KR101882916B1 - Mask manufacturing system - Google Patents

Abstract

Disclosed is a mask manufacturing system capable of leading to mass production of masks. According to one embodiment of the present invention, the mask manufacturing system comprises a roll sheet etching unit carrying out an etching process on a roll sheet wound in a roll form to manufacture a mask; and a functional specific gravity wash unit directly connected to an outlet of the roll sheet etching unit on a process line where an etching process is carried out and removing etchant or foreign materials remaining on the roll sheet, on which the etching process has been completed, by using washing water mixed with washing chemicals or water.

Description

[0001] Mask manufacturing system [

The present invention relates to a mask manufacturing system, and more particularly, to a mask manufacturing system which can lead to mass production of a mask, and which can significantly improve cleaning efficiency after etching, .

There are a liquid crystal display (LCD) and an organic light emitting display (OLED) as a flat panel display substrate or a display substrate.

Among them, an OLED is a cemented carbide thin film display device which realizes a color image by self-emission of an organic material, and has become a promising display device because of its simple structure and high light efficiency. As a result, OLEDs are widely applied to mobile phones including TVs and monitors.

On the other hand, the recent penetration rate of mobile phones has been increasing all over the world because recent mobile phones, also called smart phones, have become personal necessities.

Especially, considering the fact that mobile phones are replaced every two or three years, mobile phone makers are forced to invest in facilities for mass production of mobile phones.

In order to construct a facility for mass production of such a mobile phone, a corresponding number of masks must be secured. That is, in order to apply the above-described OLED to the display of a cellular phone, the substrate must undergo a number of processes such as a deposition process and an etching process. A mask is used to perform the processes for the deposition of the substrate . The mask at this time is a metal mask made of a metal.

The mask used in the deposition process of the substrate may be repeatedly used several times or several times or more. However, if it is determined that there is a possibility of occurrence of defects, it is necessary to perform the deposition process on the substrate while replacing the mask frequently.

In order to replace the mask with the equipment at such a long time, it is necessary to hold a large amount of the mask. For this purpose, application of a mask manufacturing system for manufacturing a large number of masks is considered.

On the other hand, in order for the mask to be manufactured through the mask manufacturing system, the mask sheet, which is the raw material of the mask, must be subjected to various processes in a stepwise manner, so that the mask can be manufactured.

Among the various processes for manufacturing the mask, an etching process for forming a pattern hole on the mask sheet may be included.

It is necessary to substantially completely clean or remove the etchant or foreign matter remaining on the sheet after the etching process has proceeded since the etchant, which is one kind of chemical agent, is used in performing the etching process.

However, at present, there are many cases of cleaning with water, so that the cleaning efficiency is inevitably lowered. As a result, the etchant may be buried in the sheet to cause damage of the product, There is a need for a new concept of a mask manufacturing system.

Korea Patent Office Application No. 10-2011-0031334

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a mask manufacturing system capable of mass production of a mask.

According to an aspect of the present invention, there is provided a roll sheet etching unit for carrying out an etching process for a roll sheet wound in a roll form for manufacturing a mask; And an etchant or foreign matter remaining on the roll sheet on which the etch process is completed by using wash water or water mixed with the cleansing chemicals and directly connected to the outlet of the roll sheet etch unit on the process line where the etching process is carried out, And a functional gravity water wash unit for removing the functional gravity water wash unit.

The functional gravity hiding unit may include a unit cabinet; A specific gravity water washing module provided at one side of the unit cabinet for removing etchant remaining on the roll sheet on which the etching process is completed by using washing water mixed with the washing chemicals; And a water wash module disposed adjacent to the non-hygienic module on the unit cabinet, for removing foreign matter remaining on the roll sheet using the water with respect to the roll sheet past the non-hygienic module.

Wherein the non-dehydrated waterproofing module comprises: a non-dehydrated waterproof module housing having an inlet portion through which the roll sheet is introduced; A roll sheet conveying unit disposed in the non-wettable water module housing, for conveying the roll sheet passed through the inlet unit; An upper pipe portion disposed at an upper portion of the roll sheet transfer portion and having a plurality of upper injection nozzles for spraying wash water mixed with the cleaning agent toward the roll sheet being conveyed under the action of the roll sheet transfer portion; And a plurality of lower spray nozzles disposed at a lower portion of the upper pipe portion and upwardly spraying wash water mixed with the cleaning agent toward the roll sheet being transported by the action of the roll sheet transport portion.

The nonwetting module may include at least one of the upper pipe portion and the lower pipe portion, at least one of which is connected to the upper pipe portion and the lower pipe portion, for securing injection uniformity of the washing water mixed with the cleaning agent injected onto the roll sheet. And a pipe driving unit for driving the pipe driving unit.

The pipeline driving unit includes: a driving housing coupled to one side of the unit cabinet; An upper slider connected to the upper pipe portion and slidably driving the upper pipe portion; An upper sliding plate disposed on the upper portion of the driving housing and connected to the upper slider, the upper sliding plate being slidable in a direction in which the upper piping portion is driven; A lower slider connected to the lower pipe portion and slidably driving the lower pipe portion; A lower sliding plate disposed at an upper portion of the drive housing and connected to the lower slider, the lower sliding plate being slidably moved in a direction in which the lower pipe portion is driven; And a slider driving unit provided in the driving housing and connected to the upper sliding plate and the lower sliding plate, for alternately driving the upper slider and the lower slider.

The slider driving unit includes a servo motor connected to a speed reducer and generating power; A rotating shaft disposed in the drive housing between the upper sliding plate and the lower sliding plate and connected to the servo motor and rotated by the operation of the servo motor; An upper cam plate connected to an upper end of the rotating shaft and rotated coaxially with the rotating shaft; An upper coupling member coupled to the upper cam plate via an upper slot of the upper sliding plate; A lower cam plate connected to a lower end of the rotating shaft and rotated coaxially with the rotating shaft; And a lower engaging member coupled to the lower cam plate via a lower slot of the lower sliding plate.

The water wash module may be a plurality of water wash modules disposed laterally adjacent to each other and arranged so that the jet intensity of the water progressively weakens toward a later process.

Each of said plurality of wash modules comprising: a wash module housing; And a plurality of water injectors disposed at upper and lower portions of the roll sheet being conveyed in the water wash module housing and spraying the water toward the roll sheet at the corresponding positions.

The functional gravity hosed leaning unit further includes a dewatering module disposed adjacent to the water wash module on the unit cabinet and for removing wind water remaining on the roll sheet from the roll sheet passing through the water wash module .

The dewatering module comprises: a dewatering module housing; And a plurality of air knives disposed at the top and bottom of the roll sheet being conveyed in the moisture removal module housing and ejecting air in a direction from the position toward the roll sheet .

A first drain disposed at a lower side of the unit cabinet, for draining mixed washing water mixed with the cleaning agent dropped by the non-wiping module; And a second drain portion disposed on the other side of the lower portion of the unit cabinet for draining the water dropped by the water washing module.

And a roll sheet drying unit disposed behind the functional non-wettable waterproofing unit for drying the washed roll sheet via the functional non-wettable waterproofing unit.

A second sheet disposed on the other side of the roll sheet, which is unwound from the roll sheet supply unit and supplied to the roll sheet etching unit before the etching process for the first surface of the roll sheet is performed, And a tape laminating unit for etching resistance for laminating an etching resistance tape resistant to etching on the surface of the substrate.

Wherein the etching resistance tape laminating unit is arranged on one side of a first process line in which the roll sheet is fed from the roll sheet feeding unit to the roll sheet etching unit and the roll- To the second surface of the roll sheet during continuous feeding and laminating the tape lamination unit.

According to the present invention, it is possible to bring about mass production of the mask, and in particular, the cleaning efficiency after the etching can be improved much more than before, without causing damage to the product.

1 is a plan view of a mask produced by a mask manufacturing system according to an embodiment of the present invention.
2 is a schematic configuration diagram of a mask manufacturing system according to an embodiment of the present invention.
3 is a configuration diagram of a mask manufacturing system according to an embodiment of the present invention.
Fig. 4 is an enlarged view of the tape laminating unit area for etching resistance shown in Fig. 3;
5 is an enlarged view of the roll sheet etching unit shown in Fig.
Fig. 6 is an enlarged view of the functional non-hygroscopicity protection unit area shown in Fig. 3. Fig.
Fig. 7 is a perspective view of the functional gravity-water spraying unit. Fig.
Fig. 8 is a rear perspective view of Fig. 7. Fig.
9 is a perspective view of the non-hygrosis module region.
10 is a side view of the piping driver.
11 is a perspective view of a piping driving unit.
12 is a sectional view of the piping driving unit.
13 and 14 are views showing the operation of the piping driver.
15 is an enlarged view of the tape peeling unit area for etching resistance shown in Fig.
16 is an enlarged view of the area of the etching resistive coating unit shown in Fig.
17 is an enlarged view of the roll sheet cutting unit area shown in Fig.
18 is an enlarged view of the speed variable sheet etching unit shown in Fig.
19 is a control block diagram of a mask manufacturing system according to an embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

FIG. 1 is a plan view of a mask manufactured by a mask manufacturing system according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a mask manufacturing system according to an embodiment of the present invention, and FIG. FIG. 4 is an enlarged view of the tape lamination unit area for etching resistance shown in FIG. 3, FIG. 5 is an enlarged view of the roll sheet etching unit shown in FIG. 3, FIG. 6 is an enlarged view of the functional non-hygroscopic waterproofing unit area shown in FIG. 3, FIG. 7 is a perspective view of the functional non-hygroscopic waterproofing unit, FIG. 8 is a rear perspective view of FIG. 7, Fig. 10 is a side view of the piping driving unit, Fig. 11 is a perspective view of the piping driving unit, Fig. 12 is a sectional view of the piping driving unit, Figs. 13 and 14 are views showing the operation of the piping driving unit, Etched Fig. 16 is an enlarged view of the area of the resistive-tape peeling unit shown in Fig. 3, Fig. 17 is an enlarged view of the area of the roll-sheet cutting unit shown in Fig. Is an enlarged view of the variable speed sheet etching unit shown in Fig. 3, and Fig. 19 is a control block diagram of a mask manufacturing system according to an embodiment of the present invention.

Referring to these drawings, the mask manufacturing system according to the present embodiment can lead to mass production of the mask 30, and the cleaning efficiency after etching can be significantly improved compared to the prior art without causing damage to the product .

As shown in FIG. 3, the mask manufacturing system according to the present embodiment, which can provide such an effect, automatically processes the mask 30 through the various processes on the first process line (a) and the second process line (b) .

For reference, although the first process line (a) and the second process line (b) are separated in Fig. 3, these lines may be formed as a single in-line. Therefore, the scope of the present invention is not limited to the shape of the drawings.

Hereinafter, the line for carrying out the first etching process for the roll sheet 10 through the roll sheet etching unit 150 is referred to as a first process line (a), and the line for performing the first etching process for the roll sheet 10 through the speed variable sheet etching unit 270 A line for carrying out the secondary etching process for the unit sheet 20 will be described as a second process line (b).

Of course, in the first process line (a) and the second process line (b), in addition to the roll sheet etching unit 150 and the speed variable sheet etching unit 270, many units or devices for the etching process are provided, We will explain below.

Prior to a specific description of the mask manufacturing system according to the present embodiment, the structure of the mask 30 will be briefly described first with reference to Fig.

The mask 30 manufactured by the mask manufacturing system according to an embodiment of the present invention includes a mask sheet 31 formed by cutting a predetermined area in a unit sheet 20 to be described later, A plurality of mask pattern portions 32 may be formed.

One side of the mask sheet 31 can be utilized as a portion to be clamped in the facility when the mask 30 is put into the process facility.

The mask pattern portion 32 is a portion formed on the mask sheet 31 by an etching process to be described later. Although the mask 30 in which a plurality of mask pattern portions 32 are formed is shown in the drawing, a single mask pattern portion 32 may be formed in the mask sheet 31.

In addition, unlike the drawing, a plurality of lines of mask pattern portions 32 may be formed on the mask sheet 31, all of which are within the scope of the present invention.

In the mask pattern portion 32, a plurality of pattern holes 33 are formed for passing a deposition material during a deposition process of a substrate used for a display of a mobile phone or the like, in particular, an OLED substrate.

In this embodiment, the pattern holes 33 formed on the mask pattern portion 32 may all have the same rectangular shape. Of course, the pattern hole 33 may be changed into a polygonal shape, a circular shape, an elliptical shape, or the like, and therefore the scope of the present invention is not limited to the shape of the drawing.

A mask manufacturing system having the structure as shown in Fig. 3 is proposed for mass production of such a mask 30, in particular, a continuous process.

As mentioned above, in addition to the roll sheet etching unit 150 and the speed variable sheet etching unit 270, the first process line (a) and the second process line (b) constituting the mask making system include many units or devices And a high-quality mask 30 can be mass-produced through these organic mechanisms.

However, since the structure of the mask manufacturing system shown in FIG. 3 is somewhat complicated, for the sake of clarity, only a few of the core structures of the mask manufacturing system shown in FIG. 3 are extracted and schematically shown in FIG. A brief structure and operation of the mask manufacturing system according to the first embodiment will be described first.

Referring to FIG. 2, in the mask manufacturing system according to the present embodiment, a roll sheet 10 is used which is wound in a roll shape for mass production of the mask 30.

The roll sheet 10 means that a sheet-like metal such as an invar material is wound in a roll shape as shown in Fig. 2 (a). For reference, invar is an alloy with 63.5% of iron and 36.5% of nickel added and having a small thermal expansion coefficient.

On both sides of the roll sheet 10 made of invar material, a photoresist (PR) is formed. Photoresist (PR) refers to a polymer resin that causes chemical changes upon irradiation with light. The negative photoresist is called a photoresist, and the photoresist disappears because the polymer solubilizes only the portion of the photoresist that the light touches. The photoresist is called a photoresist. The photoresist PR may be applied on both sides of the roll sheet 10 in advance.

In order to manufacture the mask 30 using the roll sheet 10 as described above, an etching resistance tape (tape) 13 is attached to one side of the roll sheet 10 as shown in FIG. 2 (b) lt; / RTI >

The tape 13 for etching resistance serves to resist etching so that etching does not proceed on the surface where the tape 13 for etching resistance is laminated. In this embodiment, the tape 13 for etching resistance is a UV (ultraviolet ray) tape 13.

The roll sheet 10 laminated with the tape 13 for etching resistance enters the roll sheet etching unit 150 as shown in FIG. 2 (c). Then, the first surface, which is one surface of the roll sheet 10, is etched through the roll sheet etching unit 150. In other words, approximately one half of the cross section of the roll sheet 10 is etched and cut into a groove shape.

Etching (or etching) means eroding a metal or a semiconductor such as the roll sheet 10 according to the present embodiment. The portion of the roll sheet 10 not covered with the photoresist PR is chemically etched It is removed with chemicals, that is, etching liquid (etching liquid). Since the etching resistance tape 13 is preliminarily laminated on the second surface of the roll sheet 10 during the etching process through the roll sheet etching unit 150, Only the first surface, which is one surface of the roll sheet 10, is etched.

The roll sheet 10 on which the first side is etched is taken out from the roll sheet etching unit 150 and then inverted as shown in Fig. 2 (d). That is, the first side that is etched in the drawing is turned upside down.

Then, an etching resist 14 is applied to the etched first surface region as shown in FIG. 2 (e). The first surface of the roll sheet 10 has already been etched and, for example, the ½-end face thereof is in the form of a groove, so that it is difficult to laminate the above-described etching resistance tape 13 on the roll sheet 10. 2 (e), instead of the etching resistance tape 13, an etching resistance agent 14 having the same function is applied.

After the etching resist 14 is applied to the etched first surface area of the roll sheet 10, the roll sheet 10 is cut to form a unit size sheet 20 of unit size, followed by a speed variable sheet etch The etching process for the second surface region that has not yet been etched proceeds through the unit 270.

In this case, since the unit sheet 20 cut to a unit size is of a very thin thin plate type and may not be smoothly conveyed, a carrier 50 is laminated on the unit sheet 20 to form a unit sheet 20 Is transported. The carrier 50 is made of a glass material and is laminated with the unit sheet 20 to transfer the unit sheet 20 to the speed variable sheet etching unit 270 and the rear process.

The unit sheet 20 laminated to the carrier 50 is introduced into the speed variable sheet etching unit 270 as shown in FIG. 2F. Then, the second surface, which is the remaining surface of the unit sheet 20, is etched through the speed variable type sheet etching unit 270. In other words, the remaining one-sided cross section of the unit sheet 20 is etched so that the pattern hole 33 (see FIG. 1) is formed.

After the pattern hole 33 is formed through so-called secondary etching through the speed variable type sheet etching unit 270, the etching resist 14 and the photoresist PR remaining on the unit sheet 20 are removed And then the unit sheet 20 is separated from the carrier 50 while a certain portion is cut, so that the mask 30 can be finally manufactured.

The simplified structure and operation of the mask manufacturing system described above are excerpts of only a core part of the constitutions constituting the substantial mask manufacturing system of FIG. 3, and in order to actually implement the mask manufacturing system, the roll sheet 10 is transported Means for removing the etching resistance tape 13, means for cleaning the roll sheet 10 or the unit sheet 20 before and after the etching, means for cutting the roll sheet 10 with the unit sheet 20, Various configurations, such as means for removing the etching resist 14 and the photoresist PR, must be disposed on the system first process line to operate organically with the peripheral structures. Accordingly, the detailed structure of the mask manufacturing system according to the present embodiment, and other operations, methods, and the like will be described with reference to FIGS. 3 to 19. FIG.

Referring to FIG. 3, the mask manufacturing system according to the present embodiment mainly includes a first process line (a) for carrying out a first etching process for the roll sheet 10 through a roll sheet etching unit 150, And a second process line (b) for carrying out a second etching process on the unit sheet (20) through the variable sheet etching unit (270). As mentioned above, the first process line (a) and the second process line (b) may be in-line unified and unisolated.

Hereinafter, for convenience of explanation, the first process line (a) will be described sequentially from the beginning. The first process line (a) is provided with a roll sheet supply unit 110, a tape laminating unit 120 for etching resistance, a pre-etching unit 140, a pre-cleaning and water remover 145, A sheet etching unit 150, a functional graphene hydrosulfite unit 160, a tape peeling unit 180 for etching resistance, and a roll sheet collecting unit 112 are disposed. We look at them in order.

3 and 4, the roll sheet feeding unit 110 is formed by winding a roll sheet 10 (see FIG. 2) wound in a roll form for the production of the mask 30, (a) in which the etching process is performed.

The first roll sheet drive roller 101 (see Fig. 15) and the plurality of roll sheet guide rollers 103 (see Fig. 15) are arranged to be unrolled through the roll sheet supply unit 110 and supplied to the first process line ).

The first roll sheet drive roller 101 is disposed on the first process line a between the roll sheet supply unit 110 and the roll sheet collection unit 112 as shown in Fig. 15, To the recovery unit 112 side. The first roll sheet driving roller 101 pulls the roll sheet 10 by the driving force of a motor (not shown) and moves it to the roll sheet collecting unit 112 as a post-process.

A plurality of roll sheet guide rollers 103 are disposed on the first process line (a) to guide the conveyance of the roll sheet 10. The roll sheet guide rollers 103 are disposed in the vicinity of both the first process line (a) and the second process line (b) in Fig. 3 to feed the roll sheet 10 while applying tension to the roll sheet 10 It serves as a guide.

As shown in FIG. 4, a roll sheet spreading guide 107 is provided around the roll sheet feeding unit 110 in addition to the roll sheet guide rollers 103 to feed the roll sheet 10 flatly spread. The roll sheet spreading guide 107 may be applied in the same manner to the periphery of the post-etch roll sheet feed unit 210 as shown in FIG.

A tape laminating unit 120 for etching resistance is provided behind the process of the roll sheet feeding unit 110. The tape resistance laminating unit 120 for etching resistance is disposed between the roll sheet supply unit 110 and the roll sheet etching unit 150 as shown in Figs. 3 and 4, Which is the other side of the roll sheet 10 fed from the roll sheet feeding unit 110 to the roll sheet etching unit 150 before the etching process for the etching resist tape 13 , tape, see FIG. 2). The etching resistance tape 13 is etched through only the first surface of the roll sheet 10, which is one surface of the roll sheet 10, through the roll sheet etching unit 150.

In this embodiment, the tape lamination unit 120 for etching resistance is constituted such that the roll sheet 10 is disposed on one side of the first process line (a), and the tape 13 for etching resistance in a roll- And is applied to the tape laminating unit 120 for etching resistance while being fed continuously to the second surface of the sheet 10 and laminating. As the roll sheet 10 is fed, the etching resistance tape 13 is laminated on one side of the roll sheet 10, thereby leading to a continuous process, thereby improving the productivity.

The etching resistance tape laminating unit 120 includes a tape supply roller 121, a laminating drive roller 122, a laminating driven roller 123, a tape transfer roller 124, and a protective film recovery roller 125.

The tape supply roller 121 supplies the tape 13 for etching resistance. In the case of this embodiment, a roll-shaped etching resistance tape 13 is used for the continuous process.

The laminating driving roller 122 is rotatably disposed on the second surface of the roll sheet 10 and receives the tape 13 for etching resistance supplied from the tape supply roller 121, Laminating to the surface.

The laminating driven roller 123 is a roller that is rotatably disposed on the opposite side of the laminating drive roller 122 with the roll sheet 10 therebetween. While the laminating drive roller 122 is operated by a motor or the like, the laminating driven roller 123 may be a free rotation type roller.

The tape transfer roller 124 is disposed between the tape supply roller 121 and the laminating drive roller 122 and passes through the tape 13 for etching resistance and is wound around the tape for the etching resistance 13 to the laminating drive roller 122. The application of the protective film collecting roller 125 can be facilitated by the tape transfer roller 124. [

The protective film collecting roller 125 is disposed adjacent to the tape transfer roller 124 and interacts with the tape transfer roller 124 and forms a protective film (not shown) on the tape 13 for etching resistance passed through the tape transfer roller 124 Not shown). The protective film recovered through the protective film collecting roller 125 is discarded.

A first roll sheet buffer unit 130, a pre-etching unit 140, and a pre-cleaning and water remover 145 are sequentially arranged behind the process of the tape resistance laminating unit 120 for etching resistance.

The first roll sheet buffer unit 130 is disposed between the tape laminating unit 120 for etching resistance and the pre-etching unit 130 as shown in Figs. 3 and 4, and the tape lamination unit 120 for etching resistance And the pre-etching unit 130. The pre-

The pre-etching unit 140 is disposed between the tape lamination unit 120 for etching resistance and the roll sheet etching unit 150 on the first processing line (a) as shown in FIG. 3, Is introduced into the roll sheet etching unit 150 and performs a pre-etching process for the roll sheet 10 before proceeding with the etching process.

The pre-etching unit 140 includes a pre-etching bath 141 in which an etchant is filled and a pre-etching bath 141 in which the roll sheet 10 is deeply dipped in the etching solution in the pre- And a plurality of pre-etching guide rollers 142 for guiding the conveyance of the roll sheet 10 so as to be discharged.

The roll sheet 10 is first etched through the pre-etching unit 140 once through the roll sheet etching unit 150, thereby improving the efficiency of etching. However, in some cases, the pre-etching unit 140 may be omitted in the process. A system in which the pre-etching unit 140 is omitted in this way should also fall within the scope of the present invention.

The pre-cleaning and dewatering unit 145 is disposed between the pre-etching unit 130 and the roll sheet etching unit 150, as shown in FIG. 3, to clean the roll sheet 10 on which the pre- . Since the roll sheet 10 is lightly and simply pre-etched through the pre-etching unit 140, the pre-cleaning and the water eliminator 145 are also lightly and simply cleaned.

In this embodiment, the pre-cleaning and dewatering unit 145 includes a pre-cleaner 146 for cleaning the roll sheet 10 while spraying water toward the roll sheet 10, a roll sheet 10 having been cleaned, And an air knife 147 that winds up residual water on the surface of the air knife 147. Since the pre-cleaning and dewatering unit 145 is similar to the partial structure of the functional hydrosulfite unit 160 described below, a detailed description of the pre-washing and dewatering unit 145 will be given later with reference to the functional non- And a description thereof will be omitted here.

A roll sheet etching unit 150 is provided behind the pre-cleaning and dewatering unit 145. 2, 3, and 5, the roll sheet etching unit 150 serves to perform a roughly one-half etching process on the first surface, which is one surface of the roll sheet 10.

This roll sheet etching unit 150 has a roll sheet etching cabinet 151. The roll sheet etching cabinet 151 is a cabinet structure in which a plurality of etching chambers 151a for etching the roll sheet 10 are formed. The etching chambers 151a communicate with each other.

The roll sheet etching cabinet 151 is provided with a roll sheet drawing roller portion 152 and a roll sheet drawing roller portion 153. [ The roll sheet drawing roller unit 152 is disposed in the entrance area of the roll sheet etching cabinet 151 and serves to draw the roll sheet 10 into the inside of the roll sheet etching cabinet 151. The roll sheet take-out roller unit 153 is disposed in the exit area of the roll sheet etching cabinet 151 and serves to draw (discharge) the roll sheet 10 to the outside of the roll sheet etching cabinet 151.

A plurality of first etchant spray modules 154 are provided in the roll sheet etch cabinet 151. The first etchant spray modules 154 spray the etchant in a spray manner toward the roll sheet 10 being conveyed in the roll sheet etch cabinet 151 to form an approximately 1 / 2 The etching process is carried out. The second etchant spray module 273, which will be described later, likewise applies a uniformity of the etchant spray because the first etchant spray module 154 injects the etchant by the spray method.

The functional non-wettable waterproofing unit 160 is provided in the rear of the process of the roll sheet etching unit 150. The functional gravimetric flushing water wash unit 160 is directly connected to the outlet of the roll sheet etching unit 150 as shown in FIG. 3 and FIGS. 6 to 14, and is provided with wash water or water mixed with the cleaning agent And removes the etchant or foreign matter remaining on the rolled sheet 10 after the etching process.

The functional gravity water wash unit 160 includes a unit cabinet 161 and a non-dehydrated waterproof module 162, first to third waterproof modules 167 to 169, and a moisture removal module 178 on the unit cabinet 161, As shown in Fig. The non-hydrosulfite module 162, the first to third hydroscope modules 167 to 169, and the moisture elimination module 178 having different functions and roles are mounted on the unit cabinet 161 on a position-by-position basis, When the unit 160 is implemented, it is easy to install in the system, and there is an advantage that positional movement is free. Therefore, the functional gravity hermeticidal waterproofing unit 160 can be easily applied not only to the rear portion of the roll sheet etching unit 150 but also to the rear portion of the speed variable sheet etching unit 270, as shown in Fig.

The unit cabinet 161 forms the appearance of the functional gravity hermetic washable unit 160. Since the nonwatering module 162, the first to third water wash modules 167 to 169, and the water removal module 178 are to be mounted on the unit cabinet 161 on a position-by-position basis, the unit cabinet 161 is made of metal Frame.

A foot 161a for adjusting the height and supporting the floor can be disposed at the lower end of the unit cabinet 161. [ The unit cabinet 161 is provided with means for supplying washing water or water mixed with cleaning chemicals to the non-dehydration module 162 and the first to third water wash modules 167 to 169 at a fixed amount and a constant pressure.

A first drain portion 179a and a second drain portion 179b are provided below the unit cabinet 161. [ The first drain portion 179a is disposed on the lower side of the unit cabinet 161 and drains the wash water mixed with the washing chemicals dropped by the non-hygroscopic module 162. The second drain portion 179b is disposed on the other side of the lower portion of the unit cabinet 161 and drains the water dropped by the first to third water wash modules 167 to 169.

The specific gravity water wash module 162 is provided on one side of the upper part of the unit cabinet 161 and serves to remove the etchant remaining on the roll sheet 10 having been etched using the washing water mixed with the washing chemicals. The first to third water wash modules 167 to 169 and the water removal module 178 are similar, but the non-water wash module 162 has a cabinet or a drawer structure. It is therefore easy to install or maintain internal components.

The non-hydrosulfite module 162 may include a non-hydrosulfite module housing 163, a roll sheet transfer section 164, an upper piping section 165, a lower piping section 166, and a piping driving section 170.

The non-wet-swept module housing 163 is an exterior frame having a box-shaped cabinet shape. An inflow portion 163a through which the roll sheet 10 flows is formed at one side of the non-impregnated waterproofing module housing 163. The roll sheet 10 flowing into the inflow portion 163a passes through the non-dehydration module 162, the first to third water wash modules 167 to 169, and the moisture removal module 178 in order, (See Fig. 8) of the first roll sheet drying unit 178a, and then to the first roll sheet drying unit 105. [

The roll sheet transferring portion 164 is disposed in the non-hygrosis module housing 163 and serves to transfer the roll sheet 10 having passed through the inflow portion 163a to the first to third water wash modules 167 to 169 . The roll sheet conveying portion 164 formed by a combination of a plurality of rollers and gears (including bevel gears) may be provided in the same manner in all of the first to third washable modules 167 to 169.

The upper pipe portion 165 is a pipe disposed on the upper portion of the roll sheet transfer portion 164. The upper pipe portion 165 is provided with a plurality of upper injection nozzles 165a for spraying wash water mixed with the cleaning agent toward the roll sheet 10 being transported by the action of the roll sheet transfer portion 164.

The lower piping portion 166 is a piping disposed at the lower portion of the upper piping portion 165. The lower pipe portion 166 is provided with a plurality of lower injection nozzles 166a for upwardly injecting wash water mixed with the cleaning agent toward the roll sheet 10 being transported by the action of the roll sheet transfer portion 164.

The piping driving unit 170 is connected to the upper piping unit 165 and the lower piping unit 166. The piping driving unit 170 is connected to the upper piping unit 165 and the lower piping unit 166 to secure the uniformity of the washing water mixed with the cleaning chemicals sprayed onto the roll sheet 10. [ 165 and the lower piping portion 166 in at least one direction. For example, as shown by an arrow in FIG. 10, the pipe driving part 170 can drive the upper pipe part 165 and the lower pipe part 166 forward and backward alternately. When the pipe driving part 170 drives the upper pipe part 165 and the lower pipe part 166 in an alternately forward and backward direction and the washing water mixed with the washing chemicals is injected into the roll sheet 10, And the uniformity of washing can be improved.

The piping driving unit 170 is provided in a manner that parts are coupled to the driving housing 171 coupled to one side of the unit cabinet 161. The pipe driving part 170 includes an upper slider 172 connected to the upper pipe part 165 and slidably driving the upper pipe part 165 and a lower slider 172 disposed on the upper part of the driving housing 171 and connected to the upper slider 172 An upper sliding plate 173 slidably moved in a direction in which the upper piping 165 is driven, a lower slider 174 connected to the lower piping 166 and slidably driving the lower piping 166, And a lower sliding plate 175 disposed on the upper portion of the driving housing 171 and connected to the lower slider 174 and slidingly moved in a direction in which the lower pipe portion 166 is driven.

In this structure, a slider driving unit 176 is provided in the pipe driving unit 170 to alternately drive the upper slider 172 and the lower slider 174. The slider driving unit 176 is provided in the driving housing 171 and is connected to the upper sliding plate 173 and the lower sliding plate 175 to alternately drive the upper slider 172 and the lower slider 174 do. As the slider drive unit 176 drives the upper slider 172 and the lower slider 174 alternately, the upper pipe unit 165 and the lower pipe unit 166 are alternately driven forward and backward as shown in FIG. And the wash water mixed with the cleaning agent is injected into the roll sheet 10 through such action, so that the uniformity of the cleaning can be improved.

The slider driving unit 176 is connected to the speed reducer 176a and is disposed between the upper sliding plate 173 and the lower sliding plate 175 in the driving housing 171 and a servo motor 176b for generating power, A rotating shaft 176c connected to the servo motor 176b and rotated by the operation of the servomotor 176b and an upper cam 176c connected to the upper end of the rotating shaft 176c and rotated simultaneously with the rotating shaft 176c. An upper engaging member 176e which is coupled to the upper cam plate 176d via an upper slot 173a of the upper sliding plate 173 and an upper engaging member 176e which is connected to the lower end of the rotating shaft 176c, And a lower engaging member 176g which is engaged with the lower cam plate 176f via a lower elongated hole 175a of the lower sliding plate 175 . 13 and 14 in the process of rotating the upper cam plate 176d and the lower cam plate 176f when the servo motor 176b is operated and the rotating shaft 176c is rotated, So that the upper slider 172 and the lower slider 174 can be alternately driven forward and backward.

The first to third water wash modules 167 to 169 are disposed adjacent to the non-hygroscopic module 162 on the unit cabinet 161 and are disposed adjacent to the roll sheet 10 passing through the non- And serves to remove foreign matters remaining on the roll sheet 10.

In the case of this embodiment, three first to third water wash modules 167 to 169 are disclosed. Of course, the scope of the present invention is not limited to these numerical values. The first to third water wash modules 167 to 169 are arranged adjacently to each other in the lateral direction, and the water spray intensity gradually decreases toward the later process.

All of the first to third water receiving modules 167 to 169 are disposed in the upper and lower portions of the roll sheet 10 being conveyed in the water wash module housings 167a to 169a and the water wash module housings 167a to 169a, And a plurality of water injectors 167b-169b for spraying the water toward the roll sheet 10 at the location. The number of water injectors 167b to 169b provided in the first to third water receiving modules 167 to 169 is different from that of the water injectors 167b to 169b provided in the first to third water receiving modules 167 to 169 The roles are the same. Since the water injectors 167b to 169b are washed in the form of spraying water as in the specific gravity water wash module 162, there is no unevenness and it is advantageous in ensuring uniformity.

The water removal module 178 is disposed adjacent to the third water wash module 169 on the unit cabinet 161 and remains on the roll sheet 10 with respect to the roll sheet 10 past the third water wash module 169 It removes the water as much as possible.

Such a water removal module 178 is disposed at the top and bottom of the roll sheet 10 being transported in the water removal module housing 178a and in the water removal module housing 178a, And a plurality of air knives 178b for spraying straight air toward the air outlet 178b. The residue on the roll sheet 10 can be removed because strong air (air) is ejected from the straight exit of the air knife 178b to the roll sheet 10.

The first roll sheet drying unit 105, the etching resistance tape peeling unit 180, and the roll sheet collecting unit 112 are disposed in order behind the functional specific gravity water wash unit 160.

3, the first roll sheet drying unit 105 is disposed behind the functional non-hygroscopic wiping unit 160 and includes a roll sheet 10 that has been cleaned through the functional grabbing unit 160 It plays a role of drying. The first roll sheet drying unit 105 may be hot air drying, and the roll sheet 10 passing through the first roll sheet drying unit 105 takes no water at all.

3 and 15, the etching resistance tape peeling unit 180 is disposed behind the process of the roll sheet etching unit 150 and includes a tape 13 for etching resistance which has been laminated for the primary etching process, . The tape peeling unit 180 for etching resistance may include a peeling light irradiator 181 and a tape stripper 183 for etching resistance.

The stripping light irradiator 181 serves to irradiate light toward the tape 13 for etching resistance so that the tape 13 for etching resistance is stripped from the roll sheet 10. The light at this time may be ultraviolet light.

The etching resistance tape stripper 183 is disposed behind the stripping light irradiator 181 and removes the tape 13 for etching resistance which is peeled off from the roll sheet 10 by the action of the stripping light irradiator 181 . The tape 13 for etching resistance, which is recovered through the etching resistance tape holder 183, is discarded.

The etching resistance tape rewinder 183 includes a tape peeling drive roller 184 for peeling the etching resistance tape 13 from the roll sheet 10 while being contacted with the etching resistance tape 13, A tape removing roller 186 for winding and recovering an etching resistance tape 13 to be peeled off, a tape peeling driven roller 185 rotatably disposed on the opposite side of the tape peeling drive roller 184, And a tape guide roller 187 disposed between the tape peeling drive roller 184 and the tape recovery roller 186 and guiding the tape to be recovered.

Since the etching resistance tape stripper 183 is driven in a roll type and the tape 13 for etching resistance is stripped and recovered, the process does not need to be interrupted, thereby contributing to the improvement of productivity.

3 and 15, the roll sheet recovery unit 112 is disposed on the first process line (a) on the opposite side of the roll sheet supply unit 110, and the first surface of the roll sheet 10 And serves to recover the rolled sheet 10 which is etched and the etching resistance tape 13 peels off. Of course, as described above, the roll sheet recovery unit 112 may be connected to the post-etch roll sheet supply unit 210 and used as a single functional device.

On the other hand, in the second process line (b), a roll sheet supply unit 210, an etching resistive coating unit 220, a second roll sheet drying unit 231, an etching resistance hardening A unit 235, a roll sheet cutting unit 250, a carrier laminating unit 260, and a speed variable sheet etching unit 270 are disposed. We look at them in order.

3 and 16, the post-etch roll sheet feeding unit 210 feeds the roll sheet 10, which has been subjected to the etching process for the first surface through the first process line (a), to the second process line ( b).

When the roll sheet feeding unit 210 after the etching feeds the roll sheet 10 to the second process line b, the surface that has been etched in the first process line (a) faces upward. And the roll sheet 10 on which the etching process for the first surface has been completed is supplied to the second process line b by the action of the second roll sheet drive roller 102 (see Fig. 17). In other words, the second roll sheet drive roller 102 drives the roll sheet 10 of the roll sheet supply unit 210 after etching toward the roll sheet cutting unit 250. The second roll sheet drive roller 102 has the same role as the first roll sheet drive roller 101 described above, that is, serves to pull the roll sheet 10 by the driving force of the motor.

A second roll sheet buffer unit 218 is provided behind the process of the post-etch roll sheet feeding unit 210. The second roll sheet buffer unit 218 is disposed between the post-etch roll sheet supply unit 210 and the etching resistive coating unit 220, as shown in FIGS. 3 and 16, And controls the process speed between the etching resistive coating unit 210 and the etching resistive coating unit 220.

An etching resistive coating unit 220 is provided behind the second roll sheet buffer unit 218. 2, 3, and 16, the etching resistive agent applying unit 220 is provided on the first surface of the roll sheet 10 on which the 1/2 etching process is completed on the first process line (a) And serves to apply the resistive etching resist 14. The first surface of the roll sheet 10 has already been etched and, for example, the ½-end face thereof is in the form of a groove, so that it is difficult to laminate the above-described etching resistance tape 13 on the roll sheet 10. 2 (e), instead of the etching resistance tape 13, an etching resistance agent 14 having the same function is applied.

A second roll sheet drying unit 231 and an etching resistance hardening unit 235 are disposed in order behind the process of the etching resistive coating unit 220. [

The second roll sheet drying unit 231 is disposed between the etching resistive coating unit 220 and the etching resistive curing unit 235 as shown in Figs. 3 and 16, and the etching resistive agent 14 And serves to dry the applied roll sheet 10. The second roll sheet drying unit 231 may also be hot air dried as in the first roll sheet drying unit 105 described above.

The etching resistive curing unit 235 is disposed behind the process of the etching resistive coating unit 220 and serves to cure the etching resistive material 14. The etch resist 14 applied to the first side of the roll sheet 10 through the etch resist application unit 220 can be of the gel type because if it is not cured it can flow down during the second etching So that the etching resistive agent 14 applied to the first surface through the etching resistive hardening unit 235 can be hardened.

On the second process line (b), a roll sheet cutting unit 250 is provided behind the process of the etching resistive curing unit 235. The roll sheet cutting unit 250 is disposed behind the process of the etching resistive coating unit 220 as shown in FIGS. 3 and 17, and cuts the roll sheet 10 into a unit-size unit sheet 20 . The unit size may be a cell phone size or a monitor size.

17, the roll sheet cutting unit 250 is schematically shown. The roll sheet cutting unit 250 includes a cutter 251 for cutting the rolled sheet 10 while being driven up and down, And a cutting die 252 for supporting the roll sheet 10 of the object.

A spread roller 253 for spreading the roll sheet 10 can be rotatably disposed in front of the cutting die 252 so that the cutting efficiency can be enhanced while being cut to an exact size.

During the cutting operation of the roll sheet 10, the conveyance of the roll sheet 10 may be temporarily stopped. At this time, in order to compensate the progressive flow of the roll sheet 10 in the previous process, (Not shown).

The carrier laminating unit 260 is disposed behind the process of the roll sheet cutting unit 250 as shown in Figs. 3 and 17 and is provided with a carrier 50 , and laminating the carrier.

Since the roll sheet 10 is of a roll to roll type, the unit sheet 20 in the form of a thin film is difficult to be conveyed by itself. Therefore, the carrier 50 is laminated on the unit sheet 20 to transport the unit sheet 20 while supporting the unit sheet 20. The carrier 50 may be a glass material and is laminated to the top of the unit sheet 20. An intermediate transfer roller 262 is disposed between the carrier laminating unit 260 and the sheet etch unit 270.

The sheet etch unit 270 is disposed behind the process of the carrier laminating unit 260, as shown in FIGS. 2, 3 and 18, and performs an etching process on the second side of the unit sheet 20 It plays a role. In the state of the roll sheet 10, the first etching process proceeds through the roll sheet etching unit 150 and the second etching process proceeds through the sheet etching unit 270 in the state of the unit sheet 20, The above-described pattern hole 33 (see FIG. 1) can be formed only on the substrate 20.

On the other hand, the sheet etching unit 260 applied to this embodiment is a speed variable sheet etching unit 270 in which the speed is accelerated at the entrance and exit where the carrier 50 is introduced and discharged.

When the speed is accelerated at the entrance and exit through which the carrier 50 is introduced and discharged, defects at the entrance and exit can be reduced. In fact, considering the fact that the defective rate is high in the inlet and outlet area where the unit sheet 20 is introduced and discharged, there is an advantage that the defective rate can be reduced by applying the speed variable sheet etching unit 270. The rate variable sheet etching unit 270 includes a sheet-shaped unit body portion 271, a carrier moving module 272, a plurality of second etchant spray modules 273, and a carrier acceleration module 274.

The sheet-like unit body portion 271 forms the appearance of the speed variable type sheet etching unit 270. The sheet-like unit body portion 271 has a cabinet shape.

The carrier moving module 272 is provided in the sheet-like unit body portion 271 and serves to move the carrier 50. [ The carrier transfer module 272 may be applied as a roller resistant to the etchant.

A plurality of second etchant spray modules 273 are provided in the sheet-shaped unit body portion 271 and are arranged in the sheet-like unit body portion 271 to move the etching solution toward the unit sheet 20 being moved through the carrier moving module 272 Spraying method. The uniformity of the etchant spraying can be ensured because the etchant is sprayed by the spraying method.

The carrier acceleration module 274 is disposed at least at one of the inlet portion 271a through which the carrier 50 flows and the outlet portion 271b through which the carrier 50 discharges and the carrier 50 is moved relatively quickly It accelerates. The carrier acceleration module 274 is applied to both the inlet portion 271a through which the carrier 50 flows and the outlet portion 271b through which the carrier 50 is discharged. However, the carrier acceleration module 274 may be applied to only one of the inflow portion 271a and the discharge portion 271b. The carrier acceleration module 274 includes an inlet side carrier acceleration module 275 and an outlet side carrier acceleration module 276.

The inlet-side carrier acceleration module 275 is provided on the inflow portion 271a side of the sheet-shaped unit body portion 271 and is provided on the side of the carrier 50 that is introduced into the sheet- And accelerates the speed relatively faster than the speed of the carrier shifting module 272.

The discharge side carrier acceleration module 276 is provided on the side of the discharge portion 271b of the sheet type unit body portion 271 and is provided with a carrier 50 ) Relative to the speed of the carrier shifting module 272. In this case,

Both the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 can be applied as rollers. The position sensing unit 278 and the controller 280 are further provided for the operation of the inlet side carrier acceleration module 275 and the exhaust side carrier acceleration module 276.

The position sensing unit 278 detects whether the carrier 50 on which the unit sheet 20 is laminated reaches the inlet 271a or the outlet 271b. The position sensing unit 278 may be, for example, a proximity sensor, and may be disposed on the inner and outer sides of the sheet-like unit body portion 271.

The controller 280 controls the operation of the carrier acceleration module 274, that is, the operation of the inlet side carrier acceleration module 275 and the outlet side carrier acceleration module 276, based on the detection signal of the position sensing portion 278 . That is, when the carrier 50 on which the unit sheet 20 is laminated reaches the inlet 271a or the discharge portion 271b, control is performed so that the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 are operated. The speed of the carrier 50 that flows into the sheet-shaped unit body portion 271 and the speed of the carrier 50 that is discharged from the sheet-shaped unit body portion 271 are relatively quickly accelerated so as to prevent defects from occurring therein.

The controller 280 performing such a role may include a central processing unit 281 (CPU), a memory 282 (MEMORY), and a support circuit 283 (SUPPORT CIRCUIT).

The central processing unit 281 may be one of various computer processors that can be industrially applied to control the operation of the carrier acceleration module 274 based on the sensing signal of the position sensing unit 278 in this embodiment.

The memory 282 (MEMORY) is connected to the central processing unit 281. The memory 282 may be a computer readable recording medium and may be located locally or remotely and may be any of various types of storage devices such as, for example, a random access memory (RAM), a ROM, a floppy disk, May be at least one or more memories.

The support circuit 283 (SUPPORT CIRCUIT) is coupled with the central processing unit 281 to support the typical operation of the processor. Such a support circuit 283 may include a cache, a power supply, a clock circuit, an input / output circuit, a subsystem, and the like.

In this embodiment, the controller 280 controls the operation of the carrier acceleration module 274 based on the sensing signal of the position sensing section 278, and such a series of control processes and the like can be stored in the memory 282. [ Typically, a software routine may be stored in memory 282. The software routines may also be stored or executed by other central processing units (not shown).

Although processes according to the present invention are described as being performed by software routines, it is also possible that at least some of the processes of the present invention may be performed by hardware. As such, the processes of the present invention may be implemented in software executed on a computer system, or in hardware such as an integrated circuit, or in combination of software and hardware.

The functional non-wettable water sealing unit 160 provided in the first process line (a) described above is also applied to the downstream of the process of the speed variable type sheet etching unit 270. [ The functional non-hygroscopic unit 160 applied to the rear of the speed variable sheet etching unit 270 is also directly connected to the outlet of the variable speed sheet etching unit 270, So as to remove the etchant or foreign matter remaining on the unit sheet 20 after the etching process. The description of the functional non-wettable waterproofing unit 160 disposed behind the process of the variable speed sheet etching unit 270 is replaced with the above description, and redundant description is avoided.

Hereinafter, the operation of the mask manufacturing system according to the present embodiment will be described with reference to Figs. 2 and 3. Fig.

First, the operation is on the first process line (a). The roll sheet 10 is unwound from the roll sheet feeding unit 110 and fed to the post-process. Next, in the tape resistance laminating unit 120 for etching resistance, the etching resistance tape 13 is laminated on the second surface, which is one surface of the roll sheet 10, as shown in FIG. 2 (b).

Next, the roll sheet 10 to which the tape 13 for etching resistance is laminated is pre-etched via the pre-etching unit 140 and then cleaned and dried through the pre-cleaning and the water remover 145. Then, the first surface, which is one surface of the roll sheet 10, is etched, that is, the first surface is etched through the roll sheet etching unit 150. In other words, approximately one half of the cross section of the roll sheet 10 is etched and cut into a groove shape.

The primary etched roll sheet 10 is removed from the roll sheet etch unit 150 and washed and dried through the functional graphene hydrosulfide unit 160 and then dried and etched through the tape peeling unit 180 for etch resistance After the tape 13 is peeled off, it is collected in the roll sheet collecting unit 112.

Next, the operation is on the second process line (b). After the etching, the roll sheet feeding unit 210 feeds the primary-etched roll sheet 10 to a post-process. At this time, the etched side faces upward.

The roll sheet 10 fed through the post-etch roll sheet feed unit 210 is coated with an etching resist 14 on the etched side, i.e., the first side, through the etch resist application unit 220. Then, the applied resistive agent 14 is cured while passing through the second roll sheet drying unit 231 and the etching resistive curing unit 235.

The roll sheet 10 is then processed through a roll sheet cutting unit 250 into a unit sized unit sheet 20 and then the carrier 50 is laminated to one side in the carrier laminating unit 260.

The unit sheet 20 laminated with the carrier 50 is led into the speed variable sheet etching unit 270 by the action of the carrier 50. Then, the second surface, which is the remaining surface of the unit sheet 20, is etched through the speed variable type sheet etching unit 270. In other words, the remaining one-sided cross section of the unit sheet 20 is etched so that the pattern hole 33 (see FIG. 1) is formed.

After the pattern hole 33 is formed through so-called secondary etching through the speed variable type sheet etching unit 270, the etching resist 14 and the photoresist PR remaining on the unit sheet 20 are removed And then the unit sheet 20 is separated from the carrier 50 while a certain portion is cut, so that the mask 30 can be finally manufactured.

According to the present embodiment having the structure and function as described above, mass production of the mask 30 can be achieved, and the cleaning efficiency after etching can be significantly improved compared to the conventional art without causing damage to the product.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore intended that such modifications or alterations be within the scope of the claims appended hereto.

10: roll sheet 13: tape for etching resistance
14: etching resistance 20: unit sheet
30: mask 31: mask sheet
32: pattern part 33: pattern hole
50: carrier 110: roll sheet feeding unit
112: Roll sheet collecting unit
120: Tape laminating unit for etching resistance
130: first roll sheet buffer unit 140: pre-etching unit
145: pre-cleaning and dewatering device 150: roll sheet etching unit
160: Functional gravity water wash unit 162: Specific gravity water washing module
170: Piping drive part 180: Tape peeling unit for etching resistance
210: a roll sheet feeding unit after etching 220: an etching resistive agent dispensing unit
231: second roll sheet drying unit 235: etching resistance hardening unit
250: roll sheet cutting unit 260: carrier laminating unit
270: speed variable type sheet etching unit 278: position detecting unit
280: controller

Claims (14)

A roll sheet etching unit for carrying out an etching process for a roll sheet wound in a roll form for the production of a mask; And
Removing the etchant or foreign matter remaining on the roll sheet on which the etch process is completed using the wash water or water mixed with the cleansing chemicals, directly connected to the outlet of the roll sheet etching unit on the process line where the etching process is performed, And a functional gravity water wash unit,
The functional non-wettable waffle unit includes:
Unit cabinets;
A specific gravity water washing module provided at one side of the unit cabinet for removing etchant remaining on the roll sheet on which the etching process is completed by using washing water mixed with the washing chemicals; And
And a water wash module disposed adjacent to the non-wiping module on the unit cabinet, for removing foreign matter remaining on the roll sheet using the water with respect to the roll sheet past the non-wiping module,
The non-
A non-hydrosulfite module housing formed at one side of the inflow portion into which the roll sheet flows;
A roll sheet conveying unit disposed in the non-wettable water module housing, for conveying the roll sheet passed through the inlet unit;
An upper pipe portion disposed at an upper portion of the roll sheet transfer portion and having a plurality of upper injection nozzles for spraying wash water mixed with the cleaning agent toward the roll sheet being conveyed under the action of the roll sheet transfer portion;
A lower pipe portion disposed at a lower portion of the upper pipe portion and having a plurality of lower injection nozzles for upwardly injecting cleaning water mixed with the cleaning agent toward the roll sheet being transported by the action of the roll sheet transport portion; And
A pipe driving part connected to the upper pipe part and the lower pipe part and driving the upper pipe part and the lower pipe part in at least one direction for ensuring the uniformity of injection of the cleaning water mixed with the cleaning agent sprayed on the roll sheet, / RTI >
The pipe-
A drive housing coupled to one side of the unit cabinet;
An upper slider connected to the upper pipe portion and slidably driving the upper pipe portion;
An upper sliding plate disposed on the upper portion of the driving housing and connected to the upper slider, the upper sliding plate being slidable in a direction in which the upper piping portion is driven;
A lower slider connected to the lower pipe portion and slidably driving the lower pipe portion;
A lower sliding plate disposed at an upper portion of the drive housing and connected to the lower slider, the lower sliding plate being slidably moved in a direction in which the lower pipe portion is driven; And
And a slider driving unit provided on the driving housing and connected to the upper sliding plate and the lower sliding plate, for alternately driving the upper slider and the lower slider. delete delete delete delete The method according to claim 1,
The slider driving unit includes:
A servo motor to which a speed reducer is connected and generates power;
A rotating shaft disposed in the drive housing between the upper sliding plate and the lower sliding plate and connected to the servo motor and rotated by the operation of the servo motor;
An upper cam plate connected to an upper end of the rotating shaft and rotated coaxially with the rotating shaft;
An upper coupling member coupled to the upper cam plate via an upper slot of the upper sliding plate;
A lower cam plate connected to a lower end of the rotating shaft and rotated coaxially with the rotating shaft; And
And a lower engaging member coupled to the lower cam plate via a lower slot of the lower sliding plate. The method according to claim 1,
Wherein the water wash module is a plurality of water wash modules disposed laterally adjacent to each other and arranged so that the jet intensity of the water gradually decreases toward a later process. 8. The method of claim 7,
Each of said plurality of wash modules comprising:
SuSE module housing; And
And a plurality of water injectors disposed at the top and bottom of the roll sheet being conveyed in the wash module housing and for spraying the water from the position toward the roll sheet. The method according to claim 1,
The functional non-wettable waffle unit includes:
Further comprising a water removal module disposed adjacent to the water wash module on the unit cabinet and for removing wind water remaining on the roll sheet with respect to the roll sheet past the water wash module, . 10. The method of claim 9,
The water removal module includes:
A dewatering module housing; And
And a plurality of air knives disposed at upper and lower portions of the roll sheet being conveyed in the moisture removal module housing and for ejecting air in a direction from the corresponding position toward the roll sheet. / RTI > The method according to claim 1,
A first drain disposed at a lower side of the unit cabinet, for draining mixed washing water mixed with the cleaning agent dropped by the non-wiping module; And
Further comprising a second drain portion disposed on the other side of the lower portion of the unit cabinet and adapted to drain the water dropped by the water washing module. The method according to claim 1,
Further comprising a roll sheet drying unit disposed downstream of the functional non-wettable waterproofing unit and drying the washed roll sheet via the functional non-wettable waterproofing unit. The method according to claim 1,
A roll sheet feeding unit for feeding the roll sheet before the etching process for the first surface of the roll sheet is performed and a roll sheet feeding unit for feeding the roll sheet to the roll sheet etching unit, And a tape laminating unit for etching resistance for laminating an etching resistance tape resistant to etching to the second surface which is the other surface. 14. The method of claim 13,
The tape lamination unit for etching resistance comprises:
Wherein the roll sheet is disposed on one side of a first process line to be transferred from the roll sheet supply unit to the roll sheet etching unit and the roll resistance film is formed on the second surface of the roll sheet Wherein the tape lamination unit is an etching resistance tape laminating unit during continuous feeding and laminating.

Images