KR102091755B1 - Apparatus for measuring flatness - Google Patents

Abstract

Flatness measuring apparatus according to an embodiment of the present invention, a nozzle holder, a nozzle for flatness measurement rotatably coupled to one side of the nozzle holder and a negative pressure flow path formed therein, a negative pressure supply unit providing negative pressure to the negative pressure flow path, and It includes a negative pressure measuring unit for measuring the internal pressure of the negative pressure flow path, and the flatness measurement nozzle extends from the support plate to be eccentric with respect to the central axis of the holder engaging portion and the holder engaging portion accommodated inside the nozzle holder. It is formed and includes a nozzle tip forming at least a portion of the negative pressure flow path.

Description

Flatness measuring device {Apparatus for measuring flatness}

The present invention relates to a flatness measuring device, and more particularly, to a flatness measuring device for measuring the flatness of a pickup device for picking up a member using negative pressure.

Among chip mounting equipment, there is a device in which a die transfer module is used to transfer members such as electronic components picked up from die turret to a shuttle.

The die transfer module includes a nozzle holder for picking up a member using negative pressure and a nozzle holder to which the nozzle is replaceable. As the die transfer module picks up the member and puts it down on the shuttle, an operation is made to adjust the flatness of the nozzle holder to minimize damage to the member.

In general, the die transfer module has a structure for moving the member in one axis, so to measure the flatness of the nozzle holder, the flatness is measured using a fixed measurement tool after the nozzle holder is coupled to the flatness measurement nozzle. After sensing the position of one end of the nozzle for measurement, the nozzle holder is moved a predetermined distance in the uniaxial direction so that the other end of the nozzle for flatness measurement is adjacent to the measurement tool to determine the position of the other end of the nozzle for flatness measurement. After sensing, the flatness of the nozzle holder is measured by calculating the difference between the position of one end of the nozzle for flatness measurement and the position of the other end.

However, with such a flatness measuring method, since only the flatness in the uniaxial direction of the nozzle holder is measured, it is difficult to measure the exact flatness of the nozzle holder.

The problem to be solved by the present invention is to provide a flatness measuring device capable of measuring the flatness of a nozzle holder in a biaxial direction.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

Flatness measuring device according to an embodiment of the present invention for solving the above problems is a nozzle holder, a nozzle for flatness measurement rotatably coupled to one side of the nozzle holder, a negative pressure flow path formed therein, negative pressure to the negative pressure flow path It includes a negative pressure supply and a negative pressure measuring unit for measuring the internal pressure of the negative pressure flow path, the flatness measuring nozzle, the holder is accommodated inside the nozzle holder and eccentric about the central axis of the holder engaging portion It extends from the support plate so as to include a nozzle tip forming at least a portion of the negative pressure flow path.

The flatness measuring nozzle may be rotatably installed with respect to the nozzle holder about a central axis of the holder coupling portion.

Further comprising a reference plate located on the lower portion of the flatness measurement nozzle, the negative pressure measuring unit, the nozzle tip is rotated around the central axis of the holder coupling portion of the reference plate located at a plurality of points of the negative pressure flow path The internal pressure can be measured.

The flatness determination unit may further include a flatness determination unit to determine the flatness of the nozzle holder based on the internal pressure of the negative pressure flow path measured at a plurality of points of the reference plate.

The plurality of points of the reference plate include four points arranged at 90-degree intervals around the central axis of the holder coupling portion, and the flatness determining unit is based on the internal pressure of the negative pressure flow path measured at the four points. The flatness in the X-axis direction and the flatness in the Y-axis direction of the nozzle holder may be determined.

Further comprising a lifting portion for supporting the nozzle holder to be able to elevate, the elevating portion can be driven to move the nozzle holder so that the nozzle tip is located adjacent to the reference plate.

Other specific matters of the present invention are included in the detailed description and drawings.

According to embodiments of the present invention has at least the following effects.

Since the flatness of the nozzle holder can be measured in the biaxial direction, the flatness of the nozzle holder can be more accurately measured.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is a view schematically showing an apparatus for measuring flatness according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view showing a state in which the nozzle holder of FIG. 1 and the flatness measurement nozzle are coupled.
3 is a perspective view illustrating a flatness measurement nozzle of FIG. 1.
4 to 9 are views for explaining the operation of the flatness measuring apparatus according to an embodiment of the present invention.
10 is a view schematically showing an example assembled so that the nozzle holder of FIG. 1 is inclined.
11 is a view schematically showing a flatness measuring apparatus according to another embodiment of the present invention.

Advantages and features of the present invention, and methods for achieving them will be clarified with reference to embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only the embodiments allow the disclosure of the present invention to be complete, and common knowledge in the art to which the present invention pertains It is provided to completely inform the person having the scope of the invention, and the present invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification.

In addition, the embodiments described herein will be described with reference to cross-sectional views and / or schematic drawings, which are ideal exemplary views of the present invention. Therefore, the shape of the exemplary diagram may be modified by manufacturing technology and / or tolerance. In addition, in each of the drawings shown in the present invention, each component may be illustrated to be slightly enlarged or reduced in consideration of convenience of description. The same reference numerals refer to the same components throughout the specification.

Hereinafter, the present invention will be described with reference to the drawings for describing a flatness measuring apparatus according to an embodiment of the present invention.

1 is a view schematically showing a flatness measuring apparatus according to an embodiment of the present invention, Figure 2 is a cross-sectional view showing a state of engagement of the nozzle holder and flatness measuring nozzle of Figure 1, Figure 3 is Figure 1 It is a perspective view showing a flatness measurement nozzle.

1, the flatness measuring device 1 according to an embodiment of the present invention, the linear guide 10, the lifting unit 20, the nozzle holder 30, the flatness measuring nozzle 40 ), A negative pressure transfer tube 50, a negative pressure supply unit 60, a negative pressure measurement unit 70 and a flatness determination unit 80.

The linear guide 10 is formed to extend a predetermined length in the X-axis direction.

Although not shown, the linear guide 10 may extend from a die turret in which the member to be picked up is located to a shuttle that lowers the member picked up from the die turret.

The lifting unit 20 is installed to be movable in the X-axis direction along the linear guide 10. The lifting unit 20 may include a horizontal driving motor (not shown) that moves the lifting unit 20 in the X-axis direction.

A nozzle holder 30 is installed on the lifting part 20 to be able to elevate. The lifting unit 20 or the nozzle holder 30 may include a vertical driving motor (not shown) that drives the nozzle holder 30 up and down relative to the lifting unit 20.

At the bottom of the nozzle holder 30, a flatness measurement nozzle 40 is installed to be rotatable on the XY plane.

As shown in FIG. 2, the nozzle holder 30 includes a nozzle holder receiving space 31 in which a lower end is formed and recessed inward from the opened lower end. A holder-side flow path 33 penetrating the nozzle holder 30 is formed at an upper end of the nozzle holder accommodation space 31 so as to be connected to the negative pressure transfer tube 50.

In addition, the nozzle holder 30 includes a plurality of stoppers 32 that are installed to be able to appear in and out of the nozzle holder receiving space 31. When the holder engaging portion 43 of the nozzle 40 for flatness measurement enters the nozzle holder receiving space 31, the stopper 32 is a nozzle holder by a coupling head 43b of the nozzle 40 for flatness measurement. It is pushed into the interior of 30, and when the flatness measurement nozzle 40 and the nozzle holder 30 are combined, the coupling head 43b is supported to prevent the flatness measurement nozzle 40 from coming off. .

Flatness measurement nozzle 40 is a configuration for measuring the flatness of the nozzle holder 30, as shown in Figures 2 and 3, the nozzle tip 41, the support plate 42 and the holder coupling portion (43).

The holder engaging portion 43 is formed to protrude from the upper surface of the support plate 42, and the nozzle tip 41 is formed to protrude from the lower surface of the support plate 42.

The holder engaging portion 43 includes a support end 43c extending from the upper surface of the support plate 42 and a coupling head 43b formed on the upper end of the support end 43c.

The lower end of the coupling head 43b is formed to extend outward of the supporting end 43c to form a step with the upper end of the supporting end 43c. The coupling head 43b may have a tapered shape gradually narrowing from the bottom to the top.

The support plate 42 may be a circular plate having a larger diameter than the lower end of the nozzle holder 30, the support end 43c of the holder engaging portion 43 is located at the center.

Meanwhile, the nozzle tip 41 may be formed to be eccentric from the center of the support plate 42. That is, the central axis A2 of the nozzle tip 41 may be formed to be spaced a predetermined distance d from the central axis A1 of the support end 43c.

Since the nozzle tip 41 is formed to be eccentric from the rotational central axis A1 of the flatness measurement nozzle 40, as the flatness measurement nozzle 40 rotates, the nozzle tip 41 has an eccentric distance (d ) To form a circular trajectory with a radius.

As shown in FIG. 1, the nozzle tip 41 and the support plate 42 are exposed under the nozzle holder 30 while the flatness measurement nozzle 40 is coupled to the nozzle holder 30.

The flatness measurement nozzle 40 includes negative pressure flow passages 41a, 42a, and 43a penetrating the flatness measurement nozzle 40 vertically.

2, the negative pressure flow paths 41a, 42a, and 43a extend from the first negative pressure flow path 41a and the first negative pressure flow path 41a formed inside the nozzle tip 41 and support plates 42 ) And a third negative pressure flow passage 43a extending from the second negative pressure flow passage 42a and a third negative pressure flow passage 43a formed inside the coupling head 43b.

The first negative pressure flow path 41a is opened through the lower portion of the nozzle tip 41, and the third negative pressure flow path 43a is connected to the holder-side flow path 33.

The negative pressure transfer tube 50 connects the holder-side flow passage 33 and the negative-pressure supply part 60 to transfer the negative pressure provided from the negative-pressure supply part 60 to the negative-pressure flow passages 41a, 42a, and 43a through the holder-side flow passage 33. To deliver.

Meanwhile, the negative pressure measurement unit 70 measures the pressure inside the negative pressure transfer tube 50. Since the negative pressure transfer tube 50 is a space connected to the negative pressure flow passages 41a, 42a, and 43a, the pressure measured by the negative pressure measurement unit 70 can be viewed as the pressure inside the negative pressure flow passages 41a, 42a, 43a.

Meanwhile, the flatness measurement apparatus 1 according to an embodiment of the present invention may include a flatness determination unit 80. The flatness determination unit 80 receives the pressure value measured by the negative pressure measurement unit 70 and determines the flatness of the nozzle holder 30 based on this.

Hereinafter, an operation and a flatness measuring method of a flatness measuring apparatus according to an embodiment of the present invention will be described based on the configuration of the flatness measuring apparatus 1 according to the above-described embodiment of the present invention.

4 to 9 are views for explaining the operation of the flatness measuring apparatus according to an embodiment of the present invention.

As illustrated in FIG. 4, the flatness measuring device 1 according to an embodiment of the present invention may include a reference plate S. The reference plate S is located below the flatness measurement nozzle 40, and the top surface of the reference plate S is a flat plane, and the flatness in the XY direction may already be adjusted. The reference plate S may be a die of a shuttle on which a member picked up by a nozzle (not shown) mounted on the nozzle holder 30 is placed.

As shown in FIG. 5, the elevation unit 20 lowers the nozzle holder 30 to position the nozzle tip 41 adjacent to the reference plate S. The nozzle tip 41 is positioned adjacent to the first point (X1, see FIG. 9) of the upper surface of the reference plate S so as not to contact the reference plate S.

Thereafter, the negative pressure supply unit 60 supplies negative pressure to the negative pressure flow passages 41a, 42a, and 43a through the negative pressure transfer tube 50.

Due to the negative pressure formed in the negative pressure flow passages 41a, 42a, 43a, the outside air of the nozzle tip 41 is sucked into the negative pressure flow passages 41a, 42a, 43a. At this time, the pressure value measured in the negative pressure measuring unit 70 varies according to the interval between the nozzle tip 41 and the reference plate S.

After the pressure measurement in the negative pressure measurement unit 70 is completed, as shown in FIG. 6, the flatness measurement nozzle 40 may be rotated 180 degrees. The flatness measurement nozzle 40 may be rotated 180 degrees by an operator, or may be rotated 180 degrees by a rotation drive motor provided with a rotation drive motor (not shown) in the nozzle holder 30.

As the flatness measurement nozzle 40 is rotated 180 degrees, the nozzle tip 41 is positioned adjacent to the second point (X2, see FIG. 9) of the upper surface of the reference plate S.

The negative pressure supply unit 60 supplies negative pressure to the negative pressure flow paths 41a, 42a, and 43a through the negative pressure transmission tube 50, and the negative pressure measurement unit 70 measures the pressure value at the second point X2.

The negative pressure measuring unit 70 determines the flatness in the X-axis direction of the nozzle holder 30 through pressure values measured at the first point X1 and the second point X2, respectively.

In the negative pressure measuring unit 70, when the pressure values measured at the first point X1 and the second point X2 are the same or the pressure values are within a predetermined error range, the nozzle holder 30 is in the X-axis direction. It can be judged that it is installed flat.

 When the pressure values measured at the first point (X1) and the second point (X2) are the same or exist within an acceptable error range, the nozzle tip (41) at the first point (X1) and the second point (X2) ) And the distance on one surface of the reference plate S is kept constant, which means that the nozzle holder 30 is installed flat in the X-axis direction.

When the pressure values measured at the first point (X1) and the second point (X2) are different or are out of a preset error range, it may be determined that the nozzle holder 30 is inclined in the X-axis direction.

10 is a view schematically showing an example assembled so that the nozzle holder of FIG. 1 is inclined.

As illustrated in FIG. 10, when the nozzle holder 30 is assembled to be inclined, the distances on one surface of the nozzle tip 41 and the reference plate S are the first point X1 and the second point X2. Each will be different.

In the state of FIG. 10, the distance on one surface of the reference plate S and the nozzle tip 41 at the first point X1 is equal to that of the nozzle tip 41 and the reference plate S at the second point X2. Since it is larger than the distance on one surface, the pressure value measured when the nozzle tip 41 is located at the first point X1 is measured higher than the pressure value measured when it is located at the second point X2.

Conversely, the distance on one surface of the nozzle tip 41 and the reference plate S at the first point X1 is greater than the distance on the surface of the nozzle tip 41 and the reference plate S at the second point X2. In the small case, the pressure value measured when the nozzle tip 41 is located at the first point X1 is measured lower than the pressure value measured at the second point X2.

Accordingly, the negative pressure measurement unit 70 may determine the direction in which the nozzle holder 30 is inclined on the X axis using pressure values measured at the first point X1 and the second point X2, respectively. As the difference between the pressure values measured at the first point (X1) and the second point (X2) increases, the degree of tilt of the nozzle holder (30) also increases, so the first point (X1) and the second point (X2) The degree of inclination of the nozzle holder 30 on the X axis may be determined using the measured pressure indenter.

On the other hand, after the pressure measurement for the second point (X2) is completed, as shown in Figure 7, the flatness measurement nozzle 40 is rotated 90 degrees, the nozzle tip 41 of the reference plate (S) It can be positioned adjacent to the third point of the upper surface (Y1, see FIG. 9).

The negative pressure supply unit 60 supplies negative pressure to the negative pressure flow paths 41a, 42a, and 43a through the negative pressure transmission tube 50, and the negative pressure measurement unit 70 measures the pressure value at the third point Y1.

After the pressure measurement for the third point Y1 is completed, as shown in FIG. 8, the nozzle 40 for flatness measurement rotates 180 degrees, and the nozzle tip 41 of the upper surface of the reference plate S It can be positioned adjacent to the fourth point (Y2, see FIG. 9).

The negative pressure supply unit 60 supplies negative pressure to the negative pressure flow paths 41a, 42a, and 43a through the negative pressure transmission tube 50, and the negative pressure measurement unit 70 measures the pressure value at the fourth point Y2.

The negative pressure measuring unit 70 determines the flatness in the Y-axis direction of the nozzle holder 30 through the pressure values measured at the third point Y1 and the fourth point Y2, respectively.

In the negative pressure measuring unit 70, when the pressure values respectively measured at the third point Y1 and the fourth point Y2 are the same or the pressure values exist within a predetermined error range, the nozzle holder 30 is in the Y-axis direction. It can be judged that it is installed flat.

In addition, when the pressure values measured at the third point Y1 and the fourth point Y2 are different or out of a predetermined error range, it may be determined that the nozzle holder 30 is inclined in the Y-axis direction. .

As described above, the negative pressure measurement unit 70 may determine the direction in which the nozzle holder 30 is inclined on the Y axis using pressure values measured at the third point Y1 and the fourth point Y2, respectively. . In addition, the degree of inclination of the nozzle holder 30 on the Y axis may be determined by using the indenters measured at the third point Y1 and the fourth point Y2.

In the above-described flatness measuring method, an example in which pressure values are measured in the order of X1, X2, Y1, and Y2 in FIG. 9 has been described, but the order of X1, X2, Y1, and Y2 may be changed. For example, after measuring the pressure value at the first X1 point, the nozzle 40 for flatness measurement is rotated by 90 degrees, and the pressure value is measured in the order of Y1, X2, Y2, or Y2, X2, Y1 Pressure values can also be measured in order.

As described above, the flatness measuring apparatus 1 according to the embodiment of the present invention does not move the nozzle holder 30 on the X axis, rotates the flatness measurement nozzle 40 and rotates a plurality of points (X1, X2, Y1, Y2) can measure the flatness in the X-axis direction and the flatness in the Y-axis direction of the nozzle holder 30 with the measured pressure values. Since the flatness in the biaxial direction with respect to the nozzle holder 30 can be measured, the flatness of the nozzle holder 30 can be more accurately measured.

On the other hand, Figure 11 is a view schematically showing a flatness measuring device according to another embodiment of the present invention. For convenience of description, parts similar to those of the above-described embodiment use the same reference numerals, and parts common to those of the above-described embodiment are omitted.

The flatness measuring device 2 according to this embodiment includes an encoder 90.

In the above-described embodiment, the internal pressure of the negative pressure transfer tube 50 is measured and the flatness of the nozzle holder 30 is measured using the same, whereas in this embodiment, the amount of lifting of the nozzle holder 30 using the encoder 90 is measured. Measure the flatness of the nozzle holder (30).

That is, as shown in FIG. 11, the flatness measuring device 2 according to the present embodiment descends the nozzle holder 30 at a plurality of points (X1, X2, Y1, Y2; see FIG. 9) to provide a nozzle tip (41) and the upper surface of the reference plate (S) are brought into contact.

The nozzle holder 30 is driven up and down by a vertical drive motor (not shown), and the encoder 90 detects the number of revolutions of the vertical drive motor. Since the number of rotations of the vertical drive motor varies according to the amount of lifting of the nozzle holder 30, the negative pressure measurement unit 70 is a vertical drive motor detected by the encoder 90 at each of a plurality of points (X1, X2, Y1, Y2). The flatness of the nozzle holder 30 may be determined by comparing the number of rotations of.

For example, the negative pressure measuring unit 70 is the nozzle holder 30 when the number of rotations of the vertical drive motors detected at the first point X1 and the second point X2 are the same or within a predetermined error range It can be determined that is installed flat in the X-axis direction.

However, when the number of rotations of the vertical drive motors detected at the first point X1 and the second point X2 is different or exceeds a predetermined error range, it is determined that the nozzle holder 30 is inclined in the X-axis direction. can do. Then, the difference in the number of rotations of the vertical drive motors detected at the first point X1 and the second point X2 is used to determine the direction in which the nozzle holder 30 is inclined on the X axis and the degree of inclination on the X axis. You may.

Similarly, the negative pressure measurement unit 70 compares the number of rotations of the vertical drive motors detected at the third point Y1 and the fourth point Y2, respectively, and determines the flatness in the Y-axis direction of the nozzle holder 30 can do.

Since the embodiment of FIG. 11 is in contact with the reference plate S and the nozzle tip 41, the hardness of the reference plate S is relatively high, and the embodiment of FIGS. Since the contact between the S) and the nozzle tip 41 is not made, it can be used when the hardness of the reference plate S is relatively low.

Those of ordinary skill in the art to which the present invention pertains will appreciate that the present invention may be implemented in other specific forms without changing its technical spirit or essential features. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. The scope of the present invention is indicated by the following claims rather than the above detailed description, and it should be interpreted that all changes or modified forms derived from the meaning and scope of the claims and equivalent concepts thereof are included in the scope of the present invention. do.

1, 2: Flatness measuring device 10: Linear guide
20: lift 30: nozzle holder
31: nozzle holder receiving space 32: stopper
33: holder side flow path 40: flatness measurement nozzle
41: nozzle tip 41a: first negative pressure flow path
42: support plate 42a: second negative pressure flow path
43: holder engaging portion 43a: third negative pressure flow path
43b: engaging head 43c: support
50: negative pressure transfer tube 60: negative pressure supply
70: negative pressure measurement unit 80: flatness determination unit
90: encoder S: reference plate

Claims (6)

Nozzle holder;
A nozzle for flatness measurement rotatably coupled to one side of the nozzle holder and having a negative pressure flow path formed therein;
A negative pressure supply unit providing negative pressure to the negative pressure passage; And
It includes a negative pressure measuring unit for measuring the internal pressure of the negative pressure flow path,
The flatness measurement nozzle,
Holder coupling portion accommodated inside the nozzle holder and
A flatness measuring device comprising a nozzle tip extending from a support plate so as to be eccentric with respect to the central axis of the holder coupling portion and forming at least a portion of the negative pressure flow path. delete According to claim 1,
A reference plate located under the flatness measurement nozzle; And
Further comprising a flatness determining unit for determining the flatness of the nozzle holder based on the internal pressure of the negative pressure flow path measured at a plurality of points of the reference plate,
The negative pressure measurement unit,
Flatness measuring device for measuring the internal pressure of the negative pressure flow path at a plurality of points of the reference plate, the nozzle tip is rotated around the central axis of the holder coupling portion. delete According to claim 3,
The plurality of points of the reference plate includes four points arranged at 90 degree intervals around the central axis of the holder coupling portion,
The flatness determining unit determines the flatness in the X-axis direction and the flatness in the Y-axis direction of the nozzle holder based on the internal pressure of the negative pressure flow path measured at the four points. delete

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