KR102106653B1 - 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치 - Google Patents

초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치 Download PDF

Info

Publication number
KR102106653B1
KR102106653B1 KR1020140035299A KR20140035299A KR102106653B1 KR 102106653 B1 KR102106653 B1 KR 102106653B1 KR 1020140035299 A KR1020140035299 A KR 1020140035299A KR 20140035299 A KR20140035299 A KR 20140035299A KR 102106653 B1 KR102106653 B1 KR 102106653B1
Authority
KR
South Korea
Prior art keywords
film
electrode
piezoelectric
electrode film
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020140035299A
Other languages
English (en)
Korean (ko)
Other versions
KR20140118856A (ko
Inventor
가네찌까 기요세
히로노리 스즈끼
히로시 마쯔다
Original Assignee
세이코 엡슨 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세이코 엡슨 가부시키가이샤 filed Critical 세이코 엡슨 가부시키가이샤
Publication of KR20140118856A publication Critical patent/KR20140118856A/ko
Application granted granted Critical
Publication of KR102106653B1 publication Critical patent/KR102106653B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4427—Device being portable or laptop-like
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/52—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/5207—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving processing of raw data to produce diagnostic data, e.g. for generating an image
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
KR1020140035299A 2013-03-29 2014-03-26 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치 Active KR102106653B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013071582A JP6136464B2 (ja) 2013-03-29 2013-03-29 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置
JPJP-P-2013-071582 2013-03-29

Publications (2)

Publication Number Publication Date
KR20140118856A KR20140118856A (ko) 2014-10-08
KR102106653B1 true KR102106653B1 (ko) 2020-05-04

Family

ID=50389918

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140035299A Active KR102106653B1 (ko) 2013-03-29 2014-03-26 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치

Country Status (6)

Country Link
US (2) US9592031B2 (https=)
EP (1) EP2783759A3 (https=)
JP (1) JP6136464B2 (https=)
KR (1) KR102106653B1 (https=)
CN (1) CN104068893B (https=)
TW (1) TWI632710B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016121765A1 (ja) * 2015-01-29 2016-08-04 富士フイルム株式会社 電気音響変換フィルムおよび電気音響変換フィルムの製造方法
JP2017103267A (ja) * 2015-11-30 2017-06-08 セイコーエプソン株式会社 圧電素子、圧電素子の形成方法および超音波装置
JP6809094B2 (ja) 2016-09-29 2021-01-06 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP6891506B2 (ja) 2017-01-17 2021-06-18 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP2018157125A (ja) 2017-03-21 2018-10-04 セイコーエプソン株式会社 圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法
JP7047253B2 (ja) * 2017-03-22 2022-04-05 セイコーエプソン株式会社 超音波デバイスユニット、超音波探触子、及び超音波装置
JP6874463B2 (ja) 2017-03-27 2021-05-19 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置
JP2018164039A (ja) 2017-03-27 2018-10-18 セイコーエプソン株式会社 圧電素子、圧電デバイス、超音波探触子、及び電子機器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090156083A1 (en) * 2006-02-08 2009-06-18 Tohoku Pioneer Corporation Method of manufacturing display apparatus with saw touch sensor
US20110221306A1 (en) * 2010-03-11 2011-09-15 Seiko Epson Corporation Piezoelectric element, piezoelectric sensor, electronic device, and method for manufacturing piezoelectric element
JP2013046086A (ja) * 2011-08-22 2013-03-04 Seiko Epson Corp 超音波アレイセンサーおよびその製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144565A (ja) * 1984-12-18 1986-07-02 Toshiba Corp 高分子圧電型超音波探触子
JP2745147B2 (ja) * 1989-03-27 1998-04-28 三菱マテリアル 株式会社 圧電変換素子
JPH0835954A (ja) 1994-07-22 1996-02-06 Hitachi Constr Mach Co Ltd 超音波探触子
JPH0888899A (ja) 1994-09-19 1996-04-02 Daishinku Co 超音波振動子
EP0810676B1 (en) * 1996-05-27 2002-08-28 Ngk Insulators, Ltd. Piezoelectric film-type element
JP2001291907A (ja) 2000-04-06 2001-10-19 Matsushita Electric Ind Co Ltd 可撓性圧電素子
JP2005051688A (ja) 2003-07-31 2005-02-24 Matsushita Electric Works Ltd 超音波アレイセンサおよびその製造方法
WO2005028207A1 (ja) 2003-09-24 2005-03-31 Seiko Epson Corporation 液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP4744849B2 (ja) * 2004-11-11 2011-08-10 株式会社東芝 半導体装置
JP4614068B2 (ja) 2005-01-24 2011-01-19 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP2006231909A (ja) 2005-01-26 2006-09-07 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP4844717B2 (ja) 2005-12-27 2011-12-28 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
US8508103B2 (en) * 2009-03-23 2013-08-13 Sonavation, Inc. Piezoelectric identification device and applications thereof
US8209857B2 (en) * 2009-06-19 2012-07-03 The Regents Of The University Of Michigan Method of making a thin film device
JP5671876B2 (ja) * 2009-11-16 2015-02-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090156083A1 (en) * 2006-02-08 2009-06-18 Tohoku Pioneer Corporation Method of manufacturing display apparatus with saw touch sensor
US20110221306A1 (en) * 2010-03-11 2011-09-15 Seiko Epson Corporation Piezoelectric element, piezoelectric sensor, electronic device, and method for manufacturing piezoelectric element
JP2013046086A (ja) * 2011-08-22 2013-03-04 Seiko Epson Corp 超音波アレイセンサーおよびその製造方法

Also Published As

Publication number Publication date
JP6136464B2 (ja) 2017-05-31
JP2014195494A (ja) 2014-10-16
TWI632710B (zh) 2018-08-11
KR20140118856A (ko) 2014-10-08
US9782150B2 (en) 2017-10-10
TW201438477A (zh) 2014-10-01
CN104068893B (zh) 2018-10-19
EP2783759A3 (en) 2015-10-28
US20140296716A1 (en) 2014-10-02
EP2783759A2 (en) 2014-10-01
CN104068893A (zh) 2014-10-01
US9592031B2 (en) 2017-03-14
US20170128047A1 (en) 2017-05-11

Similar Documents

Publication Publication Date Title
KR102106653B1 (ko) 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치
JP5990930B2 (ja) 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
CN103654848B (zh) 超声波换能器装置、探测器、电子设备及超声波诊断装置
JP6442821B2 (ja) 超音波デバイス及び電子機器
JP6078994B2 (ja) 超音波トランスデューサー素子ユニットおよびプローブおよびプローブヘッド並びに電子機器および超音波診断装置
JP5990929B2 (ja) 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置
WO2013145764A1 (ja) 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6252279B2 (ja) 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置
US10042044B2 (en) Ultrasonic device, probe, electronic device, and ultrasonic imaging apparatus
JP6273743B2 (ja) 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6365726B2 (ja) 超音波トランスデューサー装置及び電子機器
JP2017000792A (ja) 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20140326

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20190305

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20140326

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20200115

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20200327

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20200424

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20200424

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20240315

Start annual number: 5

End annual number: 5