KR102019405B1 - Substrate processing apparatus and substrate processing method - Google Patents

Substrate processing apparatus and substrate processing method Download PDF

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Publication number
KR102019405B1
KR102019405B1 KR1020120088433A KR20120088433A KR102019405B1 KR 102019405 B1 KR102019405 B1 KR 102019405B1 KR 1020120088433 A KR1020120088433 A KR 1020120088433A KR 20120088433 A KR20120088433 A KR 20120088433A KR 102019405 B1 KR102019405 B1 KR 102019405B1
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South Korea
Prior art keywords
conveyor belt
substrate
sliding
substrate processing
belt
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KR1020120088433A
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Korean (ko)
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KR20140022192A (en
Inventor
정재권
김수형
백한별
이정범
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주성엔지니어링(주)
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Priority to KR1020120088433A priority Critical patent/KR102019405B1/en
Publication of KR20140022192A publication Critical patent/KR20140022192A/en
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Publication of KR102019405B1 publication Critical patent/KR102019405B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

The present invention relates to a substrate processing apparatus and a substrate processing method capable of automatically correcting the position of a conveyor belt for transporting a substrate. The substrate processing apparatus according to the present invention comprises: a vacuum chamber; A belt conveyor module for transporting a substrate seated on the conveyor belt by rotating the conveyor belt according to the rotation of the pair of driving rollers installed in the vacuum chamber; A substrate heating module installed inside the vacuum chamber to heat a substrate seated on the conveyor belt; A substrate processing module installed in the vacuum chamber so as to face the substrate heating module and performing a substrate processing process on a substrate seated on the conveyor belt; And a belt position correction module installed inside the vacuum chamber to be connected to a first driving roller among the pair of driving rollers to automatically correct the position of the conveyor belt.

Description

Substrate processing apparatus and substrate processing method {SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD}

The present invention relates to a substrate processing apparatus and a substrate processing method.

In general, in order to manufacture a solar cell, a semiconductor device, a flat panel display, a predetermined thin film layer, a thin film circuit pattern, or an optical pattern should be formed on a surface of a substrate. Semiconductor manufacturing processes such as a thin film deposition process, a photo process for selectively exposing the thin film using a photosensitive material, and an etching process for forming a pattern by removing the thin film of the selectively exposed portion are performed.

Such a semiconductor manufacturing process is performed inside a substrate processing apparatus designed in an optimal environment for the process, and in recent years, many substrate processing apparatuses that perform deposition or etching processes using plasma are widely used.

Substrate processing apparatuses using plasma may be classified into a vertical type substrate processing apparatus and a belt conveyor type substrate processing apparatus.

The vertical substrate processing apparatus is a method of depositing or etching a thin film by placing a substrate on a susceptor in a vacuum chamber, and the belt conveyor type substrate processing apparatus places a substrate on a conveyor belt by a belt. It is a method of depositing or etching a thin film continuously on a moving substrate.

1 is a view schematically showing a conventional belt conveyor type substrate processing apparatus.

Referring to FIG. 1, a conventional belt conveyor type substrate processing apparatus includes a vacuum chamber 10, a belt conveyor module 20, a substrate heating module 30, and a substrate processing module 40.

The vacuum chamber 10 provides a process space for a substrate processing process, and maintains a vacuum state by pumping the pumping device 12. One side wall of the vacuum chamber 10 is provided with a substrate loading gate 14 into which a substrate is loaded, and the other side wall of the vacuum chamber 10 has a substrate carrying gate 16 from which a substrate having been processed is finished. To be prepared.

The belt conveyor module 20 is installed inside the vacuum chamber 10 to move the substrate S carried in from the substrate loading gate 14 toward the substrate loading gate 16. To this end, the belt conveyor module 20 has first and second drive rollers 22, 24 and a conveyor belt 26.

The first driving roller 22 is installed at one side of the vacuum chamber 10 to be adjacent to the substrate loading gate 14, and the second driving roller 24 is adjacent to the substrate carrying gate 16. It is installed on the other side of. One of these first and second drive rollers 22, 24 is rotated in a predetermined direction by roller drive means, for example, a drive motor (not shown).

The conveyor belt 26 is installed to span between the first and second drive rollers 22 and 24 to rotate (circulate) in accordance with the rotation of the first and second drive rollers 22 and 24. The conveyor belt 26 is loaded with a plurality of substrates S at regular intervals through the substrate loading gate 14.

The substrate heating module 30 is installed to face the lower surface of the conveyor belt 26 that rotates toward the upper surface of the first and second drive rollers 22, 24. The substrate heating module 30 heats the substrate S moving by the conveyor belt 26 to a temperature suitable for the substrate processing process.

The substrate processing module 40 is installed above the vacuum chamber 10 so as to face the substrate heating module 30 with the conveyor belt 26 therebetween. The substrate processing module 40 is heated by forming a plasma on the heated substrate S by using the plasma power supplied from the plasma power supply 52 and the process gas supplied from the gas supply 54. A substrate treatment process of depositing a thin film on the substrate or etching the thin film formed on the heated substrate (S) is performed.

Such a conventional belt conveyor type substrate processing apparatus seats the substrate S on the conveyor belt 26 of the belt conveyor module 20, and seats the conveyor belt 26 by driving the belt conveyor module 20. Thin film deposition or thin film on the substrate S by forming a plasma on the substrate S through the substrate processing module 40 while moving the substrate S between the substrate heating module 30 and the substrate processing module 40. The etching process is carried out continuously.

However, in the conventional belt conveyor type substrate processing apparatus, the rollers 22 and 24 and the conveyor belt 26 are caused by meandering of the conveyor belt 26 due to thermal expansion of the conveyor belt 26 and lowering of the tension of the conveyor belt 26. Since slip occurs between the substrates, there is a problem that the transfer of the substrate (S) is not smooth.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is a technical object of the present invention to provide a substrate processing apparatus and a substrate processing method that can automatically correct a position of a conveyor belt for transferring a substrate.

The substrate processing apparatus according to the present invention for achieving the above technical problem is a vacuum chamber; A belt conveyor module for transporting a substrate seated on the conveyor belt by rotating the conveyor belt according to the rotation of the pair of driving rollers installed in the vacuum chamber; A substrate heating module installed inside the vacuum chamber to heat a substrate seated on the conveyor belt; A substrate processing module installed in the vacuum chamber so as to face the substrate heating module and performing a substrate processing process on a substrate seated on the conveyor belt; And a belt position correction module installed inside the vacuum chamber to be connected to a first driving roller among the pair of driving rollers to automatically correct the position of the conveyor belt.

The belt position correction module is characterized by preventing one side and the other side of the first drive roller inclined individually according to the position of the conveyor belt to prevent meandering of the conveyor belt.

The belt position correction module includes a connector rod rotatably supporting each of one side and the other side of the first driving roller; One side of the connector rod corresponding to one side of the first driving roller and the other side of the connector rod corresponding to the other side of the first driving roller are coupled to each of the one side and the other side of the connector rod to individually slide forward or rearward. Rod sliding portion to make; And a driving control unit for detecting the position of the conveyor belt to drive the rod sliding unit. At this time, the inside of the rod sliding portion is in communication with the outside of the vacuum chamber is characterized in that it is maintained at atmospheric pressure.

The rod sliding part is installed inside the vacuum chamber so as to be connected to an atmospheric pressure connecting tube passing through the vacuum chamber and is maintained in the atmospheric pressure state; First and second rod sliding shafts individually connected to one side and the other side of the connector rod; First and second sliding members disposed inside the atmospheric pressure housing to individually slide the first and second rod sliding shafts forward or rearward individually under the control of the driving controller; And first and second bellows disposed between the connector rod and the atmospheric pressure housing to seal the first and second rod sliding shafts, respectively. In this case, each of the first and second sliding members may be at least one air cylinder.

The driving control unit may include a first position detecting unit installed in the atmospheric pressure housing and detecting one side of the conveyor belt; A second position detector installed at the atmospheric pressure housing so as to be parallel to the first position detector to detect the other side of the conveyor belt; A first solenoid valve adjusting a pressure of air supplied to the first sliding member according to a position of one side of the conveyor belt detected by the first position detecting unit; And a second solenoid valve configured to adjust the pressure of air supplied to the second sliding member according to the other position of the conveyor belt detected by the second position detector.

When one side of the conveyor belt is detected by the first position detecting unit, the first solenoid valve reduces or releases the pressure of air supplied to the first sliding member, and the second solenoid valve is in the second position. When the other side of the conveyor belt is detected by the detector, it is characterized in that to reduce or release the pressure of the air supplied to the second sliding member.

Each of the first and second sliding members applies a constant pressure to each of the first and second rod sliding shafts to push one side and the other side of the first driving roller with the same force to maintain a constant tension of the conveyor belt. It features.

The substrate processing module may form a plasma according to a supplied process gas and a plasma power source to deposit a thin film on the substrate or to etch the substrate.

In accordance with another aspect of the present invention, there is provided a substrate processing method including rotating a conveyor belt according to rotation of a pair of driving rollers installed in a vacuum chamber; Loading a substrate onto the conveyor belt; Performing a substrate treatment process on the substrate by forming a plasma on the substrate while heating the substrate seated on the conveyor belt; And automatically correcting the position of the conveyor belt using a belt position correction module installed inside the vacuum chamber so as to be connected to a first driving roller among the pair of driving rollers.

Automatically correcting the position of the conveyor belt may include separately detecting positions of one side and the other side of the conveyor belt through respective first and second position detection units; And inclining one side and the other side of the first driving roller individually according to the position of the conveyor belt detected by each of the first and second position detection units to prevent meandering of the conveyor belt. It is done.

The step of preventing meandering of the conveyor belt may include correcting one side of the first driving roller so that the first driving roller is inclined in the first direction when one side of the conveyor belt is detected by the first position detecting unit. Simultaneously fixing the other position of the first drive roller; And when the other side of the conveyor belt is detected by the second position detector, correcting the other side position of the first driving roller so that the first driving roller is inclined in a second direction opposite to the first direction, and And fixing a position of one side of the first driving roller.

The correction of each of the one position and the other position of the first and second drive roller is characterized in that it is performed by reducing or releasing the pressure of the air (Air) supplied to the air cylinder.

The substrate processing method may further include pushing each of one side and the other side of the first driving roller to the same pressure to maintain a constant tension of the conveyor belt.

According to the means for solving the above problems, the substrate processing apparatus and the substrate processing method according to the present invention automatically correct the position of the conveyor belt rotated by the first and second drive rollers, and maintain the tension of the conveyor belt constant. By doing so, it is possible to prevent defects in the substrate processing process due to meandering and tension reduction of the conveyor belt.

1 is a view schematically showing a conventional belt conveyor type substrate processing apparatus.
2 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention.
3 is a view for explaining the belt conveyor module and thermal expansion compensation module shown in FIG.
4 is a view schematically showing a belt position correction module according to the present invention.
FIG. 5 is a diagram illustrating an installation position of the position detector shown in FIG. 4 as an example.
6A to 6C are views for explaining a method of preventing meandering of a conveyor belt according to an embodiment in the substrate processing apparatus according to the embodiment of the present invention.
7A to 7C are views for explaining a method of preventing meandering of a conveyor belt according to another embodiment in the substrate processing apparatus according to the embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a diagram schematically illustrating a substrate processing apparatus according to an exemplary embodiment of the present disclosure, and FIG. 3 is a diagram for describing a belt conveyor module and a thermal expansion compensation module illustrated in FIG. 2.

2 and 3, a substrate processing apparatus according to an embodiment of the present invention includes a vacuum chamber 100, a belt conveyor module 200, a substrate heating module 300, a substrate processing module 400, and a belt position. And a correction module 500.

The vacuum chamber 100 provides a process space for a substrate processing process, and maintains a vacuum state by pumping the pumping apparatus 110. One side wall of the vacuum chamber 100 is provided with a substrate loading gate 120 into which the substrate S is loaded, and the other side wall of the vacuum chamber 100 has a substrate carrying gate from which a substrate on which a substrate processing process is completed is carried out. 130 is provided.

One side wall of the vacuum chamber 100 is provided with a load lock chamber (not shown) for loading the substrate (S) into the substrate loading gate 120, the other side of the vacuum chamber 100 The wall is provided with an unload lock chamber (not shown) for carrying out the substrate S taken out from the substrate carrying gate 130 to the outside. The interior of each of the load lock chamber and unload lock chamber is maintained in a vacuum state.

The belt conveyor module 200 is installed in the vacuum chamber 100 to move the substrate S carried in from the substrate loading gate 120 toward the substrate loading gate 130. Here, the substrate S may be made of a semiconductor device or a semiconductor substrate for solar cell manufacture, or may be a glass substrate for display or solar cell manufacture.

The belt conveyor module 200 includes a conveyor frame 210, first and second drive rollers 220 and 230, and a conveyor belt 240.

The conveyor frame 210 is installed inside the process chamber 100 to rotatably support both sides of each of the first and second driving rollers 220 and 230, and supports the belt position correction module 500.

The first driving roller 220 is slidably installed at one side of the conveyor frame 210 so as to be adjacent to the substrate loading gate 120 and is disposed at one side of the vacuum chamber 100.

The second driving roller 230 is rotatably installed on the other side of the conveyor frame 210 so as to be adjacent to the substrate carrying gate 130 and disposed on the other side of the vacuum chamber 100.

Either of the first and second drive rollers 220, 230, preferably the second drive roller 230, is rotated in a predetermined direction by roller drive means, for example, a drive motor (not shown). In this case, the first driving roller 220 may be a driven roller.

The drive motor is installed on the other side of the conveyor frame 210 to be connected to the roller drive shaft of the second drive roller 230 to rotate the second drive roller 230. In this case, the driving motor may be installed on an outer wall of the vacuum chamber 100 corresponding to the other side of the conveyor frame 210 to rotate the roller driving shaft of the second driving roller 230.

The conveyor belt 240 is formed in a circular band shape having a predetermined width and wound on the first and second driving rollers 220 and 230 to support the rear surface of the substrate S carried from the substrate loading gate 120. . At this time, the conveyor belt 240 is formed to have a wider width than the substrate (S). The conveyor belt 240 is preferably made of a metal material having a high thermal conductivity in order to heat the substrate S carried in from the substrate loading gate 120. For example, the conveyor belt 240 is preferably made of aluminum.

On the other hand, it is preferable that a coating layer (not shown) is formed on the top, side, and bottom surfaces of the metal conveyor belt 240. That is, since the top, side, and bottom surfaces of the conveyor belt 240 are disposed in the vacuum chamber 100 and exposed to the substrate processing space, the thin film may be deposited or etched during the substrate processing process by the substrate processing module 400. Can be. Accordingly, the coating layer allows the thin film deposited on the conveyor belt 240 to be easily cleaned during the conveyor belt cleaning process for cleaning the thin film deposited on the conveyor belt 240 by a substrate processing process, or during the substrate processing process. Minimizes damage to the conveyor belt 240 due to gas and / or damage to the conveyor belt 240 during the conveyor belt cleaning process.

On the other hand, the conveyor belt 240 may be made of a metal material having a low coefficient of thermal expansion. In this case, the conveyor belt 240 preferably further comprises a heat conductive layer (not shown) made of a material having high thermal conductivity. The heat conductive layer is formed to surround the entire conveyor belt 240 to absorb the heat transferred from the substrate heating module 300 to heat the substrate (S).

In FIG. 3, one conveyor belt 240 spans between the first and second driving rollers 220 and 230. However, the present invention is not limited thereto, and the conveyor belt 240 may be formed in plural to have a predetermined interval. It may also be wound at regular intervals between the first and second drive rollers 220, 230.

The substrate heating module 300 is installed to face the lower surface of the conveyor belt 240 that rotates toward the upper surfaces of the first and second driving rollers 220 and 230. The substrate heating module 300 heats the substrate S moving by the conveyor belt 240 to a temperature suitable for a substrate processing process.

The substrate processing module 400 is installed above the vacuum chamber 100 so as to face the substrate heating module 300 with the conveyor belt 240 interposed therebetween to form a plasma according to the process gas and the plasma power source. A substrate treatment process of depositing a thin film on S) or etching a thin film formed on the heated substrate S is performed. To this end, the substrate processing module 400 is a shower head used as a plasma electrode, and is connected to the plasma power supply 410 through a feed cable 412 and connected to the gas supply 420 through a gas supply pipe 422. Connected.

The feed cable 412 is electrically connected to one side of the substrate processing module 400 through the wall of the vacuum chamber 100. At this time, the feed cable 412 is electrically insulated from the wall of the vacuum chamber 100 by the insulating member.

The plasma power supply unit 410 generates plasma power and supplies the plasma power to the substrate processing module 400 through the feed cable 412. In this case, the plasma power source may be high frequency power, and may be high frequency (HF) power or very high frequency (VHF) power. For example, the HF power may have a frequency in the range of 3 MHz to 30 MHz, and the VHF power may have a frequency in the range of 30 MHz to 150 MHz.

Meanwhile, the impedance matching unit 414 may be connected to the power cable 412. The impedance matching unit 414 matches the load impedance of the plasma power source, that is, the high frequency power, and the source impedance by using the first and second impedance elements (not shown) connected to the feed cable 412. In this case, each of the first and second impedance elements may be configured of at least one of a variable capacitor and a variable inductor.

The gas supply unit 420 communicates with a gas diffusion space (not shown) provided in the substrate processing module 400 through the gas supply pipe 422 to supply process gas to the gas diffusion space. Accordingly, the process gas supplied to the gas diffusion space is injected onto the substrate S through a plurality of gas injection holes (not shown) formed to communicate with the gas diffusion space.

The belt position correction module 500 is installed inside the vacuum chamber 100 so as to be connected to any one of the pair of driving rollers and automatically corrects the position of the conveyor belt 240 that is rotated by the pair of driving rollers. Hereinafter, it will be described on the assumption that the belt position correction module 500 is connected to the first driving roller 220 among the pair of driving rollers, that is, the first and second driving rollers 220 and 230.

The belt position correction module 500 detects the position of the conveyor belt 245, and respectively, first and second roller drive shafts rotatably supporting the first driving roller 200 according to the position of the conveyor belt 245. The positions of the conveyor belts 245 are corrected by sliding them individually. That is, when meandering occurs in the conveyor belt 240 that rotates in the caterpillar form by the rotation of the first and second driving rollers 220 and 230, each of one side or the other side of the first driving roller 200 is individually The conveyor belt 240 by tilting the first drive roller 200 at a predetermined angle with respect to the center axis CA of the first drive roller 200 by sliding forward or (+ X axis) or rearward (-X axis). By moving the prevent the meander of the conveyor belt 240. That is, when the conveyor belt 240 is inclined to the first driving roller 200, the conveyor belt 240 is applied to both sides of the first driving roller 200 according to the inclination angle of the first driving roller 200. Other minor differences in tension cause them to move. Accordingly, the belt position correction module 500 returns the conveyor belt 240 to the normal position by tilting the one side or the other side of the first driving roller 200 opposite to the meandering position generated in the conveyor belt 240. To prevent meandering of the conveyor belt 240.

In addition, the belt position correction module 500 uniformly pushes both sides of the first driving roller 220 with a predetermined pressure force, so that the first and second driving rollers 220 and 230 are heat-opened during the conveyor belt 240. The tension of the conveyor belt 240 is kept constant by changing the axial distance between the two.

Meanwhile, the substrate processing apparatus according to the embodiment of the present invention may further include a substrate preheating module 600, as shown in FIG. 2.

The substrate preheating module 600 is installed above one side of the vacuum chamber 100 to be adjacent to the substrate loading gate 120 provided on one side wall of the vacuum chamber 100. The substrate preheating module 600 is supported by the conveyor belt 240 through the substrate loading gate 120 to preheat the substrate S transferred between the substrate heating module 300 and the substrate processing module 400 to a predetermined temperature. do.

As described above, the substrate processing apparatus according to the embodiment of the present invention uses the belt position correction module 500 installed inside the vacuum chamber 100 to maintain the atmospheric pressure, and thus, the first and second driving rollers 220 and 230 may be used. By sliding both sides of the first drive roller 220 so that the first drive roller 220 is inclined in accordance with the position of the conveyor belt 240 rotated by the ()) and prevent meandering of the conveyor belt 240 Both sides of the first driving roller 220 may be pushed with a constant force to keep the tension of the conveyor belt 240 constant.

4 is a view schematically showing a belt position correction module according to the present invention, Figure 5 is a view showing an installation position of the position detector shown in FIG.

4 and 5, the belt position correction module 500 includes a connector rod 510, a rod sliding part 520, and a driving controller 530.

The connector rod 510 rotatably supports the first and second roller drive shafts 222, 224 provided on both sides of the first drive roller 220. To this end, the connector rod 510 may include a first bearing housing rotatably supporting the first roller drive shaft 222, a second bearing housing rotatably supporting the second roller drive shaft 224, and a first bearing housing 510. The first driving roller 220 is formed to be parallel to the longitudinal direction and is formed in a "┗┛" shape to include a connecting bar connected to the first and second bearing housings.

The connector rod 510 is installed to be slidable on one side of the conveyor frame 210 described above, and the first and second roller driving shafts 222 of the first driving roller 220 according to the driving of the rod sliding part 520. 224, each sliding separately toward the front (+ X axis) or back (-X axis). To this end, a guide member (not shown) may be formed at one side of the conveyor frame 210 to guide sliding of both sides of the connector rod 510, that is, each of the first and second bearing housings.

The rod sliding portion 520 is coupled to both ends of the connector rod 510 to separately front (+ X axis) or rear (-X) both sides of the connector rod 510, that is, each of the first and second bearing housings. By sliding toward the shaft, both sides of the first drive roller 220 are individually slid toward the front (+ X axis) or the rear (-X axis). To this end, the rod sliding portion 520 may include an atmospheric pressure housing 521, first and second rod sliding shafts 523a and 523b, first and second sliding members 525a and 525b, and first and second bellows ( 527a, 527b).

Atmospheric pressure housing 521 is formed in a box shape is coupled to the connector rod 510 and installed inside the vacuum chamber 100 to face. The atmospheric pressure housing 521 communicates with the outside of the vacuum chamber 100 through the atmospheric pressure supply pipe 522 to maintain the atmospheric pressure in a vacuum atmosphere inside the vacuum chamber 100.

The first and second rod sliding shafts 523a and 523b are coupled in parallel to both sides of the connector rod 521 and are inserted into the atmospheric pressure housing 521.

The first rod sliding shaft 523a is coupled to the first bellows 527a coupled to one side of the connector rod 510 and is inserted into the atmospheric pressure housing 521. That is, the front side of the first rod sliding shaft 523a is coupled to an inner wall of one side of the first bellows 527a coupled to the connecting bar of the connector rod 510 adjacent to the first bearing housing, and the first rod sliding shaft 523a is provided. The rear side of is inserted into the atmospheric pressure housing 521.

The second rod sliding shaft 523b is coupled to the second bellows 527b coupled to the other side of the connector rod 510 and is inserted into the atmospheric pressure housing 521. That is, the front side of the second rod sliding shaft 523b is coupled to one inner side wall of the second bellows 527b coupled to the connecting bar of the connector rod 510 adjacent to the second bearing housing, and the second rod sliding shaft 523b is provided. The rear side of is inserted into the atmospheric pressure housing 521.

Each of the first and second sliding members 525a and 525b is installed inside the atmospheric pressure housing 521 so that each of the first and second rod sliding shafts 523a and 523b is individually controlled under the control of the driving controller 530. By sliding, one side and the other side of the first driving roller 220 are individually slid.

The first sliding member 525a may include at least one first air cylinder installed inside the atmospheric pressure housing 521. The first air cylinder has a first driving shaft that linearly moves according to the pressure of the air supplied, and the first driving shaft is a rear side of the first rod sliding shaft 523a through the first sliding bar 524a. Is coupled to. In this case, the first sliding bar 524a is coupled between the first rod sliding shaft 523a and the driving shaft of the first sliding member 525a, and the first sliding member 525a is connected to a plurality of air cylinders. The first sliding member 525a may be omitted when the first sliding member 525a is formed of one first air cylinder.

The first sliding member 525a drives the first sliding bar 524a by sliding the first sliding bar 524a toward the front side (+ X) or the rear side (-X) according to the pressure of the air supplied from the driving controller 530. One side of the roller 220 is inclined. That is, when the first sliding bar 524a slides according to the driving of the first sliding member 525a, one side of the first rod sliding shaft 523a and the connector rod 510 and one side of the first driving roller 220. Each slides toward the front (+ X) or the rear (-X) in conjunction with the sliding of the first sliding bar 524a so that one side of the first driving roller 220 is the central axis CA of the first driving roller 220. Inclined at a predetermined angle.

The second sliding member 525b may include at least one second air cylinder installed inside the atmospheric pressure housing 521. The second air cylinder has a second drive shaft linearly moving according to the pressure of the air supplied, and the second drive shaft is rearward of the second rod sliding shaft 523b through the second sliding bar 524b. Is coupled to. In this case, the second sliding bar 524b is coupled between the second rod sliding shaft 523b and the drive shaft of the second sliding member 525b, and the second sliding member 525b is connected to the plurality of air cylinders. The second sliding member 525b may be omitted when the second sliding member 525b is formed of one first air cylinder.

The second sliding member 525b drives the first sliding bar by sliding the second sliding bar 524b toward the front side (+ X) or the rear side (-X) according to the pressure of the air supplied from the driving controller 530. The other side of the roller 220 is inclined. That is, when the second sliding bar 524b is slid according to the driving of the second sliding member 525b, the other side of the second rod sliding shaft 523b and the connector rod 510 and the other side of the first driving roller 220. Each slides toward the front (+ X) or the rear (-X) in conjunction with the sliding of the second sliding bar 524b so that the other side of the first driving roller 220 is the central axis CA of the first driving roller 220. Inclined at a predetermined angle.

Meanwhile, each of the above-described first and second sliding members 525a and 525b may be formed of an air cylinder, and one or a plurality of first and second sliding bars 524a and 524b may be installed.

The first bellows 527a is installed between one side of the connecting bar of the connector rod 510 and the atmospheric pressure housing 521 to seal between the atmospheric pressure housing 521 and the first rod sliding shaft 523a to thereby seal the inside of the atmospheric pressure housing 521. Is kept at atmospheric pressure.

One side of the first bellows 527a is coupled to one side of the connection bar of the connector rod 510 and coupled to the front side of the first rod sliding shaft 523a, and the other side of the first bellows 527a is an atmospheric pressure housing ( 521). The first bellows 527a is expanded according to the front side (+ X) sliding of the first rod sliding shaft 523a to slide one side of the connection bar of the connector rod 510 to the front side (+ X). In addition, when the first rod sliding shaft 523a is slid to the rear side (−X), the first bellows 527a may have a rear side (−) of one side of the first driving roller 220 due to the tension of the conveyor belt 240. X) compresses (or contracts) upon sliding.

The second bellows 527b is installed between the other side of the connecting bar of the connector rod 510 and the atmospheric pressure housing 521 to seal between the atmospheric pressure housing 521 and the second rod sliding shaft 523b to seal the inside of the atmospheric pressure housing 521. Is kept at atmospheric pressure.

The other side of the second bellows 527b is coupled to the other side of the connecting bar of the connector rod 510 and coupled to the front side of the second rod sliding shaft 523b, and the other side of the second bellows 527b is the atmospheric pressure housing ( 521). The second bellows 527b is expanded according to the front side (+ X) sliding of the second rod sliding shaft 523b to slide the other side of the connection bar of the connector rod 510 to the front side (+ X). In addition, when the second rod sliding shaft 523b slides toward the rear side (-X), the second bellows 527b has a rear side (−) of the other side of the first driving roller 220 due to the tension of the conveyor belt 240. X) compresses (or contracts) upon sliding.

The driving controller 530 detects the position of the conveyor belt 240 that rotates in accordance with the rotation of the first and second driving rollers 220 and 230, and thus, the first and second sliding members 525a of the rod sliding part 520. By driving each of the 525b, the meandering of the conveyor belt 240 is prevented or the tension of the conveyor belt 240 is kept constant. To this end, the drive controller 530 includes an air supply member 531, first and second position detection members 533a and 533b, and first and second solenoid valves 535a and 535b.

The air supply member 531 is installed outside the vacuum chamber 100 to supply air of a predetermined pressure to each of the first and second solenoid valves 535a and 535b.

As shown in FIGS. 4 and 5, the first and second position detecting members 533a and 533b are installed at regular intervals on the lower surface of the atmospheric pressure housing 521 so that the first and second driving rollers 220, The meandering of the conveyor belt 240 is detected by detecting positions of one side and the other side of the conveyor belt 240 which rotates according to the rotation of the 230.

The first position detecting member 533a is installed on one side of the lower surface of the atmospheric pressure housing 521 and detects one side position of the conveyor belt 240 that rotates according to the rotation of the first and second driving rollers 220 and 230. The meandering on one side of the conveyor belt 240 is detected. The first position detecting member 533a may be formed of an optical sensor or a laser sensor. The first position detecting member 533a generates a first detection signal of a first logic state when one side of the conveyor belt 240 is not detected, and a second logic state when one side of the conveyor belt 240 is detected. Generate a first detection signal of.

The second position detecting member 533b is installed on the other side of the lower surface of the atmospheric pressure housing 521 and detects the other position of the conveyor belt 240 that rotates in accordance with the rotation of the first and second driving rollers 220 and 230. The meandering to the other side of the conveyor belt 240 is detected. The second position detecting member 533b may be formed of an optical sensor or a laser sensor. The second position detecting member 533b generates a second detection signal of a first logic state when the other side of the conveyor belt 240 is not detected, and a second logic state when the other side of the conveyor belt 240 is detected. Generates a second detection signal.

The first solenoid valve 535a is connected to the first sliding member 525a through the first air cable 536a. At this time, one side of the first air cable 536a is connected to the first solenoid valve 535a, and the other side of the first air cable 536a is connected to the atmospheric pressure housing 521 through the inside of the atmospheric pressure supply pipe 522. It is inserted into the interior of the first sliding member 525a.

The first solenoid valve 535a is a pressure of air supplied from the air supply member 531 to the first sliding member 525a in response to a first detection signal supplied from the first position detecting member 533a. By maintaining the tension of the conveyor belt 240 and at the same time prevents meandering of the conveyor belt 240.

Specifically, when the first solenoid valve 535a is supplied with the first detection signal in the first logic state from the first position detecting member 533a, the air of the reference pressure supplied from the air supply member 531 is provided. Is supplied to the first sliding member 525a to drive the first sliding member 525a to maintain the tension of the conveyor belt 240.

On the other hand, the first solenoid valve 535a is supplied from the air supply member 531 to the first sliding member 525a when the first detection signal in the second logic state is supplied from the first position detection member 533a. By reducing or releasing the pressure of air, the one side of the first driving roller 220 is inclined to move the conveyor belt 240 to the other side of the first driving roller 220 so that one side of the conveyor belt 240 is inclined. Prevent meandering from occurring. That is, since the conveyor belt 240 according to the present invention is wound on the first and second drive rollers 220 and 230 to have an elastic force of less than the elastic yield coefficient, the conveyor belt 240 is the first drive roller 220. When it is wound inclined to, the conveyor belt 240 has a characteristic that goes up the inclined surface of the first drive roller 220. Accordingly, in the present invention, when meandering occurs on one side of the conveyor belt 240, the other side of the first driving roller 220 is fixed while the one side of the first driving roller 220 is directed toward the atmospheric pressure housing 521. By sliding the first drive roller 220 to be inclined in a first direction from one side to the other side, the conveyor belt 240 is moved from one side of the first driving roller 220 to the other side to be positioned in the correct position.

The second solenoid valve 535b is connected to the second sliding member 525b through the second air cable 536b. At this time, one side of the second air cable 536b is connected to the second solenoid valve 535b, and the other side of the second air cable 536b is an atmospheric pressure housing 521 through the inside of the atmospheric pressure supply pipe 522. It is inserted into the interior of the second sliding member 525b.

The second solenoid valve 535b is a pressure of air supplied from the air supply member 531 to the second sliding member 525b in response to a second detection signal supplied from the second position detection member 533b. By maintaining the tension of the conveyor belt 240 while maintaining the other side of the conveyor belt 240 to prevent meandering.

Specifically, when the second detection signal of the first logic state is supplied from the second position detection member 533b, the second solenoid valve 535b is supplied with air of the reference pressure supplied from the air supply member 531. Is supplied to the second sliding member 525b to drive the second sliding member 525b to maintain the tension of the conveyor belt 240.

On the other hand, the second solenoid valve 535b is supplied from the air supply member 531 to the second sliding member 525b when the second detection signal in the second logical state is supplied from the second position detection member 533b. By reducing or releasing the pressure of the air, the other side of the first driving roller 220 is inclined to move the conveyor belt 240 toward one side of the first driving roller 220 so that the other side of the conveyor belt 240 is inclined. Prevent meandering from occurring. That is, when meandering occurs on one side of the conveyor belt 240, the present invention fixes the position of one side of the first driving roller 220 while sliding the other side of the first driving roller 220 toward the atmospheric pressure housing 521. By inclining the first driving roller 220 in the second direction from the other side to the one side, the conveyor belt 240 is moved from the other side of the first driving roller 220 to one side so as to be positioned in the correct position.

6A to 6C are views for explaining a method of preventing meandering of a conveyor belt according to an embodiment in the substrate processing apparatus according to the embodiment of the present invention.

6A to 6C will be described with reference to FIG. 4 schematically illustrating a meandering prevention method of a conveyor belt according to an exemplary embodiment.

First, as shown in FIG. 6A, when meandering occurs on one side of the conveyor belt 240, the first position detecting member 533a detects the meandering generated on one side of the conveyor belt 240 to form a second logic state. Generates a first detection signal. At this time, since the other side of the conveyor belt 240 is not detected by the second position detecting member 533b, the second position detecting member 533b generates the second detection signal in the first logic state.

Subsequently, the first solenoid valve 535a receives the pressure of the air supplied to the first sliding member 525a in response to the first detection signal of the second logic state supplied from the first position detecting member 533a. By releasing or reducing, the first drive shaft of the first sliding member 525a is retracted toward the inside of the first sliding member 525a. At the same time, the second solenoid valve 535b is the reference of the air supplied to the second sliding member 525b in response to the second detection signal of the first logic state supplied from the second position detecting member 533b. By maintaining the pressure as it is, the second drive shaft of the second sliding member 525b is positioned in position.

Accordingly, the first driving shaft of the first sliding member 525a is retracted and the second driving shaft of the second sliding member 525b is fixed in position, thereby as shown in FIG. 6B. And only one side of the first driving roller 220 is slid toward the atmospheric pressure housing 521 by the tension of the conveyor belt 240 wound around the second driving rollers 220 and 230. Accordingly, the conveyor belt 240 is inclined in a first direction in which the first driving roller 220 is upwardly moved from one side to the other side based on the central axis CA corresponding to the center of the other side of the first driving roller 220. Is wound around the first drive roller 220 to be gradually moved from one side to the other side of the first drive roller 220 in accordance with the rotation of the first drive roller 220.

Subsequently, as shown in FIG. 6C, the conveyor belt 240 is gradually moved from one side of the first driving roller 220 to the other side so that one side of the conveyor belt 240 is detected by the first position detecting member 533a. If not, the first position detecting member 533a generates the first detection signal in the first logic state.

Subsequently, the first solenoid valve 535a receives the pressure of the air supplied to the first sliding member 525a in response to the first detection signal of the first logic state supplied from the first position detecting member 533a. Increase to reference pressure. Accordingly, the first driving shaft of the first sliding member 525a is advanced toward the first driving roller 220 and positioned at the home position. Accordingly, the conveyor belt 240 is returned to the home position, the tension of the conveyor belt 240 wound on the first and second drive rollers 220, 230 is the first and second sliding members (525a, 525b) The same is applied to each of the first and second drive shafts according to the air of the reference pressure supplied equally to each other.

7A to 7C are views for explaining a method of preventing meandering of a conveyor belt according to another embodiment in the substrate processing apparatus according to the embodiment of the present invention.

7A to 7C will be described with reference to FIG. 4 schematically illustrating a meandering prevention method of a conveyor belt according to another embodiment.

First, as shown in FIG. 7A, when meandering occurs on the other side of the conveyor belt 240, the second position detecting member 533b detects the meandering generated on the other side of the conveyor belt 240 to form a second logic state. Generates a second detection signal. At this time, since one side of the conveyor belt 240 is not detected by the first position detecting member 533a, the first position detecting member 533a generates a first detection signal in a first logical state.

Subsequently, the second solenoid valve 535b receives the pressure of the air supplied to the second sliding member 525b in response to the second detection signal of the second logic state supplied from the second position detecting member 533b. By releasing or reducing, the second drive shaft of the second sliding member 525b is retracted toward the inside of the second sliding member 525b. At the same time, the first solenoid valve 535a is the reference of the air supplied to the first sliding member 525a in response to the first detection signal of the first logic state supplied from the first position detecting member 533a. By maintaining the pressure as it is, the first drive shaft of the first sliding member 525a is positioned in position.

Accordingly, the second driving shaft of the second sliding member 525b is retracted and the first driving shaft of the first sliding member 525a is fixed in position, thereby as shown in FIG. 7B. And only the other side of the first driving roller 220 is slid toward the atmospheric pressure housing 521 by the tension of the conveyor belt 240 wound on the second driving rollers 220 and 230. Accordingly, the conveyor belt 240 is inclined in the second direction downward from the other side to the one side based on the central axis CA corresponding to the center of one side of the first driving roller 220. Is wound around the first driving roller 220 to be gradually moved from the other side of the first driving roller 220 toward one side in accordance with the rotation of the first driving roller 220.

Subsequently, as shown in FIG. 7C, the conveyor belt 240 is gradually moved from one side of the first driving roller 220 to one side so that the other side of the conveyor belt 240 is detected by the second position detecting member 533b. If not, the second position detecting member 533b generates the second detection signal in the first logic state.

Subsequently, the second solenoid valve 535b receives the pressure of the air supplied to the second sliding member 525b in response to the second detection signal of the first logic state supplied from the second position detecting member 533b. Increase to reference pressure. Accordingly, the second driving shaft of the second sliding member 525b is advanced toward the first driving roller 220 and positioned at the home position. Accordingly, the conveyor belt 240 is returned to the home position, the tension of the conveyor belt 240 wound on the first and second drive rollers 220, 230 is the first and second sliding members (525a, 525b) The same is applied to each of the first and second drive shafts according to the air of the reference pressure supplied equally to each other.

Referring to the substrate processing method using a substrate processing apparatus according to an embodiment of the present invention as described above is as follows.

First, a vacuum atmosphere is formed in the vacuum chamber 100 through the pumping of the vacuum pump 110.

Subsequently, the conveyor belt 240 is rotated in a predetermined direction by rotating the first and second driving rollers 220 and 230.

Subsequently, the substrate S is loaded on the conveyor belt 240 through the substrate loading gate 120 provided on one side wall of the vacuum chamber 100 and moved between the substrate heating module 300 and the substrate processing module 400. In this case, the substrate S loaded on the conveyor belt 240 may be preheated to a predetermined temperature by the substrate preheating module 600.

Subsequently, when the substrate S loaded on the conveyor belt 240 moves between the substrate heating module 300 and the substrate processing module 400, the substrate processing is performed while heating the substrate S through the substrate heating module 300. By applying a process gas and a plasma power source to the module 400, plasma is formed on the substrate S to form a predetermined thin film on the substrate S, or a substrate processing process of etching the substrate S is performed.

The substrate transfer process and the substrate processing process as described above are continuously performed. At this time, using the belt position correction module 500, as shown in Figures 6a to 6c and / or 7a to 7c described above, the conveyor belt (rotated by the first and second drive rollers 220, 230 ( The rotation of the conveyor belt 240 is detected by detecting the position of the 240 and individually sliding both sides of the first driving roller 220 so that the first driving roller 220 is inclined according to the detected position of the conveyor belt 240. Return the position to the home position.

Therefore, the substrate processing apparatus and the substrate processing method using the same according to an embodiment of the present invention detects the rotation of the conveyor belt 240 while meandering due to thermal expansion of the conveyor belt 240 or abnormal rotation of the conveyor belt 240. By correcting this automatically and maintaining a constant tension of the conveyor belt 240, it is possible to prevent a defect in the substrate processing process due to meandering and tension reduction of the conveyor belt 240.

Those skilled in the art to which the present invention pertains will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential features. Therefore, it is to be understood that the embodiments described above are exemplary in all respects and not restrictive. The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention. do.

100: vacuum chamber 110: pumping device
120: substrate loading gate 130: substrate loading gate
200: belt conveyor module 220: first drive roller
230: second drive roller 300: substrate heating module
400: substrate processing module 500: belt position correction module
510: connector rod 520: rod sliding portion
521: atmospheric housing 523a, 523b: rod sliding shaft
525a and 525b: sliding member 527a and 527b: bellows
530: drive control unit 531: air supply member
533a and 533b: position detecting member 535a and 535b: solenoid valve

Claims (15)

A vacuum chamber;
A belt conveyor module for transporting a substrate seated on the conveyor belt by rotating the conveyor belt according to the rotation of the pair of driving rollers installed in the vacuum chamber;
A belt position correction module installed inside the vacuum chamber to be connected to a first driving roller of the pair of driving rollers to automatically correct the position of the conveyor belt,
The belt position correction module,
A connector rod rotatably supporting each of one side and the other side of the first driving roller;
An atmospheric pressure housing installed inside the vacuum chamber and maintained at atmospheric pressure, and first and second sliding respective first and second rod sliding shafts individually connected to one side and the other side of the connector rod, respectively; Substrate processing apparatus comprising a sliding portion having a sliding member. The method of claim 1,
And the belt position correction module slides one side and the other side of the first driving roller forward or rearward individually according to the position of the conveyor belt. The method of claim 1,
The belt position correction module,
And a driving controller for detecting the position of the conveyor belt to drive the first and second sliding members of the sliding part. The method of claim 3, wherein
The inside of the sliding portion is in communication with the outside of the vacuum chamber is a substrate processing apparatus, characterized in that maintained at atmospheric pressure. The method of claim 3, wherein
The sliding part,
And first and second bellows provided between the connector rod and the atmospheric pressure housing to seal each of the first and second rod sliding shafts. delete The method of claim 5,
The drive control unit,
A first position detector installed at the atmospheric pressure housing to detect one side of the conveyor belt;
A second position detector installed at the atmospheric pressure housing so as to be parallel to the first position detector to detect the other side of the conveyor belt;
A first solenoid valve adjusting a pressure of air supplied to the first sliding member according to a position of one side of the conveyor belt detected by the first position detecting unit; And
And a second solenoid valve for adjusting a pressure of air supplied to the second sliding member according to the other position of the conveyor belt detected by the second position detecting unit. delete The method of claim 5,
Each of the first and second sliding members applies a constant pressure to each of the first and second rod sliding shafts to push one side and the other side of the first driving roller with the same force to maintain a constant tension of the conveyor belt. A substrate processing apparatus characterized by the above-mentioned. delete delete delete delete delete delete
KR1020120088433A 2012-08-13 2012-08-13 Substrate processing apparatus and substrate processing method KR102019405B1 (en)

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KR101628864B1 (en) * 2014-06-20 2016-06-10 주성엔지니어링(주) Apparatus for transferring a substrate
KR101879293B1 (en) * 2016-07-20 2018-07-17 주식회사 토바 Three Dimensional High Precision Control for Flexible Thin Film in Roll to Roll System

Citations (1)

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Publication number Priority date Publication date Assignee Title
KR100926527B1 (en) * 2008-08-04 2009-11-12 한국전진기술(주) Apparatus and method for monitoring and compensating meander of conveyer-belt

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JPH03124608A (en) * 1989-10-09 1991-05-28 Hisaka Works Ltd Snaking preventing device for conveyor belt in vacuum belt drier
KR20110095012A (en) * 2010-02-18 2011-08-24 세메스 주식회사 Substrate conveying apparatus and substrate treating apparatus with it
KR20120061731A (en) * 2010-10-11 2012-06-13 주성엔지니어링(주) Thin-film deposition apparatus and method for depositing thin-film

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Publication number Priority date Publication date Assignee Title
KR100926527B1 (en) * 2008-08-04 2009-11-12 한국전진기술(주) Apparatus and method for monitoring and compensating meander of conveyer-belt

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