KR102007401B1 - Light emitting device - Google Patents

Light emitting device Download PDF

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KR102007401B1
KR102007401B1 KR1020120068602A KR20120068602A KR102007401B1 KR 102007401 B1 KR102007401 B1 KR 102007401B1 KR 1020120068602 A KR1020120068602 A KR 1020120068602A KR 20120068602 A KR20120068602 A KR 20120068602A KR 102007401 B1 KR102007401 B1 KR 102007401B1
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layer
nitride
nitride layer
semiconductor layer
conductive semiconductor
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KR1020120068602A
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Korean (ko)
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KR20140001353A (en
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이선호
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엘지이노텍 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
    • H01L33/145—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
    • H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40—Materials therefor
    • H01L33/405—Reflective materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40—Materials therefor
    • H01L33/42—Transparent materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures

Abstract

The light emitting device according to the embodiment may include a first conductivity type semiconductor layer having a concave-convex pattern formed on one surface exposed to the outside; A second conductivity type semiconductor layer; And an active layer between the first conductive semiconductor layer and the second conductive semiconductor layer, wherein the first conductive semiconductor layer includes a pattern forming layer containing Al, and the uneven pattern includes the first conductive layer. At least a part of the type semiconductor layer and the pattern forming layer are selectively etched and formed.

Description

Light Emitting Device {LIGHT EMITTING DEVICE}

The embodiment relates to a light emitting device.

Light emitting devices such as light emitting diodes or laser diodes using semiconductors of Group 3-5 or 2-6 compound semiconductor materials of semiconductors have various colors such as red, green, blue and ultraviolet rays due to the development of thin film growth technology and device materials. It is possible to realize efficient white light by using fluorescent materials or combining colors, and it has low power consumption, semi-permanent life, fast response speed, safety and environmental friendliness compared to conventional light sources such as fluorescent and incandescent lamps. Has an advantage.

Therefore, a white light emitting device that can replace a fluorescent light bulb or an incandescent bulb that replaces a Cold Cathode Fluorescence Lamp (CCFL) constituting a backlight of a transmission module of an optical communication means and a liquid crystal display (LCD) display device. Applications are expanding to diode lighting devices, automotive headlights and traffic lights.

In order to obtain a high brightness light emitting diode, there are a method of improving the quality of the active layer to increase the internal quantum efficiency, and a method of increasing the light extraction efficiency by helping to emit the light generated from the active layer to the outside and collecting in the required direction.

Light extraction efficiency is determined by the ratio of electrons injected into the light emitting diode and photons emitted out of the light emitting diode, and the higher the light extraction efficiency, the brighter the light emitting diode.

In the nitride-based light emitting diode, when the light emitted from the active layer exits to the outside, total reflection condition occurs due to the difference in refractive index between the nitride semiconductor material and the outside, and light incident at an angle greater than or equal to the critical angle of total reflection does not escape to the outside and is reflected And then back inside the device.

In order to solve this problem, there is a method of forming a concave-convex pattern on the surface by etching the surface of the light emitting diode.

In addition, when a nitride semiconductor layer is directly grown on a sapphire substrate with a conventional nitride based light emitting device, crystal defects such as penetration dislocations may occur due to lattice constant mismatch between the sapphire substrate and the nitride semiconductor layer and a difference in thermal expansion coefficient. However, this defect is a problem that can penetrate the active layer and propagate to the surface of the light emitting device, so that the active layer can be destroyed or the reliability of the light output can be greatly affected.

The embodiment aims to increase the light extraction efficiency of the light emitting device.

The light emitting device according to the embodiment may include a first conductivity type semiconductor layer having a concave-convex pattern formed on one surface exposed to the outside; A second conductivity type semiconductor layer; And an active layer between the first conductive semiconductor layer and the second conductive semiconductor layer, wherein the first conductive semiconductor layer includes a pattern forming layer containing Al, and the uneven pattern includes the first conductive layer. At least a part of the type semiconductor layer and the pattern forming layer are selectively etched and formed.

The pattern forming layer may include at least two first pair structures of a first nitride layer and a second nitride layer containing Al, and the second nitride layer may have an increased Al content toward the active layer.

The pattern forming layer may include a second pair structure in which a third nitride layer, a first nitride layer, and a second nitride layer containing Al are sequentially stacked in the direction of the active layer.

The second pair structure may be spaced apart from each other in the pattern forming layer, and the second nitride layer may have an increased Al content toward the active layer.

The first nitride layer may be doped with a first conductivity type dopant.

The first nitride layer and the second nitride layer may include a composition of GaN and Al x Ga 1 - x N (0 <x <1), respectively.

The third nitride layer, the first nitride layer, and the second nitride layer each include In y Ga 1-y N (0 <y <1), GaN, Al x Ga 1- x N (0 <x <1 ) May comprise a composition.

In content y of the third nitride layer may satisfy 0.01 ≦ y ≦ 0.05.

The plurality of second nitride layers each include a composition of Al x Ga 1- x N (0 <x <1), wherein the Al content x satisfies 0.01 ≦ x ≦ 0.25, and the value of x toward the active layer is increased. Can increase.

A difference between the Al content x of the second nitride layer and the Al content x of the second nitride layer adjacent to each other may be 0.03 to 0.05.

The thicknesses of the first nitride layer and the second nitride layer may be 5 nm to 10 nm, respectively.

The first nitride layer may be the same thickness as the second nitride layer, or may be thicker than the second nitride layer.

The third nitride layer may be thinner than the first nitride layer or the second nitride layer.

The thickness of the pattern forming layer may be 100nm to 500nm.

The concave-convex pattern may include concave portions and convex portions, and a bottom surface of the convex portion may be positioned on a second nitride layer closest to the active layer.

The first electrode may be positioned on at least a portion of the first conductivity type semiconductor layer.

An electron blocking layer may be further included between the active layer and the second conductive semiconductor layer.

A conductive support substrate may be positioned on the second conductive semiconductor layer.

At least one of the transparent electrode layer and the reflective layer may be positioned between the second conductive semiconductor layer and the conductive support substrate.

The semiconductor device may further include a passivation layer surrounding side surfaces of the first conductive semiconductor layer, the active layer, and the second conductive semiconductor layer.

In the light emitting device according to the embodiment, the pattern forming layer is included in the first conductive semiconductor layer, the uneven pattern is uniformly formed on one surface of the first conductive semiconductor layer, and the crystallinity quality of the active layer is improved, so that the light emitting device emits light. This can be improved.

1 is a side cross-sectional view of a light emitting device according to an embodiment;
2 is an enlarged view illustrating a pattern forming layer included in an uneven pattern of the light emitting device according to the first embodiment;
3 is a cross-sectional view illustrating a thickness of a pattern forming layer of the light emitting device according to the first embodiment;
4 is a partially enlarged view of an uneven pattern of the light emitting device according to the first embodiment;
5 is an enlarged view illustrating a pattern forming layer included in an uneven pattern of the light emitting device according to the second embodiment;
6 is an enlarged view of a pattern forming layer included in an uneven pattern of the light emitting device according to the third embodiment;
7 is a cross-sectional view showing the thickness of the pattern forming layer of the light emitting device according to the second and third embodiments;
8 is a partially enlarged view of the uneven pattern of the light emitting device according to the second and third embodiments;
9A to 9D are views showing an embodiment of a method of manufacturing a light emitting device,
10 is a view showing an embodiment of a light emitting device package,
11 is a view showing an embodiment of a head lamp including a light emitting device package,
12 illustrates an embodiment of a display device including a light emitting device package.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention that can specifically realize the above object will be described.

In the description of the embodiment according to the present invention, when described as being formed on the "on or under" of each element, the above (on) or below (on) or under) includes both two elements being directly contacted with each other or one or more other elements are formed indirectly between the two elements. In addition, when expressed as “on” or “under”, it may include the meaning of the downward direction as well as the upward direction based on one element.

In the drawings, the thickness or size of each layer is exaggerated, omitted, or schematically illustrated for convenience and clarity of description. In addition, the size of each component does not necessarily reflect the actual size.

1 is a side cross-sectional view of a light emitting device according to an embodiment.

The light emitting device 10 according to the embodiment includes a first conductive semiconductor layer 300, a second conductive semiconductor layer 100, and the first conductive semiconductor layer 300 and the second conductive semiconductor layer 100. It includes an active layer 200 between).

The light emitting device 10 includes a plurality of compound semiconductor layers, for example, a light emitting diode (LED) using a semiconductor layer of group III-V elements, and the LED is colored to emit light such as blue, green, or red. It may be an LED or a UV LED. The emission light of the LED may be implemented using various semiconductors, but is not limited thereto.

The first conductive semiconductor layer 300, the active layer 200, and the second conductive semiconductor layer 100 may be collectively referred to as a light emitting structure.

The light emitting structure may include, for example, a metal organic chemical vapor deposition (MOCVD), a chemical vapor deposition (CVD), a plasma chemical vapor deposition (PECVD), a molecular beam growth method (PECVD). Molecular Beam Epitaxy (MBE), Hydride Vapor Phase Epitaxy (HVPE), or the like, may be formed using, but is not limited thereto.

The first conductivity-type semiconductor layer 300 may be formed of a semiconductor compound, and for example, may be formed of a compound semiconductor such as Group 3-5 or Group 2-6. In addition, the first conductivity type dopant may be doped. When the first conductivity type semiconductor layer 300 is an n type semiconductor layer, the first conductivity type dopant may include Si, Ge, Sn, Se, or Te as an n type dopant, but is not limited thereto. In addition, when the first conductivity type semiconductor layer 300 is a p type semiconductor layer, the first conductivity type dopant may include Mg, Zn, Ca, Sr, or Ba as a p type dopant.

The first conductive semiconductor layer 300 includes a semiconductor material having a composition formula of Al z In w Ga (1-zw) N (0 ≦ z ≦ 1, 0 ≦ w ≦ 1, 0 ≦ z + w ≦ 1). can do. The first conductive semiconductor layer 300 may be formed of any one or more of GaN, InN, AlN, InGaN, AlGaN, InAlGaN, AlInN, AlGaAs, InGaAs, AlInGaAs, GaP, AlGaP, InGaP, AlInGaP, InP.

An uneven pattern 450 is formed on one surface of the first conductive semiconductor layer 300 that is exposed to the outside. The first conductive semiconductor layer 300 includes a pattern forming layer 400 containing Al, and the uneven pattern 450 includes at least a portion of the first conductive semiconductor layer 300 and the pattern forming layer 400. ) Is selectively etched to form.

That is, a pattern forming layer 400 containing Al is included between the first conductive semiconductor material layer 310 of the first conductive semiconductor layer 300, and is formed on one surface of the first conductive semiconductor layer 300. When the uneven pattern 450 is formed, at least a portion of the first conductive type semiconductor material layer 310 of the first conductive type semiconductor layer 300 and the pattern forming layer 400 are selectively etched to form the uneven pattern ( 450) is formed. The concave-convex pattern 450 may include a concave portion 450b and a convex portion 450a, and a bottom surface of the concave portion 450a of the concave-convex pattern 450 may be positioned on the pattern forming layer 400.

The light emitting structure including the first conductive semiconductor layer 300, the active layer 200, and the second conductive semiconductor layer 100 is grown on a growth substrate. For example, the growth substrate may use at least one of sapphire (Al 2 O 3 ), SiC, GaAs, GaN, ZnO, Si, GaP, InP, Ge, and Ga 2 0 3 . In this case, crystal defects such as dislocations may occur due to lattice constant mismatch between the growth substrate and the light emitting structure and a difference in the coefficient of thermal expansion. In this case, when the first conductive semiconductor layer 300 grown on the growth substrate includes the pattern forming layer 400 containing Al, the first conductive semiconductor material layer of the first conductive semiconductor layer 300 ( Due to the lattice constant difference between the 310 and the pattern forming layer 400, dislocations may be bent to the side to prevent crystal defects from reaching the active layer 200, thereby improving crystallinity.

In this case, the crystallinity of the active layer 200 may be improved. However, when etching to form the uneven pattern 450 on the first conductive semiconductor layer 300, the active layer 200 may be included in the first conductive semiconductor layer 300. It may be difficult to form a uniform etching pattern because the binding energy of Al and N is large. According to the embodiment, the first conductive semiconductor layer 300 includes the pattern forming layer 400 including Al, thereby improving crystallinity and controlling the Al content of the pattern forming layer 400 to control the first conductive semiconductor layer ( A uniform uneven pattern 450 may be formed in 300.

The second conductivity-type semiconductor layer 100 may be formed of a semiconductor compound, for example, may be formed of a group III-V compound semiconductor doped with a second conductivity type dopant. The second conductivity-type semiconductor layer 100 has, for example, a composition formula of In z Al w Ga 1 -z- w N (0 ≦ z ≦ 1, 0 ≦ w ≦ 1, 0 ≦ z + w ≦ 1 ). It may include a semiconductor material. When the second conductivity type semiconductor layer 100 is a p type semiconductor layer, the second conductivity type dopant may include Mg, Zn, Ca, Sr, or Ba as a p type dopant. In addition, when the second conductive semiconductor layer 100 is an n-type semiconductor layer, the second conductive dopant may include Si, Ge, Sn, Se, or Te as an n-type dopant, but is not limited thereto.

In the present exemplary embodiment, the first conductive semiconductor layer 300 may be an n-type semiconductor layer, and the second conductive semiconductor layer 100 may be a p-type semiconductor layer. Alternatively, the first conductive semiconductor layer 300 may be a p-type semiconductor layer, and the second conductive semiconductor layer 100 may be an n-type semiconductor layer.

In addition, an n-type semiconductor layer (not shown) may be formed on the second conductive semiconductor layer 100 when a semiconductor having a polarity opposite to that of the second conductive type, for example, the second conductive semiconductor layer is a p-type semiconductor layer. have. Accordingly, the light emitting structure may be implemented as any one of an n-p junction structure, a p-n junction structure, an n-p-n junction structure, and a p-n-p junction structure.

The active layer 200 is positioned between the first conductive semiconductor layer 300 and the second conductive semiconductor layer 100.

The active layer 200 is a layer in which electrons and holes meet each other to emit light having energy determined by an energy band inherent to an active layer (light emitting layer) material. For example, the first conductive semiconductor layer 300 may have n In the case of a semiconductor semiconductor layer and the second conductivity-type semiconductor layer 100 is a p-type semiconductor layer, electrons are supplied from the first conductivity-type semiconductor layer 300 and holes are formed in the second conductivity-type semiconductor layer 100. Can be provided.

The active layer 200 may be formed of any one of a single quantum well structure, a multi quantum well structure (MQW), a quantum-wire structure, or a quantum dot structure. For example, the active layer 200, trimethyl gallium gas (TMGa), ammonia gas (NH 3), nitrogen gas (N 2), and trimethylindium gas (TMIn) are injected, but can be a multiple quantum well structure formed in this It is not limited.

If the active layer 200 is formed of a quantum well structure, the well layer / barrier layer may be any one of InGaN / GaN, InGaN / InGaN, GaN / AlGaN, InAlGaN / GaN, GaAs (InGaAs) / AlGaAs, GaP (InGaP) / AlGaP. The pair structure may be formed, but is not limited thereto. The well layer may be formed of a material having a band gap smaller than the band gap of the barrier layer.

A conductive clad layer (not shown) may be formed on or under the active layer 200. The conductive cladding layer may be formed of a semiconductor having a bandgap wider than the bandgap of the barrier layer of the active layer. For example, the conductive clad layer may include GaN, AlGaN, InAlGaN, or superlattice structure. In addition, the conductive clad layer may be doped with n-type or p-type.

An electron blocking layer (EBL) 520 may be located between the active layer 200 and the second conductive semiconductor layer 100.

Since the electron blocking layer 520 has good mobility in the carrier, electrons provided from the first conductivity-type semiconductor layer 300 do not contribute to light emission, and the electron blocking layer 520 crosses the active layer 200 to the second conductivity-type semiconductor layer 100. It can act as a potential barrier to prevent it from escaping and causing leakage current.

The energy bandgap of the electron blocking layer 520 is larger than the energy bandgap of the barrier layer of the active layer 200, and may be formed of a single layer of AlGaN or a multilayer of AlGaN / GaN, InAlGaN / GaN, but is not limited thereto. .

The first electrode 510 is positioned on the first conductive semiconductor layer 300. The first electrode 510 may be formed in a single layer or multilayer structure, including at least one of aluminum (Al), titanium (Ti), chromium (Cr), nickel (Ni), copper (Cu), or gold (Au), respectively. Can be.

The conductive support substrate 570 is positioned under the second conductive semiconductor layer 100, and the conductive support substrate 570 may serve as a second electrode.

The conductive support substrate 570 may have a mechanical strength enough to separate well into separate chips through a scribing process and a breaking process without causing warping of the entire nitride semiconductor. It may be formed of a material having high conductivity and thermal conductivity. For example, the conductive support substrate 570 may be formed of molybdenum (Mo), silicon (Si), tungsten (W), copper (Cu), or aluminum (Al) as a base substrate having a predetermined thickness. It may be made of a material selected from the group or alloys thereof, and also, gold (Au), copper alloy (Cu Alloy), nickel (Ni), copper-tungsten (Cu-W), carrier wafers (eg GaN, Si, Ge, GaAs, ZnO, SiGe, SiC, SiGe, Ga 2 O 3, etc.) or a conductive sheet may be optionally included.

The transparent electrode layer 530 may be positioned between the second conductive semiconductor layer 100 and the conductive support substrate 570. Since the second conductivity-type semiconductor layer 100 has a low impurity doping concentration and high contact resistance, and thus may not have good ohmic characteristics, the transparent electrode layer 530 is to improve such ohmic characteristics and is not necessarily formed. .

The transparent electrode layer 530 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zinc oxide (IAZO), indium gallium zinc oxide (IGZO), or IGTO (IGTO). indium gallium tin oxide (AZO), aluminum zinc oxide (AZO), antimony tin oxide (ATO), gallium zinc oxide (GZO), IZO (IZO Nitride), AGZO (Al-Ga ZnO), IGZO (In-Ga ZnO), ZnO , IrOx, RuOx, NiO, RuOx / ITO, Ni / IrOx / Au, or Ni / IrOx / Au / ITO, Ag, Ni, Cr, Ti, Al, Rh, Pd, Ir, Sn, In, Ru, Mg, It may be formed including at least one of Zn, Pt, Au, Hf, and is not limited to these materials.

The reflective layer 540 may be located between the second conductive semiconductor layer 100 and the conductive support substrate 570 of the light emitting structure.

The reflective layer 540 may effectively reflect light generated by the active layer 200, thereby greatly improving the light extraction efficiency of the light emitting device. The reflective layer 540 may be formed of, for example, aluminum (Al), silver (Ag), nickel (Ni), platinum (Pt), rhodium (Rh), or a metal layer including Al, Ag, Pt, or Rh. .

When the transparent electrode layer 530 may be positioned between the reflective layer 540 and the second conductive semiconductor layer 100, the reflective layer 540 is formed of a material in ohmic contact with the second conductive semiconductor layer 100. The transparent electrode layer 530 may not be formed separately.

The light emitting structure and the conductive support substrate 570 on which the reflective layer 540 and / or the transparent electrode layer 530 are formed may be coupled to each other by the bonding layer 560.

The bonding layer 560 includes a barrier metal or a bonding metal, and may include, for example, at least one of Ti, Au, Sn, Ni, Cr, Ga, In, Bi, Cu, Ag, or Ta, It does not limit to this.

In addition, the passivation layer 550 may be formed on at least a portion of the side and top of the light emitting structure.

The passivation layer 550 may protect the light emitting structure and prevent electrical short between layers. The passivation layer 550 may be formed of an insulating material such as an oxide or nitride, and may be formed of, for example, a silicon oxide (SiO 2 ) layer, an oxynitride layer, or an aluminum oxide layer.

Hereinafter, each embodiment will be described in detail with reference to the accompanying drawings, in which the pattern forming layer 400 included in the uneven pattern 450 of the light emitting device 10 is enlarged.

2 is an enlarged view illustrating a pattern forming layer included in an uneven pattern of the light emitting device according to the first embodiment.

In the light emitting device 10 according to the first exemplary embodiment, the first conductive semiconductor layer 300, the second conductive semiconductor layer 100, and the first conductive type in which the uneven pattern 450 is formed on one surface exposed to the outside. An active layer 200 between the semiconductor layer 300 and the second conductivity-type semiconductor layer 100, and the first conductivity-type semiconductor layer 300 includes a pattern forming layer 400 containing Al. The uneven pattern 450 is formed by selectively etching at least a portion of the first conductivity-type semiconductor layer 300 and the pattern forming layer 400.

The pattern forming layer 400 includes at least two first pair structures 410 of the first nitride layer 411 and the second nitride layer 413 containing Al, and the second nitride layer 413 Al content may increase toward the active layer 200.

In some embodiments, a first conductive dopant may be doped into the first nitride layer 411. The first conductivity type dopant may include Si, Ge, Sn, Se, or Te as an n type dopant when the first conductivity type semiconductor layer 300 is an n type semiconductor layer, or the first conductivity type semiconductor layer 300 may be In the case of the p-type semiconductor layer, the p-type dopant may include Mg, Zn, Ca, Sr, or Ba, but is not limited thereto.

The first pair structure 410 may be adjacent to each other or may be spaced apart from each other. When the first pair structures 410 are spaced apart from each other, the first conductivity type semiconductor material layer 310 may be included between adjacent first pair structures 410.

The first nitride layer 411 comprises a composition of GaN, and the second nitride layer 413 may comprise a composition of Al x Ga 1 -x N (0 <x <1). In addition, the first nitride layer 411 and the first conductive semiconductor material layer 310 of the first conductive semiconductor layer 300 may have the same composition.

For example, the content x of Al in each of the second nitride layers 413 may satisfy 0.01 ≦ x ≦ 0.25, and the content x of Al may be greater in the second nitride layer 413 adjacent to the active layer 200. Can increase gradually.

In this case, a difference between the content x of Al in the second nitride layer 413 and the content x of Al in the adjacent second nitride layer may be 0.03 to 0.05.

The pattern forming layer 400 includes two or more first pair structures 410 including the first nitride layer 411 and the second nitride layer 413, and the second nitride layer adjacent to the active layer 200 direction. In the case where 413 has a structure in which the Al content increases, the AlGaN included in the second nitride layer 413 and the GaN included in the first conductive semiconductor material layer 310 and the first nitride layer 413 are increased. Due to the difference in lattice constant, crystal defects, such as through dislocations, are bent sideways, so that crystal defects do not reach the active layer 200, thereby improving crystallinity.

In addition, in the first pair structure 410 having a low Al content, Al-N bonds having a large bonding energy are relatively small, so that etching is performed to form the uneven pattern 450. Etching is not easy due to an increase in Al content, and the second nitride layer 413 closest to the active layer 200 has a large Al-N bond with a large bonding energy, thereby preventing etching, thereby preventing the first conductive semiconductor layer. A uniform concave-convex pattern 450 may be formed at 300.

3 is a cross-sectional view illustrating a thickness of a pattern forming layer included in the light emitting device according to the first embodiment.

The thickness of the first nitride layer 411 thickness (d 11) and the second nitride layer 413 thickness (d 12) of may be about 5nm to about 10nm, respectively, the first nitride layer 411 of (d 11 ) is or equal to the thickness (d 12) of the second nitride layer 413, the first thickness of the nitride layer (411) (d 11) is the thickness of the second nitride layer 413, (d 12) It can be thicker.

The thickness of the first pair structure 410 including the first nitride layer 411 and the second nitride layer 413 (d 11) + d 12 ) may be about 10 nm to 20 nm.

In addition, the thickness d 1 of the pattern forming layer 400 including the plurality of first pair structures 410 may be about 100 nm to about 500 nm.

When the thickness d 12 of the second nitride layer 413 is too thin, the effect for improving the crystallinity may be reduced, and when the thickness d 12 of the second nitride layer 413 is too thick, an increase in operating voltage and It may cause a decrease in electrical properties due to a decrease in crystallinity. In addition, if thicker than the thickness (d 1) of the pattern forming layer (400) 500nm, 500nm thick than the rest of the pattern-forming layer may be unable to contribute to the improvement of crystallinity, not even contribute uniformity of concave-convex pattern 450.

4 is a partially enlarged view of an uneven pattern of the light emitting device according to the first embodiment.

An uneven pattern 450 is formed on one surface of the first nitride semiconductor layer 300 exposed to the outside to increase light extraction efficiency of the light emitting device 10. The concave-convex pattern 450 may include a concave portion 450b and a convex portion 450a, and the bottom surface 451 of the convex portion 450a may be positioned on the second nitride layer 413 closest to the active layer 200. have. In this case, the bottom surface 451 of the convex portion 450a may be located at an interface between the second nitride layer 413 and the first nitride layer 411 closest to the active layer 200, or the active layer 200. It may be located inside the second nitride layer 413 closest to.

5 is an enlarged view illustrating a pattern forming layer included in an uneven pattern of the light emitting device according to the second embodiment.

In the light emitting device 10 according to the second exemplary embodiment, the first conductive semiconductor layer 300, the second conductive semiconductor layer 100, and the first conductive type in which the uneven pattern 450 is formed on one surface exposed to the outside. An active layer 200 between the semiconductor layer 300 and the second conductivity-type semiconductor layer 100, and the first conductivity-type semiconductor layer 300 includes a pattern forming layer 400 containing Al. The uneven pattern 450 is formed by selectively etching at least a portion of the first conductivity-type semiconductor layer 300 and the pattern forming layer 400.

The pattern forming layer 400 has a second pair structure in which a third nitride layer 415, a first nitride layer 411, and a second nitride layer 413 containing Al are sequentially stacked in the direction of the active layer 200. 420 may be included.

The first nitride layer 411 may have the same composition as that of the first conductive semiconductor material layer 310, and in some embodiments, the first conductive dopant may be doped. The first conductivity type dopant may include Si, Ge, Sn, Se, or Te as an n type dopant when the first conductivity type semiconductor layer 300 is an n type semiconductor layer, or the first conductivity type semiconductor layer 300 may be In the case of the p-type semiconductor layer, the p-type dopant may include Mg, Zn, Ca, Sr, or Ba, but is not limited thereto.

The third nitride layer 415 includes a composition of In y Ga 1 -y N (0 <y <1), the first nitride layer 411 includes a composition of GaN, and the second nitride layer 413 ) May comprise a composition of Al x Ga 1- x N (0 <x <1).

As an example, the content x of Al in the second nitride layer 413 may satisfy 0.01 ≦ x ≦ 0.25, and the content y of In in the third nitride layer 415 may satisfy 0.01 ≦ y ≦ 0.05. have.

When the pattern forming layer 400 has a structure including the second pair structure 420 including the third nitride layer 415, the first nitride layer 411, and the second nitride layer 413. Differences in lattice constants of AlGaN included in 2 nitride layer 413 and InGaN included in third nitride layer 415, GaN included in first conductive semiconductor material layer 310, and first nitride layer 413 As a result, crystal defects such as through dislocations are bent sideways, so that crystal defects do not reach the active layer 200, thereby improving crystallinity.

In addition, in the third nitride layer 415 including In, the bonding energy between In and N is small so that etching for forming the uneven pattern 450 may be performed as compared with the first nitride layer 411 and the second nitride layer 413. Even better, the second nitride layer 411 which does not contain Al is well etched, but there is an Al-N bond having a high bonding energy in the second nitride layer 413 including Al adjacent to the active layer 200. Sea etching is prevented. Therefore, when the second pair structure 420 is laminated in the order of the third nitride layer 415, the first nitride layer 411, and the second nitride layer 413, the etching is performed on the third nitride layer 413. As a result, the first nitride layer 411 and the second nitride layer 413 may be blocked to form a uniform concave-convex pattern 450 on the first conductive semiconductor layer 300.

7 is a cross-sectional view illustrating a thickness of a pattern formation layer included in the light emitting device according to the second embodiment.

The thickness of the first nitride layer (411) (d 21) to the thickness of the second nitride layer (413) (d 22) may be in each of 5nm to 10nm, the thickness of the first nitride layer (411) (d 21) is equal to the thickness (d 22) of the second nitride layer 413, or the thickness of the first nitride layer (411) (d 21) is the thickness of the second nitride layer 413, (d 22) It can be thicker than The thickness d 23 of the third nitride layer 415 may be thinner than the thickness d 21 of the first nitride layer 411 or may be thinner than the thickness d 22 of the second nitride layer 413. .

In addition, the thickness of the pattern formation layer 400 may be about 100nm to about 500nm.

When the thickness d 22 of the second nitride layer 413 is too thin, the effect of improving the crystallinity may be reduced, and when the thickness d 22 of the second nitride layer 413 is too thick, the operating voltage may increase and It may cause a decrease in electrical properties due to a decrease in crystallinity. In the case of the third nitride layer 415 including InGaN grown at a relatively low temperature, too much thickness d 23 may cause crystalline degradation. In addition, when the thickness of the pattern forming layer 400 is thicker than 500 nm, the remaining pattern forming layer thicker than 500 nm may not contribute to the improvement of crystallinity and may not contribute to the uniformity of the uneven pattern 450.

8 is a partially enlarged view of an uneven pattern of the light emitting device according to the second embodiment.

An uneven pattern 450 is formed on one surface of the first nitride semiconductor layer 300 exposed to the outside to increase light extraction efficiency of the light emitting device 10. The concave-convex pattern 450 may include a concave portion 450b and a convex portion 450a, and a bottom surface 451 of the convex portion 450 may be positioned on the second nitride layer 413 adjacent to the active layer 200. . In this case, the bottom surface 451 of the convex portion 450a may be located at an interface between the second nitride layer 413 and the first nitride layer 411, or may be located inside the second nitride layer 413. have.

6 is an enlarged view illustrating a pattern forming layer included in the uneven pattern of the light emitting device according to the third embodiment.

In the light emitting device 10 according to the third exemplary embodiment, the first conductive semiconductor layer 300, the second conductive semiconductor layer 100, and the first conductive type in which the uneven pattern 450 is formed on one surface exposed to the outside. An active layer 200 between the semiconductor layer 300 and the second conductivity-type semiconductor layer 100, and the first conductivity-type semiconductor layer 300 includes a pattern forming layer 400 containing Al. The uneven pattern 450 is formed by selectively etching at least a portion of the first conductivity-type semiconductor layer 300 and the pattern forming layer 400.

The pattern forming layer 400 has a second pair structure in which a third nitride layer 415, a first nitride layer 411, and a second nitride layer 413 containing Al are sequentially stacked in the direction of the active layer 200. 420, and the plurality of second pair structures 420 may be spaced apart from each other in the pattern forming layer 400. In this case, the Al content of the second nitride layer 413 may increase toward the active layer 200.

That is, the second pair structure 420 is spaced apart from each other between the first conductivity type semiconductor material layer 310 of the first conductivity type semiconductor layer 300 and included in the second pair structure 420. The Al content of the second nitride layer 413 may increase toward the active layer 200. Therefore, the pattern forming layer 400 according to the embodiment may include at least two second pair structures 420 and a first conductivity type semiconductor material layer 310 ′ between two adjacent second pair structures 420. have.

The first nitride layer 411 may have the same composition as the first conductive semiconductor material layers 310 and 310 ′, and the first conductive dopant may be doped in some embodiments. The first conductivity type dopant may include Si, Ge, Sn, Se, or Te as an n type dopant when the first conductivity type semiconductor layer 300 is an n type semiconductor layer, or the first conductivity type semiconductor layer 300 may be In the case of the p-type semiconductor layer, the p-type dopant may include Mg, Zn, Ca, Sr, or Ba, but is not limited thereto.

The third nitride layer 415 includes a composition of In y Ga 1 -y N (0 <y <1), the first nitride layer 411 includes a composition of GaN, and the second nitride layer 413 ) is a second nitride layer adjacent to the Al x Ga 1 direction -x N (0 <x <can include a composition of 1), the second content x of Al in the nitride layer 413 is the active layer 200 ( 413) may increase.

The content x of Al in the second nitride layer 413 may satisfy 0.01 ≦ x ≦ 0.25, and the content y of In in the third nitride layer 415 may satisfy 0.01 ≦ y ≦ 0.05.

In addition, the difference between the Al content x of the second nitride layer 413 and the Al content x of the adjacent second nitride layer may be 0.03 to 0.05.

The second pair structure 420 including the third nitride layer 413, the first nitride layer 411, and the second nitride layer 413 is spaced apart from each other in the pattern forming layer 400, and includes an active layer ( When the second nitride layer 413 adjacent to the direction 200 has a structure in which the Al content increases, AlGaN included in the second nitride layer 413 and InGaN included in the third nitride layer 415 and the first Due to the difference in the lattice constants of the GaN contained in the conductive semiconductor material layers 310 and 310 'and the first nitride layer 413, crystal defects such as penetration dislocations are laterally bent to determine the active layer 200. Defects do not come and crystallinity may be improved.

In addition, in the third nitride layer 415 including In, the bonding energy between In and N is small so that etching for forming the uneven pattern 450 may be performed as compared with the first nitride layer 411 and the second nitride layer 413. Even better, the second nitride layer 411 which does not contain Al is well etched, but in the second nitride layer 413 which contains Al, Al-N bonds having a large bond energy are present so that the etching is not performed. . In addition, in the second pair structure 420 having a low Al content, Al-N bonds having a large bonding energy are relatively present, so that etching is performed to form the uneven pattern 450, but toward the active layer 200. Since the Al content increases, etching is not easy, and the second nitride layer 413 closest to the active layer 200 has a large Al-N bond with a large bonding energy, thereby preventing etching.

Therefore, when there are a plurality of second pair structures 420 stacked in the order of the third nitride layer 415, the first nitride layer 411, and the second nitride layer 413, toward the active layer 200. Increasingly difficult to etch, the second nitride layer 413 closest to the active layer 200 has a large number of Al-N bonds with a large bond energy, the etching is prevented, uniform to the first conductivity-type semiconductor layer 300 The uneven pattern 450 may be formed.

7 is a cross-sectional view illustrating a thickness of a pattern formation layer included in the light emitting device according to the third embodiment.

The thickness of the first nitride layer (411) (d 21) to the thickness of the second nitride layer (413) (d 22) may be in each of 5nm to 10nm, the thickness of the first nitride layer (411) (d 21) is more than the thickness (d 22) of the second nitride layer 413 is equal to the thickness (d 22) or of the first nitride layer 411 thickness (d 21) of the second nitride layer 413 It can be thick. The thickness d 22 of the third nitride layer 415 may be thinner than the thickness d 21 of the first nitride layer 411 or the thickness d 22 of the second nitride layer 413.

In addition, the thickness of the pattern forming layer 400 may be about 100nm to about 500nm.

When the thickness d 22 of the second nitride layer 413 is too thin, the effect of improving the crystallinity may be reduced, and when the thickness d 22 of the second nitride layer 413 is too thick, the operating voltage may increase and It may cause a decrease in electrical properties due to a decrease in crystallinity. In the case of the third nitride layer 415 including InGaN grown at a relatively low temperature, too much thickness d 23 may cause crystalline degradation. In addition, when the thickness of the pattern forming layer 400 is thicker than 500 nm, the remaining pattern forming layer thicker than 500 nm may not contribute to the improvement of crystallinity and may not contribute to the uniformity of the uneven pattern 450.

8 is a partially enlarged view of an uneven pattern of the light emitting device according to the third embodiment.

An uneven pattern 450 is formed on one surface of the first nitride semiconductor layer 300 exposed to the outside to increase light extraction efficiency of the light emitting device 10. The concave-convex pattern 450 may include a concave portion 450b and a convex portion 450a, and a bottom surface 451 of the convex portion 450 may be positioned on the second nitride layer 413 adjacent to the active layer 200. . In this case, the bottom surface 451 of the convex portion 450a may be located at an interface between the second nitride layer 413 and the first nitride layer 411 closest to the active layer 200, or the active layer 200. It may be located inside the second nitride layer 413 closest to.

9A to 9D are views illustrating an embodiment of a method of manufacturing a light emitting device.

As shown in FIG. 9A, a light emitting structure including the first conductive semiconductor layer 300, the active layer 200, and the second conductive semiconductor layer 100 is grown on the growth substrate 580.

The light emitting structure may be, for example, metal organic chemical vapor deposition (MOCVD), chemical vapor deposition (CVD), plasma chemical vapor deposition (PECVD), or molecular beam growth method (PECVD). Molecular Beam Epitaxy (MBE), Hydride Vapor Phase Epitaxy (HVPE), or the like, and the like, but are not limited thereto.

The growth substrate 580 may be formed of a material suitable for growing a semiconductor material and a material having excellent thermal conductivity. The growth substrate 580 may use, for example, at least one of sapphire (Al 2 O 3 ), SiC, GaAs, GaN, ZnO, Si, GaP, InP, Ge, and Ga 2 0 3 . Impurities on the surface may be removed by wet cleaning the growth substrate 580.

The undoped semiconductor layer 590 may be first grown before the first conductive semiconductor layer 300 is grown on the growth substrate 580.

The undoped semiconductor layer 590 is a layer formed to improve the crystallinity of the first conductivity type semiconductor layer 300 and is lower than the first conductivity type semiconductor layer 300 because the first conductivity type dopant is not doped. It may be the same as the first conductive semiconductor layer 300 except for having conductivity.

The composition of the first conductive semiconductor layer 300 is as described above, n-type using a method such as chemical vapor deposition (CVD), molecular beam epitaxy (MBE) or sputtering or hydroxide vapor phase epitaxy (HVPE), etc. A GaN layer may be formed, but is not limited thereto. In addition, the first conductive semiconductor layer 300 includes a silane containing n-type impurities such as trimethyl gallium gas (TMGa), ammonia gas (NH 3 ), nitrogen gas (N 2 ), and silicon (Si) in the chamber. The gas SiH 4 may be injected and formed.

The first conductive semiconductor layer 300 may grow a first conductive semiconductor material layer 310 on the undoped semiconductor layer 590, and may include a pattern forming layer on the first conductive semiconductor material layer 310. 400) to grow. As described above, the pattern formation layer 400 includes at least two first pair structures 410 of the first nitride layer 411 and the second nitride layer 413 containing Al, or the third nitride layer. 415 and the second pair structure 420 of the first nitride layer 411 and the second nitride layer 413 containing Al.

In the case of the pattern forming layer 400 including at least two first pair structures 410, after the first conductive semiconductor material layer 310 is grown, the first nitride layer 411 is grown, and then Al The second nitride layer 413 containing the oxide, the first nitride layer 411 is grown on the second nitride layer 413, and the second nitride having an increased Al content than the previous second nitride layer; Layer 413 is grown sequentially. In this case, the first pair structure 410 of the first nitride layer 411 and the second nitride layer 413 may be further grown. In this case, the thickness of each first nitride layer 411 may be 5 nm to 10 nm, the thickness of the second nitride layer 413 may be 5 nm to 10 nm, and the thickness of the first nitride layer 411 may be a second nitride layer 413. It may be thicker or the same as the thickness. The grown pattern formation layer 400 may have a thickness of about 100 nm to about 500 nm.

In the case of the pattern forming layer 400 including the second pair structure 420, after the first conductive semiconductor material layer 310 is grown, the third nitride layer 415 is grown, and the first nitride layer is grown. After 411 is grown, a second nitride layer 413 containing Al is grown. In this case, the thickness of the first nitride layer 411 may be 5 nm to 10 nm, the thickness of the second nitride layer 413 may be 5 nm to 10 nm, and the thickness of the first nitride layer 411 may be the second nitride layer 413. The thickness of the third nitride layer 415 may be thicker than or the same as that of the first nitride layer 411 or the second nitride layer 413. The first conductive semiconductor material layer 310 'is grown on the second pair structure 420 thus grown, and the Al content is increased on the first conductive semiconductor material layer 310' than the second nitride layer. The second pair structure 420 including the second nitride layer 413 may be further grown. The grown pattern formation layer 400 may have a thickness of about 100 nm to about 500 nm.

As shown in FIG. 9B, after the pattern forming layer 400 is grown, the first conductive semiconductor material layer 310 is grown on the pattern forming layer 400 to form the first conductive semiconductor layer 300. do.

As shown in FIG. 9C, an active layer 200 is formed on the first conductivity type semiconductor layer 300. The composition of the active layer 200 is the same as described above, for example, trimethyl gallium gas (TMGa), ammonia gas (NH 3 ), nitrogen gas (N 2 ), and trimethyl indium gas (TMIn) are injected into the multi-quantum well A structure may be formed, but is not limited thereto.

An electron blocking layer 520 may be formed on the active layer 200. The composition of the electron blocking layer 520 is as described above.

A second conductive semiconductor layer 100 is formed on the electron blocking layer 520, and the composition of the second conductive semiconductor layer 100 is the same as described above, and trimethyl gallium gas (TMGa) and ammonia are formed in the chamber. Bicetyl cyclopentadienyl magnesium (EtCp 2 Mg) containing p-type impurities such as gas (NH 3 ), nitrogen gas (N 2 ), and magnesium (Mg) {Mg (C 2 H 5 C 5 H 4 ) 2 } may be implanted to form a p-type GaN layer, but is not limited thereto.

The transparent electrode layer 530 and the reflective layer 540 may be formed on the second conductive semiconductor layer 100. Compositions of the transparent electrode layer 530 and the reflective layer 540 are as described above, and may be formed by sputtering or electron beam deposition.

The bonding layer 560 and the conductive support substrate 570 may be formed on the reflective layer 540. The conductive support substrate 570 may be formed using an electrochemical metal deposition method, a bonding method using an etchant metal, or a separate bonding layer 560.

As shown in FIG. 9D, the growth substrate 580 is separated and an uneven pattern 450 is formed. The growth substrate 580 may be removed by a laser lift off (LLO) method using an excimer laser, or by dry and wet etching.

For example, when the laser lift-off method focuses and irradiates excimer laser light having a predetermined wavelength toward the growth substrate 580, heat energy is concentrated on the interface between the growth substrate 580 and the light emitting structure. As the interface is separated into gallium and nitrogen molecules, the growth substrate 580 may be instantaneously separated from the portion where the laser light passes, and the undoped semiconductor layer 590 may be separated together.

Each of the light emitting structures may be etched by element.

Thereafter, the exposed surface of the first conductivity-type semiconductor layer is etched to form the uneven pattern 450. The uneven pattern 450 may be formed by performing an etching process using a photo enhanced chemical (PEC) etching method or a mask pattern.

10 is a view showing an embodiment of a light emitting device package including a light emitting device according to the embodiment.

The light emitting device package 600 according to an embodiment may include a body 610, a first lead frame 621 and a second lead frame 622 installed on the body 610, and a body 610. The light emitting device 10 according to the above-described embodiments is electrically connected to the first lead frame 621 and the second lead frame 622, and a molding part 640 formed in the cavity. A cavity may be formed in the body 610.

The body 610 may be formed including a silicon material, a synthetic resin material, or a metal material. When the body 610 is made of a conductive material such as a metal material, although not shown, an insulating layer is coated on the surface of the body 610 to prevent an electrical short between the first and second lead frames 621 and 622. Can be.

The first lead frame 621 and the second lead frame 622 are electrically separated from each other, and supplies a current to the light emitting device 10. In addition, the first lead frame 621 and the second lead frame 622 may increase the light efficiency by reflecting the light generated by the light emitting device 10, the heat generated by the light emitting device 10 Can be discharged to the outside.

The light emitting device 10 may be installed on the body 610 or may be installed on the first lead frame 621 or the second lead frame 622. In the present embodiment, the first lead frame 621 and the light emitting element 10 are directly energized, and the second lead frame 622 and the light emitting element 10 are connected through a wire 630. The light emitting device 10 may be connected to the lead frames 621 and 622 by a flip chip method or a die bonding method in addition to the wire bonding method.

The molding part 640 may surround and protect the light emitting device 10. In addition, a phosphor 650 is included on the molding part 640 to change the wavelength of light emitted from the light emitting device 10.

The phosphor 650 may include a garnet-based phosphor, a silicate-based phosphor, a nitride-based phosphor, or an oxynitride-based phosphor.

For example, the garnet-base phosphor is YAG (Y 3 Al 5 O 12 : Ce 3 +) or TAG: may be a (Tb 3 Al 5 O 12 Ce 3 +), wherein the silicate-based phosphor is (Sr, Ba, Mg, Ca) 2 SiO 4: Eu 2 + one can, the nitride-based fluorescent material is CaAlSiN 3 containing SiN: Eu 2 + one can, Si 6 wherein the oxy-nitride-based fluorescent material includes SiON - x Al x O x N 8 -x: Eu 2 + (0 <x <6) can be.

Light in the first wavelength region emitted from the light emitting element 10 is excited by the phosphor 650 and converted into light in the second wavelength region, and the light in the second wavelength region passes through a lens (not shown). The light path can be changed.

A plurality of light emitting device packages according to the embodiment may be arranged on a substrate, and a light guide plate, a prism sheet, a diffusion sheet, and the like, which are optical members, may be disposed on an optical path of the light emitting device package. The light emitting device package, the substrate, and the optical member may function as a light unit. Another embodiment may be implemented as a display device, an indicator device, or a lighting system including the semiconductor light emitting device or the light emitting device package described in the above embodiments, and for example, the lighting system may include a lamp or a street lamp. .

Hereinafter, a head lamp and a backlight unit will be described as an embodiment of a lighting system in which the above-described light emitting device or light emitting device package is disposed.

FIG. 11 is a diagram illustrating an embodiment of a head lamp in which a light emitting device is disposed.

Referring to FIG. 11, after the light emitted from the light emitting module 710 in which the light emitting device is disposed is reflected by the reflector 720 and the shade 730, the light may pass through the lens 740 to face the vehicle body. have.

The light emitting module 710 may be provided with a plurality of light emitting devices on a circuit board, but is not limited thereto.

12 is a diagram illustrating an example of a display device in which a light emitting device package is disposed, according to an exemplary embodiment.

Referring to FIG. 12, the display device 800 according to the embodiment is disposed in front of the light emitting modules 830 and 835, the reflector 820 on the bottom cover 810, and the reflector 820. The light guide plate 840 for guiding light emitted from the front of the display device, the first prism sheet 850 and the second prism sheet 860 disposed in front of the light guide plate 840, and the second prism sheet ( And a color filter 880 disposed in front of the panel 870 disposed in front of the panel 870.

The light emitting module includes the above-described light emitting device package 835 on the circuit board 830. Here, the PCB 830 may be used as the circuit board 830, and the light emitting device package 835 is as described with reference to FIG. 10.

The bottom cover 810 may receive components in the display device 800. The reflective plate 820 may be provided as a separate component as shown in the figure, or may be provided in the form of a high reflective material on the rear surface of the light guide plate 840 or the front surface of the bottom cover 810. Do.

Here, the reflective plate 820 may use a material having a high reflectance and being ultra-thin, and may use polyethylene terephthalate (PET).

The light guide plate 840 scatters light emitted from the light emitting device package module so that the light is uniformly distributed over the entire area of the screen of the liquid crystal display. Accordingly, the light guide plate 830 is made of a material having good refractive index and high transmittance, and may be formed of polymethyl methacrylate (PMMA), polycarbonate (PC), polyethylene (PE), or the like. In addition, the light guide plate may be omitted, and thus an air guide method in which light is transmitted in a space on the reflective sheet 820 may be possible.

The first prism sheet 850 is formed of a translucent and elastic polymer material on one surface of the support film, and the polymer may have a prism layer in which a plurality of three-dimensional structures are repeatedly formed. Here, the plurality of patterns may be provided in the stripe type and the valley repeatedly as shown.

In the second prism sheet 860, the direction of the floor and the valley of one surface of the support film may be perpendicular to the direction of the floor and the valley of one surface of the support film in the first prism sheet 850. This is to evenly distribute the light transmitted from the light emitting module and the reflective sheet in all directions of the panel 870.

In the present embodiment, the first prism sheet 850 and the second prism sheet 860 form an optical sheet, which is composed of another combination, for example, a micro lens array or a diffusion sheet and a micro lens array. Or a combination of one prism sheet and a micro lens array.

The liquid crystal display panel (Liquid Crystal Display) may be disposed on the panel 870, and in addition to the liquid crystal display panel 860, another type of display device requiring a light source may be provided.

The panel 870 is a state in which the liquid crystal is located between the glass body and the polarizing plate is placed on both glass bodies in order to use the polarization of light. Here, the liquid crystal has an intermediate characteristic between the liquid and the solid, and the liquid crystal, which is an organic molecule having fluidity like a liquid, has a state in which the liquid crystal is regularly arranged like a crystal, and uses the property that the molecular arrangement is changed by an external electric field. Display an image.

The liquid crystal display panel used in the display device uses a transistor as an active matrix method as a switch for adjusting a voltage supplied to each pixel.

The front surface of the panel 870 is provided with a color filter 880 to transmit the light projected from the panel 870, only the red, green and blue light for each pixel can represent an image.

As described above, although the embodiments have been described by the limited embodiments and the drawings, the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the claims below but also by the equivalents of the claims.

10: light emitting device 100: second conductive semiconductor layer
200: active layer 300: first conductive semiconductor layer
310, 310 ': first conductive semiconductor material layer
400: pattern forming layer
410: first pair structure 411: first nitride layer
413: second nitride layer 415: third nitride layer
420: second pair structure 450: uneven pattern
450a: recessed portion 450b: recessed portion
510: first electrode 520: electron blocking layer
530: transparent electrode layer 540: reflective layer
550: passivation layer 560: bonding layer
570: support substrate 580: undoped semiconductor layer
590: growth substrate 600: light emitting device package
610: package body 621, 622: first, second lead frame
630: wire 640: molding part
650: phosphor 710: light emitting module
720: Reflector 730: Shade
740: lens 800: display device
810: bottom cover 820: reflector
830 and 835: Light emitting module 840: Light guide plate
850: first prism sheet 860: second prism sheet
870: panel 880: color filter

Claims (20)

A first conductivity type semiconductor layer having an uneven pattern formed on one surface exposed to the outside;
A second conductivity type semiconductor layer; And
An active layer between the first conductive semiconductor layer and the second conductive semiconductor layer;
The first conductivity type semiconductor layer includes a pattern formation layer containing Al, and the pattern formation layer is disposed between the first conductivity type semiconductor material layer of the first conductivity type semiconductor layer, and the uneven pattern is the first conductivity. At least a portion of the type semiconductor material layer and the pattern forming layer are selectively etched and formed
The pattern forming layer includes at least two first pair structures of a first nitride layer and a second nitride layer containing Al, and the second nitride layer has an Al content that increases toward the active layer,
Each of the plurality of second nitride layers includes a composition of Al x Ga 1-x N (0 <x <1), the Al content x satisfies 0.01 ≦ x ≦ 0.25, and the value of x increases toward the active layer. . delete A first conductivity type semiconductor layer having an uneven pattern formed on one surface exposed to the outside;
A second conductivity type semiconductor layer; And
An active layer between the first conductive semiconductor layer and the second conductive semiconductor layer;
The first conductivity type semiconductor layer includes a pattern forming layer containing Al,
The pattern forming layer is disposed between the first conductive semiconductor material layer of the first conductive semiconductor layer, and the uneven pattern is formed by selectively etching at least a portion of the first conductive semiconductor material layer and the pattern forming layer. ,
The pattern forming layer includes a second pair structure in which a third nitride layer, a first nitride layer and a second nitride layer containing Al are sequentially stacked in the direction of the active layer,
The second pair structure has a plurality of spaced apart from each other in the pattern forming layer, the second nitride layer is increased in the Al content toward the active layer direction,
Each of the plurality of second nitride layers includes a composition of Al x Ga 1-x N (0 <x <1), the Al content x satisfies 0.01 ≦ x ≦ 0.25, and the value of x increases toward the active layer. . The method of claim 3, wherein
The third nitride layer and the first nitride layer each comprise a composition of InyGa1-y N (0 <y <1), GaN, AlxGa1-x N (0 <x <1),
In content y of the third nitride layer satisfies 0.01 ≦ y ≦ 0.05,
The third nitride layer is thinner than the first nitride layer or the second nitride layer. The method according to claim 1 or 3,
The first nitride layer is doped with a first conductivity type dopant,
The difference between the Al content x of the second nitride layer and the Al content x of the adjacent second nitride layer is 0.03 to 0.05,
The first nitride layer and the second nitride layer have a thickness of 5nm to 10nm, respectively. The method of claim 1,
The first nitride layer and the second nitride layer each comprise a composition of GaN, Al x Ga 1-x N (0 <x <1),
The first nitride layer is the same as the second nitride layer, or thicker than the second nitride layer. delete delete delete delete delete delete delete The method according to claim 1 or 3,
The thickness of the pattern forming layer is 100nm to 500nm,
The concave-convex pattern includes a concave portion and a convex portion, and the bottom surface of the convex portion is located in the second nitride layer closest to the active layer. delete delete The method of claim 1,
An electron blocking layer between the active layer and the second conductivity type semiconductor layer, and
A passivation layer surrounding side surfaces of the first conductive semiconductor layer, the active layer, and the second conductive semiconductor layer,
A first electrode is positioned on at least a portion of the first conductivity type semiconductor layer,
A conductive support substrate is located on the second conductive semiconductor layer,
At least one of a transparent electrode layer and a reflective layer is disposed between the second conductive semiconductor layer and the conductive support substrate. delete delete An illumination system comprising the light emitting element according to any one of claims 1, 3, and 4.
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