KR101935016B1 - Non-dispersive Infrared gas sensor using multi internal reflection - Google Patents

Non-dispersive Infrared gas sensor using multi internal reflection Download PDF

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KR101935016B1
KR101935016B1 KR1020160161787A KR20160161787A KR101935016B1 KR 101935016 B1 KR101935016 B1 KR 101935016B1 KR 1020160161787 A KR1020160161787 A KR 1020160161787A KR 20160161787 A KR20160161787 A KR 20160161787A KR 101935016 B1 KR101935016 B1 KR 101935016B1
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light
absorption
photodetector
reflection
reflection plate
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KR20180061995A (en
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이병수
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주식회사 템퍼스
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Priority to PCT/KR2017/013610 priority patent/WO2018101690A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection

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Abstract

According to an aspect of the present invention, an optical gas sensor using multiple internal reflection includes a light irradiator capable of emitting light; A photodetector capable of absorbing at least a portion of the light emitted from the light irradiator; A plurality of internal reflection structures arranged between the light irradiator and the photodetector, wherein the light emitted from the photodetector is multiplexed and reflected by the photodetector without being absorbed by the photodetector, and is incident on the photodetector again for absorption; And a housing part housing the light irradiator, the photodetector, and the multiple internal reflection structures therein, and having a reflection layer for reflecting light on the inner side thereof.

Description

[0001] The present invention relates to an optical gas sensor using multiple internal reflection,

The present invention relates to a gas sensor, and more particularly to an optical gas sensor.

The gas sensor is a sensor for measuring the concentration of a specific gas or the like. The method for measuring the concentration of a specific gas is an electrochemical method for measuring a change in electrical conductivity of a thin film by an electrochemical reaction and an optical method (NDIR, Non -dispersive Infra-Red), electrochemical method is inexpensive and can be miniaturized, but it changes greatly according to temperature and humidity and has low reliability. Optical system is composed of infrared radiation part, sensor part and wave guide part, There is a problem in that it is difficult to implement a gas sensor capable of realizing low-cost and rapid measurement.

Patent application number KR20070010847A (2007-02-02)

SUMMARY OF THE INVENTION [0005] The present invention is directed to a gas concentration measuring apparatus using a light intensity measuring instrument using an optical system, The present invention aims to provide a gas sensor which can solve various problems including problems such as heat generation and an increase in power consumption, and which can realize low-cost, compact and rapid measurement. However, these problems are exemplary and do not limit the scope of the present invention.

There is provided an optical gas sensor using multiple internal reflection according to an aspect of the present invention. Wherein the optical gas sensor using the multiple internal reflection includes a light irradiator capable of emitting light; A photodetector capable of absorbing at least a portion of the light emitted from the light irradiator; A plurality of internal reflection structures arranged between the light irradiator and the photodetector, wherein the light emitted from the photodetector is multiplexed and reflected by the photodetector without being absorbed by the photodetector, and is incident on the photodetector again for absorption; And a housing part housing the light irradiator, the photodetector, and the multiple internal reflection structures therein, and having a reflection layer for reflecting light on the inner side thereof.

In the optical gas sensor using the multiple inner reflection, the multiple inner reflection structure may include an absorption-use reflection plate which is disposed closer to the photodetector than the light irradiation unit, and a part of the light is absorbed and another part of the light is reflected; And a re-reflecting plate disposed adjacent to the light irradiator than the photodetector and configured to reflect the light reflected from the absorption and reflection plate and to enter the photodetector.

In the optical gas sensor using the multiple internal reflection, the absorption and reflection plate and the reflection plate may be configured such that multiple reflection is performed by using the absorption and reflection plate and the reflection plate, or by using the absorption and reflection plate, As shown in FIG.

In the optical gas sensor using the multiple internal reflection, the light irradiator and the photodetector may be arranged to face each other in the housing part.

In the optical gas sensor using the multiple internal reflection, the light irradiator and the photodetector may be arranged such that the optical path irradiated by the light irradiator and the optical path detected by the photodetector in the housing portion are not parallel to each other .

The optical gas sensor using the multiple internal reflection may include a window portion disposed between the absorption and reflection plate and the reflector and disposed adjacent to the light emitter and transmitting light of a relatively wide wavelength band; And an optical filter unit disposed between the absorptive reflection plate and the reflector and disposed adjacent to the optical detector and transmitting light of a relatively narrow selective wavelength band.

In the optical gas sensor using the multiple internal reflection, the reflectance and absorption rate of the absorption and reflection plate can be designed according to the concentration of the gas to be measured and the absorption coefficient of the light of the relatively narrow selective wavelength band.

In the optical gas sensor using the multiple internal reflection, the lower the concentration of the gas to be measured, the higher the reflectance of the absorption and reflection plate can be and the absorption rate of the absorption and reflection plate can be relatively lowered.

In the optical gas sensor using the multiple internal reflection, the reflectivity of the absorption and reflection plate may be relatively higher and the absorption rate of the absorption and reflection plate may be relatively lower as the absorption coefficient of the light of the relatively narrow selective wavelength range is lower .

In the optical gas sensor using the multiple internal reflection, the absorption and reflection plate includes at least one material selected from the group consisting of BiTe, SbTe, and W. The absorption ratio and the reflectance of the absorption- Can be controlled by the thickness and composition of the substrate.

In the optical gas sensor using the multiple internal reflection, the housing part may further include a gas inlet configured to allow external air to flow therein.

In the optical gas sensor using the multiple internal reflection, the photodetector may include a thermopile sensor.

According to an embodiment of the present invention as described above, it is possible to realize a gas sensor capable of realizing small and rapid measurement. Of course, the scope of the present invention is not limited by these effects.

BRIEF DESCRIPTION OF THE DRAWINGS FIGURES IA and IB illustrate a configuration of an optical gas sensor using multiple internal reflections according to various embodiments of the present invention.
FIG. 2 is a diagram illustrating the arrangement and optical path of a light irradiator, a photodetector, multiple internal reflection structures, etc. constituting an optical gas sensor using multiple internal reflection according to an embodiment of the present invention.
FIG. 3A is a diagram illustrating a planar configuration of a light irradiator constituting an optical gas sensor using multiple internal reflection according to an embodiment of the present invention. FIG. 3B is a cross- 1 is a diagram showing a planar configuration of a reflector disposed on a light irradiator constituting a gas sensor.
FIG. 4A is a diagram illustrating a planar configuration of a part of a photodetector constituting an optical gas sensor using multiple internal reflection according to an exemplary embodiment of the present invention. FIG. 4B is a cross- Fig. 3 is a diagram showing a planar configuration of an absorption and reflection plate disposed on a photodetector constituting an optical gas sensor. Fig.
5A and 5B are diagrams illustrating a light irradiator and a photodetector constituting an optical gas sensor according to a comparative example of the present invention.
6 is a graph illustrating the relationship of Equation (1).
7 is a graph showing the ratio (I / I 0 ) of the signal intensity of light at the gas maximum concentration.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, Is provided to fully inform the user. Also, for convenience of explanation, the components may be exaggerated or reduced in size.

 FIG. 1A is a diagram illustrating a configuration of an optical gas sensor 100 using multiple internal reflection according to an exemplary embodiment of the present invention. FIG. 2 is a cross-sectional view of an optical gas sensor using multiple internal reflection according to an exemplary embodiment of the present invention. And the arrangement and optical paths of the light irradiator, the photodetector, the multiple internal reflection structure,

Referring to FIGS. 1A and 2, an optical gas sensor 100 using multiple internal reflection according to an embodiment of the present invention includes a light irradiator 110 capable of emitting light; A photodetector (130) capable of absorbing at least a portion of the light emitted from the light irradiator; The light emitted from the light irradiator 110 is not absorbed by the photodetector 130 but is multiplexed and reflected to the outside of the photodetector 130 to be incident on the photodetector 130 again. A plurality of internal reflection structures (117, 137) configured to be absorbed by the light source; And a housing part 150 housing the light irradiator 110, the photodetector 130 and the multiple internal reflection structures 117 and 137 therein and having a reflection layer for reflecting light on the inner side thereof. The housing part 150 may include a gas inlet 170 configured to allow external air to flow in. The housing part 150 can be mirror-finished so that the light is completely reflected except for the path through which gas is introduced.

The multiple internal reflection structures 117 and 137 are disposed adjacent to the light detector 130 so as to be closer to the light detector 110 than to the light detector 110 so that a part of the light is absorbed and another part of the light is reflected; And a redireflective plate 117 disposed adjacent to the absorption plate for reflection 137 opposite to the optical detector 130 so as to reflect the light reflected from the reflection plate for absorption and reflection 137 and enter the optical detector 130 have.

The optical gas sensor 100 using multiple internal reflection according to an embodiment of the present invention is disposed between the absorption and reflection plate 137 and the reflection plate 117 and is disposed adjacent to the light irradiation device 110 A window portion 119 disposed to transmit light of a relatively wide wavelength band; And an optical filter unit 139 disposed between the absorption and reflection plate 137 and the re-reflection plate 117 and disposed adjacent to the optical detector 130 to transmit light of a relatively narrow selective wavelength band ). ≪ / RTI > The optical filter unit 139 may include a band-pass filter for transmitting light of a selective wavelength band.

Absorbing reflection plate 137 and the reflector plate 117 are arranged such that multiple reflections are made using the absorbing and reflecting plate 137 and the re-reflecting plate 117 or the absorbing and reflecting plate 137, the reflector 117 and the housing part 150 ). ≪ / RTI >

The reflectivity and absorption rate of the absorption and reflection plate 137 can be designed in accordance with the concentration of the gas to be measured and the absorption coefficient of light in the relatively narrow selective wavelength band passing through the optical filter unit 139. For example, the lower the concentration of the gas to be measured, the more the reflectance of the absorption-use reflection plate 137 is relatively increased and the absorption rate of the absorption-use reflection plate 137 is relatively lower. In addition, as the absorption coefficient of the light of the relatively narrow selective wavelength range passing through the optical filter unit 139 is lower, the reflectivity of the absorption-type reflection plate 137 is relatively higher and the absorption ratio of the absorption- . The absorbing and reflecting plate 137 includes at least one material selected from the group consisting of BiTe, SbTe, and W, and the absorption rate and reflectance of the absorption plate 137 serve as the thickness and composition of the absorption plate Lt; / RTI >

1B is a diagram illustrating a configuration of an optical gas sensor 100 using multiple internal reflection according to another embodiment of the present invention.

1B, in the housing part 150, the light irradiator 110 and the photodetector 130 are arranged so that the light path irradiated by the light irradiator 110 and the light path detected by the photodetector 130 are parallel to each other . For example, in the housing part 150, the light irradiator 110 and the photodetector 130 are arranged in a direction perpendicular to each other, and the light path irradiated by the light irradiator 110 and the light path detected by the photodetector 130 The optical paths can be perpendicular to each other. In this case, the multiple internal reflections can be configured to be performed using the absorbing and reflecting plate 137, the re-reflecting plate 117, and the housing unit 150.

FIG. 3A is a diagram illustrating a planar configuration of a light irradiator constituting an optical gas sensor using multiple internal reflection according to an embodiment of the present invention. FIG. 3B is a cross- 1 is a diagram showing a planar configuration of a reflector disposed on a light irradiator constituting a gas sensor.

Referring to FIGS. 2, 3A and 3B, the filament 113 constituting the light irradiator 110 is a light source of an optical gas sensor, for example, a structure capable of emitting infrared light. For example, the filament 113 may comprise a diaphragm and a metal resistance pattern formed on the diaphragm. On the other hand, the light illuminator 110 may be a MEMS structure, for example, disposed across a bridge structure 111, 112 extending perpendicularly to the substrate. The reflector 117 may be disposed on the filament 113 and may include a mirror structure.

FIG. 4A is a diagram illustrating a planar configuration of a part of a photodetector constituting an optical gas sensor using multiple internal reflection according to an exemplary embodiment of the present invention. FIG. 4B is a cross- Fig. 3 is a diagram showing a planar configuration of an absorption and reflection plate disposed on a photodetector constituting an optical gas sensor. Fig.

2, 4A and 4B, the photodetector 130 constituting the optical gas sensor 100 using multiple internal reflection according to an embodiment of the present invention may be a heat-sensitive photodetector, And a thermopile sensor 133, which is a thermoelectric element for measuring a temperature difference caused by light energy. The thermopile sensor 133 may include a plurality of thermocouples 133a and 133b and a conductive connection 135 that are connected in series to each other to detect infrared rays. At this time, one thermocouple may include a contact structure of the p-type thermoelectric material 133a and the n-type thermoelectric material 133b.

The thermo electric effect, which is the driving principle of the thermopile sensor 133, relates to the correlation between heat and electricity in dissimilar metals, and is a method of measuring the light quantity using the Seebeck effect. The thermopile sensor 133 is a photodetector device that uses a Seebeck effect in which an electromotive force proportional to a temperature difference occurs at both ends when a temperature difference occurs at both ends of the metal. If the electromotive force is generated in the same direction as the slope of the temperature with respect to the electromotive force generated by the temperature difference and the case where the electromotive force occurs in the opposite direction to the temperature gradient is a negative type, It is also possible to maximize light output by alternately joining a negative type and a negative type. Thus, the thermopile sensor 133 can be used to accurately and quickly detect thermal information emitted from the photodetector 130 at low cost. A ROIC element may be disposed on the side of the photodetector 130. The absorption and reflection plate 137 may be disposed on the thermopile sensor 133 of the photodetector 130 and may include at least one material selected from the group consisting of BiTe, SbTe, and W.

5A and 5B are diagrams illustrating a light irradiator 210 and a photodetector 230 constituting an optical gas sensor according to a comparative example of the present invention. The optical gas sensor according to the comparative example of the present invention does not adopt the configuration of the reflection plate for absorption and reflection 137 and the reflection plate 117 disclosed in Figs. Instead, the photodetector 230 includes a light absorber 237 to absorb light of a particular wavelength band well.

Hereinafter, the construction and operation of an optical gas sensor using multiple internal reflection according to an embodiment of the present invention will be described in comparison with the above-described comparative example.

In an optical gas sensor 100 using multiple internal reflection according to an embodiment of the present invention, the characteristic absorption line is absorbed while the light emitted from the light irradiation device 110 passes through the gas layer, The amount of the gas in the housing part 150 is estimated by sensing the amount of the gas in the housing part 150. [ The signal I detected by the photodetector 130 is expressed by Equation (1).

Figure 112016117626116-pat00001

Here, I 0 corresponds to a signal in a state where a specific gas is not present inside the housing part 150, n is a gas concentration,? Is an absorption coefficient, L is a cavity length (cavity length).

6 is a graph illustrating the relationship of Equation (1). 6, in general, the signal I detected by the photodetector is converted into a concentration by comparison with the signal I 0 in the state of no specific gas, and the absorption rate of the characteristic absorption line of the gas to be detected is low Or when the concentration of the gas to be measured is low, a long optical path is required to compare with a state in which there is no specific gas, which causes the size of the measuring apparatus to be increased. Further, the photodetector uses a light absorber (237 in FIG. 5B) to absorb light of a specific wavelength band. The light absorber 237 absorbs light well but has a large heat capacity, so that the response speed of the photodetector is slow When the light absorber 237 is not used, there is a problem that only a state where the gas concentration is high is detected.

That is, the signal when a specific gas has a constant concentration versus a signal when there is no specific gas decreases exponentially with the specific gas concentration, the absorption coefficient of the characteristic absorption band, and the length of the optical cavity (optical path). Therefore, when the concentration of the gas to be measured is low (in the case of toxic gas) and the absorption coefficient of the characteristic absorption band is low, the length of the optical path becomes long, which causes the size of the gas sensor to become large. There is a problem that the power of the irradiation device must be high so that the power consumption is increased and the heat generation is increased. In addition, when the heat generation is severe, accurate measurement values can not be obtained until the gas sensor starts to operate and becomes thermal equilibrium, so that it has a long operation waiting time. 5B, the absorbing film 237 is used in the upper portion of the optical sensor. When the heat capacity of the absorbing film 237 is large, the response speed of the photodetector is increased There is a problem that power consumption and heat generation are increased because a light irradiator needs to emit light for a sufficient time to obtain a stable signal value from a photodetector.

In contrast, an optical gas sensor 100 using multiple internal reflection according to an embodiment of the present invention includes a light irradiator 110 provided with a reflector 117, A light detector 130 provided with a combined reflection plate 137, a window portion 119 disposed therebetween, and an optical filter portion 139 transmitting only a specific wavelength. The light radiated from the light irradiator 110 passes through the window portion 119 and the optical filter portion 139 to reach the photodetector 130 and the absorption and reflection plate 137 ), Some absorption and reflection occur. The light reflected by the absorption and reflection plate 137 on the upper part of the optical detector 130 is reflected again by the reflector 117 provided on the optical irradiator 110 and is incident on the optical detector 130, The magnitude of the signal detected by the photodetector 130 after one or more repetitions may be referred to FIG. 2 and Equations 2 to 8.

In Equations (2) to (8), I 1 and I 2 correspond to signal intensities of light passing through the optical filter unit 139 in the primary light path and the secondary light path, respectively. , And R corresponds to the reflectance of the absorption and reflection plate 137. [ I 1 A corresponds to the signal intensity of the light that has passed through the optical filter unit 139 in the primary optical path and is absorbed by the optical detector 130 via the absorption and reflection plate 137. I 1 R corresponds to the intensity of the primary light The light that has passed through the optical filter unit 139 in the light path corresponds to the signal intensity of the light reflected by the absorption and reflection plate 137 and directed to the re-reflection plate 117.

7 is a graph showing the ratio (I / I 0 ) of the signal intensity of light at the gas maximum concentration.

7, the reflectance R and the absorption rate A of the absorption and reflection plate 137 are determined by the concentration of the gas to be measured and the absorption coefficient of the light having a relatively narrow selective wavelength band passing through the optical filter unit 139 Can be designed accordingly. For example, the lower the concentration of the gas to be measured, the more the reflectance R of the absorption-use reflection plate 137 is relatively increased and the absorption rate A of the absorption-use reflection plate 137 is relatively lowered. The lower the absorption coefficient of the light having the relatively narrow wavelength band that has passed through the optical filter unit 139 is, the higher the reflectivity R of the absorption plate 137 and the absorption coefficient A of the absorption plate 137, Can be designed to be relatively low. For example, it can be confirmed that the discrimination power is higher in the absorption and reflection plate 137, which is a condition where the reflectance is 0.7 and the absorption rate is 0.3, as compared with the case where the reflectance is 0 and the absorption rate is 1. The absorbing and reflecting plate 137 can be formed of a semi-reflecting plate and a partial absorbing layer. Since the absorbing and reflecting plate 137 can be realized as a metal thin film having a relatively low conductivity, the increase in the heat capacity is small and the increase in response characteristics is insignificant. As the semi-reflector, a metal material having low electric conductivity such as BiTe, SbTe, or W is suitable.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: Optical gas sensor with multiple internal reflection
110: light irradiator
117: Reflector
119: Window portion
130: light irradiator
137: Reflector for absorption
139: Optical filter section
150: housing part

Claims (12)

A light irradiator capable of emitting light;
A photodetector capable of absorbing at least a portion of the light emitted from the light irradiator;
A plurality of internal reflection structures arranged between the light irradiator and the photodetector, the multiple internal reflection structure being configured to be absorbed by the photodetector so as to be absorbed by the photodetector after being radiated from the light irradiator and then absorbed by the photodetector; And
A housing having a light irradiator, a photodetector, and a plurality of internal reflection structures housed therein and having a reflective layer for reflecting light on its inner surface;
Respectively,
The multiple internal reflection structure includes an absorption and reflection plate disposed adjacent to the photodetector and capable of absorbing a part of light and a reflection of another part of light; And a re-reflecting plate disposed adjacent to the light irradiator than the photodetector and configured to reflect the light reflected from the absorption and reflection plate and to enter the photodetector,
A window portion disposed between the absorption and reflection plate and the reflector, the window portion being disposed adjacent to the light emitter and transmitting light of a relatively wide wavelength band; And an optical filter unit disposed between the absorptive reflection plate and the reflector and disposed adjacent to the optical detector and transmitting light of a relatively narrow selective wavelength band,
Wherein the absorption and reflection plate is disposed on the photodetector including a thermoelectric element for measuring a temperature difference caused by light energy,
The reflectance and the absorption rate of the absorption and reflection plate are designed in accordance with the concentration of the gas to be measured and the absorption coefficient of the light of the relatively narrow selective wavelength band,
The absorbing and reflecting plate includes at least one material selected from the group consisting of BiTe, SbTe, and W to prevent delay in response speed of the photodetector due to an increase in heat capacity of the absorption and reflection plate, Wherein the absorption ratio and the reflectance of the absorption and reflection plate are adjusted by the thickness and the composition of the absorption and reflection plate,
Optical Gas Sensor Using Multiple Internal Reflections. delete The method according to claim 1,
Wherein the absorbing and reflecting plate and the re-reflecting plate are configured such that multiple reflections are made using the absorbing and reflecting plate and the re-reflecting plate, or using the absorbing and reflecting plate, the re-reflecting plate, and the housing portion. Optical gas sensor using reflection. The method of claim 3,
Wherein the light irradiator and the photodetector are arranged to face each other in the housing portion. The method of claim 3,
Wherein the light irradiator and the photodetector are arranged such that the optical path irradiated by the light irradiator and the optical path detected by the photodetector are not parallel to each other in the housing part. delete delete The method according to claim 1,
Wherein the reflectance of the absorption-use reflection plate is relatively higher and the absorption rate of the absorption-use reflection plate is relatively lower as the concentration of the gas to be measured is lower. The method according to claim 1,
Wherein the reflectance of the absorption and reflection plate is relatively higher and the absorption rate of the absorption and reflection plate is relatively lower as the absorption coefficient of the light of the relatively narrow selective wavelength band is lower. . delete The method according to claim 1,
Further comprising a gas inlet configured to allow the outside air to flow into the housing portion. The method according to claim 1,
Wherein the photodetector comprises a thermopile sensor. ≪ Desc / Clms Page number 13 >

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PCT/KR2017/013610 WO2018101690A1 (en) 2016-11-30 2017-11-27 Optical gas-sensor using multiple inner reflection

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US3861809A (en) * 1973-04-06 1975-01-21 Perkin Elmer Corp Confocal cavity optical gas sensor
JPS6148735A (en) * 1984-08-16 1986-03-10 Nippon Steel Corp Measuring device for concentration and partial pressure of gas
JPH095233A (en) * 1995-06-15 1997-01-10 Nippon Sanso Kk Spectroscopic analysis apparatus for gas
KR20070010847A (en) 2005-07-20 2007-01-24 삼성전자주식회사 Ink get alignment film printing apparatus and method
KR100959088B1 (en) * 2008-04-03 2010-05-20 (주)맨 텍 Optical gas sensor and optical cavity for the gas sensor
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E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)