KR102273849B1 - 광검출 장치 - Google Patents

광검출 장치 Download PDF

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Publication number
KR102273849B1
KR102273849B1 KR1020167005472A KR20167005472A KR102273849B1 KR 102273849 B1 KR102273849 B1 KR 102273849B1 KR 1020167005472 A KR1020167005472 A KR 1020167005472A KR 20167005472 A KR20167005472 A KR 20167005472A KR 102273849 B1 KR102273849 B1 KR 102273849B1
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KR
South Korea
Prior art keywords
fabry
interference filter
perot interference
photodetector
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020167005472A
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English (en)
Korean (ko)
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KR20160079768A (ko
Inventor
가츠미 시바야마
다카시 가사하라
마사키 히로세
도시미츠 가와이
Original Assignee
하마마츠 포토닉스 가부시키가이샤
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Publication of KR20160079768A publication Critical patent/KR20160079768A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
KR1020167005472A 2013-10-31 2014-10-31 광검출 장치 Expired - Fee Related KR102273849B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013227287A JP6290594B2 (ja) 2013-10-31 2013-10-31 光検出装置
JPJP-P-2013-227287 2013-10-31
PCT/JP2014/079106 WO2015064750A1 (ja) 2013-10-31 2014-10-31 光検出装置

Publications (2)

Publication Number Publication Date
KR20160079768A KR20160079768A (ko) 2016-07-06
KR102273849B1 true KR102273849B1 (ko) 2021-07-05

Family

ID=53004345

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167005472A Expired - Fee Related KR102273849B1 (ko) 2013-10-31 2014-10-31 광검출 장치

Country Status (6)

Country Link
US (3) US10066995B2 (https=)
EP (1) EP3064912B1 (https=)
JP (1) JP6290594B2 (https=)
KR (1) KR102273849B1 (https=)
CN (1) CN105705920B (https=)
WO (1) WO2015064750A1 (https=)

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JP6290594B2 (ja) * 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
EP4467942A3 (en) 2015-10-02 2025-01-22 Hamamatsu Photonics K.K. Light detection device
FR3050526B1 (fr) * 2016-04-25 2018-05-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de detection de rayonnement electromagnetique a structure d’encapsulation comportant au moins un filtre interferentiel
US10110338B2 (en) * 2016-06-24 2018-10-23 Electronics And Telecommunications Research Institute Apparatus and method for detecting optical signal
JP6899314B2 (ja) * 2017-11-17 2021-07-07 浜松ホトニクス株式会社 吸着方法
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
JP7110386B2 (ja) 2018-04-12 2022-08-01 レイセオン カンパニー 光信号における位相変化検出
WO2019199936A1 (en) * 2018-04-12 2019-10-17 Raytheon Company Integrated optical resonant detector
JP7351610B2 (ja) 2018-10-30 2023-09-27 浜松ホトニクス株式会社 光検出装置
DE102019207383A1 (de) * 2019-05-21 2020-11-26 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213292A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213284A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213287A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213286A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Spektrometer-Package mit MEMS Fabry-Pérot-Interferometer
DE102019213285A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019126050A1 (de) 2019-09-26 2021-04-01 Robert Bosch Gmbh Miniaturisierte Spektrometereinrichtung und Verfahren zum Herstellen einer miniaturisierten Spektrometereinrichtung
JP6860755B1 (ja) 2019-10-09 2021-04-21 浜松ホトニクス株式会社 光検出装置

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JP2012127917A (ja) 2010-12-17 2012-07-05 Denso Corp 波長選択型赤外線検出装置
WO2013015009A1 (ja) 2011-07-26 2013-01-31 浜松ホトニクス株式会社 分光器

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JPH1090576A (ja) * 1996-09-17 1998-04-10 Fuji Photo Film Co Ltd 光学部材の固定構造
JP2000275488A (ja) * 1999-03-25 2000-10-06 Fuji Photo Film Co Ltd 光学部材固定方法及び光学部材の支持部材
EP1456702A1 (en) 2001-11-28 2004-09-15 Aegis Semiconductor, Inc. Package for electro-optical components
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FI125817B (fi) * 2009-01-27 2016-02-29 Teknologian Tutkimuskeskus Vtt Oy Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi
JP2011117884A (ja) 2009-12-07 2011-06-16 Hioki Ee Corp 分光測定器
JP5381884B2 (ja) * 2010-04-16 2014-01-08 セイコーエプソン株式会社 波長可変干渉フィルターの製造方法
JP5708009B2 (ja) 2011-02-17 2015-04-30 セイコーエプソン株式会社 光モジュールおよび電子機器
JP5875936B2 (ja) * 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP6211833B2 (ja) * 2013-07-02 2017-10-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ
JP6290594B2 (ja) * 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
EP3064913B1 (en) * 2013-10-31 2021-07-14 Hamamatsu Photonics K.K. Light-detecting device
JP6356427B2 (ja) * 2014-02-13 2018-07-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2012127917A (ja) 2010-12-17 2012-07-05 Denso Corp 波長選択型赤外線検出装置
WO2013015009A1 (ja) 2011-07-26 2013-01-31 浜松ホトニクス株式会社 分光器

Also Published As

Publication number Publication date
US20160282181A1 (en) 2016-09-29
WO2015064750A1 (ja) 2015-05-07
JP2015087318A (ja) 2015-05-07
US20200056940A1 (en) 2020-02-20
EP3064912A1 (en) 2016-09-07
CN105705920B (zh) 2019-06-07
KR20160079768A (ko) 2016-07-06
US10066995B2 (en) 2018-09-04
EP3064912A4 (en) 2017-09-06
EP3064912B1 (en) 2021-07-07
CN105705920A (zh) 2016-06-22
JP6290594B2 (ja) 2018-03-07
US10775238B2 (en) 2020-09-15
US10895501B2 (en) 2021-01-19
US20180348054A1 (en) 2018-12-06

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