KR102048622B1 - 에너지 검출기 코어 보호장치와 액정화면 광배향 장비 분석모듈 - Google Patents

에너지 검출기 코어 보호장치와 액정화면 광배향 장비 분석모듈 Download PDF

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KR102048622B1
KR102048622B1 KR1020180007324A KR20180007324A KR102048622B1 KR 102048622 B1 KR102048622 B1 KR 102048622B1 KR 1020180007324 A KR1020180007324 A KR 1020180007324A KR 20180007324 A KR20180007324 A KR 20180007324A KR 102048622 B1 KR102048622 B1 KR 102048622B1
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South Korea
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core
energy detector
cover
support member
cavity
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KR1020180007324A
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English (en)
Korean (ko)
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KR20180085703A (ko
Inventor
진레이 시옹
카이디 쉬
위룽 리
Original Assignee
상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
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Publication of KR20180085703A publication Critical patent/KR20180085703A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G01J2001/061—Baffles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020180007324A 2017-01-19 2018-01-19 에너지 검출기 코어 보호장치와 액정화면 광배향 장비 분석모듈 KR102048622B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710044597.3 2017-01-19
CN201710044597.3A CN108332856B (zh) 2017-01-19 2017-01-19 Ed芯体保护装置和液晶屏光配向设备检偏模块

Publications (2)

Publication Number Publication Date
KR20180085703A KR20180085703A (ko) 2018-07-27
KR102048622B1 true KR102048622B1 (ko) 2019-11-25

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KR1020180007324A KR102048622B1 (ko) 2017-01-19 2018-01-19 에너지 검출기 코어 보호장치와 액정화면 광배향 장비 분석모듈

Country Status (3)

Country Link
KR (1) KR102048622B1 (zh)
CN (1) CN108332856B (zh)
TW (1) TWI652454B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114113701A (zh) * 2021-11-15 2022-03-01 苏州韬盛电子科技有限公司 高频微细测试治具及其制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002202192A (ja) * 2000-10-24 2002-07-19 Tokyo Electron Ltd 温度測定方法、熱処理装置及び方法、コンピュータプログラム、並びに、放射温度計
KR100998983B1 (ko) 2008-12-12 2010-12-10 한국표준과학연구원 흡수선량 측정용 열량계 및 그 제조 방법
CN102914946A (zh) 2011-08-04 2013-02-06 上海微电子装备有限公司 一种光刻装置能量传感器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5484204A (en) * 1994-09-21 1996-01-16 Ta Instruments, Inc. Mechanical cooling system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002202192A (ja) * 2000-10-24 2002-07-19 Tokyo Electron Ltd 温度測定方法、熱処理装置及び方法、コンピュータプログラム、並びに、放射温度計
KR100998983B1 (ko) 2008-12-12 2010-12-10 한국표준과학연구원 흡수선량 측정용 열량계 및 그 제조 방법
CN102914946A (zh) 2011-08-04 2013-02-06 上海微电子装备有限公司 一种光刻装置能量传感器

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Publication number Publication date
TW201827795A (zh) 2018-08-01
CN108332856A (zh) 2018-07-27
CN108332856B (zh) 2019-11-26
KR20180085703A (ko) 2018-07-27
TWI652454B (zh) 2019-03-01

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