KR101896950B1 - Vacuum heat treatment apparatus - Google Patents

Abstract

A vacuum heat treatment apparatus according to an embodiment includes: a chamber; A reaction vessel located in the chamber; A heating member positioned between the chamber and the reaction vessel to heat the reaction vessel; An exhaust pipe for exhausting the interior of the reaction vessel; And a heat insulating member surrounding the outer periphery of the exhaust pipe.

Description

TECHNICAL FIELD [0001] The present invention relates to a vacuum heat treatment apparatus,

The present invention relates to a vacuum heat treatment apparatus.

A vacuum heat treatment apparatus is an apparatus for forming a desired material by placing a raw material in a crucible and heat-treating the substrate, and there is an advantage such that contamination from the surroundings is not generated by performing heat treatment in a vacuum state.

In this vacuum heat treatment apparatus, the heat insulating member is placed in a chamber kept in a vacuum, and the heater is placed in the heat insulating member to heat the raw material. The gas generated during the reaction is discharged by the exhaust pipe.

However, during the discharge of the gas through the exhaust pipe, the secondary phase can be formed by reacting with the constituent material of the exhaust pipe. If the secondary phase reduces the internal area of the exhaust pipe, gas discharge through the exhaust pipe may not be performed smoothly.

Such replacement of the exhaust pipe can increase cost and time. Further, if gas is not smoothly discharged through the exhaust pipe, the gas is discharged through the heat insulating member and the reaction vessel. In this case, the service life of the heat insulating member or the like may be shortened. Furthermore, if a secondary phase is formed on the heat insulating member, a problem such as energization may be generated, which may increase the risk of a safety accident or the like. In addition, the characteristics of the product produced in the vacuum heat treatment apparatus may be deteriorated.

Accordingly, there is a need for a vacuum heat treatment apparatus capable of preventing or controlling the formation of the secondary phase upon gas exhaust through the exhaust pipe.

The embodiments are intended to provide a vacuum heat treatment apparatus capable of improving the lifetime and stability and improving the characteristics of an article to be manufactured.

A vacuum heat treatment apparatus according to an embodiment includes: a chamber; A reaction vessel located in the chamber; A heating member positioned between the chamber and the reaction vessel to heat the reaction vessel; An exhaust pipe for exhausting the interior of the reaction vessel; And a heat insulating member surrounding the outer periphery of the exhaust pipe.

In the vacuum heat treatment apparatus according to the present embodiment, the outer circumferential surface of the exhaust pipe can be surrounded by a heat insulating member capable of preventing the temperature of the exhaust pipe from decreasing. Accordingly, when a gas or the like generated during the reaction is discharged by the exhaust pipe, a secondary phase is generated due to a sudden drop in temperature, thereby reducing the internal area of the exhaust pipe, thereby preventing gas from being smoothly discharged through the exhaust pipe . Therefore, it is possible to increase the service life of the vacuum heat treatment apparatus and effectively reduce the time required for maintenance and repair of the vacuum heat treatment apparatus.

Further, in the vacuum heat treatment apparatus, the vacuum heat treatment apparatus can be maintained and repaired by replacing only the filter so that the secondary phase is formed in the filter. Therefore, it is possible to increase the service life of the vacuum heat treatment apparatus, effectively reduce the time required for maintenance and repair of the vacuum heat treatment apparatus, and improve the characteristics of the article to be manufactured.

1 is a schematic view of a vacuum heat treatment apparatus according to the first embodiment.
2 is a schematic view of a vacuum heat treatment apparatus according to the second embodiment.
3 is a perspective view of a filter of the vacuum heat treatment apparatus of FIG.

In the description of the embodiments, it is to be understood that each layer (film), area, pattern or structure may be referred to as being "on" or "under / under" Quot; includes all that is formed directly or through another layer.

The thickness or the size of each layer (film), region, pattern or structure in the drawings may be modified for clarity and convenience of explanation, and thus does not entirely reflect the actual size.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic view of a vacuum heat treatment apparatus according to the first embodiment.

1, a vacuum heat treatment apparatus 100 according to the first embodiment includes a chamber 10, a heat insulating material 20 disposed in the chamber 10, a reaction vessel 30 (not shown) disposed in the heat insulating material 20, And a heating member 40, and an exhaust pipe 50 for exhausting the gas generated during the reaction and exhausting the reaction vessel 30. This will be described in more detail as follows.

And an atmospheric gas is injected into the chamber 10 through an atmospheric gas supply pipe (not shown). As the atmosphere gas, an inert gas such as argon (Ar) or helium (He) can be used.

In the heat insulating material 20, the reaction vessel 30 in which the mixed raw materials are filled and a desired substance is generated by the reaction is located. The reaction vessel 30 may contain graphite to withstand high temperatures. The gas generated during the reaction can be discharged through the exhaust pipe 50 connected to the reaction vessel 30. A heat insulating member (70) surrounding the outer periphery of the exhaust pipe (50) may be positioned on the outer circumferential surface of the exhaust pipe (50). The exhaust pipe 50 and the heat insulating member 70 will be described later in more detail with reference to the drawings.

The heating member (40) for heating the reaction vessel (30) is positioned between the heat insulating material (20) and the reaction vessel (30). The heating member 40 may provide heat to the reaction vessel 30 by various methods. For example, the heating member 40 may generate heat by applying voltage to graphite.

Such a vacuum heat treatment apparatus 100 can be used, for example, as an apparatus for producing silicon carbide to produce a silicon carbide by heating a mixed raw material containing a carbon source and a silicon source. However, the embodiment is not limited thereto.

Hereinafter, the exhaust pipe 50 and the heat insulating member 70 will be described in more detail with reference to FIG.

Referring to FIG. 1, the outer circumferential surface of the exhaust pipe 50 may be surrounded by the heat insulating member 70. The heat insulating member 70 may include a graphite felt.

The thermal conductivity of the heat insulating member 70 may be 0.2 W / mK to 0.6 W / mK. If the thermal conductivity exceeds 0.6 W / Mk, the secondary phase is formed too much in the exhaust pipe 50, and if the thermal conductivity is less than 0.2 W / mK, the cooling is not performed and the filter contained in the exhaust pipe (50) Gas may enter and damage the filter.

The thickness of the heat insulating member 70 may be 0.1 to 1 in relation to the length of the exhaust pipe 50. If the thickness of the heat insulating member is less than 0.1 in relation to the length of the exhaust pipe, the secondary phase may be formed too much in the exhaust pipe. If the thickness of the heat insulating member exceeds 1, the cooling may not be performed, and exhaust gas of too high temperature may enter the filter included in the exhaust pipe, May be damaged.

Generally, the temperature of the vacuum heat treatment apparatus decreases rapidly as it moves away from the heating member, that is, toward the outside. Thereby, various gases generated during the reaction can generate a secondary phase by abrupt cooling. Particularly, in the synthesis of silicon carbide (SiC), a large amount of secondary phase due to SiO gas can be generated.

If the secondary phase is generated in the exhaust pipe, the internal area of the exhaust pipe is reduced, and gas discharge through the exhaust pipe may not be performed smoothly.

According to such a problem, in the vacuum heat treatment apparatus according to the embodiment, the outer circumferential surface of the exhaust pipe is surrounded by the heat insulating member including the graphite felt, so that the abrupt temperature drop of the exhaust gas flowing through the exhaust pipe can be prevented.

Accordingly, it is possible to prevent the various gases generated during the reaction from generating a secondary phase due to abrupt cooling, and to prevent the internal area of the exhaust pipe from being reduced due to the secondary phase, You can do it smoothly.

Thus, the lifetime of the vacuum heat treatment apparatus can be increased, the time required for maintenance and repair of the vacuum heat treatment apparatus can be effectively reduced, and the characteristics of the manufactured article can be improved.

Hereinafter, a vacuum heat treatment apparatus according to a second embodiment will be described with reference to FIGS. 2 and 3. FIG. For the sake of clarity and simplicity, detailed description of the same or similar parts to those of the first embodiment will be omitted.

2 and 3, the vacuum heat treatment apparatus 100 according to the second embodiment includes a chamber 10, a heat insulating material 20 disposed in the chamber 10, An exhaust pipe 50 for exhausting the reaction container 30 by exhausting the gas or the like generated during the reaction and a filter placed in the exhaust pipe 50. The exhaust pipe 50 is provided with an exhaust pipe 50, This will be described in more detail as follows.

Referring to FIG. 2, the filter 60 may be positioned at a portion of the exhaust pipe 50 located outside the chamber 10. As shown in Fig. 3, the filter 60 may have a meshed shape and open at one end. Thereby filtering unnecessary substances or collecting secondary phases that may be generated at relatively low temperatures. That is, since the heat insulating member does not surround the exhaust pipe portion to which the filter is connected, the temperature of the exhaust pipe can be lowered. Accordingly, in order to collect the secondary phase generated at a low temperature more efficiently, as shown in FIG. 2, a cooling unit 61 for cooling the secondary phase can be installed in a part of the exhaust pipe 50 where the filter 60 is disposed. The cooling unit 61 can cool the portion where the filter 60 is located by various methods.

As the filter 60, stainless steel (SUS), resin, or the like can be used. As the resin, various resins such as polyethylene (PE) and polyphenylene ether (PPE) can be used.

In the vacuum heat treatment apparatus according to the second embodiment, the outer circumference of the exhaust pipe is wrapped with the heat insulating member, thereby preventing a sudden temperature decrease of the exhaust pipe. Therefore, it is possible to prevent the secondary phase of the exhaust gas from being formed due to the abrupt temperature decrease of the exhaust pipe have. Thus, the exhaust gas flowing in the exhaust pipe can be smoothly exhausted.

In addition, the vacuum heat treatment apparatus 100 can be maintained and repaired by replacing only the filter 60 so that the secondary phase is formed in the filter 60. The lifetime of the vacuum heat treatment apparatus 100 can be increased and the time required for maintenance and repair of the vacuum heat treatment apparatus 100 can be effectively reduced.

Further, the filter 60 can be positioned outside the chamber 10 to capture the secondary phase generated at low temperature. Thus, the secondary phase generated at a high temperature and a low temperature can be effectively collected. Accordingly, it is possible to increase the service life of the vacuum heat treatment apparatus 100, effectively reduce the time required for maintenance and repair of the vacuum heat treatment apparatus 100, and improve the characteristics of the article to be manufactured.

The features, structures, effects and the like described in the foregoing embodiments are included in at least one embodiment of the present invention and are not necessarily limited to one embodiment. Further, the features, structures, effects, and the like illustrated in the embodiments may be combined or modified in other embodiments by those skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the present invention. It can be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiments may be modified and implemented. It is to be understood that the present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof.

Claims (10)

chamber;
A heat insulator disposed in the chamber;
A reaction vessel placed in the heat insulating material;
A heating member positioned between the heat insulating material and the reaction vessel to heat the reaction vessel;
An exhaust pipe connected to the reaction vessel and exhausting the inside of the reaction vessel and extending from the reaction vessel to the outside of the chamber;
A heat insulating member surrounding the outer periphery of the exhaust pipe;
A filter located in the exhaust pipe; And
And a cooling unit disposed on the exhaust pipe and disposed at a position corresponding to the filter,
Wherein the heat insulating member extends from the inside of the heat insulating material to the outside of the chamber and surrounds the exhaust pipe,
Wherein the exhaust pipe includes a first region in which the heat insulating member is disposed and a second region in which the heat insulating member is not disposed,
Wherein the filter and the cooling portion are disposed in the second region, and the cooling portion cools the exhaust pipe portion in which the filter is located. The method according to claim 1,
Wherein the heat insulating member comprises graphite felt. The method according to claim 1,
And the thermal conductivity of the heat insulating member is 0.2 W / mK to 0.6 W / mK. The method according to claim 1,
Wherein the thickness of the heat insulating member is 0.1 to 1 with respect to the length of the exhaust pipe. delete delete The method according to claim 1,
Wherein the filter comprises one of stainless steel (SUS) and resin. delete The method according to claim 1,
Wherein the filter has a mesh shape. The method according to claim 1,
The filter comprising an inner surface,
And the distance between the inner surfaces becomes narrower as the distance from the reaction vessel becomes narrower.

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