KR101854569B1 - Loading/unloading apparatus for cvd-coated inserts - Google Patents

Abstract

According to the present invention, there is provided a loading/unloading apparatus for a CVD-coating process, which includes: a pallet transferring unit for transferring a pallet in which an insert coating-processed is contained before the coating process of chemical vapor deposition (CVD) is performed; a deck loader part for pulling in or taking out a board for receiving the insert from a magazine deck during the coating process; a turntable unit for aligning the direction or arrangement position of the insert according to necessity of the coating process; and at least one gripping unit for releasing the gripping unit disposed between the pallet transferring unit and the turntable unit or between the turntable unit and the deck loader part to grip the insert or release the gripping of the insert such that the insert is transferred between the pallet transferring unit, the deck loader part, and the turntable unit. The loading/unloading apparatus for a CVD-coating process according to the present invention may perform the process of being loaded to the board inserted into a coating furnace on a pallet on which the insert is contained during CVD coating process, and a unloading process after completion of the coating process by suing an automatic apparatus, so that the manufacturing cost is reduced and the product yield is improved. Particularly, even when unexpected joints of the insert on the board occur due to CVD coating process during unloading process, it is possible to easily separate and unload the joint between the insert and the board through the welded part, so that the tact time of the entire manufacturing process may be reduced and the productivity may be improved.

Description

[0001] The present invention relates to an insert loading / unloading apparatus for a CVD coating process,

The present invention relates to an insert loading / unloading apparatus for CVD coating, and more particularly, to an apparatus for loading and unloading a CVD coating process, which can automatically load and unload a CVD coating furnace during CVD coating process, And more particularly to an insert loading / unloading apparatus.

In general, cutting tools can be used for machining rigid materials such as iron, nonferrous or nonmetal materials. Such a cutting tool is usually produced by mixing and sintering a metal powder such as tungsten (W), cobalt (Co), copper (Cu), nickel (Ni), tin (Sn) or copper-tin (CuSn) .

Such a cutting tool can perform an appropriate coating treatment on the outer surface of the cutting tool in order to improve wear resistance and improve tool life. The coating method is largely divided into chemical vapor deposition (CVD) and physical vapor deposition (PVD).

In particular, the chemical vapor deposition method is mainly used in a semiconductor process, and is used for forming an interlayer insulating film such as a nitride film or an oxide film, and a surface protective film, and a plasma CVD method has been put into practical use in order to increase the physical properties and life of a cutting tool.

However, in order to perform such a CVD coating process, loading and unloading operations are performed in a process of loading onto a board loaded on a pallet on an insert pallet and in a process of unloading after completion of coating process, However, in the past, the operator has to manually load and unload the insert manually, thereby increasing the manufacturing cost and adversely affecting the yield of the product.

Particularly, unexpected joints are generated on the board due to the CVD coating process during the unloading process, and conventionally it is inevitably required to manually unload each workpiece one by one, so that the tact time of the entire manufacturing process is reduced, And the productivity of the product is lowered.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a process for loading a substrate into a coating furnace on a pallet containing an insert during CVD coating process, The manufacturing cost is reduced and the product yield is improved. In particular, even when unexpected joints occur on the board due to the CVD coating process during the unloading process, the joint between the insert and the board can be easily separated There is provided an insert loading / unloading apparatus of a CVD coating process capable of unloading the substrate, reducing the tact time of the entire manufacturing process and improving the productivity of the product.

In order to accomplish the above object, there is provided an insert loading / unloading apparatus for CVD coating according to the present invention, in which an insert having been subjected to the coating process is accommodated before coating is performed by a CVD (Chemical Vapor Deposition) A pallet transfer unit for transferring the pallet; A deck loader portion for pulling in or taking out a board for holding the insert from the magazine deck during the coating process; A turntable unit for aligning the direction or the seating position of the insert on the board in accordance with necessity of the coating process; And a gripping and gripping unit disposed between the pallet transporting unit and the turntable unit, between the turntable unit and the deck loader unit to transfer the insert between the pallet transporting unit, the deck loader unit, and the turntable unit, And at least one gripping unit for releasing the gripping unit.

Wherein the gripping unit is a total of two, one between the pallet transferring unit and the turntable unit, and one between the turntable unit and the deck loader unit, and the gripping unit magnetically acts on the insert A first gripping module having a contact gripper for contacting and releasing contact; And a second gripping module having a tweezers-type tweezers gripper for gripping both surfaces of the insert.

The gripping unit may further include a gripping horizontal transferring unit for horizontally transferring the first and second gripping modules.

The first gripping module is provided with a first exciting part for exciting the contact gripper up and down so that the insert can be easily separated from the pallet when the pallet and the insert are jointed during the coating process, The second gripping module may be provided with a second gripping part for horizontally exciting the tweezers type gripper.

Wherein the turntable unit comprises: a seat cushioning portion provided with a seating groove portion on which an insert is seated, the seat cushioning portion being provided with a central axis in a horizontal direction and capable of horizontally pivoting; A guide member coupled to the support and adjacent to the seating groove for guiding the insert when the insert is seated; And a clamping unit that clamps the insert by simultaneously or sequentially approaching the insert so that the insert seated in the rotation of the seat is prevented from falling off.

Wherein the clamping portion is provided with a clamping contact member so that when the gripping unit grips the insert, interference by the clamping contact member is prevented and the insert is partially exposed from the clamping contact member, An elongated interference preventing slot may be formed at the end of the contact member for clamping.

Wherein the turntable unit includes: a rotation driving unit that rotates the seat rotation unit by 90 degrees; And a clamping driving unit for moving the clamping unit toward and away from the seating groove unit.

The deck loader portion includes a board draw-out plate connected to the loader stand to take out or draw the board stacked on the magazine deck; And a board horizontal driving unit for horizontally driving the loader support.

The pallet transferring unit comprising: a pallet loading unit waiting for the coating process to be performed; A transfer unit for individually transferring the pallet from the pallet loading unit; A pallet discharge unit for discharging the pallet on which the coated pallet is loaded; And a demagnet portion provided between the transfer portion and the pallet discharge portion so as to remove the magnetization property in the coated insert.

The pallet transporting unit, the turntable unit, and the deck loader unit may further include an inspection module for sensing and inspecting the position of the insert.

The insert loading / unloading apparatus of the CVD coating process according to the present invention is an automated apparatus for loading and unloading a substrate on a pallet on which a insert is accommodated in a coating furnace, The manufacturing cost is reduced and the product yield is improved. In particular, even when unexpected joints occur on the board due to the CVD coating process during the unloading process, the inserts and the boards The joining can be easily separated and unloaded, so that the tact time of the entire manufacturing process can be reduced and the productivity of the product can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view schematically showing a placement position of an insert on a pallet and a board of an insert loading / unloading apparatus of a CVD coating process according to an embodiment of the present invention; FIG.
2 is an overall top view of an insert loading / unloading apparatus for CVD coating according to an embodiment of the present invention.
3 is a perspective view of a turntable unit in an insert loading / unloading apparatus for CVD coating according to an embodiment of the present invention.
FIG. 4 is a view illustrating a state in which the seat pivoting portion of the turntable unit is changed by 90 degrees in the insert loading / unloading apparatus of the CVD coating process according to the embodiment of the present invention.
5 is a schematic front view of a gripping unit in an insert loading / unloading apparatus of a CVD coating process according to an embodiment of the present invention.
FIG. 6 is a view schematically showing an operation in which the tweezers gripper of the second gripping module of FIG. 4 is excavated during the unloading process; FIG.
FIG. 7 is a view schematically showing a placement position of an insert on a pallet and a board of an insert loading / unloading apparatus of a CVD coating process according to another embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of an insert loading / unloading apparatus for CVD coating according to the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

The unloading object of the insert loading / unloading apparatus of the CVD coating process according to the embodiment of the present invention is limited to the insert which has been coated with CVD (Chemical Vapor Deposition) method, but heat treatment or other coating process It can also be used for finished inserts, and other micro-machined parts besides inserts can also be applied as unloading objects.

FIG. 1 is a schematic view showing a placement position of an insert on a pallet and a board of an insert loading / unloading apparatus for CVD coating according to an embodiment of the present invention, and FIG. 2 is a cross- FIG. 3 is a perspective view of a turntable unit in an insert loading / unloading apparatus of CVD coating according to an embodiment of the present invention, and FIG. 4 is a perspective view of an embodiment of the present invention FIG. 5 is a view showing a state in which a seat pivoting portion of a turntable unit is changed by 90 degrees in an insert loading / unloading apparatus of a CVD coating process according to an embodiment of the present invention. And is a schematic front view of the gripping unit.

As shown in FIGS. 1 to 5, the insert loading / unloading apparatus of the CVD coating process according to the embodiment of the present invention can be applied to a CVD (Chemical Vapor Deposition) A pallet transferring unit 100 for transferring a pallet P accommodating therein an insert I; A deck loader part 400 for pulling out or taking out a board (B) for receiving the insert (I) from the magazine deck 600 during the coating process; A turntable unit (200) for aligning the direction or arrangement position of the insert (I) on the board (B) according to the necessity of the coating process; And a deck loading unit (400) disposed between the pallet transporting unit (100) and the turntable unit (200), the turntable unit (200), and the deck loader unit (400) And a gripping unit 300 for gripping and ungripping the insert I to be transferred between the loader unit 400 and the turntable unit 200.

The pallet transfer unit 100 is a part disposed on the left side of the apparatus to place the pallet P in a position before the loading and take out the next pallet P after the unloaded and loaded I of the insert I. To this end, the pallet transfer unit 100 mainly refers to FIG. 2, and includes a pallet loading unit 110 waiting for the coating process to be performed; A transfer unit 120 for transferring the pallet P individually from the pallet loading unit 110; And a pallet discharge unit 130 for discharging the pallet P on which the coated insert I is loaded and a transfer unit 130 for transferring the pallet P between the transfer unit 120 and the pallet discharge unit 130, (140) may be included to remove magnetization properties from the insert (I).

The pallet loading part 110 may be provided in the lower left area of the apparatus. A plurality of pallets P may be provided, and a structure for raising and lowering the pallet P itself may be provided. The transfer unit 120 may be provided directly above the pallet P transfer unit. The transfer unit 120 is a device for taking out one pallet P from the pallet P transfer unit and transferring the pallet P to the center of the left side. The pallet P is transferred to the center of the transfer unit 120 and is then stopped and the loading unit 300 is operated to perform the loading process of the insert I.

The pallet discharge part 130 is a part where the coating process is completed and the insert I is loaded on the pallet P and then transferred to the upper left side so that the pallet P is finally stacked in multiple layers. Like the pallet loading part 110, the pallet discharging part 130 may be provided with an ascending / descending structure.

1, the insert I in the present embodiment has a plate surface on the pallet P and an upper surface on the upper surface of the pallet P, (Horizontal plane direction) on the board B for coating processing, while the insert is partially inserted into the loading hole 11, as opposed to being laid horizontally for viewing. The turntable unit 200 may be provided to change the loading position.

Referring to FIGS. 3 and 4, the turntable unit 200 mainly includes a seating groove 211 having a central axis formed in a horizontal direction and horizontally rotatable and having a seating groove 211 on which the insert I is seated, (210); A guide member 220 coupled to the support table 201 and provided adjacent to the seating groove 211 to guide the insert I when the insert I is seated; And a clamping part 230 for clamping the insert I while simultaneously or sequentially approaching the insert I so that the insert I seated in the rotation of the seat cushion 210 is prevented from falling off, . ≪ / RTI >

The support table 201 may be provided on a rotating plate. The rotary plate may be intermittently rotated and rotated at intervals of 90 degrees to perform the operation.

The seat cushioning unit 210 can be pivotably coupled with the center of the support base 201 by a predetermined distance. The seat cushioning unit 210 may be provided to be able to rotate horizontally with a central axis formed therein. Thus, the posture conversion can be generated by the rotation of the seat cushioning portion 210 when the insert I is seated and supported by the seat cushioning portion 210. Strictly speaking, the insert I laid on the pallet P with the plate surface facing upward can be set so that the plate surface faces the horizontal direction at approximately 90 degrees. This is to facilitate the ripping of the second gripping module 330, which will be described later. It is also the position where the insert I is placed on the board B.

The seat rotation unit 210 may be provided with a seat groove 211 on which the insert I is seated. The seating groove portion 211 is a reference point at which the first gripping module 310 grips and mounts the insert I on the pallet P.

A guide member 220 may be provided immediately adjacent to the seating groove 211. The guide member 220 serves as a support for allowing the insert I to be easily seated when the insert I gripped and transported by the first gripping module 310 is seated in the seating groove 211 .

In the present embodiment, the seat cushioning portion 210 may be provided in total of four, one each at an angle of 90 degrees along the circumferential direction. The rotation driving unit 240 may be provided to rotate the seat rotation unit 210 by 90 degrees.

The clamping portion 230 may be provided so as to be able to approach and separate from the seat cushioning portion 210. The clamping portion 230 approaches the insert I side and the insert I can be clamped (fixed) before the insert I is seated in the seat recess 211 and the seat pivoting portion 210 is rotated. To this end, a clamping contact member 231 is provided at one end of the clamping unit 230, and when the gripping unit 300 grips the insert I, interference is prevented and the insert I An interference preventing slot 232 may be formed at the end of the contact member 231 for clamping. The apparatus may further include a clamping driver 250 for moving the clamping unit 230 toward and away from the seating groove 211. In the present embodiment, the clamping contact member 231 may be made of a metal material that can be slightly elastic to the seating groove 211 side.

Through the turntable unit 200 having such a configuration, the insert I may be capable of changing the posture (changing the placement position) of the insert I before being pulled into the board B or taken out of the board B, The posture conversion can be performed automatically through the apparatus, which is advantageous in that the manufacturing cost can be reduced and the product yield can be improved in the CVD coating process.

During the loading process of the insert I into the board B and the unloading process from the board B to the pallet P, the ripping unit 300 takes charge of the transfer. The gripping unit 300 is configured such that the pallet P is centrally conveyed and stopped by the transfer unit 120 and then transferred between the transfer unit 120 and the turntable unit 200 or between the turntable unit 200 and the deck loader 200. [ (400) to lift and transfer the insert (I).

1 and 5, the gripping unit 300 includes a first gripping member 300 having a contact gripper 313 magnetically acting on the insert I to be in contact with and disengaged from the insert I, Module 310; And a gripping type tweezers-type gripper (333) for gripping both surfaces of the insert (I); And a gripping horizontal transferring part 350 and a gripping vertical transferring part 360 for horizontally transferring the first and second gripping modules 330. [

The first gripping module 310 and the second gripping module 330 may be horizontally movably supported by the ripping horizontal bar 361. The first and second gripping modules 330 are respectively connected to first and second gripping cylinders 311 and 331 and a contact gripper 313 or a twin gripper 333, (312, 332).

At the lower end of the first gripping module 310, a contact gripper 313 may be provided as shown in FIG. The contact gripper 313 may magnetically interact with the insert I to grip or un-grip the insert I. This contact type gripper 313 can facilitate gripping the plate surface of the insert I. [

The first gripping module 310 may be provided with a first vibrating part 312 for vibrating the contact type gripper 313 in the vertical direction. The first engaging part 312 may be formed in the first grip part 312 so as to facilitate separation of the insert I from the pallet P when the pallet P and the insert I are jointed during the coating process. In the vertical direction. Actually, since the first gripping module 310 operates in the loading process, the operation of the first exciting unit 312 may be omitted.

Unlike the contact gripper 313 of the first gripping module 310, the second gripping module 330 has a tweezers-type tweezers gripper 333 (see FIG. 6) as shown in FIG. . The tweezers-type gripper 333 can grip both surfaces of the insert I vertically erected by the turntable unit 200.

In addition, the second gripping module 330 may be provided with a second exciting part 332 for exciting the tweezers-type gripper 333 in the horizontal direction. The second exciting unit 332 may temporarily operate the gap of the tweezers-type gripper 333 and finely change the horizontal position of the tweezers-type gripper 333 so that exciting operation is possible.

Through the construction of the second gripping module 330 and the second exciting part 332, insert I is coated on the board B by the CVD coating process on the insert I coated in the CVD coating furnace The joint between the insert I and the board B can be easily separated through the second exciter 332 even when an unexpected joint occurs. Thus, the automated device, particularly the tweezing gripper 333 of the second gripping module 330, can easily unload the insert I from the board B so that the tact time of the entire manufacturing process ) Can be reduced and product productivity can be improved.

The configuration of the gripping unit 300 described above, particularly the configuration of the first gripping module 310 and the configuration of the second gripping module 330, can be rearranged as needed, Configuration may be substituted. This is because when the arrangement position or phase of the insert I is changed in the loading / unloading process of the insert I between the pallet P and the board B, the configuration of the grip unit 300 is replaced .

The deck loader unit 400 includes a board take-out plate 430 connected to the loader support 201 to take out or draw the board B stacked on the magazine deck 600, And a horizontal driving unit 440 for horizontally driving the horizontal driving unit 440.

A magazine deck 600 may be provided at the lower right end of FIG. 1 adjacent to the deck loader unit 400, and a magazine having a board type stacked therein may be provided in the magazine deck 600 .

The apparatus may further include an inspection module 500 disposed on the pallet transfer unit 100, the turntable unit 200 and the deck loader unit 400 to sense and inspect the position of the insert I have.

The inspection module 500 mainly includes an inspection camera unit and an illumination unit. In FIG. 1, only the inspection module 500 provided between the turntable unit 200 and the deck loader unit 400 is referred to, 100 and the turntable unit 200 and may be provided on the upper side of the pallet P so as to check whether the insert I is loaded or not.

With such a configuration, a process of loading the board (B) loaded on the pallet (P) on the pallet (P) accommodated with the insert (I) during the CVD coating process and a process of unloading after the coating process (I) on the board (B) due to the CVD coating process in the unloading process even when an unexpected joint is generated, the first and second exciting parts 312 and 332, the joint between the insert I and the board B can be easily separated and unloaded, so that the tact time of the entire manufacturing process can be reduced and the productivity of the product can be improved.

FIG. 6 is a view schematically showing an operation in which the tweezers gripper of the second gripping module of FIG. 4 is excavated during the unloading process; FIG.

Hereinafter, an insert loading / unloading apparatus for CVD coating an automobile according to an embodiment of the present invention will be described with reference to a process of loading an insert (I) from a pallet (P) to a board (B) The unloading process from the pallet P to the pallet P will be described in detail with reference to FIGS.

First, the loading process will be described.

As shown in FIG. 2, a multi-layered pallet P may be disposed in the pallet loading unit 110 of the pallet transporting unit 100. On the pallet P, there is provided an insert I before the CVD coating process is performed. At the same time or sequentially, the device is activated.

The transfer unit 120 is operated to transfer the pallet P. At this time, the multi-layer pallet P of the pallet loading unit 110 is moved downward so that only one pallet P can be transported.

The pallet P transferred to the left central region is stopped, and then the turntable unit 200 can be operated. The first gripping cylinder 311 of the first gripping module 310 is operated to cause the contact gripper 313 to contact the insert I and grip it.

Then, the insert I can be seated in the seating groove 211 of the seat turning unit 210 of the turntable unit 200 so as to face the plate surface upward. At this time, the guide member 220 can partially support the insert I to assist in seating the insert I. Immediately after or after the insert I is seated, the clamping contact member 231 approaches and clamps to the insert I side by the action of the clamping driver 250. [

The rotary plate of the turntable unit 200 can be intermittently rotated at intervals of 90 degrees. The rotating plate including the seat turning unit 210 on which the insert I is seated rotates clockwise by 90 degrees. Referring to FIG. 4, the seat cushioning unit 210 can be rotated by 90 degrees in a state in which the seat cushion unit is rotated 90 degrees. In this case, since the clamping contact member 231 presses the upper surface of the insert I, the drop I of the insert I can be prevented.

Next, the pivot plate is rotated 90 degrees again, and the second gripping module 330 can operate. The second gripping cylinder operates and the tweezers gripper 333 grips both surfaces of the insert I. At this time, an interference preventing slot 232 is formed in the clamping contact member 231, so that interference with the operation of the twin set gripper 333 is prevented. Also. Immediately after the tweezers gripping the tweezers 333, or sequentially, the clamping driver 250 operates and the clamping contact member 231 retreats.

Through the operation process of the turntable unit 200, the insert I can be changed in the horizontal direction, that is, the position of the insert (posture change) in a state where the plate surface is arranged so as to face the upper side.

Then, the second gripping module 330 may place the insert I on the board B positioned in the right-hand center. Can be stacked vertically on the loading hole of the board (B).

Next, the board drawing plate 430 supporting the board B is moved and stacked on the magazine deck 600.

During the entire loading process, the inspection module operates to detect the position and placement of the insert (I).

The unloading process of the insert (I) subjected to the CVD coating process will be described.

The board B including the insert I with the coating process completed is drawn into the magazine deck 600. Thereafter, the board horizontal driving unit 440 operates and the board take-out plate 430 can take out the board B and arrange it at the center of the right side.

The second gripping module 330 operates. The tweezers gripper 333 grips the vertically erected insert I and then moves to the closest seat turning unit 210 of the turntable unit 200 disposed at the center of the apparatus. Here, the second excitation unit 332 can be operated. That is, a bonding phenomenon between the plate surface of the board B and the insert I may occur in the board B on which the CVD coating process is completed. The second oscillating portion 332 can be excited in the horizontal direction immediately after gripping the insert I or at the same time as shown in Fig. The tweezed gripper 333 grips the insert I immediately after the second exciter 332 is operated to release the insert I from the board B surface.

The operation of the turntable unit 200 proceeds in the reverse order of the above-described loading process. The seat cushioning unit 210 seats the insert I in a rotated state on the right side of Fig. The clamping contact member 231 approaches and clamps the remaining plate surface of the insert I after the plate surface of the insert I is brought into contact with the seating groove portion 211. [ Immediately thereafter, the tweezers-type gripper 333 releases the gripper 333 and returns to the board B.

Thereafter, the rotation plate rotates 90 degrees clockwise, and then the seat rotation unit 210, which is rotated, can be rotated by 90 degrees, like the seat rotation unit 210 shown in Fig.

Again the pivot plate is pivoted 90 degrees clockwise and the clamping portion 230 releases the clamping of the insert I before the first clamping module is approached.

The contact gripper 313 magnetically grinds the upper surface of the insert I and feeds the upper surface of the insert I to the pallet P positioned on the left side.

The inspection module 500 also detects the presence or absence of the insert I of the pallet P. When the insert I is fully loaded on the pallet P, the operation of the apparatus is temporarily stopped, So that the pallet P can be transported to the pallet discharging part 130 by operating. The demagnetizing part 140 is operated on the path to be conveyed so that the magnetization phenomenon can be eliminated on the insert I in the pallet P. [

Finally, the pallet P on which the coating process has been completed is stacked on the pallet discharging unit 130 in multiple layers, so that the unloading process can be completed.

With this operation configuration, a process of loading with a board (B) charged into a coating furnace on a pallet (P) accommodated with an insert (I) during a CVD coating process, and a process of unloading after completion of the coating process are performed by an automated apparatus (I) on the board (B) due to the CVD coating process in the unloading process, even when an unexpected joint occurs, The joint between the insert I and the board B can be easily separated and unloaded, thereby reducing the tact time of the entire manufacturing process and improving the productivity of the product.

FIG. 7 is a view schematically showing a placement position of an insert on a pallet and a board of an insert loading / unloading apparatus of a CVD coating process according to another embodiment of the present invention.

In order to avoid duplication of description, the description will be limited to the configuration different from the configuration of the first embodiment.

The insert I on the board B in the present embodiment has a layout configuration that is laid horizontally, which is the same as the stacked state of the pallet P, not the vertically erected state, as shown in Fig. On the board B, there is provided a loading projection 11a which can be mounted on the center hole of the insert I.

In this case, the second gripping module 330 of the first embodiment may be omitted, and only one first gripping module 310 may be used for loading and unloading operations, or a plurality of first gripping modules 310 may be provided And may be used.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the invention.

I: Insert P: Palette
B: Board
100: pallet transfer unit 110: pallet loading part
120: transfer part 140: demagnet part
200: turntable unit 210:
211: seating groove 220: guide member
230: clamping part 231: contact member for clamping
240: rotation driving part 250: clamping driving part
300: gripping unit 310: first gripping module
311: first gripping cylinder 330: second gripping module
331: second gripping cylinder 332: second gripping part
333: tweezers gripper 400: deck loader part
430: board withdrawal plate 500: inspection module
600: Magazine deck

Claims (10)

A pallet transfer unit for transferring a pallet containing an insert that has undergone the coating process or before the coating process of CVD (Chemical Vapor Deposition) is performed;
A deck loader portion for pulling in or taking out a board for holding the insert from the magazine deck during the coating process;
A turntable unit arranged to change a direction or an arrangement position of the insert according to necessity of the coating process; And
Wherein the pallet transporting unit is disposed between the pallet transporting unit and the turntable unit or between the turntable unit and the deck loader unit, and gripping and releasing the insert so that the insert is transported between the pallet transporting unit, the deck loader unit, and the turntable unit, And a gripping unit
The turntable unit includes:
A seat cushioning portion provided with a seating groove portion on which the insert is seated, the seat cushion portion being provided with an axis in a horizontal direction and capable of horizontally pivoting;
A guide member coupled to the support and adjacent to the seating groove for guiding the insert when the insert is seated; And
And a clamping unit for clamping the insert by simultaneously or sequentially approaching the insert so that the insert seated in the rotation of the seat is prevented from dropping off. The method according to claim 1,
Wherein the gripping unit comprises:
A first gripping module having a contact gripper that magnetically acts on and contacts with the insert; And
And a second gripping module having a tweezers type gripper configured to grip both surfaces of the insert. 3. The method of claim 2,
Wherein the gripping unit further comprises a gripping horizontal conveying unit for horizontally conveying the first and second gripping modules. 3. The method of claim 2,
Wherein the first gripping module is provided with a first exciting part for exciting the contact gripper vertically so as to facilitate separation of the insert from the pallet when joining between the pallet and the insert during the coating process,
Wherein the second gripping module is provided with a second exciting part for exciting the tweezers-type gripper in the horizontal direction. delete The method according to claim 1,
Wherein the clamping portion is provided with a contact member for clamping,
The clamping contact member is provided with an elongated hole for preventing interference with the clamping contact member when the grinding unit grips the insert and the insert is partially exposed from the clamping contact member, Wherein a slot is formed in the insert-loading / unloading device. The method according to claim 1,
The turntable unit includes:
A rotation driving unit for driving the seat rotation unit to rotate intermittently by 90 degrees; And
Further comprising a clamping driving unit for moving the clamping unit toward and away from the seating groove unit. The method according to claim 1,
The deck loader,
A board draw-out plate connected to the loader stand to take out or draw the board stacked on the magazine deck; And
And a board horizontal driving unit for horizontally driving the loader support. The method according to claim 1,
The pallet transferring unit includes:
A pallet loading portion waiting for the coating processing to be performed;
A transfer unit for individually transferring the pallet from the pallet loading unit;
A pallet discharge unit for discharging the pallet on which the coated pallet is loaded; And
And a demagnetizing portion provided between the transferring portion and the pallet discharging portion to remove the magnetization property of the insert after the coating process is completed. The method according to claim 1,
Further comprising an inspection module disposed on the pallet transport unit, the turntable unit and the deck loader section for sensing and inspecting the position of the insert.

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