KR101895606B1 - Breaking unit and scribe apparatus having the same - Google Patents

Breaking unit and scribe apparatus having the same Download PDF

Info

Publication number
KR101895606B1
KR101895606B1 KR1020120040113A KR20120040113A KR101895606B1 KR 101895606 B1 KR101895606 B1 KR 101895606B1 KR 1020120040113 A KR1020120040113 A KR 1020120040113A KR 20120040113 A KR20120040113 A KR 20120040113A KR 101895606 B1 KR101895606 B1 KR 101895606B1
Authority
KR
South Korea
Prior art keywords
braking
unit
substrate
breaking
scribe line
Prior art date
Application number
KR1020120040113A
Other languages
Korean (ko)
Other versions
KR20130117197A (en
Inventor
장희동
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020120040113A priority Critical patent/KR101895606B1/en
Publication of KR20130117197A publication Critical patent/KR20130117197A/en
Application granted granted Critical
Publication of KR101895606B1 publication Critical patent/KR101895606B1/en

Links

Images

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention provides a semiconductor device comprising: a first braking unit for first braking a scribe line formed on a substrate; And a second braking unit installed in the first braking unit, wherein the scribe line is firstly braked and a force along a direction in which the scribe line is widened with respect to the scribe line is provided to the substrate, And a second braking unit for braking the second braking unit with the second braking unit. The present invention also provides a scribe apparatus having the above breaking unit.

Description

[0001] DESCRIPTION [0002] BREAKING UNIT AND SCRIBE APPARATUS HAVING THE SAME [0003]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing apparatus, and more particularly, to a breaking unit and a scribing apparatus having a braking unit capable of performing multiple braking by providing forces along different directions on scribe lines formed on a substrate.

In general, a liquid crystal display device is manufactured by forming alignment films and spacers on two glass substrates on which electrode patterns are formed, combining them to form a plurality of liquid crystal cells, and then breaking each liquid crystal cell using a scribing device.

A conventional scribe device breaks the liquid crystal display device in units of cells.

The scribing device comprises a loading section, a scribing section, and a discharge section.

The liquid crystal display or the substrate is loaded from the outside through the loading part.

The substrate is aligned and transported to the scribe portion.

In the scribing unit, the transported substrate is divided into lattices along the X and Y axis directions.

Subsequently, the divided substrates are broken at the discharging portions on the respective cell ends by using a separate separating device and discharged to the outside.

As described above, conventionally, the substrate scribed in the scribing unit is divided by using a separate cutting apparatus, and the process line is lengthened as the substrate divided by the discharge unit is broken on a cell-by-cell basis.

Prior art related to the present invention is Korean Patent Laid-open Publication No. 10-2005-0000480 (published on Jan. 5, 2005), which discloses a method of cutting a substrate of a flat panel display Disclosed is a technique for providing a cutting device in one place and a cutting device.

It is an object of the present invention to provide a braking unit and a scribe apparatus having the braking unit capable of improving the braking efficiency by simultaneously providing a force along the scribing line formed on the substrate and a direction along the wobbling direction.

Another object of the present invention is to provide a braking unit and a scribe device having the braking unit capable of improving the quality of each unit substrate manufactured by reducing the defective rate due to braking.

In one aspect, the present invention provides a semiconductor device comprising: a first braking unit for first breaking a scribe line formed on a substrate; And a second braking unit installed in the first braking unit, wherein the scribe line is firstly braked and a force along a direction in which the scribe line is widened with respect to the scribe line is provided to the substrate, And a second braking unit for braking the second braking unit with the second braking unit.

According to another aspect of the present invention, there is provided a substrate processing apparatus including: a transfer unit for transferring a substrate; a scribe unit for forming a scribe line in the substrate to be transferred; And a scribing unit including the braking unit provided in the vicinity of the scribing unit.

The present invention can simultaneously increase the braking efficiency by braking the substrate with the first and second unit substrates by simultaneously providing a force along the vertical and horizontal directions on the substrate, reduce the process line of the scribe device, and improve the productivity .

Further, the present invention has an effect that it is possible to detach the member for braking the substrate along the horizontal direction from the braking unit, thereby giving ease of replacement.

Further, the present invention has the effect of enabling normal braking of the substrate by setting the position of the upper and lower sides variable when the braking member is deformed or can not be set at the normal position.

Further, according to the present invention, the braking condition can be easily set by varying the first braking along the vertical direction and the second braking along the horizontal direction according to the state of the scribe line formed on the substrate.

Further, the present invention has the effect of improving the braking efficiency and improving the quality of the unit substrates to be broken by providing the substrate with the force required for braking along the multiple directions.

1 is a view showing a scribe apparatus having a breaking unit of the present invention.
2 is a perspective view showing a configuration of a breaking unit according to the first embodiment of the present invention.
Fig. 3 is a cross-sectional view along the line I-I 'of the breaking unit of Fig. 2;
4 is a cross-sectional view showing a process of braking a substrate using the braking unit of Fig.
5 is a perspective view showing an example in which the second breaking portion is installed on both sides of the first breaking portion;
6 is a cross-sectional view along II-II 'of the braking unit of Fig. 5;
7 is a cross-sectional view showing a breaking unit according to a third embodiment of the present invention.
8 is a cross-sectional view showing an example of braking a substrate using a braking unit according to a third embodiment of the present invention.
9 is a sectional view showing an example in which the breaking unit according to the present invention further comprises a level adjusting portion.
10 is a sectional view showing a state before the operation of the breaking unit having the vacuum supply unit according to the present invention.
11 is a cross-sectional view showing the post-operation state of the breaking unit having the vacuum supply unit according to the present invention.
12 is a cross-sectional view showing the relationship between the second braking member and the substrate shown in Fig.
13 is a cross-sectional view showing an example in which an adhesive protrusion is further provided on the second breaking portion according to the present invention.
14 is a cross-sectional view showing an example in which adhesive grooves are further provided in the second breaking portion according to the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

Here, since the braking unit may be included in the scribe apparatus, the scribe apparatus will be described below.

1 shows a scribe apparatus having a breaking unit of the present invention.

Referring to FIG. 1, the scribing apparatus of the present invention comprises a loading region 1, a scribe region 2, and a breaking region 3 of an inline type.

The scribing apparatus includes a conveying unit 10, a scribing unit 20, and a breaking unit 30.

The transfer unit 10 may be a transfer rail or a transfer plate for transferring a substrate 50 such as a glass panel. The transfer unit 10 may be installed in the loading area 1, the scribe area 2 and the breaking area 3 to transfer the substrate 50 in the order of the areas 1,2,3.

Accordingly, the transport path (a) of the substrate 50 is formed to follow the order of the regions 1, 2, and 3 by the transporting unit 10.

A substrate 10, such as a glass panel, may be placed in the loading area 1.

In the loading area 1, the substrate 50 is aligned in a predetermined alignment state to follow the transport path a through an unshown alignment unit.

The transfer unit 10 transfers the substrate 50 aligned in the loading area 1 to the scribe area 2.

The scribe area (2) is provided with a scribe unit (20).

The scribing unit 20 is a device for forming a scribe line SL (see FIG. 4) on the transferred substrate 50.

The scribe line SL may be formed on the surface of the substrate 50 along the X axis or the Y axis.

The scribing unit 20 includes a head frame 21 installed along a conveying path a of the substrate 50, for example, a direction orthogonal to the conveying path a along the X axis or along the Y axis, A head unit 22 mounted on the head unit 21 and reciprocally moved along the head frame 21 through external power; and a scribing unit 22 mounted on the head unit 22, And a scribe wheel (not shown) that forms a line SL.

Here, the scribe wheel may be used as another scribe member capable of forming a scribe line (SL) on the surface of the substrate (50).

Thus, on the surface of the substrate 50 in the scribe area 2, a scribe line SL is formed through the operation of the scribe unit 20.

The braking unit 30 receives the substrate 50 from the scribe area 2 through the transfer unit 10.

First Embodiment of Braking Unit

Fig. 2 shows the construction of a breaking unit according to a first embodiment of the invention, and Fig. 3 shows a cross section of the braking unit of Fig. Fig. 4 shows an example of braking a substrate using a braking unit according to the first embodiment of the present invention.

As shown in Fig. 1, the breaking unit 30 is disposed in the braking area 3. After the scribe line SL is formed, the substrate 50 is transferred to the braking area 3 by the transfer unit 10.

Referring to Figs. 2 to 4, the braking unit 30 may perform multiple braking operations.

The braking unit 30 includes first braking for providing a force Fv along the vertical direction to the scribe line SL formed on the surface of the substrate 50 and first braking for providing a force Fv along the scribe line SL (Fh, Fh ').

The configuration of the breaking unit 30 according to the present invention will be described.

The braking unit 30 is installed in the braking area 3 (see Fig. 1) to receive the external power from the braking head 31 located along the Y axis.

Further, the braking unit 30 is connected to a lifting device (not shown), and is raised and lowered by the lifting and lowering operation of the lifting device.

The braking unit 30 includes a first braking unit 100 and a second braking unit 200.

The first braking unit 100 includes a first braking unit 110 and a first braking unit 120 formed at a lower end of the first braking unit body 110 along a downward direction. The lower end of the first braking member 120 is a portion for performing first braking on the scribe line SL substantially formed on the substrate 50.

The first breaking portion 100 firstly breaks a scribe line SL formed in the substrate 50 along a direction perpendicular to the substrate 50 in accordance with the descending operation of the lifting device.

The second breaking portion 200 simultaneously provides a force Fh, Fh 'along the horizontal direction to the surface of the substrate along with a force along the direction of widening to each other at the boundary of the scribe line SL, (50) is secondarily braked by the first and second unit substrates (51, 52).

The second braking unit 200 performs the second braking according to the downward movement of the lift device along the horizontal direction with respect to the substrate 50.

The second braking unit 200 is installed to extend along the lower portion of the first braking body 110. The second braking unit 200 is formed of a pair of second braking members 220.

One end of each of the second braking members 220 is preferably fixed to the upper ends of both sides of the first braking member 120 and the lower end is opened to gradually separate from the first braking member 120 downward.

One end of each of the second braking members 220 may be fixed to the upper ends of both sides of the first braking member 120 through a separate adhesive.

Here, each of the second braking members 220 may be formed of an elastic material.

In addition, the lower surface of each of the second braking members 220 may have a constant adhesive force. For example, the adhesive force may be formed by forming an adhesive layer (not shown) having a predetermined thickness on the lower surface of the second braking member 220.

Therefore, the lower surfaces of the second braking members 220 can form a constant adhesive force when they are in contact with the surface of the substrate 50.

In addition, the lower end of the first braking member 120 and the lower end of each of the second braking members 220 may be formed at the same level.

Each of the second braking members 220 is formed so that its thickness gradually decreases along the downward direction. Therefore, when the second braking members 220 formed of an elastic material are lowered, the lower ends of the second braking members 220 can be easily bent while being adhered to the surface of the substrate 50.

Therefore, the surface of the substrate 50 can be gradually brought into contact with the lower end of each of the lowering braking members 220 to prevent the force along the horizontal direction from being excessively applied.

The operation of the braking unit having the above structure will be described.

Referring to FIG. 4, a substrate 50 on which a scribe line SL is formed is located below the braking unit 30.

The breaking unit 30 is lowered along the lower side through the lift device. The descending direction is along the Z axis.

At this time, the lower end of the first braking member 120 performs first braking on the scribe line SL formed on the substrate 50.

At the same time. Each of the second braking members 220 installed on both sides of the first braking member 120 moves the substrate 50 to the first and second unit substrates 51 and 52 along the direction in which the scribing line SL extends, 52).

4, the bottom surface of each of the second braking members 220 is formed so that the surface of the substrate 50 positioned on both sides of the scribe line SL with the first braking member 120 being lowered, As shown in Fig.

Next, each of the second braking members 220 applies a force to the surface of the substrate 50 along the direction in which the scribe lines SL are widened with respect to each other, thereby performing secondary braking as described above. Here, the secondary braking direction may follow the horizontal direction.

Then, when the primary and secondary braking are completed as described above, the braking unit 30 can be returned to the home position by the raising operation of the landing gear.

Therefore, in the first embodiment of the present invention, the first braking is applied to the scribe line SL of the substrate 50 and the second braking is performed by pushing the substrate 50 to both sides with the scribe line SL as a boundary The substrate 50 can be separated into the first and second unit substrates 51 and 52 by performing the car braking at the same time.

The first embodiment according to the present invention stably breaks the substrate 50 to the first and second unit substrates 51 and 52 by performing multiple braking simultaneously on the scribe lines SL along different directions . ≪ / RTI >

Second Embodiment of Braking Unit

Fig. 5 shows an example in which the second breaking portion is installed on both sides of the first braking portion, and Fig. 6 shows an example of braking the substrate using the braking unit according to the second embodiment of the present invention.

Referring to FIG. 5, the second braking unit 201 may be installed on both sides of the first braking unit 100.

The first breaking portion 100 may be substantially the same as the first embodiment.

The second braking unit 201 includes a second braking body 211 installed at both side portions of the first braking body 110 of the first braking unit 100 and a second braking body 211 disposed at the lower end of the second braking body 211 And a second braking member 221 to be installed.

Here, the second braking member 221 may be substantially the same as the function of the first embodiment.

The second braking body 211 and the second braking member 221 are integrally formed with each other and are formed of elastic members of the same material.

Of course, the second braking member 221 may be formed of a material having a higher elasticity than the second braking body 211.

The second braking body 211 may be adhesively fixed to both side portions of the first braking body 110 through a separate adhesive agent or may be bolted through separate bolt fastening means (not shown).

In the latter case, the second breaking portion 201 can be detached from the first breaking portion 100, and can be replaced with another second breaking portion (not shown) when used for a long period of time.

6, in the second embodiment of the present invention, when the first braking and the second braking are performed on the scribe line SL of the substrate 50, the second braking members 221, So that the life of the second braking unit 201 can be efficiently extended by transmitting and absorbing the force applied to the second braking unit 211 to the second braking body 211. [

Here, 'Fv' is the direction of the force during the primary braking and 'Fh' and 'Fh' is the direction of the force during the secondary braking.

Third Embodiment of Braking Unit

Figure 7 shows a braking unit according to a third embodiment of the invention, and Figure 8 shows an example of braking a substrate using a braking unit according to the third embodiment of the invention.

Referring to FIG. 7, the braking unit 30 includes a first braking unit 100 and a second braking unit 202.

The first braking unit 100 includes a first braking body 110 and a first braking member 120 formed at a lower end of the first braking body 110. The first braking member 120 may be substantially the same as the first embodiment.

The second braking unit 202 is installed on both sides of the first braking unit 100 so as to be able to move up and down. Each of the second braking portions 202 is composed of a second braking body 212 and a second braking member 222.

Each of the second braking bodies 212 is installed on both sides of the first braking body 110 so as to be able to move up and down.

For example, the first braking body 110 is provided with a lift groove 111 at both sides thereof, and each second braking body 212 is fitted in the lift groove 111 and is lifted and lowered along the lift groove 111 A lifting projection 212a is formed.

Each of the second braking bodies 212 is connected to the elevating modules 310 and 320. Each of the elevating modules 310 and 320 receives an electrical signal from the control module 420 to elevate the second braking body 212.

The control module 420 may be electrically connected to an input device (not shown) for receiving the elevating position of the second braking body 212.

According to the elevating operation of each of the second braking bodies 212, the elevating position of each of the second braking members 222 can be variably adjusted.

Therefore, the second braking time using each of the second braking members 222 can be adjusted by the lift modules 310 and 320.

The second braking member 212 may be formed of a metal material, and each second braking member 222 may be formed of an elastic material as in the first embodiment.

Each of the second braking members 222 may be fixed to the lower end of each of the second braking bodies 212 in a manner such as adhesion or bolt fastening.

The operation of the braking unit having the above structure will be described.

Referring to FIGS. 7 and 8, the control module 420 can adjust the lift position of each second braking body 212 using the lift modules 310 and 320. Accordingly, the second braking member 222 formed at the lower end of the second braking body 212 can also be adjusted in the elevating position.

Here, the elevating and lowering positions of the second braking members 222 can be independently adjusted by using the elevating modules 310 and 320. Of course, the lifting and lowering positions of the second braking members 222 can be adjusted to be equal to each other by using the lift modules 310 and 320.

The second braking member 222 is a member that is brought into contact with the surface of the substrate 50 to provide a force required for the second braking to the substrate 50. By adjusting the lifting position of the second braking member 222, .

After the above conditions are set, the first breaking portion 100 can be lowered toward the surface of the substrate 50 by the lifting device.

The first braking member 120 formed at the lower end of the first braking body 110 performs the first braking by providing the force Fv along the direction perpendicular to the scribe line SL formed in the substrate 50 .

At the same time, each of the second braking members 222 whose lifting and lowering positions are adjusted is provided with a force Fh, Fh 'along the direction in which the scribing line SL is widened to each other to the surface of the substrate 50, Braking is performed.

At this time, when the elevation control positions of the second braking members 222 are equal to each other, the second braking with respect to the substrate 50 is performed simultaneously, and when the second braking members 222 have different elevation control positions, The point of time of the second braking through each second braking member 222 may proceed differently.

According to the third embodiment of the present invention, as described above, by adjusting the elevation control positions of the respective second braking members 222, it is possible to control the position of the second braking member 222 in accordance with the state of the surface of the substrate 50 positioned on both sides with respect to the scribe line SL So that the efficiency of secondary braking can be increased.

In the third embodiment of the present invention, the first braking time and the second braking time are set to be equal to each other, or a predetermined time difference is provided between the first braking time and the second braking time, You can set the order. The third embodiment is advantageous in that the substrate 50 can be easily broken into the first and second unit substrates 51 and 52 according to the thickness of the substrate 50 or the state of formation of the scribe line SL Respectively.

The braking unit 30 may further include a level adjusting unit.

9 shows an example in which the braking unit according to the present invention further comprises a level adjusting unit.

Referring to FIG. 9, the level controller 400 includes a level meter 410 and a control module 420.

The level meter 410 may be installed on the side of the first braking member 120. The level meter 410 may be installed on an extension bracket (not shown) extending from the first braking member 120 or installed in a scribe device body (not shown) positioned on the side of the first braking member 120 .

The level meter 410 is a device for measuring the vertical level of the lower end of the first braking member 120 and the lower end of each second braking member 120.

For example, the level meter 410 may be a distance measuring instrument having a light emitting portion and a light receiving portion.

The level meter 410 measures the first vertical level of the lower end of the first braking member 120 and the second vertical level of the lower end of each of the second braking members 222 and transmits it to the control module 420 do.

The control module 420 controls the lift modules 310 and 320 so that the horizontal level between the first vertical level of the lower end of the first braking member 120 and the second vertical level of the lower end of the second braking member 222 are equal to each other It is possible to adjust the lifting position of each of the second braking members 222 by using the second braking member.

Referring to the above configuration, it can be applied to the process of adjusting and checking the level states of the first and second braking members 120 and 222 at regular intervals before or after braking the substrate 50.

In the embodiment according to the present invention, the first and second braking members 120 and 222 are adjusted so that the horizontal level of the first and second braking members 120 and 222 is always constant before and after the braking operation, .

In addition, the control module 420 may perform the horizontal level adjustment in real time immediately after the first and second braking operations.

Thus, the embodiment according to the present invention can be applied to the first braking member 120 (first braking member 120) by setting the first braking on the scribing line SL of the substrate 50 and, at the same time, ) Or the deformation of the second braking member 222 and prevention of quality defects of the unit substrates 51 and 52 that are manufactured by being braked can be prevented in advance.

Braking unit Fourth embodiment

10 is a view showing a pre-operation state of a breaking unit having a vacuum supply unit according to the present invention.

Referring to FIG. 10, the braking unit 30 of the present invention may be connected to one lift module 350 to be elevated.

The first braking body 110 according to the present invention may further include a distance sensor 600.

The distance sensor 600 may measure the distance value d1 to the upper surface of the substrate 50 and may transmit the measured distance value d1 to the control module 420. [

The distance d2 between the distance sensor 600 and the lower end of the first braking member 120 is preset in the control module 420.

In the present invention, the waiting distance d0 between the lower end of the first braking member 120 and the upper surface of the substrate 50 is set in the control module 420 before the braking process.

Also, the first braking body 110 is connected to the lift module 350. The elevator module 350 is driven to ascend and descend by receiving an electrical signal from the control module 420.

In particular, each of the second braking members 221 is further provided with a plurality of vacuum suction holes 221a.

The vacuum adsorption hole 221a may be connected to the vacuum supplier 500 through a tube 510. [

The vacuum supplier 500 is electrically connected to the control module 420 and receives an electrical signal from the control module 420 to form a vacuum in the vacuum suction hole 221a.

11 shows the post-operation state of the breaking unit having the vacuum supply unit according to the present invention. 12 shows the relationship between the second braking member and the substrate shown in Fig.

10 to 12, a scribe line SL is formed on the substrate 50, as described above.

The initial position in the braking unit 30 located at the top of the substrate may be the position shown in Fig. That is, the initial position may be a position where the first braking member 120 forms the standby position value d0.

The control module 420 may drive the lift module 350 to allow the braking unit 30 to achieve the initial position.

The control module 420 drives the lift module 350 to lower the breaking unit 30. [

At this time, the control module 420 lowers the first braking member 120 to reach the operating position. The operating position is a position where the scribe line SL is firstly braked by the first braking member 120 to be lowered.

The control module 420 drives the elevation module 350 and also forms a vacuum in the vacuum absorption holes 221a of the second braking members 221 by using the vacuum supplier 500. [

The first braking member 120 of the first braking unit 100 is lowered as described above and contacts the scribe line SL formed in the substrate 50 to provide a force Fv along the vertical direction.

At the same time, each of the second braking members 221 located on both sides of the first braking member 120 is gradually brought into contact with the upper surface of the substrate 50 from the end thereof.

The lower surface of each second braking member 221 is entirely in contact with the upper surface of the substrate 50 while the first braking member 120 is further lowered to the operating position.

At this time, as shown in FIGS. 11 and 12, each of the second braking members 221 can adsorb the upper surface of the substrate 50.

As the lowering operation is performed, the first braking member 120 applies the force Fv along the vertical direction to the scribe line SL to perform the first braking, and at the same time, the second braking member 221 Performs secondary braking by applying forces Fh and Fh 'along the direction in which the substrate 50 is extended in a state in which the substrate 50 is vacuum-adsorbed on both sides of the scribe line SL as a boundary, ) With the first and second unit substrates 51 and 52.

Therefore, braking along the vertical and horizontal directions can be simultaneously performed on the substrate 50.

When the first braking member 120 reaches the operating position, the control module 420 stops driving the vacuum supplier 500.

Therefore, the vacuum provided to the vacuum suction holes 221a of the respective second braking members 221 is released. Each of the second braking members 221 forms a state in which it can be separated from the upper surface of the substrate 50.

The control module 420 drives the lift module 350 to return the breaking unit 30 to its original position.

Next, the control module 420 discharges the first and second unit substrates 51 and 52, which are broken as described above, by using the transfer unit 10 (see FIG. 1) shown in FIG.

The fourth embodiment according to the present invention is characterized in that the substrate 50 is vacuum-adsorbed on the upper surface of the substrate 50 to be separated into the unit substrates 51 and 52 simultaneously with the primary braking, It is possible to minimize the amount of loss to the force applied to the power source.

13 shows an example in which the second braking portion according to the present invention is further provided with an adhesive projection.

Referring to FIG. 13, a plurality of adhesive protrusions 230 may be further formed on the bottom surface of each second braking member 221 described in the first to fourth embodiments.

The adhesive protrusions 230 serve to improve adhesion with the substrate 50 when the lower surfaces of the second braking members 221 are brought into contact with the surface of the substrate 50 to perform secondary braking do.

Accordingly, the adhesive protrusions 230 can efficiently solve the process problem in which each of the second braking members 221 is separated from the surface of the substrate 50 while the second braking is performed.

Fig. 14 shows an example in which adhesive grooves are further provided in the second breaking portion according to the present invention.

Referring to FIG. 14, a plurality of adhesive grooves 240 may be further formed on the bottom surface of each second braking member 221 described in the first to fourth embodiments.

The adhesive grooves 240 serve to improve adhesion with the substrate 50 when the lower surfaces of the second braking members 221 contact the surface of the substrate 50 to perform secondary braking do.

Accordingly, the adhesive grooves 240 can efficiently solve the process problem in which each of the second braking members 221 is separated from the surface of the substrate 50 while the second braking is performed.

In addition, although not shown in the drawings, the above-described adhesive protrusion 230 and the adhesive groove 240 may be formed at a uniform rate on the bottom surface of the second braking member 221 according to the present invention.

Particularly, although not shown in the drawing, the adhesive protrusion 230 may further include an adhesive layer (not shown) having a predetermined thickness on the outer surface of the protruded portion.

Although the second braking member 221 is described as a representative example, the adhesive bump 230 or the adhesive groove 240 may be formed in the same manner as the second braking member 220 or 222 Can be adopted.

1: Loading area 2: Scribe area
3: Breaking zone 10:
20: scribe unit 30: breaking unit
100: first breaking portion 110: first breaking body
120: first braking member 200, 201, 202: second braking member
210, 211, 212: second braking body 220, 221, 222:
230: Adhesive projection 240: Adhesive groove
310, 320, 350: lift module 400:
410: level meter 420: control module
500: vacuum supply

Claims (8)

A first breaking portion for first breaking the scribe line formed on the substrate; And
Wherein the scribe line is firstly braked and simultaneously a force is applied to the substrate along a direction in which the scribe line is widened with respect to a boundary between the first scribe line and the second scribe line, And a second breaking portion for performing a second breaking,
Wherein the second braking unit comprises:
And a second braking portion provided on both sides of the first braking portion so as to be able to move up and down along the downward direction with respect to the first braking portion, A braking member,
And an elevating module for elevating the second braking member to regulate the time of the second braking.
The method according to claim 1,
Wherein the first breaking portion first breaks the scribe line along a direction perpendicular to the substrate,
And the second breaking portion secondarily brakes the substrate along the horizontal direction with respect to the substrate.
3. The method of claim 2,
And the second breaking portion is formed of an elastic material.
The method of claim 3,
Wherein a plurality of adhesive protrusions are further formed on the lower surface of the second braking portion which is in contact with the surface of the substrate.
delete The method according to claim 1,
The thickness of the second braking portion is gradually reduced along the lower portion of the second braking portion,
Wherein the second braking portion is bent while being in gradual contact with the substrate.
The method according to claim 1,
The braking unit may further include a level adjusting unit,
The level controller may include:
A level meter for measuring a horizontal level of a lower end of the first braking member of the first braking unit and a lower end of the second braking member installed at a side of the first braking unit,
And a control module that adjusts the elevation position of the second braking member by using the elevation module so that a horizontal level of the lower end of the first braking member and a lower end of the second braking member to be measured become equal to each other Breaking unit.
A transfer unit for transferring the substrate;
A scribe unit for forming a scribe line on a substrate to be transferred; And
The scribing apparatus according to any one of claims 1 to 4, 6 and 7, which is provided in the vicinity of the scribing unit.
KR1020120040113A 2012-04-18 2012-04-18 Breaking unit and scribe apparatus having the same KR101895606B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120040113A KR101895606B1 (en) 2012-04-18 2012-04-18 Breaking unit and scribe apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120040113A KR101895606B1 (en) 2012-04-18 2012-04-18 Breaking unit and scribe apparatus having the same

Publications (2)

Publication Number Publication Date
KR20130117197A KR20130117197A (en) 2013-10-25
KR101895606B1 true KR101895606B1 (en) 2018-10-18

Family

ID=49636019

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120040113A KR101895606B1 (en) 2012-04-18 2012-04-18 Breaking unit and scribe apparatus having the same

Country Status (1)

Country Link
KR (1) KR101895606B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102147126B1 (en) 2018-03-26 2020-08-25 주식회사 탑 엔지니어링 Apparatus for breaking substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005028172A1 (en) 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. Substrate dicing system, substrate manufacturing apparatus, and substrate dicing method
JP4131853B2 (en) 2003-04-28 2008-08-13 株式会社 日立ディスプレイズ Display device manufacturing method and manufacturing apparatus
JP4965632B2 (en) 2004-03-15 2012-07-04 三星ダイヤモンド工業株式会社 Substrate cutting system, substrate manufacturing apparatus, substrate scribing method, and substrate cutting method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100943468B1 (en) * 2003-06-27 2010-02-22 엘지디스플레이 주식회사 Device for Cutting Glass Substrate in Manufacturing Process of Flat Type Display
JP5037138B2 (en) * 2005-01-05 2012-09-26 Ｔｈｋ株式会社 Work breaking method and device, scribing and breaking method, and scribing device with break function
KR100960468B1 (en) * 2005-12-29 2010-05-28 엘지디스플레이 주식회사 Method of cutting liquid crystal display panel and method of fabricating liquid crystal display panel using the same
KR101020682B1 (en) * 2009-05-06 2011-03-11 세메스 주식회사 Apparatus for breaking substrate
KR101683892B1 (en) * 2010-05-07 2016-12-08 엘지디스플레이 주식회사 Apparatus for manufacturing liquid crystal display device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4131853B2 (en) 2003-04-28 2008-08-13 株式会社 日立ディスプレイズ Display device manufacturing method and manufacturing apparatus
WO2005028172A1 (en) 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. Substrate dicing system, substrate manufacturing apparatus, and substrate dicing method
JP4965632B2 (en) 2004-03-15 2012-07-04 三星ダイヤモンド工業株式会社 Substrate cutting system, substrate manufacturing apparatus, substrate scribing method, and substrate cutting method

Also Published As

Publication number Publication date
KR20130117197A (en) 2013-10-25

Similar Documents

Publication Publication Date Title
KR102082271B1 (en) System for Separating Carrier Substrate and Method of Separating the Same
KR101380978B1 (en) Bonding apparatus
KR101797193B1 (en) Applying method, applying device, manufacturing method, and manufacturing device
CN102862818A (en) Glass panel conveying device
KR101895606B1 (en) Breaking unit and scribe apparatus having the same
US20140286735A1 (en) Lift mechanism for a glass substrate in an exposure machine
KR101784090B1 (en) Transfer apparatus and transfer method
KR101949159B1 (en) Scribe apparatus and apparatus for cutting panel and method for scribing panel
KR102346975B1 (en) Thin film transport and upper lower coating equipment for display purposes
KR101970566B1 (en) Apparatus for Separating Carrier Substrate and Method for Manufacturing Display Panel Device
KR101201407B1 (en) Apparatus for bonding substrate and method for bonding substrate
CN205240591U (en) Glass in solar PV modules production line moves and carries device
KR102067986B1 (en) Apparatus for cutting substrate
CN112698519B (en) Display laminating device and supporting chuck balancing method using the same
CN213102989U (en) Multi-station glue dispenser
KR101135355B1 (en) Substrate lifting apparatus
KR101362458B1 (en) Lift pin module and apparatus for manufacturing of FPD including the same
KR101841476B1 (en) Apparatus for scribing panel
CN105460539A (en) Glass transfer device used in production line of solar photovoltaic assembly
KR20120079982A (en) Apparatus for transferring the substarate vertically
KR101089748B1 (en) Method for controlling despenser appratus
US10906754B2 (en) Apparatus and method for manufacturing liquid crystal panel
KR101716856B1 (en) Elevating unit for substrate stage and apparatus for processing substrate having the same
CN110451265B (en) Emergency supporting method of supporting device
KR101607852B1 (en) Apparatus and method for prealigning

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right