KR101877515B1 - Slot die system and a slot die control system using the same - Google Patents

Abstract

In a slot die system and a slot die control method using the same, the slot die system includes an outer case and a slot die coating equipment. The outer case has a glove on one side and a door on the other side. The slot die coating equipment is housed inside the outer case, and includes a slot die, a syringe, a connection unit, and a feed control unit. The slot die discharges fluid through a nozzle to perform coating on a substrate. The syringe includes a pump unit for pumping fluid to the slot die. The connection unit transfers the fluid between the syringe and the slot die. The transfer control unit controls the transfer speed of the substrate in consideration of a response delay caused by the pumping.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a slot die system and a slot die control method using the same,

The present invention relates to a slot die system and a slot die control method using the slot die system. More particularly, the present invention relates to a slot die system used for performing slot die coating using a fluid such as organic electronic ink, And a slot die control method using the slot die.

The slot die coating is characterized in that the substrate is coated with a fluid discharged through the end of the slot die as part of a coating method for applying a fluid such as ink to a substrate or the like. Such a slot die coating can perform coating on a substrate while maintaining the composition, viscosity, temperature and the like of the liquid, can perform coating with stability and high reproducibility with a relatively simple structure, can minimize contamination, And a layer can be coated thereon.

On the other hand, in the case of a slot die system for performing slot die coating, since an organic material is used as a coating ink, a sealing system should be formed to smoothly perform a coating process. In addition, The workability is lowered and the process time is increased.

Further, in order to maintain the closed system, it is necessary to control the atmosphere inside the chamber in which the slot die coating equipment is installed, and it takes a relatively long time to control the atmosphere, there was.

Further, in the conventional slot die coating, there is a problem that the uniformity of the coating thickness is lowered at the initial stage of the coating due to the response delay of the driving part.

Korean Patent Publication No. 10-2013-0022446 Korean Patent Publication No. 10-2015-0088988

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a slot die system capable of improving the workability, reducing the time required for the process, and improving the uniformity of the coating thickness at the initial stage of coating .

It is another object of the present invention to provide a slot die control method using the slot die system.

The slot die system according to one embodiment for realizing the object of the present invention includes an outer case and a slot die coating equipment. The outer case has a glove on one side and a door on the other side. The slot die coating equipment is housed inside the outer case, and includes a slot die, a syringe, a connection unit, and a feed control unit. The slot die discharges fluid through a nozzle to perform coating on a substrate. The syringe includes a pump unit for pumping fluid to the slot die. The connection unit transfers the fluid between the syringe and the slot die. The transfer control unit controls the transfer speed of the substrate in consideration of a response delay caused by the pumping.

In one embodiment, the apparatus may further include a sensor unit mounted on the connection unit for measuring a time constant of the slot die, which is a response delay due to the pumping, before coating the substrate.

In one embodiment, the sensor portion may include a pressure sensor.

In one embodiment, the response delay in response to the pumping may be stored in a look-up table.

In one embodiment, the feed control unit may reduce the feed rate of the substrate in proportion to the response delay in the period in which the response delay occurs.

In one embodiment, the slot die coating equipment comprises a frame portion forming a first space and a second space, respectively, above the first space, in which the slot die and the syringe are received, A driving unit that is accommodated in the first space and that drives the stage; a conveyance guide that is accommodated in the second space and conveys the slot die; and a conveyance unit that is mounted on the upper surface of the frame unit, And a furnace for applying heat to the second spaces.

According to another aspect of the present invention, there is provided a method of controlling a slot die, comprising: an outer case having a glove formed on one side and a door formed on the other side; In a slot die system including die coating equipment, the syringes are assembled and the substrate is loaded. To control the atmosphere of the slot die coating equipment. The transfer speed of the substrate is controlled in consideration of the response delay due to pumping, and slot die coating is performed. And unloads the substrate. The slot die coating equipment is cleaned.

In one embodiment, it is possible to derive a time constant that is the response delay due to pumping by repeated fuzzing before performing the slot die coating.

In one embodiment, prior to performing the slot die coating, cleaning the nozzles of the slot die coating equipment and performing meniscus control may be further included.

In one embodiment, the step of assembling the syringe and cleaning the slot die coating equipment is performed with the door unit open, and the step of controlling the atmosphere of the slot die coating equipment comprises closing the door unit Lt; / RTI >

In one embodiment, cleaning the nozzle of the slot die coating equipment may use the glove.

In one embodiment, in controlling the atmosphere of the slot die coating apparatus, nitrogen gas may be introduced into one side of the outer case and the nitrogen gas may be discharged to the other side of the outer case.

According to the embodiments of the present invention, by controlling the transfer speed of the substrate in consideration of response delay due to pumping in the slot die coating, uniform coating can be realized in the initial stage of coating.

Particularly, since the time constant is derived by repetitive purging through the sensor unit mounted on the connection unit, the feed rate of the substrate can be controlled in consideration of the time constant which varies depending on the characteristics of the slot die coating equipment.

Alternatively, it is possible to control the transfer of the substrate according to the response delay by using the lookup table stored for each slot die coating equipment characteristic, so that a uniform coating can be effectively achieved.

In addition, by optimizing the slot die system, the stage, the driving unit, and the syringe to optimize the slot die system to be relatively small, it is possible to perform work and atmosphere control in a small space, Optimization can save the process time.

In addition, medium and large work such as syringe assembly and slot die coating equipment cleaning can be performed directly with the door portion open, and precise operations such as atmosphere control and nozzle cleaning are performed through the glove in a state in which the door portion is sealed Thus, it is possible to solve the problem of carrying out all the related large-sized and large-sized work and precision work through the glove, and to minimize the process time with a quick work.

Further, there is an advantage in that atmosphere replacement can be performed relatively quickly by continuously supplying / discharging nitrogen gas in the diagonal direction even in the atmosphere control.

1 is a perspective view illustrating a slot die system according to an embodiment of the present invention.
Figure 2 is a perspective view of the slot die coating equipment of Figure 1;
Figure 3 is a schematic diagram of the slot die coating equipment of Figure 2;
4 is a flowchart illustrating a slot die control method using the slot die system of FIG.
5A to 5E are process drawings showing the slot die control method of FIG.
Fig. 6 is a schematic diagram showing a step of controlling the atmosphere in Fig. 4. Fig.
FIGS. 7A and 7B are graphs showing changes in the amount of oxygen over time in the step of controlling the atmosphere of FIG.
FIG. 8 is a graph showing an example of the time constant sensed in the step of deriving the time constant in FIG.
FIG. 9 is a graph showing an example of a flow rate measured in the step of deriving the time constant in FIG. 4, and FIG. 10 is a graph showing a result of coating and controlling the substrate based on the flow rate measured in FIG.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms.

The terms are used only for the purpose of distinguishing one component from another. The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the term "comprises" or "comprising ", etc. is intended to specify that there is a stated feature, figure, step, operation, component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view illustrating a slot die system according to an embodiment of the present invention. Figure 2 is a perspective view of the slot die coating equipment of Figure 1; Figure 3 is a schematic diagram of the slot die coating equipment of Figure 2;

1 to 3, the slot die system 10 according to the present embodiment includes an outer case 100 and a slot die coating equipment 300 accommodated in the outer case 100.

The slot die system 10 in this embodiment is manufactured to be relatively small, and is excellent in mobility and portability, occupies a relatively small space, and can perform a slot die more effectively.

For example, the outer case 100 may be formed as a transparent square block, and a storage space may be formed therein. The slot die coating equipment 300 is accommodated in the storage space.

A glove 200 may be connected to one side of the outer case 100 and a door 110 may be formed on the other side of the outer case 100.

The door unit 110 may be opened or closed to open or close the storage space in which the slot die coating equipment 300 is housed.

The glove 200 may be inserted into both hands of a user and the user may perform the necessary work in the enclosed space in an enclosed state.

The slot die coating equipment 300 includes a frame 310, a heating furnace 320, a stage 330, a driving unit 340, a transporting guide 350, a slot die 360, a syringe 370, Unit 380 and a feed control unit 390.

The frame 310 includes a first space 311 formed at a lower portion thereof and a second space 312 formed at an upper portion of the frame portion 310. The stage 330 and the driving portion 340 are formed in the first space 311, And the transport guide 350, the slot die 360, and the syringe 370 are fixed to the second space 312.

A heating furnace 320 is fixed on the uppermost surface of the frame part 310.

The heating furnace 320 applies heat to the second space 312, and in particular, may apply heat to ink ejected onto the substrate 331 to induce curing.

The stage 330 is driven by the driving unit 340, and the substrate 331 is mounted on the upper surface.

The driving unit 340 drives the transfer of the stage 330 based on the control signal of the transfer control unit 390.

The transport guide 350 is fixed on the frame part 310 of the second space 312 and the slot die 360 can be transported along the transport guide 350.

The slot die 360 receives the ink and discharges the ink onto the substrate 331 through the nozzle 361 to perform coating. The slot die 360 is connected to the syringe 370 through a connection unit 371 to receive ink and the syringe 370 supplies ink by pumping the pump unit 372. [ do.

The sensor unit 380 is connected to the connection unit 371 to measure the time constant of the slot die, which is the response delay of the ink supplied to the slot die 360.

In this case, the sensor unit 380 may measure a time constant of the slot die, for example, by measuring the pressure of the discharged ink, including a pressure sensor.

The ink is supplied from the initial state by pumping the pump unit 372 by the driving signal of the driving unit. The ink thus supplied is supplied after a predetermined time passes after the input of the driving signal, 370, the length and diameter of the connecting unit 371, the capacity of the pump unit 372, and the like.

Particularly, in the conventional slot die coating, the response delay is not considered, and there is a problem that the coating thickness in the initial coating process is not uniformly maintained in the coating process in the subsequent coating process.

However, in this embodiment, by measuring the time constant, which is the response delay in each slot die coating equipment by the sensor unit 380, the coating thickness can be maintained more uniform from the beginning to the end.

That is, the information about the response delay measured through the sensor unit 380 is provided to the feed control unit 390, and the feed control unit 390 controls the substrate 331 Thereby controlling the conveyance of the stage 330 so as to maintain uniform coating thickness.

For example, the feed control unit 390 may control the feeding speed of the stage 330 to be decreased in a period in which the response delay occurs.

Alternatively, although not shown, the information about the response delay may be stored in a separate look-up table without measuring the response delay through the sensor unit 380.

In this case, the feed control unit 390 controls the feeding speed of the stage 330 to be decreased in a period in which the response delay occurs, based on the information about the stored response delay.

4 is a flowchart illustrating a slot die control method using the slot die system of FIG. 5A to 5E are process drawings showing the slot die control method of FIG. Fig. 6 is a schematic diagram showing a step of controlling the atmosphere in Fig. 4. Fig. FIGS. 7A and 7B are graphs showing changes in the amount of oxygen over time in the step of controlling the atmosphere of FIG. FIG. 8 is a graph showing an example of the time constant sensed in the step of deriving the time constant in FIG. FIG. 9 is a graph showing an example of a flow rate measured in the step of deriving the time constant in FIG. 4, and FIG. 10 is a graph showing a result of coating and controlling the substrate based on the flow rate measured in FIG.

Referring to FIG. 4, in the slot die control method according to the present embodiment, the syringe 370 is assembled and the substrate 331 is loaded (step S10).

In this case, the step of assembling the syringe 370 may be performed while the door 110 of the outer case 100 is opened. Therefore, since the work is not performed through the glove 200, it can be performed quickly for a relatively short time.

Thereafter, the door unit 110 is closed and the substrate 331 is loaded.

Thereafter, referring to Figs. 4 and 5A, the atmosphere is controlled (step S20). In this case, the atmosphere control means replacing the inside of the outer case 100 with nitrogen. Particularly, since the organic electronic ink is used in the slot die coating process, the space in which the slot die coating is performed is changed to nitrogen It is necessary to replace it.

In the case of the atmosphere control, as shown in FIG. 6, a method of introducing nitrogen gas through one side lower part of the outer case 100 and allowing the nitrogen gas to flow out through the other side upper part of the outer case 100 The inside of the outer case 100 is filled with nitrogen.

7A and 7B show changes in the concentration of oxygen in the outer case according to the inflow and outflow times of nitrogen gas, that is, the filling speed, in the atmosphere control as described above. As shown in FIGS. 7A and 7B, (Fig. 7A), the inside of the outer case is completely filled with nitrogen and the filling rate is 30.9 [lpm] (Fig. 7B). When the filling rate is about 10 minutes, It can be confirmed that the inside is completely filled with nitrogen.

As described above, the nitrogen filling time can be reduced through the atmosphere control for removing oxygen while filling the nitrogen in the diagonal direction.

Thereafter, referring to FIGS. 4 and 5B, a time constant is derived through repeated fuzzing (step S30).

As described above, in the case of the slot die coating apparatus, as shown in FIG. 8, a response delay occurs until a real ink is ejected after a response signal (motor input) is inputted. It can be varied by several factors that make up the die coating equipment.

Therefore, in particular, in the early stage of coating, there is a problem that the uniformity of the coating is lowered due to the response delay. Therefore, in this embodiment, the uniformity of the coating is lowered by controlling the feed rate of the substrate 331, Solves the problem.

In order to derive the time constant that is the response delay, the pump unit 372 repeatedly performs pumping, and the sensor unit 380 measures the discharge state of the ink with respect to the response signal in each pumping, The time constant of the coating equipment is derived.

In this case, since ink ejected in the purging step can not be coated on the substrate 331, a purging stage 332 is separately provided on one side of the stage 330 in this embodiment.

Thus, the ink discharged in the purging step is stored in the purging stage 332.

FIG. 8 shows the response delay actually measured by the sensor unit 380. FIG.

4, the nozzle 361 of the slot die is cleaned (step S40). Since the nozzle 361 of the slot die may discharge ink or other contamination through the purging step, it is necessary to perform cleaning in order to finally improve the precision and quality of coating on the substrate.

In this case, the slot die nozzle 361 is cleaned by replacing the door unit 110 with the glove 200 while the atmosphere has already been replaced in the outer case 100 Can be performed in a closed state.

Thereafter, referring to FIGS. 4 and 5C, a meniscus control is performed (step S50).

The meniscus refers to a curved surface formed by the liquid level in the tube due to the capillary phenomenon. The ink discharged through the slot die nozzle 361 is also discharged onto the curved surface according to the capillary phenomenon, Thereby improving the uniformity of the coating by controlling the phenomenon in which the ink is discharged on the curved surface.

Thereafter, referring to FIGS. 4 and 5D, slot die coating is performed (step S60).

In consideration of the measured time constant, the transfer control unit 390 controls the transfer speed of the substrate 331 and calculates the amount of ink discharged per unit area of the substrate 331 And uniformity of the coating is improved.

For example, the transfer controller 390 can control the transfer speed of the substrate 331 to be reduced in consideration of the delay of the ink discharge at the beginning of the coating in response to the response delay, When it is maintained constant, the feed rate of the substrate can be controlled uniformly.

That is, the amount of ink ejected per unit area of the substrate 331 may be determined to be a certain amount of time at the initial stage of ejection until the amount of ink ejected per unit area of the substrate 331 reaches a predetermined amount due to a response delay, as shown in FIG. The transfer controller 390 controls the transfer speed of the substrate 331 based on the time constant derived in order to consider the discharge delay due to the response delay.

Thus, as shown in FIG. 10, the uniformity of coating due to the difference in coating thickness can be minimized by controlling the conveying speed of the conveying control unit 390 to maintain a uniform coating thickness regardless of the position of the substrate.

4 and 5E, as the slot die coating is completed, the substrate 331 is unloaded (step S70), and finally the slot die coating equipment 300 is cleaned (step S80 ).

In this case, the slot die coating equipment 300 is cleaned without using the separate glove 200 in a state in which the door unit 110 is opened because the coating is completed.

Thus, the slot die coating apparatus 300 can be cleaned for a relatively short period of time, which is effective.

According to the embodiments of the present invention, uniformity of coating can be realized in the initial stage of coating by controlling the transfer speed of the substrate in consideration of response delay due to pumping in slot die coating.

Particularly, since the time constant is derived by repetitive purging through the sensor unit mounted on the connection unit, the feed rate of the substrate can be controlled in consideration of the time constant which varies depending on the characteristics of the slot die coating equipment.

Alternatively, it is possible to control the transfer of the substrate according to the response delay by using the lookup table stored for each slot die coating equipment characteristic, so that a uniform coating can be effectively achieved.

In addition, by optimizing the slot die system, the stage, the driving unit, and the syringe to optimize the slot die system to be relatively small, it is possible to perform work and atmosphere control in a small space, Optimization can save the process time.

In addition, medium and large work such as syringe assembly and slot die coating equipment cleaning can be performed directly with the door portion open, and precise operations such as atmosphere control and nozzle cleaning are performed through the glove in a state in which the door portion is sealed Thus, it is possible to solve the problem of carrying out all the related large-sized and large-sized work and precision work through the glove, and to minimize the process time with a quick work.

Further, there is an advantage in that atmosphere replacement can be performed relatively quickly by continuously supplying / discharging nitrogen gas in the diagonal direction even in the atmosphere control.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

The slot die system and the slot die control method using the same according to the present invention have industrial applicability that can be used for slot die coating.

10: Slot die system 100: External case
110: door part 200: glove
300: Slot die coating equipment 310: Frame part
320: heating furnace 330: stage
340: driving unit 350: conveying guide
360: Slot die 370: Syringe
380: sensor unit 390:

Claims (12)

An outer case having a glove formed on one side and a door formed on the other side; And
And a slot die coating equipment accommodated in the outer case,
Wherein the slot die coating equipment comprises:
A slot die for discharging a fluid through a nozzle to perform coating on a substrate;
A syringe including a pump unit for pumping and supplying fluid to the slot die;
A connecting unit through which the fluid is transferred between the syringe and the slot die;
A sensor unit mounted on the connection unit for measuring the time constant of the slot die which is a response delay due to the pumping by repeated fuzzing before coating the substrate;
A transfer controller for controlling a transfer speed of the substrate in consideration of response delay caused by the pumping; And
And a purging stage provided at one side of the stage on which the substrate is mounted, for storing a fluid to be discharged for measuring the time constant of the slot die. delete The method according to claim 1,
Wherein the sensor unit comprises a pressure sensor. The method according to claim 1,
Wherein the response delay due to the pumping is stored as a look-up table. The image forming apparatus according to claim 1 or 4,
And decreases the feed rate of the substrate in proportion to the response delay in a period in which the response delay occurs. 2. The slot die coating apparatus of claim 1,
A frame portion forming a first space and a second space in which the slot die and the syringe are accommodated, respectively, at an upper portion of the first space;
A driving unit accommodated in the first space and driving the stage;
A transporting guide accommodated in the second space and transporting the slot die; And
And a heating furnace mounted on an upper surface of the frame portion to apply heat to the first and second spaces,
And the stage is received in the first space. In a slot die system including an outer case having a glove formed on one side and a door portion formed on the other side and a slot die coating equipment accommodated in the outer case,
Assembling the syringe and loading the substrate;
Controlling the atmosphere of the slot die coating equipment;
Deriving a time constant that is a response delay due to pumping by repeated fuzzing;
Controlling a feed rate of the substrate in consideration of response delay due to pumping, and performing slot die coating;
Unloading the substrate; And
And cleaning the slot die coating equipment,
Wherein the fluid pumped by the repeated purging is stored in a purging stage provided at one side of the stage on which the substrate is mounted. delete 8. The method of claim 7, wherein before performing the slot die coating,
Cleaning the nozzle of the slot die coating equipment; And
Further comprising the step of performing a meniscus control. 10. The method of claim 9,
Assembling the syringe, and cleaning the slot die coating equipment are performed with the door portion open,
Wherein controlling the atmosphere of the slot die coating equipment is performed in a state where the door unit is closed. 10. The method of claim 9,
Wherein the step of cleaning the nozzle of the slot die coating equipment uses the glove. 8. The method of claim 7, wherein in controlling the atmosphere of the slot die coating equipment,
Wherein a nitrogen gas is introduced into a lower portion of one side of the outer case and the nitrogen gas is caused to flow out to an upper side of the other side of the outer case.

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