KR101755615B1 - Optical apparatus and optical inspecting apparatus having the same - Google Patents

Abstract

A technical idea of the present invention is to provide an illuminating device which emits light and which illuminates an object to be inspected, an objective lens arranged to face the object to be inspected and to which the light reflected from the object to be inspected is incident, A first light source and a second light source that respectively emit first light in a line shape and second light in a line shape, and a second light source that emits a first light having a line shape and a second light having a line shape, And a third light source for emitting a ring-shaped third light.

Description

TECHNICAL FIELD The present invention relates to an optical apparatus and an optical inspection apparatus including the optical apparatus.

The technical idea of the present invention relates to an optical apparatus and an optical inspection apparatus including the optical apparatus.

2. Description of the Related Art In general, optical inspection apparatuses are used to inspect defects in semiconductor devices such as glass for displays and semiconductor wafers. The optical inspection apparatus performs an optical inspection through a series of processes of mounting an inspection object on a stage, acquiring an image of the inspection object using an optical device, and analyzing the image to detect defects of the inspection object .

SUMMARY OF THE INVENTION An object of the present invention is to provide an optical apparatus and an optical inspection apparatus capable of improving the uniformity of light irradiated to an object of inspection and improving the reliability of the optical inspection.

In order to solve the above-described problems, the technical idea of the present invention is to provide an illuminating device which emits light and makes an object to be inspected enter the object to be inspected, a light source which is arranged to face the object to be inspected, And a camera section for receiving the light passing through the objective lens and picking up an image of the object to be inspected, the illumination device comprising a first lens for emitting a first light in the form of a line and a second light for emitting a line- A second light source, and a third light source for emitting a ring-shaped third light.

In some embodiments of the present invention, the third light source has an empty center portion through which the first light and the second light can pass.

In some embodiments of the present invention, the illumination device includes a first mirror that reflects the first light emitted from the first light source, a second mirror that reflects the second light emitted from the second light source, And a second mirror that is disposed between the objective lens and the inspection object and reflects the first light reflected from the first mirror and the second light reflected from the second mirror to the inspection object, And a first beam splitter that transmits the first light, the second light, and the third light to the objective lens.

In some embodiments of the present invention, the apparatus further includes a focus adjusting device for adjusting a distance between the objective lens and the inspection target to adjust a focus position of the light incident on the inspection target.

In some embodiments of the present invention, the apparatus further includes a second beam splitter installed in an optical path between the objective lens and the camera unit to reflect or transmit the light reflected from the object to be inspected, A first camera for receiving the light transmitted from the second beam splitter, and a second camera for receiving the light reflected from the second beam splitter.

In some embodiments of the present invention, the first beam splitter, the objective lens, the second beam splitter, and the first camera are located on the same optical axis.

Technical Solution In order to solve the above problems, the technical idea of the present invention includes a stage on which an object to be inspected is mounted, and an optical device that scans the object to be inspected mounted on the stage and acquires an image of the object to be inspected, The apparatus is characterized in that first light having a line shape, second light having a line shape and having a wavelength region different from the first light, and ring-shaped third light are emitted.

The optical apparatus and the optical inspection apparatus according to the technical idea of the present invention can improve the uniformity of the light irradiated to the inspection object and improve the reliability of the optical inspection by simultaneously irradiating the inspection object with the line- have.

1 is a perspective view schematically showing an optical inspection apparatus according to an embodiment of the technical idea of the present invention.
Fig. 2 is a schematic view of the optical device shown in Fig. 1. Fig.
3 is a view schematically showing a cross section of a third light source according to III-III 'of FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, embodiments of the inventive concept may be modified in various other forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. Embodiments of the inventive concept are desirably construed as providing a more complete understanding of the inventive concept to those skilled in the art. The same reference numerals denote the same elements at all times. Further, various elements and regions in the drawings are schematically drawn. Accordingly, the inventive concept is not limited by the relative size or spacing depicted in the accompanying drawings.

The terms first, second, etc. may be used to describe various components, but the components are not limited by terms. Terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and conversely, the second component may be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the inventive concept. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the expressions "comprising" or "having ", etc. are intended to specify the presence of stated features, integers, steps, operations, elements, parts, or combinations thereof, It is to be understood that the invention does not preclude the presence or addition of one or more other features, integers, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the inventive concept belongs, including technical terms and scientific terms. In addition, commonly used, predefined terms are to be interpreted as having a meaning consistent with what they mean in the context of the relevant art, and unless otherwise expressly defined, have an overly formal meaning It will be understood that it will not be interpreted.

Hereinafter, embodiments of the technical idea of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view schematically showing an optical inspection apparatus 10 according to an embodiment of the technical idea of the present invention.

1, the optical inspection apparatus 10 includes a stage 210 on which an object to be inspected is mounted, and an optical system 210 that receives light reflected from the object to be inspected and acquires an image used for detecting defects of the object to be inspected (100).

The stage 210 is an apparatus for holding and supporting an object to be inspected, and an object to be inspected can be disposed at the time of inspection. The stage 210 may be installed on the stage 210 frame. The stage 210 may be movably mounted on the stage guide rail 215.

The stage 210 may include a chuck 211 for fixing the object to be inspected and lift pins 213 for moving up and down relative to the chuck 211. The chuck 211 includes an electrostatic chuck (ESC) that fixes an object to be inspected using static electricity, a chuck that fixes the object to be inspected by a mechanical clamping method, and a vacuum chuck Chuck < / RTI > The lift pins 213 can be in a pin-up state during the inspection object 10 is carried into or taken out of the optical inspection apparatus 10 to support the object to be inspected, During inspection of the object to be inspected using the optical device 100, the inspection object can be held by the chuck 211 in a pin-down state.

In the lateral direction of the stage 210, a gantry 220 may be provided in which the optical device 100 is installed and the optical device 100 can be moved in the X direction and / or the Y direction. For example, the gantry 220 may include a pair of guide rails 221 extending in the X direction and a support block 223 movably mounted on the pair of guide rails 221. The pair of guide rails 221 may be spaced apart from each other with the stage 210 interposed therebetween. The optical device 100 may be installed movably in the support block 223 and may be installed in the support block 223 so as to be movable in the Y direction, for example.

On the other hand, the optical device 100 can receive light reflected from the inspection object and acquire an image for the inspection object. The optical device 100 may include various optical systems and / or various sensors, and the optical inspection apparatus 10 may include one or more optical devices 100. The optical device 100 can scan the inspection object while moving in the X direction and / or the Y direction by the gantry 220. [ In addition, the optical device 100 may be configured to adjust the distance to the inspection object while moving in the Z direction. Further, the optical device 100 may include a rotation motor (not shown), and may be configured to scan the object to be inspected while rotating in the Z direction by a rotation axis.

The inspection object may be, for example, a glass for display or a semiconductor wafer. However, the inspection object is not limited to the semiconductor wafer, but may be various semiconductor devices, such as a semiconductor package, a semiconductor chip, and a display panel, .

Fig. 2 is a schematic view showing the optical device 100 shown in Fig. 3 is a view schematically showing a cross section of a third light source 113 according to III-III 'of FIG.

2, the optical apparatus 100 includes an illumination device 110, a camera section 120, an objective lens 130, first through third beam splitters 141, 143, and 145, a focus adjustment device 160 And a barrel 170, as shown in FIG. The camera 120, the objective lens 130, the second beam splitter 143, the third beam splitter 145, and the focus adjuster 160 may be installed on the barrel 170, The light source 170 may provide a path through which the light can travel. The barrel 170 may be fastened to the back plate 180.

The illumination device 110 may include first to third light sources 111a, 111b and 113 for emitting first to third lights L1, L2 and L3, A first mirror 115a, a second mirror 115b, and a first beam splitter 141 used to make incident light L1, L2, L3 incident on the object to be inspected.

The first light source 111a can emit the first light L1 having the first wavelength range. The first light L1 may have a line shape or a bar shape, and may be irradiated to the inspection object in a rectangular shape.

In addition, the second light source 111b may emit a second light L2 having a second wavelength range. The second light L2 may have a line shape or a bar shape like the first light L1, and may be irradiated to an object to be inspected in a rectangular shape. The first light source 111a and the second light source 111b may include dome lenses 112a and 112b on one side thereof and the dome lenses 112a and 112b may transmit the first light L1 and the second light (L2) can be uniformly condensed.

Meanwhile, the second light source 111b may emit a second light L2 having a second wavelength range. The second wavelength region of the second light L2 may be different from the first wavelength region of the first light L1. Here, when the first wavelength range and the second wavelength range are different from each other, the first wavelength range and the second wavelength range have a wavelength range partially overlapping with each other. However, And / or the case where the lower limit is different, and the case where the first wavelength region belongs to the second wavelength region or the second wavelength region belongs to the first wavelength region.

For example, the first light source 111a may emit one of red light, green light, and blue light, and the second light source 111b may emit white light.

The first mirror 115a reflects the first light L1 emitted from the first light source 111a to the first beam splitter 141 and the second mirror 115b reflects the first light L1 emitted from the second light source 111b The first beam splitter 141 can reflect the second light L2 emitted from the first beam splitter 141. [ The first beam splitter 141 reflects or transmits light and the first beam splitter 141 splits the first light L1 incident from the first mirror 115a and the second mirror 115b The second light L2, and the third light L3, which are reflected from the object to be inspected, are incident on the objective lens L1, the second light L2, (130). ≪ / RTI >

Rotary motors 116a and 116b may be provided on one side of the first mirror 115a and the second mirror 115b. The first mirror 115a and the second mirror 115b are rotated by the rotation motors 116a and 116b to adjust the angle at which the first light L1 and the second light L2 are reflected have. A rotary motor 142 for rotating the first beam splitter 142 may be installed at one side of the first beam splitter 142.

Meanwhile, the first beam splitter 142 may be composed of two beam splitters arranged vertically adjacent to each other, one of the two beam splitters reflects the first light L1, And may be configured to reflect the second light L2. For example, when the upper beam splitter (for example, a beam splitter adjacent to the objective lens of the two beam splitters) among the two beam splitters reflects the first light L1, The first beam L1 may be reflected by the upper beam splitter and then transmitted through the lower beam splitter of the two beam splitters to be incident on the inspection object M. The first beam L1 reflected from the inspection object M L1 may be sequentially transmitted through the lower beam splitter and the upper beam splitter, and then may be incident on the objective lens 130. [ The second light L2 may be reflected by the lower beam splitter and incident on the inspection object M. The second light L2 reflected from the inspection object M may be incident on the lower beam splitter, And then incident on the objective lens 130 after passing through the upper beam splitter.

2 and 3, the third light source 113 may emit a third light L3 having a third wavelength, and the third light L3 may have a ring shape. The third light L3 having a ring shape can compensate for nonuniformity of the first light L1 and the second light L2 having a line shape. More specifically, light having a line shape such as the first light L1 and the second light L2 has a smaller intensity at the edge portion than at the center portion with respect to the longitudinal direction. Since the third light L3 is irradiated to the object to be inspected in the form of a ring, the amount of the third light L3 superimposed on the light in the form of a line becomes larger at the edge portion than the center portion of the light in the form of a line, Nonuniformity can be improved.

The third light L3 has a continuous ring shape, and the third light L3 may be disc-shaped. However, the shape of the third light L3 is not limited thereto, and may have a shape of a polygon of a triangle or a quadrangle, or an ellipse.

The third light L3 emitted from the third light source 113 may be white light including all wavelength regions of red light, green light, and blue light, but is not limited thereto and may be any one of red light, green light, .

3, the third light source 113 may be in the form of a ring having a hollow center portion, and the first light L1 and the second light L2 may be reflected from the object to be inspected, The light path traveling to the objective lens 130 may pass through the empty center portion of the third light source 113. [ For example, the first light L1 and the second light L2 reflected from the first beam splitter 141 may pass through the central portion of the third light source 113 and enter the object to be inspected. The first through third lights L1, L2 and L3 reflected from the inspection object pass through the center portion of the third light source 113 and then transmitted through the first beam splitter 141 to the objective lens 130 ).

The third light source 113 may be located at a lower level than the first light source 111a, the second light source 111b, and the first beam splitter 141, as shown in FIG. 3, the third light source 113 is located at the same level as the first light source 111a, the second light source 111b, and the first beam splitter 141, or at a higher level It may be located.

The first to third light sources 111a, 111b, and 113 may be LED lamps or ultrahigh pressure mercury lamps. However, the types of the first to third light sources 111a, 111b, and 113 are not limited thereto, and the first to third light sources 111a, 111b, The light source can be appropriately selected and used.

Referring to FIG. 2 again, the camera unit 120 may receive the first through third lights L1, L2, and L3 reflected from the inspection object M to capture the inspection object M. More specifically, the first through third lights L1, L2, and L3 reflected from the inspection object M sequentially pass through the first beam splitter 141 and the objective lens 130, and the objective lens 130 along the barrel 170 that connects the camera unit 120 to the camera unit 120. More specifically, after the first beam splitter 141 and the objective lens 130 are sequentially reflected after being reflected from the inspection object M, the first through third lights L1, L2, and L3 pass through the lens barrel 170 The second beam splitter 143, and the third beam splitter 143, and is incident on the camera unit 120.

The camera unit 120 may include various types of sensors (not shown) and an image processor (not shown) such as an image processor. For example, the sensor may be a CCD (Charged Coupled Device) sensor or a PD (Photo Diode) array sensor, but the present invention is not limited thereto. The image processor may process data obtained from the sensor to generate an image of an inspection object.

In some embodiments, the camera unit 120 may include a first camera 121 and a second camera 123. A second beam splitter 143 for transmitting or reflecting the first through third lights L1, L2 and L3 may be installed in the optical path between the objective lens 130 and the camera unit 120, The reflected light and the transmitted light of the first through third lights L1, L2, and L3 reflected from the second beam splitter 143 may be incident on the first camera 121 and the second camera 123, respectively. At this time, the first camera 121, the second beam splitter 143, the objective lens 130, and the first beam splitter 141 may be located on the same optical axis.

The first camera 121 may be a line scan camera that continuously captures an inspection object M using a line scan sensor having pixels in a line shape and acquires an image in a manner of superimposing the objects. The first camera 121 captures the inspection object M while moving at high speed in the X direction and the Y direction. The first camera 121 may be a color camera capable of receiving light of a wide range of wavelengths and acquiring an image of a color corresponding to the wavelength of the received light.

The second camera 123 may be an area camera that captures the inspection object M in such a manner that the second camera 123 moves while stopping at the imaging position and moves again. For example, the second camera 123 stops moving when it reaches the imaging position while moving in the X direction, captures the inspection object M using the sensor in the stopped state, Can be obtained. Also, the second camera 123 may be a color camera that receives light of a wide range of wavelengths and can acquire an image of a color corresponding to the wavelength of the received light.

A camera 120 having the first camera 121 and the second camera 123 is used to detect a defect of the inspection object M by using the first camera 121, The inspection can be performed by a method of re-determining whether or not the defect detected through the first camera 121 is correct using the camera 123. [

The camera unit 120 receives the first through third lights L1, L2, and L3 and separates the light of the desired wavelength region from the first through third lights L1, L2, and L3, can do. For example, the camera unit 120 may divide the first through third lights L1, L2, and L3 into a first region (e.g., a wavelength region of red light), a second region (e.g., Region), and a third region (for example, a wavelength region of green light). The light beams of the first to third regions may be different from each other in the thickness direction (for example, the Z direction) of the inspection object M due to the difference of the wavelengths thereof, , The camera unit 120 detects the image of the inspection object M corresponding to different positions in the thickness direction (for example, the Z direction) of the inspection object M from the light of the first to third areas .

The focus adjusting device 160 adjusts the distance between the objective lens 130 and the inspection object M so that the position of the focus of the first through third lights L1, L2, Can be adjusted. The focus adjusting device 160 can emit the focus adjusting light FL and can receive the focus adjusting light FL reflected from the inspection object M. [ The focus adjustment device 160 analyzes the distance between the inspection object M and the optical device 100 in real time and analyzes the optical device 100 with the fine movement bracket 181 fastened to the back plate 180, ) In the Z direction can be finely adjusted. 2 and 3, the first to third lights L1, L2 and L3 are indicated by a dot-dash line for convenience of explanation, and the focus adjustment light FL is indicated by a two-dotted chain line.

The third beam splitter 145 transmits or reflects the first light L1 and the focus adjustment light FL to the optical path between the objective lens 130 and the camera unit 120 Can be installed. The third beam splitter 145 reflects the focus adjustment light FL emitted from the focus adjustment device 160 toward the objective lens 130 to cause the focus adjustment light FL to enter the inspection object M, It is possible to reflect the focus adjustment light FL that has been reflected from the inspection object M and passed through the objective lens 130 to the focus adjustment device 160. [ The focus adjustment unit 160 receives the focus adjustment light FL reflected from the third beam splitter 145, calculates a focus error, and generates a control signal for correcting the focus error. The control signal is applied to the fine movement bracket 181. The fine movement bracket 181 adjusts the position of the optical device 100 in the Z direction so that the focus of the first through third lights L1, The position is adjusted. For example, the fine movement bracket 181 moves the lens barrel 170 up and down according to a control signal applied from the focus adjusting device 160, thereby moving the objective lens 130 and the object to be inspected M, May be adjusted so that the first to third lights L1, L2, and L3 are in focus.

At this time, the third beam splitter 145 may be positioned on the optical axis connecting the first camera 121 and the objective lens 130.

Meanwhile, in other embodiments, the focus adjusting device 160 receives at least one of the first through third lights L1, L2, and L3 reflected from the third beam splitter 145, And adjust the focal positions of the lights L1, L2, and L3. That is, the first through third lights L1, L2, and L3 reflected from the inspection object M pass through the objective lens 130 and then are transmitted and reflected by the third beam splitter 145, The first through third lights L1, L2 and L3 transmitted from the beam splitter 145 are incident on the camera unit 120. The first through third lights L1 and L2 reflected from the third beam splitter 145 , L2, and L3 may be incident on the focus adjusting device 160. [

As described above, exemplary embodiments have been disclosed in the drawings and specification. Although the embodiments have been described herein with reference to specific terms, it should be understood that they have been used only for the purpose of describing the technical idea of the present disclosure and not for limiting the scope of the present disclosure as defined in the claims . Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of protection of the present disclosure should be determined by the technical idea of the appended claims.

10: Optical inspection apparatus 100: Optical apparatus
110: illumination device 111a: first light source
111b: second light source 113: third light source
115a: first mirror 115b: second mirror
120: camera unit 130: objective lens
141, 143, 145: beam splitter 160: focus adjusting device
170: barrel 180: back plate
181: fine movement bracket 210: stage
220: Gantry

Claims (7)

An illuminating device for emitting light and making the light enter the object to be inspected;
An objective lens arranged to face the object to be inspected and to which the light reflected from the object to be inspected is incident; And
And a camera unit for receiving the light having passed through the objective lens and capturing an image of the object to be inspected
The illumination device includes:
A first light source and a second light source which respectively emit the first light of the line shape and the second light of the line shape;
A third light source for emitting a ring-shaped third light;
A first beam splitter disposed between the objective lens and the object to be inspected, the first beam splitter configured to reflect the first light emitted from the first light source and the second light emitted from the second light source to the inspection object The first beam splitter configured to transmit the first light, the second light, and the third light reflected from the inspection object to the objective lens;
A first mirror for reflecting the first light emitted from the first light source to the first beam splitter;
A second mirror for reflecting the second light emitted from the second light source to the first beam splitter; And
A rotation motor for rotating the first mirror so that an angle at which the first light is reflected is adjusted in the first mirror and an angle at which the second light is reflected in the second mirror is adjusted; / RTI > The method according to claim 1,
And the third light source has an empty center portion through which the first light and the second light can pass. The method according to claim 1,
Wherein the illumination device further comprises a rotation motor for rotating the first beam splitter. The method according to claim 1,
Wherein the camera unit and the objective lens are installed in a lens barrel providing an optical path therein,
A focus adjusting device which is provided in the barrel and emits focus adjustment light and adjusts a focus position of the light incident on the inspection subject; And
Further comprising a third beam splitter provided in an optical path between the objective lens and the camera unit,
Wherein the third beam splitter comprises:
The first light, the second light, and the third light that have been reflected from the object to be inspected and passed through the objective lens to the camera unit,
Reflects the focus adjustment light emitted from the focus adjustment device to the objective lens, and reflects the focus adjustment light that has been reflected from the inspection object and passed through the objective lens to the focus adjustment device. The method according to claim 1,
And a second beam splitter provided in an optical path between the objective lens and the camera unit for reflecting or transmitting the light reflected from the object to be inspected,
The camera section includes a first camera for receiving the light transmitted from the second beam splitter and a second camera for receiving the light reflected from the second beam splitter,
Wherein the first camera is a line scan camera and the second camera is an area camera. 6. The method of claim 5,
Wherein the first beam splitter, the objective lens, the second beam splitter, and the first camera are located on the same optical axis. A stage on which an object to be inspected is mounted; And
And an optical device that scans the inspection object mounted on the stage and acquires an image of the inspection object,
The optical device includes:
A barrel providing a light path;
An objective lens disposed at one end of the barrel and facing the object to be inspected;
A camera unit disposed at the other end of the barrel;
And an illumination device for emitting a first light having a line shape, a second light having a line shape and having a wavelength region different from the first light, and a ring-shaped third light,
The illumination device includes:
A first beam splitter disposed between the objective lens and the inspection object, the first beam splitter configured to reflect the first light emitted from the first light source and the second light emitted from the second light source to the inspection object, The first beam splitter configured to transmit the first light, the second light, and the third light reflected from an object to be inspected to the objective lens;
A first mirror for reflecting the first light emitted from the first light source to the first beam splitter;
A second mirror for reflecting the second light emitted from the second light source to the first beam splitter; And
A rotation motor for rotating the first mirror so that an angle at which the first light is reflected is adjusted in the first mirror and an angle at which the second light is reflected in the second mirror is adjusted; Wherein the optical inspection apparatus comprises:

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