KR102033673B1 - 조정가능한 전극을 갖는 증착 소스 - Google Patents

조정가능한 전극을 갖는 증착 소스 Download PDF

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Publication number
KR102033673B1
KR102033673B1 KR1020157023455A KR20157023455A KR102033673B1 KR 102033673 B1 KR102033673 B1 KR 102033673B1 KR 1020157023455 A KR1020157023455 A KR 1020157023455A KR 20157023455 A KR20157023455 A KR 20157023455A KR 102033673 B1 KR102033673 B1 KR 102033673B1
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South Korea
Prior art keywords
substrate
gas
coating drum
gas separation
deposition
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Korean (ko)
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KR20150114974A (ko
Inventor
볼프강 부쉬베크
플로리안 리이즈
토비아스 슈톨리
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어플라이드 머티어리얼스, 인코포레이티드
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Assigned to 엘리베이티드 머티어리얼스 저머니 게엠베하 reassignment 엘리베이티드 머티어리얼스 저머니 게엠베하 권리의 전부이전등록 Assignors: 어플라이드 머티어리얼스, 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
KR1020157023455A 2013-01-31 2014-01-28 조정가능한 전극을 갖는 증착 소스 Active KR102033673B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13153493.5 2013-01-31
EP13153493.5A EP2762607B1 (en) 2013-01-31 2013-01-31 Deposition source with adjustable electrode
PCT/EP2014/051632 WO2014118177A1 (en) 2013-01-31 2014-01-28 Deposition source with adjustable electrode

Publications (2)

Publication Number Publication Date
KR20150114974A KR20150114974A (ko) 2015-10-13
KR102033673B1 true KR102033673B1 (ko) 2019-10-17

Family

ID=47747375

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Application Number Title Priority Date Filing Date
KR1020157023455A Active KR102033673B1 (ko) 2013-01-31 2014-01-28 조정가능한 전극을 갖는 증착 소스

Country Status (7)

Country Link
US (1) US20140212599A1 (https=)
EP (1) EP2762607B1 (https=)
JP (1) JP6297597B2 (https=)
KR (1) KR102033673B1 (https=)
CN (1) CN104968830B (https=)
TW (1) TWI619827B (https=)
WO (1) WO2014118177A1 (https=)

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WO2013108751A1 (ja) * 2012-01-16 2013-07-25 株式会社アルバック 成膜装置
EP2762608B1 (en) * 2013-01-31 2019-10-02 Applied Materials, Inc. Gas separation by adjustable separation wall
EP2762609B1 (en) * 2013-01-31 2019-04-17 Applied Materials, Inc. Apparatus and method for depositing at least two layers on a substrate
EP2784176B1 (en) 2013-03-28 2018-10-03 Applied Materials, Inc. Deposition platform for flexible substrates
CN104695201B (zh) * 2015-03-10 2016-09-21 渤扬复合面料科技(昆山)有限公司 翻转式电极组纺织品大气等离子处理机构及双面处理机构
FR3035122B1 (fr) * 2015-04-20 2017-04-28 Coating Plasma Ind Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede
JP6803917B2 (ja) * 2016-02-12 2020-12-23 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空処理システム及び真空処理を行う方法
CN105549340B (zh) * 2016-02-24 2017-10-24 上海大学 卷对卷柔性衬底光刻方法和装置
CN106373868B (zh) * 2016-10-10 2020-03-10 昆山龙腾光电股份有限公司 一种阵列基板的制造方法
EP4596776A3 (en) * 2019-02-19 2025-10-29 Xefco Pty Ltd System for treatment and/or coating of substrates
WO2021185444A1 (en) * 2020-03-18 2021-09-23 Applied Materials, Inc. Vacuum processing system for a flexible substrate, method of depositing a layer stack on a flexible substrate, and layer system
KR102896631B1 (ko) * 2020-06-04 2025-12-04 엘리베이티드 머티어리얼스 저머니 게엠베하 진공 챔버에서 기판을 코팅하기 위한 기상 증착 장치 및 방법
US11905589B2 (en) * 2020-08-20 2024-02-20 Applied Materials, Inc. Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate
WO2022040075A1 (en) * 2020-08-21 2022-02-24 Applied Materials, Inc. Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate
JPWO2022158271A1 (https=) * 2021-01-19 2022-07-28
CN115874158B (zh) * 2021-09-28 2024-11-15 天虹科技股份有限公司 开合式遮蔽机构及薄膜沉积机台
TWI788032B (zh) * 2021-09-28 2022-12-21 天虹科技股份有限公司 開合式遮蔽機構及具有開合式遮蔽機構的薄膜沉積機台

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WO2011105898A1 (en) 2010-02-25 2011-09-01 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Method and device for layer deposition

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Also Published As

Publication number Publication date
TW201441403A (zh) 2014-11-01
JP2016514198A (ja) 2016-05-19
KR20150114974A (ko) 2015-10-13
EP2762607A1 (en) 2014-08-06
CN104968830B (zh) 2018-09-21
US20140212599A1 (en) 2014-07-31
WO2014118177A1 (en) 2014-08-07
CN104968830A (zh) 2015-10-07
EP2762607B1 (en) 2018-07-25
TWI619827B (zh) 2018-04-01
JP6297597B2 (ja) 2018-03-20

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