KR101977983B1 - Wet scrubber including cyclone rotatory part - Google Patents

Abstract

The purpose of the present invention is to provide a wet scrubber which uses cyclone rotation and whirls to improve a purifying processing efficiency of harmful gases. According to one embodiment of the present invention, the wet scrubber comprises: a gas inducing and cleaning unit which cleans harmful gases introduced therein to primarily purify the same; and a filtering unit which filters residual gases remaining in the gas inducing and cleaning unit and upwardly moving to secondarily purify the same. The gas inducing and cleaning unit comprises: a hopper unit which comprises a cleaning neck unit formed to have a cross section narrower than that of a cleaning main body unit, and a cleaning slanting unit slantingly connecting the cleaning main body unit to the cleaning neck unit and inducing whirls; a cyclone rotating unit which is provided on the hopper unit and induces a cyclone rotation of flows of harmful gases introduced therein; a first cleaning nozzle which is induced between the cleaning main body unit and the outside of the cyclone rotation unit to inject water for cleaning harmful gases cyclone-rotating; and a second cleaning nozzle which injects water to clean residual gases flowing toward the filtering unit through the inside of the cyclone rotating unit.

Description

WET SCRUBBER INCLUDING CYCLONE ROTATORY PART WITH CYCLONE ROTATION SECTION

TECHNICAL FIELD The present invention relates to a scrubber, and more particularly, to a wet scrubber capable of purifying a noxious gas.

The scrubber, which is one of the machinery for treating harmful gas, is divided into Burn-Wet, Burn-Filter, Dry and Wet according to the treatment method. . Of these types, a wet scrubber, that is, a wet scrubber, is provided on a facility for semiconductor production, etc., and treats harmful gases generated during the process and purifies it. The wet scrubber includes a scrubber body that forms an appearance and a water injection nozzle, a poling, a demister, and the like provided in the scrubber body for purifying action.

The operation principle of a conventional wet scrubber is as follows. The noxious gas flowing into the scrubber body of the wet scrubber is directed upward in the scrubber body, at which time the water jet nozzle injects water towards the noxious gas. The adsorbed material adsorbed from the noxious gas due to the injection of water is collected in the polling in the scrubber body, and the moisture can be removed toward the demister.

In this way, the process gas having been subjected to the purification process of the noxious gas can be exhausted through the exhaust unit as the blower unit provided in the upper region of the scrubber body is operated.

On the other hand, as described above, the wet scrubber is generally equipped with a configuration such as polling and demister. However, the efficiency of purifying the harmful gas is somewhat lowered and the maintenance cost is also increased .

It is an object of the present invention to provide a wet scrubber which can increase the efficiency of the purification treatment of noxious gas using cyclone rotation and vortexing.

A wet scrubber according to an embodiment of the present invention includes: a gas guiding and cleaning unit for cleaning a noxious gas introduced into the inside thereof for a first purification treatment; And a filtering unit for performing a second purification treatment by filtering residual gas that is remained in the gas induction and washing unit and moving upward, wherein the gas induction and washing unit comprises: a washing neck portion having a narrower sectional area than the washing body portion; A hopper portion having a cleaning inclined portion for inclining the cleaning main body portion and the cleaning neck portion to induce a vortex; A cyclone rotating part provided on the hopper part and inducing cyclone rotation of the flow of noxious gas introduced into the inside of the hopper part; A first cleaning nozzle for spraying water to clean the noxious gas induced between the cleaning main body and the outside of the cyclone rotating part and cyclone rotating; And a second cleaning nozzle for spraying water to clean the residual gas flowing toward the filtering unit through the inside of the cyclone rotating part.

In an embodiment, the cyclone rotating part includes: a cylindrical vertical lower part; And an upper inclined portion which is inclined at an upper end of the lower vertical portion and forms a larger rotation space of the noxious gas introduced into the lower portion toward the lower vertical portion. The first cleaning nozzle may inject water in a tangential direction of the lower vertical portion toward the noxious gas rotating in the lower vertical portion. The second cleaning nozzle may include a plurality of nozzles for spraying water on the residual gas directed to the filtering unit, the nozzles being installed on the upper inclined portion. The plurality of nozzles may be arranged in a T-shaped structure.

As an embodiment, the filtering unit may include a second flange formed at a lower end thereof to be detachably flange-coupled to a first flange of the gas introducing and cleaning unit, the residual gas being remained in the gas guiding and cleaning unit A filtering unit casing forming a place for filtering; And a filter module provided in the filtering unit casing to filter the residual gas. The filter module may be a helical filter module in which the inside of the filter module is cleaned to clean the entire filter module, or a stacked filter module that can separate and clean individual layers.

In an embodiment, the wet scrubber may further comprise a water tank pump unit coupled to a lower portion of the gas guiding and cleaning unit, for circulating the stored water. The wet scrubber may further include an exhaust unit coupled to an upper portion of the filtering unit, through which the purge-processed process gas is exhausted. The discharge unit includes a cleaning nozzle for cleaning the filtering unit, and the cleaning nozzle may be provided with a locking device for use only when necessary.

According to the embodiment of the present invention, the cleaning efficiency of the scrubber can be improved compared to the conventional scrubber by treating the harmful gas by the rotating force of the cyclone rotating part, the swirl rotating force of the hopper part, and the water jet washing power of the washing part.

1 is a cross-sectional view showing a structure of a wet scrubber according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view for explaining the flow of gas in the wet scrubber of Fig. 1;
FIGS. 3A to 3D are cross-sectional views illustrating the cleaning nozzle and the cleaning nozzle shown in FIGS. 1 and 2. FIG.
Figs. 4 to 7 are views showing the spiral filter module of the filtering unit shown in Figs. 1 and 2. Fig.
8 is a schematic internal structure of a stacked filter module applied to a wet scrubber according to another embodiment of the present invention.

In the following, embodiments of the present invention will be described in detail and in detail so that those skilled in the art can easily carry out the present invention.

1 is a cross-sectional view showing a structure of a wet scrubber according to an embodiment of the present invention. The wet scrubber 100 shown in FIG. 1 can purify noxious gas, improve cleaning treatment efficiency compared to conventional scrubbers, and reduce maintenance cost. 1, a wet scrubber 100 may include a gas induction and scrubbing unit 110, a water tank and pump unit 150, a filtering unit 160, and an exhaust unit 190.

The gas induction and cleaning unit 110, the water tank and pump unit 150, the filtering unit 160, and the discharge unit 190 may be detachably and flanably coupled to each other. For example, the gas induction and cleaning unit 110 and the filtering unit 160 are connected to the first flange 122 on the gas induction and cleaning unit 110 side and the second flange 171 on the filtering unit 160 side By joining the bolts to the first and second flanges 122 and 171 in opposition to each other, the gas introducing and cleaning unit 110 and the filtering unit 160 can be joined together and vice versa. Here, the gas induction and cleaning unit 110 and the filtering unit 160 are not necessarily flanged, and may be composed of one body without flange connection.

The filtering unit 160 and the discharging unit 190 are also arranged so that the third flange 172 on the side of the filtering unit 160 and the fourth flange 191 on the side of the discharging unit 190 face each other, By fastening the bolts to the fourth flanges 172 and 191, the filtering unit 160 and the discharge unit 190 can be engaged and vice versa. The gas induction and cleaning unit 110, the water tank, and the pump unit 150 may also be flanged.

When the gas induction and washing unit 110, the water tank and the pump unit 150, the filtering unit 160 and the discharge unit 190 are detachably and flanably coupled to each other, the units 110, 150, 160, 190) is easy to carry or maintain. Particularly, there is an advantage that the cleaning operation or the replacement operation of the filter module 180 provided in the filtering unit 160 can be greatly facilitated.

Fig. 2 is a cross-sectional view for explaining the flow of gas in the wet scrubber of Fig. 1; Referring to FIG. 2, the gas induction and washing unit 110 may include a hopper unit 120, a cyclone rotating unit 130, and a cleaning unit 140. The gas induction and cleaning unit 110 is configured to induce a harmful gas through a gas inlet 111 and then to clean it using a cyclone rotatory power and a vortex to perform a primary purification treatment . In FIG. 2, a red dotted line indicates the flow and direction of the gas introduced through the gas inlet 111.

The cleaning unit casing 121 forms the appearance of the gas guiding and cleaning unit 110, and has a structure such that the bottle is turned upside down from a simple cylindrical structure. The upper part of the cleaning unit casing 121 is coupled with the filtering unit 160 and the lower part can be coupled with the water tank and the pump unit 150. The cleaning unit casing 121 has a cross- The cleaning unit casing 121 is provided with a hopper part 120 at the lower end thereof and a cyclone rotating part 130 at the upper end thereof. Lt; / RTI >

The hopper portion 120 includes a cleaning neck portion 123 and a cleaning slope portion 124. The cleaning neck portion 123 may have a cylindrical shape having a narrower sectional area than that of the cleaning main body portion of the cleaning unit casing 121. The cleaning inclined portion 124 is formed in a truncated conical shape, and the cleaning main body portion and the cleaning neck portion 123 can be inclinedly connected. When the hopper part 120 has the structure of the cleaning neck part 123 and the cleaning slope part 124, the vortex of the gas passing through the cyclone rotating part 130 is generated to maximize the rotational force of the gas, .

The cyclone rotating part 130 may be disposed on the hopper part 120. The cyclone rotating part 130 serves to induce the rotation of the gas as shown by an arrow in Fig. The cyclone rotating part 130 maintains the rotational force of the gas injected through the gas injection port 111, so that the flow of the gas is directed to the outside. The cyclone rotating part 130 includes a lower vertical part 131 formed in a cylindrical shape and having a vertically formed cross section and an upper inclined part 132 disposed at an upper end of the lower vertical part 131 in a truncated conical shape . Since the upper inclined portion 132 of the cyclone rotating portion 130 forms a larger space for rotating the gas as it goes downward, the rotation flow of the gas can be guided smoothly.

The cyclone rotating part 130 may be provided with a cleaning part 140. The cleaning section 140 may include first and second cleaning nozzles 141 and 142. The first cleaning nozzle 141 is disposed between the cleaning unit casing 121 and the cyclone rotation unit 130 and serves to clean the noxious gas first by spraying water toward the noxious gas flowing along the cleaning unit casing 121. The first cleaning nozzle 141 can have a spraying direction capable of maximizing the cleaning efficiency without disturbing the flow of the gas. The second cleaning nozzle 142 serves to clean secondarily by spraying water toward the harmful gas directed to the filtering unit 160. The second cleaning nozzle 142 may have a plurality of nozzles.

In the example of Fig. 2, the second cleaning nozzle 142 has a straight structure and includes three nozzles. The second cleaning nozzle 142 may have a T-shaped or Y-shaped structure in addition to the straight type structure. The construction and operation principle of the first and second cleaning nozzles 141 and 142 will be described in more detail in FIGS. 3A to 3C. The drain water purified by the action of the first and second cleaning nozzles 141 and 142 can be drained to the water tank and the pump unit 150. [

The water tank and pump unit 150 may include a water tank 151, a pump 152, and a pipe 153. The water in the water tank 151 can flow to the first and second cleaning nozzles 141 and 142 through the pipe 153 by the circulation action of the pump 151. [ Water in the water tank 151 circulates through the pipe 153, and dust or toxic substances contained in the gas can be collected during the circulation process. The dust or harmful substances collected by the water can be deposited in the water tank 151. The water tank and pump unit 150 may have a water drain to remove deposits and the like and to exchange water.

2, the filtering unit 160 is detachably coupled to the top of the gas induction and scrubbing unit 110 and filters the residual gas that is remnant and uptake in the gas scrubbing and scrubbing unit 110 And performs secondary purification treatment. This filtering unit 160 may include a filtering unit casing 170 and a filter module 180 provided in the filtering unit casing 170 to filter the residual gas.

The filtering unit casing 170 forms an appearance of the filtering unit 160 and forms a place for filtering residual gas that remains and is moved upward in the gas introducing and cleaning unit 110. The second and third flanges 171 and 172 are provided at the lower end and the upper end of the filtering unit casing 170 and can be attached to and detached from the gas induction and washing unit 110 and the discharge unit 190. A lug 173 for handling the filtering unit casing 170 may be coupled to the side of the filtering unit casing 170.

The filter module 180 is provided in the filtering unit casing 170 and serves to substantially filter the residual gas that remains and is moved up in the gas induction and cleaning unit 110. The construction and operation principle of the filter module 180 will be described in more detail with reference to FIGS. The process gas that has been secondarily purified through the filter module 180 can be discharged through the discharge unit 190. In the embodiment of the present invention, the filter module 180 may be a helical filter module 180 that is integrated with the inside of the filter module 180 so that the filter module 180 can be detached and cleaned.

The discharge unit 190 is detachably coupled to the upper portion of the filtering unit 160 and can discharge the process gas that has been subjected to the purge process. The discharge unit 190 may include a discharge unit casing 192 and a cleaning nozzle 193. The cleaning nozzle 193 is connected to the pipe 153 of the water tank and the pump unit 150 and may be provided with a locking device for use only when necessary. The cleaning nozzle 193 has a straight structure and includes three nozzles. The cleaning nozzle 193 may have a T-shaped or Y-shaped structure in addition to the straight type structure. The construction and operation principle of the cleaning nozzle 193 will be described in more detail in Fig. The discharge unit 190 may further include a demister 197. Further, the discharge unit 190 can be provided with a check port for inputting or replacing the demister 197 in the discharge unit casing 192.

The wet scrubbers 100 according to the embodiment of the present invention are subjected to the first purification treatment by the cyclone rotary force of the cyclone rotary part 130, the swirl rotary force of the hopper part 120, and the water jet cleaning force of the cleaning part 140 . The wet scrubber 100 is subjected to a secondary purification treatment in the filtering unit 160 having the filter module 180 and then discharged to the discharge unit 190, thereby improving the purification treatment efficiency compared to the conventional scrubber. In particular, when such a method is applied, it is advantageous in reducing harmful gases such as Sox and Co, is excellent in odor treatment, and is easy to maintain. Since the structure is formed in the height direction, the installation area can be narrowed.

FIGS. 3A to 3D are cross-sectional views illustrating the cleaning nozzle and the cleaning nozzle shown in FIGS. 1 and 2. FIG. FIG. 3A shows a first cleaning nozzle 141, FIG. 3B shows a second cleaning nozzle 142, and FIG. 3C shows a spraying range of the second cleaning nozzle 143. And Figure 3d shows the cleaning nozzle 193.

3A, the first cleaning nozzle 141 is provided at the cleaning main body 121 and is located at a distance A from the pipe 153, and is tangent to the lower vertical portion 131 of the cyclone rotating portion 130 Water can be sprayed in the direction of the arrow. The position and the spraying direction of the first cleaning nozzle 141 are obtained through many experiments so as to maximize the cleaning efficiency without interfering with the gas flow. For example, when the first cleaning nozzle 141 is at a distance of about 305 mm (A = 305) from the pipe 153 and has an ejection direction of about 54 angles (a = 54) in the center direction, And the cleaning efficiency can be maximized.

Referring to FIG. 3B, the second cleaning nozzle 142 serves to clean secondarily by spraying water toward the noxious gas directed to the filtering unit 160. The second cleaning nozzle 142 may have various structures such as a straight shape, a T shape, and a Y shape depending on the position of the nozzle. FIG. 3B shows a T-shaped structure as an example. The second cleaning nozzle 142 is located at a distance B from the pipe 153 and may be installed in the cleaning main body 121 and the upper inclined portion 132 of the cyclonic rotary portion 130. The second cleaning nozzle 142 may include first to third nozzles 143, 144 and 145 and the first to third nozzles 143, 144 and 145 may have a T-shaped structure.

The position and the spray range of the first to third nozzles 143, 144, and 145 are obtained through many experiments so as to maximize the cleaning efficiency of the gas directed to the filtering unit 160. For example, the second cleaning nozzle 142 is at a distance of about 189 mm (B = 189) in the pipe 153, and can maximize the cleaning efficiency when the spraying range is as shown in FIG. 3C.

Referring to FIG. 3D, the cleaning nozzle 193 serves to clean the gas guiding and cleaning unit 110 and the filtering unit 160 by spraying water toward the filtering unit 160. The cleaning nozzle 193 may have various structures such as a straight shape, a T shape, and a Y shape depending on the position of the nozzle. FIG. 3D shows a T-shaped structure as an example. Like the second cleaning nozzle 142, the cleaning nozzle 193 is located at a distance B from the pipe 153 and can be installed in the discharge unit casing 192. The cleaning nozzle 193 includes the first to third nozzles 194, 195, and 196, and may have a T-shaped structure. The cleaning nozzle 193 is at a distance of about 189 mm (B = 189) in the pipe 153, and can maximally improve the cleaning efficiency when having the jetting range as shown in FIG.

Figs. 4 to 7 are views showing the spiral filter module of the filtering unit shown in Figs. 1 and 2. Fig. Fig. 4 shows the three-dimensional image of the helical filter module, Fig. 5 shows the cut-away image of Fig. 4, Fig. 6 shows a schematic internal structure of the helical filter module, and Fig. 7 shows the plane of the helical filter plate . 4 to 7, the helical filter module 180 includes a first module housing 181 disposed within the filtering unit casing 170 and a second module housing 182 connected spirally within the first module housing 181 And a helical filter plate 182 on which a plurality of tubes 183 are formed.

At this time, the spiral filter plate 182 may have a structure in which the spiral filter plates 182 are integrally connected. The residual gas may pass through the plurality of tubes 183 through the helical filter module 180. The residual gas can be contacted while being passed through the plurality of tubes 183 and can be subjected to second purification treatment. As a result, the plurality of tubes 183 can enlarge the contact area of the residual gas so that as much harmful substances as possible can be adsorbed, thereby improving the purification efficiency.

A housing flange 181a is formed on the upper part of the first module housing 181 and is coupled to the third flange 172 and the fourth flange 191. A plurality of through holes 181b are formed in the side surface of the first module housing 181, 180 are washed, the washing water may be discharged to the outside of the first module housing 181 and drained.

The plurality of tubes 183 are arranged so as to be shifted from each other in the upper and lower adjacent tubes so that the upward residual gas does not directly rise vertically but extends the time between the upper and lower filter plates 182, The probability of the harmful substances being adsorbed is increased. Preferably, the plurality of tubes 183 are provided so as to be exposed to the upper and lower portions of the filter plate 182, but it is more advantageous to enhance the purification efficiency by forming the upper exposed length longer.

When the spiral filter module 180 is washed, the washing water is sprayed from the upper part after detaching the discharging unit 190, so that the washing water passes through the plurality of tubes 183 and passes through the plurality of through holes The spiral filter module 180 can be used semi-permanently, so that the maintenance cost can be reduced, and the maintenance cost can be reduced. Further, the spiral filter module 180 can be easily cleaned by draining the first module housing 181 through the first module housing 181 and the upper drain line 175, Can be significantly reduced.

8 is a schematic internal structure of a stacked filter module applied to a wet scrubber according to another embodiment of the present invention. Referring to FIG. 8, in the present embodiment, a filter module 270 is applied as a filter module 270 in which individual layers can be separated and cleaned.

The stacked filter module 270 includes a second module housing 271 disposed in the filtering unit casing 170 and a plurality of tubes 273 arranged on the plate surface in an independent slanting manner in the second module housing 271. [ And a plate fixing portion 274 for individually fixing the plurality of stacked filter plates 272 in the central region of the second module housing 271. [

In the meantime, since the spiral filter module 180 of the previous embodiment applies the spiral filter plate 182, which is formed as a whole, it is difficult to separate and clean the filter plate 182, but the filter module 182 of the stacked filter module 270 A plurality of stacked filter plates 272 are applied, so that it is possible to separate and clean the stacked filter plate 272 as an individual layer when necessary, which is convenient. However, even if the upward flow of the gas is lower than that of the helical filter module 180, the cleaning efficiency can be improved as compared with the conventional scrubber, and the maintenance cost can be reduced.

The foregoing are specific embodiments for carrying out the present invention. The present invention may include, in addition to the above-described embodiments, embodiments that are simply designed or modified easily. In addition, the present invention will also include techniques that can be easily modified and implemented using the embodiments. Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be determined by the claims equivalent to the claims of the present invention as well as the claims of the following.

Claims (6)

The noxious gas flows into the cleaning unit casing through the gas inlet port provided in the cleaning unit casing and induces the noxious gas flowing into the cleaning unit casing to rotate cyclone while being lowered so that the cyclone rotates the cleaning water toward the noxious gas A gas guiding and cleaning unit for performing primary cleaning by spraying, guiding the primary cleaned noxious gas to vortex rotation, and secondary cleaning by spraying cleaning water toward rising noxious gas while rotating the vortex;
A water tank and a pump unit for supplying cleaning water for the primary and secondary cleaning to the gas guiding and cleaning unit through a pipe;
A filtering unit for filtering and purifying the noxious gas which is remained in the gas induction and washing unit and moved upward; And
And a discharge unit coupled to an upper portion of the filtering unit and discharging purge gas
The gas-guiding and cleaning unit comprises:
An upper inclined portion formed to be inclined with respect to the cleaning unit casing so that the cyclone rotating space is widened as the noxious gas introduced through the gas injection port is lowered and a cylindrical inclined portion formed below the upper inclined portion and having a cylindrical shape A cyclone rotating part including a lower vertical part to be formed; And
A cleaning inclined portion formed below the cyclone rotating portion and inclined so that the cross sectional area of the cleaning unit casing becomes narrower as it goes downward, thereby to induce the rotation of the vortex; and a cleaning inclined portion formed below the cleaning inclined portion, A hopper portion including a cleaning neck portion to be held;
A first cleaning nozzle for spraying cleaning water to clean the noxious gas rotating in the cyclone at the cyclone rotating part; And
And a second cleaning nozzle for spraying cleaning water for cleaning the noxious gas rising while rotating the vortex. The method according to claim 1,
Wherein the first cleaning nozzle injects water in a tangential direction of the lower vertical portion formed in a cylindrical shape toward the noxious gas rotating in the lower vertical portion. 3. The method of claim 2,
Wherein the angle at which the first cleaning nozzle injects water is at an angle of 54 degrees from the center. 3. The method of claim 2,
The second cleaning nozzle is provided in the upper inclined portion and includes first to third nozzles for spraying water onto the noxious gas directed to the filtering unit, and the first to third nozzles are arranged in a T- Wet scrubber. The method according to claim 1,
Wherein the filtering unit comprises:
A filtering unit casing forming a place for filtering the noxious gas which is remained in the gas induction and washing unit and moved upward; And
And a helical filter module provided in the filtering unit casing to filter the noxious gas. The method according to claim 1,
Wherein the discharge unit comprises a cleaning nozzle for cleaning the filtering unit, and the cleaning nozzle is provided with a locking device for use only when necessary.

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