KR101932154B1 - Rf pulse edge shaping - Google Patents

Abstract

The radio frequency generation module receives the first and second desired amplitudes of the output of the radio frequency generation module in respective first and second states and generates a second state from the first state to the second state based on the first and second desired amplitudes Lt; RTI ID = 0.0 > input < / RTI > The frequency control module receives input power setpoints and outputs frequency setpoints corresponding to input power setpoints. The pulse shaping module receives input power setpoints, frequency setpoints, and an indication of when to transition from the first state to the second state, and based on the input power setpoints, frequency setpoints, and indications And transitions the output of the radio frequency generation module from the first state to the second state.

Description

[0001] RF PULSE EDGE SHAPING [0002]

This application claims the benefit of U.S. Utility Model No. 13 / 663,574 filed on October 30, 2012. The contents of these patents are hereby incorporated by reference in their entirety.

The present invention relates to radio frequency power systems, and more particularly to pulse edge shaping of the output of a radio frequency power system.

Background of the invention is provided herein for the purpose of generally illustrating the context of the present invention. As well as the research of the inventors of the present invention, to some extent, described in the background section, aspects of the description which otherwise would qualify as prior art at the time of filing are expressly and implicitly recognized as prior art It does not.

Plasma etching is frequently used only in semiconductor manufacturing, for example. In plasma etching, it is accelerated by an electric field to etch the exposed surfaces on the substrate. The electric field is generated in accordance with the radio frequency power signals generated by the radio frequency generator of the radio frequency power system. The radio frequency power signals generated by the radio frequency generator are precisely controlled to efficiently perform the plasma etching.

A radio frequency power system may include a load such as a radio frequency generator, a matching network, and a plasma chamber. The radio frequency power signals may be used to produce various components including, but not limited to, integrated circuits (ICs), solar cell panels, compact discs (CDs), and / or digital versatile Used to drive the load. The load may include cables having broadband mismatched loads (e.g., mismatch resistor terminations), narrowband mismatch loads (e.g., a two-element matching network), and resonator loads .

The radio frequency power signals are received in the matching network. The matching network matches the input impedance of the matching network to the characteristic impedance of the transmission line between the radio frequency generator and the matching network. Impedance matching also helps to minimize the amount of power that is applied to the matching network in the forward direction ("forward power") toward the plasma chamber and again reflected from the matching network to the radio frequency generator, and impedance matching also occurs from the matching network to the plasma chamber Helps maximize forward power output.

There are various approaches for applying radio frequency signals to the load. An exemplary approach is to apply a continuous wave signal to the load. A continuous wave signal is a sinusoidal wave that is generally output continuously to a load by a radio frequency power supply. In the continuous wave approach, the radio frequency signal estimates the sinusoidal output, and the amplitude and / or frequency of the sinusoid may vary to change the output power applied to the load. Another example approach to applying a radio frequency signal to a load is to include pulsing a radio frequency signal rather than applying a continuous wave signal to the load.

The radio frequency generation module includes a power control module for receiving the first and second desired amplitudes of the output of the radio frequency generation module in respective first and second states and outputting the first and second desired amplitudes based on the first and second desired amplitudes, And input power set points corresponding to the transition from the first state to the second state. The frequency control module obtains input power setpoints and outputs frequency setpoints corresponding to input power setpoints. The pulse shaping module receives an indication of the input power setpoint, the frequency setpoints, and an indication of when to transition from the first state to the second state, and based on the input power setpoints, frequency setpoints, To transition the output of the radio frequency generation module from the first state to the second state.

A method for operating a radio frequency generation module includes receiving first and second desired amplitudes of an output of a frequency generating module in respective first and second states, generating first and second desired amplitudes based on first and second desired amplitudes, Outputting the input power setpoints corresponding to the transition from the state to the second state, outputting the frequency power setpoints corresponding to the input power setpoints, setting the input power setpoint, the frequency power setpoint, Receiving an indication of when to transition from a first state to a second state, and receiving an output of the radio frequency generation module from a first state to a second state based on input power setpoints, frequency power setpoints, Lt; / RTI >

Further areas of applicability of the present invention will become apparent from the detailed description provided hereinafter. It should be understood that the description and specific embodiments are intended for purposes of illustration only and are not intended to limit the scope of the present invention.

The invention will be more fully understood from the detailed description and the accompanying drawings.
1 is a functional block diagram of a preferred radio frequency plasma chamber in accordance with the principles of the present invention.
2 is a functional block diagram of a radio frequency generation module in accordance with the principles of the present invention.
Figures 3a, 3b, and 3c show outputs having different pulse shapes in accordance with the principles of the present invention.
Figure 4 is a functional block diagram of a pulse shaping module in accordance with the principles of the present invention.
5 is a functional block diagram of a frequency state control module and a power state control module in accordance with the principles of the present invention.

The pulses generated by the radio frequency generator are not individually adjusted or adjusted. For example, only the high side of the pulse can be adjusted or no part of the pulse is adjusted. As a result, the adjustments can be slowed and the pulse can not achieve the target before the change, thereby limiting the impedance match or pulse rate, or requiring very quick adjustments.

The radio frequency generation module according to the present invention minimizes the reflected power for a number of different power levels during pulsing and minimizes the reflected power for a number of different power levels caused by the pulsed plasma, And increases the control over the transmitted energy. ≪ Desc / Clms Page number 2 > For example, the radio frequency generation module implements one or more power control modules and one or more frequency control modules. The power control module and the frequency control module control a plurality of discrete states required by a specific process. The power control module and frequency control module transitions the radio frequency output signal of the radio frequency generation module between the first and second states (e.g., generates a radio frequency pulse). However, instead of controlling the instantaneous transition between the first state and the second state, the power and frequency may be varied between the first state and the second state, and / or in a step-wise fashion (i.e., To the set point), to transition from the second state to the first state.

For example, a radio frequency generator module may pulsate between power set points for transition from a first state to a second state (e.g., PDEL (0), and PDEL (1), ...). , And PDEL (n)). Similarly, the radio frequency generation module maintains a different radio frequency set point for each of the power set points (e.g., f (0), f (1), ..., f (n)). When a pulse change occurs, both the radio frequency power and the radio frequency frequency are gradually changed between the range of power and frequency setpoints in the first stage. In this manner, the radio frequency generation module shapes the edges of the radio frequency pulse according to various desired edge shapes instead of generating only a square wave. For example, the edges of the radio frequency pulses can be shaped based on the desired power level, voltage, or current, or any other suitable input.

Referring now to FIG. 1, a functional block diagram of a preferred implementation of a preferred radio frequency plasma chamber system 100 is shown. 1 illustrates a dual channel radio frequency plasma channel system, the principles of the present invention apply to a radio frequency generator system comprising two or more channels.

A radio frequency generator module 102 (e.g., a radio frequency generator) receives the AC pressure power and generates radio frequency outputs using the AC input power. By way of example only, the AC input power may be three-phase AC power or about 480 volts AC or another suitable voltage. For illustrative purposes only, the radio frequency generator module 102 is hereinafter described as generating two radio frequency outputs (i. E., The radio frequency generator module 102 is described as a dual channel ancillary frequency generator module). However, the radio frequency generator module 102 may generate a greater number of radio frequency outputs, or may only produce a single radio frequency output. By way of example only, the radio frequency generator module 102 can generate one radio frequency output per plasma electrode implemented in one or more plasma chambers, such as the plasma chamber 106.

The matching module 110 receives the radio frequency outputs and impedance matches the respective radio frequency outputs before the radio frequency outputs are provided to the plasma chamber. The radio frequency generator module 102 may control the matching module 110. More specifically, the radio frequency generator module 102 controls the matching module 110 to the extent that it performs impedance matching.

The matching module 110 applies radio frequency outputs to the plasma electrodes, each of which is implemented in a plasma chamber 106. Application of radio frequency outputs to plasma electrodes can be performed, for example, in thin film deposition systems, thin film etching systems, and other suitable systems. The radio frequency outputs may also be used in other suitable systems.

The radio frequency generator module 102 includes an output control module 140, a user interface module 144, a common excitation module 148, and a radio frequency generation module 152. The radio frequency generator module 102 may also include a sensor module 156 and a matching control module 160.

The output control module 140 receives an input power setpoint for the radio frequency outputs generated by the radio frequency generation module 152 (P Set) and delivered to the plasma electrodes. The input power set point is provided by, for example, the user interface module 144 or other suitable source. Another suitable source of input power setpoint may include, for example, a universal standard (US) 232 connection, an Ethernet connection, a wireless connection, or a diagnostic or user input provided through the front panel input. An external source (not shown) may input a radio frequency signal that may be used by the output control module 140 (CEX In). The radio frequency signal may also be output or used for input or output by the common excitation module 148 (CEX Out). By way of example only, a radio frequency signal may be output to one or more other radio frequency generator modules that generate radio frequency outputs for one or more other plasma chambers (not shown).

The sensor module 156 may measure the voltage and current of the radio frequency output generated by the radio frequency generation module 152. The sensor module 156 may provide signals to the output control module 140 indicating voltage and current, respectively. By way of example only, the sensor module 156 may include a directional coupler or a VI probe, or other suitable type of sensor. In other implementations, the sensor module 156 may output signals representative of the first and second forward and reverse powers associated with the radio frequency output. The forward power refers to the amount of power leaving radio frequency generator module 152. The inverse power refers to the amount of power reflected back to the radio frequency generator module 152. The output of the sensor module 156 may be referred to as a feedback signal. The feedback signal may be a digital signal or an analog signal.

Based on the feedback signal from the sensor module 156, the output control module 140 may determine the forward power for the radio frequency output. The output control module 140 may also determine the reflection coefficient based on the feedback signal output by the sensor module 156. [

The output control module 140 controls the generation of the first and second radio frequency outputs using a feedback approach based on the first and second forward powers and the first and second reflection coefficients, respectively. More specifically, the output control module 140 provides one or more rail voltage setpoints and / or one or more driver control signals to the radio frequency generation module 152. The radio frequency generation module 152 controls one or more rail voltages (i.e., the voltages output from the radio frequency generation module 152 and input to the power amplifiers) based on the rail voltage setpoints, And controls the driving of the power amplifiers.

The radio frequency generation module 152 implements radio frequency pulse edge shaping according to the principles of the present invention. For example, the radio frequency generation module 152 may be configured to generate an output signal that is indicative of when rail voltage setpoints and driver control signals, pulse patterns, outputs of various pulse sources, and / or between the first and second pulse states But is not limited to, one or more inputs. The radio frequency generation module 152 receives (and / or generates) a plurality of input power setpoints and frequency setpoints. The radio frequency generation module 152 may include, for example, one or more inputs (e.g., an indication of when the transition occurs between the first and second pulse states), input power setpoints, and frequency setpoints As shown in FIG.

Referring now to Figures 2, 3a, 3b, and 3c, an exemplary radio frequency generation module 200 includes pulses 208-1, 208-2, and 208-3, which are alternatively referred to as pulses 208, Gt; 204 < / RTI > The radio frequency generation module 200 transitions the pulses 208 from the first state (e.g., state 0) to a second state (e.g., state 1), and from the second state to the first state Transition. The pulses 208 may include one or more intermediate states (e.g., state n) between the first state and the second state. The first state may correspond to a first input power set point (e.g., PDEL (0)) and a corresponding first frequency set point (e.g., f (0)). Conversely, the second state may correspond to a second input power set point (e.g., PDEL (1)) and a corresponding second frequency set point (e.g., f (1)).

Over the first transition period 212 between the first and second states, the input power setpoint may be adjusted from PDEL (0) to PDEL (1) (e.g., step by step). For example, the input power set point may be adjusted according to an increasing offset (i. E., A plurality of intermediate set points between PDEL (0) and PDEL (1)) over the first transition period 212. Similarly, the frequency setpoint may be adjusted stepwise from f (0) to f (1) through a plurality of intermediate set points over a first transition period 212. Conversely, the input power set point and the frequency set point are transferred from PDEL (1) to PDEL (0) and f (0) from f (1) respectively through a plurality of intermediate set points over the second transition period 216, Lt; / RTI > The first transition period 212 and the second transition period 216 may be the same or different and may be the same or different for different pulse shapes.

Incrementally adjusting the input power and frequency set points in this manner allows the radio frequency generation module 200 to shape the pulses 208 into edges. For example, pulse 208-1 is controlled to have exponential pulse edges. Pulse 208-2 is controlled to have linear pulse edges. Pulse 208-3 is controlled to have rounded pulse edges. Various other types of pulse edges may be controlled by the radio frequency generation module 200. For example, adjustment of the input power and frequency setpoints changes (i.e., ramps) the pulse edge shapes of the pulses 208 without changing the overall pulse width of the pulses 208.

The pulse pattern control module 220 determines a desired pulse frequency (e.g., a total pulse frequency) for a desired output 204 and a duty cycle corresponding to, for example, a desired pulse pattern. The desired pulse frequency and duty cycle provide an indication of when to transition from the first state to the second state and from the second state to the first state. The pulse pattern control module 220 may be in communication with a master pulse source module 224, one or more slave pulse source modules 228, and / or other pulse source modules 232. For example, the pulse pattern control module 220 and the pulse source modules 224, 228, and 232 may operate in part according to inputs received from the output control module 140.

The pulse state control module 236 generates an output indicative of a desired amplitude of the output 204 in the first and second states and an indication of when to transition between the first and second states. Power control module 240 receives the output from pulse state control module 236 and one or more signals indicative of input power setpoints from power setpoint module 244. [ For example, the power setpoint module 244 may store predetermined input power setpoints and / or may implement a user interface to receive user selected input power setpoints. Power control module 240 also includes a display of desired pulse shapes (e.g., from pulse state control module 236) corresponding to only one of the pulses shown, for example, in Figures 3a, 3b, and 3c . The desired pulse shape may determine the input power setpoints received from the power setpoint module 244.

Power control module 240 communicates to frequency control module 248 an indication of input power setpoints, for example, based on the desired amplitude and desired pulse shape. For example, the indication communicated from the power control module 240 may include a power set point corresponding to the first state (e.g., PDEL (0)), a power set point corresponding to the second state (e.g., PDEL (1)), and a step size corresponding to an incremental offset between each intermediate set point between the first state and the second state.

Conversely, the frequency control module 248 may determine the frequency set points corresponding to the input power set points. Alternatively, frequency control module 248 may store predetermined frequency setpoints corresponding to various input power setpoints. The frequency control module 248 communicates the frequency set points to the pulse shaping module 252 for display. For example, the indication communicated from the frequency control module 248 may include a frequency set point f (0) corresponding to the first state, a frequency set point f (1) corresponding to the second state, And a step size corresponding to an incremental offset between each intermediate set point between the first state and the second state. The pulse shaping module 252 generates an output 204 having a desired type of pulse based on the pulse state control module 236, the power control module 240, and the frequency control module 248.

Referring now to FIG. 4, an exemplary pulse shaping module 300 includes a frequency state control module 304, a power state control module 308, and an output control module 312. The frequency state control module 304 may be configured to determine a frequency state for a first state (state 0) frequency set point, a first state phase magnitude (e.g., a step size for transitioning frequency from a first state to a second state) A plurality of input signals 316 representative of a second state (state 1) frequency setpoint, and a second state phase magnitude (e.g., a step magnitude to transition the frequency from the first state to the second state) . Although described as a first state phase magnitude, the first state and / or the second state may also include, for example, only the number of steps to transition the frequency from the first state to the second state, the step time, and / Which may correspond to the total lamp time. The input signals 316 may also indicate whether it is transitioning between the first state and the second state (i.e., ramping between the first state and the second state), or whether it immediately transitions. The frequency state control module 304 also receives a pulse signal 320 indicating when to transition between the first state and the second state. The frequency state control module 304 outputs the frequency control signal 324 based on the input signals 316 and the pulse signal 320.

The power state control module 308 may, for example, determine a first state (state 0) power set point, a first state phase magnitude (e.g., a magnitude of a step size for transitioning power from a first state to a second state, ) 322, indicating a second state (state 1) power set point, and a second state phase magnitude (e.g. representing a magnitude of the step for transferring power from the first state to the second state) ). Although described as a first state phase size, the first state and / or the second state may also include, for example, the number of steps for transferring the frequency from the first state to the second state, the step time, and / It may correspond to the ramp time. The input signals 328 may also indicate whether it transitions between the first state and the second state (i.e., ramping between the first state and the second state), or immediately transitions. The power state control module 308 also receives a pulse signal 320 that indicates when to transition between the first state and the second state. The power state control module 308 outputs the power control signal 332 based on the input signals 328 and the pulse signal 320.

The output control module 312 receives the frequency control signal 324 and the power control signal 332. Output control module 312 generates an output 336 having pulses that are shaped according to frequency control signal 324 and / or power control signal 332.

Referring now to FIG. 5, an exemplary frequency state control module 400 and an example power state control module 404 are shown in greater detail. The frequency state control module 400

State 0 transition module 408, state 1 transition module 412, multiplexers 416, 420, and 424, and logical AND modules 428 and 432. State 0 transition module 408 receives state 0 frequency setpoint and state 0 phase magnitude and generates a state 0 frequency setpoint and a state 0 phase magnitude from state 1 frequency according to state 0 phase magnitude (or state 0 number steps, phase time, and / or total ramp time) Transition to state 0 frequency. For example, the state 0 transition module 408 generates a state 0 phase magnitude (or state 0 number steps, a phase time, and / or a total ramp time) to transition to a state 0 frequency in response to the pulse signal 336, Is repeatedly used. The state 0 transition module 408 receives the state 0 frequency set point and fixes it to the state 0 frequency set point when the transition from the state 1 frequency set point to the state 0 frequency set point is completed. The state 0 transition module 408 outputs a transition frequency signal 440.

State 1 Transition module 410 receives State 1 frequency setpoint and State 1 phase magnitude and generates a State 1 frequency set point and State 1 phase magnitude from state 0 frequency according to state 1 phase magnitude (or state 0 number steps, phase time, and / or total ramp time) Transition to state 1 frequency. For example, the state 1 transition module 412 generates a state 1 phase magnitude (or state 0 number steps, a phase time, and / or a total ramp time) to transition to a state 1 frequency in response to the pulse signal 336, Is repeatedly used. State 1 Transition module 412 receives State 1 frequency set point and fixes it to State 1 frequency set point when transition from State 0 frequency set point to State 1 frequency set point is completed. State 1 transition module 408 outputs a transition frequency signal 444. [

The multiplexer 420 outputs a transition frequency signal 440 or a state 0 frequency set point according to the selection signal 448 received from the logical AND module 432. The logical AND module 432 receives a state 0 ramp on / off signal and a holdoff signal indicating whether to ramp from state 1 to state 0. For example, the holdoff signal may indicate whether pulse edge shaping is possible according to one or more other conditions of the system. Thus, if the state 0 on / off signal is off or the holdoff signal indicates that pulse edge shaping is not possible, the multiplexer 420 outputs a state 0 frequency set point instead of the transition frequency signal 440.

The multiplexer 416 outputs a transition frequency signal 444 or a state 1 frequency set point in accordance with the selection signal 452 received from the logical AND module 428. The logical AND module 428 receives a state 1 ramp on / off signal, which indicates whether to ramp from state 0 to state 1, and a holdoff signal. Thus, if the state 1 on / off signal is off, or if the holdoff signal indicates that pulse edge shaping is not possible, the multiplexer 416 outputs a state 1 frequency setpoint instead of the transition frequency signal 444. The multiplexer 424 outputs a signal selected by the multiplexer 416 or a signal selected by the multiplexer 420 based on the pulse signal 336 and provides the output control module 460 with a frequency control signal 456 ).

Power state control module 404 includes state 0 transition module 464, state 1 transition module 468, multiplexers 472, 476 and 480, and logical AND modules 484 and 488. State 0 transition module 464 receives state 0 power set point and state 1 phase magnitude and transitions between state 0 power and state 1 power according to state 1 phase magnitude. For example, the state 0 transition module 464 repeatedly adds state 1 phase magnitude to state 0 power to transition to state 1 power in response to the pulse signal 336. The state 0 transition module 464 receives the state 1 power set point and fixes it to the state 1 power set point when the transition from the state 0 power set point to the state 1 power set point is complete. The state 0 transition module 464 outputs a first transition power signal 492.

State 1 Transition module 468 receives State 1 Power Set Point and State 0 Phase magnitude and transitions between State 1 Power and State 0 Power according to State 0 Phase magnitude. For example, state 1 transition module 468 repeatedly adds state 0 phase magnitude to state 1 power to transition to state 0 power in response to pulse signal 336. The State 1 Transition module 468 receives the State 0 Power Set Point and fixes it to the State 0 Power Set Point when the transition from the State 1 Power Set Point to the State 0 Power Set Point is complete. State 1 transition module 468 outputs a second transition power signal 496.

The multiplexer 476 outputs a transition power signal 492 or a state 0 power set point in accordance with the select signal 500 received from the logical AND module 488. The logical AND module 488 receives a falling ramp on / off signal, which indicates whether to ramp between state 1 and state 0, and a holdoff signal. Thus, if the polling ramp on / off signal is off, or if the holdoff signal indicates that pulse edge shaping is not possible, the multiplexer 476 outputs a state 0 power set point instead of the transition power signal 492.

The multiplexer 472 outputs a transition power signal 496 or a state 1 power set point in accordance with the selection signal 504 received from the logical AND module 484. The logical AND module 484 receives a rising ramp on / off signal and a hold off signal indicating whether to ramp between state 0 and state 1. Thus, if the rising ramp on / off signal is off, or if the holdoff signal indicates that pulse edge shaping is not possible, the multiplexer 472 outputs a state 1 power set point instead of a transition power signal 496. The multiplexer 480 outputs a signal selected by the multiplexer 472 or a signal selected by the multiplexer 476 on the basis of the pulse signal 336 and supplies the output control module 460 with a power control signal (508). The output control module 460 generates an output 512 having pulses shaped according to a frequency control signal 456 and a power control signal 508.

The previous description is illustrative only and is not intended to limit the invention, its application, or uses. The broad principles of the invention may be implemented in various forms. Thus, while the present invention includes specific embodiments, the true scope of the invention should not be so limited, as the study of the drawings, specification, and subsequent claims will become apparent to those skilled in the art. For purposes of clarity, the same reference numerals will be identified with like elements in the figures. As used herein, at least one of the idioms A, B, and C must be constructed to mean logic (A or B or C), using a non-exclusive logical OR. It is to be understood that one or more steps in a method may be excluded in different orders (or concurrently) without altering the principles of the invention.

As used herein, the term module includes an application specific integrated circuit (ASIC); Electronic circuit; Combinational logic circuit; A field programmable gate array (FPGA); Processor (shared, private, or group) executing the code; Other suitable hardware components that provide the described functionality; Or a combination of some or all of the above, such as a system-on-chip, for example. The term module may include memory (shared, dedicated, or group) that stores code executed by the processor.

As used herein, the term code may include software, firmware, and / or microcode, and may refer to programs, routines, functions, classes, and / or objects. As used herein, the term sharing means that some or all of the code from multiple modules can be executed using a single (shared) processor. In addition, some or all of the code from multiple modules may be stored by a single (shared) memory. As used herein, a group of terms means that some or all of the code from a single module may be executed using a group of processors. In addition, some or all of the code from a single module can be stored using a group of memories.

The devices and methods described herein may be implemented by one or more computers in which one or more are implemented by a processor. Computer programs include processor executable instructions stored on a non-transitory type computer readable medium. The computer programs may also include stored data. Non-limiting examples of non-transitory type computer readable media are non-volatile memory, magnetic storage devices, and optical storage devices.

100: Radio Frequency Plasma Chamber System
102: Radio frequency generator module
106: Plasma chamber
110: matching module
140: Output control module
144: User interface module
148: Common excitation module
152: Radio frequency generation module
156: Sensor module
160: matching control module
200: Radio frequency generation module
204: Output
208: Pulse
212: first transition period
216: second transition period
220: Pulse pattern control module
224: Master pulse source module
228: Slave Pulse Source Module
232: Pulse source module
236: Pulse state control module
240: Power control module
244: Power set point module
248: Frequency control module
252: Pulse shaping module
300: Pulse shaping module
304: Frequency status control module
308: Power state control module
312: Output control module
316: input signal
320: Pulse signal
324: Frequency control signal
328: input signal
332: Power control signal
336: Output
400: frequency state control module
404: Power state control module
408: State 0 transition module
412: State 1 transition module
416, 420, 424: multiplexer
428, 432: a logical AND module
440, 444: Transition frequency signal
448, 452: selection signal
456: Frequency control signal
460: Output control module
464: State 0 transition module
468: State 1 transition module
472, 476, 480: multiplexer
484, 488: logical AND module
492: first transition power signal
496: second transition power signal
508: Power control signal
512: Output

Claims (18)

Receiving first and second desired amplitudes of the outputs of the radio frequency generation modules in respective first and second states, and from the first state to the second state based on the first and second desired amplitudes A power control module for outputting input power setpoints corresponding to the transition of the input power;
A frequency control module receiving the input power set points and outputting frequency set points corresponding to the input power set points; And
And an indication of when the input power setpoints, the frequency setpoints, and when transitioning from the first state to the second state, and wherein the input power setpoints, the frequency setpoints, And a pulse shaping module for transitioning the output signal from the first state to the second state on a basis of the output signal.
The method according to claim 1,
Wherein the input power setpoints comprise a first power setpoint corresponding to the first state, a second power setpoint corresponding to the second state, and a second power setpoint corresponding to the transition between the first power setpoint and the second power setpoint, The step size, the number of steps, the step time, and the ramp time,
Wherein the frequency set points comprise a first frequency set point corresponding to the first state, a second frequency set point corresponding to the second state, and a second frequency set point corresponding to the first state, A step size, a number of steps, a step time, and a ramp time.
2. The radio frequency generation module of claim 1, wherein the input power setpoints are at least one of: i) predetermined and stored in the radio frequency generation module; and ii) received as inputs from a user interface.
The method according to claim 1,
Further comprising a pulse state control module for outputting said first and second desired amplitudes and said indication based on at least one of a desired pulse frequency and a desired duty cycle.
5. The method of claim 4,
Wherein the pulse state control module further outputs a desired pulse shape to at least one of the power control module and the pulse shaping module.
The radio frequency generation module of claim 1, wherein at least one of the input power setpoints and the frequency setpoints is also based on a desired pulse shape of the output of the radio frequency generation module.
7. The radio frequency generation module of claim 6, wherein the desired pulse shape comprises at least one of exponential pulse edges, linear pulse edges, and curved edges.
7. The radio frequency generation module of claim 6, wherein the desired pulse shape does not change the desired pulse width of the output of the radio frequency generation module.
The method of claim 1, wherein the pulse shaping module comprises:
A frequency state control module for outputting a frequency control signal based on the frequency set points;
A power state control module for outputting a power control signal based on the input power set points; And
And an output module for outputting an output of the radio frequency generation module having pulses shaped according to the frequency control signal and the power control signal.
Receiving first and second desired amplitudes of the output of the radio frequency generation module in respective first and second states;
Outputting input power set points corresponding to a transition from the first state to the second state based on the first and second desired amplitudes;
Outputting the frequency set points corresponding to the input power set points;
Receiving an indication of the input power setpoints, the frequency setpoints, and when transitioning from the first state to the second state; And
And transitioning the output signal from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication. .
11. The method of claim 10,
Wherein the input power setpoints comprise a first power setpoint corresponding to the first state, a second power setpoint corresponding to the second state, and a second power setpoint corresponding to the transition between the first power setpoint and the second power setpoint, The step size, the number of steps, the step time, and the ramp time,
Wherein the frequency set points comprise a first frequency set point corresponding to the first state, a second frequency set point corresponding to the second state, and a second frequency set point corresponding to the first state, A step size, a number of steps, a step time, and a ramp time.
11. The method of claim 10 wherein the input power setpoints are at least one of: i) predetermined and stored in the radio frequency generation module, and ii) received as inputs from a user interface. .
11. The method of claim 10,
Further comprising outputting the first and second desired amplitudes and the indication based on at least one of a desired pulse frequency and a desired duty cycle. ≪ Desc / Clms Page number 20 >
14. The method of claim 13,
And outputting a desired pulse shape. ≪ Desc / Clms Page number 13 >
11. The method of claim 10 wherein at least one of the input power setpoints and the frequency setpoints is also based on a desired pulse shape of an output of the radio frequency generation module. Way.
16. The method of claim 15, wherein the desired pulse shape comprises at least one of exponential pulse edges, linear pulse edges, and curved edges.
16. The method of claim 15, wherein the desired pulse shape does not change the desired pulse width of the output of the radio frequency generation module.
11. The method of claim 10,
Outputting a frequency control signal based on the frequency set points;
Outputting a power control signal based on the input power set points; And
And outputting an output of the radio frequency generation module having pulses shaped according to the frequency control signal and the power control signal.

Images