KR20200042383A - Wet scrubber including cyclone rotatory part - Google Patents

Abstract

An embodiment of the present invention relates to a wet scrubber including a cyclone rotation unit to increase purification efficiency of hazardous gas. According to one embodiment of the present invention, the wet scrubber comprises a gas guidance and cleaning unit cleaning hazardous gas flowing therein to perform first purification treatment and a filtering unit filtering remaining gas, which is remaining in the gas guidance and cleaning unit to move up, to perform second purification treatment. The gas guidance and cleaning unit comprises: a hopper unit including a cleaning neck unit having a less sectional area than that of a cleaning main body unit and a cleaning inclination unit connecting the cleaning main body unit and the cleaning neck unit with an inclination to induce a cyclone; a cyclone rotation unit disposed above the hopper unit and inducing cyclone rotation in the flow of the hazardous gas flowing therein; a first cleaning nozzle spraying water to clean the hazardous gas guided between the cleaning main body unit and the outside of the cyclone rotation unit to be swirled; and a second cleaning nozzle spraying water to clean the remaining gas flowing toward the filtering unit through the inside of the cyclone rotation unit.

Description

Wet scrubber including cyclone rotating part {WET SCRUBBER INCLUDING CYCLONE ROTATORY PART}

The present invention relates to a scrubber, and more particularly, to a wet scrubber capable of purifying harmful gases.

Scrubbers, which are one of the mechanical devices that process harmful gases, are classified into burn-wet, burn-filter, dry, wet, etc. according to the treatment method. Can be. Among these types, a wet scrubber, that is, a wet scrubber, is provided in facilities for semiconductor production, and treats and purifies harmful gases generated during the process. The wet scrubber includes a scrubber body constituting an exterior and a configuration of a water spray nozzle, polling, and demister provided in the scrubber body for purification.

The operation principle of a normal wet scrubber is as follows. The harmful gas flowing into the scrubber body of the wet scrubber is directed upward in the scrubber body, where the water spray nozzle sprays water toward the harmful gas. Adsorption material adsorbed from the noxious gas due to the spraying of water is collected in the polling in the scrubber body, and the vapor can be removed toward the demister to remove the moisture therein.

The treatment gas in which the purification of the noxious gas is completed by such an operation may be exhausted through the exhaust unit as the blower unit provided in the upper region of the scrubber body is operated.

On the other hand, as described above, the wet scrubber is generally equipped with a configuration such as polling and a demister, but the efficiency of actually purifying harmful gases is somewhat reduced, and maintenance costs such as the need to frequently replace polling are also high. You can.

The present invention is to solve the above technical problem, the object of the present invention is to provide a wet scrubber that can increase the efficiency of purification treatment of harmful gases using cyclone rotation and vortex.

A wet scrubber according to an embodiment of the present invention includes: a gas induction and cleaning unit that performs primary purification by cleaning harmful gases introduced into the interior; And a filtering unit that filters the residual gas remaining in the gas induction and cleaning unit and moves upward to perform secondary purification, wherein the gas induction and cleaning unit includes a cleaning neck portion having a narrower cross-sectional area than the cleaning body portion. , A hopper part having a cleaning inclined part for inclining the vortex by connecting the cleaning main body part and the cleaning neck part at an angle; It is provided on the hopper portion, a cyclone rotating portion for inducing a cyclone rotation of the flow of harmful gas flowing into the interior; A first cleaning nozzle which is guided between the cleaning main body part and the outside of the cyclone rotating part and sprays water to clean the harmful gas rotating in the cyclone; And a second cleaning nozzle spraying water to clean residual gas flowing through the cyclone rotating portion toward the filtering unit.

As an embodiment, the cyclone rotating unit may include a cylindrical lower vertical portion; And an upper inclined portion which is disposed to be inclined at the upper end of the lower vertical portion and widens a rotation space of harmful gas introduced into the interior as it descends in the direction of the lower vertical portion. The first cleaning nozzle may spray water in a tangential direction of the lower vertical portion toward a noxious gas rotating the lower vertical portion. The second cleaning nozzle is installed on the upper inclined portion, and may include a plurality of nozzles for spraying water to residual gas directed to the filtering unit. The plurality of nozzles may be arranged in a T-shaped structure.

As an embodiment, the filtering unit may include a second flange detachably coupled to the first flange of the gas induction and cleaning unit at a lower end, and the residual gas remaining in the gas induction and cleaning unit and upwardly moved. A filtering unit casing forming a place to filter; And a filter module provided in the filtering unit casing to filter the residual gas. The filter module may be a helical filter module that is integral with the inside to clean the entire filter module or a stacked filter module that can be cleaned by separating each individual layer.

As an embodiment, the wet scrubber is coupled to the lower portion of the gas induction and cleaning unit, and may further include a water tank pump unit for circulating the stored water. In addition, the wet scrubber is coupled to the upper portion of the filtering unit, and may further include a discharge unit through which the treatment gas after the purification treatment is completed is discharged. The discharge unit includes a cleaning nozzle for cleaning the filtering unit, and the cleaning nozzle may be provided with a locking device for use only when necessary.

According to an embodiment of the present invention, by purifying the harmful gas by the rotational force of the cyclone rotating portion, the vortex rotational force of the hopper portion, and the water jet cleaning power of the cleaning portion, it is possible to increase the purification treatment efficiency compared to a conventional scrubber.

1 is a cross-sectional view showing the structure of a wet scrubber according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view illustrating the flow of gas in the wet scrubber of FIG. 1.
3A to 3D are cross-sectional views illustrating the cleaning nozzles and the cleaning nozzles illustrated in FIGS. 1 and 2.
4 to 7 are views showing a helical filter module of the filtering unit shown in FIGS. 1 and 2.
8 is a schematic internal structural diagram of a stacked filter module applied to a wet scrubber according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described clearly and in detail so that a person having ordinary knowledge in the technical field of the present invention can easily implement the present invention.

1 is a cross-sectional view showing the structure of a wet scrubber according to an embodiment of the present invention. The wet scrubber 100 shown in FIG. 1 can purify harmful gases, improve the purification treatment efficiency, and reduce maintenance costs as compared to the conventional scrubber. Referring to FIG. 1, the wet scrubber 100 may include a gas induction and cleaning unit 110, a water tank and pump unit 150, a filtering unit 160, and a discharge unit 190.

The gas induction and cleaning unit 110, the water tank and the pump unit 150, the filtering unit 160, and the discharge unit 190 may be detachably flanged to each other. For example, the gas induction and cleaning unit 110 and the filtering unit 160 may include a first flange 122 on the gas induction and cleaning unit 110 side and a second flange 171 on the filtering unit 160 side. By fastening the bolts to the first and second flanges 122 and 171 against each other, the gas induction and cleaning unit 110 and the filtering unit 160 can be combined, and vice versa. Here, the gas induction and cleaning unit 110 and the filtering unit 160 are not necessarily flange-coupled, and may be configured as one body without flange coupling.

In the same way, the filtering unit 160 and the discharge unit 190 also face the third flange 172 on the filtering unit 160 side and the fourth flange 191 on the discharge unit 190 side, and the third and By fastening the bolts to the fourth flanges 172 and 191, the filtering unit 160 and the discharge unit 190 can be combined, and conversely, disassembled. And the gas induction and cleaning unit 110 and the water tank and the pump unit 150 may also be flanged.

When the gas induction and cleaning unit 110, the water tank and the pump unit 150, the filtering unit 160, and the discharge unit 190 are flanged so as to be detachable from each other, the corresponding units 110, 150, 160, 190) has the advantage of facilitating transportation or maintenance. In particular, there is an advantage that the cleaning or replacement of the filter module 180 provided in the filtering unit 160 can be very easy.

FIG. 2 is a cross-sectional view illustrating the flow of gas in the wet scrubber of FIG. 1. Referring to FIG. 2, the gas induction and cleaning unit 110 may include a hopper unit 120, a cyclone rotating unit 130, and a cleaning unit 140. The gas induction and cleaning unit 110 induces harmful gas inside through a gas inlet 111, and then cleans it using a cyclone rotatory power and a vortex to perform primary purification. Plays a role. In FIG. 2, a red dotted line indicates the flow and direction of the gas introduced through the gas inlet 111.

The cleaning unit casing 121 forms a gas induction and an external appearance of the cleaning unit 110, and has a structure such as turning a bottle out of a simple cylindrical structure. The upper portion of the cleaning unit casing 121 may be combined with the filtering unit 160, and the lower portion may be combined with the water tank and the pump unit 150. The cleaning unit casing 121 has a cross-sectional area while descending from the top to the bottom. By having a narrowly formed structure, it is possible to increase the rotational force of the gas and to smoothly flow the gas.The hopper unit 120 is provided at the lower end of the cleaning unit casing 121, and the cyclone rotating unit 130 is provided at the upper end. Can be configured.

The hopper part 120 includes a cleaning neck part 123 and a cleaning inclined part 124. The cleaning neck portion 123 may be configured in a cylindrical shape having a narrower cross-sectional area than the cleaning body portion of the cleaning unit casing 121. The cleaning inclined portion 124 may be formed in a truncated cone shape, and the cleaning main body portion and the cleaning neck portion 123 may be inclinedly connected. When the hopper portion 120 has the structure of the cleaning neck portion 123 and the cleaning inclined portion 124, it generates a vortex of gas passing through the cyclone rotating portion 130, maximizing the rotational force of the gas and collecting efficiency Can increase.

The cyclone rotating part 130 may be disposed on the hopper part 120. Cyclone rotating unit 130 serves to induce the rotation of the gas as shown in the arrow of FIG. The cyclone rotating part 130 maintains the rotational force of the gas injected through the gas inlet 111 and allows the gas flow to be directed outward. The cyclone rotating part 130 includes a lower vertical part 131 having a cylindrical shape and having a vertical cross-section, and an upper inclined part 132 disposed obliquely in the shape of a cone on the top of the lower vertical part 131. You can. The upper inclined portion 132 of the cyclone rotating portion 130 forms a rotation space of the gas wider as it goes downward, so that the rotational flow of the gas can be induced smoothly.

The cyclone rotating part 130 may be provided with a cleaning part 140. The cleaning unit 140 may include first and second cleaning nozzles 141 and 142. The first cleaning nozzle 141 is disposed between the cleaning unit casing 121 and the cyclone rotating part 130 and serves to primarily clean the harmful gas by spraying water toward the harmful gas flowing there. The first cleaning nozzle 141 may have an injection direction capable of maximizing cleaning efficiency without interfering with the flow of gas. The second cleaning nozzle 142 serves to perform secondary cleaning by spraying water toward the harmful gas directed to the filtering unit 160. The second cleaning nozzle 142 may have a plurality of nozzles.

In the example of FIG. 2, the second cleaning nozzle 142 has a straight structure and includes three nozzles. The second cleaning nozzle 142 may have a T-shaped or Y-shaped structure in addition to the straight structure. The configuration and operation principle of the first and second cleaning nozzles 141 and 142 will be described in more detail in FIGS. 3A to 3C. Drain water purified by the action of the first and second cleaning nozzles 141 and 142 may be drained to the water tank and the pump unit 150.

The water tank and the pump unit 150 may include a water tank 151, a pump 152, and a pipe 153. Water in the water tank 151 may flow to the first and second cleaning nozzles 141 and 142 through the pipe 153 by the circulation action of the pump 151. The water in the water tank 151 circulates through the pipe 153, and dust or harmful substances contained in the gas may be collected during the circulation process. Dust or harmful substances collected by water may be deposited in the water tank 151. The water tank and the pump unit 150 may be provided with a water drain to remove sediment and the like and exchange water.

2, the filtering unit 160 is detachably coupled to the upper portion of the gas induction and cleaning unit 110, and filters residual gas remaining in the gas induction and cleaning unit 110 and moved upward. Secondary purification. The filtering unit 160 may include a filtering unit casing 170 and a filter module 180 provided in the filtering unit casing 170 to filter residual gas.

The filtering unit casing 170 forms an external appearance of the filtering unit 160, but forms a place for filtering residual gas that remains in the gas induction and cleaning unit 110 and moves upward. As described above, the lower and upper ends of the filtering unit casing 170 are provided with second and third flanges 171 and 172, respectively, and can be detached from the gas induction and cleaning unit 110 and the discharge unit 190. A lug 173 for handling the filtering unit casing 170 may be coupled to a side of the filtering unit casing 170.

The filter module 180 is provided in the filtering unit casing 170 and serves to substantially filter the residual gas remaining in the gas induction and cleaning unit 110 and moved upward. The configuration and operation principle of the filter module 180 will be described in more detail with reference to FIGS. 4 to 8. The process gas that is secondly purified through the filter module 180 may be discharged through the discharge unit 190. In an embodiment of the present invention, the filter module 180 may be a helical filter module 180 that is integrally formed inside and is detachable so that it can be cleaned.

The discharging unit 190 is detachably coupled to the upper portion of the filtering unit 160 and can discharge the process gas after the purification process has been completed. The discharge unit 190 may include a discharge unit casing 192 and a cleaning nozzle 193. The washing nozzle 193 is connected to the water tank and the pipe 153 of the pump unit 150, and a locking device can be provided to be used only when necessary. The cleaning nozzle 193 has a straight structure and includes three nozzles. The cleaning nozzle 193 may have a T-shaped or Y-shaped structure in addition to the straight-shaped structure. The configuration and operation principle of the cleaning nozzle 193 will be described in more detail in FIG. 3D. The discharge unit 190 may further install the demister 197. In addition, the discharge unit 190 may be installed in the discharge unit casing 192 a check port for introducing or replacing the demister 197.

The wet scrubber 100 according to an embodiment of the present invention is primarily treated by the cyclone rotational force of the cyclone rotating portion 130, the vortex rotational force of the hopper portion 120, and the water jet cleaning force of the cleaning portion 140. You can. In addition, the wet scrubber 100 is secondly purified by the filtering unit 160 provided with the filter module 180, and then discharged to the discharge unit 190 to increase the purification efficiency compared to the conventional scrubber. In particular, when this method is applied, it is advantageous not only for reducing Sox and Co, which are harmful gases, but also excellent for odor treatment and easy maintenance. And since the structure is erected in the height direction, the installation area can be narrowed.

3A to 3D are cross-sectional views illustrating the cleaning nozzles and the cleaning nozzles illustrated in FIGS. 1 and 2. 3A shows the first cleaning nozzle 141, FIG. 3B shows the second cleaning nozzle 142, and FIG. 3C shows the spraying range of the second cleaning nozzle 143. And Figure 3d shows a cleaning nozzle 193.

Referring to Figure 3a, the first cleaning nozzle 141 is installed in the cleaning body portion 121, located at a distance A from the pipe 153, tangent to the lower vertical portion 131 of the cyclone rotating portion 130 You can spray water in the direction. The position and injection direction of the first cleaning nozzle 141 are obtained through many experiments to maximize the cleaning efficiency without interfering with the flow of gas. For example, the first cleaning nozzle 141 is located at a distance of about 305 mm from the pipe 153 (A = 305), and minimizes gas flow when it has an injection direction of about 54 degrees (a = 54) from the center direction. And the cleaning efficiency can be maximized.

Referring to FIG. 3B, the second cleaning nozzle 142 serves to secondly clean water by spraying water toward a harmful gas directed to the filtering unit 160. The second cleaning nozzle 142 may have various structures such as a straight, T-shaped, and Y-shaped depending on the position of the nozzle. 3B shows a T-shaped structure as an example. The second cleaning nozzle 142 is located at a distance B from the pipe 153 and may be installed on the cleaning body portion 121 and the upper inclined portion 132 of the cyclone rotating portion 130. The second cleaning nozzle 142 may include first to third nozzles 143, 144, and 145, and the first to third nozzles 143, 144, and 145 may be installed to have a T-shaped structure.

The first to third nozzles 143, 144, and 145 are obtained through a number of experiments to maximize the cleaning efficiency of the gas directed to the filtering unit 160 in the position and injection range. For example, the second cleaning nozzle 142 is at a distance of about 189 mm (B = 189) from the pipe 153, and can have a maximum cleaning efficiency when it has an injection range as shown in FIG. 3C.

Referring to FIG. 3D, the cleaning nozzle 193 serves to clean the gas induction and cleaning unit 110 and the filtering unit 160 by spraying water in the direction of the filtering unit 160. The cleaning nozzle 193 may have various structures such as a straight, T-shaped, and Y-shaped depending on the position of the nozzle. 3D shows a T-shaped structure as an example. The cleaning nozzle 193, like the second cleaning nozzle 142, is located at a distance B from the pipe 153 and may be installed in the discharge unit casing 192. The washing nozzle 193 includes the first to third nozzles 194, 195, and 196, and may be installed to have a T-shaped structure. The cleaning nozzle 193 is located at a distance of about 189 mm (B = 189) from the pipe 153, and can have a maximum cleaning efficiency when it has an injection range as shown in FIG. 3D.

4 to 7 are views showing a helical filter module of the filtering unit shown in FIGS. 1 and 2. FIG. 4 shows a three-dimensional image of the helical filter module, FIG. 5 shows a cut image of FIG. 4, FIG. 6 shows a schematic internal structure diagram of the helical filter module, and FIG. 7 shows a plane of the helical filter plate . 4 to 7, the spiral filter module 180 is spirally connected to each other in the first module housing 181 and the first module housing 181 disposed in the filtering unit casing 170. Arranged but may include a spiral filter plate 182 in which a plurality of tubes 183 are formed on the plate surface.

At this time, the spiral filter plate 182 may have a structure in which the whole is connected. The residual gas may pass through the plurality of tubes 183 while passing through the helical filter module 180. The residual gas may be contacted while passing through the plurality of tubes 183 to be secondly purified. As a result, the plurality of tubes 183 increases the contact area of the residual gas so that as many harmful substances as possible can be adsorbed, thereby improving purification efficiency.

A housing flange 181a is formed on an upper portion of the first module housing 181 to be coupled together with the third flange 172 and the fourth flange 191, and a plurality of through holes 181b are formed on the side surface of the filter module ( When 180) is washed, the washing water may be discharged to the outside of the first module housing 181 and drained.

In addition, the plurality of tubes 183 are arranged to be shifted between the tubes disposed adjacent to each other vertically, so that the upward residual gas does not immediately rise vertically and extends the residence time between the upper and lower filter plates 182, thereby extending the plurality of tubes 183 ) Increases the probability that harmful substances will be adsorbed. Preferably, the plurality of tubes 183 is installed to be exposed to the upper and lower parts of the filter plate 182, but it is more advantageous to increase the purification efficiency that the upper exposed length is formed longer.

When washing the helical filter module 180, after discharging the discharge unit 190 and spraying the washing water from the top, the washing water passes through the plurality of tubes 183 and the plurality of through holes on the side of the first module housing 181 ( It is discharged to the outside of the first module housing 181 through 181b) and drained through the upper drain line 175, so that the washing can be easily performed, and the semi-permanent use of the spiral filter module 180 is possible, thereby reducing maintenance costs. It can be significantly reduced.

8 is a schematic internal structural diagram of a stacked filter module applied to a wet scrubber according to another embodiment of the present invention. Referring to FIG. 8, in the case of the present embodiment, as the filter module 270, a stacked filter module 270 is applied to separate and clean each individual layer.

The stacked filter module 270 is a second module housing 271 disposed in the filtering unit casing 170, and the second module housing 271 is independently inclined in a layered arrangement, a plurality of tubes 273 on the plate surface It may include a plurality of stacked filter plate 272 is formed, and the plate fixing portion 274 for individually fixing the plurality of stacked filter plate 272 in the central region of the second module housing 271.

On the other hand, since the helical filter module 180 of the previous embodiment applies one helical filter plate 182 that is continuously connected, it is difficult to separate and clean the filter plate 182, respectively, but the stacked filter module 270 of the present embodiment In this case, since a plurality of stacked filter plates 272 are applied, the stacked filter plates 272 as individual layers can be separated and cleaned, if necessary, to be convenient. However, although the upward flow of gas may be inferior to that of the spiral filter module 180, even if the present embodiment is applied, it is possible to improve the purification treatment efficiency as well as to reduce the maintenance cost than the conventional scrubber.

The above are specific embodiments for carrying out the present invention. In addition to the above-described embodiments, the present invention will also include embodiments that can be simply designed or easily changed. In addition, the present invention will also include techniques that can be easily modified and implemented using embodiments. Therefore, the scope of the present invention should not be limited to the above-described embodiments, and should be determined not only by the claims to be described later but also by the claims and equivalents of the present invention.

Claims (6)

A gas induction and cleaning unit that performs primary purification by cleaning harmful gases introduced into the interior; And
It includes a filtering unit for secondary purification by filtering the residual gas remaining in the gas induction and cleaning unit and moved upward,
The gas induction and cleaning unit,
A hopper portion having a cleaning neck portion having a narrower cross-sectional area than the cleaning body portion, and a cleaning inclined portion connecting the cleaning body portion and the cleaning neck portion obliquely to induce a vortex;
It is provided on the hopper portion, a cyclone rotating portion for inducing a cyclone rotation of the flow of harmful gas flowing into the interior;
A first cleaning nozzle which is guided between the cleaning main body part and the outside of the cyclone rotating part and sprays water to clean the harmful gas rotating in the cyclone; And
And a second scrubbing nozzle that sprays water to clean residual gas flowing through the cyclone rotating portion toward the filtering unit. According to claim 1,
The cyclone rotating unit,
A cylindrical lower vertical portion; And
A wet scrubber including an upper inclined portion which is disposed to be inclined at the upper portion of the lower vertical portion and widens a rotation space of harmful gas introduced into the interior as it goes down toward the lower vertical portion. According to claim 2,
The first cleaning nozzle is a wet scrubber spraying water in a tangential direction of the lower vertical portion toward a noxious gas rotating the lower vertical portion. According to claim 2,
The second cleaning nozzle is installed in the upper inclined portion, a wet scrubber having a plurality of nozzles for spraying water to the residual gas directed to the filtering unit. According to claim 1,
The filtering unit,
A filtering unit casing forming a place for filtering residual gas remaining in the gas induction and cleaning unit and moving upward; And
A wet scrubber including a filter module provided in the filtering unit casing to filter the residual gas. According to claim 1,
Is coupled to the upper portion of the filtering unit, further comprising a discharge unit for discharging the processing gas is completed purification process,
The discharge unit includes a cleaning nozzle for cleaning the filtering unit, and the cleaning nozzle is equipped with a locking device for use only when necessary.

Images