KR102242860B1 - Fine Metal Mask manufacturing system and method - Google Patents

Abstract

The present invention discloses a system and a method for manufacturing a fine metal mask (FMM), capable of uniformly forming a pattern hole on a mask sheet when manufacturing the fine metal mask for producing a high-resolution OLED display panel. The disclosed system for manufacturing the fine metal mask includes: a roll sheet wound in a roll shape, and having a photoresist formed on both sides thereof; a roll sheet supply unit for supplying the roll sheet to a first process line in which an etching process is performed; a first etching unit provided on one side of the first process line to perform an etching process on a first surface that is one surface of the roll sheet; and a second etching unit for performing an etching process on a second surface that is an opposite surface of the roll sheet, wherein pattern holes of the photoresist are arranged along a virtual line inclined at a predetermined angle with respect to a virtual center line located at a center of the photoresist.

Description

Fine Metal Mask manufacturing system and method TECHNICAL FIELD

The present invention relates to an apparatus and method for manufacturing a fine metal mask, and more particularly, in manufacturing a fine metal mask (FMM) for manufacturing a high-resolution OLED (Organic Light Emitting Diodes) display panel, on a mask sheet The present invention relates to a system and method for manufacturing a fine metal mask that enables a pattern hole to be uniformly formed.

As a technology for forming pixels in the OLED manufacturing process, the FMM (Fine Metal Mask) method is mainly used in which an organic material is deposited at a desired location by attaching a thin metal mask to a substrate.

In order to manufacture a mask through the mask manufacturing system, the mask sheet, which is the raw material of the mask, must go through several processes in stages to manufacture the mask.

Among the various processes for manufacturing a mask, an etching process for forming a pattern hole on the mask sheet may be included. When performing such an etching process, both sides of the mask sheet are simultaneously etched to form a pattern hole. Simultaneous surface etching process can be applied.

However, when a pattern hole is formed by performing simultaneous etching process on both sides, there is a very high possibility that the etching defect rate will increase due to structural or method limitations. For example, there may be a problem in that a pattern hole is not uniformly generated in a metal plate of one sheet according to an etching process, and a deviation occurs.

In the case of ultra-high-definition OLED, the current QHD quality is 500-600 PPI (pixel per inch), and the pixel size reaches about 30-50㎛, and 4K UHD, 8K UHD high-definition is higher than this, ~860 PPI, ~1600 PPI, etc. Will have a resolution of. In this way, in consideration of the pixel size of the ultra-high-definition OLED, the alignment error between cells should be reduced to about several µm, and the error beyond this leads to product failure, so the yield may be very low.

Accordingly, there is a need for a mask manufacturing system capable of reducing an etching defect rate while increasing productivity for a fine metal mask.

As a related prior patent document, there is Korean Laid-Open Patent Publication No. 10-2018-0127257 (published on November 28, 2018), and the document discloses a multi-structure ultra-fine metal mask having a frame sheet and a method for manufacturing the same. It is described.

It is an object of the present invention to provide a system and method for manufacturing a fine metal mask that enables pattern holes to be uniformly formed on a mask sheet when manufacturing a fine metal mask (FMM) for manufacturing a high-resolution OLED display panel.

A fine metal mask manufacturing system according to an embodiment of the present invention for achieving the above object includes: a roll sheet wound in a roll shape and having photoresist formed on both sides; A roll sheet supply unit supplying the roll sheet to a first processing line in which an etching process is performed; A first etching unit provided on one side of the first process line and performing an etching process on a first surface, which is one surface of the roll sheet; And a second etching unit performing an etching process on a second surface, which is the other surface of the roll sheet, wherein the pattern holes of the photoresist are at a predetermined angle with respect to a virtual center line located at the center of the photoresist. It may be arranged and formed along an inclined virtual line.

The reinforcing adhesive material may be applied to both surfaces of the fine metal plate, which has an interfacial adhesive force with the photoresist higher than that of the fine metal plate.

In the fine metal plate, the pattern of the through holes is not formed along a virtual line inclined at a predetermined angle with respect to a virtual center line positioned at the center of the fine metal plate attached to correspond to the photoresist. It may be uniformly formed at regular intervals along parallel virtual lines.

The pattern holes of the photoresist are formed without a change in the Y position as the X coordinate and the Y coordinate for each pattern hole increase, based on the center coordinate at the center of the photoresist. Can be.

The pattern holes of the photoresist are based on the center coordinate at the center of the photoresist, and as the X and Y coordinates of each pattern hole increase, the X position (x change value) increases according to the following equation. , Y position can be formed without change.

Here, α represents the target slope (inclination angle), x represents the active area of the pattern, x'represents the X position of the pattern to be moved, and y represents the active area of the pattern, y'represents the Y position of the pattern to be moved.

The reinforced adhesive material, a filler made of particles having a size of 2nm to 500nm; And a binder fixing the filler.

The adhesive strength between the reinforced adhesive material and the photoresist may be 1.5 kgf/in to about 2.5 kgf/in.

The adhesive force between the reinforced adhesive material and the micrometal plate may be 2.0 kgf/in to about 3.0 kgf/in.

On the other hand, a method for manufacturing a fine metal mask according to an embodiment of the present invention for achieving the above object is a method for manufacturing a fine metal mask for forming a pattern of through holes in a fine metal plate, comprising the steps of: (a) providing the fine metal plate. ; (b) applying a reinforcing adhesive material to both surfaces of the fine metal plate; (c) bonding a photoresist on both sides of the fine metal plate by the reinforced adhesive material; (d) forming pattern holes in the photoresist located on both sides of the fine metal plate; And (e) forming a pattern of the through holes in the fine metal plate by introducing an etching solution into the pattern holes of the photoresist and etching the fine metal plate, wherein in step (d) The pattern holes of the photoresist may be formed by being arranged along a virtual line inclined at a predetermined angle with respect to a virtual center line positioned at the center of the photoresist.

In the step (b), the reinforcing adhesive material having an interfacial adhesive strength with the photoresist higher than that of the fine metal plate may be applied on both surfaces of the fine metal plate.

In the step (e), the pattern of the through holes is not formed along a virtual line inclined at a predetermined angle with respect to a virtual center line positioned at the center of the fine metal plate attached to the photoresist. It may be uniformly formed at regular intervals along an imaginary line parallel to the center line.

In the step (d), the pattern holes of the photoresist increase in X position as the X coordinate and Y coordinate for each pattern hole increase, based on the center coordinate at the center of the photoresist, It can be formed without changing the Y position.

In the step (d), the pattern holes of the photoresist are based on the center coordinates at the center of the photoresist, and as the X and Y coordinates of each pattern hole increase, the X position is expressed in the following equation. The change increases accordingly, and the Y position can be formed without change.

Here, α represents the target slope (inclination angle), x represents the active area of the pattern, x'represents the X position of the pattern to be moved, and y represents the active area of the pattern, y'represents the Y position of the pattern to be moved.

The reinforced adhesive material, a filler made of particles having a size of 2nm to 500nm; And a binder fixing the filler.

The present invention can prevent the size of the through hole for the fine metal mask from being significantly non-uniform, so that it can be formed uniformly during manufacture.

The fine metal mask manufacturing system 100 according to the present invention can lead to mass production of the fine metal mask 10, and in particular, by separating the etching process on both sides and proceeding individually, the etching defect rate can be significantly reduced. I can.

The fine metal mask manufacturing system 100 according to the present invention performs several processes on a first process line (a) for etching one side of a fine metal mask and a second process line (b) for etching the other side of the fine metal mask. The fine metal mask 10 can be automatically manufactured through sequentially.

In addition, due to the action of the reinforcing adhesive material, as the amount of the etching solution penetrating into the interface between the fine metal plate and the photoresist in the metal etching step is reduced, the degree of non-uniform additional etching may be reduced. That is, as the size of the through hole becomes more uniform, the deposition accuracy may be improved.

1A is a view showing a plan view of a fine metal mask manufactured by a fine metal mask manufacturing system according to an exemplary embodiment of the present invention.
1B is a view showing a plan view of a fine metal mask manufactured before applying the fine metal mask manufacturing system according to an exemplary embodiment of the present invention.
1C is a diagram illustrating an example of correcting an arrangement of pattern holes of a photoresist according to an exemplary embodiment of the present invention.
2 is a schematic configuration diagram of a system for manufacturing a fine metal mask according to an exemplary embodiment of the present invention.
3 is a block diagram of a system for manufacturing a fine metal mask according to an exemplary embodiment of the present invention.
4 is an enlarged view of an area of the tape laminating unit for etching resistance shown in FIG. 3.
5 is an enlarged view of the first etching unit shown in FIG. 3.
6 is an enlarged view of the functional specific gravity washing unit area shown in FIG. 3.
7 is an enlarged view of an area of the tape peeling unit for etching resistance shown in FIG. 3.
FIG. 8 is an enlarged view of an area of the etching resistor coating unit shown in FIG. 3.
9 is an enlarged view of an area of the roll sheet cutting unit shown in FIG. 3.
10 is an enlarged view of the second etching unit shown in FIG. 3.
11 is a diagram illustrating an operation flowchart illustrating a method of manufacturing a fine metal mask according to an exemplary embodiment of the present invention.
12 is a block diagram showing the configuration of a reinforced adhesive material for bonding a fine metal mask and a photoresist according to an embodiment of the present invention.

Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only this embodiment is intended to complete the disclosure of the present invention, and the general knowledge in the technical field to which the present invention pertains. It is provided to completely inform the scope of the invention to the possessor, and the invention is only defined by the scope of the claims. Accordingly, in some embodiments, well-known process steps, well-known device structures, and well-known techniques have not been described in detail in order to avoid obscuring interpretation of the present invention. The same reference numerals refer to the same elements throughout the specification.

In the drawings, the thicknesses are enlarged in order to clearly express various layers and regions. Like reference numerals are attached to similar parts throughout the specification. When a part of a layer, film, region, plate, etc. is said to be "on" another part, this includes not only the case where the other part is "directly above", but also the case where there is another part in the middle. Conversely, when one part is "directly above" another part, it means that there is no other part in the middle. Further, when a part such as a layer, film, region, plate, etc. is said to be "under" another part, this includes not only the case where the other part is "directly below", but also the case where there is another part in the middle. Conversely, when one part is "right below" another part, it means that there is no other part in the middle.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc. It may be used to easily describe the correlation between the device or components and other devices or components. Spatially relative terms should be understood as terms including different directions of the device during use or operation in addition to the directions shown in the drawings. For example, if an element shown in the figure is turned over, an element described as “below” or “beneath” of another element may be placed “above” another element. Accordingly, the exemplary term “below” may include both directions below and above. The device may be oriented in other directions, and thus spatially relative terms may be interpreted according to the orientation.

In the present specification, when a part is said to be connected to another part, this includes not only a case in which it is directly connected, but also a case in which it is electrically connected with another element interposed therebetween. In addition, when a part includes a certain component, this means that other components may be further included rather than excluding other components unless otherwise specified.

In the present specification, terms such as first, second, and third may be used to describe various elements, but these elements are not limited by the terms. The terms are used for the purpose of distinguishing one component from other components. For example, without departing from the scope of the present invention, a first component may be referred to as a second or third component, and similarly, a second or third component may be alternately named.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used with meanings that can be commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not interpreted ideally or excessively unless explicitly defined specifically.

Hereinafter, an all-solid-state composite electrode based on a metal support, a method of manufacturing the same, and an all-solid secondary battery having the same according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1A is a view showing a plan view of a fine metal mask manufactured by a fine metal mask manufacturing system according to an exemplary embodiment of the present invention, and FIG. 1B is manufactured before applying the fine metal mask manufacturing system according to an exemplary embodiment of the present invention. 1C is a view showing an example of correcting the arrangement of pattern holes of a photoresist according to an embodiment of the present invention, and FIG. 2 is a fine metal mask according to an embodiment of the present invention. A schematic configuration diagram of a manufacturing system, FIG. 3 is a configuration diagram of a system for manufacturing a fine metal mask according to an embodiment of the present invention, and FIG. 4 is an enlarged view of an area of the tape laminating unit for etching resistance shown in FIG. 3. 5 is an enlarged view of the first etching unit shown in FIG. 3, FIG. 6 is an enlarged view of the functional specific gravity washing unit area shown in FIG. 3, and FIG. 7 is an etching resistance tape peeling unit area shown in FIG. Is an enlarged view, FIG. 8 is an enlarged view of the area of the etching resistance agent coating unit shown in FIG. 3, FIG. 9 is an enlarged view of the area of the roll sheet cutting unit shown in FIG. 3, and FIG. It is an enlarged view of the 2nd etching unit.

Referring to these drawings, the fine metal mask manufacturing system 100 according to the embodiment of the present invention can lead to mass production of the fine metal mask 10, and in particular, by separating the etching process on both sides, By proceeding, the etching defect rate can be significantly reduced.

The system 100 for manufacturing a fine metal mask according to an embodiment of the present invention capable of providing such an effect is formed by sequentially passing through several processes on the first process line (a) and the second process line (b) as shown in FIG. 3. The metal mask 10 can be automatically manufactured.

For reference, although the first process line (a) and the second process line (b) are separated in FIG. 3, these lines may form a unified inline. Accordingly, FIGS. 2 and 3 are merely illustrative as one of the embodiments according to the present invention, and are not limited thereto, and the scope of the present invention is not limited to the shape of the drawings.

However, hereinafter, for convenience, a line for performing the primary etching process on the roll sheet 30 through the first etching unit 150 is referred to as a first process line (a), and a unit through the second etching unit 270 The line for performing the secondary etching process on the sheet 20 will be referred to as a second process line (b), and will be described separately.

Of course, in the first process line (a) and the second process line (b), in addition to the first etching unit 150 and the second etching unit 270, many units or devices for an etching process may be provided.

Prior to a detailed description of a system for manufacturing a fine metal mask according to an exemplary embodiment of the present invention, a structure of the fine metal mask 10 will be briefly described with reference to FIG. 1A.

Referring to FIG. 1A, a fine metal mask 10 manufactured by a fine metal mask manufacturing system 100 according to an embodiment of the present invention is a mask sheet formed by cutting a certain area in a unit sheet 20 to be described later. 11 and a plurality of mask pattern portions 12 formed on the mask sheet 11.

One side of the mask sheet 11 may be used as a part clamped in the facility when the mask 10 is introduced into a process facility.

The mask pattern portion 12 is a portion formed on the mask sheet 11 by an etching process to be described later. Although the drawing shows a fine metal mask 10 in which a plurality of mask pattern portions 12 are formed, a single mask pattern portion 12 may be formed on the mask sheet 11.

In addition, unlike the drawings, several rows of mask pattern portions 12 may be formed on the mask sheet 11, but it should be said that all of these matters fall within the scope of the present invention.

The mask pattern part 12 is formed with a plurality of pattern holes 13 for passing the deposition material through the deposition process of a substrate used for a display such as a mobile phone, particularly an OLED substrate. At this time, the plurality of pattern holes 13 are not formed along an imaginary line inclined at a certain angle with respect to the imaginary center line located at the center of the fine metal mask 10, but at regular intervals along a imaginary line parallel to the center line. It is formed uniformly.

In an embodiment of the present invention, the pattern holes 13 formed on the mask pattern part 12 may all have the same square shape. Of course, since the pattern hole 13 may be changed to a polygon, a circle, an oval, etc., the scope of the present invention is not limited to the shape of the drawing.

In order to manufacture such a fine metal mask 10, in particular, in order to mass-produce in a continuous method, a system for manufacturing a fine metal mask having a structure as shown in FIG. 3 is provided.

However, before applying the fine metal mask manufacturing system 100 according to an exemplary embodiment of the present invention, pattern holes formed in the fine metal mask are not uniformly formed as shown in FIG. 1B, and variations occur. In other words, the fine metal mask manufactured by the existing fine metal mask manufacturing system has an inclination in which the arrangement direction of the pattern holes is inclined due to the effect of rolling, etc., depending on the metal properties, and a certain angle based on the virtual center line located in the center. It is arranged and formed along an inclined imaginary line, causing deviation.

Accordingly, in an exemplary embodiment of the present invention, pattern holes of a photoresist (PR) are finely formed in such a manner that the arrangement of pattern holes in such a fine metal mask is uniformly formed at regular intervals as shown in the plan view shown in FIG. 1A. It corrects to have an arrangement opposite to that of the pattern holes of the metal mask. That is, the pattern holes of the photoresist are formed to be arranged along an imaginary line L inclined at a certain angle with respect to the virtual center line C located at the center of the photoresist, as shown in FIG. 1C. . This correction is referred to as incline correction in the present invention. 1C is a diagram illustrating an example of correcting an arrangement of pattern holes of a photoresist according to an exemplary embodiment of the present invention. Therefore, when the etchant is introduced into the pattern hole of the photoresist PR in a state in which the photoresist PR whose arrangement of the pattern holes is corrected is applied to the roll sheet 30 of the fine metal mask, as shown in FIG. It is possible to obtain a fine metal mask in which a plurality of the same uniform pattern holes are formed.

Meanwhile, when pattern holes having an arrangement opposite to that of FIG. 1B are formed in the fine metal mask, the photoresist is exposed and developed so that the pattern holes of the photoresist have an arrangement opposite to that of the pattern holes of the fine metal mask in the same way. will be. That is, if the pattern holes of the fine metal mask are formed along a virtual line (slope is negative) inclined at a certain angle with respect to the virtual center line, the pattern holes are at a certain angle with respect to the virtual center line located at the center of the photoresist. It is exposed and developed so that it is formed along an inclined virtual line (the slope is positive). For example, based on the center coordinate at the center of the photoresist, as the X coordinate and Y coordinate for each pattern hole increase, the X position changes according to the following equation (1), and the Y position does not change. It is exposed and developed to form.

In Equation 1, α represents the target slope (inclination angle), x represents the active area of the outermost pattern, x'represents the X position of the pattern to be moved, and y represents the region of the outermost pattern. (active area), y'represents the Y position of the pattern to be moved. That is, x represents a minus x coordinate value (-x) and a plus x coordinate value (+x). For example, when the coordinate values of the outermost pattern holes are (-100, 50) and (100, 50), respectively, the area value of the x pattern is 200. Similarly, y is a pattern area, for example, when the coordinate values of the outermost pattern holes are (50, -50) and (100, 50), respectively, the area value of the y pattern is 100.

In the above-described embodiment, the pattern hole of the photoresist PR is formed by exposure and development through a photo mask, but the pattern hole is not limited thereto. Can be carried out so that they are formed. In the following embodiment, an example in which pattern holes are formed in the photoresist PR by exposure and development of the photomask will be described.

As described above, in a state in which the photoresist (PR) whose size of the pattern holes is corrected is applied to the roll sheet 30, the arrangement of the pattern holes is uniform at regular intervals as shown in FIG. 1A by the following process. A fine metal mask can be manufactured.

As mentioned above, in the first process line (a) and the second process line (b) constituting the fine metal mask manufacturing system, in addition to the first etching unit 150 and the second etching unit 270, many units for an etching process or Devices are provided, and fine metal masks 10 of good quality can be mass-produced through their organic mechanisms.

However, since the structure of the fine metal mask manufacturing system of FIG. 3 is somewhat complicated, in order to aid understanding, referring to FIG. 2, which is a schematic diagram by extracting only some of the core configurations of the configuration of the fine metal mask manufacturing system of FIG. A schematic structure and operation of a system for manufacturing a fine metal mask according to an embodiment of the present invention will be briefly described.

2, a fine metal mask manufacturing system 100 according to an embodiment of the present invention includes a roll sheet 30 formed by being wound in a roll shape for mass production of the fine metal mask 10. sheet).

The roll sheet 30 means that a metal, for example, a thin plate-shaped metal made of an invar material is wound in a roll shape, as shown in FIG. 2(a). For reference, invar is an alloy in which 63.5% of iron and 36.5% of nickel are added and has a small coefficient of thermal expansion.

Photoresist PR is formed on both surfaces of the roll sheet 30 made of an invar material. Photoresist (PR) refers to a polymer resin that causes chemical changes when irradiated with light. The negative type photoresist is that the polymer resin is insolubilized only in the part exposed to the light and the photoresist remains, and the case where the photoresist disappears due to the solubilization of the polymer only in the part exposed to the light is called a positive photoresist. The photoresist PR may be previously applied to both surfaces of the roll sheet 30.

In addition, as shown in FIG. 1C, the photoresist PR increases the X position and the Y position as the X coordinate and Y coordinate for each pattern hole increase, based on the center coordinate at the center, as shown in FIG. 1C. It can be formed without any change. For example, in the pattern holes of the photoresist PR, inclined at a certain angle based on the center coordinate (0,0) at the center of the photoresist, that is, based on the virtual center line C located at the center. (The slope may be formed to be arranged along a positive (+)) virtual line (L).

In addition, the photoresist PR is inclined at a certain angle based on the center coordinate (0,0) at the center, that is, the virtual center line C located at the center (the tilt is negative (-)). It may be formed to be arranged along the line (L).

The roll sheet supply unit 110 supplies the roll sheet 30 to a first process line where an etching process is performed.

The first etching unit 150 is provided on one side of the first process line, and performs an etching process on the first side, which is one side of the roll sheet.

The second etching unit 270 performs an etching process on the second surface, which is the other surface of the roll sheet 30.

In order to manufacture the fine metal mask 10 using the roll sheet 30 as described above, an etching resistance tape 33 is attached to one side of the roll sheet 30 as shown in FIG. 2 (b), That is, it can be laminated.

The etching resistance tape 33 serves to resist etching so that etching does not proceed on the side on which the etching resistance tape 33 is laminated. In an embodiment of the present invention, the etching resistance tape 33 may be a UV (Ultraviolet Ray) tape 13.

The roll sheet 30 on which the etching resistance tape 33 is laminated is introduced into the first etching unit 150 as shown in FIG. 2C. In addition, a first surface, which is one surface of the roll sheet 30, is etched through the first etching unit 150. In other words, roughly half the cross section of the roll sheet 30 is etched and cut into a groove shape.

As known in the art, etching (or etching process) refers to eroding a metal or semiconductor such as the roll sheet 30 according to an embodiment of the present invention. ) Part (pattern hole of photoresist) is removed with a chemical agent, that is, an etching solution (corrosive solution). In the case of the embodiment of the present invention, since the etching resistance tape 13 is pre-laminated on the second side of the roll sheet 30, the second side of the roll sheet 30 is applied during the etching process through the first etching unit 150. The surface area is not etched, and only the first side, which is one side, of the roll sheet 30 is etched.

After the roll sheet 30 on which the first surface is etched is taken out from the first etching unit 150, it is inverted as shown in (d) of FIG. 2. That is, it is turned over so that the etched first surface on the drawing is placed on top.

Then, the etching resistor 14 is applied to the etched first surface area as shown in FIG. 2E. Since the first surface of the roll sheet 30 has already been etched and, for example, a half cross section is in a groove shape, it is difficult to laminate the above-described etching resistance tape 33 thereon. Therefore, instead of the etching resistance tape 33 as shown in FIG. 2E, the etching resistance agent 14 serving the same function is applied.

After the etching resistance 14 is applied to the etched first surface area of the roll sheet 30, the roll sheet 30 is cut to form a unit sheet 20 of a unit size, and thereafter, a second etching unit An etching process is performed on the second surface region that has not yet been etched through 270.

At this time, since the unit sheet 20 cut into a unit size is a very thin plate shape and thus transfer may not be smooth, a carrier 50 is laminated on the unit sheet 20 to form the unit sheet 20 through the carrier 50. ) Is transferred. The carrier 50 is made of a glass material, and is laminated with the unit sheet 20 to transfer the unit sheet 20 to the second etching unit 270 and a rear process thereof.

In this way, the unit sheet 20 laminated to the carrier 50 is introduced into the second etching unit 270 as shown in (f) of FIG. 2. Then, the second surface, which is the remaining surface of the unit sheet 20, is etched through the second etching unit 270. In other words, the pattern hole 13 (refer to FIG. 1) is formed by etching the remaining half-section of the unit sheet 20. Hereinafter, the pattern hole 13 of the fine metal mask 10 may be referred to as a “pattern of through hole(s)” to distinguish it from the pattern hole of the photoresist PR.

After the pattern hole 13 is formed through so-called secondary etching through the second etching unit 270, the etching resistance 14 and the photoresist PR remaining buried in the unit sheet 20 are removed, Subsequently, the unit sheet 20 may be separated from the carrier 50 while being partially cut, thereby finally manufacturing the fine metal mask 10.

The simple structure of the fine metal mask manufacturing system described above and its actions are extracted from only a core part of the configurations that make up the actual fine metal mask manufacturing system of FIG. 3, and in order to implement the fine metal mask manufacturing system, the roll A means for transferring the sheet 30, a means for removing the tape 33 for etching resistance, a means for washing the roll sheet 30 or unit sheet 20 before and after etching, and a unit sheet 20 for the roll sheet 30 ), a means for removing the etching resistor 14 and the photoresist PR, etc. are arranged on the first process line of the system to operate organically with the surrounding components. Accordingly, a detailed structure of a fine metal mask manufacturing system according to an exemplary embodiment of the present invention and other actions and methods thereof will be described below with reference to FIGS. 3 to 6.

Referring to FIG. 3, the mask manufacturing system according to the present embodiment is largely provided with a first process line (a) for performing a primary etching process on the roll sheet 30 through the first etching unit 150, and 2 It includes a second process line (b) for performing a secondary etching process for the unit sheet 20 through the etching unit 270. As mentioned above, the first process line (a) and the second process line (b) may be unseparated in-line (in-line).

Hereinafter, for convenience of description, description will be made sequentially from the front of the first process line (a). The first process line (a) includes a roll sheet supply unit 110, an etching resistance tape laminating unit 120, a pre-etching unit 140, a pre-cleaning and dewatering device 145, and 1 An etching unit 150, a functional specific gravity washing unit 160, an etching resistance tape peeling unit 180, and a roll sheet recovery unit 112 are disposed.

As shown in FIGS. 3 and 4, the roll sheet supply unit 110 includes a roll sheet 30 (see FIG. 2) formed by being wound in a roll shape for manufacturing the fine metal mask 10. It is supplied to the first process line (a) where the secondary etching process is performed.

A first roll sheet driving roller 101 (refer to FIG. 7) and a plurality of roll sheet guide rollers 103 in order to be supplied to the first process line a by unwinding the roll sheet 30 through the roll sheet supply unit 110. ) Is provided.

The first roll sheet driving roller 101 is disposed on the first process line (a) between the roll sheet supply unit 110 and the roll sheet collecting unit 112 as shown in FIG. It serves to drive toward the recovery unit 112. The first roll sheet driving roller 101 pulls the roll sheet 30 with a driving force of a motor (not shown) and moves it toward the roll sheet collecting unit 112 which is a post-process.

A plurality of roll sheet guide rollers 103 are disposed on the first process line (a), and guide the transport of the roll sheet 30. The roll sheet guide rollers 103 are arranged in various places in both the first process line (a) and the second process line (b) in FIG. 3 to impart tension to the roll sheet 30 while transferring the roll sheet 30. It serves as a guide.

Referring to FIG. 4, in addition to the roll sheet guide roller 103, a roll sheet spreading guide 107 for spreading and feeding the roll sheet 30 flatly is provided around the roll sheet supply unit 110. The roll sheet spreading guide 107 may be applied in the same form to the periphery of the roll sheet supply unit 210 after etching as shown in FIG. 8.

A tape laminating unit 120 for etching resistance is provided behind the process of the roll sheet supply unit 110. The tape laminating unit 120 for etching resistance is disposed between the roll sheet supply unit 110 and the first etching unit 150, as shown in FIGS. 3 and 4, and the first side of the roll sheet 30 An etching resistance tape 33 that resists etching on the second side, which is the other side of the roll sheet 30, which is released from the roll sheet supply unit 110 and supplied to the first etching unit 150 before the etching process is performed. , tape, see FIG. 2). The etching resistance tape 33 allows only the first surface of the roll sheet 30 to be etched through the first etching unit 150.

In this embodiment, the tape laminating unit 120 for etching resistance is a roll in which the roll sheet 30 is disposed on one side of the first process line a, and is transferring the tape 33 for etching resistance in a roll shape. It is applied to the tape laminating unit 120 for etching resistance during transfer to continuously supply and laminate the second surface of the sheet 30. As described above, by laminating the tape 33 for etching resistance on one surface of the roll sheet 30 during the transfer process, a continuous process can be induced, and productivity can be improved.

The tape laminating unit 120 for etching resistance includes a tape supply roller 121, a laminating drive roller 122, a laminating driven roller 123, a tape transfer roller 124, and a protective film recovery roller 125.

The tape supply roller 121 supplies a tape 13 for etching resistance. In the case of the embodiment of the present invention, a roll-shaped etching resistance tape 33 is used to implement a continuous process.

The laminating driving roller 122 is rotatably disposed on the second side of the roll sheet 30, and receives the etching resistance tape 33 supplied from the tape supply roller 121 to receive the second side of the roll sheet 30. It serves to laminate the cotton.

The laminating driven roller 123 is a roller that is rotatably disposed on the opposite side of the laminating driving roller 122 with the roll sheet 30 interposed therebetween. While the laminating driving roller 122 is operated by a motor or the like, the laminating driven roller 123 may be a free rotation type roller.

The tape transfer roller 124 is disposed between the tape supply roller 121 and the laminating drive roller 122 to pass through the etching resistance tape 13, and the etching resistance tape supplied from the tape supply roller 121 ( 13) serves to transfer to the laminating driving roller 122. Due to the tape transfer roller 124, the application of the protective film recovery roller 125 may be facilitated.

The protective film recovery roller 125 is disposed adjacent to the tape transfer roller 124 to interact with the tape transfer roller 124, and the protective film on the tape 13 for etching resistance passed through the tape transfer roller 124 ( Not shown). The protective film recovered through the protective film recovery roller 125 is discarded.

A first roll sheet buffer unit 130, a pre-etching unit 140, and a pre-cleaning and dewatering device 145 are sequentially disposed behind the process of the etching resistance tape laminating unit 120.

The first roll sheet buffer unit 130 is disposed between the etching resistance tape laminating unit 120 and the pre-etching unit 130, as shown in FIGS. 3 and 4, and the etching resistance tape laminating unit 120 ) And the pre-etching unit 130 serves to adjust the process speed.

As shown in FIG. 3, the pre-etching unit 140 is disposed between the tape laminating unit 120 for etching resistance and the first etching unit 150 on the first process line (a), and the roll sheet 30 Is introduced into the first etching unit 150 and serves to perform pre-etching on the roll sheet 30 before proceeding with the etching process.

Such a pre-etching unit 140 is provided in a pre-etching bath 141 and a pre-etching bath 141 filled with an etchant, and the roll sheet 30 is dipped in the etchant in the pre-etching bath 141. It may include a plurality of pre-etching guide rollers 142 for guiding the transport of the roll sheet 30 so that it can be discharged.

After the roll sheet 30 passes through the pre-etching unit 140 once, the etching efficiency may be improved by being firstly etched through the first etching unit 150. However, in some cases, the pre-etching unit 140 may be omitted in the process, and the system in which the pre-etching unit 140 is omitted is also within the scope of the present invention.

The pre-cleaning and dewatering device 145 is disposed between the pre-etching unit 130 and the first etching unit 150, as shown in FIG. 3, and cleans and dries the roll sheet 30 on which the pre-etching process has been performed. It serves to remove. Since the roll sheet 30 is lightly and simply pre-etched through the pre-etching unit 140, the pre-cleaning and dewatering device 145 is also lightly and simply cleaned.

In an embodiment of the present invention, the pre-washing and dewatering device 145 includes a pre-washer 146 for washing the roll sheet 30 while spraying water toward the roll sheet 30, and a roll sheet ( It may include an air knife 147 for removing water remaining on the surface of 30) with wind. Since the pre-cleaning and water removal device 145 is similar to a part of the structure of the functional specific gravity cleaning unit 160 to be described below, for a detailed description of the pre-cleaning and water removal device 145, refer to the functional specific gravity cleaning unit 160 to be described later. It will be described below, and the description is omitted here.

The first etching unit 150 is provided after the process of the pre-cleaning and dewatering device 145. As shown in FIGS. 2, 3 and 5, the first etching unit 150 serves to perform an approximately 1/2 etching process on the first surface, which is one side of the roll sheet 30.

This first etching unit 150 includes a roll sheet etching cabinet 151. The roll sheet etching cabinet 151 has a cabinet structure, and a plurality of etching rooms 151a for performing an etching process for the roll sheet 30 are formed therein. The etching rooms 151a communicate with each other.

The roll sheet etching cabinet 151 is provided with a roll sheet take-in roller part 152 and a roll sheet take-out roller part 153. The roll sheet lead-in roller portion 152 is disposed in the entrance region of the roll sheet etching cabinet 151 and serves to lead the roll sheet 30 into the inside of the roll sheet etching cabinet 151. Further, the roll sheet take-out roller unit 153 is disposed in the exit area of the roll sheet etching cabinet 151 and serves to take out (discharge) the roll sheet 30 to the outside of the roll sheet etching cabinet 151.

A plurality of first etchant spray modules 154 are provided in the roll sheet etching cabinet 151. The first etchant spray modules 154 spray the etchant toward the roll sheet 30 being transferred in the roll sheet etching cabinet 151 in a spray manner to approximately 1/ 2 Let the etching process proceed. The same applies to the second etchant spray module 273 to be described later, but since the plurality of first etchant spray modules 154 spray the etchant in a spray manner, uniformity of etchant spraying can be ensured.

A functional specific gravity washing unit 160 is provided behind the process of the first etching unit 150. The functional specific gravity washing unit 160 is directly connected to the outlet of the first etching unit 150, as shown in FIGS. 3 and 6, and the etching process is performed using washing water or water mixed with a washing chemical. It serves to remove the etching liquid or foreign matter remaining on the completed roll sheet 30.

The functional specific gravity washing unit 160 includes a unit cabinet 161, a specific gravity washing module 162 on the unit cabinet 161, first to third washing modules 167 to 169, and a moisture removing module 178. It has a structure to be mounted integrally. In this way, the specific gravity washing module 162, the first to third washing modules 167 to 169, and the moisture removal module 178 having different functions and roles are mounted on the unit cabinet 161 for each location to be one functional specific gravity washing. When implementing the unit 160, there is an advantage in that it is easy to install in the system as well as freely move the position. Therefore, the functional specific gravity washing unit 160 can be easily applied not only to the rear of the first etching unit 150 but also to the rear of the second etching unit 270 as shown in FIG. 3.

The unit cabinet 161 forms the appearance of the functional specific gravity washing unit 160. The unit cabinet 161 is made of metal with excellent rigidity because the specific gravity washing module 162, the first to third washing modules 167 to 169, and the moisture removing module 178 must be mounted in each position. It is made with a frame.

A foot 161a for height adjustment and ground support may be disposed at the lower end of the unit cabinet 161. The rear of the unit cabinet 161 is provided with means for supplying the washing water or water mixed with the washing chemical toward the specific gravity washing module 162 and the first to third washing modules 167 to 169 at a fixed quantity and a positive pressure.

A first drain part 179a and a second drain part 179b are provided under the unit cabinet 161. The first drain part 179a is disposed at a lower side of the unit cabinet 161 and receives and drains the washing water mixed with the washing agent falling from the specific gravity washing module 162. In addition, the second drain part 179b is disposed on the other side of the lower part of the unit cabinet 161 and receives and drains water falling from the first to third flushing modules 167 to 169.

The specific gravity washing module 162 is provided on one side of the upper portion of the unit cabinet 161 and serves to remove the etching liquid remaining on the roll sheet 30 on which the etching process has been completed using the washing water mixed with the washing chemical. The first to third flushing modules 167 to 169 and the water removing module 178 are the same, but the specific gravity flushing module 162 has a cabinet or drawer structure. Therefore, it is easy to install or maintain the internal components.

The specific gravity washing module 162 may include a specific gravity washing module housing 163, a roll sheet transfer unit 164, an upper pipe part 165, a lower pipe part 166, and a pipe driving part 170.

The specific gravity flushing module housing 163 is an exterior frame having a box-type cabinet shape. An inlet part 163a through which the roll sheet 30 is introduced is formed at one side of the specific gravity washing module housing 163. The roll sheet 30 flowing into the inlet 163a passes through the specific gravity washing module 162, the first to third washing modules 167 to 169, and the moisture removing module 178 in order, and then the moisture removing module housing. It is discharged to the discharge part 178c of (178a), and it is directed to the 1st roll sheet drying unit 105 after that.

The roll sheet transfer unit 164 is disposed in the specific gravity washing module housing 163 and serves to transfer the roll sheet 30 that has passed through the inlet unit 163a to the first to third washing modules 167 to 169. . The roll sheet conveying part 164 formed by a combination of a plurality of rollers and gears (including bevel gears) may be provided in the first to third washing modules 167 to 169 in the same shape.

The upper pipe part 165 is a pipe disposed above the roll sheet transfer part 164. The upper pipe part 165 is provided with a plurality of upper spray nozzles 165a for spraying the washing water mixed with the cleaning agent downward toward the roll sheet 30 being transferred by the action of the roll sheet transfer part 164.

The lower pipe part 166 is a pipe disposed under the upper pipe part 165. The lower pipe part 166 is provided with a plurality of lower spray nozzles 166a for spraying the washing water mixed with the cleaning agent upward toward the roll sheet 30 being transferred by the action of the roll sheet transfer part 164.

Meanwhile, the pipe driving unit 170 is connected to the upper pipe part 165 and the lower pipe part 166, and the upper pipe part ( It serves to drive the 165 and the lower pipe portion 166 in at least one direction. For example, the pipe driving part 170 may alternately drive the upper pipe part 165 and the lower pipe part 166 forward and backward. In this way, when the pipe driving unit 170 alternately drives the upper pipe part 165 and the lower pipe part 166 forward and backward, and the washing water mixed with the cleaning agent is sprayed to the roll sheet 30, the occurrence of stains is prevented. And improve the uniformity of washing.

The pipe driving unit 170 is provided in a form in which components are coupled to a driving housing 171 coupled to one side of the unit cabinet 161. The pipe drive unit 170 is connected to the upper pipe part 165 and is disposed on the upper slider 172 for sliding the upper pipe part 165 and is disposed on the driving housing 171 and connected to the upper slider 172 And, an upper sliding plate 173 sliding in a direction in which the upper pipe part 165 is driven, a lower slider 174 connected to the lower pipe part 166 and slidingly driving the lower pipe part 166, It is disposed above the driving housing 171, is connected to the lower slider 174, and includes a lower sliding plate 175 sliding in the direction in which the lower pipe portion 166 is driven.

In this structure, the slider driving unit 176 is provided in the pipe driving unit 170 to alternately drive the upper slider 172 and the lower slider 174. The slider driving unit 176 is provided in the driving housing 171 and is connected to the upper sliding plate 173 and the lower sliding plate 175, and serves to alternately drive the upper slider 172 and the lower slider 174. do. As the slider driving part 176 alternately drives the upper slider 172 and the lower slider 174, the upper pipe part 165 and the lower pipe part 166 can be alternately driven forward and backward. , Through this action, since the washing water mixed with the washing agent is sprayed to the roll sheet 30, it is possible to improve the uniformity of washing.

The slider driving unit 176 is connected to the reducer 176a and is disposed between the servomotor 176b generating power and the upper sliding plate 173 and the lower sliding plate 175 in the driving housing 171, The rotating shaft 176c connected to the servomotor 176b and rotated by the operation of the servomotor 176b, and the upper cam connected to the upper end of the rotating shaft 176c and rotated cooperatively with the rotating shaft 176c. The plate 176d and the upper coupling member 176e coupled to the upper cam plate 176d via the upper long hole 173a of the upper sliding plate 173, and the lower end of the rotating shaft 176c are rotated. It includes a lower cam plate (176f) co-rotating with the ting shaft (176c), and a lower coupling member (176g) coupled to the lower cam plate (176f) via the lower long hole (175a) of the lower sliding plate (175). I can. With this configuration, when the servomotor 176b is operated and the rotating shaft 176c is rotated, the upper cam plate 176d and the lower cam plate 176f can each be rotated, thereby leading to an action of rotating the upper slider. The 172 and the lower slider 174 may be alternately driven forward and backward.

The first to third flushing modules 167 to 169 are disposed adjacent to the specific gravity flushing module 162 on the unit cabinet 161, and use water for the roll sheet 30 that has passed the specific gravity flushing module 162. It serves to remove foreign matter remaining on the roll sheet 30.

In the case of an embodiment of the present invention, three first to third flushing modules 167 to 169 may be included. Of course, the scope of the present invention is not limited to the numerical values thereof. The first to third flushing modules 167 to 169 are disposed adjacent to each other in the lateral direction, and the spraying strength of water gradually weakens as the process proceeds.

All of the first to third flushing modules 167 to 169 are disposed at the top and bottom of the roll sheet 30 being transferred within the flush module housings 167a to 169a and the flush module housings 167a to 169a. It may include a plurality of water injectors (167b ~ 169b) for spraying the water toward the roll sheet 30 at the position. The number of water sprayers 167b to 169b provided in the first to third flushing modules 167 to 169 is different, but the number of water sprayers 167b to 169b provided at the first to third flushing modules 167 to 169 is different. The role is the same. Like the specific gravity washing module 162, since the water sprayers 167b to 169b wash in a form that sprays water, stains do not occur, and it is advantageous to ensure uniformity.

The moisture removal module 178 is disposed adjacent to the third flush module 169 on the unit cabinet 161, and remains on the roll sheet 30 with respect to the roll sheet 30 that has passed the third flush module 169. It plays a role in removing moisture as possible with the wind.

The moisture removal module 178 is disposed on the top and bottom of the moisture removal module housing 178a and the roll sheet 30 being transferred in the moisture removal module housing 178a, and the roll sheet 30 is removed at the corresponding position. It includes a plurality of air knives 178b (air knives) for injecting straight air toward. Since strong wind (air) is sprayed from the straight outlet of the air knife 178b and is directed to the roll sheet 30, residual water on the roll sheet 30 may be removed.

A first roll sheet drying unit 105, an etching resistance tape peeling unit 180, and a roll sheet recovery unit 112 are sequentially disposed behind the process of the functional specific gravity washing unit 160.

The first roll sheet drying unit 105 is disposed at the rear of the process of the functional specific gravity washing unit 160, as shown in FIG. 3, and passes through the functional specific gravity washing unit 160 to the roll sheet 30 that has been washed. It serves to dry. The first roll sheet drying unit 105 may be hot air drying, and the roll sheet 30 that has passed the first roll sheet drying unit 105 takes on a state where there is no moisture.

The etching resistance tape peeling unit 180 is disposed behind the process of the first etching unit 150, as shown in FIGS. 3 and 7, and the etching resistance tape 33 that has been laminated for the first etching process. It serves to peel. The etching resistance tape peeling unit 180 may include a peeling light irradiation unit 181 and an etching resistance tape recovery unit 183.

The peeling light irradiator 181 serves to irradiate light toward the etching resistance tape 33 so that the etching resistance tape 33 is peeled off from the roll sheet 30. The light at this time may be ultraviolet rays.

The etching resistance tape recovery device 183 is disposed behind the process of the peeling light irradiator 181, and recovers the etching resistance tape 33 peeled off from the roll sheet 30 by the action of the peeling light irradiation device 181. Plays a role. The etching resistance tape 33 recovered through the etching resistance tape recovery device 183 is discarded.

The etching resistance tape recovery device 183 includes a tape peeling drive roller 184 for peeling the etching resistance tape 33 from the roll sheet 30 while rotating in contact with the etching resistance tape 33, and a roll sheet 30. ) Interposed between the tape peeling driven roller 185 rotatably disposed on the opposite side of the tape peeling drive roller 184, and a tape recovery roller 186 for winding and recovering the peeling etching resistance tape 33 And, it is disposed between the tape peeling drive roller 184 and the tape recovery roller 186, may include a tape guide roller 187 for guiding the recovered tape.

As described above, since the etching resistance tape recovery device 183 is driven in a roll type and peels and recovers the etching resistance tape 33, there is no need to stop the process, thereby contributing to productivity improvement.

The roll sheet recovery unit 112 is disposed opposite the roll sheet supply unit 110 on the first process line (a), as shown in FIGS. 3 and 7, and the first side of the roll sheet 30 is It serves to recover the roll sheet 30 from which the etching resisting tape 33 has been peeled off. Of course, as previously described, the roll sheet recovery unit 112 may be connected to the roll sheet supply unit 210 after etching to be used as a functional device.

On the other hand, in the second process line (b), after etching along the direction in which the process proceeds, the roll sheet supply unit 210, the etching resistance coating unit 220, the second roll sheet drying unit 231, and the etching resistance are cured. A unit 235, a roll sheet cutting unit 250, a carrier laminating unit 260, and a second etching unit 270 are disposed.

After etching, the roll sheet supply unit 210 transfers the roll sheet 30 on which the etching process for the first surface is completed through the first process line (a) as shown in FIGS. 3 and 8 to a second process line ( b) serves to supply.

When the roll sheet supply unit 210 supplies the roll sheet 30 to the second process line b after etching, the etched side of the first process line a faces upward. In addition, the roll sheet 30 on which the etching process for the first surface has been completed is supplied to the second process line b by the action of the second roll sheet driving roller 102 (refer to FIG. 9). In other words, the second roll sheet driving roller 102 drives the roll sheet 30 of the roll sheet supply unit 210 toward the roll sheet cutting unit 250 after etching. The second roll sheet driving roller 102 has the same role as the first roll sheet driving roller 101 described above, that is, a role of pulling and moving the roll sheet 30 by the driving force of the motor.

After etching, a second roll sheet buffer unit 218 is provided behind the process of the roll sheet supply unit 210. The second roll sheet buffer unit 218 is disposed between the roll sheet supply unit 210 and the etching resistor coating unit 220 after etching, as shown in FIGS. 3 and 8, and the roll sheet supply unit after etching It serves to control the process speed between 210 and the etching resistance coating unit 220.

An etching resistance agent application unit 220 is provided behind the process of the second roll sheet buffer unit 218. As shown in Figs. 2, 3, and 8, the etching resistance coating unit 220 is applied to the first surface of the roll sheet 30 on which the 1/2 etching process has been completed on the first process line (a). It serves to apply the resistive etching resistance 14. Since the first surface of the roll sheet 30 has already been etched and, for example, a half cross section is in a groove shape, it is difficult to laminate the above-described etching resistance tape 33 thereon. Therefore, instead of the etching resistance tape 33 as shown in FIG. 2E, the etching resistance agent 14 serving the same function is applied.

A second roll sheet drying unit 231 and an etching resistance curing unit 235 are sequentially disposed behind the process of the etching resistance coating unit 220.

The second roll sheet drying unit 231 is disposed between the etching resistance coating unit 220 and the etching resistance curing unit 235, as shown in FIGS. 3 and 8, and the etching resistance 14 It serves to dry the applied roll sheet 30. The second roll sheet drying unit 231 may also be hot air drying, similar to the first roll sheet drying unit 105 described above.

The etching resistance curing unit 235 is disposed behind the process of the etching resistance applying unit 220 and serves to cure the etching resistance 14. The etching resistance 14 applied to the first surface of the roll sheet 30 through the etching resistance application unit 220 may be a gel type, but if not cured, it may flow down during the secondary etching. The etching resistor 14 applied to the first surface through the etching resistor curing unit 235 may be cured.

The roll sheet cutting unit 250 is provided behind the process of the etching resistance curing unit 235 on the second process line b. The roll sheet cutting unit 250 is disposed behind the process of the etching resistance application unit 220, as shown in FIGS. 3 and 9, and cuts the roll sheet 30 into a unit sheet 20 of a unit size. Plays a role. The unit size can vary, such as the size of a mobile phone or a monitor.

In the drawing of FIG. 9, a roll sheet cutting unit 250 is shown very schematically, and the roll sheet cutting unit 250 is driven up and down while a cutter 251 (cutter) for cutting the roll sheet 30 being transferred, and cutting It may include a cutting die 252 that supports the roll sheet 30 of the subject.

The spreading roller 253 spreading the roll sheet 30 may be rotatably disposed in front of the cutting die 252 so as to be cut to an accurate size while increasing the cutting efficiency.

During the cutting operation of the roll sheet 30, the transfer of the roll sheet 30 may be temporarily stopped. At this time, the electric buffer roll 254 is a spreading roller to compensate for the flow of the roll sheet 30 in progress in the previous process. It can be placed in front of 253.

The carrier laminating unit 260 is disposed behind the process of the roll sheet cutting unit 250, as shown in FIGS. 3 and 9, and the carrier 50 is attached to the unit sheet 20 for transport of the unit sheet 20. , the carrier) serves to laminating.

Since the roll sheet 30 is a roll-to-roll method, it is not unreasonable to transfer, but it is difficult to transfer the unit sheet 20 in the form of a thin thin film alone. Accordingly, the carrier 50 is laminated to the unit sheet 20 to support the unit sheet 20 while transporting the unit sheet 20. The carrier 50 may be made of glass, and is laminated on the top of the unit sheet 20. An intermediate moving roller 262 is disposed between the carrier laminating unit 260 and the sheet etching unit 270.

The sheet etching unit 270 is disposed behind the process of the carrier laminating unit 260, as shown in FIGS. 2, 3, and 10, and performs an etching process on the second surface of the unit sheet 20. Plays a role. In the state of the roll sheet 30, the first etching process is performed through the first etching unit 150, and the second etching process is performed through the sheet etching unit 270 in the state of the unit sheet 20. Only in the (20) the above-described pattern hole (33, pattern hole, see FIG. 1) can be formed.

On the other hand, the sheet etching unit 260 applied to the embodiment of the present invention is a speed-variable second etching unit 270 in which the speed is accelerated at the inlet and outlet through which the carrier 50 is introduced and discharged.

In this way, when the speed is accelerated at the entrance and exit through which the carrier 50 is introduced and discharged, defects at the entrance and exit can be reduced. In fact, considering that the defective rate is high in the inlet and outlet regions through which the unit sheet 20 is introduced and discharged, there is an advantage of reducing the defective rate by applying the second etching unit 270. The second etching unit 270 includes a sheet-shaped unit body portion 271, a carrier moving module 272, a plurality of second etchant spray modules 273, and a carrier acceleration module 274.

The sheet-like unit body portion 271 forms the exterior of the second etching unit 270. The sheet-like unit body portion 271 has a cabinet shape.

The carrier moving module 272 is provided in the sheet-shaped unit body portion 271 and serves to move the carrier 50. The carrier moving module 272 may be applied as a roller that is resistant to the etching solution.

A plurality of second etchant spray modules 273 are provided in the sheet-like unit body part 271, and the etchant is supplied from the sheet-like unit body part 271 to the moving unit sheet 20 through the carrier moving module 272. It plays a role of spraying by spraying. Since the etchant is sprayed by a spray method, uniformity of the etchant spraying can be ensured.

The carrier acceleration module 274 is disposed on at least one side of the inlet portion 271a through which the carrier 50 is introduced and the outlet portion 271b through which the carrier 50 is discharged, and relatively quickly moves the carrier 50 at the corresponding position. It plays a role of accelerating. In an embodiment of the present invention, the carrier acceleration module 274 is applied to both the inlet portion 271a through which the carrier 50 is introduced and the outlet portion 271b through which the carrier 50 is discharged. However, the carrier acceleration module 274 may be applied only to one of the inlet portion 271a and the outlet portion 271b. The carrier acceleration module 274 includes an inlet-side carrier acceleration module 275 and an outlet-side carrier acceleration module 276.

The inlet-side carrier acceleration module 275 is provided on the inlet portion 271a side of the sheet-shaped unit body portion 271, and of the carrier 50 flowing into the sheet-shaped unit body portion 271 from the carrier laminating unit 260 side. It serves to accelerate the speed relatively faster than the speed of the carrier moving module 272.

Further, the discharge-side carrier acceleration module 276 is provided on the discharge part 271b side of the sheet-shaped unit body part 271, and after the etching process is completed, the carrier 50 is discharged from the inside of the sheet-shaped unit body part 271 to the outside. ) Serves to accelerate the speed of the carrier moving module 272 relatively faster than the speed of the carrier moving module 272.

Both the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 may be applied as rollers. For the operation of the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276, a position detection unit 278 and a controller 280 are further provided.

The position detection unit 278 detects whether the carrier 50 on which the unit sheet 20 is laminated has reached the inlet portion 271a or the outlet portion 271b. The position detection unit 278 may be, for example, a proximity sensor, and may be disposed inside and outside the sheet-shaped unit body 271.

The controller 280 controls the operation of the carrier acceleration module 274, that is, the inlet-side carrier acceleration module 275 and the discharge-side carrier acceleration module 276 based on the detection signal of the position detection unit 278. . That is, when the carrier 50 on which the unit sheet 20 is laminated reaches the inlet portion 271a or the outlet portion 271b, the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 are controlled to operate. By doing so, the speeds of the carrier 50 flowing into the sheet-shaped unit body portion 271 and the carrier 50 discharged from the sheet-shaped unit body portion 271 are relatively rapidly accelerated so that defects do not occur there.

The controller 280 performing this role may include a central processing unit 281 (CPU), a memory 282 (MEMORY), and a support circuit 283 (SUPPORT CIRCUIT).

The central processing unit 281 may be one of various computer processors that can be industrially applied to control the operation of the carrier acceleration module 274 based on the detection signal of the position detection unit 278 in the embodiment of the present invention. have.

The memory 282 (MEMORY) is connected to the central processing unit 281. The memory 282 can be installed locally or remotely as a computer-readable recording medium, and can be easily used, such as random access memory (RAM), ROM, floppy disk, hard disk, or any digital storage type. It may be at least one or more memories.

The support circuit 283 (SUPPORT CIRCUIT) is coupled with the central processing unit 281 to support typical operation of the processor. The support circuit 283 may include a cache, a power supply, a clock circuit, an input/output circuit, a subsystem, and the like.

In an embodiment of the present invention, the controller 280 controls the operation of the carrier acceleration module 274 based on the detection signal of the position detection unit 278, and such a series of control processes may be stored in the memory 282. have. Typically software routines may be stored in memory 282. Software routines can also be stored or executed by other central processing units (not shown).

Although the process according to the present invention has been described as being executed by a software routine, it is also possible that at least some of the processes of the present invention are performed by hardware. As such, the processes of the present invention may be implemented by software executed on a computer system, or by hardware such as an integrated circuit, or by a combination of software and hardware.

The functional specific gravity washing unit 160 provided in the above-described first process line (a) is applied to the rear of the second etching unit 270 in the same manner. The functional specific gravity washing unit 160 applied to the rear of the process of the second etching unit 270 is also directly connected to the outlet of the second etching unit 270, and is etched using washing water or water mixed with a washing chemical. It serves to remove the etching liquid or foreign matter remaining on the unit sheet 20 on which the process has been completed. The description of the functional specific gravity washing unit 160 disposed behind the process of the second etching unit 270 is replaced with the above description, and redundant description is avoided.

11 is a diagram illustrating an operation flowchart illustrating a method of manufacturing a fine metal mask according to an exemplary embodiment of the present invention.

Referring to FIG. 11, in the system 100 for manufacturing a fine metal mask according to an exemplary embodiment of the present invention, first, a fine metal plate is provided (S1110).

Here, the fine metal plate is subjected to degreasing, pickling, water washing, and drying processes in order for cleaning. The degreasing process removes oils and organic matter from the surface of the fine metal plate. The pickling process finely refines the surface of the fine metal plate. The water washing process cleans the fine metal plate. The drying process dries the fine metal plate. When the drying process is completed, surface treatment is performed on the fine metal plate by plasma of a linear ion source. In the case of an embodiment of the present invention, an argon (Ar) source may be employed as the linear ion source. Due to the action of the linear ion source, the surface purity of the fine metal plate may be increased. By the addition of the linear ion source process, the adhesion between the reinforced adhesive material and the fine metal plate may be increased in the next process.

Subsequently, a reinforcing adhesive material is coated on both sides of the fine metal plate (S1120).

In this case, a reinforcing adhesive material having a stronger interfacial adhesion to the photoresist PR than the fine metal plate may be applied on both surfaces of the fine metal plate. Here, the reinforced adhesive material may be applied to both surfaces of the fine metal plate by electroplating or sputtering.

According to experiments, 1 nano-meter (nm) to 1 micro-meter (m) is suitable as a range of the thickness of the applied reinforcing adhesive material. This can increase the efficiency of the manufacturing process by maintaining the state in which the fine metal plate and the photoresist are adhered until the manufacturing process of the fine metal mask 10 is completed. And, the reinforced adhesive material 1200, as shown in Figure 12, the filler 1201 made of particles having a size of 2nm to 500nm; And a binder 1202 fixing the filler. 12 is a block diagram showing the configuration of a reinforced adhesive material for bonding a fine metal mask and a photoresist according to an embodiment of the present invention. The filler 1201 is one selected from the group consisting of BaSO4, TiO2, SiO2, and carbon black. The filler 1201 has a size of 2 nm to 500 nm, and may have a circular shape, a rod shape, or an irregular shape. The binder 1202 is one selected from the group consisting of an acrylic resin and an epoxy resin.

Subsequently, the photoresist PR is adhered on both sides of the fine metal plate by an adhesion-reinforcing material (S1130).

Here, the adhesive force between the reinforced adhesive material 1200 and the photoresist PR may be 1.5 kgf/in to about 2.5 kgf/in. In addition, the adhesive force between the reinforced adhesive material 1200 and the fine metal plate may be 2.0 kgf/in to about 3.0 kgf/in. The reinforced adhesive material 1200 is an adhesion-reinforcing metal having a higher interfacial adhesion to a photoresist than a fine metal plate, or a material in a state in which the adhesion-reinforcing metal is oxidized.

Subsequently, pattern holes are formed in the photoresist located on both sides of the fine metal plate (S1140).

In this case, in the photoresist PR, pattern holes may be formed by exposure and development of a photo mask, or pattern holes may be formed by a laser direct imaging method.

In addition, the pattern holes of the photoresist PR are based on the center coordinates (0, 0) at the center of the photoresist PR, that is, a virtual center line C positioned at the center, as shown in FIG. 1B. It may be formed to be arranged along an imaginary line L inclined at a certain angle based on (inclination is positive).

In addition, the pattern holes of the photoresist are virtual lines inclined at a certain angle (the slope is negative) based on the center coordinate at the center of the photoresist, that is, based on the virtual center line (C), as shown in FIG. It can be formed to be arranged along (L).

Subsequently, an etching solution is introduced into the pattern holes of the photoresist to etch the fine metal plate, thereby forming a pattern of through holes in the fine metal plate (S1150).

Here, the pattern of the through holes is based on the center coordinate at the center of the fine metal plate adhered to the photoresist, that is, along the virtual line L inclined at a certain angle with respect to the virtual center line C. It is not formed to be arranged, but may be uniformly arranged at regular intervals along an imaginary line parallel to the center line as shown in FIG. 1A.

In an embodiment of the present invention, the fine metal plate may be an alloy of nickel (Ni)-iron (Fe). In addition, the reinforced adhesive material 1200 is selected from among copper, iron, nickel, palladium, gold, platinum, copper oxide, iron oxide, nickel oxide, and palladium oxide. Any one or two or more alloy materials may be used.

When the etching solution of the fine metal plate is a solution of copper chloride, the reinforced adhesive material 1200 may be copper or copper oxide. In addition, when the etching solution is a solution of iron chloride, the reinforced adhesive material 1200 is iron, nickel, palladium, gold, platinum, iron oxide, nickel oxide, and Any one of palladium oxide, or two or more alloy materials may be used.

As described above, according to the present invention, when manufacturing a fine metal mask (FMM) for manufacturing a high-resolution OLED display panel, it is possible to realize a system and method for manufacturing a fine metal mask that enables pattern holes to be uniformly formed on the mask sheet. I can.
The present invention is a method for manufacturing a fine metal mask for forming a pattern of through holes in a fine metal plate,
(a) providing the fine metal plate;
(b) applying a reinforcing adhesive material to both surfaces of the fine metal plate;
(c) bonding a photoresist on both sides of the fine metal plate by the reinforcing adhesive material;
(d) forming pattern holes in the photoresist located on both sides of the fine metal plate; And
(e) forming a pattern of the through holes in the fine metal plate by introducing an etching solution into the pattern holes of the photoresist and etching the fine metal plate;
Including,
In the step (d), the pattern holes of the photoresist are formed by being arranged along a virtual line inclined at a predetermined angle with respect to a virtual center line located at the center of the photoresist,
The fine metal plate includes a mask pattern portion in which a pattern of through holes is formed in a mask sheet by an etching process, and the mask sheet is manufactured as a fine metal mask through a plurality of processes sequentially on a first process line and a second process line. , The first process line performs a primary etching process on the roll sheet through a first etching unit, and the second process line performs a secondary etching process on the unit sheet through a second etching unit. And
The roll sheet is supplied to the first process line where an etching process is performed by a roll sheet supply unit, and the first etching unit provided on one side of the first process line is disposed on a first surface, which is one side of the roll sheet. An etching process is performed, and the second etching unit performs an etching process on the second side, which is the other side of the roll sheet, and an etching resistance tape is laminated on one side of the roll sheet, and the The roll sheet on which the etching resistance tape is laminated is introduced into the first etching unit, and the first side, which is one side of the roll sheet, is etched through the first etching unit, and the roll sheet on which the first side is etched is After being pulled out from the first etching unit and inverted, the etched first surface is turned over so that the etched first surface is placed on the top, and then an etching resistance agent is applied to the etched first surface area, and the etching resistance agent is applied to the etched agent of the roll sheet. After being applied to the first surface area, the roll sheet is cut to form a unit sheet of a unit size, and thereafter, an etching process is performed on the unetched second surface area through the second etching unit, and the unit A carrier is laminated to the sheet, and the unit sheet laminated to the carrier is introduced into the second etching unit, and the second surface, which is the remaining surface of the unit sheet, is etched through the second etching unit, so that the pattern of the through holes is Is formed, and in the first process line, a roll sheet supply unit, a tape laminating unit for etching resistance, a pre-etching unit, a pre-cleaning and dewatering device, a first etching unit, a functional specific gravity washing unit, and an etching resistance along the direction in which the process proceeds. A tape peeling unit and a roll sheet recovery unit are arranged
The roll sheet supply unit supplies the roll sheet formed by being wound in a roll shape to the first processing line where a primary etching process is performed, and the roll sheet is supplied through the roll sheet supply unit. A first roll sheet driving roller and a plurality of roll sheet guide rollers are provided in order to be released and supplied to the first process line, and the first roll sheet driving roller is provided between the roll sheet supply unit and the roll sheet collecting unit. It is disposed on the first process line, and the roll sheet is moved toward the roll sheet recovery unit by pulling the roll sheet by a driving force of a motor, and the roll sheet guide rollers are disposed at various places in both the first process line and the second process line. While imparting tension to the roll sheet to guide the transport of the roll sheet, the etching resistance tape laminating unit is disposed between the roll sheet supply unit and the first etching unit, and Before the etching process proceeds, an etching resistance tape is laminated on a second surface that is the other side of the roll sheet that is released from the roll sheet supply unit and supplied to the first etching unit, and the etching resistance tape laminating unit A silver tape supply roller, a laminating drive roller, a laminating driven roller, a tape transfer roller, and a protective film recovery roller are included, and the tape supply roller supplies the etching resistance tape, and the laminating drive roller is the first roller of the roll sheet. It is rotatably disposed on two sides, and receives the etching resistance tape supplied from the tape supply roller and laminates it to the second side of the roll sheet, and the laminating driven roller drives the laminating with the roll sheet interposed therebetween. It is rotatably disposed on the opposite side of the roller, and the tape transfer roller is disposed between the tape supply roller and the laminating driving roller to pass the etching resistance tape and the etching resistance tape supplied from the tape supply roller. It is transferred to a laminating driving roller, and the protective film recovery roller is disposed adjacent to the tape transfer roller to interact with the tape transfer roller, and recovers the protective film on the etching resistance tape passed through the tape transfer roller, A first roll sheet buffer unit, a pre-etching unit, and a pre-cleaning water remover are sequentially disposed behind the process of the etching resistance tape laminating unit, and the first roll sheet buffer unit is between the etching resistance tape laminating unit and the pre-etching unit. Is disposed to control the process speed between the etching resistance tape laminating unit and the pre-etching unit, the pre-etching unit is disposed between the etching resistance tape laminating unit and the first etching unit on the first process line , The roll sheet is introduced into the first etching unit to perform pre-etching on the roll sheet before proceeding with the etching process, and the pre-etching unit includes a pre-etching bath filled with an etchant and a pre-etching bath. And a plurality of pre-etching guide rollers for guiding the transfer of the roll sheet so that the roll sheet is deepened in the etchant in the pre-etching tank and discharged, and the pre-cleaning water remover includes the pre-etching unit and It is disposed between the first etching units, and cleans and removes water from the roll sheet on which a pre-etching process has been performed, and the pre-clean water remover cleans the roll sheet while spraying water toward the roll sheet. A pre-washer, and an air knife for removing water remaining on the surface of the roll sheet that has been cleaned by wind, and the first etching unit is provided at a rear of the process of the pre-clean water remover,
The first etching unit includes a roll sheet etching cabinet, and the roll sheet etching cabinet has a cabinet structure, and a plurality of etching rooms for performing an etching process on the roll sheet are formed therein, and the etching rooms are in communication with each other. , A roll sheet lead-in roller portion and a roll sheet take-out roller portion are provided in the roll sheet etching cabinet, and the roll sheet lead-in roller portion is disposed in an entrance region of the roll sheet etching cabinet, and the roll sheet is placed inside the roll sheet etching cabinet. And the roll sheet withdrawal roller part is disposed in the exit area of the roll sheet etching cabinet and draws (discharges) the roll sheet to the outside of the roll sheet etching cabinet, and a plurality of first rolls in the roll sheet etching cabinet An etchant spray module is provided, and the first etchant spray modules spray the etchant toward the roll sheet being transferred in the roll sheet etching cabinet in a spray manner to etch half the first surface, which is one side of the roll sheet. Let the process go,
A functional specific gravity washing unit is provided behind the process of the first etching unit, the functional specific gravity washing unit is directly connected to the outlet of the first etching unit, and an etching process using washing water or water mixed with a washing chemical To remove the etching liquid or foreign matter remaining on the completed roll sheet, the functional specific gravity washing unit is a unit cabinet, a specific gravity washing module, first to third washing modules, and a moisture removal module are integrated on the unit cabinet. Mounted, the unit cabinet forms the appearance of the functional specific gravity washing unit, a foot for height adjustment and ground support is disposed at the lower end of the unit cabinet, and the specific gravity washing module and the first to Means for supplying the washing water or water mixed with the washing chemical to the third flushing module at a quantitative and positive pressure are provided, a first drain portion and a second drain portion are provided at a lower portion of the unit cabinet, and the first drain portion is It is disposed at one lower side of the unit cabinet and receives and drains the washing water mixed with the washing agent falling from the specific gravity washing module, and the second drain portion is disposed on the other lower side of the unit cabinet, and the first to third flushing units are flushed. Receives and drains water falling from the module, and the specific gravity washing module is provided on one side of the upper portion of the unit cabinet and removes the etchant remaining on the roll sheet on which the etching process has been completed using washing water mixed with a washing chemical,
The specific gravity flushing module includes a specific gravity flushing module housing, a roll sheet transfer portion, an upper piping portion, a lower piping portion, and a pipe driving portion, and the specific gravity flushing module housing is an exterior frame having a box-shaped cabinet shape, and the specific gravity flushing module housing An inlet portion into which the roll sheet is introduced is formed on one side, and the roll sheet introduced into the inlet portion sequentially passes through the specific gravity washing module, the first to third washing modules, and the moisture removing module, and then the moisture removing module. Discharged to the discharge portion of the housing and then directed to the first roll sheet drying unit,
The roll sheet transfer unit is disposed in the specific gravity flushing module housing, transfers the roll sheet passing through the inlet to the first to third flushing modules, and is formed by a combination of a plurality of rollers and gears, and the upper pipe portion It is disposed on the upper portion of the roll sheet conveying part, and the upper piping part is provided with a plurality of upper spray nozzles for spraying downwardly the washing water mixed with a cleaning agent toward the roll sheet being conveyed by the action of the roll sheet conveying part, and the lower part The piping portion is disposed under the upper piping portion, and the lower piping portion is provided with a plurality of lower spray nozzles for spraying washing water mixed with a cleaning agent upward toward the roll sheet being transferred by the action of the roll sheet transfer portion, and the The pipe driving part is connected to the upper pipe part and the lower pipe part, and drives the upper pipe part and the lower pipe part in at least one direction to ensure spray uniformity of the washing water mixed with the cleaning agent sprayed onto the roll sheet. , The pipe driving part is provided in a form in which a component is coupled to a driving housing coupled to one side of the unit cabinet, the pipe driving part is connected to the upper pipe part and an upper slider for slidingly driving the upper pipe part, and the driving housing An upper sliding plate disposed on the upper side of and connected to the upper slider and sliding in a direction in which the upper pipe part is driven, a lower slider connected to the lower pipe part and slidably driving the lower pipe part, and an upper part of the driving housing And a lower sliding plate disposed on the lower slide and slid in a direction in which the lower pipe part is driven, and a slider driving part is provided in the pipe driving part to alternately drive the upper slider and the lower slider. , The slider driving unit is provided in the driving housing and is connected to the upper sliding plate and the lower sliding plate to alternately drive the upper slider and the lower slider, and the slider unit The eastern part is a servomotor connected to a reducer to generate power, and a rotating shaft disposed between the upper sliding plate and the lower sliding plate in the drive housing and connected to the servomotor to rotate by the operation of the servomotor. And an upper cam plate connected to an upper end of the rotating shaft and rotated cooperatively with the rotating shaft; an upper coupling member coupled to the upper cam plate via an upper long hole of the upper sliding plate; and the rotating shaft A lower cam plate connected to a lower end of the rotating shaft and rotated cooperatively with the rotating shaft, and a lower coupling member coupled to the lower cam plate via a lower long hole of the lower sliding plate, and the first to third flushing modules Is disposed adjacent to the specific gravity washing module on the unit cabinet, and removes foreign matter remaining on the roll sheet by using water with respect to the roll sheet that has passed the specific gravity washing module, and the first to third washing modules A flush module housing, and a plurality of water sprayers disposed above and below the roll sheet being transferred within the flush module housing, and spraying water toward the roll sheet at a corresponding position, and the water removal module It is disposed adjacent to the third flushing module on the unit cabinet, and removes water remaining on the roll sheet by wind with respect to the roll sheet that has passed the third flushing module, and the draining module includes a moisture removing module housing and , A plurality of air knives disposed above and below the roll sheet being transferred in the moisture removal module housing and spraying straight air toward the roll sheet at a corresponding position, and the functional specific gravity washing unit A first roll sheet drying unit, an etching resistance tape peeling unit, a peeling light irradiation unit, an etching resistance tape recovery unit, and a roll sheet recovery unit are sequentially arranged at the rear of the process of,
The first roll sheet drying unit is disposed at the rear of the process of the functional specific gravity washing unit and drying the washed roll sheet through the functional specific gravity washing unit, and the etching resistance tape peeling unit is the first etching unit. The etching resistance tape disposed behind the process and laminated for the first etching process is peeled off, and the peeling light irradiator is directed toward the etching resistance tape so that the etching resistance tape is peeled off from the roll sheet. ), and the etching resistance tape recoverer is disposed behind the process of the peeling light irradiator to recover the etching resistance tape peeled off from the roll sheet by the action of the peeling light irradiator,
The etching-resisting tape recovery device is rotated in contact with the etching-resisting tape, while a tape peeling drive roller for peeling the etching resistance tape from the roll sheet, and an opposite side of the tape peeling drive roller with the roll sheet interposed therebetween. A driven roller for tape peeling which is rotatably disposed on the tape, a tape recovery roller for winding and recovering the peeling tape for etching resistance, and a tape recovery roller disposed between the driving roller for tape peeling and the tape recovery roller and guiding the recovered tape. Including a tape guide roller,
The roll sheet recovery unit is disposed on the first process line on the opposite side of the roll sheet supply unit, and recovers the roll sheet from which the first surface of the roll sheet is etched and the etching resistance tape is peeled off. 2 In the process line, after etching along the direction in which the process proceeds, the roll sheet supply unit, the etching resistance coating unit, the second roll sheet drying unit, the etching resistance curing unit, the roll sheet cutting unit, the carrier laminating unit, and the second etching. The unit is disposed, and the roll sheet supply unit after the etching supplies the roll sheet, which has completed the etching process on the first surface, to the second processing line through the first processing line, and the roll sheet supply unit after the etching When supplying the roll sheet to the second process line, the etched side of the first process line faces the upper side, and the roll sheet on which the etching process for the first side is completed is of the second roll sheet driving roller. It is supplied to the second process line as a function, and the second roll sheet driving roller drives the roll sheet of the roll sheet supply unit toward the roll sheet cutting unit after etching, and the process rear of the roll sheet supply unit after the etching A second roll sheet buffer unit is provided in, and the second roll sheet buffer unit is disposed between the roll sheet supply unit and the etching resistance coating unit after the etching, and after the etching, the roll sheet supply unit and the etching resistance agent are applied. The process speed between the units is adjusted, the etching resistance coating unit is provided behind the process of the second roll sheet buffer unit, and the etching resistance coating unit is the 1/2 etching process completed on the first process line. The etching resistance agent is applied to the first surface of the roll sheet, and the second roll sheet drying unit and the etching resistance curing unit are sequentially disposed behind the process of the etching resistance application unit,
The second roll sheet drying unit is disposed between the etching resistance coating unit and the etching resistance curing unit and drying the roll sheet coated with the etching resistance agent, and the etching resistance curing unit is applied with the etching resistance agent. The roll sheet cutting unit is disposed behind the process of the unit and cures the etching resistance agent, and the roll sheet cutting unit is provided behind the process of the etching resistance curing unit on the second process line, and the roll sheet cutting unit is the etching resistance agent. It is disposed behind the process of the application unit and cuts the roll sheet into unit sheets of unit size,
The roll sheet cutting unit includes a cutter that cuts the roll sheet being transferred while being driven up and down, and a cutting die that supports the roll sheet to be cut, and the roll sheet is transferred when cutting the roll sheet. When this is stopped, an electric buffer roll is disposed in front of the spreading roller to compensate for the progress flow of the roll sheet in progress, and the carrier laminating unit is disposed at the rear of the process of the roll sheet cutting unit, and transfers the unit sheet. For laminating a carrier on the unit sheet, an intermediate moving roller is disposed between the carrier laminating unit and the sheet etching unit,
The sheet etching unit is disposed behind the process of the carrier laminating unit and performs an etching process on the second surface of the unit sheet, and the etching process is primarily performed through the first etching unit in the state of the roll sheet. In the state of the unit sheet, a main pattern is formed on the unit sheet as a second etching process proceeds through the sheet etching unit, and the sheet etching unit is a speed variable type in which the speed is accelerated at the entrance and exit through which the carrier is introduced and discharged. It is a second etching unit, and the second etching unit includes a sheet-shaped unit body part, a carrier moving module, a plurality of second etchant spray modules, and a carrier acceleration module,
The sheet-like unit body part forms the exterior of the second etching unit, the sheet-like unit body part has a cabinet shape, and the carrier moving module is provided in the sheet-like unit body part and serves to move the carrier, and the carrier moves. The module is applied with a roller that is strong against the etchant, and the plurality of second etchant spray modules are provided in the sheet-like unit body and spray the etchant toward the unit sheet moving through the carrier moving module within the sheet-like unit body. Injecting in a manner, the carrier acceleration module is disposed on at least one side of an inlet portion into which the carrier is introduced and an outlet portion from which the carrier is discharged, and serves to accelerate the carrier at a corresponding position, and the carrier acceleration module is an inlet side It includes a carrier acceleration module and a discharge-side carrier acceleration module, the inlet-side carrier acceleration module is provided on the inlet side of the sheet-shaped unit body portion, the carrier laminating unit side to control the speed of the carrier introduced into the sheet-shaped unit body portion. The speed of the carrier is accelerated faster than the speed of the carrier moving module, and the discharge-side carrier acceleration module is provided on the discharge part side of the sheet-shaped unit body part, and the etching process is completed, and is discharged from the inside of the sheet-shaped unit body part to the outside. Is accelerated faster than the speed of the carrier moving module, and a position sensing unit and a controller are further provided for the operation of the inlet-side carrier acceleration module and the discharge-side carrier acceleration module, and the position sensing unit is laminated with the unit sheet. It detects whether the carrier has reached the inlet or outlet side, and the controller performs the operation of the carrier acceleration module and the operation of the inlet carrier acceleration module and the discharge side carrier based on a detection signal of the position detection unit. It is possible to provide a method of manufacturing a fine metal mask that controls the operation of an acceleration module.
The present invention is a roll sheet (roll sheet) wound in the shape of a roll, and a photoresist formed on both sides;
A roll sheet supply unit supplying the roll sheet to a first processing line in which an etching process is performed;
A first etching unit provided on one side of the first process line and performing an etching process on a first surface, which is one surface of the roll sheet; And
A second etching unit for performing an etching process on the second surface, which is the other surface of the roll sheet;
Including,
The pattern holes of the photoresist are formed by being arranged along an imaginary line inclined at a certain angle with respect to a imaginary center line located at the center of the photoresist,
A fine metal plate in which a pattern of through holes is formed in a mask sheet is generated by the etching process, and the mask sheet is manufactured as a fine metal mask through a plurality of processes sequentially on a first process line and a second process line. The first process line performs a first etching process on the roll sheet through a first etching unit, and the second process line performs a second etching process on the unit sheet through a second etching unit,
The roll sheet is supplied to the first process line where an etching process is performed by a roll sheet supply unit, and the first etching unit provided on one side of the first process line is disposed on a first surface, which is one side of the roll sheet. An etching process is performed, and the second etching unit performs an etching process on the second side, which is the other side of the roll sheet, and an etching resistance tape is laminated on one side of the roll sheet, and the The roll sheet on which the etching resistance tape is laminated is introduced into the first etching unit, and the first side, which is one side of the roll sheet, is etched through the first etching unit, and the roll sheet on which the first side is etched is After being pulled out from the first etching unit and inverted, the etched first surface is turned over so that the etched first surface is placed on the top, and then an etching resistance agent is applied to the etched first surface area, and the etching resistance agent is applied to the etched agent of the roll sheet. After being applied to the first surface area, the roll sheet is cut to form a unit sheet of a unit size, and thereafter, an etching process is performed on the unetched second surface area through the second etching unit, and the unit A carrier is laminated to the sheet, and the unit sheet laminated to the carrier is introduced into the second etching unit, and the second surface, which is the remaining surface of the unit sheet, is etched through the second etching unit, so that the pattern of the through holes is Is formed, and in the first process line, a roll sheet supply unit, a tape laminating unit for etching resistance, a pre-etching unit, a pre-cleaning and dewatering device, a first etching unit, a functional specific gravity washing unit, and an etching resistance along the direction in which the process proceeds. A tape peeling unit and a roll sheet recovery unit are arranged
The roll sheet supply unit supplies the roll sheet formed by being wound in a roll shape to the first processing line where a primary etching process is performed, and the roll sheet is supplied through the roll sheet supply unit. A first roll sheet driving roller and a plurality of roll sheet guide rollers are provided in order to be released and supplied to the first process line, and the first roll sheet driving roller is provided between the roll sheet supply unit and the roll sheet collecting unit. It is disposed on the first process line, and the roll sheet is moved toward the roll sheet recovery unit by pulling the roll sheet by a driving force of a motor, and the roll sheet guide rollers are disposed at various places in both the first process line and the second process line. While imparting tension to the roll sheet to guide the transport of the roll sheet, the etching resistance tape laminating unit is disposed between the roll sheet supply unit and the first etching unit, and Before the etching process proceeds, an etching resistance tape is laminated on a second surface that is the other side of the roll sheet that is released from the roll sheet supply unit and supplied to the first etching unit, and the etching resistance tape laminating unit A silver tape supply roller, a laminating drive roller, a laminating driven roller, a tape transfer roller, and a protective film recovery roller are included, and the tape supply roller supplies the etching resistance tape, and the laminating drive roller is the first roller of the roll sheet. It is rotatably disposed on two sides, and receives the etching resistance tape supplied from the tape supply roller and laminates it to the second side of the roll sheet, and the laminating driven roller drives the laminating with the roll sheet interposed therebetween. It is rotatably disposed on the opposite side of the roller, and the tape transfer roller is disposed between the tape supply roller and the laminating driving roller to pass the etching resistance tape and the etching resistance tape supplied from the tape supply roller. It is transferred to a laminating driving roller, and the protective film recovery roller is disposed adjacent to the tape transfer roller to interact with the tape transfer roller, and recovers the protective film on the etching resistance tape passed through the tape transfer roller, A first roll sheet buffer unit, a pre-etching unit, and a pre-cleaning water remover are sequentially disposed behind the process of the etching resistance tape laminating unit, and the first roll sheet buffer unit is between the etching resistance tape laminating unit and the pre-etching unit. Is disposed to control the process speed between the etching resistance tape laminating unit and the pre-etching unit, the pre-etching unit is disposed between the etching resistance tape laminating unit and the first etching unit on the first process line , The roll sheet is introduced into the first etching unit to perform pre-etching on the roll sheet before proceeding with the etching process, and the pre-etching unit includes a pre-etching bath filled with an etchant and a pre-etching bath. And a plurality of pre-etching guide rollers for guiding the transfer of the roll sheet so that the roll sheet is deepened in the etchant in the pre-etching tank and discharged, and the pre-cleaning water remover includes the pre-etching unit and It is disposed between the first etching units, and cleans and removes water from the roll sheet on which a pre-etching process has been performed, and the pre-clean water remover cleans the roll sheet while spraying water toward the roll sheet. A pre-washer, and an air knife for removing water remaining on the surface of the roll sheet that has been cleaned by wind, and the first etching unit is provided at a rear of the process of the pre-clean water remover,
The first etching unit includes a roll sheet etching cabinet, and the roll sheet etching cabinet has a cabinet structure, and a plurality of etching rooms for performing an etching process on the roll sheet are formed therein, and the etching rooms are in communication with each other. , A roll sheet lead-in roller portion and a roll sheet take-out roller portion are provided in the roll sheet etching cabinet, and the roll sheet lead-in roller portion is disposed in an entrance region of the roll sheet etching cabinet, and the roll sheet is placed inside the roll sheet etching cabinet. And the roll sheet withdrawal roller part is disposed in the exit area of the roll sheet etching cabinet and draws (discharges) the roll sheet to the outside of the roll sheet etching cabinet, and a plurality of first rolls in the roll sheet etching cabinet An etchant spray module is provided, and the first etchant spray modules spray the etchant toward the roll sheet being transferred in the roll sheet etching cabinet in a spray manner to etch half the first surface, which is one side of the roll sheet. Let the process go,
A functional specific gravity washing unit is provided behind the process of the first etching unit, the functional specific gravity washing unit is directly connected to the outlet of the first etching unit, and an etching process using washing water or water mixed with a washing chemical To remove the etching liquid or foreign matter remaining on the completed roll sheet, the functional specific gravity washing unit is a unit cabinet, a specific gravity washing module, first to third washing modules, and a moisture removal module are integrated on the unit cabinet. Mounted, the unit cabinet forms the appearance of the functional specific gravity washing unit, a foot for height adjustment and ground support is disposed at the lower end of the unit cabinet, and the specific gravity washing module and the first to Means for supplying the washing water or water mixed with the washing chemical to the third flushing module at a quantitative and positive pressure are provided, a first drain portion and a second drain portion are provided at a lower portion of the unit cabinet, and the first drain portion is It is disposed at one lower side of the unit cabinet and receives and drains the washing water mixed with the washing agent falling from the specific gravity washing module, and the second drain portion is disposed on the other lower side of the unit cabinet, and the first to third flushing units are flushed. Receives and drains water falling from the module, and the specific gravity washing module is provided on one side of the upper portion of the unit cabinet and removes the etchant remaining on the roll sheet on which the etching process has been completed using washing water mixed with a washing chemical,
The specific gravity flushing module includes a specific gravity flushing module housing, a roll sheet transfer portion, an upper piping portion, a lower piping portion, and a pipe driving portion, and the specific gravity flushing module housing is an exterior frame having a box-shaped cabinet shape, and the specific gravity flushing module housing An inlet portion into which the roll sheet is introduced is formed on one side, and the roll sheet introduced into the inlet portion sequentially passes through the specific gravity washing module, the first to third washing modules, and the moisture removing module, and then the moisture removing module. Discharged to the discharge portion of the housing and then directed to the first roll sheet drying unit,
The roll sheet transfer unit is disposed in the specific gravity flushing module housing, transfers the roll sheet passing through the inlet to the first to third flushing modules, and is formed by a combination of a plurality of rollers and gears, and the upper pipe portion It is disposed on the upper portion of the roll sheet conveying part, and the upper piping part is provided with a plurality of upper spray nozzles for spraying downwardly the washing water mixed with a cleaning agent toward the roll sheet being conveyed by the action of the roll sheet conveying part, and the lower part The piping portion is disposed under the upper piping portion, and the lower piping portion is provided with a plurality of lower spray nozzles for spraying washing water mixed with a cleaning agent upward toward the roll sheet being transferred by the action of the roll sheet transfer portion, and the The pipe driving part is connected to the upper pipe part and the lower pipe part, and drives the upper pipe part and the lower pipe part in at least one direction to ensure spray uniformity of the washing water mixed with the cleaning agent sprayed onto the roll sheet. , The pipe driving part is provided in a form in which a component is coupled to a driving housing coupled to one side of the unit cabinet, the pipe driving part is connected to the upper pipe part and an upper slider for slidingly driving the upper pipe part, and the driving housing An upper sliding plate disposed on the upper side of and connected to the upper slider and sliding in a direction in which the upper pipe part is driven, a lower slider connected to the lower pipe part and slidably driving the lower pipe part, and an upper part of the driving housing And a lower sliding plate disposed on the lower slide and slid in a direction in which the lower pipe part is driven, and a slider driving part is provided in the pipe driving part to alternately drive the upper slider and the lower slider. , The slider driving unit is provided in the driving housing and is connected to the upper sliding plate and the lower sliding plate to alternately drive the upper slider and the lower slider, and the slider unit The eastern part is a servomotor connected to a reducer to generate power, and a rotating shaft disposed between the upper sliding plate and the lower sliding plate in the drive housing and connected to the servomotor to rotate by the operation of the servomotor. And an upper cam plate connected to an upper end of the rotating shaft and rotated cooperatively with the rotating shaft; an upper coupling member coupled to the upper cam plate via an upper long hole of the upper sliding plate; and the rotating shaft A lower cam plate connected to a lower end of the rotating shaft and rotated cooperatively with the rotating shaft, and a lower coupling member coupled to the lower cam plate via a lower long hole of the lower sliding plate, and the first to third flushing modules Is disposed adjacent to the specific gravity washing module on the unit cabinet, and removes foreign matter remaining on the roll sheet by using water with respect to the roll sheet that has passed the specific gravity washing module, and the first to third washing modules A flush module housing, and a plurality of water sprayers disposed above and below the roll sheet being transferred within the flush module housing, and spraying water toward the roll sheet at a corresponding position, and the water removal module It is disposed adjacent to the third flushing module on the unit cabinet, and removes water remaining on the roll sheet by wind with respect to the roll sheet that has passed the third flushing module, and the draining module includes a moisture removing module housing and , A plurality of air knives disposed above and below the roll sheet being transferred in the moisture removal module housing and spraying straight air toward the roll sheet at a corresponding position, and the functional specific gravity washing unit A first roll sheet drying unit, an etching resistance tape peeling unit, a peeling light irradiation unit, an etching resistance tape recovery unit, and a roll sheet recovery unit are sequentially arranged at the rear of the process of,
The first roll sheet drying unit is disposed at the rear of the process of the functional specific gravity washing unit and drying the washed roll sheet through the functional specific gravity washing unit, and the etching resistance tape peeling unit is the first etching unit. The etching resistance tape disposed behind the process and laminated for the first etching process is peeled off, and the peeling light irradiator is directed toward the etching resistance tape so that the etching resistance tape is peeled off from the roll sheet. ), and the etching resistance tape recoverer is disposed behind the process of the peeling light irradiator to recover the etching resistance tape peeled off from the roll sheet by the action of the peeling light irradiator,
The etching-resisting tape recovery device is rotated in contact with the etching-resisting tape, while a tape peeling drive roller for peeling the etching resistance tape from the roll sheet, and an opposite side of the tape peeling drive roller with the roll sheet interposed therebetween. A driven roller for tape peeling which is rotatably disposed on the tape, a tape recovery roller for winding and recovering the peeling tape for etching resistance, and a tape recovery roller disposed between the driving roller for tape peeling and the tape recovery roller and guiding the recovered tape. Including a tape guide roller,
The roll sheet recovery unit is disposed on the first process line on the opposite side of the roll sheet supply unit, and recovers the roll sheet from which the first surface of the roll sheet is etched and the etching resistance tape is peeled off. 2 In the process line, after etching along the direction in which the process proceeds, the roll sheet supply unit, the etching resistance coating unit, the second roll sheet drying unit, the etching resistance curing unit, the roll sheet cutting unit, the carrier laminating unit, and the second etching. The unit is disposed, and the roll sheet supply unit after the etching supplies the roll sheet, which has completed the etching process on the first surface, to the second processing line through the first processing line, and the roll sheet supply unit after the etching When supplying the roll sheet to the second process line, the etched side of the first process line faces the upper side, and the roll sheet on which the etching process for the first side is completed is of the second roll sheet driving roller. It is supplied to the second process line as a function, and the second roll sheet driving roller drives the roll sheet of the roll sheet supply unit toward the roll sheet cutting unit after etching, and the process rear of the roll sheet supply unit after the etching A second roll sheet buffer unit is provided in, and the second roll sheet buffer unit is disposed between the roll sheet supply unit and the etching resistance coating unit after the etching, and after the etching, the roll sheet supply unit and the etching resistance agent are applied. The process speed between the units is adjusted, the etching resistance coating unit is provided behind the process of the second roll sheet buffer unit, and the etching resistance coating unit is the 1/2 etching process completed on the first process line. The etching resistance agent is applied to the first surface of the roll sheet, and the second roll sheet drying unit and the etching resistance curing unit are sequentially disposed behind the process of the etching resistance application unit,
The second roll sheet drying unit is disposed between the etching resistance coating unit and the etching resistance curing unit and drying the roll sheet coated with the etching resistance agent, and the etching resistance curing unit is applied with the etching resistance agent. The roll sheet cutting unit is disposed behind the process of the unit and cures the etching resistance agent, and the roll sheet cutting unit is provided behind the process of the etching resistance curing unit on the second process line, and the roll sheet cutting unit is the etching resistance agent. It is disposed behind the process of the application unit and cuts the roll sheet into unit sheets of unit size,
The roll sheet cutting unit includes a cutter that cuts the roll sheet being transferred while being driven up and down, and a cutting die that supports the roll sheet to be cut, and the roll sheet is transferred when cutting the roll sheet. When this is stopped, an electric buffer roll is disposed in front of the spreading roller to compensate for the progress flow of the roll sheet in progress, and the carrier laminating unit is disposed at the rear of the process of the roll sheet cutting unit, and transfers the unit sheet. For laminating a carrier on the unit sheet, an intermediate moving roller is disposed between the carrier laminating unit and the sheet etching unit,
The sheet etching unit is disposed behind the process of the carrier laminating unit and performs an etching process on the second surface of the unit sheet, and the etching process is primarily performed through the first etching unit in the state of the roll sheet. In the state of the unit sheet, a main pattern is formed on the unit sheet as a second etching process proceeds through the sheet etching unit, and the sheet etching unit is a speed variable type in which the speed is accelerated at the entrance and exit through which the carrier is introduced and discharged. It is a second etching unit, and the second etching unit includes a sheet-shaped unit body part, a carrier moving module, a plurality of second etchant spray modules, and a carrier acceleration module,
The sheet-like unit body part forms the exterior of the second etching unit, the sheet-like unit body part has a cabinet shape, and the carrier moving module is provided in the sheet-like unit body part and serves to move the carrier, and moves the carrier. The module is applied with a roller that is strong against the etching solution, and the plurality of second etching solution spray modules are provided in the sheet-shaped unit body and spray the etching solution toward the unit sheet moving through the carrier moving module in the sheet-shaped unit body. Injecting in a manner, the carrier acceleration module is disposed on at least one side of an inlet portion into which the carrier is introduced and an outlet portion from which the carrier is discharged, and serves to accelerate the carrier at a corresponding position, and the carrier acceleration module is an inlet side It includes a carrier acceleration module and a discharge-side carrier acceleration module, wherein the inlet-side carrier acceleration module is provided on the inlet side of the sheet-like unit body and controls the speed of the carrier introduced into the sheet-like unit body from the carrier laminating unit side. The speed of the carrier is accelerated faster than the speed of the carrier moving module, and the discharge-side carrier acceleration module is provided on the discharge part side of the sheet-like unit body part, and the etching process is completed, and is discharged from the inside of the sheet-like unit body part to the outside. Is accelerated faster than the speed of the carrier moving module, a position sensing unit and a controller are further provided for the operation of the inlet-side carrier acceleration module and the discharge-side carrier acceleration module, and the position sensing unit is laminated with the unit sheet. It detects whether the carrier has reached the inlet or outlet side, and the controller performs the operation of the carrier acceleration module and the operation of the inlet carrier acceleration module and the discharge side carrier based on the detection signal of the position detection unit. It is possible to provide a system for manufacturing a fine metal mask that controls the operation of the acceleration module.

Although the above has been described with reference to the embodiments of the present invention, various changes or modifications can be made at the level of those of ordinary skill in the art to which the present invention pertains. Such changes and modifications may be said to belong to the present invention as long as they do not depart from the scope of the technical idea provided by the present invention. Therefore, the scope of the present invention should be determined by the claims set forth below.

10: mask 11: mask sheet
12: pattern part 13: pattern hole
14: etching resistance agent 20: unit sheet
30 roll sheet 33 etching resistance tape
50: carrier 100: fine metal mask manufacturing system
110: roll sheet supply unit 112: roll sheet collection unit
120: etching resistance tape laminating unit 130: first roll sheet buffer unit
140: pre-etching unit 145: pre-cleaning and draining machine
150: first etching unit 160: functional specific gravity washing unit
162: specific gravity washing module 170: pipe drive unit
180: tape peeling unit for etching resistance 210: roll sheet supply unit after etching
220: etching resistance coating unit 231: second roll sheet drying unit
235: etching resistance curing unit 250: roll sheet cutting unit
260: carrier laminating unit 270: second etching unit
278: position detection unit 280: controller
1200: reinforced adhesive material 1201: filler
1202: binder

Claims (14)

As a method of manufacturing a fine metal mask for forming a pattern of through holes in a fine metal plate,
(a) providing the fine metal plate;
(b) applying a reinforcing adhesive material to both surfaces of the fine metal plate;
(c) bonding a photoresist on both sides of the fine metal plate by the reinforcing adhesive material;
(d) forming pattern holes in the photoresist located on both sides of the fine metal plate; And
(e) forming a pattern of the through holes in the fine metal plate by introducing an etching solution into the pattern holes of the photoresist and etching the fine metal plate;
Including,
In the step (d), the pattern holes of the photoresist are formed by being arranged along a virtual line inclined at a predetermined angle with respect to a virtual center line located at the center of the photoresist,
The fine metal plate includes a mask pattern portion in which a pattern of through holes is formed in a mask sheet by an etching process, and the mask sheet is manufactured as a fine metal mask through a plurality of processes sequentially on a first process line and a second process line. , The first process line performs a primary etching process on the roll sheet through a first etching unit, and the second process line performs a secondary etching process on the unit sheet through a second etching unit. And
The roll sheet is supplied to the first process line where an etching process is performed by a roll sheet supply unit, and the first etching unit provided on one side of the first process line is disposed on a first surface, which is one side of the roll sheet. An etching process is performed, and the second etching unit performs an etching process on the second side, which is the other side of the roll sheet, and an etching resistance tape is laminated on one side of the roll sheet, and the The roll sheet on which the etching resistance tape is laminated is introduced into the first etching unit, and the first side, which is one side of the roll sheet, is etched through the first etching unit, and the roll sheet on which the first side is etched is After being pulled out from the first etching unit and inverted, the etched first surface is turned over so that the etched first surface is placed on the top, and then an etching resistance agent is applied to the etched first surface area, and the etching resistance agent is applied to the etched agent of the roll sheet. After being applied to the first surface area, the roll sheet is cut to form a unit sheet of a unit size, and thereafter, an etching process is performed on the unetched second surface area through the second etching unit, and the unit A carrier is laminated to the sheet, and the unit sheet laminated to the carrier is introduced into the second etching unit, and the second surface, which is the remaining surface of the unit sheet, is etched through the second etching unit, so that the pattern of the through holes is Is formed, and in the first process line, a roll sheet supply unit, a tape laminating unit for etching resistance, a pre-etching unit, a pre-cleaning and dewatering device, a first etching unit, a functional specific gravity washing unit, and an etching resistance along the direction in which the process proceeds. A tape peeling unit and a roll sheet recovery unit are arranged
The roll sheet supply unit supplies the roll sheet formed by being wound in a roll shape to the first processing line where a primary etching process is performed, and the roll sheet is supplied through the roll sheet supply unit. A first roll sheet driving roller and a plurality of roll sheet guide rollers are provided in order to be released and supplied to the first process line, and the first roll sheet driving roller is provided between the roll sheet supply unit and the roll sheet collecting unit. It is disposed on the first process line, and the roll sheet is moved toward the roll sheet recovery unit by pulling the roll sheet by a driving force of a motor, and the roll sheet guide rollers are disposed at various places in both the first process line and the second process line. While imparting tension to the roll sheet to guide the transport of the roll sheet, the etching resistance tape laminating unit is disposed between the roll sheet supply unit and the first etching unit, and Before the etching process proceeds, an etching resistance tape is laminated on a second surface that is the other side of the roll sheet that is released from the roll sheet supply unit and supplied to the first etching unit, and the etching resistance tape laminating unit A silver tape supply roller, a laminating drive roller, a laminating driven roller, a tape transfer roller, and a protective film recovery roller are included, and the tape supply roller supplies the etching resistance tape, and the laminating drive roller is the first roller of the roll sheet. It is rotatably disposed on two sides, and receives the etching resistance tape supplied from the tape supply roller and laminates it to the second side of the roll sheet, and the laminating driven roller drives the laminating with the roll sheet interposed therebetween. It is rotatably disposed on the opposite side of the roller, and the tape transfer roller is disposed between the tape supply roller and the laminating driving roller to pass the etching resistance tape and the etching resistance tape supplied from the tape supply roller. It is transferred to a laminating driving roller, and the protective film recovery roller is disposed adjacent to the tape transfer roller to interact with the tape transfer roller, and recovers the protective film on the etching resistance tape passed through the tape transfer roller, A first roll sheet buffer unit, a pre-etching unit, and a pre-cleaning water remover are sequentially disposed behind the process of the etching resistance tape laminating unit, and the first roll sheet buffer unit is between the etching resistance tape laminating unit and the pre-etching unit. Is disposed to control the process speed between the etching resistance tape laminating unit and the pre-etching unit, the pre-etching unit is disposed between the etching resistance tape laminating unit and the first etching unit on the first process line , The roll sheet is introduced into the first etching unit to perform pre-etching on the roll sheet before proceeding with the etching process, and the pre-etching unit includes a pre-etching bath filled with an etchant and a pre-etching bath. And a plurality of pre-etching guide rollers for guiding the transfer of the roll sheet so that the roll sheet is deepened in the etchant in the pre-etching tank and discharged, and the pre-cleaning water remover includes the pre-etching unit and It is disposed between the first etching units, and cleans and removes water from the roll sheet on which a pre-etching process has been performed, and the pre-clean water remover cleans the roll sheet while spraying water toward the roll sheet. A pre-washer, and an air knife for removing water remaining on the surface of the roll sheet that has been cleaned by wind, and the first etching unit is provided at a rear of the process of the pre-clean water remover,
The first etching unit includes a roll sheet etching cabinet, and the roll sheet etching cabinet has a cabinet structure, and a plurality of etching rooms for performing an etching process on the roll sheet are formed therein, and the etching rooms are in communication with each other. , A roll sheet lead-in roller portion and a roll sheet take-out roller portion are provided in the roll sheet etching cabinet, and the roll sheet lead-in roller portion is disposed in an entrance region of the roll sheet etching cabinet, and the roll sheet is placed inside the roll sheet etching cabinet. And the roll sheet withdrawal roller part is disposed in the exit area of the roll sheet etching cabinet and draws (discharges) the roll sheet to the outside of the roll sheet etching cabinet, and a plurality of first rolls in the roll sheet etching cabinet An etchant spray module is provided, and the first etchant spray modules spray the etchant toward the roll sheet being transferred in the roll sheet etching cabinet in a spray manner to etch half the first surface, which is one side of the roll sheet. Let the process go,
A functional specific gravity washing unit is provided behind the process of the first etching unit, the functional specific gravity washing unit is directly connected to the outlet of the first etching unit, and an etching process using washing water or water mixed with a washing chemical To remove the etching liquid or foreign matter remaining on the completed roll sheet, the functional specific gravity washing unit is a unit cabinet, a specific gravity washing module, first to third washing modules, and a moisture removal module are integrated on the unit cabinet. Mounted, the unit cabinet forms the appearance of the functional specific gravity washing unit, a foot for height adjustment and ground support is disposed at the lower end of the unit cabinet, and the specific gravity washing module and the first to Means for supplying the washing water or water mixed with the washing chemical to the third flushing module at a quantitative and positive pressure are provided, a first drain portion and a second drain portion are provided at a lower portion of the unit cabinet, and the first drain portion is It is disposed at one lower side of the unit cabinet and receives and drains the washing water mixed with the washing agent falling from the specific gravity washing module, and the second drain portion is disposed on the other lower side of the unit cabinet, and the first to third flushing units are flushed. Receives and drains water falling from the module, and the specific gravity washing module is provided on one side of the upper portion of the unit cabinet and removes the etchant remaining on the roll sheet on which the etching process has been completed using washing water mixed with a washing chemical,
The specific gravity flushing module includes a specific gravity flushing module housing, a roll sheet transfer portion, an upper piping portion, a lower piping portion, and a pipe driving portion, and the specific gravity flushing module housing is an exterior frame having a box-shaped cabinet shape, and the specific gravity flushing module housing An inlet portion into which the roll sheet is introduced is formed on one side, and the roll sheet introduced into the inlet portion sequentially passes through the specific gravity washing module, the first to third washing modules, and the moisture removing module, and then the moisture removing module. Discharged to the discharge portion of the housing and then directed to the first roll sheet drying unit,
The roll sheet transfer unit is disposed in the specific gravity flushing module housing, transfers the roll sheet passing through the inlet to the first to third flushing modules, and is formed by a combination of a plurality of rollers and gears, and the upper pipe portion It is disposed on the upper portion of the roll sheet conveying part, and the upper piping part is provided with a plurality of upper spray nozzles for spraying downwardly the washing water mixed with a cleaning agent toward the roll sheet being conveyed by the action of the roll sheet conveying part, and the lower part The piping portion is disposed under the upper piping portion, and the lower piping portion is provided with a plurality of lower spray nozzles for spraying washing water mixed with a cleaning agent upward toward the roll sheet being transferred by the action of the roll sheet transfer portion, and the The pipe driving part is connected to the upper pipe part and the lower pipe part, and drives the upper pipe part and the lower pipe part in at least one direction to ensure spray uniformity of the washing water mixed with the cleaning agent sprayed onto the roll sheet. , The pipe driving part is provided in a form in which a component is coupled to a driving housing coupled to one side of the unit cabinet, the pipe driving part is connected to the upper pipe part and an upper slider for slidingly driving the upper pipe part, and the driving housing An upper sliding plate disposed on the upper side of and connected to the upper slider and sliding in a direction in which the upper pipe part is driven, a lower slider connected to the lower pipe part and slidably driving the lower pipe part, and an upper part of the driving housing And a lower sliding plate disposed on the lower slide and slid in a direction in which the lower pipe part is driven, and a slider driving part is provided in the pipe driving part to alternately drive the upper slider and the lower slider. , The slider driving unit is provided in the driving housing and is connected to the upper sliding plate and the lower sliding plate to alternately drive the upper slider and the lower slider, and the slider unit The eastern part is a servomotor connected to a reducer to generate power, and a rotating shaft disposed between the upper sliding plate and the lower sliding plate in the drive housing and connected to the servomotor to rotate by the operation of the servomotor. And an upper cam plate connected to an upper end of the rotating shaft and rotated cooperatively with the rotating shaft; an upper coupling member coupled to the upper cam plate via an upper long hole of the upper sliding plate; and the rotating shaft A lower cam plate connected to a lower end of the rotating shaft and rotated cooperatively with the rotating shaft, and a lower coupling member coupled to the lower cam plate via a lower long hole of the lower sliding plate, and the first to third flushing modules Is disposed adjacent to the specific gravity washing module on the unit cabinet, and removes foreign matter remaining on the roll sheet by using water with respect to the roll sheet that has passed the specific gravity washing module, and the first to third washing modules A flush module housing, and a plurality of water sprayers disposed above and below the roll sheet being transferred within the flush module housing, and spraying water toward the roll sheet at a corresponding position, and the water removal module It is disposed adjacent to the third flushing module on the unit cabinet, and removes water remaining on the roll sheet by wind with respect to the roll sheet that has passed the third flushing module, and the draining module includes a moisture removing module housing and , A plurality of air knives disposed above and below the roll sheet being transferred in the moisture removal module housing and spraying straight air toward the roll sheet at a corresponding position, and the functional specific gravity washing unit A first roll sheet drying unit, an etching resistance tape peeling unit, a peeling light irradiation unit, an etching resistance tape recovery unit, and a roll sheet recovery unit are sequentially arranged at the rear of the process of,
The first roll sheet drying unit is disposed at the rear of the process of the functional specific gravity washing unit and drying the washed roll sheet through the functional specific gravity washing unit, and the etching resistance tape peeling unit is the first etching unit. The etching resistance tape disposed behind the process and laminated for the first etching process is peeled off, and the peeling light irradiator is directed toward the etching resistance tape so that the etching resistance tape is peeled off from the roll sheet. ), and the etching resistance tape recoverer is disposed behind the process of the peeling light irradiator to recover the etching resistance tape peeled off from the roll sheet by the action of the peeling light irradiator,
The etching-resisting tape recovery device is rotated in contact with the etching-resisting tape, while a tape peeling drive roller for peeling the etching resistance tape from the roll sheet, and an opposite side of the tape peeling drive roller with the roll sheet interposed therebetween. A driven roller for tape peeling which is rotatably disposed on the tape, a tape recovery roller for winding and recovering the peeling tape for etching resistance, and a tape recovery roller disposed between the driving roller for tape peeling and the tape recovery roller and guiding the recovered tape. Including a tape guide roller,
The roll sheet recovery unit is disposed on the first process line on the opposite side of the roll sheet supply unit, and recovers the roll sheet from which the first surface of the roll sheet is etched and the etching resistance tape is peeled off. 2 In the process line, after etching along the direction in which the process proceeds, the roll sheet supply unit, the etching resistance coating unit, the second roll sheet drying unit, the etching resistance curing unit, the roll sheet cutting unit, the carrier laminating unit, and the second etching. The unit is disposed, and the roll sheet supply unit after the etching supplies the roll sheet, which has completed the etching process on the first surface, to the second processing line through the first processing line, and the roll sheet supply unit after the etching When supplying the roll sheet to the second process line, the etched side of the first process line faces the upper side, and the roll sheet on which the etching process for the first side is completed is of the second roll sheet driving roller. It is supplied to the second process line as a function, and the second roll sheet driving roller drives the roll sheet of the roll sheet supply unit toward the roll sheet cutting unit after etching, and the process rear of the roll sheet supply unit after the etching A second roll sheet buffer unit is provided in, and the second roll sheet buffer unit is disposed between the roll sheet supply unit and the etching resistance coating unit after the etching, and after the etching, the roll sheet supply unit and the etching resistance agent are applied. The process speed between the units is adjusted, the etching resistance coating unit is provided behind the process of the second roll sheet buffer unit, and the etching resistance coating unit is the 1/2 etching process completed on the first process line. The etching resistance agent is applied to the first surface of the roll sheet, and the second roll sheet drying unit and the etching resistance curing unit are sequentially disposed behind the process of the etching resistance application unit,
The second roll sheet drying unit is disposed between the etching resistance coating unit and the etching resistance curing unit and drying the roll sheet coated with the etching resistance agent, and the etching resistance curing unit is applied with the etching resistance agent. The roll sheet cutting unit is disposed behind the process of the unit and cures the etching resistance agent, and the roll sheet cutting unit is provided behind the process of the etching resistance curing unit on the second process line, and the roll sheet cutting unit is the etching resistance agent. It is disposed behind the process of the application unit and cuts the roll sheet into unit sheets of unit size,
The roll sheet cutting unit includes a cutter that cuts the roll sheet being transferred while being driven up and down, and a cutting die that supports the roll sheet to be cut, and the roll sheet is transferred when cutting the roll sheet. When this is stopped, an electric buffer roll is disposed in front of the spreading roller to compensate for the progress flow of the roll sheet in progress, and the carrier laminating unit is disposed at the rear of the process of the roll sheet cutting unit, and transfers the unit sheet. For laminating a carrier on the unit sheet, an intermediate moving roller is disposed between the carrier laminating unit and the sheet etching unit,
The sheet etching unit is disposed behind the process of the carrier laminating unit and performs an etching process on the second surface of the unit sheet, and the etching process is primarily performed through the first etching unit in the state of the roll sheet. In the state of the unit sheet, a main pattern is formed on the unit sheet as a second etching process proceeds through the sheet etching unit, and the sheet etching unit is a speed variable type in which the speed is accelerated at the entrance and exit through which the carrier is introduced and discharged. It is a second etching unit, and the second etching unit includes a sheet-shaped unit body part, a carrier moving module, a plurality of second etchant spray modules, and a carrier acceleration module,
The sheet-like unit body part forms the exterior of the second etching unit, the sheet-like unit body part has a cabinet shape, and the carrier moving module is provided in the sheet-like unit body part and serves to move the carrier, and the carrier moves. The module is applied with a roller that is strong against the etchant, and the plurality of second etchant spray modules are provided in the sheet-like unit body and spray the etchant toward the unit sheet moving through the carrier moving module within the sheet-like unit body. Injecting in a manner, the carrier acceleration module is disposed on at least one side of an inlet portion into which the carrier is introduced and an outlet portion from which the carrier is discharged, and serves to accelerate the carrier at a corresponding position, and the carrier acceleration module is an inlet side It includes a carrier acceleration module and a discharge-side carrier acceleration module, the inlet-side carrier acceleration module is provided on the inlet side of the sheet-shaped unit body portion, the carrier laminating unit side to control the speed of the carrier introduced into the sheet-shaped unit body portion. The speed of the carrier is accelerated faster than the speed of the carrier moving module, and the discharge-side carrier acceleration module is provided on the discharge part side of the sheet-shaped unit body part, and the etching process is completed, and is discharged from the inside of the sheet-shaped unit body part to the outside. Is accelerated faster than the speed of the carrier moving module, and a position sensing unit and a controller are further provided for the operation of the inlet-side carrier acceleration module and the discharge-side carrier acceleration module, and the position sensing unit is laminated with the unit sheet. It detects whether the carrier has reached the inlet or outlet side, and the controller performs the operation of the carrier acceleration module and the operation of the inlet carrier acceleration module and the discharge side carrier based on a detection signal of the position detection unit. A method of manufacturing a fine metal mask that controls the operation of the acceleration module.
The method of claim 1,
In the step (b), the reinforcing adhesive material having an interfacial adhesive strength with the photoresist higher than that of the fine metal plate is applied on both surfaces of the fine metal plate.
The method of claim 1,
In the step (e), the pattern of the through holes is not formed along a virtual line inclined at a predetermined angle with respect to a virtual center line positioned at the center of the fine metal plate attached to the photoresist. A method of manufacturing a fine metal mask that is uniformly formed at regular intervals along an imaginary line parallel to the center line.
The method of claim 1,
In the step (d), the pattern holes of the photoresist increase in X position as the X coordinate and Y coordinate for each pattern hole increase, based on the center coordinate at the center of the photoresist, A method of manufacturing a fine metal mask that is formed without changing the Y position.
The method of claim 4,
In the step (d), the pattern holes of the photoresist are based on the center coordinate at the center of the photoresist, and as the X and Y coordinates of each pattern hole increase, the X position is expressed in The change increases accordingly, and the Y position is formed without change.

Here, α represents the target slope (inclination angle), x represents the active area of the pattern, x'represents the X position of the pattern to be moved, and y represents the active area of the pattern, y'represents the Y position of the pattern to be moved.
The method of claim 1,
The reinforced adhesive material,
Filler consisting of particles having a size of 2nm to 500nm; And
A binder fixing the filler;
Fine metal mask manufacturing method comprising a.
A roll sheet wound in a roll shape and having photoresist formed on both sides;
A roll sheet supply unit supplying the roll sheet to a first processing line in which an etching process is performed;
A first etching unit provided on one side of the first process line and performing an etching process on a first surface, which is one surface of the roll sheet; And
A second etching unit for performing an etching process on the second surface, which is the other surface of the roll sheet;
Including,
The pattern holes of the photoresist are formed by being arranged along an imaginary line inclined at a certain angle with respect to a imaginary center line located at the center of the photoresist,
A fine metal plate in which a pattern of through holes is formed in a mask sheet is generated by the etching process, and the mask sheet is manufactured as a fine metal mask through a plurality of processes sequentially on a first process line and a second process line. The first process line performs a first etching process on the roll sheet through a first etching unit, and the second process line performs a second etching process on the unit sheet through a second etching unit,
The roll sheet is supplied to the first process line where an etching process is performed by a roll sheet supply unit, and the first etching unit provided on one side of the first process line is disposed on a first surface, which is one side of the roll sheet. An etching process is performed, and the second etching unit performs an etching process on the second side, which is the other side of the roll sheet, and an etching resistance tape is laminated on one side of the roll sheet, and the The roll sheet on which the etching resistance tape is laminated is introduced into the first etching unit, and the first side, which is one side of the roll sheet, is etched through the first etching unit, and the roll sheet on which the first side is etched is After being pulled out from the first etching unit and inverted, the etched first surface is turned over so that the etched first surface is placed on the top, and then an etching resistance agent is applied to the etched first surface area, and the etching resistance agent is applied to the etched agent of the roll sheet. After being applied to the first surface area, the roll sheet is cut to form a unit sheet of a unit size, and thereafter, an etching process is performed on the unetched second surface area through the second etching unit, and the unit A carrier is laminated to the sheet, and the unit sheet laminated to the carrier is introduced into the second etching unit, and the second surface, which is the remaining surface of the unit sheet, is etched through the second etching unit, so that the pattern of the through holes is Is formed, and in the first process line, a roll sheet supply unit, a tape laminating unit for etching resistance, a pre-etching unit, a pre-cleaning and dewatering device, a first etching unit, a functional specific gravity washing unit, and an etching resistance along the direction in which the process proceeds. A tape peeling unit and a roll sheet recovery unit are arranged
The roll sheet supply unit supplies the roll sheet formed by being wound in a roll shape to the first processing line where a primary etching process is performed, and the roll sheet is supplied through the roll sheet supply unit. A first roll sheet driving roller and a plurality of roll sheet guide rollers are provided in order to be released and supplied to the first process line, and the first roll sheet driving roller is provided between the roll sheet supply unit and the roll sheet collecting unit. It is disposed on the first process line, and the roll sheet is moved toward the roll sheet recovery unit by pulling the roll sheet by a driving force of a motor, and the roll sheet guide rollers are disposed at various places in both the first process line and the second process line. While imparting tension to the roll sheet to guide the transport of the roll sheet, the etching resistance tape laminating unit is disposed between the roll sheet supply unit and the first etching unit, and Before the etching process proceeds, an etching resistance tape is laminated on a second surface that is the other side of the roll sheet that is released from the roll sheet supply unit and supplied to the first etching unit, and the etching resistance tape laminating unit A silver tape supply roller, a laminating drive roller, a laminating driven roller, a tape transfer roller, and a protective film recovery roller are included, and the tape supply roller supplies the etching resistance tape, and the laminating drive roller is the first roller of the roll sheet. It is rotatably disposed on two sides, and receives the etching resistance tape supplied from the tape supply roller and laminates it to the second side of the roll sheet, and the laminating driven roller drives the laminating with the roll sheet interposed therebetween. It is rotatably disposed on the opposite side of the roller, and the tape transfer roller is disposed between the tape supply roller and the laminating driving roller to pass the etching resistance tape and the etching resistance tape supplied from the tape supply roller. It is transferred to a laminating driving roller, and the protective film recovery roller is disposed adjacent to the tape transfer roller to interact with the tape transfer roller, and recovers the protective film on the etching resistance tape passed through the tape transfer roller, A first roll sheet buffer unit, a pre-etching unit, and a pre-cleaning water remover are sequentially disposed behind the process of the etching resistance tape laminating unit, and the first roll sheet buffer unit is between the etching resistance tape laminating unit and the pre-etching unit. Is disposed to control the process speed between the etching resistance tape laminating unit and the pre-etching unit, the pre-etching unit is disposed between the etching resistance tape laminating unit and the first etching unit on the first process line , The roll sheet is introduced into the first etching unit to perform pre-etching on the roll sheet before proceeding with the etching process, and the pre-etching unit includes a pre-etching bath filled with an etchant and a pre-etching bath. And a plurality of pre-etching guide rollers for guiding the transfer of the roll sheet so that the roll sheet is deepened in the etchant in the pre-etching tank and discharged, and the pre-cleaning water remover includes the pre-etching unit and It is disposed between the first etching units, and cleans and removes water from the roll sheet on which a pre-etching process has been performed, and the pre-clean water remover cleans the roll sheet while spraying water toward the roll sheet. A pre-washer, and an air knife for removing water remaining on the surface of the roll sheet that has been cleaned by wind, and the first etching unit is provided at a rear of the process of the pre-clean water remover,
The first etching unit includes a roll sheet etching cabinet, and the roll sheet etching cabinet has a cabinet structure, and a plurality of etching rooms for performing an etching process on the roll sheet are formed therein, and the etching rooms are in communication with each other. , A roll sheet lead-in roller portion and a roll sheet take-out roller portion are provided in the roll sheet etching cabinet, and the roll sheet lead-in roller portion is disposed in an entrance region of the roll sheet etching cabinet, and the roll sheet is placed inside the roll sheet etching cabinet. And the roll sheet withdrawal roller part is disposed in the exit area of the roll sheet etching cabinet and draws (discharges) the roll sheet to the outside of the roll sheet etching cabinet, and a plurality of first rolls in the roll sheet etching cabinet An etchant spray module is provided, and the first etchant spray modules spray the etchant toward the roll sheet being transferred in the roll sheet etching cabinet in a spray manner to etch half the first surface, which is one side of the roll sheet. Let the process go,
A functional specific gravity washing unit is provided behind the process of the first etching unit, the functional specific gravity washing unit is directly connected to the outlet of the first etching unit, and an etching process using washing water or water mixed with a washing chemical To remove the etching liquid or foreign matter remaining on the completed roll sheet, the functional specific gravity washing unit is a unit cabinet, a specific gravity washing module, first to third washing modules, and a moisture removal module are integrated on the unit cabinet. Mounted, the unit cabinet forms the appearance of the functional specific gravity washing unit, a foot for height adjustment and ground support is disposed at the lower end of the unit cabinet, and the specific gravity washing module and the first to Means for supplying the washing water or water mixed with the washing chemical to the third flushing module at a quantitative and positive pressure are provided, a first drain portion and a second drain portion are provided at a lower portion of the unit cabinet, and the first drain portion is It is disposed at one lower side of the unit cabinet and receives and drains the washing water mixed with the washing agent falling from the specific gravity washing module, and the second drain portion is disposed on the other lower side of the unit cabinet, and the first to third flushing units are flushed. Receives and drains water falling from the module, and the specific gravity washing module is provided on one side of the upper portion of the unit cabinet and removes the etchant remaining on the roll sheet on which the etching process has been completed using washing water mixed with a washing chemical,
The specific gravity flushing module includes a specific gravity flushing module housing, a roll sheet transfer portion, an upper piping portion, a lower piping portion, and a pipe driving portion, and the specific gravity flushing module housing is an exterior frame having a box-shaped cabinet shape, and the specific gravity flushing module housing An inlet portion into which the roll sheet is introduced is formed on one side, and the roll sheet introduced into the inlet portion sequentially passes through the specific gravity washing module, the first to third washing modules, and the moisture removing module, and then the moisture removing module. Discharged to the discharge portion of the housing and then directed to the first roll sheet drying unit,
The roll sheet transfer unit is disposed in the specific gravity flushing module housing, transfers the roll sheet passing through the inlet to the first to third flushing modules, and is formed by a combination of a plurality of rollers and gears, and the upper pipe portion It is disposed on the upper portion of the roll sheet conveying part, and the upper piping part is provided with a plurality of upper spray nozzles for spraying downwardly the washing water mixed with a cleaning agent toward the roll sheet being conveyed by the action of the roll sheet conveying part, and the lower part The piping portion is disposed under the upper piping portion, and the lower piping portion is provided with a plurality of lower spray nozzles for spraying washing water mixed with a cleaning agent upward toward the roll sheet being transferred by the action of the roll sheet transfer portion, and the The pipe driving part is connected to the upper pipe part and the lower pipe part, and drives the upper pipe part and the lower pipe part in at least one direction to ensure spray uniformity of the washing water mixed with the cleaning agent sprayed onto the roll sheet. , The pipe driving part is provided in a form in which a component is coupled to a driving housing coupled to one side of the unit cabinet, the pipe driving part is connected to the upper pipe part and an upper slider for slidingly driving the upper pipe part, and the driving housing An upper sliding plate disposed on the upper side of and connected to the upper slider and sliding in a direction in which the upper pipe part is driven, a lower slider connected to the lower pipe part and slidably driving the lower pipe part, and an upper part of the driving housing And a lower sliding plate disposed on the lower slide and slid in a direction in which the lower pipe part is driven, and a slider driving part is provided in the pipe driving part to alternately drive the upper slider and the lower slider. , The slider driving unit is provided in the driving housing and is connected to the upper sliding plate and the lower sliding plate to alternately drive the upper slider and the lower slider, and the slider unit The eastern part is a servomotor connected to a reducer to generate power, and a rotating shaft disposed between the upper sliding plate and the lower sliding plate in the drive housing and connected to the servomotor to rotate by the operation of the servomotor. And an upper cam plate connected to an upper end of the rotating shaft and rotated cooperatively with the rotating shaft; an upper coupling member coupled to the upper cam plate via an upper long hole of the upper sliding plate; and the rotating shaft A lower cam plate connected to a lower end of the rotating shaft and rotated cooperatively with the rotating shaft, and a lower coupling member coupled to the lower cam plate via a lower long hole of the lower sliding plate, and the first to third flushing modules Is disposed adjacent to the specific gravity washing module on the unit cabinet, and removes foreign matter remaining on the roll sheet by using water with respect to the roll sheet that has passed the specific gravity washing module, and the first to third washing modules A flush module housing, and a plurality of water sprayers disposed above and below the roll sheet being transferred within the flush module housing, and spraying water toward the roll sheet at a corresponding position, and the water removal module It is disposed adjacent to the third flushing module on the unit cabinet, and removes water remaining on the roll sheet by wind with respect to the roll sheet that has passed the third flushing module, and the draining module includes a moisture removing module housing and , A plurality of air knives disposed above and below the roll sheet being transferred in the moisture removal module housing and spraying straight air toward the roll sheet at a corresponding position, and the functional specific gravity washing unit A first roll sheet drying unit, an etching resistance tape peeling unit, a peeling light irradiation unit, an etching resistance tape recovery unit, and a roll sheet recovery unit are sequentially arranged at the rear of the process of,
The first roll sheet drying unit is disposed at the rear of the process of the functional specific gravity washing unit and drying the washed roll sheet through the functional specific gravity washing unit, and the etching resistance tape peeling unit is the first etching unit. The etching resistance tape disposed behind the process and laminated for the first etching process is peeled off, and the peeling light irradiator is directed toward the etching resistance tape so that the etching resistance tape is peeled off from the roll sheet. ), and the etching resistance tape recoverer is disposed behind the process of the peeling light irradiator to recover the etching resistance tape peeled off from the roll sheet by the action of the peeling light irradiator,
The etching-resisting tape recovery device is rotated in contact with the etching-resisting tape, while a tape peeling drive roller for peeling the etching resistance tape from the roll sheet, and an opposite side of the tape peeling drive roller with the roll sheet interposed therebetween. A driven roller for tape peeling which is rotatably disposed on the tape, a tape recovery roller for winding and recovering the peeling tape for etching resistance, and a tape recovery roller disposed between the driving roller for tape peeling and the tape recovery roller and guiding the recovered tape. Including a tape guide roller,
The roll sheet recovery unit is disposed on the first process line on the opposite side of the roll sheet supply unit, and recovers the roll sheet from which the first surface of the roll sheet is etched and the etching resistance tape is peeled off. 2 In the process line, after etching along the direction in which the process proceeds, the roll sheet supply unit, the etching resistance coating unit, the second roll sheet drying unit, the etching resistance curing unit, the roll sheet cutting unit, the carrier laminating unit, and the second etching. The unit is disposed, and the roll sheet supply unit after the etching supplies the roll sheet, which has completed the etching process on the first surface, to the second processing line through the first processing line, and the roll sheet supply unit after the etching When supplying the roll sheet to the second process line, the etched side of the first process line faces the upper side, and the roll sheet on which the etching process for the first side is completed is of the second roll sheet driving roller. It is supplied to the second process line as a function, and the second roll sheet driving roller drives the roll sheet of the roll sheet supply unit toward the roll sheet cutting unit after etching, and the process rear of the roll sheet supply unit after the etching A second roll sheet buffer unit is provided in, and the second roll sheet buffer unit is disposed between the roll sheet supply unit and the etching resistance coating unit after the etching, and after the etching, the roll sheet supply unit and the etching resistance agent are applied. The process speed between the units is adjusted, the etching resistance coating unit is provided behind the process of the second roll sheet buffer unit, and the etching resistance coating unit is the 1/2 etching process completed on the first process line. The etching resistance agent is applied to the first surface of the roll sheet, and the second roll sheet drying unit and the etching resistance curing unit are sequentially disposed behind the process of the etching resistance application unit,
The second roll sheet drying unit is disposed between the etching resistance coating unit and the etching resistance curing unit and drying the roll sheet coated with the etching resistance agent, and the etching resistance curing unit is applied with the etching resistance agent. The roll sheet cutting unit is disposed behind the process of the unit and cures the etching resistance agent, and the roll sheet cutting unit is provided behind the process of the etching resistance curing unit on the second process line, and the roll sheet cutting unit is the etching resistance agent. It is disposed behind the process of the application unit and cuts the roll sheet into unit sheets of unit size,
The roll sheet cutting unit includes a cutter that cuts the roll sheet being transferred while being driven up and down, and a cutting die that supports the roll sheet to be cut, and the roll sheet is transferred when cutting the roll sheet. When this is stopped, an electric buffer roll is disposed in front of the spreading roller to compensate for the progress flow of the roll sheet in progress, and the carrier laminating unit is disposed at the rear of the process of the roll sheet cutting unit, and transfers the unit sheet. For laminating a carrier on the unit sheet, an intermediate moving roller is disposed between the carrier laminating unit and the sheet etching unit,
The sheet etching unit is disposed behind the process of the carrier laminating unit and performs an etching process on the second surface of the unit sheet, and the etching process is primarily performed through the first etching unit in the state of the roll sheet. In the state of the unit sheet, a main pattern is formed on the unit sheet as a second etching process proceeds through the sheet etching unit, and the sheet etching unit is a speed variable type in which the speed is accelerated at the entrance and exit through which the carrier is introduced and discharged. It is a second etching unit, and the second etching unit includes a sheet-shaped unit body part, a carrier moving module, a plurality of second etchant spray modules, and a carrier acceleration module,
The sheet-like unit body part forms the exterior of the second etching unit, the sheet-like unit body part has a cabinet shape, and the carrier moving module is provided in the sheet-like unit body part and serves to move the carrier, and moves the carrier. The module is applied with a roller that is strong against the etching solution, and the plurality of second etching solution spray modules are provided in the sheet-shaped unit body and spray the etching solution toward the unit sheet moving through the carrier moving module in the sheet-shaped unit body. Injecting in a manner, the carrier acceleration module is disposed on at least one side of an inlet portion into which the carrier is introduced and an outlet portion from which the carrier is discharged, and serves to accelerate the carrier at a corresponding position, and the carrier acceleration module is an inlet side It includes a carrier acceleration module and a discharge-side carrier acceleration module, wherein the inlet-side carrier acceleration module is provided on the inlet side of the sheet-like unit body and controls the speed of the carrier introduced into the sheet-like unit body from the carrier laminating unit side. The speed of the carrier is accelerated faster than the speed of the carrier moving module, and the discharge-side carrier acceleration module is provided on the discharge part side of the sheet-like unit body part, and the etching process is completed, and is discharged from the inside of the sheet-like unit body part to the outside. Is accelerated faster than the speed of the carrier moving module, a position sensing unit and a controller are further provided for the operation of the inlet-side carrier acceleration module and the discharge-side carrier acceleration module, and the position sensing unit is laminated with the unit sheet. It detects whether the carrier has reached the inlet or outlet side, and the controller performs the operation of the carrier acceleration module and the operation of the inlet carrier acceleration module and the discharge side carrier based on the detection signal of the position detection unit. A fine metal mask manufacturing system that controls the operation of the acceleration module.
The method of claim 7,
A system for manufacturing a fine metal mask, wherein a reinforcing adhesive material having an interfacial adhesion with the photoresist higher than that of the fine metal plate is applied to both surfaces of the fine metal plate.
The method of claim 7,
In the fine metal plate, the pattern of the through holes is not formed along a virtual line inclined at a predetermined angle with respect to a virtual center line positioned at the center of the fine metal plate attached to correspond to the photoresist. A fine metal mask manufacturing system that is uniformly formed at regular intervals along parallel virtual lines.
The method of claim 7,
The pattern holes of the photoresist are formed without a change in the Y position as the X coordinate and the Y coordinate for each pattern hole increase, based on the center coordinate at the center of the photoresist. Being a fine metal mask manufacturing system.
The method of claim 10,
The pattern holes of the photoresist are based on the center coordinate at the center of the photoresist, and as the X and Y coordinates of each pattern hole increase, the X position increases according to the following equation, Y A fine metal mask manufacturing system where the position is formed without change.

Here, α represents the target slope (inclination angle), x represents the active area of the pattern, x'represents the X position of the pattern to be moved, and y represents the active area of the pattern, y'represents the Y position of the pattern to be moved.
The method of claim 8,
The reinforced adhesive material,
Filler consisting of particles having a size of 2nm to 500nm; And
A binder fixing the filler;
Fine metal mask manufacturing system comprising a.
The method of claim 8,
An adhesive force between the reinforced adhesive material and the photoresist is 1.5 kgf/in to 2.5 kgf/in.
The method of claim 8,
A fine metal mask manufacturing system having an adhesive force between the reinforced adhesive material and the micrometal plate of 2.0 kgf/in to 3.0 kgf/in.

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