KR101986529B1 - Clamper and clamping system - Google Patents

Abstract

The present invention relates to a clamper and a clamping system. According to the present invention, the clamper (300), which is a clamper (300) for clamping and tensioning one side of a mask (150), comprises: a grip part (310) for clamping the mask (150); and an angle adjusting part (320) for controlling the grip part (310) to have a predetermined angle from a horizontal direction by swinging (S). Therefore, an objective of the present invention is to provide the clamper capable of preventing deformation such as sagging, twisting, and the like of the mask and clarifying alignment.

Description

[0001] CLAMPER AND CLAMPING SYSTEM [0002]

The present invention relates to a clamper and a clamping system. And more particularly, to a mask clamping system capable of clamping and tensioning a mask and a mask clamping system capable of clearly aligning a mask on a frame.

Recently, electroforming methods have been studied in the manufacture of thin plates. In the electroplating method, an anode body and a cathode body are immersed in an electrolytic solution, and a power source is applied to electrodeposit a metal thin plate on the surface of the cathode body, so that an ultra thin plate can be manufactured and mass production can be expected.

On the other hand, FMM (Fine Metal Mask) method for depositing an organic material at a desired position by bringing a thin film metal mask (Shadow Mask) into close contact with a substrate is mainly used as a technique of forming a pixel in an OLED manufacturing process.

In a conventional OLED manufacturing process, a mask is formed in a stick shape or a plate shape, and then a mask is welded and fixed to an OLED pixel deposition frame. One mask may include several cells corresponding to one display. In addition, several masks can be fixed to the OLED pixel deposition frame for the manufacture of a large area OLED. In the process of fixing to the frame, each mask is stretched so as to be flat. Adjusting the tensile force so that the entire portion of the mask is flat is a very difficult task. Particularly, in order to align a mask pattern having a size of several to several tens of micrometers while flattening each of the cells, a highly advanced operation for checking the alignment state in real time while finely adjusting the tensile force applied to each side of the mask Is required.

Nevertheless, there has been a problem in that, in fixing the plurality of masks to one frame, alignment between the masks and between the mask cells is not good. Further, in the process of welding and fixing the mask to the frame, there is a problem that the thickness of the mask film is too thin and the mask is warped due to the load.

In the case of ultra-high quality OLED, QHD image quality is 500 ~ 600 PPI (pixel per inch), pixel size is about 30 ~ 50㎛, 4K UHD and 8K UHD high image quality are higher ~ 860 PPI, ~ 1600 PPI Resolution. Considering the pixel size of the ultra-high-resolution OLED, the alignment error between each cell must be reduced to about several micrometers, and the deviation from the OLED can lead to a product failure, resulting in a very low yield. Therefore, it is necessary to develop techniques for preventing deformation such as masking and twisting, clarifying alignment, fixing the mask to the frame, and the like.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a clamper and a clamping system capable of clamping and tensioning a mask in a frame-integrated mask manufacturing system in which a mask and a frame are integrally structured For that purpose.

It is also an object of the present invention to provide a clamper and clamping system capable of preventing deformation such as warping or twisting of the mask and clarifying alignment.

The above object of the present invention is achieved by a clamper for clamping and stretching one side of a mask, comprising: a grip part for clamping a mask; And an angle regulating portion for controlling the grip portion to swing and to have a predetermined angle from the horizontal direction.

The grip portion includes an upper grip portion and a lower grip portion, a mask is clamped between the upper grip portion and the lower grip portion, and the upper grip portion may be formed longer than the lower grip portion.

A swing shaft may be formed between the grip portion and the angle adjusting portion.

The swing connection portion may transmit the force that the grip portion swings with respect to the swing axis as the distance between the angle adjusting portion and the grip portion is adjusted.

When the grip portion swings downward with respect to the swing axis, the end portion of the upper grip portion can apply a load to the inner side than the clamped mask side.

The grip portion includes an upper grip portion and a lower grip portion, a mask is clamped between the upper grip portion and the lower grip portion, and the upper grip portion and the lower grip portion may be formed to have the same length.

The above object of the present invention can also be achieved by a clamping system for clamping and tensioning one side of a mask, the clamping system comprising at least a pair of clampers for clamping and tensioning at least two sides of the mask And the clamper comprises: a grip portion for clamping the mask; And an angle regulating portion for controlling the grip portion to swing and to have a predetermined angle from the horizontal direction.

The grip portion includes an upper grip portion and a lower grip portion, a mask is clamped between the upper grip portion and the lower grip portion, and the upper grip portion may be formed longer than the lower grip portion.

A swing shaft may be formed between the grip portion and the angle adjusting portion.

The swing connection portion may transmit the force that the grip portion swings with respect to the swing axis as the distance between the angle adjusting portion and the grip portion is adjusted.

When the grip portion swings downward with respect to the swing axis, the end portion of the upper grip portion can apply a load to the inner side than the clamped mask side.

The clamp portion may be provided with a through hole wider than the area of at least one mask, and at least one pair of clamper may be disposed on both sides of the through hole so as to face each other.

When the clamper applies a load to the mask, at least a part of the mask can pass through the through-hole and come into contact with the frame.

A load can be applied to the inner side than the mask side clamped by the upper grip portion.

A rail is interposed between the clamp portion and the clamper so that the clamper can be reciprocated in the longitudinal direction of the clamp portion.

The grip portion includes an upper grip portion and a lower grip portion, a mask is clamped between the upper grip portion and the lower grip portion, and the upper grip portion and the lower grip portion may be formed to have the same length.

And a pressing part which is provided so as to be reciprocable in the lengthwise direction and the vertical direction of the clamp part and in which a load is applied to the inside of the part of the mask clamped by the clamper to bring the mask into contact with the frame.

The pressing portion includes a pair of horizontal guide rails provided on both sides of the through-hole so as to be parallel to the longitudinal direction of the clamp portion; A pair of vertical guide rails provided on the pair of horizontal guide rails so as to be reciprocable in the longitudinal direction; A connecting bar to which both ends are connected so as to be vertically reciprocable on a pair of vertical guide rails; And a pushing unit connected on one side of the connecting bar.

The pressing unit may include a pressing plate on the surface and a stretching portion for stretching the pressing plate in the vertical direction from the connecting bar.

According to the present invention configured as described above, there is an effect that the mask can be clamped and tensioned in a frame-integrated mask production system in which the mask and the frame have an integral structure.

Further, according to the present invention, it is possible to prevent deformation such as warping or twisting of the mask and to make alignment clear.

1 and 2 are schematic views showing a process of bonding a conventional mask to a frame.
FIG. 3 is a schematic view showing an alignment error between cells in a process of stretching a conventional mask. FIG.
4 is a front view showing a frame-integrated mask according to an embodiment of the present invention.
5 is a front view and a side sectional view showing a frame according to an embodiment of the present invention.
6 is a schematic view illustrating a process of adhering a mask according to an embodiment of the present invention to a cell region of a frame.
7 is a schematic view showing a system for manufacturing a frame-integrated mask according to an embodiment of the present invention.
8 and 9 are a perspective view and a side view showing a clamper according to an embodiment of the present invention.
10 and 11 are schematic views illustrating a process of bonding a mask to a frame using a clamping system according to an embodiment of the present invention.
12 is a schematic view showing a state in which a clamper according to an embodiment of the present invention clamps a mask and applies a load to the mask.
FIGS. 13 and 14 are schematic views showing a process of sequentially adhering a mask to a frame after the processes of FIGS. 10 and 11. FIG.
15 is a side view showing a clamper according to another embodiment of the present invention.
16 is a perspective view showing a clamping system according to another embodiment of the present invention.
17 and 18 are schematic views illustrating a process of bonding a mask to a frame using a clamping system according to another embodiment of the present invention.
19 is a schematic view showing a state in which a clamper according to another embodiment of the present invention clamps a mask and a pressing portion applies a load to the mask.
20 is a perspective view showing a clamping system according to another embodiment of the present invention.
21 and 22 are schematic views showing a state in which a load is applied to a mask using a clamping system according to another embodiment of the present invention.

The following detailed description of the invention refers to the accompanying drawings, which illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different, but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with an embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views, and length and area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily carry out the present invention.

FIGS. 1 and 2 are schematic views showing a process of adhering a conventional mask 1 to a frame 2, FIG. 3 is a schematic view showing an alignment error between cells C1 to C3 in the process of pulling a conventional mask 1 Fig. 2 (b) to 2 (d) are side sectional views taken along the line A-A 'in FIG. 2 (a).

Referring to FIG. 1, the conventional mask 1 may be made of a stick-type or a plate-type. The mask 1 shown in Fig. 1 is a stick-shaped mask, and both sides of the stick can be welded and fixed to the OLED pixel deposition frame 2.

A plurality of display cells C are provided in the body (or mask film 1a) of the mask 1. One cell C corresponds to one display such as a smart phone. In the cell C, a pixel pattern P is formed so as to correspond to each pixel of the display. When the cell C is enlarged, a plurality of pixel patterns P corresponding to R, G, and B are displayed. For example, a pixel pattern P is formed in the cell C so as to have a resolution of 70 X 140. That is, a large number of pixel patterns P constitute one cell C in a cluster, and a plurality of cells C can be formed in the mask 1. Hereinafter, the stick mask 1 having five cells (C: C1 to C5) will be described as an example.

Referring to Figs. 1 (a), 2 (a) and 2 (b), first, the mask 1 should be flattened. A pair of clamper 3 facing each other with the frame 2 therebetween clamps both sides of the mask 1 and applies tensile force F1 to F2 in the longitudinal direction of the mask 1 to pull The mask 1 is unfolded. Then, the clamper 3 moves to the position corresponding to the frame 2 along the y-axis moving rail 4 occupying the outside of the frame 2.

2 (c), the pair of clamper 3 descends along the z-axis moving rail 5 to stretch the mask 1, and the rectangular frame 2 The mask 1 is loaded. The cells (C1 to C5) of the mask (1) are located in the hollow space portion of the frame (2). The frame 2 may be of such a size that the cells C1 to C5 of one mask 1 are located in the empty space inside the frame and the cells C1 to C5 of the plurality of masks 1 Area. ≪ / RTI >

Next, referring to FIGS. 1B and 2D, the mask 1 is aligned while finely adjusting the tensile forces F1 to F2 applied to the respective sides of the mask 1, The mask 1 and the frame 2 are interconnected by welding a portion of the mask 1 with a laser L or the like. Then, the clamper 3 releases the clamping of the mask 1. Fig. 1 (c) shows a side cross-section of the interconnected mask 11 and frame 2. Fig.

Referring to FIG. 3, although the tensile forces F1 to F2 applied to the respective sides of the mask 1 are finely adjusted, there arises a problem that alignment between the mask cells C1 to C3 is not performed well. For example, the distances D1 to D1 ", D2 to D2 "between the patterns P of the cells C1 to C3 are different from each other, or the patterns P are skewed. The mask 1 is large in size including a plurality of (for example, five) cells C1 to C5, and has a very thin thickness on the order of several tens of micrometers, so that it is easily struck or warped by a load. In addition, it is very difficult to check the alignment state in real time through a microscope while adjusting the tensile forces F1 to F2 to flatten each cell.

Therefore, the minute errors of the tensile forces F1 to F2 can cause an error in the degree of elongation or expansion of each cell C1 to C3 of the mask 1, D1 ", D2 to D2 ") are different from each other. Of course, it is difficult to arrange the mask pattern P so that the error is completely zero. However, in order to prevent the mask pattern P having a size of several to several tens of micrometers from adversely affecting the pixel process of the ultra high definition OLED, . The alignment error between adjacent cells is referred to as pixel position accuracy (PPA).

In addition to this, a plurality of masks 1 of about 6 to 20 are connected to each of the frames 2, and a plurality of cells C to C5 of the mask 1, It is also a very difficult task to clarify the alignment state between the substrates, and the process time due to alignment is inevitably increased, which is a significant reason for reducing the productivity.

Accordingly, the present invention provides a frame-integrated mask capable of preventing deformation such as warping or twisting of the mask 100, clarifying alignment in the frame 200, significantly reducing the manufacturing time, and significantly increasing the yield. Method and a frame - integrated manufacturing system that implements it.

4 is a front view showing a frame-integrated mask according to an embodiment of the present invention. 5 is a front view (FIG. 5A) and a side sectional view (FIG. 5B) showing a frame 200 according to an embodiment of the present invention. 5 (b) is a side sectional view taken along the line B-B 'in FIG. 5 (a).

Referring to FIGS. 4 and 5, the frame-integrated mask may include a plurality of masks 100 and one frame 200. In other words, a plurality of masks 100 are attached to the frame 200 one by one. In FIG. 4, the mask 100 is assumed to be attached to the frame 200, but the present invention is not limited thereto. The mask 100 may vary depending on the sizes of the mask 100 and the frame 200.

A plurality of mask patterns P are formed in each of the masks 100, and one cell C may be formed in one of the masks 100. The mask 100 may be formed by electroforming so that it can be formed in a thin thickness. The mask 100 may be a super invar material having a thermal expansion coefficient of about 1.0 X 10 < ^-6 > / DEG C and an invar, about 1.0 X 10 < ^-7 > / DEG C. Since the mask 100 of this material has a very low thermal expansion coefficient, there is little possibility that the pattern shape of the mask is deformed by heat energy, and thus it can be used as FMM (Fine Metal Mask) and shadow mask in manufacturing high resolution OLED. In consideration of the development of techniques for performing the pixel deposition process in a range in which the temperature change value is not large recently, the mask 100 may be formed of nickel (Ni), nickel-cobalt ) Or the like.

The frame 200 may include a frame portion 210 having a substantially rectangular shape and a rectangular frame shape. The frame 200 may be made of a metal such as invar, super invar, aluminum, titanium, or the like, and may be made of a material such as Invar, Super Invar, Nickel, or Nickel-Cobalt having the same thermal expansion coefficient as that of the mask .

In addition, the frame 200 may include at least one grid frame portion 220 extending in at least one of a first direction (x direction) and a second direction (y direction). The grid frame part 220 may be formed in a straight line shape, and both ends may be connected to the frame part 210. When the frame 200 includes a plurality of grid frame portions 220, it is preferable that the respective grid frame portions 220 are equally spaced.

The shape of the cross section perpendicular to the longitudinal direction of the grid frame portion 220 may be a rectangular shape such as a triangle or a parallelogram (see FIG. 5B), and corner portions may be rounded to some extent.

The thickness of the rim frame portion 210 may be thicker than the thickness of the grid frame portion 220. The frame part 210 may be formed to have a thickness ranging from several millimeters to several centimeters because it is responsible for the overall rigidity of the frame 200. In the case of the grid frame part 220, if the thickness is too thick, it may cause a problem that the organic material source passes through the mask 100 in the OLED pixel deposition process. The width and thickness of the grid frame portion 220 may be about 1 to 5 mm.

The frame section 200 may include a plurality of mask cell C regions by the combination of the frame frame section 210 and the grid frame section 220. The mask cell C region may mean a vacant hollow region excluding a region occupied by the frame frame unit 210 and the grid frame unit 220 in the frame unit 200. [ As the cell C of the mask 100 is associated with the mask cell C region, it can be used as a passageway through which the pixels of the OLED are substantially deposited through the mask pattern P. As described above, one mask cell C corresponds to one display such as a smart phone. In one mask 100, mask patterns P constituting one cell C may be formed. Alternatively, although one mask 100 may have a plurality of cells C, it is necessary to avoid the large-area mask 100 for the clear alignment of the mask 100, The small-area mask 100 is preferable.

The frame 200 has a plurality of mask cell C regions, and each of the masks 100 can be adhered to correspond to one mask cell C, respectively. Each of the masks 100 includes a mask pattern portion (corresponding to the cell C) in which the plurality of mask patterns P are formed and a dummy portion (corresponding to the mask film portion except for the cell C) can do. The mask pattern portion corresponds to the mask cell (C) region of the frame 200, and a part or the whole of the dummy portion can be adhered to the frame 200. As a result, the mask 100 and the frame 200 can have an integrated structure.

Hereinafter, a process for manufacturing a frame-integrated mask will be described.

First, the frame 200 described above with reference to FIGS. 4 and 5 can be provided. The frame 200 can be manufactured by connecting the grid frame part 220 to the frame part 210 in the first direction (x direction) and the second direction (y direction). In this specification, four grid frame units 220 formed in the first direction and two grid frame units 220 formed in the second direction are connected to the frame frame unit 210, (C) region is formed.

Next, a mask 100 having a plurality of mask patterns P formed thereon can be provided. The mask 100 can be formed on a mother plate used as a cathode body in the electroplating process. It has been described that a mask 100 of Invar or Super Invar can be manufactured by the electroplating method and one cell C can be formed in the mask 100. [ The width of the mask pattern P on the base plate may be less than 40 mu m, and the thickness of the mask 100 may be about 2 to 50 mu m. The mask pattern P may have a tapered shape or a reverse tapered shape.

On the other hand, if the mask 100 includes a plurality of cells C and the alignment error is minimized even if the cells C correspond to the regions of the frame 200, And may correspond to a plurality of mask cell (C) regions of the mask cell (200). Also in this case, it is preferable that the mask 100 has as few cells C as possible in consideration of the process time and productivity in the alignment.

6 is a schematic view illustrating a process of adhering a mask 100 according to an embodiment of the present invention to a cell C region of a frame 200. FIG. 6 shows a mode in which two masks 100 are bonded to a mask cell C11 and a mask cell C12 respectively for the sake of simplicity of explanation. However, the mask 100 may be bonded to all the mask cells C11 to C13, C21 to C23, ...). A specific bonding method will be described later with reference to FIG. 7 and below with reference to the frame-integrated mask manufacturing system 10. 10, a stick-shaped mask 150 is actually bonded to the frame 200, and then a part of the dummy portion is removed from the frame 200. In this case, It should be understood that the mask 100 is removed and the portion remaining on the frame 200 adhered thereto.

Referring to FIG. 6, both sides (two sides) are stretched (F1 to F2) along the one axial direction of the stick-shaped mask 150 (see FIG. 10) to correspond to the mask cell C region . The stretching of the stick mask 150 can be performed through a clamper 300, which will be described later.

For example, the tensile force applied to each side of the mask 100 may not exceed 4N. The tensile force applied depending on the size of the mask 100 may be the same or different. In other words, since the mask 100 of the present invention has a size including one mask cell C, the tensile force required for the conventional stick-type mask 1 including the plurality of cells C1 to C5 is the same Or at least reduced. The mask 100 is attached to the frame 200 even after the mask 100 is attached to the frame 200 after the mask 100 is stretched because the force of 1 N is smaller than the force of gravity of 400 g, The tension applied to the mask 100 by the frame 200 is very small. Thus, the deformation of the mask 100 and / or the frame 200 by the tension can be minimized, and the misalignment of the mask 100 (or the mask pattern P) can be minimized.

The conventional mask 1 of FIG. 1 has a long length since it includes five cells (C1 to C5), whereas the mask 100 of the present invention includes a single cell (C) So that the degree to which the pixel position accuracy (PPA) is distorted can be reduced. For example, assuming that the length of the mask 1 including a plurality of cells (C1 to C5, ...) is 1 m and a PPA error of 10 m is generated in all 1 m, Can be 1 / n of the upper error range according to the reduction of the relative length (corresponding to the reduction in the number of cells (C)). For example, if the length of the mask 100 according to the present invention is 100 mm, the length of the conventional mask 1 is reduced from 1 m to 1/10, so that a PPA error of 1 μm is generated in the entire length of 100 mm , The alignment error is remarkably reduced.

On the other hand, if the mask 100 includes a plurality of cells C and the alignment error is minimized even if the cells C correspond to the regions of the frame 200, And may correspond to a plurality of mask cell (C) regions of the mask cell (200). Also in this case, it is preferable that the mask 100 has as few cells C as possible in consideration of the process time and productivity in the alignment.

The alignment state can be confirmed in real time through the camera unit of the head unit 50 while adjusting the tensile force so that the mask 100 corresponds to the mask cell C region in a flat state. In the case of the present invention, since only one cell C of the mask 100 needs to be matched and the alignment state is checked, it is necessary to simultaneously match a plurality of cells (C: C1 to C5) The manufacturing time can be remarkably reduced as compared with the conventional method (see Fig. 1).

That is, the method for fabricating a frame-integrated mask of the present invention is a method for fabricating a frame-integrated mask, in which N cells (C1 to C5) are formed by N processes for matching N masks 100 to one cell The time can be shortened compared with the conventional method of simultaneously matching and simultaneously confirming the alignment state of the N cells (C1 to C5) at the same time.

The method for producing a frame-integrated mask according to the present invention is characterized in that the product yield in the process of twenty-five processes for aligning and aligning 25 masks (100) to 25 cell areas (C) (See FIG. 1 (a)) containing five cells C 1 to C 5 (see FIG. 1 (a) have. The conventional method of aligning five cells (C1 to C5) in five cell regions (C) at a time is a much more cumbersome and difficult task, resulting in a lower product yield.

Next, after completing the mask 100 corresponding to the cell C, a part or all of the rim of the mask 100 can be attached to the frame 200. Fig. Attachment may be performed with a weld (W), and preferably with a laser weld (W). The welded portion may be integrally connected with the same material as the mask 100 / frame 200.

A portion of the mask 100 may be melted and welded (W) to the frame 200 by irradiating the laser onto the rim portion (or the dummy portion) of the mask 100. The welding W must be performed as close as possible to the edge of the frame 200 to minimize the hysterical space between the mask 100 and the frame 200 and increase the adhesion. The welded portion W may be formed in the form of a line or a spot and may be a medium for integrally connecting the mask 100 and the frame 200 with the same material as the mask 100 .

When the mask 100 is attached to the frame 200, the mask 100 is subjected to a tensile force in the direction of the frame 200 (or in the frame frame portion 210, the grid frame portion 220) or in the outward direction Lt; / RTI > Thus, the mask 100 stretched tightly toward the frame 200 is temporarily attached to the frame 200. In this state, when the laser welding W is performed, the mask 100 can be welded (W) to the upper portion of the frame 200 in a state of receiving a tensile force to the outside. Therefore, it is possible to maintain the state that the mask 100 is pulled toward the frame 200 side tightly without being torn or warped by the load.

When the process of attaching one mask 100 to the frame 200 is completed, the process of sequentially making the remaining masks 100 correspond to the remaining mask cells C and attaching them to the frame 200 can be repeated .

7 is a schematic view showing a system 10 for manufacturing a frame-integrated mask according to an embodiment of the present invention. 7 (a) is a plan view, (b) is a right side view, and (c) is a front view.

7, the frame-integrated mask manufacturing system 10 includes a table 15, a stage unit 20, a clamp unit 30, a clamp moving unit 40, a head unit 50, a head moving unit 60, a vibration damping base 70, and the like.

First, a table 15, which is a so-called gantry, is installed on a structure that is rigidly mounted to the ground to prevent external vibrations and shocks. The upper surface of the table 15 is precisely horizontal in order to proceed with a more reliable process.

On the table 15, a stage unit 20 on which the frame 200 is seated and supported is provided. The stage unit 20 includes a frame loading unit 21, a frame support 23, a backlight unit 25, and a frame alignment unit 27.

The frame loading section 21 can be disposed on the vibration damping platform 70 with a rectangular frame shape similar to the frame 200 so that the frame 200 can be seated and supported.

The frame support body 23 can prevent the frame frame portion 210 and the grid frame portion 220 from being deformed by the tension during the process of adhering the mask 100 to the frame 200. [ The frame support body 23 may be disposed in close contact with the frame 200 at a lower portion of the frame 200. Grooves may be formed on the upper surface of the frame support body 23 so that the frame frame part 210 and the grid frame part 220 are fitted to each other and the frame 200 may be inserted into the grooves. Thus, deformation of the frame 200 is prevented even in a state in which the mask 100 is adhered to the frame 200 to apply tension. The frame loading section 21 and the frame support body 23 may be integrally formed.

Thereafter, when the mask 100 is further adhered to the neighboring cell C, mutually neighboring masks 100 act on opposing forces to the frame 200 disposed therebetween, Can be canceled. This prevents the deformation of the frame 200 during the adhesion process of the mask 100 as the frame support 23 seats the frame 200 before the tension is canceled, that is, when only one mask 100 is adhered. You can do it.

As the backlight unit 25 emits light in the vertical upper (z-axis) direction, the camera unit of the head unit 50 can help identify the alignment pattern of the mast pattern P. [

The frame alignment unit 27 can be arranged on each side and at each corner of the frame 200 to align the frame 200 with the center position of the stage unit 20. [

The clamp portion 30 may be formed in a substantially plate shape and the horizontal width may be formed to be larger than the horizontal width of the frame 200. At least one pair of clamper (300) may be arranged on the upper part of the clamp part (30) so as to face each other.

A through hole 35 may be formed in the clamp part 30. [ The area through which the through-hole 35 is formed may be larger than the area of at least one of the stick masks 150 (or the mask 100). It is preferable that a pair of clamper 300 are arranged on both sides of the through-hole 35 so as to face each other. The through hole 35 may be used as an intermediate space through which the stick mask 150 is allowed to come into contact with the frame 200 by passing the stick mask 150 from the vertical upper region to the vertical lower region of the clamp portion 30. [ have. It can also be used as a space through which the laser beams L and CL irradiated in the vertical downward direction from the laser unit of the head unit 50 toward the frame 200 pass.

The clamp moving units 40 (41, 45, 49) can move the clamp unit 30 in the x-axis, y-axis, and z-axis directions. A pair of y-axis moving parts 45 formed in a linear shape can be provided on both sides of the stage part 20 so as to interlock with each other. Each of the y-axis moving parts 45 is provided with an x- Can be connected. The clamp unit 30 may be connected to the upper portion of the x-axis moving unit 41. Although not shown in FIG. 7, the z-axis moving part 49 can also be moved in the vertical direction to move the clamp part 30. On the other hand, the clamp moving section 40 may further move the clamp section 30 in the? -Axis direction. The θ axis direction is an axis direction in which the clamp unit 30 rotates on the xy plane and is adjusted when the stick mask 150 of the clamp unit 30 is aligned on the frame 200. The movement in the θ-axis direction may be performed by a combination of the x-axis and y-axis movement units 41 and 45, or may be performed by installing a separate θ-axis movement unit.

The head portion 50 is disposed above the stage portion 20 and the clamp portion 30. The head unit 50 may be provided with a laser unit, a camera unit, or the like. The laser unit includes a welding laser unit for generating a welding laser L to weld the mask 100 and the frame 200, a cutting laser for irradiating the mask 100 with laser CL and trimming the laser, Unit, and the like. The camera unit can photograph and sense the alignment state of the mask 100 and the mask pattern P. [

The head moving unit 60 (61, 65, 69) can move the head unit 50 in the x-axis, y-axis, and z-axis directions. A pair of y-axis moving parts 65 formed in a linear shape can be provided on both sides of the table 15 to interlock with each other. Each of the y-axis moving parts 65 is provided with an x-axis moving part 61 Both ends can be connected. The head portion 50 may be connected to an upper portion of the x-axis moving portion 61. Although not shown in Fig. 7, the z-axis moving portion 69 can also be moved in the vertical direction to move the head portion 50. [

The anti-vibration base (70) can be provided to prevent vibration of the table (15). When the mask 100 is adhered to the frame 200, it affects the alignment error (PPA) of the mask pattern P even in an environment where very small vibrations occur. Accordingly, the vibration damping stage 70, preferably a passive isolator, can be installed below the table 15 to prevent vibration.

8 and 9 are a perspective view and a side view showing a clamper 300 according to an embodiment of the present invention.

The clamper 300 may include a grip portion 310 and an angle adjusting portion 320.

The grip portion 310 can clamp the stick mask 150. [ The portion of the cell C on which the mask pattern P is formed in the stick mask 150 is adhered to the frame 200 to become the mask 100. The stick mask 150 and the mask 100 will be described below. The same concept is used.

The grip portion 310 may include an upper grip portion 311 and a lower grip portion 315. The gap between the upper grip portion 311 and the lower grip portion 315 can be adjusted by the tightening means and the stick mask 150 can be clamped between the upper grip portion 311 and the lower grip portion 315.

Meanwhile, the upper grip portion 311 may be longer than the lower grip portion 315. The end portion 311a of the upper grip portion 311 is pressed against the stick mask 150 in a state where the grip portion 310 clamps the stick mask 150 when the grip portion 310 swings with respect to the swing shaft 330. [ A load can be applied to the inner side portion of the clamped portion. It is preferable that the end portion 311a of the upper grip portion 311 is formed to be pointed so that a correct tensile force can be applied when the load is more clearly applied and the stick mask 150 is bent. In other words, the upper grip portion 311 may have a shape that decreases in thickness toward the end portion 311a.

The angle adjusting unit 320 may swing (S) the grip unit 310 to control the grip unit 310 to have a predetermined angle from the horizontal direction. The angle adjusting unit 320 may include a control unit 321, a force applying unit 323, a swing connection unit 325, and an expanding and contracting unit 327. A swing shaft 330 may be formed between the grip portion 310 and the angle adjusting portion 320 so that the grip portion 310 swings S with respect to the swing shaft 330.

The control unit 321 can control the degree to which the force application unit 323 moves along the x-axis direction. When the force application portion 323 is moved toward the grip portion 321 (leftward in FIG. 8), the force can be transmitted to the swing connection portion 325. The swing connection portion 325 may be formed in a substantially curved shape. Thus, the swing connection portion 325 can switch the direction of the force applied in the linear direction from the force application portion 323 to the force in the curved direction.

The swing connection portion 325 is connected to the upper connection portion 317 of the grip portion 310 and may apply a force to the upper connection portion 317 in a downward direction when a force is applied from the force application portion 323. Since the grip portion 310 is rotatably mounted with respect to the swing shaft 330, when the swing connection portion 325 applies a downward force through the upper connection portion 317, the grip portion 310 moves downward with respect to the swing shaft 330 Swing (S) can be done.

The stretchable and contractible portion 327 serves to balance the force such that the degree of swing S of the grip portion 310 by the force application portion 323 is too large. The stretchable and contractible portion 327 is an elastic means such as a spring. When the force applied to the force application portion 323 is released, the force application portion 323 can be returned to its original position.

As described above, the clamper 300 can be installed on the upper surface of the clamping portion 30. [ Clamper moving means 340 may be provided between the clamper 300 and the clamping unit 30. The clamper moving means 340 includes a control section 341 and a moving rail 345. The control unit 341 can control the degree to which the clamper 300 moves in the x-axis direction (longitudinal direction of the clamping unit 30). The clamper 300 is connected to the movable rail 345 and can control the degree of tension of the stick mask 150 while moving in the x-axis direction under the control of the controller 341.

10 and 11 are schematic views showing a process of adhering a mask 100 to a frame 200 using a clamping system according to an embodiment of the present invention. 10 (b) is a side sectional view taken along the line D-D 'of FIG. 10 (a). The clamping system includes a clamping portion 30, a clamper 300, etc., which are a series of configurations for clamping and stretching the stick mask 150 in the frame-integrated mask manufacturing system 10, It can be understood as a concept.

10 (a) and 10 (b), the clamper 300 may be installed on the upper portion of the clamp unit 30. [ The clamper 300 can face each other with the through-hole 35 therebetween. In the present invention, it is assumed that two pairs of clamper (300) are provided so as to face each other so as to clamp four corners of the stick mask (150), so that at least one pair of clamper do.

The grip portion 310 of the mutually opposing clamper 300 can clamp the edge of the stick mask 150. A stick mask loader (stick mask index) loads one stick mask 150 from an external stick loading plate (not shown) on which a plurality of stick masks 150 are loaded. Then, the clamp moving unit 40 moves the clamp unit 30 to the position of the stick mask 150, and the clamper 300 can clamp the corner of the stick mask 150.

Next, the clamp moving section 40 can move the clamp section 30 into the vertical upper region of the frame 200. [ To be precise, the stick mask 150 clamped by the clamper 300, or the through-hole 35, can be introduced into the vertical upper region of the frame 200. It is preferable to move the clamp portion 30 such that the mask pattern portion of the stick mask 150 corresponds to the cell C region of the frame 200. [

As shown in FIG. 2, the conventional mask 1 includes a plurality of cells C 1 to C 5, and the clamper 3 is provided only to the outside of the frame 2 in a state where the mask 1 is clamped Move. Therefore, there is no problem that interference occurs between the frame 2 and the clamper 3 because it does not enter the area of the frame 2. [

On the other hand, the present invention is a mode in which the mask 100 includes one cell C, and the mask 100 is attached to the cell C region of the frame 200 one by one. Therefore, 100), there is a problem of interference between the frame 200 and the clamper 300, despite the advantages such as reduction of alignment time and reduction of PPA.

Therefore, the frame-integrated mask manufacturing system 10 of the present invention can enter the upper region of the frame 200 with the clamper 300 clamped on the mask 100. [ A load can be applied to the mask 100 such that the vertical height of the mask 100 clamped by the clamper 300 is different from the vertical height of the mask 100 adhered to the frame 200. In other words, when the grip portion 310 clamps the corner of the stick mask 150 at a relatively high position and the stick mask 150 is adhered to the frame 200, 100) is lowered by the clamper 300.

Referring to FIG. 11 (c), the clamper 300 may apply a load only to a part of the stick mask 150 to generate a height difference H with the clamped portion. The grip portion 310 of the clamper 300 can swing (S). The stick mask 150 is bent when the grip portion 310 swings (S) in a state where the grip portion 310 is clamped on the corner of the stick mask 150. [ Here, applying a load may mean that the stick mask 150 is bent due to the swing (S) of the grip portion 310.

12 is a schematic view showing a state in which the clamper 300 according to an embodiment of the present invention clamps the mask 150 and applies a load to the mask 150. FIG. Figures 12 (a) and 12 (b) correspond to Figure 10 (b) and Figure 11 (c).

As shown in FIG. 12 (a), the grip portion 310 of the clamper 300 facing each other can clamp the corner of the stick mask 150. Then, as shown in Fig. 12B, a load can be applied to the mask 150. Fig.

The control unit 321 controls the force application unit 323 to apply a force in the direction of the grip unit 310. And the force application portion 323 transmits a force to the swing connection portion 325. [ The swing connection part 325 applies a downward force to the upper connection part 317 connected to the opposite side and the grip part 310 moves downward with respect to the swing shaft 330 as the upper connection part 317 receives a downward force, (S) direction.

The end portion 311a of the upper grip portion 311 can apply a load to an inner side portion of the stick mask 150 than the clamped portion during the swing (S). The bent portion of the stick mask 150 and the grip portion 310 can pass through the through-hole 35 as the stick mask 150 receives the load. Then, a part of the bent stick mask 150 (the peripheral portion of the cell C) can contact on the frame 200. The periphery of the cell C of the stick mask 150 may be contacted on the frame 200 and the remaining portion may be clamped to the grip portion 310. Thus, the height difference H between the clamped portion of the stick mask 150 and the portion contacting the frame 200 can be generated.

The camera unit of the head unit 50 can confirm the alignment state of the cell C portion and the alignment state of the mask pattern P. [

11 (d), after the frame 200 and the cell C of the stick mask 150 are made to correspond to each other, the laser unit of the head unit 50 irradiates the laser L, Laser welding (W) can be performed between the mask 200 and the stick mask 150 in contact therewith. When the laser L is irradiated to the rim of the cell C, a part of the stick mask 150 can be adhered to the frame 200 as it is melted and welded. Specifically, the laser needs to be irradiated to the inner region of the outer portion of the portion of the stick mask 150 that is in contact with the frame 200. In addition, welding (W) close to the edge of the frame 200 minimizes the hitting space between the mask 100 and the frame 200 and improves the adhesion. The welding W may be performed in the form of a line or a spot and the portion of the stick mask 150 that is melted by the laser L may be the same material as the mask 100, And the frame 200 are integrally connected to each other.

Next, referring to FIG. 11E, the laser unit of the head unit 50 irradiates the cutting laser CL to perform laser trimming around the cell C of the stick mask 150. It is preferable that the cutting laser CL is irradiated to the outer portion of the welded portion. According to the laser trimming, the cell C and the peripheral portion of the cell C adhered to the frame 200 in the stick mask 150 become the mask 100 while the remaining dummy portion 160 is clamped to the grip portion 310 State.

11 (f), the clamping portion 30 can be moved upward in the z-axis direction or the grip portion 310 can be swung (S) in the upward direction. The z-axis 49 of the clamp moving part 40 is operated to move the clamp part 30 upward. When the force applied to the force applying portion 323 is released from the angle adjusting portion 320 of the clamper 300, the force applying portion 323 returns to the original position due to the elasticity of the stretchable and contractible portion 327, 310) can swing (S) upward.

The dummy portion 160 of the stick mask 150 is separated by laser trimming in the step (e) of FIG. Accordingly, the dummy portion 160 is separated in a clamped state to the grip portion 310, and the mask 100 can be adhered to one cell C region of the frame 200.

13 and 14 are schematic views showing a process of sequentially adhering the mask 100 to the frame 200 after the processes of FIGS. 10 and 11. 13 (b) is a side cross-sectional view taken along the line D-D 'of FIG. 13 (a). Figs. 13 and 14 only illustrate the differences from Figs. 10 and 11. Fig.

13 (a) and 13 (b), a stick mask loader (stick mask index) from an external stick loading plate (not shown) on which a plurality of stick masks 150 are loaded is inserted into one stick mask 150). Then, the clamp moving unit 40 moves the clamp unit 30 to the position of the stick mask 150, and the clamper 300 can clamp the corner of the stick mask 150.

Next, the clamp moving section 40 can move the clamp section 30 into the vertical upper region of the frame 200. [ To be precise, the stick mask 150 clamped by the clamper 300 or the through-hole 35 can be introduced into the vertical upper region of the frame 200. It is preferable to move the clamp portion 30 such that the mask pattern portion of the stick mask 150 corresponds to the cell C region of the frame 200. [ In order to adhere the mask 100 to the frame 200, the clamp portion 30 can be moved to an upper portion of the cell C adjacent to the mask 100 bonded in Figs. 10 and 11 in order.

Referring to FIG. 14 (c), the stick mask 150 can be folded by receiving a load by swinging (S) the grip portion 310. The bent portion of the stick mask 150 and the grip portion 310 can pass through the through hole 35. [ A part of the bent stick mask 150 is placed on the frame 200, specifically on the frame 200 including the cell C region adjacent to the mask 100 bonded in Figs. 10 and 11 Can be contacted. The periphery of the cell C of the stick mask 150 may be contacted on the frame 200 and the remaining portion may be clamped to the grip portion 310. The camera unit of the head unit 50 can confirm the alignment state of the cell C portion and the alignment state of the mask pattern P. [

Next, referring to FIG. 14D, the laser unit of the head unit 50 irradiates the laser L to perform laser welding W between the frame 200 and the stick mask 150 contacting the frame 200 can do.

Next, referring to FIG. 14E, the laser unit of the head unit 50 irradiates the cutting laser CL to perform laser trimming around the cell C of the stick mask 150.

14 (f), the clamp portion 30 can be moved in the upward direction of the z-axis, or the grip portion 310 can be swung (S) in the upward direction. Accordingly, the dummy portion 160 is separated in a clamped state to the grip portion 310, and the mask 100 can be adhered to one cell C region of the frame 200.

As described above, the mask 100 can be bonded successively, with each of the stick masks 150 corresponding to each cell C region of the frame 200. Since the mask 100 already attached to the frame 200 can present the reference position, the time for the process of matching the remaining masks 100 to the cell C sequentially and confirming the alignment state is remarkable There is an advantage that it can be reduced. In addition, since the PPA (pixel position accuracy) between the mask 100 attached to one mask cell region and the mask 100 attached to the mask cell region adjacent thereto does not exceed 3 mu m, There is an advantage that a mask for forming an OLED pixel can be provided.

FIG. 15 is a side view showing a clamper 300 'according to another embodiment of the present invention, and FIG. 16 is a perspective view showing a clamping system according to another embodiment of the present invention. Compared with the clamper 300 of FIGS. 8 and 9, only the gripper 310 'of the clamper 300' of FIG. 15 is different and the rest of the configuration is the same.

The grip portion 310 'of the clamper 300' may include an upper grip portion 311 'and a lower grip portion 315'. The gap between the upper grip portion 311 'and the lower grip portion 315' can be adjusted by the tightening means and the stick mask 150 can be clamped between the upper grip portion 311 'and the lower grip portion 315' . The upper grip portion 311 'may be formed to have the same length as the lower grip portion 315'.

16, a clamping system according to another exemplary embodiment of the present invention includes a clamp unit 300 'that applies a load to a stick mask 150 clamped by the clamper 300' (400).

The pressing portion 400 can be installed to be reciprocable in the longitudinal direction and the vertical direction of the clamp portion 300 '. The pushing part 400 can be provided on the clamping part 30 such that a pair of the pushing part 400 are opposed to each other like the at least one pair of clamper 300 '. The pressing portion 400 may include a pressing unit 410, a connecting bar 420, a pair of vertical guide rails 430, and a pair of horizontal guide rails 440.

The pressing unit 410 may include a pressing portion for pressing the upper surface of the stick mask 150 and a stretching portion for stretching the pressing plate in the vertical direction from the connecting bar.

The push plate can apply a load to the inside of the portion of the stick mask 150 clamped by the clamper 300 '(the grip portion 310'). That is, when the stick mask 150 horizontally clamps the grip portions 310 'facing each other, the pressing plate applies a load to the inner portion of the stick mask 150. For this, the press plate is preferably formed to have a size larger than the vertical width of the stick mask 150.

The stretchable and contractible portion can employ any stretching means such as a cylinder for expanding and contracting the press plate in the vertical direction.

The connecting bar 420 may be connected to one side of the pushing unit 410 to transmit an elevating motion through the vertical guide rail 430. Both ends of the connection bar 420 may be connected to the vertical guide rails 430. The connection bar 420 may have a shape in which the flat cross-sectional shape protrudes substantially "C ". The connecting bar 420 may have a protruding shape so that the pressing unit 410 can approach the inside of the stick mask 150 more than the grip portion 310 'without interfering with the grip portion 310' .

The vertical guide rail 430 may extend in the vertical direction and may have a rail formed on the inner side thereof. And the end of the connecting bar 420 is connected to the inner rail.

The horizontal guide rail 440 may be provided on the clamping portion 30 so as to be parallel to the longitudinal direction of the clamping portion 30 on both sides of the through- The lower end of the vertical guide rail 430 may be connected to the rail of the horizontal guide rail 440 to be movable in the longitudinal direction.

17 and 18 are schematic views showing a process of adhering the mask 100 to the frame 200 using the clamping system according to another embodiment of the present invention. FIG. 17B is a side sectional view taken along the line E-E 'of FIG. 17A.

Referring to FIGS. 17A and 17B, similarly to FIGS. 10A and 10B, the grip portion 310 'of the mutually opposed clamper 300' Clamping is possible. Next, the clamp moving section 40 can move the clamp section 30 into the vertical upper region of the frame 200. [

The pushing unit 410 of the pushing part 400 may be located at an upper portion so as to be spaced apart from the clamper 300 '.

18 (c), when the clamp unit 300 'clamps both sides of the stick mask 150, the pressing unit 410 of the pressing unit 400 moves along the horizontal guide rail 440, To the vertical upper region of the substrate 200. Then, the connecting bar 420 can be lowered (S) along the vertical guide rail 430. Since the connecting bar 420 is lowered (S), the pushing unit 410 connected to one side of the connecting bar 420 also goes down (S). Then, after the connecting bar 420 is lowered to the lower end of the vertical guide rail 430, the stretching portion of the pushing unit 410 is further stretched and contracted, and a load can be applied to the stick mask 150 with the pushing plate.

The pressing unit 410 applies a load only to a part of the stick mask 150 and can generate the height difference H with the portion clamped by the grip portion 310 '. When the grip unit 310 'clamps the corner of the stick mask 150 and the pushing unit 410 applies a load to the inner side of the clamped portion, the stick mask 150 is bent. Also, as the grip portion 310 'of the clamper 300' swings, the load applied to the stick mask 150 as well as the pushing unit 410 can be adjusted.

19 is a schematic view showing a state in which a clamper 300 'according to another embodiment of the present invention clamps a mask 150 and a pusher 400 applies a load to the mask 150. FIG. Figures 19 (a) and 19 (b) correspond to Figure 17 (b) and Figure 18 (c).

As shown in FIG. 19 (a), the grip portion 310 'of the mutually opposing clamper 300' can horizontally clamp the corner of the stick mask 150. 19 (b), the pressing unit 410 is lowered (S), and a load can be applied to the mask 150. [

When the pushing unit 410 is lowered (S), the grip portion 310 'can apply a load to an inner portion of the stick mask 150 than the clamped portion. The bent portion of the stick mask 150 and the pressure plate can pass through the through hole 35 while the stick mask 150 is bent under the load. When the pressure plate is lowered so as to contact the frame 200, a part of the bent stick mask 150 (peripheral portion of the cell C) can contact the frame 200. The periphery of the cell C of the stick mask 150 may be contacted on the frame 200 and the remaining portion may be clamped to the grip portion 310 '. Thus, the height difference H between the clamped portion of the stick mask 150 and the portion contacting the frame 200 can be generated.

The camera unit of the head unit 50 can confirm the alignment state of the cell C portion and the alignment state of the mask pattern P. [

18 (d), after the frame 200 and the cell C of the stick mask 150 are made to correspond to each other, the laser unit of the head unit 50 irradiates the laser L, Laser welding (W) can be performed between the mask 200 and the stick mask 150 in contact therewith. When the laser L is irradiated to the rim of the cell C, a part of the stick mask 150 can be adhered to the frame 200 as it is melted and welded.

Next, referring to FIG. 18E, the laser unit of the head unit 50 irradiates the cutting laser CL to perform laser trimming around the cell C of the stick mask 150. FIG. It is preferable that the cutting laser CL is irradiated to the outer portion of the welded portion. According to the laser trimming, the cell C and the periphery of the cell C bonded to the frame 200 in the stick mask 150 become the mask 100 and the remaining dummy portion 160 is clamped to the grip portion 310 ' .

18 (f), it is possible to move the clamping unit 30 upward in the z-axis direction or swing the gripping unit 310 'in the upward direction. The z-axis 49 of the clamp moving part 40 is operated to move the clamp part 30 upward. Or when the force applied to the force applying portion 323 by the angle adjusting portion 320 of the clamper 300 'is released, the force applying portion 323 returns to the original position due to the elasticity of the stretchable and contractible portion 327, Gt; 310 ', < / RTI > At the same time, the pushing unit 410 can be raised (U) to release the load applied to the mask 100. Even if the load is released, the mask 100 is already adhered to the frame 200 by welding (W).

The dummy portion 160 of the stick mask 150 is separated by laser trimming in the step (e) of FIG. Accordingly, the dummy portion 160 is separated in a clamped state to the grip portion 310 ', and the mask 100 can be adhered to one cell C region of the frame 200.

20 is a perspective view showing a clamping system according to another embodiment of the present invention. The clamper 300 of FIG. 8 and the pressing part 400 of FIG. 16 are combined.

On the other hand, when the area of the stick mask 150 is large, it may be difficult to perfectly adhere the stick mask 150 on the frame 200 only by the clamper 300 or the pressing part 400. [ When the upper grip portion 311 contacts the frame 200 while the upper grip portion 311 applies a load to the stick mask 150, the stick mask (not shown) between the end portion 311a of the upper grip portion 311 and the frame 200 150 can be brought into close contact with the load of the upper grip portion 311. However, there may be a space between the stick mask 150 and the frame 200 as it goes inward from this portion. The open space may adversely affect the welding (W) process.

Accordingly, a load can be applied to the stick mask 150 over an area larger than the end portion 311a of the upper grip portion 311 through the pressing portion 400. [ Thus, the stick mask 150 and the frame 200 can be closely contacted without lifting, thereby providing the optimum welding conditions. Since the pressing portion 400 applies a load to the stick mask 150 with an area wider than the end portion 311a so that the load is evenly distributed to only a part of the frame 200, Can be minimized.

The pressing plate can apply a load to the inner side of the portion of the stick mask 150 to which the clamper 300 (upper grip portion 311) applies a load. That is, it is possible to perform the welding W by irradiating the laser L through the exposed portion between the upper grip portion 311 and the stick mask 150 to which the pressing plate applies load. For this purpose, it is preferable that the pressure plate is formed to have a size capable of applying a load to at least two corners of the frame 200.

21 and 22 are schematic views showing a state in which a load is applied to a mask using a clamping system according to another embodiment of the present invention.

First, as the grip portion 310 swings (S) and applies a load to the stick mask 150 as shown in FIG. 11C (or FIG. 12B), the stick mask 150 is moved to the frame 200 in a state in which they are in contact with each other.

Next, referring to FIGS. 21A and 21B, the vertical guide rail 430 can be moved close to the through-hole 35 along the horizontal guide rail 440. On the vertical guide rail 430, the connecting bar 420 may be located at the top. Thus, when moving along the horizontal guide rail 440, interference with the clamp 300 does not occur.

22 (a), the connecting bar 420 may be lowered along the vertical guide rail 430. In this case, Since the connecting bar 420 protrudes substantially in a "C" shape, the connecting bar 420 does not interfere with the grip portion 310 even if the connecting bar 420 is lowered. Since the connecting bar 420 descends, the pushing unit 410 connected to one side of the connecting bar 420 also descends.

22 (b), after the connecting bar 420 is lowered to the lower end of the vertical guide rail 430, the extensible / contractible part of the pushing unit 410 is further stretched and contracted, Load can be applied. Since the pressure plate has a plate shape having a large area, a load can be applied to a wide portion of the stick mask 150 evenly. The portion of the stick mask 150 to which the pressure plate is pressed may be inner than the portion where the upper grip portion 311 presses. The portion of the stick mask 150 pressed by the upper grip portion 311 and the portion of the stick mask 150 pressed by the pressing plate are exposed to the upper side so that when the head portion 50 moves and irradiates the laser L, (W). At this time, since the upper grip portion 311 and the presser plate closely contact the stick mask 150 on the frame 200, an optimal welding (W) process can be performed.

As described above, the present invention can clamp and tension the mask 100 in the frame-integrated mask manufacturing system 10. [ The clamper 300 enters the upper region of the frame 200 and the mask 100 is folded downward from the top of the frame 200 by applying a load to the mask 100, It is possible to perform adhesion of the adhesive layer. Thereby, it is possible to prevent the mask 100 from being deformed such as warping or twisting, to make the alignment clear, to remarkably reduce the manufacturing time, and to remarkably increase the yield.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. Variations and changes are possible. Such variations and modifications are to be considered as falling within the scope of the invention and the appended claims.

10: Frame-integrated mask manufacturing system
15: Table
20:
30: Clamp section
35: Through hole
40: clamp moving part
50:
60: head moving part
70: Anti-Shock
100: mask
150: Stick mask
160:
200: frame
210:
220: grid frame section
300: clamper
310: grip portion
311: upper grip portion
315: Lower grip portion
320:
325: Swing connection
330: Swing shaft
340: clamper moving means
400:
410: Push unit
420: Connection bar
430: vertical guide rail
440: Horizontal guide rail
C: cell, mask cell
L, CL: laser, cutting laser
P: mask pattern
W: Welding

Claims (19)

A clamper for clamping and tensioning one side of a mask,
A grip portion for clamping the mask;
An angle adjuster for swinging the grip portion to control the grip portion to have a predetermined angle from the horizontal direction; And
A swing shaft formed between the grip portion and the angle adjusting portion;
/ RTI >
The grip portion includes an upper grip portion and a lower grip portion,
The mask is clamped between the upper grip portion and the lower grip portion, the upper grip portion is formed longer than the lower grip portion,
When the grip portion swings downward with respect to the swing axis, the end portion of the upper grip portion applies a load to the inner side than the clamped mask side. delete delete The method according to claim 1,
And a swing connection portion connecting the upper surface of the grip portion and the angle adjusting portion,
As the distance between the angular adjustment portion and the grip portion is adjusted, the swing connection portion transmits the force that the grip portion swings with respect to the swing axis. delete delete CLAIMS 1. A clamping system for clamping and tensioning one side of a mask,
And a clamp portion in which at least a pair of clampers for clamping and tensioning at least two sides of the mask are disposed,
The clamper,
A grip portion for clamping the mask;
An angle adjuster for swinging the grip portion to control the grip portion to have a predetermined angle from the horizontal direction; And
A swing shaft formed between the grip portion and the angle adjusting portion;
/ RTI >
The grip portion includes an upper grip portion and a lower grip portion,
The mask is clamped between the upper grip portion and the lower grip portion, the upper grip portion is formed longer than the lower grip portion,
And when the grip portion swings downward with respect to the swing axis, the end portion of the upper grip portion applies a load to the inner side than the clamped mask side. delete delete 8. The method of claim 7,
And a swing connection portion connecting the upper surface of the grip portion and the angle adjusting portion,
As the distance between the angular adjustment portion and the grip portion is adjusted, the swing connection portion transmits the force that the grip portion swings with respect to the swing axis. delete 8. The method of claim 7,
The clamp portion is formed with a through-hole wider than the area of at least one mask,
And at least one pair of clamper is arranged to face each other on both sides of the through-hole. 13. The method of claim 12,
When the clamper applies a load to the mask, at least a portion of the mask passes through the through-hole and contacts the frame. delete 8. The method of claim 7,
A clamping system in which a rail is interposed between a clamp part and a clamper so that the clamper can reciprocate in the longitudinal direction of the clamp part. delete CLAIMS 1. A clamping system for clamping and tensioning one side of a mask,
And a clamp portion in which at least a pair of clampers for clamping and tensioning at least two sides of the mask are disposed,
The clamper,
A grip portion for clamping the mask; And
An angle adjuster for swinging the grip portion to control the grip portion to have a predetermined angle from the horizontal direction;
/ RTI >
The grip portion includes an upper grip portion and a lower grip portion,
The mask is clamped between the upper grip portion and the lower grip portion, the upper grip portion is longer than the lower grip portion, or the upper grip portion and the lower grip portion are formed to have the same length,
Further comprising a pushing portion which is provided so as to be reciprocable in the longitudinal direction and the vertical direction of the clamping portion and applies a load to the inside of the portion of the mask clamped by the clamper to bring the mask into contact with the frame. 18. The method of claim 17,
The push-
A pair of horizontal guide rails provided on both sides of the through-hole so as to be parallel to the longitudinal direction of the clamp portion;
A pair of vertical guide rails provided on the pair of horizontal guide rails so as to be reciprocable in the longitudinal direction;
A connecting bar to which both ends are connected so as to be vertically reciprocable on a pair of vertical guide rails; And
A pushing unit connected on one side of the connecting bar
≪ / RTI > 19. The method of claim 18,
Wherein the pressing unit includes a pressing plate on the surface and a stretching portion for stretching the pressing plate in the vertical direction from the connecting bar.

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