KR20200019417A - Stretchable substrate, method of same and electronic device comprising same - Google Patents

Abstract

The present invention relates to a stretchable substrate with increased durability, a manufacturing method thereof, and an electronic device including the same. According to the present invention, the stretchable substrate comprises: a stretchable polymer film having a recessed part on at least one surface; and a pattern layer provided in the recessed part of the stretchable polymer film.

Description

Flexible substrate, method for manufacturing same, and electronic device including same {STRETCHABLE SUBSTRATE

The present specification describes a flexible substrate, a method of manufacturing the same, and an electronic device including the same.

Conventionally, display devices include an unbreakable display, a curved display, a curved display, a foldable display, a rollable display, and the like. Has been developed.

The current commercialization stage is about the mobile field in the form of bent displays, and the mobile field using the collapsible display is expected to emerge in earnest. In addition, the development speed of electric field using pOLED is also outstanding.

In particular, recently, stretchable displays have been developed that have characteristics beyond the characteristics of the display which can be wound according to the paradigm change of the display, and stretchable displays need to be easily stretched and shrunk regardless of orientation. It is essential to develop a flexible substrate having high elongation and resilience.

In the case of a stretchable display device including an electronic device such as an organic light emitting device, a separate electrode pattern must be provided on the stretchable substrate to electrically connect the electronic device. However, in the case of the conventional metal electrode pattern, there is a problem that the durability of the electrode pattern is greatly reduced due to the change in the surface area according to the stretching of the stretchable substrate because the flexibility is not included.

It is proposed to be applied to the display of stretchable display as a wearable display and a medical display, starting with a touch screen panel. .

According to the necessity as described above, in forming an electronic device on a stretchable substrate, it is possible to maintain the durability of the electronic device and to develop a stretchable substrate having excellent stretchability.

Japanese Patent Publication No. 2006-299283

The present specification is to provide a flexible substrate, a method of manufacturing the same and an electronic device including the same.

An exemplary embodiment of the present application is a stretchable polymer film having a depression on at least one surface; And a pattern layer provided in the depression of the stretchable polymer film, wherein the pattern layer is a laminated structure of an electrode support layer pattern and an electrode pattern, and at least one width of the electrode support layer pattern is It provides a stretchable substrate having a width greater than at least one and at least one surface of the electrode pattern is exposed to the outside.

In addition, an exemplary embodiment of the present application comprises the steps of preparing a carrier film; Forming a conductive layer on one surface of the carrier film; Forming an electrode support layer pattern on a surface opposite to a surface of the conductive layer in contact with the carrier film; Etching the conductive layer; Forming a stretchable polymer film on a surface on which the electrode support layer pattern and the etched conductive layer of the carrier film are formed; And it provides a method for producing a stretchable substrate comprising the step of removing the carrier film.

Finally, one embodiment of the present application is a stretchable substrate according to the present application; And an electronic device provided on the stretchable polymer film of the stretchable substrate, wherein the electronic device is formed on a location where the electrode pattern of the stretchable substrate is recessed.

The stretchable substrate according to the exemplary embodiment of the present application has a structure in which an electrode support layer pattern and an electrode pattern are provided in a recessed portion of the stretchable polymer film. Damage can be minimized, and thus durability is greatly increased.

In addition, the stretchable substrate according to the present application is provided with an electrode support layer pattern and an electrode pattern in the depression of the stretchable polymer film, and the width of the electrode support layer pattern has a shape larger than the width of the electrode pattern, In the manufacturing process, the transfer rate of the electrode pattern is greatly improved to have a feature that can prevent the loss of the electrode pattern.

In addition, the stretchable substrate according to the present application has a structure in which the electrode support layer pattern is embedded into the inside of the stretchable polymer film, and at least one surface of the electrode pattern is exposed to the outside, thereby forming a gap between the stretchable polymer film and the electrode support layer pattern. It is characterized by minimizing the separation at the boundary.

1 is a side view showing a stretchable substrate according to an exemplary embodiment of the present application.
2 is a side view showing a laminated structure of a pattern layer according to an exemplary embodiment of the present application.
3 is a side view illustrating a stretchable substrate according to an exemplary embodiment of the present application.

Hereinafter, this specification is demonstrated in detail.

Embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

An exemplary embodiment of the present application is a stretchable polymer film having a depression on at least one surface; And a pattern layer provided in the depression of the stretchable polymer film, wherein the pattern layer is a laminated structure of an electrode support layer pattern and an electrode pattern, and at least one width of the electrode support layer pattern is It provides a stretchable substrate having a width greater than at least one and at least one surface of the electrode pattern is exposed to the outside.

The stretchable substrate according to the exemplary embodiment of the present application has a structure in which an electrode support layer pattern and an electrode pattern are provided in a recessed portion of the stretchable polymer film. Damage can be minimized, and thus durability is greatly increased.

In addition, the stretchable substrate according to the present application is provided with an electrode support layer pattern and an electrode pattern in the depression of the stretchable polymer film, and the width of the electrode support layer pattern has a shape larger than the width of the electrode pattern, In the manufacturing process, the transfer rate of the electrode pattern is greatly improved to have a feature that can prevent the loss of the electrode pattern.

In an exemplary embodiment of the present application, one surface of the electrode pattern has a structure exposed to the outside, one surface of the electrode pattern and the one surface of the stretchable polymer film exposed to the outside is located on the same plane to provide.

In an exemplary embodiment of the present application, at least one surface of the electrode pattern is a structure exposed to the outside means that one surface of the exposed electrode pattern does not contact the stretchable polymer film.

An exemplary embodiment of the stretchable substrate may include a recessed portion on at least one surface of the stretchable polymer film, and includes a pattern layer in the recessed portion, wherein the pattern layer is a laminated structure of an electrode support layer pattern and an electrode pattern, and the electrode support layer pattern The width of is greater than the width of the electrode pattern, at least one side of the electrode pattern has a structure exposed to the outside, it can be seen more clearly in the structure of the side view of the flexible substrate in FIG.

In one embodiment of the present application, the pattern layer is a laminated structure of the electrode support layer pattern and the electrode pattern, as can be seen in Figure 2, the width (A) of the electrode support layer pattern than the width of the electrode pattern (B) You can see big.

In an exemplary embodiment of the present application, the Young's Modulus of the stretchable polymer film is G1, the Young's Modulus of the electrode support layer pattern is G2, and the G1 and G2 satisfy the following Equations 1 to 3 It provides a stretchable substrate.

[Equation 1]

0.1 MPa ≤ G1 ≤ 2 MPa

[Equation 2]

50 MPa ≤ G2 ≤ 1000 MPa

[Equation 3]

25 ≤G2 / G1 ≤ 1000

The Young's modulus of the stretchable polymer film and the electrode support layer pattern may be measured using Zwick / Roell UTM equipment. Specifically, the stretchable polymer film and the electrode support layer in the form of a film may be 25 ± 2 ° C. and 50 ± 5% RH ( Under relative humidity), both ends of the longitudinal direction are fixed to 25 mm in width and 165 mm in length, and then stretched in both directions in the longitudinal direction at a speed of 100 mm / min and measured using Zwick / Roell UTM equipment.

In an exemplary embodiment of the present application, Equation 1 is 0.1 MPa ≤ G1 ≤ 2 MPa, preferably 0.1 MPa ≤ G1 ≤ 1 MPa, more preferably 0.1 MPa ≤ G1 ≤ 0.5 MPa.

In an exemplary embodiment of the present application, Equation 2 is 50 MPa ≤ G2 ≤ 1000 MPa, preferably 50 MPa ≤ G1 ≤ 1000 MPa, more preferably 100 MPa ≤ G1 ≤ 500 MPa.

As the stretchable substrate satisfies the ranges of Equations 1 and 2, when the stretchable substrate is uniaxially stretched, no separation occurs at an interface between the electrode support layer pattern and the stretchable polymer film. This can have excellent characteristics.

In the exemplary embodiment of the present application, Equation 3 is 25 ≦ G2 / G1 ≦ 1000, preferably 20 ≦ G2 / G1 ≦ 500, and more preferably 50 ≦ G2 / G1 ≦ 500.

As the stretchable substrate satisfies the above range with the ratio of the stretchable polymer film and the electrode support layer pattern Young's modulus as shown in Equation 3 above, the stretchable substrate has excellent elongation and excellent durability.

In an exemplary embodiment of the present application, the electrode support layer pattern provides a stretchable substrate that is a wavy pattern or a voronoi pattern.

The electrode support layer pattern is a pattern for connecting an electronic device in an electronic device in the future. In order to prevent disconnection of the electrode support layer pattern when the stretchable substrate is stretched, two or more wavy patterns or bores spaced apart in the stretchable polymer film are provided. The Voronoi pattern may have a recessed structure.

The electrode support layer pattern has a structure in which two or more wavy patterns or Voronoi patterns spaced apart in the stretchable polymer film are recessed, and the electrode support layer patterns are recessed inside at regular intervals. The electrode support layer pattern may include all of the structures recessed therein at irregular intervals.

When the electrode support layer pattern has a wavy pattern or a Voronoi pattern, when the stretchable substrate is uniaxially stretched, the stress value applied to the electrode support layer pattern may be minimized, so that the electrode It will have a feature that can prevent the disconnection phenomenon of the support layer pattern.

1 is a side view of the stretchable substrate according to the exemplary embodiment of the present application, and the structure in which the electrode support layer pattern 2 is recessed into the recessed portion of the stretchable polymer film 1 may be confirmed.

In one embodiment of the present application, the electrode support layer pattern may have a polygonal cross section in the width direction of the electrode support layer pattern.

In one embodiment of the present application, the electrode support layer pattern may be any one selected from the group consisting of circular, triangular, square, pentagonal and hexagonal cross sections in the width direction of the electrode support layer pattern.

In another exemplary embodiment, the electrode support layer pattern may have a rectangular cross section in the width direction of the electrode support layer pattern.

In an exemplary embodiment of the present application, the width of the electrode support layer pattern provides a stretchable substrate that is 10 μm or more and 100 μm or less.

In another exemplary embodiment, the width of the electrode support layer pattern may be 10 μm or more and 100 μm or less, preferably 10 μm or more and 95 μm or less, more preferably 15 μm or more and 90 μm or less.

When the width of the electrode support layer pattern satisfies the above range, a stress value applied to the electrode support layer pattern may be minimized when the stretchable substrate is uniaxially stretched to prevent disconnection of the electrode support layer pattern. It has the characteristics to do it.

In an exemplary embodiment of the present application, the thickness of the electrode support layer pattern provides a stretchable substrate that is 5 μm or more and 100 μm or less.

The thickness of the electrode support layer pattern means a height in a direction perpendicular to the width direction of the electrode support layer pattern, which can be confirmed in detail in FIG. 3. 3 is a side view of the stretchable substrate according to the present application, and the width A of the electrode support layer pattern can be confirmed, and the thickness E of the electrode support layer pattern is confirmed to be perpendicular to the width direction of the electrode support layer pattern. Can be.

When the thickness of the electrode support layer pattern satisfies the range, disconnection of the electrode support layer pattern may be prevented when the stretchable substrate is stretched, and the thickness of the stretchable substrate may be reduced, and the electrode support layer pattern and the electrode may be formed. In order to embed the pattern, the stretchable polymer film may have a property of preventing an excessive increase in thickness.

In one embodiment of the present application, the electrode pattern provides a stretchable substrate comprising one or more selected from the group consisting of Al, Ag and Cu.

In another exemplary embodiment, the electrode pattern may include Cu.

In an exemplary embodiment of the present application, the electrode pattern provides a stretchable substrate that is a Wavey pattern or a Voronoi pattern.

When the electrode pattern has a wavy pattern or a Voronoi pattern, the stress applied to the electrode pattern when the uniaxially stretched stretchable substrate is minimized to prevent the disconnection of the electrode pattern. Have

In one embodiment of the present application, the width of the electrode pattern provides a stretchable substrate that is 5 μm or more and 100 μm or less.

In another exemplary embodiment, the width of the electrode pattern may be 5 μm or more and 100 μm or less, preferably 5 μm or more and 50 μm or less, more preferably 10 μm or more and 25 μm or less.

In one embodiment of the present application, the thickness of the electrode pattern provides a stretchable substrate that is 2 μm or more and 20 μm or less.

In another exemplary embodiment, the electrode pattern may have a thickness of 2 μm or more and 20 μm or less, preferably 5 μm or more and 20 μm or less, more preferably 5 μm or more and 10 μm or less.

When the width and thickness of the electrode pattern satisfies the above range, disconnection of the electrode pattern does not occur when the stretchable substrate is uniaxially stretched to have excellent durability, and a suitable time required for a normal metal etching process and Since the concentration of the etchant can be appropriately formed, it is possible to easily form an electrode pattern having excellent line uniformity.

The thickness of the electrode pattern means a height in a direction perpendicular to the width direction of the electrode pattern, specifically, it can be confirmed in FIG. 3 is a side view of the stretchable substrate according to the present application, and the width B of the electrode pattern may be confirmed, and the thickness D of the electrode pattern may be confirmed to be perpendicular to the width direction of the electrode support layer pattern. .

In an exemplary embodiment of the present application, the width of the electrode pattern satisfies the above range, and the width of the electrode support layer pattern is formed to be larger than the width of the electrode pattern, so that in the manufacturing process of the stretchable substrate, The transfer characteristic is increased, and thus, the omission of a pattern is prevented, and thus the characteristic of forming an excellent stretchable substrate is obtained.

Specifically, in the exemplary embodiment of the present application, a width of the electrode support layer pattern is A1, a width of the electrode pattern is A2, and A1 and A2 provide a stretchable substrate that satisfies Equation 4 below.

[Equation 4]

5 μm ≤ A1-A2 ≤ 50 μm

When the width A1 of the electrode support layer pattern and the width A2 of the electrode pattern satisfy the range of Equation 4, the transfer characteristic of the pattern is excellent.

In an exemplary embodiment of the present application, in the surface in contact with the electrode pattern of the electrode support layer pattern, the surface of the electrode support layer pattern does not contact the electrode pattern is surrounded by the stretchable polymer film, the stretchable polymer film The width of the enclosed portion provides a stretchable substrate that is 5 μm or more and 50 μm or less in the width direction of the electrode support layer pattern.

In another exemplary embodiment, the width of the portion surrounded by the stretchable polymer film is 5 μm or more and 50 μm or less, preferably 5 μm or more and 30 μm or less, more preferably 5 μm or more in the width direction of the non-elastic pattern. Or 20 μm or less.

The surface where the electrode support layer pattern is not in contact with the electrode pattern is surrounded by the stretchable polymer film, and the width of the portion surrounded by the stretchable polymer film means that the portions not in contact with the electrode pattern of the electrode support layer pattern are all It means that it is surrounded by the stretchable polymer film, and in this case, it means the width of the portion surrounded by the stretchable polymer film.

Since the width of the portion of the electrode support layer pattern surrounded by the stretchable polymer film has the above range, the loss of the electrode support layer pattern and the electrode pattern during the manufacturing process of the stretchable substrate can be prevented, and the stretchable polymer film and the It is characterized by minimizing the separation at the boundary between the electrode support layer pattern.

In one embodiment of the present application, the thickness of the stretchable polymer film may be 100 μm or more and 1000 μm or less.

In another exemplary embodiment, the stretchable polymer film may have a thickness of 100 μm or more and 1000 μm or less, preferably 100 μm or more and 700 μm or less, more preferably 200 μm or more and 500 μm or less.

As the stretchable polymer film satisfies the thickness range, the stretch rate of the stretchable substrate of the present application is excellent, and having the thickness range, the breakage does not occur with respect to the high stretching force.

In one embodiment of the present application, the electrode support layer pattern is not particularly limited as long as it satisfies the Young's modulus of Equation 2, the electrode support layer pattern includes a photocurable polymer material, the photocurable polymer material is And at least one selected from the group consisting of urethane acrylate oligomers, epoxy acrylate oligomers, polyester acrylate oligomers, melamine acrylate oligomers and butadiene acrylate oligomers, and at least one acrylate monomer having two or more acrylate functional groups.

In one embodiment of the present application, the electrode support layer pattern is characterized in that it comprises a radical photoinitiator.

In one embodiment of the present application, the stretchable polymer film provides a stretchable substrate which is polydimethylsiloxane (PDMS) having an elongation at break of 50% or more.

In another exemplary embodiment, the elongation at break of the stretchable polymer film may be 50% or more, preferably 40% or more, and more preferably 35% or more.

In another exemplary embodiment, the elongation at break of the stretchable polymer film may be 100% or less, preferably 110% or less.

The elongation at break of the stretchable polymer film means (L2-L1) / L1 * 100 (%) when the initial length of the stretchable polymer film is L1, and the length at which breakage occurs by drawing is L2.

As the stretch ratio of the stretchable polymer film satisfies the above range, the stretch ratio of the stretchable substrate having a pattern layer embedded therein may satisfy a specific range.

In one embodiment of the present application, the stretchable polymer film may be polydimethylsiloxane.

In one embodiment of the present application, the stretchable polymer film is not particularly limited as long as it satisfies the Young's modulus of Equation 1, the stretchable polymer film includes a polydimethylsiloxane polymer material, the polydimethylsiloxane polymer The material may be specifically selected from the group consisting of condensation polymerized polydimethylsiloxane, addition polymerized polydimethylsiloxane and radical polymerized polydimethylsiloxane.

In one embodiment of the present application, the stretch rate of the stretchable substrate may be 10% or more.

In another exemplary embodiment, the stretchability of the stretchable substrate may be 10% or more, preferably 15% or more, more preferably 20% or more, and may satisfy 80% or less, preferably 70% or less. have.

In the case of the stretchable substrate, the pattern layer has a structure recessed into the inside of the stretchable polymer film, and even if the stretch rate of the stretchable substrate has the above range, the space between the pattern layer and the stretchable polymer film and the pattern layer The flexible substrate which does not generate the disconnection of can be manufactured.

In one embodiment of the present application, to provide a stretchable substrate comprising a release film on one surface of the stretchable polymer film.

The release film is a layer for protecting a very thin stretchable polymer film and a pattern layer, and refers to a transparent layer attached to one surface of the stretchable polymer film, and a film having excellent mechanical strength, thermal stability, moisture shielding, and isotropy may be used. Can be. For example, acetate type, such as triacetyl cellulose (TAC), polyester type, polyether sulfone type, polycarbonate type, polyamide type, polyimide type, polyolefin type, cycloolefin type, polyurethane type and acrylic resin film, etc. Although may be used, if the commercially available fluorine-treated release film is not limited thereto.

In one embodiment of the present application, preparing a carrier film; Forming a conductive layer on one surface of the carrier film; Forming an electrode support layer pattern on a surface opposite to a surface of the conductive layer in contact with the carrier film; Etching the conductive layer; Forming a stretchable polymer film on a surface on which the electrode support layer pattern and the etched conductive layer of the carrier film are formed; And it provides a method for producing a stretchable substrate comprising the step of removing the carrier film.

The etching of the conductive layer may use an etching solution, and the etching solution may use an iron chloride-based copper etching solution.

In the etching step, a method of forming a smaller width of the conductive layer than the electrode support layer pattern may be controlled by adjusting an etching time. That is, as the etching time using the etchant increases in the etching of the conductive layer, the etching rate is increased, thereby reducing the width of the conductive pattern provided under the electrode support layer pattern.

In the etching of the conductive layer, the width of the conductive layer is smaller than that of the electrode support layer pattern, so that at least one width of the electrode support layer pattern may be at least one width of the electrode pattern. It has a feature that can be made larger.

As said carrier film, the copper foil with which the peeling layer was provided in one surface can be used.

The release layer is configured to lower the peel force between the carrier film and the conductive layer, and is typically Cr, Ni, Co, Fe, Mo, Ti, W, or P, or any one of these alloys or hydrates thereof. And a commercially available release layer may be used.

In one embodiment of the present application, the conductive layer is not limited as long as the conductive layer, for example, may be a copper foil film.

The conductive layer may be formed on the surface with the release layer of the carrier film through an electroplating process and an evaporation process.

In an exemplary embodiment of the present application, the forming of the electrode support layer pattern on the opposite surface of the conductive layer in contact with the carrier film may use a photolithography process.

In an exemplary embodiment of the present application, the peeling force at 23 ° C. and 50 RH% of the carrier film and the conductive layer in the step of removing the carrier film is 20 N / m or less. To provide.

In another exemplary embodiment, the peeling force at 23 ° C. and 50 RH% of the carrier film and the conductive layer is 20 N / m or less, preferably 18 N / m or less, more preferably 15 N / may be m or less.

In another exemplary embodiment, the peel force at 23 ° C. and 50 RH% of the carrier film and the conductive layer may be 10 N / m or more.

The stretchable substrate according to the present application is characterized in that, as mentioned above, the electrode support layer pattern and the electrode pattern have specific widths, thereby preventing loss of the electrode pattern in the transfer process. In the step of removing the carrier film, since the peel force at 23 ° C. and 50 RH% of the carrier film and the conductive layer satisfies the above range, the transfer rate of the pattern can be further improved, and thus the pattern The transfer rate is characterized by being able to maintain 99% or more.

In one embodiment of the present application, the flexible substrate according to the present application; And an electronic device provided on the stretchable polymer film of the stretchable substrate, wherein the electronic device is formed on a location where the electrode pattern of the stretchable substrate is recessed.

In an exemplary embodiment of the present application, the electronic device may be a display device, a touch panel, or a semiconductor panel.

In an exemplary embodiment of the present application, the electronic device may be selected from the group consisting of an organic photoelectric device, an organic transistor, an organic solar cell, an organic light emitting device, and a micro LED device.

When the electronic device according to the present application is used for a display device, the display device may include a display having elasticity, and as the electronic device is formed on a position where the pattern layer of the stretchable substrate is recessed, the stretching and rewinding are repeated. Since external force is applied to the electronic device itself, it is possible to provide a display device having excellent stretch force and excellent durability.

Hereinafter, the present specification will be described in more detail with reference to Examples. However, the following examples are merely to illustrate the present specification, but not to limit the present specification.

< Production Example >

[ Production Example  1]-Preparation of Electrode Support Layer Pattern Composition

90 parts by weight of a urethane acrylate oligomer (PU320, Miwon Specialty Chemical Co., Ltd.), 9 parts by weight of polyethylene glycol diacrylate (PEG200DA, Miwon Specialty Chemical Co., Ltd.) and 1 part by weight of radical photoinitiator (Igacure 184, BASF Co.) were prepared. .

[ Example  One]

As a carrier film, the carrier film in which the peeling layer was provided in the copper foil of 18 micrometers thickness was prepared. Copper is formed to a thickness of 3 μm as a conductive layer on the surface with a peeling layer with the copper foil by using electrolytic plating. After applying the electrode support layer pattern composition prepared in Preparation Example 1 by using a comma coating method on the copper layer, a Voronoi type electrode support layer pattern having an average line width of 20 μm and an average sentence size of 10 μm was applied through a photo process. Form. The copper layer exposed on the laminate having the electrode support layer pattern is removed using a ferric chloride copper etchant to form a Voronoi electrode pattern having an average line width of 12 μm and an average line height of 3 μm.

After applying the polydimethylsiloxane KE-441K-T (Shinetsu) as a stretchable polymer material to the electrode support layer pattern and the laminate provided with the electrode pattern to a thickness of 300 μm and curing at room temperature for 24 hours at 100 ℃ Heat treatment was further performed for 1 hour. The carrier film was removed from the laminate provided with the stretchable polymer film to prepare a stretchable substrate having the electrode support layer pattern and the electrode pattern embedded on one surface of the stretchable polymer film.

Young's Modulus G1 (MPa) of the stretchable polymer layer (KE-441K-T): 0.43

Young's modulus G2 (MPa) of electrode support layer pattern material: 150

G2 / G1 = 349

Line width of electrode support layer pattern-line width of electrode pattern = 8 μm

1: stretchable polymer film
2: electrode support layer pattern
3: electrode pattern
A: width of the electrode support layer pattern
B: width of electrode pattern
D: thickness of electrode pattern
E: thickness of the electrode support layer pattern

Claims (19)

Stretchable polymer film having a depression on at least one side; And
A pattern layer provided in the depression of the stretchable polymer film;
As a flexible substrate comprising a,
The pattern layer is a laminated structure of the electrode support layer pattern and the electrode pattern,
At least one width of the electrode support layer pattern is greater than at least one width of the electrode pattern,
At least one surface of the electrode pattern is a flexible substrate that is exposed to the outside structure. The method according to claim 1,
Young's Modulus of the stretchable polymer film is G1,
The Young's Modulus of the electrode support layer pattern is G2,
Wherein the G1 and G2 satisfy the following Formulas 1 to 3:
[Equation 1]
0.1 MPa ≤ G1 ≤ 2 MPa
[Equation 2]
50 MPa ≤ G2 ≤ 1000 MPa
[Equation 3]
25 ≤G2 / G1 ≤ 1000 The method according to claim 1,
The electrode support layer pattern is a stretchable substrate that is a wavy pattern or voronoi pattern. The method according to claim 1,
A stretchable substrate having a width of the electrode support layer pattern of 10 μm or more and 100 μm or less. The method according to claim 1,
The electrode support layer pattern has a thickness of 5 μm or more and 100 μm or less. The method according to claim 1,
The electrode substrate has a thickness of 2 μm or more and 20 μm or less. The method according to claim 1,
The electrode substrate has a width of 5 μm or more and 100 μm or less. The method according to claim 1,
One surface of the electrode pattern is a structure exposed to the outside,
One side of the electrode pattern exposed to the outside and one side of the stretchable polymer film is positioned on the same plane. The method according to claim 1,
The width of the electrode support layer pattern is A1, the width of the electrode pattern is A2,
The A1 and A2 is a flexible substrate that satisfies the following formula 4.
[Equation 4]
5 μm ≤ A1-A2 ≤ 50 μm The method according to claim 1,
The electrode pattern is a stretchable substrate comprising one or more selected from the group consisting of Al, Ag and Cu. The method according to claim 1,
The stretchable polymer film has a thickness of 100 μm or more and 1000 μm or less. The method according to claim 1,
The stretchable substrate, the stretchable substrate is 20% or more. The method according to claim 1,
The stretchable polymer film is a stretchable substrate that is polydimethylsiloxane (PDMS) having an elongation at break of 50% or more. The method according to claim 1,
Stretchable substrate comprising a release film provided on at least one side of the stretchable polymer film. Preparing a carrier film;
Forming a conductive layer on one surface of the carrier film;
Forming an electrode support layer pattern on a surface opposite to a surface of the conductive layer in contact with the carrier film;
Etching the conductive layer;
Forming a stretchable polymer film on a surface on which the electrode support layer pattern and the etched conductive layer of the carrier film are formed; And
Removing the carrier film. The method according to claim 15,
And forming an electrode support layer pattern on a surface opposite to a surface of the conductive layer in contact with the carrier film, using a photolithography process. The method according to claim 15,
And a peel force at 23 ° C. and 50 RH% of the carrier film and the conductive layer in the step of removing the carrier film is 20 N / m or less. The flexible substrate according to any one of claims 1 to 13; And
An electronic device provided on the stretchable polymer film of the stretchable substrate;
As an electronic device that includes,
The electronic device is formed on a position where the electrode pattern of the stretchable substrate is recessed. The method according to claim 18,
The electronic device,
And an organic photoelectric device, an organic transistor, an organic solar cell, an organic light emitting device, and a micro LED device.

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