KR101872076B1 - 플라즈마 처리 장치 - Google Patents

플라즈마 처리 장치 Download PDF

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Publication number
KR101872076B1
KR101872076B1 KR1020150154315A KR20150154315A KR101872076B1 KR 101872076 B1 KR101872076 B1 KR 101872076B1 KR 1020150154315 A KR1020150154315 A KR 1020150154315A KR 20150154315 A KR20150154315 A KR 20150154315A KR 101872076 B1 KR101872076 B1 KR 101872076B1
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KR
South Korea
Prior art keywords
high frequency
antenna element
frequency antenna
plasma
antenna
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KR1020150154315A
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English (en)
Korean (ko)
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KR20160053812A (ko
Inventor
쥰 야마와쿠
다츠오 마츠도
치시오 고시미즈
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication of KR20160053812A publication Critical patent/KR20160053812A/ko
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    • H01L21/02315—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H01J37/3211—Antennas, e.g. particular shapes of coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H01L21/0234—
    • H01L21/205—
    • H01L21/3065—
    • H01L21/683—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H01L2021/60187—

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020150154315A 2014-11-05 2015-11-04 플라즈마 처리 장치 Active KR101872076B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014225230A JP6623511B2 (ja) 2014-11-05 2014-11-05 プラズマ処理装置
JPJP-P-2014-225230 2014-11-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020180071244A Division KR101998520B1 (ko) 2014-11-05 2018-06-21 플라즈마 처리 장치 및 플라즈마 발생 유닛

Publications (2)

Publication Number Publication Date
KR20160053812A KR20160053812A (ko) 2016-05-13
KR101872076B1 true KR101872076B1 (ko) 2018-06-27

Family

ID=55853448

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020150154315A Active KR101872076B1 (ko) 2014-11-05 2015-11-04 플라즈마 처리 장치
KR1020180071244A Active KR101998520B1 (ko) 2014-11-05 2018-06-21 플라즈마 처리 장치 및 플라즈마 발생 유닛

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020180071244A Active KR101998520B1 (ko) 2014-11-05 2018-06-21 플라즈마 처리 장치 및 플라즈마 발생 유닛

Country Status (4)

Country Link
US (2) US20160126065A1 (https=)
JP (1) JP6623511B2 (https=)
KR (2) KR101872076B1 (https=)
TW (2) TW202013430A (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108024436A (zh) * 2016-11-01 2018-05-11 中微半导体设备(上海)有限公司 一种等离子体处理装置
US11244808B2 (en) * 2017-05-26 2022-02-08 Applied Materials, Inc. Monopole antenna array source for semiconductor process equipment
JP7002268B2 (ja) * 2017-09-28 2022-01-20 東京エレクトロン株式会社 プラズマ処理装置
JP7139181B2 (ja) * 2018-07-26 2022-09-20 ワイエイシイテクノロジーズ株式会社 プラズマ処理装置
JP7225058B2 (ja) * 2019-08-19 2023-02-20 株式会社東芝 高周波アンテナ及びプラズマ処理装置
JP7233348B2 (ja) * 2019-09-13 2023-03-06 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
JP2021077451A (ja) * 2019-11-05 2021-05-20 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法
KR20230056214A (ko) * 2021-10-20 2023-04-27 세메스 주식회사 플라즈마 처리 장치 및 이를 이용한 플라즈마 처리 방법
KR102735887B1 (ko) * 2021-11-18 2024-12-02 피에스케이 주식회사 기판 처리 장치 및 기판 처리 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012209468A (ja) * 2011-03-30 2012-10-25 Tokyo Electron Ltd プラズマ処理装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW376547B (en) * 1997-03-27 1999-12-11 Matsushita Electric Industrial Co Ltd Method and apparatus for plasma processing
KR20010112958A (ko) * 2000-06-15 2001-12-24 황 철 주 고밀도 플라즈마 반응기
CA2432068C (en) * 2000-12-27 2008-10-07 Japan Science And Technology Corporation Plasma generator
US6667577B2 (en) * 2001-12-18 2003-12-23 Applied Materials, Inc Plasma reactor with spoke antenna having a VHF mode with the spokes in phase
US6876155B2 (en) * 2002-12-31 2005-04-05 Lam Research Corporation Plasma processor apparatus and method, and antenna
JP2007149638A (ja) * 2005-10-27 2007-06-14 Nissin Electric Co Ltd プラズマ生成方法及び装置並びにプラズマ処理装置
JP5231308B2 (ja) * 2009-03-31 2013-07-10 東京エレクトロン株式会社 プラズマ処理装置
JP5227245B2 (ja) 2009-04-28 2013-07-03 東京エレクトロン株式会社 プラズマ処理装置
US8608903B2 (en) * 2009-10-27 2013-12-17 Tokyo Electron Limited Plasma processing apparatus and plasma processing method
JP5851681B2 (ja) * 2009-10-27 2016-02-03 東京エレクトロン株式会社 プラズマ処理装置
US8741097B2 (en) 2009-10-27 2014-06-03 Tokyo Electron Limited Plasma processing apparatus and plasma processing method
JP5592098B2 (ja) 2009-10-27 2014-09-17 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
US9313872B2 (en) * 2009-10-27 2016-04-12 Tokyo Electron Limited Plasma processing apparatus and plasma processing method
JP5685094B2 (ja) * 2011-01-25 2015-03-18 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
JP5800547B2 (ja) * 2011-03-29 2015-10-28 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
JP2013182966A (ja) * 2012-03-01 2013-09-12 Hitachi High-Technologies Corp プラズマ処理装置及びプラズマ処理方法
KR101328520B1 (ko) * 2012-05-17 2013-11-20 한양대학교 산학협력단 플라즈마 장비

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012209468A (ja) * 2011-03-30 2012-10-25 Tokyo Electron Ltd プラズマ処理装置

Also Published As

Publication number Publication date
US11443920B2 (en) 2022-09-13
JP2016091811A (ja) 2016-05-23
JP6623511B2 (ja) 2019-12-25
TW202013430A (zh) 2020-04-01
US20160126065A1 (en) 2016-05-05
KR20160053812A (ko) 2016-05-13
KR20180074633A (ko) 2018-07-03
TW201630030A (zh) 2016-08-16
TWI679672B (zh) 2019-12-11
KR101998520B1 (ko) 2019-07-09
US20200144026A1 (en) 2020-05-07

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