TWI574296B - A power output generation system and method that adapts to periodic waveform - Google Patents

Description

Power output generation system and method suitable for periodic waveforms

The present disclosure relates to plasma chamber and radio frequency generation systems and methods, and more particularly to radio frequency generators.

The background description provided herein is for the purpose of the general purpose of the disclosure. The work of the inventors described in the Background section, and the description of the prior art, which is not to be considered as a prior art, is not explicitly or implicitly recognized as a prior art against the present disclosure.

A radio frequency (RF) generator receives alternating current (AC) input power and produces an RF output. For example, the RF output is applied to the plasma electrode of the plasma chamber. Plasma chambers are used in thin film manufacturing systems and other types of systems.

In some cases, the plasma chamber contains a plurality of plasma electrodes. By way of example only, more than one plasma electrode is implemented at a location where the surface area being treated is larger than the area that a single plasma electrode can serve.

Therefore, in some cases multiple RF generators are employed. Each RF generator produces an RF output and applies the RF output to one of the plasma electrodes. The RF generators are electrically connected in an attempt to produce the same RF output.

In one feature, a power output generation system is disclosed. The repeating set value generator module selectively changes the set value of the output parameter in accordance with a predetermined pattern repeated during the continuous time interval. During the first time interval of the time interval, based on (i) N set points of N time points during the first time interval of the time interval and (ii) N time points during the first time interval of the time interval N differences between the N measured values of the output parameters, and the closed loop module respectively generates N closed loop values. Output parameters of N set points of N time points of the second time interval of the (i) time interval and (N) N time points of the second time interval of the time interval during the first time interval of the time interval The N differences between the N measured values, the adjustment module respectively generates N adjustment values. The second time interval of the time interval is the time interval directly before the first time interval of the time interval. The power amplifier applies output power to the load. The mixer module generates N output values based on the N closed-loop values and the N adjusted values, respectively, and controls the power input to the power amplifier based on the N output values.

In further features, the N time points are equidistant.

In further features, the N time points are non-equidistant.

In a further feature, the closed loop module uses a proportional-integral (PI) control to generate N closed loop values.

In a further feature, the adjustment module uses a proportional-integral (PI) control to generate N adjustment values.

In a further feature, the mixer module produces N output values based further on the blend ratio, and wherein the mixer module selectively changes the blend ratio.

In a further feature, the frequency control module selectively adjusts the fundamental frequency of the power amplifier.

In a further feature, the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on the reflected power.

In a further feature, the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on the reflection coefficient.

In a further feature, the power amplifier applies an output to the plasma electrode.

In a further feature, the driver control module determines the distortion of the output and selectively adjusts the fundamental frequency of the power amplifier based on the distortion.

In a further feature, the driver control module determines the first frequency adjustment based on the at least one previous distortion amount of the distortion and the output, determines the second frequency adjustment based on the at least one previous distortion amount of the output, and based on the previous frequency of the power amplifier, the first The frequency adjustment and the second frequency adjustment set the fundamental frequency of the power amplifier.

In a further feature, the driver control module determines the second frequency adjustment based on the at least one previous value of the second frequency adjustment.

In one feature, a method of generating a power output is disclosed. The method includes: selectively changing a set value of the output parameter in accordance with a predetermined pattern repeated during the continuous time interval; during the first time interval of the time interval, based on N during the first time interval of the (i) time interval N sets of values between the N set values at the time point and (N) N measured values of the output parameters of the N time points during the first time interval of the time interval, respectively generating N closed-loop values; During the first time interval, based on the output parameters of the N time points of the N time points during the second time interval of the (i) time interval and (ii) the N time points during the second time interval of the time interval N difference values between N measured values respectively generate N adjustment values, wherein the second time interval of the time interval is a time interval directly before the first time interval of the time interval; using a power amplifier, applying output power To the load; generating N output values based on the N closed-loop values and the N adjusted values; and controlling the power input to the power amplifier based on the N output values.

In further features, the N time points are equidistant.

In further features, the N time points are non-equidistant.

In a further feature, generating N closed-loop values comprises generating N closed-loop values using proportional-integral control

In a further feature, generating the N adjustment values comprises generating N adjustment values using a proportional-integral control.

In a further feature, the method further comprises: generating N output values based further on the blend ratio; and selectively changing the blend ratio.

In a further feature, the method further comprises selectively adjusting a fundamental frequency of the power amplifier.

In a further feature, the method further comprises selectively adjusting a fundamental frequency of the power amplifier based on the reflected power.

In a further feature, the method further comprises selectively adjusting a fundamental frequency of the power amplifier based on the reflection coefficient.

In a further feature, the method further comprises applying a output to the plasma electrode using a power amplifier.

In a further feature, the method further comprises: determining the distortion of the output; and selectively adjusting the fundamental frequency of the power amplifier based on the distortion.

In a further feature, the method further comprises: determining a first frequency adjustment based on at least one previous distortion amount of the distortion and the output; determining a second frequency adjustment based on the at least one previous distortion amount of the output; and based on a previous fundamental frequency of the power amplifier, A frequency adjustment and a second frequency adjustment set the fundamental frequency of the power amplifier.

In a further feature, the method further comprises determining the second frequency adjustment based on the at least one previous value of the second frequency adjustment.

Further areas of applicability of the present invention will be apparent from the following detailed description, claims and claims. The detailed description and specific examples are intended for purposes of illustration

In the drawings, reference numerals are used to identify similar and/or identical elements.

Referring now to Figure 1, a functional block diagram of a representative radio frequency (RF) plasma chamber control system is shown. The RF generator module 104 receives AC input power and uses the AC input power to generate an RF output. The RF output is applied to the plasma electrode 108 of the plasma chamber 112. In other types of systems, the RF output is used in different ways. For example, plasma electrode 108 can be used in thin film deposition, thin film etching, and other types of systems.

The output control module 116 receives the power setpoint (P Set) for the RF output generated by the RF generator module 104 and the RF output to be delivered to the plasma electrode 108. For example, the power setting is provided via the external interface 120 or another suitable source. For example, via a universal standard (US) RS-232 connection, via an Ethernet connection, via a fieldbus connection (eg, Profibus, DeviceNet, Ethercat), via a wireless connection, or via a front The panel interface provides a power setpoint to the output control module 116 based on the provided diagnostic or user input. The setpoint can also be a voltage or current setpoint depending on the plasma demand.

The RF sensor 124 measures one or more parameters of the RF output and generates one or more sensor signals based on the measured parameters. For example, the RF sensor 124 includes a voltage-current (VI) sensor, an RF probe, a directional coupler, a gamma sensor, and a phase-amplitude sensor. Or other suitable type of RF sensor.

The measurement control module 128 samples the sensor signals in accordance with a predetermined sampling frequency. In various embodiments, measurement control module 128 converts (analog) samples to corresponding digital values. Measurement control module 128 also applies one or more signal processing functions to the digital values to produce processed values. The output control module 116 controls the RF generator module 104 to achieve a power set point. In various embodiments, a matching network module 132 that provides a match is included. Although the RF sensor 124 is located upstream of the matching network module 132, in various embodiments, the RF sensor 124 can also be located between the matching network module 132 and the load.

Referring now to Figure 2, there is shown a functional block diagram of a representative portion of a radio frequency plasma chamber control system. The output control module 116 generates a rail voltage set value (Rail Set) and a driver control set value (Driver Set) according to the power set value. Based on the rail voltage setting, the power module 304 generates rail voltage from the AC input power. The power module 304 applies a rail voltage to the RF power module 308. For example, the RF power module 308 includes a driver module and a power amplifier. In various implementations, the output control module 116 generates a plurality of phase shifted driver signals for outphasing the amplifier topology.

Based on the driver control settings, the driver control module 312 drives the RF power module 308. The driver control setpoint represents the target duty cycle (ie, the percentage of ON time for each predetermined cycle). Filter 316 is implemented to filter the harmonic output of RF power module 308 (eg, a power amplifier) before the RF output is applied to plasma electrode 108. The output of one or more actuators of the RF system (eg, power module 304, driver control module 312) is adjusted based on one or more parameters of the RF output measured by RF sensor 124.

Referring now to Figure 3, there is shown a functional block diagram of a representative feedback control system for an actuator (e.g., plasma electrode 108). For example, the feedback actuator control system of Figure 3 can be used to generate a pulsed RF signal output, an envelope for controlling or driving a signal, or another suitable RF output. Pulsed RF signal output refers to an output having a repeating pattern that includes, but is not limited to, an equally defined or arbitrarily shaped pattern.

In a digital control system, also known as a discrete time control system, the closed loop bandwidth of the controller required to produce a suitable pulsed RF envelope output needs to be at least two orders of magnitude larger than the period between the (same portions) of the loop. . Additionally, the group delay of the sensor and actuator needs to approximate the controller sampling time. Therefore, suitable control systems are complex and expensive.

In FIG. 3, the control module 350 includes an error module 354, a proportional (P) module 358, an integral (I) module 362, a summer module 366, and a clamp module ( Clamping module) 370. The error module 354 determines the error based on the difference between the set value of the parameter (eg, the power set value) and the measured value of the parameter.

Based on the proportional gain and error values, the scaling module 358 determines the value of the P term. Based on the error and integral gain, the integration module 362 determines the value of the I term. The addition module 366 adds up the P term value to the I term value to determine the output. The clamp module 370 limits the output to within a predetermined range. Actuators based on output control (eg, power module, driver amplitude, inverting drive, etc.). However, as mentioned above, the control system comprising this control module is complex and expensive.

Another way of controlling output based on setpoints is described in commonly assigned U.S. Patent No. 6,700,092 ("Vona"), the entire disclosure of which is incorporated herein. In Vona, "holdoff time" or delay period is used to jump from one pulse state to another in a discontinuous manner. The controller is frozen during the off time to allow the pulse amplitude to settle to the new value before transitioning to the closed loop operation. In this configuration, a slower control loop bandwidth than that described above in connection with FIG. 3 can be used. However, the use of turn-off time affects overshoot, rise time, and other responses.

For example, increasing the output in the open loop to a numerical value during the turn-off time will improve Vona's response. Such a configuration is described in commonly assigned U.S. Patent No. 8,736,377 ("Rughoonundon"), the entire disclosure of which is incorporated herein. The boost can be done for multiple outputs/actuators such as amplitude, frequency, and the like. Rughoonundon provides a better response to rectangular pulses.

4 is a functional block diagram of a representative RF control system including a RF generator module 404, a RF power amplifier 408, and one or more sensors 412. The RF generator module 404 controls the RF power amplifier 408 to regulate the RF output from the RF power amplifier 408 to, for example, a plasma electrode or another RF device. The RF power amplifier 408 is part of the RF power module 308 of FIG.

The repeating set value generator module 416 generates a forward power (PFwd) set value in accordance with a repeating pattern within a cycle or cycle. The frequency control module 420 controls the basic RF frequency of the driver control module 312. For example, frequency control module 420 changes the frequency to improve complex impedance matching and thereby reduce reflected power and reflection coefficients. The envelope defines one or two (upper and lower) boundaries of the output signal in the loop/cycle.

For example, the repeating pattern is stored in the memory. Figure 5 contains repeating patterns for three examples, but other patterns can also be used. In various embodiments, the pattern used may be a non-standard, periodic pattern. For example, standard periodic patterns include sine waves, cosine waves, periodic pulses, triangular waves, and the like. The frequency corresponding to the time period within the repeating pattern is completed once. The repeat setpoint generator module 416 changes the forward power setpoint in accordance with one cycle of the pattern within each time period/cycle. Although an example of forward power setpoints and forward power measurements will be discussed, this application can be applied to other RF setpoints and corresponding measured values.

At a given time, based on the forward power amplitude setpoint (sample) of this time and the forward power amplitude (sample) measured by the time sensor 412, the closed loop control module 424 produces a closed loop output. More specifically, the closed loop control module 424 produces a closed loop output that adjusts the forward power amplitude in the direction of the forward power amplitude setpoint. Figure 6 shows a functional block diagram of an example of a closed loop control module 424. As noted above, although examples of forward power amplitude settings and forward power amplitude measurements will be discussed, the application can be applied to other RF settings and corresponding measurements, such as voltage and/or current amplitude.

Referring now to FIG. 6, the closed loop control module 424 includes an error module 504, a proportional (P) module 508, an integral (I) module 512, and an add module 516. Based on the difference between the forward power setpoint at a certain time and the forward power measured by the sensor 412 at this time, the error module 504 determines the forward power error.

Based on the predetermined proportional gain and forward power error, the scaling module 508 determines the proportional term (value). Based on the predetermined integral gain and forward power error, the integration module 512 determines the integral term (value). The integration module 512 defines (eg, clamps) the integral term within a predetermined range. Addition module 516 adds the P term to the I term to produce a closed loop output. The figure shows and discusses an example of a PI closed-loop controller. It is also possible to use a P (proportional) closed-loop controller, a proportional-integral-derivative (PID) closed-loop controller, or another suitable type of closed-loop controller. .

Referring to FIG. 4 , the RF generator module 404 further includes a trigger module 428 , a set value storage module 432 , and a measurement storage module 436 . During each cycle, the trigger module 428 generates a trigger signal N times. N is an integer greater than one. In one example, trigger module 428 generates a trigger signal 86 times during each cycle.

The trigger module 428 generates a trigger signal in a predetermined (time) interval, or the interval between the times at which the trigger signal is generated may vary. In the case of different intervals between the trigger signals, for example, the trigger module 428 generates the trigger signals more frequently when and in the vicinity of the forward power setpoint (and thus the repeating pattern). When the current power setting is more stable, the trigger module 428 generates the trigger signal infrequently. The trigger module 428 generates trigger signals at N time points during each cycle, and generates trigger signals at the same N time points during each cycle associated with the respective start and end of the cycle. The closed loop control module 424 also updates the closed loop output each time a trigger signal is generated.

Each time a trigger signal is generated, the set value storage module 432 stores the current value of the forward power set value. When the loop is completed, the setpoint storage module 432 has already stored N values of the forward power setpoint at the N time points within the loop. Each time a trigger signal is generated, the measurement storage module 436 stores the current value of the forward power. When the loop is completed, the measurement storage module 436 thus stores the N values of the forward power at the N time points in this period.

Each time one of the N time points generates the trigger signal, during the last cycle, the set value storage module 432 and the measurement storage module 436 respectively output the forward power set values stored for one of the N time points. With forward power. The forward power setpoint at that point in time during the last cycle will be referred to as the previous forward power setpoint. The forward power measured at that point in time during the last cycle will be referred to as the previous forward power. In various embodiments, the previous forward power may be a composite value determined based on a plurality of previous cycles. This composite value can be determined in a variety of ways, such as using an Infinite Impulse Response (IIR) filter. The use of this composite value reduces the effects of noise and plasma transients.

During the final cycle, at a given time, based on the previous forward power setting of this time and the previous forward power measured by this time sensor 412, the adjustment module 440 produces an output adjustment. FIG. 7 is a functional block diagram showing an example of the adjustment module 440.

Referring now to FIG. 7, the adjustment module 440 includes an error module 604, a proportional (P) module 608, an integral (I) module 612, and an addition module 616. Based on the difference between the previous forward power setpoint at a certain time and the previous forward power at this time, the error module 604 determines the previous error.

Based on the predetermined proportional gain and the previous error, the scaling module 608 determines the proportional term (value). Based on the predetermined integral gain and the previous error, the integration module 612 determines the integral term (value). The integration module 612 defines (ie, clamps) the integral term within a predetermined range. Addition module 616 adds the P term to the I term to produce an output adjustment. Therefore, during the previous cycle, the output adjustment at a certain time reflects the closed-loop output of this time.

Although an example of a PI closed loop controller is shown and discussed in the figures, a P (proportional) closed loop controller, a proportional-integral-derivative (PID) closed loop controller, or another suitable type of closed loop controller may be used. In addition, although the figure shows and discusses the previous forward power set value, the previous forward power set value and the previous forward power are stored, and the error value (determined by the error module 504) determined for N time points during a certain cycle. They are stored and used separately for those N time points during the next cycle.

Referring again to Figure 4, the mixer module 444 mixes the closed loop output with the output adjustment to produce the final RF output. For example, the mixer module 444 mixes closed loop output and output adjustments based on the mixing ratio. The mixing ratio can be a predetermined value or can vary. For example, the mixer module 444 changes the blending ratio according to a desired behavior, such as load transient sensitivity or other rules, or is set by another (eg, high level) controller. The mixing ratio corresponds to the gain applied to the closed loop output and output adjustment such that the gain values are applied and added to cause the final RF output.

The clamp module 448 limits (ie, clamps) the final RF output to within a predetermined range. An actuator of the RF generator, such as power amplifier/driver 408, is operated based on the final RF output to produce a radio frequency output. The driver control module 312 controls the basic operating frequency of the power amplifier/driver 408. The basic operating frequency is also referred to as the carrier frequency. For example, the RF output is applied to the plasma electrode 108 or another RF device.

The use of the adjustment module 440 improves the response characteristics. For example, the adjustment module 440 enables the forward power to more closely follow the forward power setting, as soon as possible (eg, fewer cycles), and, for example, utilize less than and/or lower than the system implementing FIG. RF generator module. Although an example of RF envelope output and setpoint has been shown and discussed in the figure, this application can also be applied to other non-RF outputs such as DC output (involving repeated DC setpoints) and AC output (involving repeated AC setpoints). This approach is increasingly effective in systems that include one or more component modules with non-linear transfer characteristics. In such systems, conventional linear control techniques are difficult to use when one or more subsystems exhibit gain expansion, gain compression, or clipping, for example, with the appearance of a radio frequency power amplifier. The plasma load also exhibits non-linear behavior, such as load impedance that varies with applied power.

Figure 8 contains a representative graph of the set value and the measured value versus time for the first cycle in accordance with the repeated, predetermined shape setpoint. During the first cycle, no set or measured values from one or more previous cycles are stored. Therefore, based on the difference between the set value and the measured value during this cycle, only the closed loop feedback control output is used. The difference between the measured and desired waveforms can be attributed to the non-linear characteristics that occur in the power amplifier subsystem. However, after the first cycle, the previous setpoints and measured values are also used to control the output, so the measured values track the setpoints more closely (for example, see Figure 9, Cycles 1, 2, 10, and 100).

Figures 9-13 are representative figures showing such features and including set values having various different repeating shapes. As shown in Figures 9-13, the measured values track the set values more closely during subsequent cycles. As can be seen from Figures 9-13, the control system described herein can be used to generate sinusoidal, square or any shape waveforms. The resulting waveform can define a primary signal, or the resulting waveform defines an envelope signal in which the drive signal operates within the envelope signal. The drive signal and envelope signal are continuous wave or pulse signal.

Figure 14 is a flow chart depicting a representative method of controlling output. Control begins at 704 and the counter value (I) is set to one. At 708, for example, after selecting a different repeating pattern or after the unit is turned on, it is determined whether the current loop is the first loop. If 708 is true, control continues to 712. If 708 is false, control is transferred to 730, which is discussed further below.

At 712, the trigger signal is monitored and a trigger cycle has been determined. Control continuation 716 when a trigger signal is generated. Control does not remain at 712 when no trigger signal is generated. At 716, the setpoint storage module 432 stores the first setpoint (eg, the forward power setpoint), and the measurement storage module 436 stores the first measured value (eg, the measured forward power). At 720, based on the difference between the first set value and the first measured value, the closed loop control module 424 determines the closed loop output. At 722, the mixer module 444 sets the same output as the closed loop output. An actuator such as a power amplifier/driver 408 is controlled based on this output.

At 724, it is determined if the counter value (I) is less than a predetermined number (N). The predetermined number corresponds to the number of instances in which the trigger signal is generated during each cycle. If 724 is true, the counter value (I) is incremented at 728 (e.g., I = I + 1), and control returns to 712. If 724 is false, control returns to 704 to reset the counter value (I) to one.

At 730, after the first cycle is completed, the trigger signal is monitored and a trigger signal is generated. When a trigger signal is generated, control continues with 732. Control does not remain at 730 when no trigger signal is generated. At 732, the setpoint storage module 432 stores the first setpoint (eg, the forward power setpoint), and the measurement storage module 436 stores the first measured value (eg, the measured forward power). At 736, based on the difference between the first set value and the first measured value, the closed loop control module 424 determines the closed loop output.

At 740, the adjustment module 440 obtains the first set value from the last cycle and the first measurement from the last cycle. Based on the difference between the first set value obtained from the last loop and the first measured value obtained from the last loop, the adjustment module 440 produces an output adjustment at 744. At 748, the mixer module 444 mixes (determined at 736) the closed loop output with the (744 determined) output adjustment to produce an output. As described above, an actuator such as power amplifier/driver 408 is controlled based on this output.

At 752, it is determined if the counter value (I) is less than a predetermined number (N). The predetermined number corresponds to the number of instances in which the trigger signal is generated during each cycle. If 752 is true, the counter value (I) is incremented at 756 (eg, I=I+1), and control returns to 730. If 752 is false, control returns to 704 to reset the counter value (I) to one.

Figure 15 is a functional block diagram of the RF generation system. In addition to the control provided by the RF generator module 404, based on one or more parameters measured by the sensor 412, the driver control module 312 also controls the basic RF operating frequency of the power amplifier/driver 408. For example, the frequency can be adjusted to improve the impedance matching of the RF power module 308 to the plasma load.

Figure 16 is a functional block diagram of a representative embodiment of the driver control module 312. Based on one or more parameters measured by sensor 412, distortion module 804 determines the amount of distortion of the RF output. The amount of distortion corresponds to the amount of reflected power and is represented, for example, by a reflection coefficient or reverse power.

The first frequency adjustment module 808 and the second frequency adjustment module 812 generate first and second frequency adjustments in an attempt to minimize distortion, thereby minimizing reflected power. The first frequency adjustment module 808 generates a first frequency adjustment based on the current amount of distortion, one or more previous distortion amounts of the previous time point, and one or more predetermined gain values, respectively. Examples of first frequency adjustments are described in commonly assigned U.S. Patent Nos. 8,576,013 and 6,020,794, both of which are incorporated herein in their entirety. The second frequency adjustment module 812 generates a second frequency adjustment based on one or more previous distortion amounts, one or more previous values, and one or more predetermined gain values, respectively, at respective previous time points.

Based on the previous basic operating frequency of the power amplifier/driver 408, the first frequency adjustment, and the second frequency adjustment, the mixer module 816 determines the basic RF operating frequency of the power amplifier/driver 408. For example, the mixer module 816 sets the basic RF operating frequency of the power amplifier/driver 408 to the previous basic operating frequency minus the first and second frequency adjustments. The delay module 820 provides the previous base operating frequency after the previous base operating frequency has been stored for a predetermined period (eg, one sampling period). Prior to subtraction in various embodiments, the mixer module 816 selectively changes the gain values applied to the first and second frequency adjustments.

The above description is merely illustrative and is not intended to limit the disclosure, its application, or use. The broad teachings of the disclosure can be implemented in a variety of forms. Therefore, the present invention is intended to be limited, and the scope of the disclosure is not limited by the scope of the invention. At least one of the phrases A, B, and C used herein should be interpreted to mean the use of non-exclusive logical OR (A OR B OR C), and should not be interpreted to mean "A at least one, B. At least one of them and C is at least one. It should be understood that one or more steps of a method may be performed in a different order (or concurrently) without changing the principles of the disclosure.

In this application, including the following definitions, the term "module" or the term "controller" may be replaced by the term "circuitry". The term "module" includes: application-specific integrated circuit (ASIC); digital, analog or mixed analog/digital discrete circuits; digital, analog or mixed analog/digital integrated circuits; combinatorial logic; field programmable gate array (FPGA) a processor circuit (shared, exclusive or aggregate) that executes code; a memory circuit (shared, exclusive or aggregate) that stores code executed by the processor circuit; other suitable hardware components that provide the functionality; or The above or a combination of the whole, such as a system-on-chip or a part thereof.

The module includes one or more interface circuits. In some examples, the interface circuit includes a wired or wireless interface, a local area network (LAN), an internet, a wide area network (WAN), or a combination thereof. The functionality of any of the established modules of the present disclosure is distributed among a plurality of modules connected by interface circuits. For example, multiple modules allow for load balancing. In another example, a server (also known as a remote or cloud) module performs some functionality on behalf of a client module.

The term code used above includes hardware, firmware, and/or microcode, as well as programs, routines, functions, categories, data structures, and/or objects. The term shared processor circuit includes a single processor circuit that executes some or all of the code of the multi-module. The term group processor circuit includes processor circuitry that combines some or all of the code of one or more modules with additional processor circuitry. References to multiple processing circuits include multiple processor circuits on a discrete mode, multiple processor circuits on a single mode, multiple cores of a single processor circuit, multiple threads of a single processor circuit, or a combination of the above. The term shared memory circuit includes a single memory circuit that stores some or all of the code for multiple modules. The term group memory circuit includes a memory circuit that combines some or all of the code of one or more modules with additional memory.

The term memory circuit is a subset of the term computer readable medium. The term computer readable medium as used herein does not include a transitional electrical or electromagnetic signal that is transmitted through a medium (such as on a carrier); therefore, the term computer readable medium is considered tangible and non-transitional. Non-limiting examples of non-transitional, tangible computer readable media are non-volatile memory circuits (such as flash memory circuits, rewritable stylized read-only memory circuits, or mask read-only memory circuits), Volatile memory circuits (such as SRAM circuits or DRAM circuits), magnetic memory media (such as analog or digital tape or hard disk drives), and optical storage media (such as optical discs, digital video) Disc or Blu-ray Disc).

The apparatus and method described herein can be implemented by configuring a general purpose computer to perform one or more specific functions embodied in a computer program by establishing a specific purpose computer. The functional block diagrams and flowchart elements described above are used as software specifications and can be translated into computer programs by the skilled technician or programmer's daily work.

The computer program includes processor-executable instructions stored on at least one non-transitory, tangible computer readable medium. The computer program also contains or relies on stored data. The computer program includes a basic input/output system (BIOS) that interacts with a specific purpose computer, a device driver that interacts with a particular device of a particular purpose computer, one or more operating systems, a user application, a background service, a background application, and the like.

The computer program contains: (i) descriptive text to be parsed, such as hypertext markup language (HTML) or extensible markup language (XML), (ii) combination code, (iii) by The object code generated by the source code of the compiler, (v) the source code for compiling and executing the compiler in time. For example only, source code can be written in language using syntax, including C, C++, C#, Objective C, Haskell, Go, SQL, R, Lisp, Java®, Fortran, Perl, Pascal, Curl, OCaml, Javascript® , HTML5, Ada, active server pages (ASP), PHP, Scala, Eiffel, Smalltalk, Erlang, Ruby, Flash®, Visual Basic®, Lua, and Python®.

Unless a component is clearly expressed as using the phrase "means" or in the case of the use of the phrase "job mode" or "step mode", the components described in the patent application are not intended to be US The meaning of the means in the Article 112 of the Patent Law (35 USC § 112 (f)) plus functional components.

104‧‧‧RF generator module
108‧‧‧ Plasma Electrode
116‧‧‧Output control module
120‧‧‧ external interface
124‧‧‧RF Sensor
128‧‧‧Measurement Control Module
132‧‧‧match network module
304‧‧‧Power Module
308‧‧‧RF power module
312‧‧‧Drive Control Module
316‧‧‧ filter
350‧‧‧Control Module
354‧‧‧Error Module
358‧‧‧proportional module
362‧‧‧Integral Module
366‧‧‧Addition module
370‧‧‧Clamping module
404‧‧‧RF Generator Module
408‧‧‧RF power amplifier
412‧‧‧ sensor
416‧‧‧Repeated set value generator module
420‧‧‧frequency control module
424‧‧‧Closed loop control module
428‧‧‧Trigger module
432‧‧‧Set value storage module
436‧‧‧Measurement storage module
440‧‧‧Adjustment module
444‧‧‧Mixer module
448‧‧‧Clamping module
504‧‧‧Error Module
508‧‧‧proportional module
512‧‧‧Integral Module
516‧‧‧Addition Module
604‧‧‧ error module
608‧‧‧proportional module
612‧‧‧Integral Module
616‧‧‧Addition module
804‧‧‧Distortion module
808‧‧‧First frequency adjustment module
812‧‧‧Second frequency adjustment module
816‧‧‧ Mixer Module
820‧‧‧Delay module

Figure 1 is a functional block diagram of a representative RF plasma chamber control system. Figure 2 is a functional block diagram of a representative portion of the RF plasma chamber control system. Figure 3 is a functional block diagram of a representative feedback control system. Figure 4 is a functional block diagram of a representative RF generator system. Figure 5 contains a graph of representative patterns that can be repeated within a cycle/cycle. Figure 6 contains a functional block diagram of a representative closed-loop control module of the RF generator system. Figure 7 contains a functional block diagram of a representative adjustment module. Figures 8 through 13 contain graphs of setpoints and measured values versus time. Figure 14 contains a flow chart depicting a representative control method for RF output. Figure 15 is a functional block diagram of a representative RF generator system. Figure 16 is a functional block diagram of a representative driver control module.

104‧‧‧RF generator module

108‧‧‧ Plasma Electrode

116‧‧‧Output control module

120‧‧‧ external interface

124‧‧‧RF Sensor

128‧‧‧Measurement Control Module

132‧‧‧match network module

Claims (56)

A power output generating system comprising: a repeating set value generator module for selectively changing a set value of an output parameter according to a predetermined pattern repeated during a continuous time interval; a closed loop module at the time intervals During a first time interval, based on (i) N set values of N time points during the first time interval of the time intervals and (ii) the first time interval of the time intervals N differences between the N measured values of the output parameters at the N time points, respectively, generating N closed-loop values; an adjustment module, based on (i) during the first time interval of the time intervals N sets of N time points of a second time interval of the time intervals and (ii) N measurements of the output parameters of the N time points of the second time interval of the time intervals The N difference values between the values respectively generate N adjustment values, wherein the second time interval of the time intervals is a time interval directly before the first time interval of the time intervals; a power amplifier, Apply an output to a negative ; And a mixer module, based on the plurality of N loop values and the plurality of N adjustment values, respectively, to generate N output values, based on the plurality of N output values, to control the power input of the power amplifier. The power output generating system of claim 1, wherein the N time points are equidistant. The power output generating system of claim 1, wherein the N time points are non-equidistant. The power output generating system of claim 1, wherein the closed loop module generates the N closed loop values using proportional-integral (PI) control. The power output generation system of claim 1, wherein the adjustment module generates the N adjustment values using proportional-integral (PI) control. The power output generating system of claim 1, wherein the mixer module generates the N output values based on a mixing ratio, and wherein the mixer module selectively changes the mixing ratio. The power output generating system of claim 1, further comprising a frequency control module for selectively adjusting a fundamental frequency of the power amplifier. The power output generating system of claim 7, wherein the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on a reflected power. The power output generating system of claim 7, wherein the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on a reflection coefficient. A power output generating system as claimed in claim 1, wherein the power amplifier applies the output to a plasma electrode. The power output generating system of claim 1, further comprising a driver control module, determining that one of the outputs is distorted, and selectively adjusting a frequency of the power amplifier based on the distortion. The power output generating system of claim 11, wherein the driver control module determines a first frequency adjustment based on the distortion and the at least one previous distortion amount of the output, and determines at least one previous distortion amount based on a radio frequency output. Two frequency adjustments, and setting the frequency of the power amplifier based on a previous frequency of the power amplifier, the first frequency adjustment, and the second frequency adjustment. The power output generation system of claim 12, wherein the driver control module determines the second frequency adjustment based on the at least one previous value of the second frequency adjustment. A method for generating output power, comprising: selectively changing a set value of an output parameter according to a predetermined pattern repeated during a continuous time interval; during a first time interval of the time intervals, based on (i) N set values of N time points during the first time interval of the time intervals and (ii) N of the output parameters of the N time points during the first time interval of the time intervals N difference values between the measured values, respectively generating N closed loop values; during the first time interval of the time intervals, based on (i) the N time periods during a second time interval of the time intervals N sets of values at the time point and (ii) N differences between the N measured values of the output parameters of the N time points during the second time interval of the time intervals, respectively, N Adjusting the value, wherein the second time interval of the time intervals is a time interval directly before the first time interval of the time intervals; using a power amplifier, applying output power to a load; based on the N Closed loop value and the N adjustment values, respectively, to generate N output values; and based on the plurality of N output values, to control the power input of the power amplifier. The method for generating output power according to claim 14, wherein the N time points are equidistant. The method for generating output power according to claim 14, wherein the N time points are non-equidistant. The method of generating output power as recited in claim 14 wherein generating the N closed-loop values comprises generating the N closed-loop values using proportional-integral (PI) control. The method for generating output power as recited in claim 14 wherein generating the N adjustment values comprises generating the N adjustment values using a proportional-integral (PI) control. The method for generating output power according to claim 14, further comprising: generating the N output values based on a mixing ratio; and selectively changing the mixing ratio. The method for generating output power as recited in claim 14, further comprising selectively adjusting a fundamental frequency of the power amplifier. The method for generating output power as claimed in claim 20, further comprising selectively adjusting the fundamental frequency of the power amplifier based on a reflected power. The method for generating output power according to claim 20, further comprising selectively adjusting the fundamental frequency of the power amplifier based on a reflection coefficient. The method for generating output power according to claim 14, further comprising applying the output power to a plasma electrode by using the power amplifier. The method for generating output power according to claim 14, further comprising: determining that one of the output powers is distorted; and selectively adjusting one of the fundamental frequencies of the power amplifier based on the distortion. The method for generating output power according to claim 24, further comprising: determining a first frequency adjustment based on the distortion and at least one previous distortion amount of the output power; determining a second based on the at least one previous distortion amount of the output power Frequency adjustment; and setting the fundamental frequency of the power amplifier based on a previous fundamental frequency of the power amplifier, the first frequency adjustment, and the second frequency adjustment. The method for generating output power according to claim 25, further comprising determining the second frequency adjustment based on the at least one previous value of the second frequency adjustment. A power output generation control system for controlling a power amplifier, the power amplifier applying an output power to a load, the power output generation control system comprising: a repeat set value generator module, repeating one during a continuous time interval a predetermined pattern, selectively changing a set value of an output parameter; an adjustment module, based on (i) one of the time intervals, and a second time interval during a first time interval of the time intervals N sets of values at each time point and (ii) N difference values between the N measured values of the output parameters of the N time points during the second time interval of the time intervals, respectively generating N Adjustment values, wherein the second time interval of the time intervals is a time interval directly before the first time interval of the time intervals; and a mixer module based on the N closed-loop values and the N The adjustment values respectively generate N output values, and control the power input to the power amplifier based on the N output values. The power output generation control system of claim 27, further comprising a closed loop module, during a first time interval of the time intervals, based on (i) the first time interval of the time intervals N sets of N time points and (ii) N differences between the N measured values of the output parameters of the N time points during the first time interval of the time intervals, respectively The N closed loop values are generated. The power output generation control system of claim 28, further comprising a power amplifier that applies the output power to the load. The power output generation control system of claim 27, further comprising a power amplifier that applies the output power to the load. The power output generation control system of claim 27, wherein the N time points are equidistant. The power output generation control system of claim 27, wherein the N time points are non-equidistant. The power output generation control system of claim 27, wherein the adjustment module uses at least one of proportional, integral or derivative control to generate the N adjustment values. The power output generation control system of claim 27, wherein the mixer module generates the N output values based on a mixing ratio, and wherein the mixer module selectively changes the mixing ratio. The power output generation control system of claim 27, further comprising a frequency control module for selectively adjusting a fundamental frequency of the power amplifier. The power output generation control system of claim 35, wherein the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on a reflected power. The power output generation control system of claim 35, wherein the frequency control module selectively adjusts the fundamental frequency of the power amplifier based on a reflection coefficient. The power output generation control system of claim 27, wherein the load is a plasma electrode. The power output generation control system of claim 27, further comprising a driver control module that determines that one of the output powers is distorted, and selectively adjusts one of the output power frequencies based on the distortion. The power output generation control system of claim 39, wherein the driver control module determines a first frequency adjustment based on the distortion and at least one previous distortion amount of the output power, based on at least one previous distortion amount determination of a radio frequency output a second frequency adjustment, and setting the output power based on the previous frequency of the output power, the first frequency adjustment, and the second frequency adjustment. The power output generation control system of claim 40, wherein the driver control module determines the second frequency adjustment based on the at least one previous value of the second frequency adjustment. A method for generating output power, comprising: selectively changing a set value of an output parameter according to a predetermined pattern repeated during a continuous time interval; during a first time interval of the time intervals, based on (i) N sets of N time points during a second time interval of the time intervals and (ii) N measurements of the output parameters of the N time points during the second time interval of the time intervals The N difference values between the values respectively generate N adjustment values, wherein the second time intervals of the time intervals are time intervals directly before the first time interval of the time intervals; based on N closed loops And the N adjustment values respectively generate N output values; and control the power input to a power amplifier based on the N output values. The method for generating output power as described in claim 42 further includes, during the first time interval of the time intervals, based on (i) the N time periods of the first time interval of the time intervals N sets of values between the points and (ii) N differences between the N measured values of the output parameters of the N time points during the first time interval of the time intervals, respectively N closed loop values. The method for generating output power according to claim 43, further comprising applying the output power to a load by using a power amplifier. The method for generating output power as recited in claim 42 further includes applying the output power to a load using a power amplifier. The method for generating output power as described in claim 42, wherein the N time points are equidistant. The method for generating output power as described in claim 42, wherein the N time points are non-equidistant. The method of generating output power according to claim 42, wherein the generating the N adjustment values comprises using at least one of a proportional, integral or derivative control. The method for generating output power according to claim 42, further comprising: generating the N output values based on a mixture ratio; and selectively changing the mixture ratio. The method for generating output power as described in claim 42 further includes selectively adjusting one of the fundamental frequencies of the output power. The method for generating output power as recited in claim 50, further comprising selectively adjusting the fundamental frequency of the output power based on a reflected power. The method for generating output power according to claim 50, further comprising selectively adjusting the fundamental frequency of the output power based on a reflection coefficient. The method of generating output power as recited in claim 42 further comprising applying the output power to a plasma electrode using a power amplifier. The method for generating output power according to claim 42, further comprising: determining that one of the output powers is distorted; A fundamental frequency of one of the power amplifiers is selectively adjusted based on the distortion. The method for generating output power according to claim 54, further comprising: determining a first frequency adjustment based on the distortion and at least one previous distortion amount of the output power; determining a second based on the at least one previous distortion amount of the output power Frequency adjustment; and setting the fundamental frequency of the power amplifier based on a previous fundamental frequency of the power amplifier, the first frequency adjustment, and the second frequency adjustment. The method for generating output power as claimed in claim 55, further comprising determining the second frequency adjustment based on the at least one previous value of the second frequency adjustment.