a coupling relationship of the encoder illustrated in FIG. 3.
5 is a cross-sectional view taken along the line BB shown in FIG. 4.
6 is an internal front view for explaining the operation relationship of the pickup apparatus shown in FIG.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the present embodiments make the disclosure of the present invention complete, and those of ordinary skill in the art to which the present invention belongs. It is provided to fully convey the scope of the invention to those skilled in the art, and the invention is defined by the description of the claims.

Meanwhile, the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In addition, the embodiment may include applications. In addition, in this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and / or “comprising” refers to the presence of one or more other components, steps, operations and / or elements in the components, steps, operations and / or elements mentioned. Or does not exclude the addition. Hereinafter, with reference to the accompanying drawings will be described embodiments or applications of the present invention;

Hereinafter, a pickup device will be described with reference to the accompanying drawings.

1 is a perspective view of a pickup device according to an embodiment of the present invention, Figure 2 is a cross-sectional view taken along the line AA shown in Figure 1, Figure 3 is an exploded perspective view of the pickup device shown in FIG. 4 is an exploded perspective view illustrating the coupling relationship between the encoders shown in FIG. 3, FIG. 5 is a cross-sectional view taken along the line BB shown in FIG. 4, and FIG. 6 is an operation relationship of the pickup device illustrated in FIG. 1. It is an internal front view for demonstrating.

1 and 5, the pickup device according to the embodiment of the present invention is largely sealed casing 100, the picker reciprocating drive unit 200, the moving module 300, the element pickup unit 400, the sun block 500 and the circuit unit 600 and the like.

Specifically, in the embodiment of the present invention, the pick-up device is disposed in the sealed casing 100 having the container-type body 110 and the cover 120, the outside of the container-type body 100, that is to protrude to the outside of the element (semiconductor To rotate, ascend, or descend the element pick-up unit 400, the suction hollow shaft 410, and the pickup head 420 having the suction hollow shaft 410 spatially connected to the pickup head 420 for picking up the element. The mobile module 300, which is disposed inside the container body 110, is connected to the moving module 300 based on the inside of the container body 110 to provide a lifting force or a lowering force to the moving module 300. Suction block 500 installed on top of hermetic casing 100 to provide pneumatic pressure (where pneumatic pressure includes positive or negative pressure of gas) to the picker reciprocating drive 200 and suction hollow shaft 410 disposed Suction is supported based on the module 300 and connected to the suction hollow shaft 410 An encoder for sensing rotation of the ball shaft (410) (430), and the like.

In addition, the pickup device may include a connector 610 coupled to the upper portion of the hermetic casing 100 to connect the circuit unit 600 mounted inside the container body 110 and an external device (not shown).

In the exemplary embodiment of the present invention, the hermetic casing 100 of the pickup device may be made of an aluminum material having a thin rectangular parallelepiped shape as a whole and having high thermal conductivity. The container body 110 and the cover 120 may be coupled to the suction hollow shaft ( It may have a hermetic structure by the dustproof members 10 and 20 installed in the container-shaped body 110 so as to be adjacent to both ends of the 410. Here, the anti-vibration member (10, 20) may be installed in a pair of coupling grooves (12, 22) of the container-shaped body 110 formed at positions corresponding to both ends of the suction hollow shaft 410, suction hollow shaft It can be inserted into and coupled to 410.

Some areas of the container body 110 and the cover 120, that is, areas corresponding to the space in which the picker reciprocating drive unit 200 is mounted may be provided with front and rear stepped holes 121 and 125. The front and rear shield plates 130 and 140 may be inserted into and coupled to the front and rear stepped holes 121 and 125. Here, in the embodiment of the present invention, the depth of the stepped hole 121 may correspond to the thicknesses of the front and rear shield plates 130 and 140.

The front shielding plate 130 may be disposed in the front stepped hole 121 of the cover 120 facing the front of the picker reciprocating driving unit 200.

The rear shield plate 140 may be disposed in the rear stepped hole 125 of the body 110 facing the rear surface of the picker reciprocating drive unit 200.

In the embodiment of the present invention, the front shielding plate 130 and the rear shielding plate 140 may shield the magnetic field generated from the picker reciprocating drive unit 200 to prevent electromagnetic coupling between the plurality of pickup devices.

On the other hand, in the embodiment of the present invention, the rear shield plate 140 and the front shield plate 130 may include a plurality of grooves (131, 141).

The grooves 131 and 141 increase the surface area of the front shielding plate 130 and the rear shielding plate 140 to increase cooling efficiency, and relatively reduce the weight of the front shielding plate 130 and the rear shielding plate 140. It has an effect.

The picker reciprocating drive unit 200 may include a mover 230 such as an electromagnet coil disposed between a pair of stators 210 and 220 formed of a plurality of magnetic plates. Here, one stator 210 of the pair of stators 210 and 220 is installed in the edge portion 118 of the back step hole 125 of the container body 110, the other stator 220 is a container type It may be installed on the mounting end 119 of the body (110).

In the exemplary embodiment of the present invention, the picker reciprocating driving unit 200 generates a magnetic levitation linear by generating a thrust in a linear direction by a pair of stators 210 and 220 and the mover 230 according to a signal applied from the circuit unit 600. It may be a motor.

In addition, the mover 230 may be mounted on the substrate 231 and may be coupled to the substrate connection part 301 formed at one side of the moving module 300.

Meanwhile, the picker reciprocating drive unit 200 is connected to the circuit unit 600 to generate a moving force according to a signal applied from the circuit unit 610 to move the moving module 300 connected to the mover 230 in the vertical direction (Z-axis direction). Can be raised or lowered. Accordingly, the driving motor 350, the motor bracket 340, the driving gear 360, the driven gear 370, the bearing 371, and the element pick-up unit 400 connected to the moving module 300 may be raised or lowered. Can be.

In order to raise or lower the moving module 300 and the element pick-up unit 400 according to the driving of the picker reciprocating driving unit 200, the moving module 300 according to the embodiment of the present invention has a picker reciprocating driving unit 200 at one side thereof. The board connection part 301 connected to the board | substrate 231 of the () is formed, and the extension frame 304 is formed in the other side.

In addition, the moving module 300 may include a plurality of linear guides 310 and 320 installed on the body 110 based on a position between the substrate connection part 301 and the extension frame 304.

The linear guides 310 and 320 may be disposed along the vertical direction and spaced apart from each other to be parallel to each other.

Each of the linear guides 310 and 320 is capable of sliding along the guide rails 311 and 321 installed on the inner surface of the container body 110 and along the guide rails 311 and 321 respectively. As a combined state, it may be provided with a balance block (312, 322) connected to the moving module 300, respectively.

The linear guides 310 and 320 as described above are not only vertical movements of the moving module 300 but also various components to be mounted based on the load and the moving module 300 of the moving module 300, for example, a mover, a substrate, and a driving. By distributing and supporting the load of the motor, the encoder, the bearing, the element pick-up unit, and the like, the movement of the element pick-up unit 400 according to the lifting or lowering can be reliably guided.

On the other hand, the moving module 300 may include a bracket installation portion 306 and the motor space 307.

Through the structure of the moving module 300, the driving gear 360 and the driving gear 360 coupled to the rotation shaft of the driving motor 350 are disposed in the motor space 307, and the motor of the driving motor 350 is disposed. The housing may be coupled to one side of the motor bracket 340.

The other side of the motor bracket 340 may be coupled to the bracket installation part 306 of the moving module 300.

As described above, the drive motor 350 and the drive gear 360 are disposed in the motor space 307 of the moving module 300 and the bracket mounting portion 306 and the motor bracket 340 of the moving module 300. By coupling the other side of the, the drive motor 350 and the drive gear 360 together with the moving module 300 that is raised or lowered by the picker reciprocating drive 200 can be raised or lowered.

The rotation shaft of the drive motor 350 is axially coupled to the drive gear 360, and the drive gear 360 may be engaged with the driven gear 370.

In addition, the driven gear 370 operating according to the driving gear 360 may be axially coupled to the suction hollow shaft 410 of the element pickup unit 400.

A plurality of bearings 371 may be installed on the cushion hollow shaft 410 based on the lower position of the driven gear 370.

Outer ring of the plurality of bearings 371 is coupled to the bearing block 302 of the moving module 300, the inner ring of each bearing 371 is coupled to the outer peripheral surface of the suction hollow shaft 410 of the suction hollow shaft 410 It can support rotation.

Accordingly, since the suction hollow shaft 410 and the driven gear 370 are mounted to the moving module 300 in a rotatable state by the bearing 371 of the bearing block 302 of the moving module 300, the suction hollow shaft 410, the pickup head 420, the pickup module 400 including the encoder 430, and the driven gear 370 may also be raised or lowered together with the moving module 300.

In the embodiment of the present invention as described above, the suction hollow shaft 410 has a cylindrical shape formed as a whole, and may be disposed to reciprocate in the container-shaped body 110. In addition, the suction hollow shaft 410 has one end exposed from the container body 1100 to pick up the element, and a pickup head 420 for picking up the element by directly contacting the element is disposed at one end exposed to the outside. Can be.

For convenience of description, in the embodiment of the present invention will be described as a pickup device of the vacuum adsorption method for adsorbing the element by the vacuum pressure as an example, the suction passage (not shown) in the longitudinal direction inside the suction hollow shaft 410 Is formed, and the suction of the pickup head 420 coupled to one end of the suction hollow shaft 410 by a vacuum pressure provided through a fitting (not shown) coupled to the other end of the suction hollow shaft 410 and the suction passage. A pad (not shown) may adsorb the device, but is not limited thereto, and a gripper pickup tool may be coupled to one end of the suction hollow shaft 410.

The linear scale sensor 800 is installed in the container body 110 of the hermetic casing 100 so as to measure the movement amount according to the lifting or lowering of the moving module 300.

For example, the linear scale sensor 800 is installed on the container body 110 based on the upper part of the short guide rail 322 of the guide rails 311 and 321 to measure the moving distance of the moving module 300. The measured moving distance value may be provided to the circuit unit 600.

The moving module 300 includes a spring contact portion 303 formed on the bottom surface of the moving module 300 based on the position on the left side of the bearing block 302, that is, the peripheral position of the bearing block 302, and the bearing block 302. It includes an extension frame 304 of the free end structure extending to protrude along the longitudinal direction of the moving module 300 based on the position of the right side.

The spring 700 may contact the spring contact portion 303 of the moving module 300.

The spring 700 may be inserted into a spring guide 710 connected to the bottom of the container-shaped body 110 of the hermetic casing 100 to elastically support the moving module 300 through the spring contact 303.

In addition, the spring 700 is connected to the bottom of the container-shaped body 110 through the spring guide 710 to the static electricity generated by the suction hollow shaft 410 during the vertical movement of the suction hollow shaft 410 It can be delivered to the container body 110 to be discharged to the outside.

In an embodiment of the present invention, the spring guide 710 may be installed at the bottom of the body 110 to guide the compression or tension of the spring 700.

The encoder 430 includes an encoder mount 433 connected based on the extension frame 304 of the moving module 300, an encoder sensor 436 installed based on the encoder mount 433, and an encoder sensor 436. The encoder wheel 437 coupled to the suction hollow shaft 410 based on the position that can be sensed by the.

A connection end 433 is formed at one side of the encoder mounting stand 432, a vertical gap maintaining part 435 is formed at the other side, and a bearing hole 434 is formed at the bottom thereof.

Here, the encoder bearing 431 is coupled to the bearing hole 434 of the encoder mounting table 432 to rotatably support the suction hollow shaft 410.

Accordingly, the encoder sensor 436 of the encoder mount 432 accurately senses the encoder wheel 437, and as a result, the rotation angles of the suction hollow shaft 410 and the pickup head 420 can be accurately measured.

The operation of the pick-up device having the above-described configuration will be described with reference to FIG.

As illustrated in FIG. 6, when a signal generated from the circuit unit 600 is applied to the picker reciprocating drive unit 200 according to a signal applied from an external device, the moving module 300 connected to the picker reciprocating drive unit 200 may be used. It may be raised or lowered along the guide rails 312 and 322 coupled to the blocks 311 and 321.

When the moving module 300 moves up or down, the driving motor 350, the driving gear 360, the driven gear 370, and the extension frame 304 of the moving module 300 are connected to the moving module 300. Encoder 430 connected to the may move up or down together.

In addition, the driving gear 360 is rotated by the driving motor 350 driven according to the signal applied from the circuit unit 600, and the driven gear 370 engaged with the driving gear 360 may rotate. In this case, the peer gear 370 may rotate the suction hollow shaft 410 of the element pickup unit 400.

As described above, the drive module 350, the drive gear 360, and the driven gear 370 are provided along with the movement of the moving module 300 up and down by the linear driving force generated by the picker reciprocating drive unit 200. The suction hollow shaft 410 of the element pickup unit 400 may be rotated about an axis according to the rotation driving force.

The movement distance of the moving module 300 may be measured by the linear scale sensor 800 and applied to the circuit unit 600, and the rotation value of the suction hollow shaft 410 is sensed by the encoder 430 so as to sense the circuit unit 600. ) May be applied.

In addition, the circuit unit 600 provides a moving distance and a rotation value to an external device (not shown) connected through the connector 610 to receive a predetermined control signal from the external device so that the suction hollow shaft of the element pickup unit 400 is provided. It is possible to precisely control the vertical movement of the 410 and the rotation of the suction hollow shaft 410.

The above description of the present application is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present application. .

100 casing
200: picker reciprocating drive
300: moving module
400 element pickup portion
500: suction block
600: circuit part

Claims (5)

Has a container-type body and a cover, The container-type body has a casing having an edge and a mounting end of the terminal hole formed on the back;
An element pickup part connected to the pickup head protruding to the outside of the container body and having a suction hollow shaft formed inside the container body;
A moving module disposed inside the container-type body for rotating, raising or lowering the suction hollow shaft and the pickup head;
A picker reciprocating drive unit disposed in connection with the moving module in the container-type body to provide a lifting force or a lowering force to the moving module;
A suction block installed at the top of the casing to provide pneumatic pressure (where pneumatic pressure includes positive or negative pressure of gas) to the suction hollow shaft,
It is formed inside the container-type body is supported based on the moving module and connected to the suction hollow shaft includes an encoder for sensing the rotation of the suction hollow shaft,
The picker reciprocating drive unit,
A pair of stators and a mover disposed between the pair of stators, the lifter being connected to a circuit part through a board on which the mover is mounted to provide a lifting force or a lowering force to the moving module according to a signal applied from the circuit part, In addition to connecting the mover to the moving module, one of the pair of stators is installed on the container type body by installing one of the stator to the edge of the stepped hole of the rear of the container body and the other stator to the mounting end of the container body. ,
The moving module,
A substrate connection portion formed at one side and connected to the substrate on which the mover is mounted, an extension frame formed at the other side, and a bearing block formed at the other side, and installed on the container-type body based on a position between the substrate connection portion and the extension frame and being parallel to each other. A plurality of linear guides spaced apart from each other to maintain, and the bracket mounting portion and the motor space in which the motor bracket is installed,
Each of the linear guides has a guide rail installed on an inner surface of the container body, and a bogie block coupled to each other in a vertical direction along each of the guide rails.
In the motor space portion is disposed a drive gear coupled to the drive motor and the rotating shaft of the drive motor,
The motor housing of the drive motor is coupled to one side of the motor bracket, the bracket installation portion of the moving module is coupled to the other side of the motor bracket,
The rotating shaft of the drive motor is shaft coupled to the drive gear, the drive gear is meshed with the driven gear,
The driven gear operating according to the drive gear is axially coupled to the suction hollow shaft of the element pick-up part,
The suction hollow shaft is provided with a plurality of bearings based on the lower position of the driven gear,
The outer ring of the plurality of bearings is coupled to the bearing block of the mobile module, the inner ring of each of the plurality of bearings is coupled to the outer peripheral surface of the suction hollow shaft to support the rotation of the suction hollow shaft,
The encoder,
Encoder mounting having a connection end formed on one side and connected to the extension frame of the mobile module, the vertical gap maintaining portion formed on the other side and the bearing hole is formed on the bottom and the encoder bearing for rotatably supporting the suction hollow shaft Pick-up device comprising a stand, an encoder sensor installed in the vertical space maintaining portion of the encoder mounting, and the encoder wheel coupled to the suction hollow shaft.

The method of claim 1,
The cover has a front stepped hole formed toward the front of the picker reciprocating drive, the container-shaped body is formed with a back stepped hole toward the back of the picker reciprocating drive,
And a shielding plate provided at each of the front stepped hole and the rear stepped hole to shield a magnetic field generated from the picker reciprocating drive unit to prevent electromagnetic coupling between a plurality of pickup modules.
delete The method of claim 1,
Guide rails installed on each of the linear guides have different lengths,
The pickup device,
Pick-up device further comprises a linear scale sensor installed in the container body adjacent to the upper portion of the short guide rail of the guide rail.
The method of claim 1,
The moving module
It includes a spring contact formed on the bearing block bottom surface of the moving module,
The pickup device,
A spring in contact with the spring contact;
And a spring guide installed at the bottom of the container body to guide compression or tension of the spring.

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