KR102345565B1 - Apparatus for inspecting mask - Google Patents

Abstract

The present invention provides a mask inspection device comprising: a conveying device having a conveying belt rotated by at least two driving rollers so that a mask can be conveyed in multiple rows along one direction; an imaging device disposed in the middle of the moving direction of the conveying device and disposed in a number corresponding to the number of rows of the mask in order to acquire photographing information for one surface of the mask; and a suction device disposed on a downstream side of the imaging device and configured to selectively adsorb a defective mask among the masks, thereby capable of increasing the accuracy and inspection efficiency of mask inspection by using multi-vision.

Description

Mask inspection device {APPARATUS FOR INSPECTING MASK}

The present invention relates to a mask inspection apparatus, and more particularly, to a mask inspection apparatus capable of increasing mask inspection accuracy and inspection efficiency.

Recently, as the consumption of masks worldwide increases exponentially due to the coronavirus (Covid-19), the production and sales of masks are also continuously increasing.

It is manufactured through an automated mask manufacturing facility for mass production of masks. The mask manufacturing facility includes a fabric supply device that supplies a mask fabric for making a mask body, a mask forming device that laminates and molds the mask fabric to make a mask body, , a band attachment device for attaching the band to the mask body.

In the automated production of masks, after manufacturing a mask by attaching a band to the mask body, an inspection process of inspecting whether the mask is defective before packaging the mask is required.

That is, the manufactured mask is subjected to an inspection process for the state of attaching the band before packaging. At this time, in the band attachment state inspection, it is checked whether the band is firmly attached to the mask body. In this inspection process, good and defective products are sorted, and defective products are discarded.

Accordingly, although mask inspection is performed using various devices, the accuracy and efficiency of the mask inspection are deteriorated, and there are problems in that the inspection time is long.

Korea Registered Patent 10-2212778 (2021.02.04. Announcement) Korea Registered Patent 10-2222529 (2021.03.04. Announcement)

The present invention has been devised to solve the above problems, and it is an object of the present invention to provide a mask inspection apparatus that implements an image-based mask defect inspection apparatus, but can increase the accuracy and inspection efficiency of mask inspection by using multi-vision have.

The mask inspection device according to an embodiment of the present invention is a transport device having a transport belt rotated by at least two driving rollers so that the mask can be transported in multiple rows along one direction, disposed in the middle of the moving direction of the transport device, In order to acquire photographing information for one surface of the mask, an imaging device is disposed in a number corresponding to the number of columns of the mask, and a suction device disposed on a downstream side of the imaging device, for selectively adsorbing defective masks among the masks may include

The adsorption device includes two adsorption ports for adsorbing each mask by supporting two points along the length direction of the mask, and may adsorb the selected defective mask using the adsorption ports.

and a slider sliding along the width direction of the conveying device, wherein the adsorption device may reciprocate along the upper side of the conveying device and the outer side along the width direction of the conveying device by the slider.

The adsorption device may include a plurality of jig members extending in the longitudinal direction of the mask, the plurality of jig members being formed along the width direction of the transport device, and the adsorption port may be formed along the longitudinal direction of the jig member.

Each of the adsorption ports of the adsorption device may be in communication with a vacuum suction device, and vacuum suction may be performed on an adsorption port in which a defective mask is located among the plurality of adsorption ports.

A driving cylinder reciprocating by connecting a pair of outer jig members disposed on both outermost sides along the width direction of the transfer device among the plurality of jig members is provided;

A plurality of inner jig members disposed inside the outer jig member are coupled to a guide member connecting adjacent jig members along each width direction, and linear movement of the jig member along the width direction of each guide member can be guided by

A accommodating member having a space to accommodate the mask selected as defective is disposed adjacent to the periphery in the width direction of the transfer device, and the defective mask falling from the slider may be collected by the accommodating member.

The mask inspection apparatus made as described above converts the masks produced in two lines into one and uses multi-vision at the same time, so that not only the accuracy of the defect inspection but also the efficiency can be increased.

In addition, by using multi-vision, even if one side of the equipment fails unexpectedly, the production system can be continuously operated through the other side of the production equipment.

1 is a front view showing a mask inspection apparatus according to an embodiment of the present invention.
FIG. 2 is a plan view of FIG. 1 .
3 is an enlarged view of part A of FIG. 2 .
4 is a plan view showing a state in which the slider is slid toward the selection box in the state of FIG. 2 .
5 is a side view illustrating a state in which a photographing member of the mask inspection apparatus is positioned on a mask according to an embodiment of the present invention.
6 to 9 are side views illustrating a process in which the adsorption member of the mask inspection apparatus according to an embodiment of the present invention adsorbs a defective mask and transfers the defective mask to the receiving member.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only the present embodiments allow the disclosure of the present invention to be complete, and those of ordinary skill in the art to which the present invention pertains. It is provided to fully understand the scope of the present invention to those skilled in the art, and the present invention is only defined by the scope of the claims.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other components in addition to the stated components. Like reference numerals refer to like elements throughout, and "and/or" includes each and every combination of one or more of the recited elements. Although "first", "second", etc. are used to describe various elements, these elements are not limited by these terms, of course. These terms are only used to distinguish one component from another. Accordingly, it goes without saying that the first component mentioned below may be the second component within the spirit of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used herein will have the meaning commonly understood by those of ordinary skill in the art to which this invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless specifically defined explicitly.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc. It can be used to easily describe the correlation between a component and other components. Spatially relative terms should be understood as terms including different directions of components during use or operation in addition to the directions shown in the drawings. For example, when a component shown in the drawing is turned over, a component described as “beneath” or “beneath” of another component may be placed “above” of the other component. can Accordingly, the exemplary term “below” may include both directions below and above. Components may also be oriented in other orientations, and thus spatially relative terms may be interpreted according to orientation.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a front view showing a mask inspection apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1 , FIG. 3 is an enlarged view of part A of FIG. 2 , and FIG. 4 is in the state of FIG. It is a plan view showing the state in which the slider is slid toward the sorting box.

1 to 4 , the mask inspection apparatus according to an embodiment of the present invention may include a transfer apparatus 100 , an imaging apparatus 200 , and an adsorption apparatus 300 .

The transport device 100 is rotated while maintaining tension by at least a pair of driving rollers 110 and driving rollers 110 rotatably disposed at both ends along the longitudinal direction to transport the mask M in one direction. It may include a conveying belt 120 for

That is, the transport belt 120 is rotated by the rotational friction force of the pair of driving rollers 110 , and the mask M placed on the transport belt 120 is transported along one direction.

The masks M, for example, may be arranged in four rows along the longitudinal direction of the transport belt 120 . Considering the width of the transport belt 120 or the width of the masks M of various sizes, since the masks M can be applied in an arrangement of less than four rows or an arrangement of four or more, the number of arrays of the masks M is accordingly not limited

In addition, when the masks M are arranged in four rows along the longitudinal direction of the transfer belt 120 , four imaging devices 200 may be arranged to select the defective masks M .

Here, when the number of masks M is arranged in four or more columns, of course, the number of imaging devices 200 may also be arranged in four or more so as to correspond to the number of columns of the mask M.

The imaging device 200 is a configuration for determining whether the mask is defective or not, and includes, for example, a multi-vision module, an image processing module, an acceleration module, and a monitoring module. can do.

It is possible to simultaneously acquire mask image data from the multi-vision module and to be equipped with a high-speed frame grabber, a well-known technology in consideration of performance indicators.

The image processing module may be equipped with a feature point extraction algorithm, an adaptive edge detection algorithm, and a visual singularity detection algorithm for determining the attachment state of the mask hanger and linear/standard foreign objects.

In the case of the acceleration module, a GPU (Graphic Processing Unit)-based arithmetic acceleration technology and FPGA (Field Programmable Gate Arraty)-based arithmetic acceleration technology for accelerating an image processing algorithm requiring an excessive amount of computation may be loaded.

The configuration required for determining the attachment state of the mask hanger is as follows.

A multi-vision-based feature extraction algorithm and a multi-vision-based adaptive edge detection algorithm may be required.

In the case of the above-described feature extraction algorithm, firstly, an algorithm of edge detection series such as Harris Corner Detector (HCD), Shi-Tomasi Corner Detector (STCD), and Features from Accelerated Segment Test (FAST), which are currently known technologies, may be considered.

In addition, improved feature point extraction algorithms such as Scale Invariant Feature Transform (SIFT) and Speeded Up Robust Features (SURF) may be considered.

In the case of an edge detection algorithm, a linear component extraction algorithm using a Hough transform may be considered. In addition, a Canny edge detection algorithm can be considered to extract more general edge components.

The imaging device 200 may be equipped with a GUI application such as Blynk as a remote workstation capable of monitoring the mask defect inspection status in real time.

In addition, the image information acquired through the imaging device 200 includes the number of inspected masks, the number of masks during inspection, the number of normal masks, the number of defective masks attached to the hook, the number of masks including linear foreign materials, the number of masks including stereotyped foreign materials, or the total defective rate, etc. may be included.

The adsorption device 300 may be disposed downstream of the imaging device 200 along the transport direction of the transport device 100 . In the adsorption device 300 , when a defective mask is identified according to the information acquired from the imaging device 200 , vacuum pressure is applied through the adsorption port 311 positioned in the corresponding row and column.

In this case, the adsorption device 300 may include two adsorption ports 311 for adsorbing by supporting two points along the longitudinal direction of the mask M per one mask M. To this end, each of the adsorption ports 311 may communicate with a vacuum generator (not shown) through a hose member (not shown).

In addition, in order to stably adsorb the mask M, at least two adsorption ports 311 may be provided so as to be adsorbed by being supported at two points along the longitudinal direction of the mask M.

The adsorption device 300 is formed to extend in the longitudinal direction of the mask M, and may include a plurality of jig members 310 formed along the longitudinal direction of the transport device 100 as shown in FIG. 3 . In other words, the plurality of jig members 310 may have a predetermined length and may be disposed in a direction crossing the transfer device 100 .

And, among the plurality of jig members 310, a driving cylinder ( 320 is provided, and the plurality of inner jig members 310 disposed on the inside of the outer jig member 310 are coupled to the guide member 330 connecting the adjacent jig members 310 along the respective width direction. can The inner jig and the outer jig can stably move linearly with each other by the guide member 330 .

The slider 400 may be formed to be slidable along the width direction of the transfer device 100 . The adsorption device 300 may be formed to reciprocate along the upper side of the transport device 100 and the outside along the width direction of the transport device 100 by the slider 400 .

The slider 400 may be disposed at two places along the longitudinal direction of the transfer device 100 . In the case of the imaging device 200, for example, since the information acquisition execution time is relatively short compared to the reciprocating movement time of the slider 400, the slider 400 is disposed in two places so that the tact time between each other can be stably linked. , so that the interference between the imaging device 200 and the slider 400 during operation of the transport device 100 can be minimized by controlling the reciprocating motions alternately.

Hereinafter, an operation process of the mask inspection apparatus according to an embodiment of the present invention will be described.

5 is a side view illustrating a state in which a photographing member of the mask inspection apparatus is positioned on a mask according to an embodiment of the present invention, and FIGS. 6 to 9 are a defect in the adsorption member of the mask inspection apparatus according to an embodiment of the present invention. It is a side view showing the process of adsorbing the mask and transferring it to the receiving member.

Again, referring to FIG. 2 , when the mask M is supplied to the transport device 100 , the masks M may be disposed and transported in a plurality of rows on the transport belt 120 by the transport device 100 .

Thereafter, as shown in FIG. 5 , image information of a plurality of rows of masks M is simultaneously acquired by the imaging device 200 during transport of the transport device 100 .

When there is a defective mask determined to be defective according to the image information acquired by the imaging device 200 , the adsorption device 300 moves to a corresponding position toward the mask M. In this case, the vacuum suction may be controlled to be performed only on the suction port 311 at the position corresponding to the defective mask of the suction device 300 .

In other words, as shown in FIG. 8 , in a state in which the adsorption device 300 descends and comes into contact with the mask at an appropriate pressure, as shown in FIG.

Thereafter, as shown in FIG. 9 , the adsorption device 300 rises in a state in which the defective mask is adsorbed to the adsorption hole 311 , and moves outward along the width direction of the transfer device 100 by the slider 400 . can be

After the slider 400 is moved to the outside of the conveying device 100 , when it reaches the upper side of the receiving member 500 , when the vacuum pressure formed in the suction port 311 is released, the defective mask is collected by the receiving member 500 . can

At this time, each of the jig members 310 may be moved linearly along the width direction of the conveying device 100 by the guide member 330 to be close to each other. That is, the driving cylinder 320 is compression driven, and one of the outermost guide members 330 moves toward the opposite outermost guide member to narrow the width and at the same time, the guide member 330 positioned inside each guides. The plurality of guide members 330 may be disposed to be adjacent to each other by moving along the member 330 to be adjacent. Due to this, the defective mask may be collected without the need to unnecessarily enlarge the inner space of the receiving member 500 .

Accordingly, since the mask inspection apparatus according to an embodiment of the present invention converts the masks produced in two lines into one and uses multi-vision at the same time, it is possible to increase the efficiency as well as the accuracy of the defect inspection.

In addition, by using multi-vision, even if one side of the equipment fails unexpectedly, the production system can be continuously operated through the other side of the production equipment.

As described above, the mask inspection apparatus according to an embodiment of the present invention has been described with reference to the illustrated drawings, but the present invention is not limited by the above-described embodiments and drawings, and within the scope of the claims, the present invention belongs Various implementations are possible by those skilled in the art.

100: transfer device
110: drive roller
120: conveying belt
200: imaging device
300: adsorption device
310: jig member
311: suction port
320: drive cylinder
330: guide member
400: slider
500; lack of accommodation
M: mask

Claims (7)

a transport device having a transport belt rotated by at least two driving rollers so that the masks can be transported in multiple rows along one direction;
an imaging device disposed in the middle of the moving direction of the transport device and disposed in a number corresponding to the number of columns of the mask in order to acquire photographing information for one surface of the mask; and
disposed on the downstream side of the imaging device, each mask having two suction ports for supporting and adsorbing at two points along the longitudinal direction of the mask, and selectively adsorbing defective masks among the masks using the suction ports Including an adsorption device for
The adsorption device is formed extending in the longitudinal direction of the mask, and includes a plurality of jig members formed along the width direction of the transport device, the adsorption port is formed along the longitudinal direction of the jig member,
A driving cylinder reciprocating by connecting a pair of outer jig members disposed on both outermost sides along the width direction of the transfer device among the plurality of jig members is provided;
A plurality of inner jig members disposed inside the outer jig member are coupled to guide members connecting adjacent jig members along each width direction, so that the linear movement of the jig member along the width direction is performed by the respective guide members Guided by the mask inspection device. delete According to claim 1,
A slider sliding along the width direction of the transfer device,
The adsorption device is reciprocated along the upper side of the transport device and the outside along the width direction of the transport device by the slider. delete 4. The method of claim 3,
Each of the adsorption ports of the adsorption device communicates with a vacuum suction device, and vacuum suction is performed on the adsorption ports in which the defective mask is located among the plurality of adsorption ports. delete 6. The method of claim 5,
A accommodating member having a space so that a mask selected as defective can be accommodated is disposed adjacent to a periphery in the width direction of the transfer device, and the defective mask falling from the suction port is collected by the accommodating member.

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