KR101916349B1 - 공명기 어레인지먼트 및 공명기를 여기시키기 위한 방법 - Google Patents

공명기 어레인지먼트 및 공명기를 여기시키기 위한 방법 Download PDF

Info

Publication number
KR101916349B1
KR101916349B1 KR1020147029493A KR20147029493A KR101916349B1 KR 101916349 B1 KR101916349 B1 KR 101916349B1 KR 1020147029493 A KR1020147029493 A KR 1020147029493A KR 20147029493 A KR20147029493 A KR 20147029493A KR 101916349 B1 KR101916349 B1 KR 101916349B1
Authority
KR
South Korea
Prior art keywords
resonator
frequency
excitation
time period
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020147029493A
Other languages
English (en)
Korean (ko)
Other versions
KR20140139028A (ko
Inventor
올리버 하이트
티모시 휴즈
제니퍼 시르틀
Original Assignee
지멘스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 지멘스 악티엔게젤샤프트 filed Critical 지멘스 악티엔게젤샤프트
Publication of KR20140139028A publication Critical patent/KR20140139028A/ko
Application granted granted Critical
Publication of KR101916349B1 publication Critical patent/KR101916349B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/06—Cavity resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B1/00—Details
    • H03B1/02—Structural details of power oscillators, e.g. for heating
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B21/00—Generation of oscillations by combining unmodulated signals of different frequencies
    • H03B21/01—Generation of oscillations by combining unmodulated signals of different frequencies by beating unmodulated signals of different frequencies
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/18—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance
    • H03B5/1817—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising distributed inductance and capacitance the frequency-determining element being a cavity resonator
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H05H7/18—Cavities; Resonators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
    • H05H2007/025—Radiofrequency systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Particle Accelerators (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020147029493A 2012-03-21 2012-03-21 공명기 어레인지먼트 및 공명기를 여기시키기 위한 방법 Expired - Fee Related KR101916349B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2012/054995 WO2013139389A1 (de) 2012-03-21 2012-03-21 Resonatoranordnung und verfahren zum anregen eines resonators

Publications (2)

Publication Number Publication Date
KR20140139028A KR20140139028A (ko) 2014-12-04
KR101916349B1 true KR101916349B1 (ko) 2018-11-07

Family

ID=45976286

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147029493A Expired - Fee Related KR101916349B1 (ko) 2012-03-21 2012-03-21 공명기 어레인지먼트 및 공명기를 여기시키기 위한 방법

Country Status (9)

Country Link
US (1) US9246495B2 (enExample)
EP (1) EP2805376B1 (enExample)
JP (1) JP5989222B2 (enExample)
KR (1) KR101916349B1 (enExample)
CN (1) CN104247145B (enExample)
IN (1) IN2014DN07319A (enExample)
PL (1) PL2805376T3 (enExample)
RU (1) RU2586410C2 (enExample)
WO (1) WO2013139389A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015215331A1 (de) * 2015-08-11 2017-02-16 Continental Teves Ag & Co. Ohg Elektronische Steuerungseinheit
KR20180039069A (ko) 2015-08-11 2018-04-17 콘티넨탈 테베스 아게 운트 코. 오하게 측정 변수를 측정하기 위한 디바이스
DE102016202403A1 (de) 2016-02-17 2017-08-17 Continental Teves Ag & Co. Ohg Sensor
DE102016202402A1 (de) 2016-02-17 2017-08-17 Continental Teves Ag & Co. Ohg Sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110188638A1 (en) 2010-01-29 2011-08-04 Accuray, Inc. Magnetron Powered Linear Accelerator For Interleaved Multi-Energy Operation

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2790905A (en) * 1953-06-09 1957-04-30 Marconi Wireless Telegraph Co Automatic frequency control
US2887580A (en) * 1957-04-26 1959-05-19 Gen Electric Variable output control for linear accelerators
FR2451061A1 (fr) * 1979-03-09 1980-10-03 Ebauches Sa Maser passif
US4314209A (en) * 1980-04-21 1982-02-02 Hughes Aircraft Company Q-Enhanced resonance-stabilized maser
JP2673365B2 (ja) * 1989-02-23 1997-11-05 アンリツ株式会社 空胴共振器の共振周波数制御装置
JP2995131B2 (ja) * 1993-05-28 1999-12-27 アンリツ株式会社 空胴共振器の高安定共振周波数制御装置
FR2895170B1 (fr) * 2005-12-15 2008-03-07 Renault Sas Optimisation de la frequence d'excitation d'un resonateur
US20080068112A1 (en) * 2006-09-14 2008-03-20 Yu David U L Rod-loaded radiofrequency cavities and couplers
CA2676965C (en) * 2007-09-14 2015-08-11 Schlumberger Canada Limited Particle acceleration devices and methods thereof
US8183801B2 (en) 2008-08-12 2012-05-22 Varian Medical Systems, Inc. Interlaced multi-energy radiation sources

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110188638A1 (en) 2010-01-29 2011-08-04 Accuray, Inc. Magnetron Powered Linear Accelerator For Interleaved Multi-Energy Operation

Also Published As

Publication number Publication date
EP2805376B1 (de) 2016-12-14
US20150048893A1 (en) 2015-02-19
RU2586410C2 (ru) 2016-06-10
EP2805376A1 (de) 2014-11-26
JP2015516724A (ja) 2015-06-11
US9246495B2 (en) 2016-01-26
JP5989222B2 (ja) 2016-09-07
KR20140139028A (ko) 2014-12-04
CN104247145B (zh) 2016-10-26
PL2805376T3 (pl) 2017-06-30
IN2014DN07319A (enExample) 2015-04-24
CN104247145A (zh) 2014-12-24
RU2014142269A (ru) 2016-05-20
WO2013139389A1 (de) 2013-09-26

Similar Documents

Publication Publication Date Title
JP6295119B2 (ja) プラズマ処理装置
KR101916349B1 (ko) 공명기 어레인지먼트 및 공명기를 여기시키기 위한 방법
JP4690618B2 (ja) 誘導結合されたプラズマを用いて基板をエッチングするための装置および方法
CN102171442B (zh) 对射频火花塞的激励频率的监控
JP5950715B2 (ja) 電源装置
US20160046489A1 (en) Ozone generator
CN114521283B (zh) 等离子处理装置
KR100818068B1 (ko) 유도 결합 플라즈마를 사용하여 기판을 에칭하기 위한 장치 및 방법
JP5650336B2 (ja) ワイヤレス電力伝送システム及びその制御方法
RU2012101773A (ru) Вч генератор
JP7341349B2 (ja) 圧電プラズマ発生器の動作方法
US10249468B2 (en) High-powered magnetron
CN115399074B (zh) 操作压电等离子体生成器的方法
KR101358173B1 (ko) 고압 방전 램프 동작을 위한 회로 어레인지먼트 및 방법
WO2005036730A1 (ja) マイクロ波発生装置
KR20010066700A (ko) 캐비티형 발진기
GB660191A (en) Improvements in or relating to frequency modulated oscillation generators
US2775702A (en) Reflex klystron oscillator
GB201317252D0 (en) Method for varying oscillation frequency of high-frequency oscillator
UA28893U (en) Method for dielectric materials heating
KR20080061685A (ko) 공동 공진기 및 이를 이용한 공동 공진 방법
KR970060704A (ko) 초음파 발진 제어회로
Bordusov et al. Microwave discharge module for generation plasma with selective operated properties
Bordusov et al. The influence of electrical characteristics of microwave magnetron power source on the process of plasma stripping from silicon plates surface
JP2015216609A (ja) 分周発振方法及び装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20211102

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20211102