KR102122226B1 - Supply equipment for chemical liquid and slit coater including the same - Google Patents

Abstract

The present invention discloses a slit coater. More specifically, the present invention prevents damage to the inner member of the chemical liquid supply device included in the slit coater used in the manufacture of the flat panel display device, and includes a chemical liquid supply device that minimizes contamination of the indirect liquid injected therein and the same It's about a slit coater.
According to an embodiment of the present invention, a buffer region is further formed between the pistol portion and the inner wall to further inject a separate indirect liquid therein to disperse the force applied by the pistol portion to prevent deterioration, and flow into the interior. By blocking the air and keeping the volume of the indirect liquid inside even if the indirect liquid flows out, the life of the chemical liquid supply device is extended, and there is an effect that the chemical liquid can be driven more stably.

Description

TECHNICAL SUPPLY EQUIPMENT FOR CHEMICAL LIQUID AND SLIT COATER INCLUDING THE SAME

The present invention relates to a slit coater, which prevents damage to the internal member of the chemical liquid supply device included in the slit coater used in the manufacture of the flat panel display device, and includes a chemical liquid supply device that minimizes contamination of the indirect liquid injected therein and the same It is about a slit coater.

Various portable devices, such as mobile phones and notebook computers, and flat panel display devices (Flat Panel Display Devices), which are applied to information electronic devices that realize high-resolution, high-quality images such as HDTVs ) Is gradually increasing. Such flat panel display devices include a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED) and an organic light emitting diode (OLED). ) Etc.

In the manufacture of the above-mentioned flat panel display device, a process of applying various chemicals is used in a number of ways. In the photolithography process for forming a plurality of circuit patterns including a thin film transistor, it is used when a photosensitive film is applied, or when a flexible substrate is manufactured. It can be used to apply the main material.

In such a chemical application process, the chemical liquid is dropped onto a substrate to be coated, and then the substrate is rotated to spin the chemical liquid so that the chemical liquid is coated and a slit-shaped nozzle discharges the chemical liquid to the substrate in one direction. There is a spinless or slit coating method to scan and apply.

The spin coating method is widely used in the conventional coating process because the chemical solution can be coated on a substrate with a uniform thickness. However, as the size of the flat panel display device has recently increased, the substrate becomes increasingly large and heavy, making it difficult to rotate the substrate. Therefore, it has recently been replaced by a slit coating method.

In the slit coating method, a slit coater having a slit-shaped slit nozzle having a length corresponding to the width of the substrate is used, and the slit coater is applied with a chemical solution while moving the slit nozzle from one side toward the other on the substrate placed on the stage. Process.

1 is a view schematically showing the structure of a conventional slit coater.

Referring to FIG. 1, a slit coater used for manufacturing a substrate of a flat panel display device includes a glass substrate 1 to be applied to a chemical liquid on a stage and a slit nozzle 20 to apply the chemical liquid 10 to the glass substrate 1 ) Is disposed, and the chemical liquid CL is applied to the surface of the substrate while the slit nozzle 20 is moved from one side of the glass substrate 1 to the other side by the moving member.

Here, the chemical liquid (CL) is stored in a predetermined storage tank 30, and the chemical liquid supply device 50 controls the motor part 40 to slit the quantitative chemical liquid CL through the connection pipe 25. It is provided to the nozzle 20.

As the method for discharging the chemical liquid from the slit coater 1 having such a structure, the direct discharging method in which the chemical liquid and the driving unit directly contact and discharge the chemical liquid and the indirect discharging method in which the chemical liquid and the driving unit do not directly contact are used Can be.

The direct discharging method has the advantage of a simple structure, but has a disadvantage that it is easy to introduce foreign matters due to direct contact between the chemical liquid and the driving unit, and it is difficult to precisely control the amount of the chemical liquid discharged. Therefore, it is not desirable to apply it to manufacture a highly integrated circuit element such as a flat panel display device. Therefore, in the flat panel display device manufacturing process, an indirect discharge method is used in which an indirect liquid is used to prevent direct contact between the chemical liquid and the driving unit.

However, even if an indirect discharging type chemical liquid supplying device is used, an abnormality occurs in the precise discharging operation when driven for a long time.

FIG. 2 is a view showing a part of a conventional indirect discharge type chemical liquid supplying device. Referring to FIG. 2, the chemical liquid supplying device 50 is injected with an indirect liquid (ML) into an inner frame 51, and a pistol unit 57 ) Indirect liquid (ML) is filled and discharged by applying pressure to the shrinking tube (not shown) by up and down driving.

Leakage of the indirect liquid (ML) occurs at a portion where the pistol portion (57) and the indirect liquid (ML) come into contact with the chemical liquid supply device (50) of this structure, or the indirect liquid (ML) by air introduced from the outside In order to prevent air bubbles from being generated, the pistol portion 57 is provided with a spectra seal (SS) between the inner frames 51.

However, when the chemical liquid supply device is operated for a long time, the physical properties of the spectra seal (SS) deteriorate, and air and leakage may occur, which is caused by minutely changing the amount of the indirect liquid (ML). A change in the total volume or leakage to the outside is a cause of contamination, and in the end, the amount of the chemical is changed during filling and discharging of the chemical, causing the manufacturing process of the flat panel display to fail.

The present invention has been devised to solve the above-mentioned problems, and includes a chemical liquid supply device for minimizing indirect liquid contamination due to deterioration of the indirect discharge chemical liquid supply device included in the slit coater used in the manufacturing process of the flat panel display device and the same The aim is to provide a slit coater.

In order to achieve the above object, the chemical liquid supply device according to a preferred embodiment of the present invention is provided with a contraction tube for filling and discharging the chemical liquid, the first inlet and outlet portion filled with indirect liquid; A pistol unit connected to the inlet/outlet portion by a connecting pipe, and changing the volume of the first indirect liquid to perform filling and discharging of the chemical liquid; An inner frame in which the input/output portion and the pistol portion are disposed; And a buffer portion formed between the pistol portion and the inner frame and filled with a second indirect liquid therein.

In addition, in order to achieve the above object, a slit coater according to a preferred embodiment of the present invention, a slit nozzle for applying a chemical solution on a substrate; A storage tank in which the chemical liquid is stored; A chemical liquid supply device connected to the slit nozzle and the storage tank to provide the chemical liquid to the slit nozzle; And a motor part for controlling the chemical liquid supply device, wherein the chemical liquid supply device is formed between the in/out part, the pistol part, the inner frame and the pistol part and the inner frame, and is filled with a second indirect liquid therein. It includes a buffer section.

The chemical liquid supply device and the slit coater including the same according to an embodiment of the present invention further form a buffer region between the pistol portion and the inner wall to further inject a separate indirect liquid therein to disperse the force applied by the pistol portion It prevents deterioration, blocks the air flowing into the inside, and maintains the volume of the indirect liquid inside even if the indirect liquid flows out, thereby prolonging the life of the chemical liquid supply device and supplying the chemical liquid more stably. .

1 is a view schematically showing the structure of a conventional slit coater.
2 is a view showing a part of a conventional indirect discharging method chemical supply device.
3 is a view showing the appearance of the chemical supply device according to an embodiment of the present invention, Figure 4 is a view showing the internal structure of the chemical supply device of FIG.
5 is a view for explaining a method of driving a chemical liquid supply device according to an embodiment of the present invention.
6 is an enlarged view of the pistol portion of FIG. 5.
7 is a view showing a spectra seal provided in the chemical supply device according to an embodiment of the present invention.

Hereinafter, a chemical liquid supply device and a slit coater including the same according to a preferred embodiment of the present invention will be described with reference to the drawings.

The slit coater of the present invention is a slit nozzle for applying a chemical solution on a substrate, a storage tank in which the chemical solution is stored, and a slit nozzle and a storage tank connected to the slit nozzle and a chemical liquid supply device for providing the chemical solution to the slit nozzle, and controlling the chemical solution supply device It includes a motor unit. In particular, the chemical liquid supply device of the present invention is further provided with a buffer portion, and is characterized in that a separate indirect liquid other than the existing indirect liquid is further filled in the buffer portion. Hereinafter, the chemical liquid supply device of the present invention will be described in more detail with reference to the drawings.

3 is a view showing the appearance of the chemical supply device according to an embodiment of the present invention, Figure 4 is a view showing the internal structure of the chemical supply device of FIG.

Referring to Figures 3 and 4, the drug supply device 100 of the present invention is provided with a discharge tube 110 and a connecting tube 130 provided with a contraction tube 114 for filling and discharging the chemical solution therein It includes a driving unit 150 is provided with a pistol portion 157 is connected to the inlet and outlet 110 to control the indirect liquid (ML1).

Looking at the exterior first, the inlet/outlet portion 110 is surrounded by an outer frame of a rectangular shape on the outside of the cylindrical shrinking tube 114, and one side of the outer frame is coupled to the driving portion 150, and discharge pipes are provided on both sides. (111) and the injection pipe 112 are protruded to a predetermined length. In addition, on both sides of the discharge pipe 111 and the injection pipe 112 and the outer frame, each pipe is fixed to the outer frame, and the circular shape can be mechanically combined with a storage tank and a slit nozzle of a slit coater (not shown). The coupling member 115 is provided.

The driving unit 150 has a rectangular hexagonal outer frame surrounding the outside of the cylindrical pistol unit 157 similar to the input/output unit 110, and its length protrudes a predetermined length longer than the input/output unit 110. On the lower surface, the motor coupling member 159 is exposed to be coupled to the external motor unit 200 to move the pistol unit 157 up and down.

Here, the pistol portion 157 may be a structure in which the motor coupling member 159 and the ball screw method are combined to move the pistol portion 157 vertically according to the rotation of the shaft.

Accordingly, in the manufacturing process of the actual flat panel display device, the chemical liquid CL discharged on the substrate does not directly contact the pistol portion 157 that applies a force when driving, and the pistol portion 157 is a separate first indirect It is in contact with the liquid ML1, and the first indirect liquid ML1 is also isolated from the chemical liquid CL by the contraction tube 114 so that it is only involved in the expansion and contraction of the contraction tube 114.

Therefore, unlike the direct discharge method, leakage and contamination of the first indirect liquid ML1 are blocked from directly affecting the chemical liquid CL.

Looking at the interior of the input/output unit 110 and the driving unit 150, the connection pipe 130 is disposed at the coupling portion thereof, and the first indirect liquid ML1 is filled in the input/output unit 110 at both sides of the connection pipe. The inner frames 116 and 156 are provided.

The first inner frame 116 of the in/out portion 110 is provided with a cylindrical shrink tube 114 in the center, and the inside thereof is filled with a chemical liquid (CL) into an empty space. Also, in the inner space of the first inner frame 116 and the outer space of the shrinking tube 114, the first indirect liquid ML1 is filled through the connecting pipe 130 to the second inner space 156 of the driving unit 150. It is.

Here, a low-viscosity or high-viscosity polyimide (PI) may be used as the filled chemical solution.

The pistol portion 157 has an internally coupled shaft 153 mechanically connected to the motor portion 200 so that the pistol portion 157 moves upward and downward according to the driving of the motor portion 200. do. In addition, the side portion of the pistol portion 157 is in contact with the second inner frame 156 almost without separation, so that the first indirect liquid ML1 filled in the second inner frame 156 leaks to the lower portion of the pistol portion 157. It is configured not to go out.

Particularly, in the present invention, the second inner frame 156 has a ring shape in the outer direction on the side where the second inner frame 156 and the pistol part 157 are connected, and the cross section is recessed into a “U” shape. It is characterized in that the buffer portion 158 is further formed.

A second indirect liquid (ML2) is further filled in the inner space of the buffer portion 158, and first and second spectra seals (SS1, SS2) are provided at portions that connect to the upper and lower ends of the pistol portion (157). have. Here, the second indirect liquid ML2 may be the same material as the first indirect liquid ML1. The first indirect liquid ML1 and the second indirect liquid ML2 do not mix with each other by the first spectra seal SS1, and the second indirect liquid ML2 has the pistol portion 157 in the second spectra seal SS2. It rides on the sidewall between the second inner frame 156 and prevents it from leaking downward.

To this end, the first indirect liquid ML1 and the second indirect liquid ML2 must be completely injected into the interior frames 116 and 156 and the buffer portion 158 to have a volume of 100%, respectively.

According to this structure, when the chemical liquid supply device 100 of the present invention is replenished with the chemical fluid, the pistol portion 157 descends downward by the motor unit 200, thereby lowering the internal pressure of the second internal frame 156, thereby increasing the first pressure. As the indirect liquid ML1 is pulled downward, the volume of the first indirect liquid ML1 filled therein becomes smaller, and the first indirect liquid of the first internal frame 116 passes through the connecting pipe 130 ( ML1) is pulled to the second inner frame 156.

Then, the contraction tube 114 is expanded by the pressure of the first indirect liquid ML1, and the chemical liquid CL is transferred to the interior of the contraction tube 114 from a storage tank (not shown) connected to the injection pipe 112. It is filled.

In addition, in the chemical liquid supply device 100, when the chemical liquid is discharged, the pistol portion 157 rises upward by the motor unit 200, and the internal pressure of the second internal frame 156 increases, resulting in the first indirect liquid ML1. The first indirect liquid ML1 of the second inner frame 156 passes through the connector 130 as the volume of the first indirect liquid ML1 filled therein increases as it is pushed upward. It is pushed to the frame 156.

Accordingly, the first indirect liquid (ML1) contracts the shrinking tube 114 so that the chemical liquid (CL) filled therein is slit nozzle (not shown) through the discharge pipe 111 connected to the inlet/outlet part 110. ).

In particular, according to the long-term rise and fall of the pistol portion 157, even if a constant force is applied, the force is dispersed in the first and second spectra seals SS1 and SS2 to delay deterioration, and the buffer portion 158 ) Is filled with the second indirect liquid ML2, so that leakage of the first indirect liquid ML1 through the first spectra seal SS1 to the outside is minimized. In addition, even if outside air passes through the second spectra seal SS2 and flows into the second inner frame 156, air bubbles are generated only inside the buffer unit 158, and air bubbles are not generated up to the first inner frame 156. . In addition, even if the second indirect liquid ML2 inside the buffer unit 158 leaks downward by the second spectra seal SS2, this affects the first indirect liquid ML1 of the first internal frame 156. You will not give.

Accordingly, according to an embodiment of the present invention, the first indirect liquid leak or bubbles are minimized by the buffer layer formed between the pistol portion and the second inner frame and filled with the second indirect liquid, thereby minimizing the supply of the more reliable chemical liquid. Can provide.

Hereinafter, a driving method of a chemical liquid supply device and a method for filling and discharging a chemical liquid according to an embodiment of the present invention will be described with reference to the drawings.

5 is a view for explaining a method of driving a chemical liquid supply device according to an embodiment of the present invention.

Referring to FIG. 5, first, to apply to the manufacturing process of the flat panel display device, the discharge pipe 111 and the injection pipe 112 are respectively connected to the slit nozzle of the slit coater and the outlet of the storage tank, and the pistol part 157 is connected. It is connected to the motor part to complete the installation on the slit coater.

Next, when the chemical solution supply device 100 is filled with the chemical solution, the motor part (not shown) is controlled to lower the pistol part 157 downward, and accordingly the pistol part 157 causes the first indirect liquid (ML1) ), the internal pressure of the driving unit 150 and the discharge inlet 110 connected thereto is lowered, and the contraction tube 114 installed inside the discharge inlet 110 expands.

The shrinking tube 114 is connected to the injection pipe 112 downward, so that the chemical liquid CL stored in the storage tank (not shown) is slowly injected by the expanding force of the shrinking tube 114 to shrink the tube 114 It is filled into the inside.

At this time, the buffer portion 158 formed in the driving unit 150 is filled with a second indirect liquid (ML2), the first indirect liquid (ML1) of the pistol portion 157 according to the driving of the pistol portion (157) The generation of bubbles is suppressed by blocking the inflow of external air between the outer side and the inner side wall of the driving unit 150, that is, the inner frame (a).

Next, when the filling of the chemical liquid (CL) is completed, and during the manufacturing process of the flat panel display device, the glass substrate is transferred to the slit coater and the glass substrate is prepared, the slit nozzle moves upwards as if scanning the slit nozzle in one direction. Is discharged, the motor part (not shown) is controlled so as to correspond to the traveling speed of the slit nozzle, and the pistol part 157 is raised upward.

Accordingly, the pistol portion 157 pushes the first indirect liquid ML1 upward, and as the internal pressure of the discharge inlet 110 increases, the shrink tube 114 installed inside the discharge inlet 110 Will shrink. By contracting the shrinking tube 114, the chemical liquid CL filled therein is supplied to the slit nozzle through the discharge pipe 111 connected to the upper portion, so that the chemical liquid CL is coated on the organic substrate.

At this time, the second indirect liquid (ML2) filled in the buffer unit 158 even if the first indirect liquid (ML1) is pushed out by the pressure according to the rise of the pistol portion 157 in the same manner as the filling step of the chemical liquid (CL). ) Prevents the first indirect liquid ML1 from leaking out (b).

FIG. 6 is an enlarged view of the pistol portion of FIG. 5, as shown, even if the first indirect liquid ML1 is pushed or pulled according to the vertical movement of the pistol portion 157, the buffer portion 158 A small amount may be mixed with the second indirect liquid ML2, or a situation in which external air flows into the second indirect liquid ML2 may occur, but at least the first indirect liquid ML1 leaks to the outside. Or, the outside air (Air) is introduced into the first indirect liquid (ML1) to prevent air bubbles.

Here, since the first indirect liquid ML1 and the second indirect liquid ML2 are the same material, even if a small amount is mixed, the indirect liquid is not contaminated with other substances, and the second indirect liquid ML2 leaks to the outside. Even if it is leaked, the change does not affect the first indirect liquid ML1.

In addition, since the first spectra seal SS1 and the second spectra seal SS2 are centered around the buffer part 158, the pressure applied to one spectra seal by the movement of the pistol part 157 is compared to the conventional one. It is reduced to 1/2, and the deterioration of the spectra seals (SS1, SS2) is minimized and the service life is increased.

The first spectra seal (SS1) and the second spectra seal (SS2) is a ring-shaped seal member of a flexible material, and a plurality of elastic metal bodies are connected in a rib shape to form a pistol part ( 157) and fills between the inner frame to prevent the indirect liquid from flowing. Hereinafter, the structure of the spectra seal used in the chemical supply device of the present invention will be described with reference to the drawings.

7 is a view showing a spectra seal provided in the chemical supply device according to an embodiment of the present invention.

Referring to FIG. 7, the spectra seals SS1 and SS2 of the present invention have a'U'-shaped cross section extending to form a ring shape, and the body 300 is made of a flexible material such as plastic, and has one direction open, The body 300 has a structure in which a plurality of metal bodies 310 are connected and inserted by the connection portion 320.

Here, the metal body 310 is a'U' shaped metal material having good elasticity, and as it is inserted into the main body 300, a force acts in a direction to continuously open the opened part of the main body 300, thereby acting as a chemical liquid. Do not create spaces apart from each other between the pistol portion of the feeder and the inner frame. The metal bodies 310 are connected to each other by a connection portion 320 in the center, so that the metal body 310 and the connection portion 320 in a circular direction have a rib shape.

In particular, the width of the opened portion of the main body 300 by the metal body 310 is formed at least wider than the separation space between the pistol portion and the inner frame of the chemical liquid supply unit, and when installed in the chemical liquid supply unit, the pistol unit continuously and As the force is applied in the direction of the inner frame, the spectra seals SS1 and SS2 also do not deviate from the initial installed position without flow.

These spectra seals (SS1, SS2) are disposed at both ends of the buffer portion of the chemical supply device, and not only do not mix the first indirect liquid and the second indirect liquid, but also leak the second indirect liquid or the second indirect liquid. Prevent air bubbles from entering the air.

Although many matters are specifically described in the foregoing description, it should be interpreted as an example of a preferred embodiment rather than limiting the scope of the invention. Therefore, the invention should not be determined by the described embodiments, but should be determined by equivalents to the claims and claims.

100: chemical supply device 110: input and output unit
111: discharge pipe 112: injection pipe
114: shrinking tube 116, 156: inner frame
130: connector 153: shaft
157: pistol portion 158: buffer portion
159: motor coupling member 200: motor unit
CL: chemical solution ML1: first indirect solution
ML2: Second indirect liquid SS1: First spectra seal
SS2: Second Spectra Seal

Claims (9)

A contraction tube in which a chemical liquid is filled and discharged, and a mouth-to-mouth portion filled with a first indirect liquid;
A pistol part connected to the inlet/outlet part by a connecting pipe, and changing the volume of the first indirect liquid to perform filling and discharging of the chemical solution;
An inner frame in which the input/output portion and the pistol portion are disposed;
A buffer portion formed between the pistol portion and the inner frame and filled with a second indirect liquid therein;
A first spectra seal disposed inside the buffer portion and contacting one end of the buffer portion connected to the pistol portion; And
A second spectra seal disposed inside the buffer portion and disposed to contact the other end of the buffer portion connected to the pistol portion,
The first spectra seal and the second spectra seal have one direction open, and the chemical liquid supply device is disposed to surround the pistol portion. delete According to claim 1,
The spectra seal,
A ring-shaped body which is opened in one direction and made of plastic;
A'U' shaped metal body in which a plurality of pieces are arranged side by side into the inside of the main body; And
A chemical liquid supply device comprising a connecting member connecting a plurality of metal bodies. According to claim 1,
The buffer unit,
A chemical liquid supply device characterized in that the inner frame is formed in a recessed shape. According to claim 1,
The first and second indirect liquid, the chemical liquid supply device, characterized in that made of the same material. According to claim 1,
The chemical liquid is a chemical liquid supply device, characterized in that the polyimide liquid having a low viscosity or high viscosity properties. A slit nozzle to apply a chemical solution on the substrate;
A storage tank in which the chemical liquid is stored;
A chemical liquid supply device connected to the slit nozzle and the storage tank to provide the chemical liquid to the slit nozzle; And
It includes a motor for controlling the chemical supply device,
The chemical supply device,
A contraction tube in which a chemical liquid is filled and discharged, and a mouth-to-mouth portion filled with a first indirect liquid;
A pistol part connected to the inlet/outlet part by a connecting pipe, and changing the volume of the first indirect liquid to perform filling and discharging of the chemical solution;
An inner frame in which the input/output portion and the pistol portion are disposed;
A buffer portion formed between the pistol portion and the inner frame and filled with a second indirect liquid therein;
A first spectra seal disposed inside the buffer portion and contacting one end of the buffer portion connected to the pistol portion; And
A second spectra seal disposed inside the buffer portion and disposed to contact the other end of the buffer portion connected to the pistol portion,
The first spectra seal and the second spectra seal are slit coaters having one direction open and disposed to surround the pistol portion. The method of claim 7,
The shrink tube,
An injection pipe connected to the storage tank; And
A slit coater comprising a discharge pipe connected to the slit nozzle. The method of claim 7,
The slit coater, the slit coater, characterized in that coupled to the motor portion by a ball screw method.

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