KR102273849B1 - 광검출 장치 - Google Patents

광검출 장치 Download PDF

Info

Publication number
KR102273849B1
KR102273849B1 KR1020167005472A KR20167005472A KR102273849B1 KR 102273849 B1 KR102273849 B1 KR 102273849B1 KR 1020167005472 A KR1020167005472 A KR 1020167005472A KR 20167005472 A KR20167005472 A KR 20167005472A KR 102273849 B1 KR102273849 B1 KR 102273849B1
Authority
KR
South Korea
Prior art keywords
fabry
interference filter
perot interference
photodetector
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020167005472A
Other languages
English (en)
Korean (ko)
Other versions
KR20160079768A (ko
Inventor
가츠미 시바야마
다카시 가사하라
마사키 히로세
도시미츠 가와이
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20160079768A publication Critical patent/KR20160079768A/ko
Application granted granted Critical
Publication of KR102273849B1 publication Critical patent/KR102273849B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
KR1020167005472A 2013-10-31 2014-10-31 광검출 장치 Active KR102273849B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013227287A JP6290594B2 (ja) 2013-10-31 2013-10-31 光検出装置
JPJP-P-2013-227287 2013-10-31
PCT/JP2014/079106 WO2015064750A1 (ja) 2013-10-31 2014-10-31 光検出装置

Publications (2)

Publication Number Publication Date
KR20160079768A KR20160079768A (ko) 2016-07-06
KR102273849B1 true KR102273849B1 (ko) 2021-07-05

Family

ID=53004345

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167005472A Active KR102273849B1 (ko) 2013-10-31 2014-10-31 광검출 장치

Country Status (6)

Country Link
US (3) US10066995B2 (enExample)
EP (1) EP3064912B1 (enExample)
JP (1) JP6290594B2 (enExample)
KR (1) KR102273849B1 (enExample)
CN (1) CN105705920B (enExample)
WO (1) WO2015064750A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6290594B2 (ja) * 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
KR20180062463A (ko) * 2015-10-02 2018-06-08 하마마츠 포토닉스 가부시키가이샤 광 검출 장치
FR3050526B1 (fr) * 2016-04-25 2018-05-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de detection de rayonnement electromagnetique a structure d’encapsulation comportant au moins un filtre interferentiel
US10110338B2 (en) * 2016-06-24 2018-10-23 Electronics And Telecommunications Research Institute Apparatus and method for detecting optical signal
JP6899314B2 (ja) * 2017-11-17 2021-07-07 浜松ホトニクス株式会社 吸着方法
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
TW201947894A (zh) * 2018-04-12 2019-12-16 美商雷神公司 整合式光學共振檢測器
EP3776918B1 (en) 2018-04-12 2023-08-23 Raytheon Company Phase change detection in optical signals
JP7351610B2 (ja) * 2018-10-30 2023-09-27 浜松ホトニクス株式会社 光検出装置
DE102019207383A1 (de) * 2019-05-21 2020-11-26 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213286A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Spektrometer-Package mit MEMS Fabry-Pérot-Interferometer
DE102019213292A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213284A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213285A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019213287A1 (de) 2019-09-03 2021-03-04 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung
DE102019126050A1 (de) 2019-09-26 2021-04-01 Robert Bosch Gmbh Miniaturisierte Spektrometereinrichtung und Verfahren zum Herstellen einer miniaturisierten Spektrometereinrichtung
WO2021070820A1 (ja) * 2019-10-09 2021-04-15 浜松ホトニクス株式会社 光検出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127917A (ja) 2010-12-17 2012-07-05 Denso Corp 波長選択型赤外線検出装置
WO2013015009A1 (ja) 2011-07-26 2013-01-31 浜松ホトニクス株式会社 分光器

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01136035A (ja) * 1987-11-24 1989-05-29 Hamamatsu Photonics Kk 焦電型検出素子の製造方法
JPH0766982B2 (ja) * 1989-03-29 1995-07-19 シャープ株式会社 波長選択性受光素子
JPH0792022A (ja) 1993-09-21 1995-04-07 Kurabo Ind Ltd 光検出器
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
US5584117A (en) * 1995-12-11 1996-12-17 Industrial Technology Research Institute Method of making an interferometer-based bolometer
JPH1090576A (ja) * 1996-09-17 1998-04-10 Fuji Photo Film Co Ltd 光学部材の固定構造
JP2000275488A (ja) * 1999-03-25 2000-10-06 Fuji Photo Film Co Ltd 光学部材固定方法及び光学部材の支持部材
JP2005510756A (ja) 2001-11-28 2005-04-21 アイギス セミコンダクター インコーポレイテッド 電気光学構成部品用パッケージ
US6770882B2 (en) * 2002-01-14 2004-08-03 Multispectral Imaging, Inc. Micromachined pyro-optical structure
US7470894B2 (en) * 2002-03-18 2008-12-30 Honeywell International Inc. Multi-substrate package assembly
US7145143B2 (en) * 2002-03-18 2006-12-05 Honeywell International Inc. Tunable sensor
JP2004251742A (ja) * 2003-02-20 2004-09-09 Denso Corp センサ装置
JP2006114661A (ja) * 2004-10-14 2006-04-27 Matsushita Electric Ind Co Ltd 光半導体装置およびその製造方法
JP2006194791A (ja) 2005-01-14 2006-07-27 Denso Corp 赤外線センサ装置
DE102006034731A1 (de) * 2006-07-27 2008-01-31 Infratec Gmbh Infrarotsensorik Und Messtechnik Durchstimmbares Dualband-Fabry-Perot-Filter
JP5048992B2 (ja) * 2006-10-18 2012-10-17 オリンパス株式会社 可変分光素子および、それを備えた内視鏡システム
JP5230952B2 (ja) 2007-02-13 2013-07-10 オリンパス株式会社 内視鏡用可変分光素子、分光装置および内視鏡システム
US7911623B2 (en) * 2007-08-07 2011-03-22 Xerox Corporation Fabry-Perot piezoelectric tunable filter
JP5135983B2 (ja) 2007-10-12 2013-02-06 コニカミノルタビジネステクノロジーズ株式会社 定着装置
JP5050922B2 (ja) 2008-02-27 2012-10-17 株式会社デンソー ファブリペロー干渉計
JP2009210312A (ja) * 2008-03-03 2009-09-17 Denso Corp ファブリペロー干渉計およびその製造方法
FI125817B (fi) * 2009-01-27 2016-02-29 Teknologian Tutkimuskeskus Vtt Oy Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi
JP2011117884A (ja) 2009-12-07 2011-06-16 Hioki Ee Corp 分光測定器
JP5381884B2 (ja) * 2010-04-16 2014-01-08 セイコーエプソン株式会社 波長可変干渉フィルターの製造方法
JP5708009B2 (ja) 2011-02-17 2015-04-30 セイコーエプソン株式会社 光モジュールおよび電子機器
JP5875936B2 (ja) * 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP6211833B2 (ja) * 2013-07-02 2017-10-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ
JP6290594B2 (ja) * 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
JP6466851B2 (ja) * 2013-10-31 2019-02-06 浜松ホトニクス株式会社 光検出装置
JP6356427B2 (ja) * 2014-02-13 2018-07-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127917A (ja) 2010-12-17 2012-07-05 Denso Corp 波長選択型赤外線検出装置
WO2013015009A1 (ja) 2011-07-26 2013-01-31 浜松ホトニクス株式会社 分光器

Also Published As

Publication number Publication date
JP2015087318A (ja) 2015-05-07
US10775238B2 (en) 2020-09-15
EP3064912A4 (en) 2017-09-06
WO2015064750A1 (ja) 2015-05-07
KR20160079768A (ko) 2016-07-06
JP6290594B2 (ja) 2018-03-07
CN105705920B (zh) 2019-06-07
US10066995B2 (en) 2018-09-04
US20160282181A1 (en) 2016-09-29
US20180348054A1 (en) 2018-12-06
EP3064912B1 (en) 2021-07-07
US20200056940A1 (en) 2020-02-20
US10895501B2 (en) 2021-01-19
CN105705920A (zh) 2016-06-22
EP3064912A1 (en) 2016-09-07

Similar Documents

Publication Publication Date Title
KR102273849B1 (ko) 광검출 장치
KR102273850B1 (ko) 광검출 장치
TWI885832B (zh) 光檢測裝置
EP3358320B1 (en) Light detection device
JP6632647B2 (ja) 光検出装置
JP6913709B2 (ja) 光検出装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20160229

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20190930

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20200928

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20210429

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20210630

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20210630

End annual number: 3

Start annual number: 1

PG1601 Publication of registration