KR101811862B1 - Probe card - Google Patents

Probe card Download PDF

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Publication number
KR101811862B1
KR101811862B1 KR1020160017920A KR20160017920A KR101811862B1 KR 101811862 B1 KR101811862 B1 KR 101811862B1 KR 1020160017920 A KR1020160017920 A KR 1020160017920A KR 20160017920 A KR20160017920 A KR 20160017920A KR 101811862 B1 KR101811862 B1 KR 101811862B1
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KR
South Korea
Prior art keywords
probe
circuit board
interposer
printed circuit
main printed
Prior art date
Application number
KR1020160017920A
Other languages
Korean (ko)
Other versions
KR20170096486A (en
Inventor
안윤태
김태현
Original Assignee
(주) 루켄테크놀러지스
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Application filed by (주) 루켄테크놀러지스 filed Critical (주) 루켄테크놀러지스
Priority to KR1020160017920A priority Critical patent/KR101811862B1/en
Publication of KR20170096486A publication Critical patent/KR20170096486A/en
Application granted granted Critical
Publication of KR101811862B1 publication Critical patent/KR101811862B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Abstract

The present invention relates to a probe card. According to an aspect of the present invention, there is provided a probe card including: a probe block having a plurality of probe pins contacting a semiconductor device; A main printed circuit board including a through hole through which the probe block penetrates, the main printed circuit board being electrically connected to the probe block; An interposer positioned above the probe block and the main printed circuit board and electrically connecting the probe block to the main printed circuit board; And a base plate which is disposed on an upper portion of the interposer and fixes the probe block, the main printed circuit board, and the interposer, wherein the interposer comprises: a plate portion having a plurality of wire holes drilled therein; A plurality of wires one end of which is inserted and fixed in each of the wire holes; And a plurality of socket portions to which the other ends of at least two wires are fixed and which are connected to the main printed circuit board.

Description

Probe card {PROBE CARD}

The present invention relates to a probe card for inspecting semiconductor devices.

Generally, a probe card electrically connects a wafer and a semiconductor device inspection equipment to test performance of the semiconductor device during or after manufacturing the semiconductor device, and transmits the electrical signal of the semiconductor device inspection equipment onto the semiconductor die, And transmits a signal returning from the semiconductor die to the semiconductor device testing equipment.

A typical probe card consists of a main circuit board (PCB), a space transformer (STF), and a tip fixedly attached to the space deflector. At this time, the space transformer is composed of a multilayer ceramic substrate (MLC: Multi Layer Ceramic).

In this connection, in Korean Provisional Patent No. 1181520 (name: probe card and manufacturing method), a probe card for testing a semiconductor die in contact with a pad formed on a plurality of semiconductor dies on a wafer, comprising: a main circuit board; A block plate attached to the main circuit board and having a number of grooves equal to the number of the plurality of semiconductor dies; A plurality of sub-probe units detachably coupled to the grooves and corresponding to the plurality of semiconductor dies; And an interposer electrically connecting the sub-probe unit to the main circuit board, wherein one of the plurality of sub-probe units is in contact with a pad formed on one of the plurality of semiconductor dies for testing one of the plurality of semiconductor dies A plurality of probe tips; A probe substrate on which a plurality of probe tips are mounted; To convert the pitch, a spatial transformer is disclosed that is bonded to the probe substrate and connected to the interposer.

As described above, in the conventional probe card, the interposer and the space transformer are required to change the pitch between the probe tip and the main circuit board, and the configuration is complicated.

In addition, when the probe tip is formed at a fine pitch, there is a problem that the contact terminal of the main circuit board needs to be formed at a fine pitch in order for the contact terminal of the main circuit board and the probe tip to correspond one to one.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a probe card which can be applied to a probe block having a fine pitch.

According to a first aspect of the present invention, there is provided a probe card comprising: a probe block having a plurality of probe pins contacting a semiconductor element; A main printed circuit board including a through hole through which the probe block penetrates, the main printed circuit board being electrically connected to the probe block; An interposer positioned above the probe block and the main printed circuit board and electrically connecting the probe block to the main printed circuit board; And a base plate which is disposed on an upper portion of the interposer and fixes the probe block, the main printed circuit board, and the interposer, wherein the interposer comprises: a plate portion having a plurality of wire holes drilled therein; A plurality of wires one end of which is inserted and fixed in each of the wire holes; And a plurality of socket portions to which the other ends of at least two wires are fixed and which are connected to the main printed circuit board.

According to a second aspect of the present invention, there is provided a method of manufacturing an interposer, comprising: preparing a film or a wafer; Drilling a plurality of wire holes through MEMS fixation to a film or wafer; Inserting a wire into each wire hole; Filling a plurality of wire holes with epoxy to fix a plurality of wires; And cutting a portion of the wire or a portion of the wire protruding from the wafer; And connecting the other end of the at least two wires to the respective socket portions.

According to a third aspect of the present invention, there is provided a probe card manufacturing method comprising: preparing a probe block and a main printed circuit board; Fabricating an interposer; Inserting the probe block into the through hole of the main printed circuit board; Placing the interposer on top of the probe block such that the probe block and the interposer are electrically connected; Placing the base plate on top of the interposer, fixing the probe block, the main printed circuit board, and the interposer using a fixing member; And connecting the socket portion of the interposer to the connection of the main printed circuit board.

According to the present invention, a hole is formed in a wire block by a photomask etching process so as to correspond to a position of a probe pin of a probe block, and a wire is inserted into the hole, The probe can be stably contacted and applied to a probe block having a fine pitch.

1 is a cross-sectional view of a probe card according to an embodiment of the present invention.
2 is an exploded perspective view of a probe card according to an embodiment of the present invention.
3 is a front view of an interposer according to one embodiment of the present invention.
4 is a perspective view of a main printed circuit board according to an embodiment of the present invention.
5 is a cross-sectional view of a probe block according to an embodiment of the present invention.
6 is a flowchart illustrating a method of fabricating an interposer according to an embodiment of the present invention.
7 is a view for explaining a method of manufacturing an interposer according to an embodiment of the present invention.
8 is a flowchart illustrating a method of manufacturing a probe card according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. It should be understood, however, that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In the drawings, the same reference numbers are used throughout the specification to refer to the same or like parts.

Throughout this specification, when a part is referred to as being "connected" to another part, it is not limited to a case where it is "directly connected" but also includes the case where it is "electrically connected" do.

Throughout this specification, when a member is " on " another member, it includes not only when the member is in contact with the other member, but also when there is another member between the two members.

Throughout this specification, when an element is referred to as "including " an element, it is understood that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise. The terms "about "," substantially ", etc. used to the extent that they are used throughout the specification are intended to be taken to mean the approximation of the manufacturing and material tolerances inherent in the stated sense, Accurate or absolute numbers are used to help prevent unauthorized exploitation by unauthorized intruders of the referenced disclosure. The word " step (or step) "or" step "used to the extent that it is used throughout the specification does not mean" step for.

The present invention relates to a probe card for inspecting semiconductor devices.

FIG. 1 is a cross-sectional view of a probe card according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a probe card according to an embodiment of the present invention, FIG. 3 is a front view of an interposer according to an embodiment of the present invention FIG. 4 is a perspective view of a main printed circuit board according to an embodiment of the present invention, FIG. 5 is a sectional view of a probe block according to an embodiment of the present invention, FIG. 6 is a cross- FIG. 7 is a view for explaining a method of manufacturing an interposer according to an embodiment of the present invention, and FIG. 8 is a view for explaining a method of manufacturing a probe card according to an embodiment of the present invention Fig.

Hereinafter, a probe card 10 (hereinafter referred to as " probe card 10 ") according to an embodiment of the present invention will be described with reference to Figs. 1 and 2. Fig.

The probe card 10 may be a device for one-to-one contact with a semiconductor device and transmitting an electrical signal transmitted from the semiconductor device testing device onto the semiconductor device.

The probe card 10 includes a probe block 100, a main printed circuit board 200, an interposer 300, and a base plate 400.

The probe block 100 includes a plurality of probe pins 110 that are in contact with semiconductor devices. At this time, the probe pin 110 includes tungsten and gold, and may be coated with Teflon on the outer surface. Accordingly, the probe pin 110 is excellent in electrical conductivity and excellent in insulating property. Also, the probe block 100 may be a vertical probe block 100, as shown in FIG.

In detail, the plurality of probe pins 110 receive an electric signal of the external inspection apparatus from the main printed circuit board 200, transmit the electric signal to the semiconductor element, receive a signal coming back from the semiconductor element, (200).

The main printed circuit board 200 may include a through hole 210 through which the probe block 100 passes. 3 and 4, the main printed circuit board 200 has a through-hole 210 formed at a central portion corresponding to the probe block 100, and a through- A plurality of connection portions 220 connected to the socket portion 330 of the interposer 300 may be formed.

The probe block 100 may be inserted through the through hole 210 of the main printed circuit board 200 and may be coupled to the base plate 400 to be described later.

In addition, the main printed circuit board 200 may receive an external test signal, output an electric signal, and be electrically connected to the probe block 100.

In other words, the main printed circuit board 200 receives the electric signal of the external inspection apparatus and transmits it to the probe block 100, receives the electric signal returned from the probe block 100, and transmits the electric signal to the external inspection apparatus have.

At this time, the probe block 100 and the main printed circuit board 200 can transmit or receive electrical signals to / from each other through the interposer 300.

1, the interposer 300 is located above the probe block 100 and can electrically connect the probe block 100 and the main printed circuit board 200. [

2, the interposer 300 includes a plate portion 310 in which a plurality of wire holes 311 are perforated, a plurality of wires 320 (one end portion of which is inserted into each wire hole 311) And a plurality of socket portions 330 to which the other ends of at least two wires 320 are fixed and which are connected to the main printed circuit board 200.

Illustratively, the plate portion 310 can be a film or a wafer substrate. Also, the wire hole 3111 of the plate portion 310 can be formed through the MEMS process.

2 to 4, an electrical signal received through the probe pin 110 may be transmitted to the connection unit 220 of the printed circuit board 200 through the wire 320. [ In addition, an electrical signal transmitted from the main printed circuit board 200 may be transmitted to the probe pin 110 through the wire 320.

At this time, one end of the wire 320 may be fixed to the plate portion 310 through epoxy, and the other end of the wire 320 may be welded to the socket portion 330 and fixed.

In addition, the socket unit 330 is detachably connected to the connection unit 220 of the main printed circuit board 200, so that the main printed circuit board 200 can be recycled.

The base plate 400 is located on the top of the interposer 300 and can fix the probe block 100, the main printed circuit board 200 and the plate portion 310 of the interposer 300.

In detail, the base plate 400 is formed with a plurality of holes (not designated by reference numerals) are perforated and holes (not shown) corresponding to the base plate 400 are formed on the probe block 100 and the main printed circuit board 200, Can be perforated. A fixing member (not shown) is fixed to the holes of the base plate 400 and is coupled to the holes of the base plate 400 on the respective probe blocks 100 and the main printed circuit board 200, 400, the probe block 100 and the main printed circuit board 200 can be fixed.

The base plate 400 is formed with a groove corresponding to the plate portion 310 on the lower surface thereof and the plate portion 310 is inserted into the groove and the edge portion of the plate portion 310 is pressed, 320 and the probe pin 110 may be electrically connected to each other.

In addition, the base plate 400 may include a through hole through which the guard 320 is inserted.

The base plate 400 is fixed to the main printed circuit board 200 to prevent the main printed circuit board 200 from being deformed by an external force.

The above-described external force may include not only physical force but also thermal deformation by temperature.

Hereinafter, a probe block 100 according to an embodiment of the present invention will be described with reference to FIG.

The probe block 100 includes a plurality of probe pins 110, an upper guide portion 130 into which the upper portions of the plurality of probe pins 110 are inserted, a lower guide portion 120 into which the lower portions of the plurality of probe pins 110 are inserted, And a plurality of fixing pins 140 coupled to the upper and lower guides 110 and 120 so that the upper and lower guide portions 110 and 120 are spaced apart from each other.

The upper guide part 130 includes a plurality of upper wafer parts 131 and an upper wafer part 131 in which a plurality of holes into which the probe pins 110 are inserted are formed at the same positions, At least one upper holder portion 132 may be provided.

The lower guide part 120 includes a plurality of lower wafer parts 121 and lower wafer parts 121 spaced apart from each other in the vertical direction in which a plurality of holes into which the probe pins 110 are inserted are formed at the same positions, And may include at least one or more lower holder portions 122.

The lower guide part 120 includes a plurality of holes into which the probe pins 110 are inserted and a plurality of holes for receiving the probe pins 110 are formed in the lower guide part 120. In the lower guide part 120, A plurality of holes into which the guide film (not shown) and the probe pins 110 are inserted are formed and a second guide film (not shown) positioned on the upper surface of the lower wafer part 131 located at the uppermost one of the lower wafer parts 131 (Not shown).

The first and second guide films can protect the surface of the lower wafer part 131 from the outside and prevent foreign matter from being inserted into the holes formed in the lower wafer part 131. [

In addition, the probe pin 110 may be arranged to be slightly inclined within a range of 85 degrees to 90 degrees, even if the probe pin 110 is vertical. In this case, the plurality of holes may be formed to be slightly different in position from one wafer to another.

In other words, when a plurality of probe pins 110, which will be described later, are respectively inserted through the holes corresponding to each other in the vertical direction among the plurality of holes, the concept including the case where the probe pins 110 are arranged so as to be inclined in this manner .

Since the size of the probe pin 110 may be slightly different along the vertical direction, a plurality of holes formed in each of the plurality of wafer portions may be slightly different in size from each other.

5, the upper and lower holder portions 122 and 132 may be disposed at predetermined intervals in which a plurality of holders are stacked in order, and each of the holders includes at least one wafer portion 121, 131 may be located.

In addition, the wafer portions 121 and 131 having a plurality of holes for arranging the probe pins 110 are manufactured through the MEMS process, so that the plurality of holes can have fine pitches therebetween. In other words, the probe block 100 can be manufactured using a MEMS process to overcome the fabrication limit in securing fine pitches of conventional machining. In other words, such a fine pitch can not be obtained through conventional machining, but can be regarded as a threshold value derived from a difference in manufacturing method that can be secured only through the MEMS process.

Hereinafter, a method of manufacturing an interposer according to an embodiment of the present invention will be described with reference to FIGS. 6 and 7. FIG.

First, in step S110, a film or a wafer can be prepared. At this time, the film or wafer may be the plate portion 310 described above. A sheet layer may be formed on the upper surface of the plate 310 by vapor deposition. As an example, a thin film can be formed by a sputtering method as a seed layer.

Next, in step S120, a plurality of wire holes 311 may be formed on the film or wafer through the MEMS process.

Illustratively, a film or a mask having a hole formed therein in a shape corresponding to the wire hole 311 is placed on the upper surface of the wafer, and then a plurality of wire holes 311 are formed in the film or wafer through exposure and development . However, the present invention is not limited to this, and a plurality of wire holes 311 may be formed by using a laser.

Next, in step S130, the wire 320 can be inserted into each wire hole 311. [

Illustratively, step S130 allows the operator to insert the wire 320 into each wire hole 311 manually.

Next, in step S140, epoxy 330 is filled in the plurality of wire holes 311 to fix the wire 320. [

Next, in step S150, a portion of the plurality of wires 320 protruding from the film or the wafer can be cut. Thereby, one end of the wire 320 and the upper end of the probe pin 110 can smoothly contact with each other.

Next, in step S160, the other end of at least two wires 320 may be coupled to the respective socket portions 330. [

At this time, the other end of the wire 320 is welded to the socket part 330, and the other end of the wire 320 can be coupled to the socket part 330.

Hereinafter, a probe card manufacturing method according to an embodiment of the present invention will be described with reference to FIG.

First, in step S210, the probe block 100 and the main printed circuit board 200 are prepared. At this time, the probe block 100 may be a vertical probe block described in Korean Patent No. 1366036.

The main printed circuit board 200 may have a through hole 210 through which the probe block 100 passes and a connecting portion 220 formed on the top surface thereof.

Next, in step S220, the interposer 300 can be manufactured.

A detailed description of the method of manufacturing the interposer 300 will be omitted in the detailed description of the interposer manufacturing method.

Next, in step S230, the probe block 100 can be inserted into the through hole of the main printed circuit board 200. [

At this time, the probe block 100 may be inserted such that the upper surface of the main printed circuit board 200 and the upper surface of the probe block 100 are located on the same plane.

Next, in step S240, the plate portion 310 of the interposer 300 is connected to the upper portion of the probe block 100 so that the probe block 100 and the wires 320 of the interposer 300 are electrically connected. Respectively.

The plurality of wires 320 connected to the probe pins 110 of the probe block 100 may be exposed on one surface of the plate 310 and the plate 310 of the interposer 300 may be exposed. The probe pins 110 may be connected to the wires 320 in a one-to-one correspondence.

Next, in step S250, the base plate 400 is positioned above the plate portion 310 of the interposer 300, and the probe block 100, the main printed circuit board 200, And the interposer 300 can be fixed.

The base plate 400 is formed with a plurality of holes into which the fixing members are inserted and the main printed circuit board 200 and the probe block 100 are provided with fixing members The probe block 100 and the main printed circuit board 200 can be fixed to the base plate 400. In addition, A groove for inserting the plate portion 310 is formed on the lower surface of the base plate 400 so that the plate portion 310 can be fixed by pressing the peripheral portion of the plate portion 310. [ have.

Next, step S260 may connect the socket portion 330 of the interposer 300 to the connection portion 220 of the main printed circuit board 200. The socket unit 330 is detachably connected to the connection unit 220 so that the main PCB 200 can be used by replacing only the main PCB 200 when a trouble occurs in the main PCB 200, There is an advantage to be able to do.

It will be understood by those of ordinary skill in the art that the foregoing description of the embodiments is for illustrative purposes and that those skilled in the art can easily modify the invention without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

10: Probe card
100: Probe block 110: Probe pin
120: lower guide part 121: lower wafer part
122: Lower holder part
130: upper guide part 131: lower wafer part
132: upper holder part 140:
200: main printed circuit board 210: through hole
220: Connection
300: interposer
310: plate portion 311: wire hole
320: wire 330: socket portion
400: base plate

Claims (12)

In the probe card,
A probe block having a plurality of probe pins contacted with semiconductor elements;
A main printed circuit board including a through hole through which the probe block passes, the main printed circuit board being electrically connected to the probe block;
An interposer located above the probe block and the main printed circuit board and electrically connecting the probe block to the main printed circuit board; And
And a base plate located on the upper portion of the interposer and fixing the probe block, the main printed circuit board, and the interposer,
The interposer
A plate portion in which a plurality of wire holes are perforated;
A plurality of wires one end of which is inserted and fixed in each of the wire holes; And
And a plurality of socket portions to which the other ends of at least two wires are fixed and which are connected to the main printed circuit board,
The probe block
A plurality of probe pins;
An upper guide portion into which an upper portion of the plurality of probe pins is inserted;
A lower guide portion into which a lower portion of the plurality of probe pins is inserted; And
And a plurality of fixing pins coupled to the upper and lower guides such that the upper and lower guide portions are fixedly spaced apart from each other,
The upper guide portion
A plurality of upper wafers each having a plurality of holes into which the probe pins are inserted,
And an upper holder part for spacing the plurality of upper wafer parts in the vertical direction.
The method according to claim 1,
The plate portion
Film or wafer substrate.
The method according to claim 1,
Wherein a wire hole in the plate portion is perforated through a MEMS process.
The method according to claim 1,
And an inner surface of the wire hole is epoxy coated.
The method according to claim 1,
The probe pin
Tungsten and gold, and the outer surface is Teflon coated.
delete delete The method according to claim 1,
The lower guide portion
A plurality of lower wafers each having a plurality of holes into which the probe pins are inserted,
And the lower wafer portion includes at least one lower holder portion that is spaced apart in the vertical direction.
9. The method of claim 8,
The lower guide portion
A plurality of holes into which the probe pins are inserted, a first guide film positioned on a lower surface of a lower wafer portion positioned at the lowermost one of the lower wafer portions,
Further comprising a second guide film formed on the upper surface of the lower wafer portion located on the uppermost one of the lower wafer portions, wherein the plurality of holes into which the probe pins are inserted are formed.
In the interposer manufacturing method,
Preparing a film or a wafer;
Drilling a plurality of wire holes through MEMS fixation on the film or wafer;
Inserting a wire into each of the wire holes;
Filling the plurality of wire holes with epoxy to fix the plurality of wires; And
Cutting a portion of the one end of the wire protruding from the film or the wafer; And
And joining the other end of the at least two wires to the respective socket portion.
In the probe card manufacturing method,
Preparing a probe block and a main printed circuit board;
Fabricating an interposer;
Inserting the probe block into the through hole of the main printed circuit board;
Placing an interposer on top of the probe block such that the probe block and the interposer are electrically connected;
Positioning the base plate on an upper portion of the interposer, fixing the probe block, the main printed circuit board, and the interposer using a fixing member; And
And connecting a socket portion of the interposer to a connection portion of the main printed circuit board,
The step of fabricating the interposer
Preparing a film or a wafer;
Drilling a plurality of wire holes through the MEMS process on the film or wafer;
Inserting a wire into each of the wire holes;
Filling the plurality of wire holes with epoxy to fix the plurality of wires;
Cutting a portion of the one end of the wire protruding from the film or the wafer; And
And coupling the other end of the at least two wires to the respective socket portions. delete
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