KR101744519B1 - Apparatus for arrayed waveguide grating module assembling - Google Patents

Apparatus for arrayed waveguide grating module assembling Download PDF

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Publication number
KR101744519B1
KR101744519B1 KR1020150094756A KR20150094756A KR101744519B1 KR 101744519 B1 KR101744519 B1 KR 101744519B1 KR 1020150094756 A KR1020150094756 A KR 1020150094756A KR 20150094756 A KR20150094756 A KR 20150094756A KR 101744519 B1 KR101744519 B1 KR 101744519B1
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South Korea
Prior art keywords
fiber array
transfer
output fiber
waveguide grating
input
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KR1020150094756A
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Korean (ko)
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KR20170005276A (en
Inventor
장성진
이주일
최한고
김진홍
Original Assignee
주식회사 엔티코아
(주)글로벌텍
에스팩 주식회사
금오공과대학교 산학협력단
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Application filed by 주식회사 엔티코아, (주)글로벌텍, 에스팩 주식회사, 금오공과대학교 산학협력단 filed Critical 주식회사 엔티코아
Priority to KR1020150094756A priority Critical patent/KR101744519B1/en
Publication of KR20170005276A publication Critical patent/KR20170005276A/en
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Publication of KR101744519B1 publication Critical patent/KR101744519B1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12033—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for configuring the device, e.g. moveable element for wavelength tuning

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

An alignment device for assembling an arrayed waveguide grating module is disclosed. The present invention relates to an alignment device for array waveguide grating assembly which seats and aligns components to automatically assemble an array waveguide grating module. An alignment device for assembling an arrayed waveguide grating module according to the present invention includes an array that aligns and laminates the input fiber array and the output fiber array before aligning and bonding and bonding the input fiber array and the output fiber array to the arrayed waveguide grating chip, A feeder array for assembling a waveguide grating module, comprising: a transfer holder for holding a holding member in close contact with the input / output fiber array by an elastic force of a spring so that the input / output fiber array can be inserted and maintained in a fixed state; A mounting jig in which the input / output fiber array is mounted to the transfer holder, the transfer jig having a transfer bolt for pushing and straightly transferring the holding member while the transfer holder is mounted; An alignment inspection jig on the upper surface of the transfer holder on which the input / output fiber array is mounted, the alignment state and the defective state being inspected by a camera and a light source; A transfer panel having a mounting portion to which the transferring holder is mounted and the output fiber array light source tester is installed; And a cartridge mounted so that the transfer panel can be stacked and supported in multiple stages.

Description

[0001] Apparatus for arrayed waveguide grating module assembling [

The present invention relates to an alignment apparatus for assembling array waveguide grating modules, and more particularly, to an alignment apparatus for array waveguide grating assembly that seats and supplies components to automatically assemble an array waveguide grating module and supplies the array waveguide grating modules.

In general, an arrayed waveguide grating (AWG) is commonly used as an optical multiplexer / demultiplexer in a WDM (Wavelength Division Multiplexed) system. Wavelength Division Multiplexing (WDM) system is one of the optical transmission systems that bundles several channels with different wavelengths of light and transmits them through one optical fiber. In other words, it is a technology to load various kinds of data from other places together on one optical fiber, and it is an optical transmission system that improves communication capacity and speed.

The above-described wavelength division multiplexing system is based on the fundamental law of optics that optical waves of different wavelengths interfere linearly with each other. That is, if each channel in the optical communication network uses slightly different wavelengths of light, the light of multiple such channels can be carried by one optical fiber, and the crosstalk between the channels is negligible . The AWG is used to multiplex channels of various wavelengths at the optical transmission end into one optical fiber, and is also used as a demultiplexer for collecting individual channels of different wavelengths at the receiving end of the optical transmission network.

In the AWG, the light entering through one optical fiber traverses free space and enters a bundle of optical fibers or channel waveguides. Since the optical fibers have different wavelengths, they change from the exit of the optical fibers to different phases. The light then traverses another free space and interferes with each other at the entrance of the output waveguide so that each output channel receives only light of a certain wavelength. The flow of light described above operates as a splitter, and the flow of opposite light operates as a splitter.

In such an AWG module, an input fiber array having one strand and an output optical fiber array having a plurality of strands are aligned on both ends of the AWG chip, and optical characteristics are inspected and then bonded.

However, the assembling and inspecting of the AWG module according to the prior art are all developed as independent devices, and the worker has to manually inspect and assemble manually, which results in extremely low productivity.

Published Patent Application No. 2009-0099689

SUMMARY OF THE INVENTION An object of the present invention is to provide an alignment device for assembling an arrayed waveguide grating module that is first aligned and then seated so that AWG module parts can be automatically assembled.

As a specific means for achieving the above object, the present invention provides a method of aligning and joining an input fiber array and an output fiber array to an arrayed waveguide grating chip before aligning and bonding and automatically assembling the input fiber array and the output fiber array, The arraying device for assembling an arrayed waveguide grating module according to any one of claims 1 to 3, further comprising: a transfer holder for holding the holding member in close contact with the input / output fiber array by an elastic force of the spring so that the input / output fiber array can be inserted and maintained in a fixed state; A mounting jig in which the input / output fiber array is mounted to the transfer holder, the transfer jig having a transfer bolt for pushing and straightly transferring the holding member while the transfer holder is mounted; An alignment inspection jig on the upper surface of the transfer holder on which the input / output fiber array is mounted, the alignment state and the defective state being inspected by a camera and a light source; A transfer panel having a mounting portion to which the transferring holder is mounted and the output fiber array light source tester is installed; And a cartridge mounted so that the transfer panel can be stacked and supported in multiple stages.

Preferably, the transfer holder includes: a body having an inner wear groove into which the inner wear protrusions of the paper are inserted so that the transfer holder can be seated; A holding member installed to be linearly movable on the body and holding the fiber array by elastic force of a spring; And a fixing member fixed to the body so as to fix the fiber array together with the end of the holding member.

Preferably, the body of the transfer holder has a rectangular bottom surface, and the inner wear part is formed by obliquely cutting two adjacent corner parts of the bottom surface.

Preferably, the holding member of the transfer holder is U-shaped and a part of the holding member is inserted into a guide groove formed in the body and guided in a straight line.

Preferably, the mounting portions of the jigs and the transfer panel are provided with cross-shaped grooves, and the cross-shaped grooves of the sheets are provided with air holes for providing vacuum pressure.

Preferably, the mounting jig includes: a base plate; A body fixed to the upper surface of the base plate and having an inner wear protrusion inserted into the inner wear groove of the transfer holder; And a feeding bolt which is screwed to the body so as to be linearly moved and pushes the holding member to linearly move the holding bolt.

Preferably, the alignment inspection sheet comprises: a base plate; And a body fixed to the upper surface of the base plate and having an inner wear protrusion inserted into the inner wear groove of the transfer holder.

Preferably, the transfer panel comprises: a base plate; An input fiber array attaching portion fixed to the upper surface of the base plate and having the holding member on which the input fiber array is fixed; An output fiber array mounting portion fixed to the upper surface of the base plate and on which the holding member fixed with the output fiber array is mounted; And an output fiber array light source tester fixed on an upper surface of the base plate to check whether the output fiber array is aligned with the alignment inspection jig and whether or not the output fiber array is defective.

Preferably, the cartridge comprises: a bottom panel; A plurality of vertical bars vertically erected so as to face each other from the bottom panel; And a sliding guide installed at a plurality of stages inside the vertical stand and supporting both ends of the conveying panel so that the conveying panel can be slidably conveyed along the horizontal direction to be seated.

Preferably, the cartridge further includes a cross bar connecting the upper ends of the vertical bars to each other.

The present invention as described above has the following effects.

The alignment device for assembling the arrayed waveguide grating module according to the present invention has a structure in which the fiber arrays are mounted on the jig on which the transfer holder is mounted and the alignment state and the defectiveness are inspected and then laminated on the cassette. It automatically supplies and assemble parts.

1 is a perspective view of an automatic assembling device for an arrayed waveguide grating module in which a cartridge in which components are aligned by an aligning device for assembling an arrayed waveguide grating module according to the present invention is automatically assembled.
2 is a side view of the automatic assembling device of the arrayed waveguide grating module shown in Fig.
FIG. 3 is a perspective view of a component mounted on a cartridge, the components being aligned by an alignment device for assembling an arrayed waveguide grating module according to the present invention.
FIGS. 4 and 5 are perspective views of the alignment device for assembling the arrayed waveguide grating module according to the present invention, viewed from different directions.
FIG. 6 is a perspective view in which a transfer holder, which is a component of an alignment apparatus for assembling an arrayed waveguide grating module according to the present invention, is mounted on an alignment inspection jig.
FIGS. 7 and 8 are perspective views of the transfer holder, which is a part of the alignment device for assembling the arrayed waveguide grating module according to the present invention, from different directions.
9 is an exploded perspective view of a transfer holder which is a part of an alignment device for assembling an arrayed waveguide grating module according to the present invention.
10 and 11 are perspective views showing a state in which a transfer holder, which is a component of an alignment apparatus for assembling an arrayed waveguide grating module according to the present invention, is mounted on a mounting jig.

The above objects, features and advantages of the present invention will become more apparent from the following detailed description. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a method of aligning and joining an input fiber array and an output fiber array to an array waveguide grating chip (AWG chip) and aligning the input fiber array and the output fiber array And then aligning the arrayed waveguide grating module assembly.

The input fiber array has a form in which one strand of cable is connected to a thin cylindrical head, and the output fiber array is a form in which multiple strands of cable are also connected to the head. The input / output fiber arrays are transported while fixing the head.

Referring to Figs. 1 and 2, an automatic assembling apparatus 1 for automatically assembling an array waveguide grating module is shown. The present invention is an apparatus for mounting and aligning and inspecting an input / output fiber array on a transferring holder 30 so as to facilitate automatic assembly, and then supplying the same to the automatic assembling apparatus 1 in the form of a cartridge 10. As shown in the figure, the cartridge 10 is mounted on the front surface, and an automatic assembly unit 2 for automatically assembling the array waveguide grating module is provided in the rear of the cartridge 10. The cartridge 10 is mounted on the component supply unit and the cartridge 10 is mounted on the supply unit in the upward direction while the components provided in multiple stages are automatically assembled through the cylinder unit 3 (2). Referring to Fig. 2, a side view of the automatic assembly apparatus 1 is shown. It can be seen that the cartridge 10 is mounted on the supply part on the front surface of the automatic assembling device 1. [ In the cartridge 10, a transfer panel 20 is mounted in multiple stages, and the fiber array components are aligned in the transfer panel 20. When the component is located at the height of the cylinder apparatus 3, the component is pushed by the operation of the cylinder to the automatic assembly section 2, then transported by the various jigs, and aligned by the robot apparatus. The components are then bonded to form a module. That is, in the automatic assembly section 2, the components are secondarily aligned, the optical characteristics are inspected, and then bonding, packaging, light inspection, exit part transfer, and final packaging are performed in this order. Of course, this process is done automatically.

The present invention is an aligning device 40 which, prior to such automatic assembly, feeds the cartridge 10 in a multistage manner, with the components primarily aligned and seated in the transport holder 30.

The aligning apparatus 40 for assembling the arrayed waveguide grating module according to the first embodiment of the present invention includes the transfer holder 30, the mounting jig 150, the alignment inspection jig 50, the transfer panel 20, the cartridge 10, .

7 to 11, the feeding holder 30 includes a holding member 33 which is fixed to the input / output fiber array by the elastic force of the spring 36 so that the input / output fiber array can be inserted and held in a fixed state. And is brought into close contact.

The transporting holder 30 includes a body 31, a holding member 33, and a fixing member 32. The transfer holder 30 is formed in a substantially flat rectangular parallelepiped shape so that it can be easily handled by an operator.

The body 31 of the transfer holder 30 has an inner wear groove 31a into which the inner wear protrusion 52b of the jig 50 or 150 is inserted so that the transfer holder 30 can be seated. The body 31 of the transfer holder 30 is formed in a rectangular shape and the inner wear groove 31a is formed by cutting two adjacent corner portions of the bottom face into slanted lines 31b. Of course, the inner wear protrusions 52b should also correspond to the inner wear grooves 31a.

The holding member 33 of the transfer holder 30 is installed to be linearly movable with respect to the body 31 to hold the fiber array by the elastic force of the spring 36. The holding member 33 of the feed holder 30 is U-shaped and the insertion portion 34 is inserted into a guide groove formed in the body 31 and guided in a straight line. Of course, a spring 36 is inserted into the insertion part 34 inserted into the guide groove to provide a force for elastically pushing the holding member 33 toward the fixing member 32. The guide groove is covered and sealed by a lid (35).

The fixing member 32 of the transfer holder 30 is fixed to the body 31 so as to fix the input / output fiber array together with the end of the holding member 33. Therefore, the end of the fixing member 32 and the end of the holding member 33 fix the fiber array by the elastic force of the spring 36.

7, the holding member 33 of the transfer holder 30 is designed to be in a default position with its distal end slightly spaced from the holding member 32. As shown in FIG. This design is made so that the pressure can be reliably applied to the input / output fiber array fixed between the fixing member 32 and the holding member 33 while the pressure is reduced.

The mounting jig 150 includes a feeding bolt 154 for pushing and linearly feeding the holding member 33 while the feeding holder 30 is mounted so that the input and output fiber array is mounted on the feeding holder 30 do.

10 and 11, the mounting jig 150 includes a base plate 151, a body 152, and a conveying bolt 154. As shown in Fig.

The body 152 of the mounting jig 150 is fixed to the upper surface of the base plate 151 and has an inner wear protrusion inserted into the inner wear groove 31a of the transfer holder 30. [

The conveying bolt 154 is screwed to the body 152 so as to be linearly moved, and pushes the holding member 33 to linearly move the holding bolt 154. That is, the feed bolt 154 is screwed to penetrate the bracket 153 fixed to the body 152. When the feed bolt 154 is rotated, the feed bolt 154 is moved forward or backward with respect to the body 152 .

As shown in FIG. 6, the alignment inspection jig 50 is provided with a camera 43 and a light source 44 on the upper surface of the transfer holder 30 on which the input / output fiber array is mounted, do. The alignment inspection jig 50 is fixed to the upper surface of the base plate 51 and protrudes obliquely to an edge inserted into the inner wear groove 31a of the transfer holder 30, And a body 52 having an inner wearing protrusion 52b. That is, the shape of the mounting jig 150 is similar to that of the mounting jig 150 so that the feeding holder 30 can be mounted, but the feeding bolt 154 for pushing the holding member 33 is not provided. A camera (43) and a light source (44) are installed at the position of the alignment inspection jig (50) to check the alignment state and the defect. The primary alignment of the input / output fiber arrays is completed by the alignment inspection jig (50).

A cross-shaped groove portion 52a is formed on the upper surface of the alignment inspection jig body 52. An air hole 52d is provided in the groove portion 52a to provide vacuum pressure.

The transfer panel 20 has mounting portions 23 and 24 on which the transfer holder 30 is mounted, and the output fiber array light source tester 22 is installed. The transfer panel 20 is supplied to the cartridge 10 in a multi-stage state with a primary-aligned input / output fiber array.

The transfer panel 20 includes a base plate 21, an input fiber array mounting portion 23, an output fiber array mounting portion 24, and a light source tester 22.

The input fiber array attaching portion 23 of the transfer panel 20 is fixed to the upper surface of the base plate 21 and the holding member 30 to which the input fiber array is fixed is seated. That is, the alignment inspection jig 50 has the same shape.

The output fiber array attaching portion 23 of the transfer panel 20 is fixed to the upper surface of the base plate 21 and the holding member 30 to which the output fiber array is fixed is seated. The alignment inspection jig 50 has the same shape as the alignment inspection jig 50 described above.

The output fiber array light source tester 22 is fixed to the upper surface of the base plate so as to inspect the alignment state of the output fiber array and whether the output fiber array is defective when the output fiber array is seated in the alignment inspection jig. Since the input fiber array is inspected with one strand of the light source, the output fiber array is divided into a plurality of strands of light sources. Therefore, it is impossible to inspect only one light source, to be. The light source tester 22 is also inspected before being supplied to the automatic assembly unit.

Referring to FIG. 3, the cartridge 10 is mounted so that the transfer panel 20 can be stacked and supported in multiple stages.

The cartridge 22 includes a bottom panel 11, a vertical base 12, a sliding guide 13, and an upper arm 14.

The vertical legs 12 are vertically erected and fixed to face each other from the bottom panel 11.

The sliding guide 13 is provided at a plurality of stages inside the vertical bar 12 and supports both ends of the conveying panel 20 so that the conveying panel 20 can be slidably conveyed along the horizontal direction to be seated.

The upper crossbar (14) connects the upper ends of the vertical bar (12) to each other.

In FIG. 3, the eleven cartridges are mounted on the cartridges 10, but in practice, more than twenty cartridges are to be mounted.

A working method of the alignment apparatus for assembling the arrayed waveguide grating module according to the present invention will be described.

The transfer panel mounting portions 23 and 24 are respectively fitted with a transfer holder 30 for mounting an input / output fiber array.

The transfer panel 20 is fixed at a predetermined position in front of the jigs 50 and 150 as shown in FIGS. It is obvious that such fixation can be accomplished by various methods.

In the state that the transfer panel 20 is supplied, the transfer holder 30 of the mounting portions 23 and 24 is transferred to the mounting jig 150 to be placed thereon. At this time, the transfer holder 30 is seated at the correct position by the inner wear groove portion 31a of the transfer holder 30 and the inner wear protrusion of the mounting jig 150.

The transfer bolt 154 is fastened while the transfer holder 30 is seated on the mounting jig 150. The holding member 33 is pushed by the feeding bolt 154 to increase the space between the holding member 33 and the fixing member 32. When the space is increased to some extent or more, the input / output fiber array is attached to the corresponding transfer holder 30, and the transfer bolt 154 is released again in the opposite direction. The input / output fiber array is fixed between the holding member (33) and the fixing member (32) by the elastic force of the spring (36).

The transfer holder 30 is moved to the alignment inspection jig 50 and mounted in the state that the input / output fiber array is mounted on the transfer holder 30. The mounting process is the same as the mounting process of the mounting jig 150 described above. The alignment state and the defective state are determined by the camera 43 or the light sources 44 in a state where the fiber array is mounted while moving the alignment inspection jig 50.

The alignment inspection jig 50 inspects the transfer holder 30 and mounts the transfer holder 30 on the mounting portions 23 and 24 of the transfer panel 20 if it is a good product. Then, the transfer panel 20 itself is sequentially pushed into the cartridge 10 in multiple stages.

The operation described above is repeated to fill the cartridge 10 with the transfer panel 20 and to mount the cartridge 10 to the supply portion of the automatic assembling apparatus 1 as shown in Figures 1 and 2 . After the cartridge 10 is mounted, the cartridge 10 is lifted one by one and the transfer panel 20 corresponding to the height is pushed by the cylinder device 3 to be transferred to the automatic assembly section 2, ) Is supplied to the robot worktable and assembled with the AWG chip to form a module.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

1: Automatic assembling device of array waveguide grating module
2: automatic assembly part 3: cylinder device
10: cartridge 11: bottom panel
12: Vertical stand 13: Sliding guide
14: crossbar 20: transfer panel
22: light source tester 23, 24:
30: Feed holder 32: Fixing member
33: holding member 34:
36: spring 50: alignment device
50: alignment inspection jig 52b: inner wear protrusion
150: mounting jig 153: bracket
154: Feed bolt

Claims (10)

An alignment device for assembling an arrayed waveguide grating module in which the input fiber array and the output fiber array are aligned and laminated prior to automatic assembly and alignment of the input fiber array and the output fiber array to an array waveguide grating chip,
Output fiber array; and a holding member for holding the holding member in close contact with the input / output fiber array by an elastic force of a spring so that the input / output fiber array can be inserted and maintained in a fixed state;
A mounting jig in which the input / output fiber array is mounted to the transfer holder, the transfer jig having a transfer bolt for pushing and straightly transferring the holding member while the transfer holder is mounted;
An alignment inspection jig on the upper surface of the transfer holder on which the input / output fiber array is mounted, the alignment state and the defective state being inspected by a camera and a light source;
A transfer panel having a mounting portion to which the transferring holder is mounted and the output fiber array light source tester is installed; And
A cartridge to which the transfer panel is mounted so as to be stacked and supported in multiple stages;
And an alignment device for assembling the arrayed waveguide grating module. The method according to claim 1,
The transfer holder
A body having a mounting jig for inserting the transfer holder and an inner wear-receiving groove into which an inner-wear protrusion of the alignment inspection jig is inserted;
A holding member installed to be linearly movable on the body and holding the fiber array by elastic force of a spring; And
A fixing member fixed to the body to fix the fiber array together with an end of the holding member;
And an alignment device for assembling the arrayed waveguide grating module. 3. The method of claim 2,
Wherein the body of the transfer holder has a rectangular bottom surface and the inner wear groove portion is formed by cutting two adjacent corner portions of the bottom surface into oblique lines. 3. The method of claim 2,
Wherein the holding member of the transfer holder is U-shaped and a part of the holding member is inserted into a guide groove formed in the body and guided in a straight line. The method according to claim 1,
Wherein the mounting jig, the alignment inspection jig, and the mounting portion of the transfer panel are provided with cross-shaped grooves, and the cross-shaped groove portion is provided with an air hole for providing vacuum pressure. The method according to claim 1,
The mounting jig includes:
A base plate;
A body fixed to the upper surface of the base plate and having an inner wear protrusion inserted into the inner wear groove of the transfer holder; And
A delivery bolt installed to be linearly movable by being screwed to the body and pushing the holding member to linearly move the holding bolt;
And an alignment device for assembling the arrayed waveguide grating module. The method according to claim 1,
The sorting inspection sheet he /
A base plate;
A body fixed to the upper surface of the base plate and having an inner wear protrusion inserted into the inner wear groove of the transfer holder;
And an alignment device for assembling the arrayed waveguide grating module. The method according to claim 1,
The transfer panel
A base plate;
An input fiber array attaching portion fixed to the upper surface of the base plate and having the holding member on which the input fiber array is fixed;
An output fiber array mounting portion fixed to the upper surface of the base plate and on which the holding member fixed with the output fiber array is mounted;
An output fiber array light source tester fixed on an upper surface of the base plate to inspect the alignment state of the output fiber array and a defect in a state where the output fiber array is seated on the alignment inspection jig;
And an alignment device for assembling the arrayed waveguide grating module. The method according to claim 1,
Wherein,
Bottom panel;
A plurality of vertical bars vertically erected so as to face each other from the bottom panel;
A sliding guide installed at a plurality of stages inside the vertical stand and supporting both ends of the conveying panel so that the conveying panel can be slidably conveyed along the horizontal direction to be seated;
And an alignment device for assembling the arrayed waveguide grating module. 10. The method of claim 9,
Wherein the cartridge further comprises a cross bar connecting the upper ends of the vertical bars to each other.
KR1020150094756A 2015-07-02 2015-07-02 Apparatus for arrayed waveguide grating module assembling KR101744519B1 (en)

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CN111113330B (en) * 2020-01-08 2021-08-20 歌尔股份有限公司 Grating folding mechanism
CN112596165A (en) * 2020-12-14 2021-04-02 武汉红星杨科技有限公司 Automatic coupling device for optical fiber waveguide array

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KR100194179B1 (en) 1995-12-15 1999-06-15 이계철 Splice stand for multi-core fiber splicer
JP2000111756A (en) 1998-08-24 2000-04-21 Samsung Electronics Co Ltd Device for aligning optical fiber block and plane optical waveguide element and its controlling method
JP2000131557A (en) 1998-10-29 2000-05-12 Hitachi Cable Ltd Optical waveguide element and fiber array coupling device, and manufacture of optical parts using it
JP2004070337A (en) 2002-07-31 2004-03-04 Agilent Technol Inc Optical system and method for using coupling/fixing device in aligning optical element with planar waveguide

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Publication number Priority date Publication date Assignee Title
KR20090099869A (en) 2008-03-18 2009-09-23 주식회사 하이닉스반도체 Overlay vernier in semiconductor and method for forming the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100194179B1 (en) 1995-12-15 1999-06-15 이계철 Splice stand for multi-core fiber splicer
JP2000111756A (en) 1998-08-24 2000-04-21 Samsung Electronics Co Ltd Device for aligning optical fiber block and plane optical waveguide element and its controlling method
JP2000131557A (en) 1998-10-29 2000-05-12 Hitachi Cable Ltd Optical waveguide element and fiber array coupling device, and manufacture of optical parts using it
JP2004070337A (en) 2002-07-31 2004-03-04 Agilent Technol Inc Optical system and method for using coupling/fixing device in aligning optical element with planar waveguide

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