KR101934146B1 - Long-arc type discharge lamp - Google Patents
Long-arc type discharge lamp Download PDFInfo
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- KR101934146B1 KR101934146B1 KR1020150100917A KR20150100917A KR101934146B1 KR 101934146 B1 KR101934146 B1 KR 101934146B1 KR 1020150100917 A KR1020150100917 A KR 1020150100917A KR 20150100917 A KR20150100917 A KR 20150100917A KR 101934146 B1 KR101934146 B1 KR 101934146B1
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- discharge lamp
- arc
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/88—Lamps with discharge constricted by high pressure with discharge additionally constricted by envelope
Abstract
In a long arc type discharge lamp in which a pair of electrodes are disposed opposite to each other in a long ultraviolet ray transmitting light emitting tube and metal is sealed as a rare gas and a light emitting material and rare earth oxide is contained in the electrode and alternating current is turned on, The present invention provides a long arc-type discharge lamp which suppresses premature depletion of a tube (electron radioactive material), prevents blackening or cloudiness of an arc tube, and provides stable lighting over a long period of time. (I / V) ≤ 1.0, where V (mm) is the volume from the tip of the electrode to 3 mm.
Description
BACKGROUND OF THE
BACKGROUND ART Conventionally, industries such as surface modification of plastic, optical CVD, optical ashing, and UV curing have widely used ultraviolet rays. Long arc type discharge lamps such as long arc type metal halide lamps are used for such applications.
Electrodes used in this type of long arc discharge lamp are required to have both a characteristic of emitting electrons and a characteristic of being difficult to be consumed and deformed even at a high temperature. As an electrode material satisfying these properties, a tungsten containing thorium oxide (ThO 2) (Th tungsten: ThW) is being used a lot.
This is because thorium tungsten (ThW) has a low work function of 2.6 eV and can emit electrons at a low voltage, so that thorium oxide effectively functions as an electron emitting material (emitter) And that it is possible to operate stably.
However, thorium is a radioactive substance, subject to legal regulations, requires careful consideration in its management and handling, and therefore, substitutes for thorium are desired.
As an alternative to thorium, it has been proposed to use rare earth elements and their compounds. The rare earth element is a substance having a low work function and excellent electron emission and is expected as a substitute material of thorium.
Japanese Patent Application Laid-Open No. 2009-259790 (Patent Document 1) discloses a tungsten electrode which is a material of a long arc type in which lanthanum oxide (La 2 O 3 ) or cerium oxide (CeO 2 ) A discharge lamp is disclosed.
However, rare earth oxides such as lanthanum oxide (La 2 O 3 ) are relatively more likely to evaporate because of higher vapor pressure than thorium oxide (ThO 2 ). Therefore, when a rare earth oxide is used instead of thorium oxide as an emitter to be contained in the negative electrode, the rare-earth oxide is excessively evaporated, resulting in premature depletion. Due to depletion of the emitter, the electron emission function in the cathode is lost, and the blackening of the end of the light emitting tube proceeds early, thereby reducing the effective light emission length. Then, deformation of the electrode occurs early, causing flicker, which shortens the life of the lamp.
In addition, the evaporation of the emitter is increased, so that the wall of the periphery of the electrode tip is cloudy to cause a problem.
Therefore, in a discharge lamp using a rare earth oxide other than thorium as an emitter material, there is still a problem that the lighting is unstable prematurely.
SUMMARY OF THE INVENTION In view of the above problems of the prior art, it is an object of the present invention to provide a light-emitting tube having a pair of electrodes arranged opposite to each other in a long ultraviolet ray transmitting tube, a rare gas and a luminescent material sealed with a metal, , A long arc type discharge lamp which is provided with an alternating current which is capable of suppressing premature depletion of an emitter (electron radioactive material) and preventing blackening or cloudiness of the arc tube and obtaining stable lighting over a long time, Lamp.
In order to solve the above problems, the long arc type discharge lamp according to the present invention is characterized in that when the average value of the lamp current is I (amperes A) and the volume from the tip of the electrode to 3 mm is V (㎣) (I / V) ≤ 1.0.
Further, the long arc type discharge lamp is characterized in that it is switched on between the normal lighting mode and the standby lighting mode.
Further, the metal enclosed in the arc tube is a metal other than mercury.
Further, the pressure of the rare gas enclosed in the arc tube before the lamp is turned on is characterized by 6.6 k to 53.2 kPa (50 to 400 Torr).
According to the long arc type discharge lamp of the present invention, a practical lamp life can be ensured by optimizing the current value (I / V) per volume (V) near the tip of the electrode in the average value I of the lamp current.
That is, when the value of I / V is less than 0.4, the temperature of the entire electrode becomes too low, and it becomes difficult to emit a constant thermal electron from the electrode, and an arc is generated only in a part of the electrode. As a result, the temperature locally rises locally only at the portion where the arc occurs, and the emitter is depleted at that portion, and later the blackening by evaporation of tungsten proceeds. In addition, the lamp may be turned off.
On the other hand, if the value of I / V exceeds 1.0, the temperature of the entire electrode rises too much, and the emitter evaporates from the electrode, which causes clouding of the arc tube.
1 is a sectional view of a long arc type discharge lamp of the present invention.
2 is an enlarged cross-sectional view of the main part of Fig.
3 is a temperature distribution in the axial direction of the electrode.
4 is a graph showing lamp currents in the normal lighting mode and the standby lighting mode.
5 is a graph showing the relative illuminance with respect to the distance from the electrode tip to the center of the arc tube.
The long arc
In the
2, the
The two
The electrode (4) contains rare earth oxide with tungsten as a base material. Examples of rare earth oxides include lanthanum oxide (La 2 O 3 ) which is an oxide of lanthanum, cerium oxide (CeO 2 ) which is an oxide of cerium and yttrium oxide (Y 2 O 3 ) which is an oxide of yttrium. These rare earth oxides function as electron-emitting materials (emitters).
The weight ratio of the rare earth oxide is suitably in the range of 0.05 wt% to 1 wt%. When the amount is less than 0.05% by weight, it is difficult to prepare the composition with a stable weight ratio. When the amount is more than 1% by weight, scattering of the emitter is increased and clouding occurs early.
An oxide of a titanium group element (titanium zirconium hafnium) may be added to the
Further, in this embodiment, the
FIG. 3 shows the temperature distribution seen from the tip of the electrode in the axial direction of the rare earth electrode of the present invention thus formed and the thorium tungsten (Thantan) (ThW) electrode containing the conventional thorium oxide.
In Fig. 3, the rare earth electrode is indicated by a solid line (), and the triptan electrode is indicated by a dashed line (▴). The dotted line of 1 mm or less is obtained by extrapolating each temperature distribution curve.
As can be seen from Fig. 3, in this type of AC arc discharge lamp of long arc type, the inflection point of the temperature distribution can be seen in the vicinity of 3 mm from the tip of the electrode, and the temperature after 3 mm is not much changed by the electrode material. From this, it can be seen that the portion from the tip to 3 mm has a substantial effect on the characteristics such as electron emission and evaporation of the emitter.
Here, the present inventors verified the relationship between the volume V (mm) of a portion up to 3 mm from the electrode tip and the average value (average current) I (ampere A) of the lamp current.
The value (I / V) obtained by dividing the average current I by the volume V of the tip of the electrode schematically indicates the current capacity at the tip of the electrode. That is, I / V (A /?) Represents a value corresponding to the amount of heat per unit volume flowing from the discharge plasma at the tip of the electrode.
Further, since the lamp is turned on alternately, the RMS value (effective value) is used as an average value of the lamp current. The volume V of the
The long arc type discharge lamp is switched between the normal lighting mode and the standby lighting mode to light up.
In order to reduce power consumption, the long arc-type discharge lamp of this kind of processing apparatus has a normal lighting mode in which ultraviolet rays are irradiated to an object (workpiece) The standby lighting mode may be repeatedly switched on and turned on.
In this case, the lamp current in the normal lighting mode and the lamp current in the standby lighting mode are averaged over time, and the value may be I.
FIG. 4 shows a method of obtaining the average current.
In FIG. 4, the lamp current in the normal lighting mode is Ir (RMS value), the irradiation time is Tr, the lamp current in the standby lighting mode is Is (RMS value), and the irradiation time is Ts.
At this time, the average current I,
I = (Ir x Tr + Is x Ts) / (Tr + Ts).
In the long arc type discharge lamp of the present invention, the I / V (A /?) Obtained in this manner is set to 0.4 or more and 1.0 or less.
If the I / V at the time of irradiation is less than 0.4, the temperature of the whole electrode becomes too low, and it becomes difficult to emit a certain amount of hot electron from the electrode, and arcing occurs only in a part of the electrode. As a result, the temperature locally rises locally only at the portion where the arc occurs, and the emitter is depleted at that portion, and later the blackening by evaporation of tungsten proceeds. In addition, the lamp may be turned off.
On the other hand, if the I / V at the time of irradiation exceeds 1.0, the temperature of the entire electrode rises too much, and the emitter evaporates excessively from the electrode, causing clouding of the arc tube.
Experiments were conducted to demonstrate the effects of the present invention.
(Specification of lamp)
Emitting length: 1100 mm, diameter in the arc tube: 22 mm
Encapsulation: mercury 0.5 mg / cc, trace oxo, argon (Ar) 5 kPa
Electrode: diameter? 3.0 mm,
<Invention>
I used a tungsten (W) (YZW) - zirconium oxide (ZrO) - electrode, the emitter, yttrium oxide (
The amount of the titanium oxide is in the range of 0.01 to 0.9% by weight, as a concentration after the electrode working.
Hereinafter, the specifications of the three kinds of lamps which were tested were as follows.
<Experimental Example 1>
As the emitter, an electrode containing the rare earth oxide is used.
Lighting mode:
In normal lighting mode: current 26.3A,
Standby mode: current 14.4A,
Lighting frequency: 50kHz
From these conditions, the average current I and the value of I / V are calculated as follows.
I = (26.3 x 30 + 14.4 x 30) /60=20.4A
I / V = 20.4 / 21.2 = 0.96 A /
<Experimental Example 2>
As with the lamp of Experimental Example 1, an electrode containing a rare earth oxide was used.
Lighting mode:
Normal lighting mode: current 36.4A,
Standby mode: current 14.4A,
Lighting frequency: 50kHz
From this condition, I = 25.4 A and I / V = 1.2 A / min.
<Experimental Example 3>
Thorium tungsten (ThW) is used as the electrode material. That is, the emitter is thorium oxide.
Lighting mode:
In normal lighting mode: current 32.3A,
Standby mode: current 14.4A,
Lighting frequency: 50kHz
From this condition, I = 23.35 A and I / V = 1.1 A / min.
Here, the comparison of the performance of each of Experimental Examples 1 to 3 is performed by comparing the illuminance at a
If the values of the lamps using the rare earth electrodes (Experimental Examples 1 and 2) are close to the values of the lamps using the ThW electrodes (Experimental Example 3), it can be judged to have the same performance as the ThW electrodes.
The results are shown in Fig.
The illuminance at the center of the light emission length after 2000 hours of Experimental Example 3 (ThW electrode) was 1, and the illuminance at each measurement position in Experimental Example 1 and Experimental Example 2 was compared with a relative value. Relative illuminance was compared in the range of 60 mm from the electrode tip to the discharge space side.
As shown in FIG. 5, in Experimental Example 1 (I / V = 1.0), the illuminance at the side of the light emitting portion of 30 mm from the tip of the electrode can be maintained at about 90% even after 2000 hours have elapsed. This is almost equivalent to that of the lamp of Experimental Example 3 using the conventional ThW electrode.
On the other hand, in Experimental Example 2 (I / V = 1.2), it is about 80%, which is lower than that of the conventional ThW electrode. This is presumably because the temperature of the entire electrode rises excessively, the emitter evaporates excessively from the electrode, and the light-emitting tube becomes cloudy.
As described above, when the rare-earth electrode is used, if I / V = 1.0 or less, the performance equivalent to that of a lamp using a conventional ThW electrode can be obtained.
As can be seen from the above, when an electrode containing a rare earth oxide is used as the emitter, the average current value per electrode volume near the electrode tip (3 mm from the tip) is used in a suitable range (I / V is 1.0 or less) A practical lifetime performance comparable to an electrode made of thorium oxide of an emitter can be secured.
However, as this value (I / V) becomes smaller than 1.0, the conventional ThW becomes closer to the performance of a lamp made of an electrode material. When the value becomes less than 0.4, the temperature of the entire electrode becomes too low, Discharge becomes difficult, and an arc is generated only in a part of the electrode.
In the above description, the enclosure as the light emitting material is described as mercury (Hg), but the present invention is not limited thereto.
In a lamp in which mercury is not enclosed, for example, a lamp in which zinc (Zn) is enclosed instead of mercury, the ionization potential of zinc is lower than that of mercury, so that the ionization is liable to ionization. Therefore, the damage of the electrode can be made constant, and the load on the electrode per unit area can be reduced.
In a lamp not containing mercury, it takes time for the metal (for example, zinc) enclosed in place of mercury to evaporate after the lamp is turned on, so that the rise of the internal pressure of the discharge vessel of the lamp is slow. For this reason, blackening tends to increase due to evaporation of tungsten at the initial stage of starting.
Thus, at the beginning of starting, tungsten is evaporated and scattered. At the periphery of the electrode, there is a rare gas of the enclosed gas, and tungsten scattered from the electrode collides with the rare gas.
For this reason, it is preferable to raise the sealing pressure of the rare gas to, for example, 6.6 k to 53.2 kPa (50 to 400 Torr). By doing so, the density of the rare gas existing around the electrode becomes high, As the frequency increases, the tungsten can be returned to the electrode again. As a result, blackening due to evaporation of tungsten can be prevented.
As described above, in the long arc type discharge lamp according to the present invention, when the average value of the lamp current is I (ampere: A) and the volume from the electrode tip to 3 mm is V (㎣) V) &le; 1.0, it is possible to obtain a performance equivalent to that of a lamp using thorium oxide as an emitter, which has heretofore been widely used, and realize a ramp using a rare earth oxide as an emitter.
1: long arc type discharge lamp 2: arc tube
3: seal part 4: electrode
5: metal foil 6: spacer glass
7: external lead 8: feed line
Claims (4)
When the average value of the lamp current is I (amperes: A) and the volume from the electrode tip to 3 mm is V (㎣)
0.4 &le; (I / V) &le; 1.0.
Wherein the long arc-type discharge lamp is turned on by switching between a normal (steady) lighting mode and an atmospheric lighting mode.
Wherein the metal enclosed in the arc tube is a metal other than mercury.
Wherein a pressure of the rare gas enclosed in the arc tube before the lamp is turned on is 6.6 k to 53.2 kPa (50 to 400 Torr).
Applications Claiming Priority (2)
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JP2014173700A JP6086253B2 (en) | 2014-08-28 | 2014-08-28 | Long arc type discharge lamp |
JPJP-P-2014-173700 | 2014-08-28 |
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KR101934146B1 true KR101934146B1 (en) | 2018-12-31 |
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KR (1) | KR101934146B1 (en) |
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TWI745630B (en) * | 2018-10-25 | 2021-11-11 | 日商牛尾電機股份有限公司 | Long arc discharge lamp |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009259790A (en) * | 2008-03-26 | 2009-11-05 | Harison Toshiba Lighting Corp | High-pressure discharge lamp |
JP2012160330A (en) * | 2011-01-31 | 2012-08-23 | Ushio Inc | Metal halide lamp, and metal halide lamp lighting device |
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DE69527491T2 (en) * | 1994-11-25 | 2003-02-20 | Ushiodenki Kabushiki Kaisha To | Short arc type metal halide lamp |
JP2915385B1 (en) * | 1997-12-25 | 1999-07-05 | ウシオ電機株式会社 | Short arc mercury lamp |
CN1277732A (en) * | 1998-09-16 | 2000-12-20 | 松下电器产业株式会社 | Anhydrous silver halide lamp |
EP1149406B1 (en) * | 1999-11-11 | 2006-08-02 | Koninklijke Philips Electronics N.V. | High-pressure discharge lamp |
DE10209426A1 (en) * | 2002-03-05 | 2003-09-18 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Short-arc high pressure discharge lamp |
JP4100599B2 (en) * | 2002-04-05 | 2008-06-11 | ウシオ電機株式会社 | Super high pressure mercury lamp |
JP2005327485A (en) * | 2004-05-12 | 2005-11-24 | Erebamu:Kk | Cold-cathode fluorescent lamp |
CN101994922A (en) * | 2009-08-12 | 2011-03-30 | 启耀光电股份有限公司 | Cold-cathode fluorescence lamp for illumination |
JP4983877B2 (en) * | 2009-09-11 | 2012-07-25 | ウシオ電機株式会社 | High pressure discharge lamp lighting device and projector |
JP5347875B2 (en) * | 2009-09-29 | 2013-11-20 | ウシオ電機株式会社 | Long arc type discharge lamp |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009259790A (en) * | 2008-03-26 | 2009-11-05 | Harison Toshiba Lighting Corp | High-pressure discharge lamp |
JP2012160330A (en) * | 2011-01-31 | 2012-08-23 | Ushio Inc | Metal halide lamp, and metal halide lamp lighting device |
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CN105390366B (en) | 2018-03-16 |
JP6086253B2 (en) | 2017-03-01 |
TWI621375B (en) | 2018-04-11 |
TW201615061A (en) | 2016-04-16 |
CN105390366A (en) | 2016-03-09 |
KR20160026672A (en) | 2016-03-09 |
JP2016048655A (en) | 2016-04-07 |
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