KR102375397B1 - Stretchable substrate, method of same and electronic device comprising same - Google Patents

Abstract

The present specification relates to a stretchable substrate, a method for manufacturing the same, and an electronic device including the same.

Description

Stretchable substrate, manufacturing method thereof, and electronic device including same

The present specification describes a stretchable substrate, a method for manufacturing the same, and an electronic device including the same.

Conventionally, display devices include an unbreakable display, a curved display, a bent display, a foldable display, and a rollable display. has been developed

Currently, the commercialization stage is about the mobile field in the form of a curved display, and it is expected that the mobile field using a foldable display will appear in earnest. In addition, the development speed of the electric field using pOLED is dazzling.

In particular, recently, according to the paradigm change of the display, a stretchable display that exceeds the characteristics of a display that can be wound has been developed, and a stretchable display needs to be easily stretched and contracted regardless of the direction. It is essential to develop a stretchable base material having high elongation and restoring force.

In the case of a stretchable display device including an electronic device such as an organic light emitting device, a separate electrode pattern must be provided on the stretchable substrate to electrically connect the electronic device. However, in the case of a conventional metal electrode pattern, since flexibility is not included, there is a problem in that durability of the electrode pattern is greatly reduced according to a change in surface area according to stretching of the stretchable substrate.

It is suggested that it can be applied to a display for medical purposes, starting with a touch screen panel as an application field of a stretchable display, and then as a wearable display using fiber. .

According to the above necessity, in forming an electronic device on a stretchable substrate, it is necessary to develop a stretchable substrate that can maintain durability of the electronic device and has excellent stretchability.

Japanese Patent Laid-Open No. 2006-299283

An object of the present specification is to provide a stretchable substrate, a method for manufacturing the same, and an electronic device including the same.

An exemplary embodiment of the present application is a stretchable polymer film having a depression on at least one surface; and a pattern layer provided in the recessed portion of the stretchable polymer film, wherein the pattern layer has a laminated structure of an electrode support layer pattern and an electrode pattern, and at least one width of the electrode support layer pattern is the width of the electrode pattern. It is greater than at least one width, and at least one surface of the electrode pattern is provided with a structure exposed to the outside.

In addition, an exemplary embodiment of the present application comprises the steps of preparing a carrier film; forming a conductive layer on one surface of the carrier film; forming an electrode support layer pattern on a surface opposite to the surface of the conductive layer in contact with the carrier film; etching the conductive layer; forming a stretchable polymer film on the surface of the carrier film on which the electrode support layer pattern and the etched conductive layer are formed; and removing the carrier film.

Finally, an exemplary embodiment of the present application is a stretchable substrate according to the present application; and an electronic device provided on the stretchable polymer film of the stretchable substrate, wherein the electronic device is formed on a position in which the electrode pattern of the stretchable substrate is depressed.

The stretchable substrate according to an exemplary embodiment of the present application has a structure in which an electrode support layer pattern and an electrode pattern are provided in a depression of the stretchable polymer film, so that when using an electronic device in the future, even after repeated stretching and recovery Damage can be minimized, and thus durability is greatly increased.

In addition, the stretchable substrate according to the present application has an electrode support layer pattern and an electrode pattern in the depression of the stretchable polymer film, and the width of the electrode support layer pattern is larger than that of the electrode pattern, In the manufacturing process, the transfer rate of the electrode pattern is greatly improved, so that the electrode pattern can be prevented from being lost.

In addition, the stretchable substrate according to the present application has a structure in which the electrode support layer pattern is buried inside the stretchable polymer film, and at least one surface of the electrode pattern is exposed to the outside, so that a space between the stretchable polymer film and the electrode support layer pattern is formed. It has a feature that can minimize the separation at the boundary.

1 is a side view illustrating a stretchable substrate according to an exemplary embodiment of the present application.
2 is a side view showing a laminated structure of a pattern layer according to an exemplary embodiment of the present application.
3 is a side view illustrating a stretchable substrate according to an exemplary embodiment of the present application.

Hereinafter, the present specification will be described in more detail.

Embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art to which the present invention pertains can easily carry out the present invention. However, the present invention may be embodied in several different forms and is not limited to the embodiments described herein.

An exemplary embodiment of the present application is a stretchable polymer film having a depression on at least one surface; and a pattern layer provided in the recessed portion of the stretchable polymer film, wherein the pattern layer has a laminated structure of an electrode support layer pattern and an electrode pattern, and at least one width of the electrode support layer pattern is the width of the electrode pattern. It is greater than at least one width, and at least one surface of the electrode pattern is provided with a structure exposed to the outside.

The stretchable substrate according to an exemplary embodiment of the present application has a structure in which an electrode support layer pattern and an electrode pattern are provided in a depression of the stretchable polymer film, so that when using an electronic device in the future, even after repeated stretching and recovery Damage can be minimized, and thus durability is greatly increased.

In addition, the stretchable substrate according to the present application has an electrode support layer pattern and an electrode pattern in the depression of the stretchable polymer film, and the width of the electrode support layer pattern is larger than that of the electrode pattern, In the manufacturing process, the transfer rate of the electrode pattern is greatly improved, so that the electrode pattern can be prevented from being lost.

In an exemplary embodiment of the present application, one surface of the electrode pattern has a structure exposed to the outside, and one surface of the electrode pattern exposed to the outside and one surface of the stretchable polymer film are located on the same plane. to provide.

In the exemplary embodiment of the present application, the structure in which at least one surface of the electrode pattern is exposed to the outside means that the exposed surface of the electrode pattern does not contact the stretchable polymer film.

An exemplary embodiment of the stretchable substrate has a depression on at least one surface of the stretchable polymer film, and a pattern layer in the depression, wherein the pattern layer has a laminated structure of an electrode support layer pattern and an electrode pattern, and the electrode support layer pattern The width of is larger than the width of the electrode pattern, and at least one surface of the electrode pattern has a structure exposed to the outside, and the structure can be more clearly identified from the side view of the stretchable substrate in FIG. 1 .

In the exemplary embodiment of the present application, the pattern layer has a stacked structure of an electrode support layer pattern and an electrode pattern, and as can be seen in FIG. 2 , the width A of the electrode support layer pattern is greater than the width of the electrode pattern B You can see the big one.

In an exemplary embodiment of the present application, the Young's Modulus of the stretchable polymer film is G1, the Young's Modulus of the electrode support layer pattern is G2, and the G1 and G2 satisfy the following Equations 1 to 3 It provides a stretchable substrate that is.

[Equation 1]

0.1 MPa ≤ G1 ≤ 2 MPa

[Equation 2]

50 MPa ≤ G2 ≤ 1000 MPa

[Equation 3]

25 ≤G2/G1 ≤ 1000

The Young's modulus of the stretchable polymer film and the electrode support layer pattern can be measured using Zwick/Roell's UTM equipment. Specifically, the stretchable polymer film and the electrode support layer in the form of a film were heated at 25±2° C., 50±5% RH ( Relative humidity), after fixing both ends in the longitudinal direction so that the width becomes 25mm and the length becomes 165mm, stretch it in both directions in the longitudinal direction at a speed of 100mm/min.

In the exemplary embodiment of the present application, Equation 1 may be 0.1 MPa ≤ G1 ≤ 2 MPa, preferably 0.1 MPa ≤ G1 ≤ 1 MPa, more preferably 0.1 MPa ≤ G1 ≤ 0.5 MPa.

In an exemplary embodiment of the present application, Equation 2 may be 50 MPa ≤ G2 ≤ 1000 MPa, preferably 50 MPa ≤ G1 ≤ 1000 MPa, more preferably 100 MPa ≤ G1 ≤ 500 MPa.

As the stretchable substrate satisfies the ranges of Equations 1 and 2, when the stretchable substrate is uniaxially stretched, a gap does not occur at the interface between the electrode support layer pattern and the stretchable polymer film, and accordingly, the durability of the electronic device in the future It is possible to have this excellent characteristic.

In an exemplary embodiment of the present application, Equation 3 satisfies 25 ≤ G2/G1 ≤ 1000, preferably 20 ≤ G2/G1 ≤ 500, and more preferably 50 ≤ G2/G1 ≤ 500.

As the ratio of the Young's modulus of the stretchable polymer film to the electrode support layer pattern of the stretchable substrate satisfies the above range as shown in Equation 3, the stretchable substrate has excellent elongation and excellent durability.

In an exemplary embodiment of the present application, the electrode support layer pattern provides a stretchable substrate that is a wavy (wavy) pattern or a Voronoi (voronoi) pattern.

The electrode support layer pattern is a pattern for connecting electronic devices in an electronic device later. In order to prevent disconnection of the electrode support layer pattern when the stretchable substrate is stretched, two or more wavy patterns or beams spaced apart inside the stretchable polymer film The Voronoi pattern may have a recessed structure.

The fact that the electrode support layer pattern has a structure in which two or more wavy patterns or Voronoi patterns spaced apart inside the stretchable polymer film are recessed means that the electrode support layer pattern is recessed inside at regular intervals. structure, or a structure in which the electrode support layer pattern is recessed inside at irregular intervals.

When the stretchable substrate is uniaxially stretched when the electrode support layer pattern has a wavy pattern or a Voronoi pattern, a stress value applied to the electrode support layer pattern can be minimized, so that the electrode It has a feature capable of preventing the disconnection of the support layer pattern.

1 is a side view of a stretchable substrate according to an exemplary embodiment of the present application, and it can be seen that the electrode support layer pattern 2 is recessed into the recessed portion of the stretchable polymer film 1 .

In the exemplary embodiment of the present application, the electrode support layer pattern may have a polygonal cross-section in the width direction of the electrode support layer pattern.

In the exemplary embodiment of the present application, the electrode support layer pattern may have a cross-section in the width direction of the electrode support layer pattern selected from the group consisting of a circle, a triangle, a square, a pentagon, and a hexagon.

In another exemplary embodiment, the electrode support layer pattern may have a rectangular cross-section in the width direction of the electrode support layer pattern.

In an exemplary embodiment of the present application, the width of the electrode support layer pattern is 10 μm or more and 100 μm or less to provide a stretchable substrate.

In another exemplary embodiment, the width of the electrode support layer pattern may be 10 μm or more and 100 μm or less, preferably 10 μm or more and 95 μm or less, and more preferably 15 μm or more and 90 μm or less.

When the width of the electrode support layer pattern satisfies the above range, when the stretchable substrate is uniaxially stretched, a stress value applied to the electrode support layer pattern can be minimized, thereby preventing the disconnection of the electrode support layer pattern. have the characteristics of being able to do it.

In an exemplary embodiment of the present application, the thickness of the electrode support layer pattern is 5 μm or more and 100 μm or less to provide a stretchable substrate.

The thickness of the electrode support layer pattern means a height in a direction perpendicular to the width direction of the electrode support layer pattern, which can be specifically confirmed in FIG. 3 . 3 is a side view of the stretchable substrate according to the present application, and the width (A) of the electrode support layer pattern can be confirmed, and in this regard, it is confirmed that the thickness (E) of the electrode support layer pattern is perpendicular to the width direction of the electrode support layer pattern can

When the thickness of the electrode support layer pattern satisfies the above range, disconnection of the electrode support layer pattern is prevented when the stretchable substrate is stretched and the thickness of the stretchable substrate can be thinly formed, and the electrode support layer pattern and the electrode In order to fill the pattern, the thickness of the stretchable polymer film can be prevented from being excessively increased.

In an exemplary embodiment of the present application, the electrode pattern provides a stretchable substrate comprising at least one selected from the group consisting of Al, Ag, and Cu.

In another exemplary embodiment, the electrode pattern may include Cu.

In an exemplary embodiment of the present application, the electrode pattern provides a stretchable substrate that is a wavy pattern or a Voronoi pattern.

When the electrode pattern has a wavy pattern or a Voronoi pattern, when the stretchable substrate is uniaxially stretched, stress applied to the electrode pattern is minimized to prevent disconnection of the electrode pattern. have

In an exemplary embodiment of the present application, a width of the electrode pattern is 5 μm or more and 100 μm or less to provide a stretchable substrate.

In another exemplary embodiment, the width of the electrode pattern may be 5 μm or more and 100 μm or less, preferably 5 μm or more and 50 μm or less, and more preferably 10 μm or more and 25 μm or less.

In an exemplary embodiment of the present application, the electrode pattern provides a stretchable substrate that has a thickness of 2 μm or more and 20 μm or less.

In another exemplary embodiment, the thickness of the electrode pattern may be 2 μm or more and 20 μm or less, preferably 5 μm or more and 20 μm or less, and more preferably 5 μm or more and 10 μm or less.

When the width and thickness of the electrode pattern satisfy the above range, when the stretchable substrate is uniaxially stretched, disconnection of the electrode pattern does not occur, so it has excellent durability, and suitable time and Since the concentration of the etchant can be appropriately formed, it is possible to easily form an electrode pattern having excellent line width uniformity.

The thickness of the electrode pattern means a height in a direction perpendicular to the width direction of the electrode pattern, which can be specifically confirmed in FIG. 3 . 3 is a side view of the stretchable substrate according to the present application, it can be confirmed that the width (B) of the electrode pattern, in contrast, the thickness (D) of the electrode pattern can be confirmed that the vertical direction with respect to the width direction of the electrode support layer pattern .

In the exemplary embodiment of the present application, as the width of the electrode pattern satisfies the above range and the width of the electrode support layer pattern is formed to be greater than the width of the electrode pattern, in the manufacturing process of the stretchable substrate, the electrode pattern It has a characteristic of increasing the transfer characteristic, and thus pattern omission is prevented, so that an excellent stretchable substrate can be formed.

Specifically, in an exemplary embodiment of the present application, the width of the electrode support layer pattern is A1, the width of the electrode pattern is A2, and A1 and A2 provide a stretchable substrate that satisfies Equation 4 below.

[Equation 4]

5 μm ≤ A1-A2 ≤ 50 μm

When the width A1 of the electrode support layer pattern and the width A2 of the electrode pattern satisfy the ranges of Equation 4, particularly, the pattern has excellent transfer characteristics.

In the exemplary embodiment of the present application, in the surface of the electrode support layer pattern in contact with the electrode pattern, the surface of the electrode support layer pattern not in contact with the electrode pattern is surrounded by the stretchable polymer film, and is made of the stretchable polymer film The width of the enclosed portion provides a stretchable substrate that is 5 μm or more and 50 μm or less in the width direction of the electrode support layer pattern.

In another embodiment, the width of the portion surrounded by the stretchable polymer film is 5 μm or more and 50 μm or less, preferably 5 μm or more and 30 μm or less, more preferably 5 μm or more in the width direction of the non-stretchable pattern. 20 μm or less.

A side of the electrode support layer pattern that is not in contact with the electrode pattern is surrounded by the stretchable polymer film, and the width of the portion surrounded by the stretchable polymer film means that the portion of the electrode support layer pattern not in contact with the electrode pattern is all the above. It means that it is surrounded by the stretchable polymer film, and in this case, it means the width of the part surrounded by the stretchable polymer film.

Since the width of the portion of the electrode support layer pattern surrounded by the stretchable polymer film has the above range, it is possible to prevent loss of the electrode support layer pattern and the electrode pattern during the manufacturing process of the stretchable substrate, and the stretchable polymer film and the It has a feature that can minimize the separation at the boundary between the electrode support layer patterns.

In an exemplary embodiment of the present application, the thickness of the stretchable polymer film may be 100 μm or more and 1000 μm or less.

In another exemplary embodiment, the thickness of the stretchable polymer film may be 100 μm or more and 1000 μm or less, preferably 100 μm or more and 700 μm or less, and more preferably 200 μm or more and 500 μm or less.

As the stretchable polymer film satisfies the thickness range, the stretchability of the stretchable substrate of the present application is excellent, and by having the thickness range, fracture does not occur with respect to high stretch force.

In an exemplary embodiment of the present application, the electrode support layer pattern can be used without particular limitation as long as it satisfies the Young's modulus of Equation 2, the electrode support layer pattern includes a photocurable polymer material, and the photocurable polymer material At least one selected from the group consisting of urethane acrylate oligomers, epoxy acrylate oligomers, polyester acrylate oligomers, melamine acrylate oligomers, and butadiene acrylate oligomers, and acrylate monomers having two or more acrylate functional groups.

In an exemplary embodiment of the present application, the electrode support layer pattern is characterized in that it includes a radical photoinitiator.

In an exemplary embodiment of the present application, there is provided a stretchable substrate of polydimethylsiloxane (PDMS) having an elongation at break of 50% or more of the stretchable polymer film.

In another exemplary embodiment, the elongation at break of the stretchable polymer film may be 50% or more, preferably 40% or more, and more preferably 35% or more.

In another exemplary embodiment, the elongation at break of the stretchable polymer film may be 100% or less, preferably 110% or less.

The elongation at break of the stretchable polymer film means (L2-L1)/L1*100 (%) when the initial length of the stretchable polymer film is L1 and the length at which breakage occurs by stretching it is L2.

As the elongation rate of the stretchable polymer film satisfies the above range, the elongation rate of the stretchable substrate having a structure in which the pattern layer is embedded later has a characteristic that can satisfy a specific range.

In an exemplary embodiment of the present application, the stretchable polymer film may be polydimethylsiloxane.

In an exemplary embodiment of the present application, the stretchable polymer film can be used without particular limitation as long as it satisfies the Young's modulus of Formula 1, and the stretchable polymer film includes a polydimethylsiloxane polymer material, and the polydimethylsiloxane polymer The material may be specifically selected from the group consisting of a condensation polymerization type polydimethylsiloxane, an addition polymerization type polydimethylsiloxane, and a radical polymerization type polydimethylsiloxane.

In an exemplary embodiment of the present application, an elongation of the stretchable substrate may be 10% or more.

In another exemplary embodiment, the elongation of the stretchable substrate may be 10% or more, preferably 15% or more, more preferably 20% or more, and may satisfy the range of 80% or less, preferably 70% or less. there is.

In the case of the stretchable substrate, the pattern layer has a structure in which the pattern layer is recessed into the stretchable polymer film, and even when the stretch rate of the stretchable substrate has the above range, there is a gap between the pattern layer and the stretchable polymer film and the pattern layer It is possible to manufacture a stretchable substrate in which disconnection does not occur.

In an exemplary embodiment of the present application, there is provided a stretchable substrate comprising a release film on one surface of the stretchable polymer film.

The release film is a layer for protecting a very thin stretchable polymer film and a pattern layer. It refers to a transparent layer attached to one side of the stretchable polymer film, and a film having excellent mechanical strength, thermal stability, moisture shielding property, isotropy, etc. can For example, acetate-based, polyester-based, polyethersulfone-based, polycarbonate-based, polyamide-based, polyimide-based, polyolefin-based, cycloolefin-based, polyurethane-based and acrylic resin films such as triacetylcellulose (TAC) may be used, but is not limited thereto if it is a commercially available fluorine-treated release film.

In an exemplary embodiment of the present application, the method comprising: preparing a carrier film; forming a conductive layer on one surface of the carrier film; forming an electrode support layer pattern on a surface opposite to the surface of the conductive layer in contact with the carrier film; etching the conductive layer; forming a stretchable polymer film on the surface of the carrier film on which the electrode support layer pattern and the etched conductive layer are formed; and removing the carrier film.

In the etching of the conductive layer, an etchant may be used, and the etchant may be an iron chloride-based copper etchant.

In the etching step, a method of forming the conductive layer to have a smaller width than the electrode support layer pattern may be controlled by adjusting the etching time. That is, as the etching time using the etchant increases in the step of etching the conductive layer, the etch rate increases, so that the width of the conductive pattern provided under the electrode support layer pattern decreases.

In the step of etching the conductive layer, by etching a width of the conductive layer smaller than that of the electrode support layer pattern, in a stretchable substrate manufactured later, at least one width of the electrode support layer pattern is at least one width of the electrode pattern It has the characteristics of being able to form larger.

As the carrier film, a copper foil having a release layer on one surface may be used.

The release layer is configured to lower the peel force between the carrier film and the conductive layer and is typically Cr, Ni, Co, Fe, Mo, Ti, W or P, or an alloy thereof or a hydrate thereof. and a commercially available release layer may be used.

In the exemplary embodiment of the present application, the conductive layer is not limited as long as it has conductivity, and may be, for example, a copper foil film.

The conductive layer may be formed on the surface with the release layer of the carrier film through electro plating and evaporation processes.

In the exemplary embodiment of the present application, the step of forming the electrode support layer pattern on the opposite surface of the surface of the conductive layer in contact with the carrier film may use a photolithography process.

In the exemplary embodiment of the present application, the peeling force at 23° C. and 50 RH% of the carrier film and the conductive layer in the step of removing the carrier film is 20 N/m or less. provides

In another exemplary embodiment, the peeling force between the carrier film and the conductive layer at 23° C. and 50 RH% is 20 N/m or less, preferably 18 N/m or less, more preferably 15 N/m or less. m or less.

In another exemplary embodiment, the peeling force between the carrier film and the conductive layer at 23° C. and 50 RH% may be 10 N/m or more.

As mentioned above, the stretchable substrate according to the present application is characterized in that the electrode support layer pattern and the electrode pattern each have a specific width, thereby preventing the loss of the electrode pattern in the transfer process, and in particular, in the manufacturing process, In the removal process of the carrier film, since the peel force between the carrier film and the conductive layer at 23° C. and 50 RH% satisfies the above range, the transfer rate of the pattern can be further improved, and thus the pattern The transfer rate has the characteristic of being able to maintain more than 99%.

In an exemplary embodiment of the present application, the stretchable substrate according to the present application; and an electronic device provided on the stretchable polymer film of the stretchable substrate, wherein the electronic device is formed on a position in which the electrode pattern of the stretchable substrate is depressed.

In the exemplary embodiment of the present application, the electronic device may be a display device, a touch panel, or a semiconductor panel.

In the exemplary embodiment of the present application, the electronic device may be selected from the group consisting of an organic photoelectric device, an organic transistor, an organic solar cell, an organic light emitting device, and a micro LED device.

When the electronic device according to the present application is used for a display device, it may include a stretchable display, and as the electronic device is formed on a position where the pattern layer of the stretchable substrate is recessed, even after repeated stretching and restoration Since it is possible to minimize the application of external force to the electronic device itself, it is possible to provide a display device having excellent stretchability and excellent durability.

Hereinafter, the present specification will be described in more detail through examples. However, the following examples are only for illustrating the present specification, and not for limiting the present specification.

< production example >

[ production example 1]- Preparation of electrode support layer pattern composition

It was prepared by mixing 90 parts by weight of a urethane acrylate oligomer (PU320, Miwon Specialty Chemicals), 9 parts by weight of polyethylene glycol diacrylate (PEG200DA, Miwon Specialty Chemicals), and 1 part by weight of a radical photoinitiator (Igacure 184, BASF). .

[ Example One]

As a carrier film, a carrier film having a release layer on one surface of a copper foil having a thickness of 18 μm was prepared. Copper is formed to a thickness of 3 μm as a conductive layer by electroplating on the surface with the release layer of the copper foil. After applying the electrode support layer pattern composition prepared in Preparation Example 1 on the upper portion of the copper layer by using the comma coating method, the Voronoi-type electrode support layer pattern having an average line width of 20 μm and an average height of 10 μm was formed through a photo process. to form The copper layer exposed on the upper part of the laminate provided with the electrode support layer pattern is removed using a ferric chloride-based copper etchant to form a Voronoi-type electrode pattern having an average line width of 12 μm and an average height of 3 μm.

KE-441K-T (Shinetsu), a polydimethylsiloxane as a stretchable polymer material, was applied to a thickness of 300 μm on the upper part of the laminate provided with the electrode support layer pattern and the electrode pattern, and then cured at room temperature for 24 hours and then cured at 100° C. It was heat-treated for an additional hour. The carrier film was removed from the laminate provided with the stretchable polymer film to prepare a stretchable substrate in which the electrode support layer pattern and the electrode pattern were embedded in one surface of the stretchable polymer film.

Young's modulus G1 (MPa) of stretchable polymer layer (KE-441K-T): 0.43

Young's modulus G2 (MPa) of electrode support layer pattern material: 150

G2/G1= 349

Line width of electrode support layer pattern - Line width of electrode pattern = 8 μm

1: Stretchable polymer film
2: electrode support layer pattern
3: electrode pattern
A: Width of electrode support layer pattern
B: width of electrode pattern
D: thickness of electrode pattern
E: thickness of the electrode support layer pattern

Claims (19)

a stretchable polymer film having a depression on at least one surface; and
a pattern layer provided in the recessed portion of the stretchable polymer film;
As a stretchable substrate comprising a,
The pattern layer has a laminated structure of an electrode support layer pattern and an electrode pattern,
At least one width of the electrode support layer pattern is greater than the width of at least one electrode pattern,
At least one surface of the electrode pattern has a structure exposed to the outside,
The Young's Modulus of the stretchable polymer film is G1,
The Young's Modulus of the electrode support layer pattern is G2,
Wherein G1 and G2 satisfy the following formulas 1 to 3,
[Equation 1]
0.1 MPa ≤ G1 ≤ 2 MPa
[Equation 2]
50 MPa ≤ G2 ≤ 1000 MPa
[Equation 3]
25 ≤G2/G1 ≤ 1000
The electrode support layer pattern includes a photocurable polymer material,
The photocurable polymer material includes at least one selected from the group consisting of urethane acrylate oligomers, epoxy acrylate oligomers, polyester acrylate oligomers, melamine acrylate oligomers and butadiene acrylate oligomers, and acrylate monomers having 2 or more acrylate functional groups. A stretchable substrate comprising one or more. delete The method according to claim 1,
The electrode support layer pattern is a wavy (wavy) pattern or Voronoi (voronoi) pattern is a stretchable substrate. The method according to claim 1,
The width of the electrode support layer pattern is 10 μm or more and 100 μm or less of the stretchable substrate. The method according to claim 1,
The thickness of the electrode support layer pattern is 5 μm or more and 100 μm or less of the stretchable substrate. The method according to claim 1,
The electrode pattern has a thickness of 2 μm or more and 20 μm or less. The method according to claim 1,
The width of the electrode pattern is 5 μm or more and 100 μm or less of the stretchable substrate. The method according to claim 1,
One surface of the electrode pattern has a structure exposed to the outside,
One surface of the electrode pattern exposed to the outside and one surface of the stretchable polymer film are positioned on the same plane as the stretchable substrate. The method according to claim 1,
The width of the electrode support layer pattern is A1, the width of the electrode pattern is A2,
A1 and A2 is a stretchable substrate that satisfies Equation 4 below.
[Equation 4]
5 μm ≤ A1-A2 ≤ 50 μm The method according to claim 1,
The electrode pattern is a stretchable substrate comprising at least one selected from the group consisting of Al, Ag and Cu. The method according to claim 1,
The stretchable substrate has a thickness of 100 μm or more and 1000 μm or less of the stretchable polymer film. The method according to claim 1,
The stretchable substrate having an elongation of 20% or more of the stretchable substrate. The method according to claim 1,
The stretchable polymer film is a stretchable substrate of polydimethylsiloxane (PDMS) having an elongation at break of 50% or more. The method according to claim 1,
A stretchable substrate comprising a release film provided on at least one surface of the stretchable polymer film. preparing a carrier film;
forming a conductive layer on one surface of the carrier film;
forming an electrode support layer pattern on a surface opposite to the surface of the conductive layer in contact with the carrier film;
etching the conductive layer;
forming a stretchable polymer film on the surface of the carrier film on which the electrode support layer pattern and the etched conductive layer are formed; and
removing the carrier film;
The Young's Modulus of the stretchable polymer film is G1,
The Young's Modulus of the electrode support layer pattern is G2,
Wherein G1 and G2 satisfy the following formulas 1 to 3,
[Equation 1]
0.1 MPa ≤ G1 ≤ 2 MPa
[Equation 2]
50 MPa ≤ G2 ≤ 1000 MPa
[Equation 3]
25 ≤G2/G1 ≤ 1000
The electrode support layer pattern includes a photocurable polymer material,
The photocurable polymer material includes at least one selected from the group consisting of urethane acrylate oligomers, epoxy acrylate oligomers, polyester acrylate oligomers, melamine acrylate oligomers and butadiene acrylate oligomers, and acrylate monomers having 2 or more acrylate functional groups. A method of manufacturing a stretchable substrate comprising at least one. 16. The method of claim 15,
Forming the electrode support layer pattern on the opposite surface of the surface of the conductive layer in contact with the carrier film is a method of manufacturing a stretchable substrate using a photolithography process. 16. The method of claim 15,
A method of manufacturing a stretchable substrate wherein the peeling force between the carrier film and the conductive layer in the step of removing the carrier film at 23° C. and 50 RH% is 20 N/m or less. The stretchable substrate according to any one of claims 1 and 3 to 14; and
an electronic device provided on the stretchable polymer film of the stretchable substrate;
An electronic device comprising:
and the electronic device is formed on a position in which the electrode pattern of the stretchable substrate is depressed. 19. The method of claim 18,
The electronic device is
An electronic device selected from the group consisting of an organic photoelectric device, an organic transistor, an organic solar cell, an organic light emitting device, and a micro LED device.

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