KR101837232B1 - 레이저빔의 확장 장치 및 방법 - Google Patents

레이저빔의 확장 장치 및 방법 Download PDF

Info

Publication number
KR101837232B1
KR101837232B1 KR1020137026820A KR20137026820A KR101837232B1 KR 101837232 B1 KR101837232 B1 KR 101837232B1 KR 1020137026820 A KR1020137026820 A KR 1020137026820A KR 20137026820 A KR20137026820 A KR 20137026820A KR 101837232 B1 KR101837232 B1 KR 101837232B1
Authority
KR
South Korea
Prior art keywords
laser beam
lens
folding
folding mirror
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020137026820A
Other languages
English (en)
Korean (ko)
Other versions
KR20140045346A (ko
Inventor
클라우스 발메로트
크리스토프 틸코른
이보 짜비샤
Original Assignee
트룸프 레이저 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 트룸프 레이저 게엠베하 filed Critical 트룸프 레이저 게엠베하
Publication of KR20140045346A publication Critical patent/KR20140045346A/ko
Application granted granted Critical
Publication of KR101837232B1 publication Critical patent/KR101837232B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Lasers (AREA)
KR1020137026820A 2011-03-21 2012-03-15 레이저빔의 확장 장치 및 방법 Active KR101837232B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011005835A DE102011005835A1 (de) 2011-03-21 2011-03-21 Vorrichtung und Verfahren zur Aufweitung eines Laserstrahls
DE102011005835.4 2011-03-21
PCT/EP2012/054575 WO2012126804A1 (de) 2011-03-21 2012-03-15 Vorrichtung und verfahren zur aufweitung eines laserstrahls

Publications (2)

Publication Number Publication Date
KR20140045346A KR20140045346A (ko) 2014-04-16
KR101837232B1 true KR101837232B1 (ko) 2018-03-09

Family

ID=45932292

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137026820A Active KR101837232B1 (ko) 2011-03-21 2012-03-15 레이저빔의 확장 장치 및 방법

Country Status (7)

Country Link
US (1) US9638907B2 (https=)
EP (1) EP2689285B1 (https=)
JP (1) JP6049683B2 (https=)
KR (1) KR101837232B1 (https=)
CN (1) CN103562774B (https=)
DE (1) DE102011005835A1 (https=)
WO (1) WO2012126804A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016044212A1 (en) 2014-09-17 2016-03-24 Corning Incorporated High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors
DE102015105673B4 (de) * 2015-04-14 2018-03-08 Asphericon Gmbh Reflexiver Strahlformer
CN105116555B (zh) * 2015-09-08 2017-06-30 上海嘉强自动化技术有限公司 一种基于多面棱镜超高匀速扫描的均匀线光斑光路系统
CN112255812A (zh) * 2020-11-06 2021-01-22 北京卓镭激光技术有限公司 一种小型红外激光器扩束准直装置
CN113433528B (zh) * 2021-07-19 2022-06-24 雷神等离子科技(杭州)有限公司 垂直扩散式单光束全方位激光雷达
CN115597483B (zh) * 2022-09-30 2024-02-06 南京理工大学 一种干涉仪扩束准直装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007136478A (ja) * 2005-11-16 2007-06-07 V Technology Co Ltd レーザ発生装置
JP2009520995A (ja) * 2005-12-23 2009-05-28 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト スキャナヘッド及び当該スキャナヘッドを用いた加工機器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836256A (en) 1972-05-08 1974-09-17 Perkin Elmer Corp Interferometer for testing telescope optics
US4205902A (en) * 1978-10-12 1980-06-03 The Perkin-Elmer Corporation Laser beam expander
US4475793A (en) * 1982-06-01 1984-10-09 Texas Instruments Incorporated Integrated optical beam expander
JPS59154415A (ja) * 1983-02-22 1984-09-03 Asahi Optical Co Ltd 反射型のビ−ムエキスバンダ−光学系
GB2178866B (en) * 1985-08-07 1989-11-01 Anthony John Benbow Robinson Holographic display means
US4691999A (en) * 1986-04-04 1987-09-08 Hughes Aircraft Company Afocal beam expansion apparatus and method
JPH01134981A (ja) * 1987-11-19 1989-05-26 Mitsubishi Electric Corp レーザビーム形状可変機構
US5321718A (en) * 1993-01-28 1994-06-14 Sdl, Inc. Frequency converted laser diode and lens system therefor
JPH07144291A (ja) * 1993-11-25 1995-06-06 Mitsubishi Electric Corp レーザ加工装置の非点収差低減方法
JP2001293588A (ja) * 2000-04-11 2001-10-23 Matsushita Electric Ind Co Ltd レーザビーム径の制御装置
JP2002026395A (ja) 2000-07-13 2002-01-25 Nec Eng Ltd 光集光装置
US6842293B1 (en) * 2002-04-13 2005-01-11 Yusong Yin Beam expander
US7729199B2 (en) * 2006-10-17 2010-06-01 Hnu-Photonics External beam expander
DE102007009318B4 (de) 2007-02-22 2010-04-15 Coherent Gmbh Laseranordnung mit einem Laser zur Erzeugung eines hochenergetischen Laserstrahls
US7595942B2 (en) * 2007-03-02 2009-09-29 Koenig Dean B Light collimating system for schmidt-cassegrain telescope
US20090257118A1 (en) * 2008-04-15 2009-10-15 Jean-Marc Heritier Beam-shaping telescope
CN101620317B (zh) * 2008-06-30 2011-06-22 富士迈半导体精密工业（上海）有限公司 一种具有长焦深的激光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007136478A (ja) * 2005-11-16 2007-06-07 V Technology Co Ltd レーザ発生装置
JP2009520995A (ja) * 2005-12-23 2009-05-28 トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト スキャナヘッド及び当該スキャナヘッドを用いた加工機器

Also Published As

Publication number Publication date
JP6049683B2 (ja) 2016-12-21
JP2014508972A (ja) 2014-04-10
CN103562774A (zh) 2014-02-05
KR20140045346A (ko) 2014-04-16
DE102011005835A1 (de) 2012-09-27
EP2689285A1 (de) 2014-01-29
EP2689285B1 (de) 2018-12-19
WO2012126804A1 (de) 2012-09-27
US9638907B2 (en) 2017-05-02
CN103562774B (zh) 2017-07-04
US20140293406A1 (en) 2014-10-02

Similar Documents

Publication Publication Date Title
CN109477970B (zh) 激光线照射
KR101837232B1 (ko) 레이저빔의 확장 장치 및 방법
CN109212733B (zh) 一种光程折叠器件
JP6180531B2 (ja) ビームガイド装置およびレーザビームの開き角を調整する方法
CA2957343C (en) Device for shaping laser radiation
US20090273850A1 (en) Techniques for steering an optical beam
JP5848877B2 (ja) レーザ光整形及び波面制御用光学系
CN107589547A (zh) 一种实心光束和环形光束的变换装置
US6426834B1 (en) Method for correcting optical wavefront errors and optical system, such as a telescope, produced accordingly
JP4681651B2 (ja) Ｆシータ対物レンズおよびｆシータ対物レンズを備えたスキャナ装置
US7656592B2 (en) Optical system having aberrations for transforming a Gaussian laser-beam intensity profile to a quasi-flat-topped intensity profile in a focal region of the optical system
US20120099612A1 (en) Bandwidth narrowing module for setting a spectral bandwidth of a laser beam
US9829713B2 (en) Reflective beam shaper
US7692867B2 (en) Enhanced parfocality
JP2014508972A5 (https=)
US20150205137A1 (en) Electromagnetic Radiation Enhancement Methods and Systems
US9798047B2 (en) Device for applying light to an inner surface of a cylinder and beam transformation device for such a device
CN103887707B (zh) 一种具有大功率高光束质量激光的半导体激光器
CN116047738B (zh) 一种用于激光准直及光束测量的折反射无遮拦光学装置
US12461379B2 (en) Reflective gaussian to flat-top and other beam shapers
US12440921B2 (en) Laser processing apparatus and laser processing method
Böttner et al. Design, manufacturing and test of a highly dynamic piezo-driven metal mirror for laser material processing
WO2025074597A1 (ja) 円環レーザシステム
RU2715083C1 (ru) Оптическая система формирования и наведения лазерного пучка
KR20250062853A (ko) 비축 반사경 기반의 모드 변환 장치

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 8

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

R11 Change to the name of applicant or owner or transfer of ownership requested

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R11-ASN-PN2301 (AS PROVIDED BY THE NATIONAL OFFICE)

R13 Change to the name of applicant or owner recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R13-ASN-PN2301 (AS PROVIDED BY THE NATIONAL OFFICE)