KR101701213B1 - Device for testing flatness - Google Patents

Abstract

Disclosed is a device for testing flatness. According to an aspect of the present invention, the device for testing flatness includes a stage, a clamping unit, multiple first probes, multiple second probes, a moving unit, a calculating unit, a determining unit, and a control unit. The stage is formed in a rectangular shape on a plane, and a blower block is arranged at a corner on one side. The blower block is extended along the corner on one side of the stage and includes multiple injection holes injecting compressed air toward the upper surface of the stage. The blower block is formed at the corner on one side of the stage to be detached and includes an injection flow path connected to the multiple injection holes inside to receive the compressed air through the injection flow path. The multiple injection holes are arranged on one side of the blower block and arranged at intervals in the longitudinal direction of the blower block. The stage includes multiple adsorption holes, and the multiple adsorption holes attaching a test specimen to the stage by providing a suction pressure onto the lower surface of the test specimen for predetermined time when the test specimen is mounted on the upper surface of the stage. The multiple adsorption holes are arranged along the corner of the stage at fixed intervals from the corner of the stage to the inner side to correspond to the corner of the test specimen. A suction flow path connected to the multiple adsorption holes is installed in the stage to receive the suction pressure through the suction flow path.

Description

{DEVICE FOR TESTING FLATNESS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness inspection apparatus, and more particularly, to a flatness inspection apparatus capable of measuring and inspecting a flatness of a surface of a substrate having a flat region or the like.

The flatness of the surface of the glass substrate, the semiconductor substrate, the display substrate, and the precision processed product of the flat plate shape, which have a planar region, is an important factor that greatly affects the product quality. Therefore, such a planar substrate generally measures and inspects the surface flatness before machining.

The flatness inspection apparatus can be largely classified into a contact type and a non-contact type. The contact type inspection apparatus horizontally moves the probe in contact with the substrate surface to measure the flatness of the substrate. However, since this method moves the probe in contact with the substrate, damage such as scratches may occur on the substrate. The non-contact inspection apparatus irradiates light onto the substrate surface and measures the flatness of the substrate through the reflected optical signal value. Therefore, the non-contact type has an advantage that the substrate damage due to physical contact such as scratches can be minimized. However, in the case of a substrate having a high light transmittance such as a sapphire wafer, there is a limitation in use due to a small light amount change due to light transmission. Also, there is a problem that the inspection reliability is relatively low due to the change of light quantity due to external factors.

In view of the above problems, a flatness inspection apparatus of a type using a contact type displacement sensor has been proposed (Registered Utility Model No. 20-0479564). The flatness inspection apparatus described above includes first and second probes respectively corresponding to the upper and lower surfaces of the test specimen and implemented through a contact type displacement sensor. The height and the like of the substrate (inspection specimen) are measured at a plurality of locations And the disadvantages of the conventional contact type or non-contact type inspection apparatus are supplemented.

However, it has been confirmed that the applicant has repeatedly used and studied that the flatness inspection apparatus described above may cause some problems. This relates primarily to the stage on which the substrate is placed.

First, there is a problem that an error occurs in measurement or inspection results due to the presence of foreign substances on the stage. That is, the substrate is not evenly placed on the upper surface of the stage due to small foreign substances on the stage, which causes an error in the measurement result. In the case of substrates requiring flatness inspection, most of them are for precision machining, so even small errors due to foreign substances may have a considerable influence on the product quality. In addition, the error due to the foreign substance on the stage can not be easily perceived by the user, which may cause the work efficiency to deteriorate. In most cases, the user is late acknowledging the presence of foreign matter or the like, and thus the substrate on which the inspection has been completed is also inspected again for confirmation. Therefore, the efficiency of operation is inevitably lowered.

Another problem is the lifting of the substrate placed on the stage. For precise measurement or inspection, it is necessary that the substrate is ideally placed on the stage. In some cases, the edge of the substrate does not completely adhere to the stage, and the substrate moves slightly. Such a phenomenon may cause an error in the measurement result, which may adversely affect the product quality.

The applicant of the present invention intends to provide a flatness inspection apparatus capable of minimizing a measurement error and improving inspection reliability by taking the above problems into consideration.

Registration Utility Model Bulletin No. 20-0479564 (registered on Feb. 3, 2016)

An object of the present invention is to provide a flatness inspection apparatus capable of minimizing measurement and inspection errors due to foreign substances on a stage, and capable of ideally placing and placing a substrate to be inspected on a stage.

According to an aspect of the present invention, there is provided a test apparatus comprising: a stage on which a test specimen is placed; A clamping unit installed on the stage and fixing the test specimen; A plurality of first probes disposed on the stage and measuring a height of the test specimen with respect to an upper surface of the test specimen using a contact type displacement sensor; A plurality of second probes disposed on the lower side of the stage and measuring the height of the lower surface of the test specimen using a contact type displacement sensor; A moving unit for moving the plurality of first probes up and down with respect to the test specimen; An arithmetic unit for calculating a height of the test specimen using a height difference between the master specimen and the specimen; A judging unit for judging whether the flatness of the inspection specimen is defective by comparing a result calculated by the arithmetic unit with a predetermined tolerance value; And a control unit for controlling operations of the mobile unit, wherein the stage is formed in a rectangular shape in a plane, and a blower block is disposed at one side edge portion, and the blower block extends along one side edge of the stage And a plurality of injection holes for injecting compressed air toward the upper surface of the stage, the injection holes being formed at one side edge of the stage and being connected to the plurality of injection holes, Wherein the plurality of injection holes are disposed on one surface of the blower block and are spaced apart from each other along the longitudinal direction of the blower block, the stage having a plurality of suction holes on an upper surface thereof, Wherein when the test specimen is seated on the upper surface of the stage, The test specimen is formed so as to be in close contact with the stage by providing a suction pressure during a set time on a lower surface of the test specimen and spaced a predetermined distance inward from the edge of the stage so as to correspond to a corner portion of the test specimen, The stage may be provided with a suction path connected to the plurality of suction holes and provided to receive a suction pressure through the suction path.

The flatness inspection apparatus according to the embodiments of the present invention is capable of removing foreign matters on the upper surface of the stage such as dust and dirt by supplying compressed air to the blower block and injecting the compressed air onto the upper surface of the stage after removing the test specimen. Therefore, errors in measurement and inspection due to foreign substances can be minimized, and the problem of lowering the working efficiency due to the discovery of foreign matter can be also improved.

The flatness inspection apparatus according to the embodiments of the present invention provides a suction pressure to the suction holes when the inspection specimen is placed on the stage so that the inspection specimen can be closely disposed on the upper surface of the stage. Further, the clamping unit is arranged to correspond to each vertex of the inspection specimen, so that the upper surface of the inspection specimen is pressed down and fixed. Therefore, it is possible to prevent the measurement of the corner portions of the test specimen and the like from occurring in advance.

The flatness inspection apparatus according to embodiments of the present invention may have an access hole that can guide the position of the second probe so that the second probe can approach and contact a predetermined position, The accuracy and reliability of the inspection can be improved.

The flatness inspection apparatus according to the embodiments of the present invention can suitably perform alignment of various inspection specimens through a pin set of a position adjustable type and provides a notification of the proper replacement timing of the stage by the counting unit, It is possible to minimize the measurement error and the inspection error.

1 is a front view of a flatness inspection apparatus according to an embodiment of the present invention.
2 is a schematic plan view showing a stage in a flatness inspection apparatus according to an embodiment of the present invention.
3 is a schematic side view showing a clamping unit in a flatness inspection apparatus according to an embodiment of the present invention.
4 is a schematic cross-sectional view showing a blower block and a suction hole in a flatness inspection apparatus according to an embodiment of the present invention.
5 is a schematic cross-sectional view showing an access hole in a flatness inspection apparatus according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. It is to be understood, however, that the following examples are provided to facilitate understanding of the present invention, and the scope of the present invention is not limited to the following examples. In addition, the following embodiments are provided to explain the present invention more fully to those skilled in the art. Those skilled in the art will appreciate that those skilled in the art, Will be omitted.

1 is a front view of a flatness inspection apparatus 100 according to an embodiment of the present invention.

Referring to FIG. 1, the flatness inspection apparatus 100 may include a stage 110. The stage 110 may be formed in the form of a plate, a block, or the like having a predetermined width. A substrate (S, inspection specimen) to be inspected is placed on the stage (110). The detailed configuration of the stage 110 will be described later with reference to Fig.

The flatness inspection apparatus 100 may include a clamping unit 120. The clamping unit 120 is installed on the stage 110 to fix the test specimen S to the stage 110. The detailed structure of the clamping unit 120 will be described later with reference to Fig.

The flatness inspection apparatus 100 may include a first probe 130. The first probe 130 may be disposed on the stage 110 and measures the height of the top surface of the test specimen S using a contact type displacement sensor. The plurality of first probes 130 may measure the height of each of the plurality of points on the upper surface of the test specimen S, The height refers to the depth or length from a specific point to the bottom of the upper surface of the test specimen S

The flatness inspection apparatus 100 may include a second probe 140. The second probe 140 may be disposed below the stage 110 and measures the bottom height of the test specimen S using a contact type displacement sensor. The plurality of second probes 140 may measure a height of each of the plurality of points on the lower surface of the test specimen S, respectively. The height refers to the depth or length from the specific point to the top surface of the lower surface of the specimen S to be inspected.

The flatness inspection apparatus 100 may include a mobile unit 150. The mobile unit 150 moves the first probe 130 in the up-and-down direction with respect to the test specimen S. For example, the mobile unit 150 may include a fixed plate for supporting and supporting the first probe 130, and at least one cylinder for moving the fixed plate in the up and down direction.

The flatness inspection apparatus 100 may include a control box CB. The control box CB may be provided with a calculation unit 160, a determination unit 170 and a control unit 180. [

The calculation unit 160 calculates the height of the test specimen S using the height difference from the master specimen. For example, when checking the flatness of the first test specimen without a step, the arithmetic unit 160 sets one of the points of the first master specimen as a zero point, and the first probe 130 measured through the first probe 130 The height of the first test specimen can be calculated using the height difference between the specimen and the first master specimen. As another example, when checking the flatness of the second inspection specimen having a step, the arithmetic unit 160 sets the two points constituting the step on the second master specimen as the respective zero points, The step height of the second test specimen can be calculated using the height difference between the two points of the second master specimen and each of the two points forming the step difference in the second test specimen.

The determination unit 170 compares the resultant value calculated by the calculation unit 160 with a predetermined tolerance value to determine whether or not the inspection specimen S is defective.

The control unit 180 controls the overall operation of the device, such as the mobile unit 150. The control unit 180 may have a touch screen. The touch screen inputs setting values necessary for inspection such as zero point and tolerance value, and visually displays measurement and inspection results for the inspection specimen (S).

The first and second probes 130 and 140, the mobile unit 150 and the control box CB of the flatness inspection apparatus 100 according to the present embodiment are installed in the registered Utility Model Syntax -0479564 can be configured to be the same as or similar to the flatness inspection tool. Accordingly, the details of the configuration and the operation method thereof will be described in detail in the specification of Korean Utility Model Registration No. 20-0479564, and a detailed description thereof will be omitted for the sake of convenience.

2 is a schematic plan view showing a stage 110 in a flatness inspection apparatus 100 according to an embodiment of the present invention.

Referring to FIG. 2, the stage 110 according to the present embodiment may have a rectangular planar shape. The stage 110 may have a predetermined thickness and may be formed in the shape of a plate, a block, or the like. 2 is a plan view of the upper surface of the stage 110. The test specimen S is placed on the upper surface of the stage 110, Therefore, the upper surface of the stage 110 is formed in a plane.

The stage 110 may have a set of pins 111 for aligning and supporting the test specimen S. [ A plurality of pin sets 111 may be provided and a plurality of pin sets 111 may be spaced apart from the upper surface of the stage 110. The plurality of pin sets 111 may be disposed adjacent to the vertex portions of the stage 110 so as to correspond to the vertex portions of the test specimen S, respectively.

The pin set 111 may be composed of a pair of pins 111a and 111b. The pair of fins 111a and 111b may be disposed adjacent to each other at the respective vertexes of the stage 110. Each of the fins 111a and 111b protrudes a predetermined length from the upper surface of the stage 110 to support the edge portion of the test specimen S by contact. The pair of pins 111a and 111b are spaced apart from each other around the vertex of the test specimen S to support the corners of the specimen S in contact with each other.

The pins 111a and 111b may be mounted on the stage 110 through a slot 112 formed in the stage 110. [ At this time, the slot 112 may be formed by extending a predetermined length in the transverse direction on the stage 110. Accordingly, the pins 111a and 111b can be adjusted to a predetermined position along the slot 112. [ This is to set the positions of the pins 111a and 111b according to the size of the test specimen S. [ More preferably, the pair of pins 111a and 111b constituting the pin set 111 may include first and second pins 111a and 111b, and the first and second pins 111a and 111b may be mutually And may be formed so as to be positionally adjusted in a direction orthogonal to each other. Specifically, the first pin 111a may be mounted on the first slot 112a extending in the first direction (e.g., the left-right direction) and the first pin 111a may be positioned in the first direction. In addition, the second pin 111b may be mounted in the second slot 112b extending in a second direction perpendicular to the first direction (e.g., forward and backward directions) and may be positioned in the second direction. In this embodiment, the first and second slots 112a and 112b are connected to each other and have a substantially L shape.

A plurality of clamping units 120 may be installed on the stage 110. The clamping unit 120 fixes the test specimen S placed on the stage 110 together with the pin set 111 described above. However, the pin set 111 contacts and supports the corner side surface portion of the test specimen S while the clamping unit 120 presses and fixes the upper surface portion of the test specimen S. The clamping unit 120 in this manner is effective in preventing the inspection specimen S from being lifted on the stage 110. More preferably, the plurality of clamping units 120 may be disposed at each vertex of the stage 110 so as to correspond to the arrangement of the respective sets of pins 111.

3 is a schematic side view showing the clamping unit 120 in the flatness inspection apparatus 100 according to an embodiment of the present invention.

3, the clamping unit 120 includes a supporter 121 extending upward from the stage 110, a clamper 122 coupled to a hinge 122a at an upper end of the supporter 121, And an actuator 123 for actuating the actuator.

The clamper 122 may be formed to extend in the transverse direction by a predetermined length so that one end of the clamper 122 can reach the inspection specimen S placed on the upper surface of the stage 110. At one end of the clamper 122, a contact end 122b contacting the upper surface of the inspection specimen S may be provided. In order to prevent damage to the test specimen S due to the contact end 122b, the contact end 122b may be formed of an elastic material. The stop portion of the clamper 122 can be fastened to the upper end of the supporter 121 through the hinge 122a. Therefore, the clamper 122 can be rotated around the hinge 122a. The other end portion of the clamper 122 disposed on the opposite side of the contact end 122b can be contactably supported by the actuator 123. [ The supporting points by the actuator 123 may be spaced apart from the hinge 122a by a predetermined distance. Therefore, the clamper 122 can be pivoted about the hinge 122a as the actuating rod of the actuator 123 is driven up and down.

Referring again to FIG. 2, a plurality of suction holes 113 may be formed on the upper surface of the stage 110. The suction holes 113 suck the lower surface of the test specimen S placed on the stage 110 to a predetermined degree and closely adhere the test specimen S to the upper surface of the stage 110. A plurality of suction holes 113 may be provided, and a plurality of suction holes 113 may be spaced apart from the upper surface of the stage 110. More preferably, the plurality of suction holes 113 are spaced a predetermined distance from the edge of the stage 110 (toward the center of the stage 110) so as to correspond to the edge portion of the test specimen S, As shown in FIG. This is in many cases taken into consideration that the lifting phenomenon of the test specimen S occurs at the edge of the specimen S.

A blower block 114 may be disposed at one side edge of the stage 110. The blower block 114 may extend along one edge of the stage 110. Preferably, the blower block 114 may extend beyond two thirds of the length of one side edge of the stage 110. Further, when the stage 110 has a rectangular planar shape, the blower block 114 can be mounted on the long edge of the stage 110. This is to make it possible to sufficiently cover the entire surface of the upper surface of the stage 110 through one blower block 114.

The blower block 114 may have a jet hole 114a for jetting compressed air. The injection hole 114a may be disposed on one side of the blower block 114 toward the stage 110. [ A plurality of injection holes 114a may be provided and a plurality of injection holes 114a may be spaced apart along the length direction of the blower block 114. The plurality of injection holes 114a inject external compressed air to the upper surface of the stage 110 to remove foreign substances such as dust and dirt existing on the upper surface of the stage 110.

The injection of compressed air can be done automatically or manually. Preferably, the injection of compressed air can be performed automatically by the control unit 180 at every inspection. For example, when the inspection specimen S is removed from the stage 110, a signal is sent to the control unit 180 by a sensor or the like provided on the stage 110, and the compressed air is jetted from the blower block 114 have.

The blower block 114 may be integrally formed with the stage 110 or may be formed of a separate component separated from the stage 110. [ Preferably, the blower block 114 is configured as a separate part from the stage 110 and can be configured to be assembled and detachable to the stage 110 via suitable fastening means or structure. This assemblable and detachable system has the advantage of cost or use in that only the stage 110 or the blower block 114 can be selectively replaced as needed.

4 is a schematic cross-sectional view showing a blower block 114 and a suction hole 113 in a flatness inspection apparatus 100 according to an embodiment of the present invention. Fig. 4 is a schematic view of a cross-sectional view taken along the line A-A shown in Fig.

4, the blower block 114 is disposed at one side edge portion of the stage 110 and has a jet hole 114a opened toward the upper surface of the stage 110. [ The injection hole 114a is connected to the injection path 114b provided in the blower block 114 and the end of the injection path 114b is connected to the air pump to receive the compressed air. Although not shown, the injection path 114b may be connected to the plurality of injection holes 114a to provide compressed air.

A suction passage 113a is provided inside the stage 110. [ The suction passage 113a is connected to each suction hole 113 disposed on the upper surface of the stage 110. [ An end (the left end in the drawing) of the suction passage 113a is connected to a vacuum pump and is supplied with a suction pressure.

Referring again to FIG. 2, the stage 110 may have an access hole 115. The access hole 115 provides a passage through which the second probe 140 on the lower side of the stage 110 approaches the test sample S bottom surface. The access hole 115 may be formed to pass through the stage 110 vertically.

5 is a schematic cross-sectional view showing an access hole 115 in the flatness inspection apparatus 100 according to an embodiment of the present invention. 5 is a schematic cross-sectional view taken along the line B-B shown in Fig.

Referring to FIG. 5, the access hole 115 extends from the upper surface to the lower surface of the stage 110. At this time, the lower end opening 115a of the access hole 115 may be formed larger than the upper end opening 115b. The upper end opening 115b of the access hole 115 may be formed to a minimum size allowing the second probe 140 to pass therethrough and the lower end opening 115a may be formed to be 1.5 to 2 Fold size. Further, the access hole 115 may be tapered so that the size of the opening becomes smaller toward the upper surface of the stage 110. The shape of the access hole 115 can guide the access of the second probe 140 to the bottom surface of the test specimen S. In addition, by making the second probe 140 always come into contact with or approaching a predetermined position, it can contribute to improvement in reliability of inspection and measurement.

Further, the upper opening 115b of the access hole 115 can be machined with a chamfer 115c. This prevents the burr protruding from the upper surface of the stage 110 and prevents lifting of the test specimen S. [

The operation of the flatness inspection apparatus 100 will be briefly described. First, when the inspection work is terminated and the inspection specimen S is removed, compressed air is supplied to the blower block 114 to remove foreign matter on the upper surface of the stage 110. [ Removal of foreign matter may be performed automatically or manually, preferably prior to installation of a new test specimen (S) at each inspection. As described above, foreign matter on the stage 110 is removed through the blower block 114, thereby minimizing errors in measurement and inspection due to foreign matter. In addition, the problem of lowering the working efficiency due to the measurement error can be prevented in advance.

A new inspection specimen S for subsequent measurement is then placed on the stage 110. When the inspection specimen S is seated, a suction pressure is provided to the suction hole 113 to bring the inspection specimen S into close contact with the upper surface of the stage 110. The supply of the suction pressure may be performed automatically or manually, and preferably after the installation of the test specimen S, automatically. For example, when the test specimen S is seated on the upper surface of the stage 110, a sensor provided on the stage 110 senses it and sends an operation signal to the vacuum pump, thereby providing a suction pressure for a set time.

When the lower surface of the test specimen S is brought into close contact with the upper surface of the stage 110 by the suction pressure, the clamping unit 120 is driven to fix the corner or vertex of the test specimen S. In particular, the clamping unit 120 according to the present embodiment can prevent lifting of edges or apexes in a manner that the contact end 122b presses the upper surface of the test specimen S downward.

When the installation of the test specimen S is completed as described above, necessary measurement and inspection are performed through the first and second probes 130 and 140 and the like. Particularly, the second probe 140 disposed on the lower side of the inspection specimen S can be brought into contact with the lower surface of the inspection specimen S through the access hole 115 having the position guiding function.

In order to reduce measurement errors due to wear, breakage, and the like, the stage 110 can be periodically replaced. The control box CB may further include a counting unit 190 to notify the replacement timing of the stage 110 as needed. The counting unit 190 counts the number of inspections performed in the corresponding stage 110. When the number of inspections reaches a predetermined number, the counting unit 190 can notify the user of the changeover timing of the stage 110 through audiovisual means. The counting of the number of inspections can be performed through a sensor installed in the stage 110. [ That is, when the sensor installed on the stage 110 senses the installation and removal of the inspection specimen S and transmits it to the counting unit 190, the counting unit 190 counts the number of cycles Can be counted by the number of times of inspection once.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, many modifications and changes may be made by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims. The present invention can be variously modified and changed by those skilled in the art, and it is also within the scope of the present invention.

100: flatness inspection apparatus 110: stage
120: clamping unit 130: first probe
140: second probe 150: mobile unit
160: Operation unit 170:
180: control unit 190: counting unit
CB: Control box

Claims (3)

A stage 110 on which the test specimen is placed;
A clamping unit 120 installed on the stage 110 to fix the test specimen;
A plurality of first probes (130) disposed on the stage (110) and measuring a height of the test specimen with respect to an upper surface of the test specimen using a contact type displacement sensor;
A plurality of second probes (140) disposed below the stage (110) and measuring the height of the lower surface of the test specimen using a contact type displacement sensor;
A mobile unit 150 for moving the plurality of first probes 130 up and down with respect to the test specimen;
An arithmetic unit (160) for calculating a height of the inspection specimen using the height difference between the master specimen and the inspection specimen;
A determination unit (170) for comparing the result calculated through the calculation unit (160) with a preset tolerance value to determine whether the test specimen is flat or not; And
And a control unit (180) for controlling the operation of the mobile unit (150)
The stage 110 is formed in a rectangular shape in a plan view, and a blower block 114 is disposed at one corner,
The blower block 114 includes a plurality of spray holes 114a extending along one edge of the stage 110 and spraying compressed air toward the upper surface of the stage 110, And is provided with an injection passage 114b connected to the plurality of injection holes 114a so as to receive compressed air through the injection passage 114b,
The plurality of injection holes 114a are disposed on one surface of the blower block 114 and spaced apart from each other along the longitudinal direction of the blower block 114,
The stage 110 has a plurality of suction holes 113 on its upper surface,
The plurality of suction holes 113 may be formed on the stage 110 so that the suction force is applied to the bottom surface of the test specimen for a set time so that the test specimen is brought into close contact with the stage 110 when the test specimen is seated on the stage 110 And is disposed along the edge of the stage 110 at a predetermined distance inward from the edge of the stage 110 so as to correspond to a corner portion of the test specimen,
In the stage 110, a suction passage 113a connected to the plurality of suction holes 113 is provided to receive a suction pressure through the suction passage 113a,
The stage 110 is provided with a pin set 111 for aligning the test specimen at each vertex,
The pin set (111)
A first pin 111a mounted on the stage 110 through a first slot 112a extending in a first direction on the stage 110 and being positionally adjustable along the first slot 112a; And
(110) mounted on the stage (110) through a second slot (112b) extending from the stage (110) in a second direction orthogonal to the first direction and being positionally adjustable along the second slot And a second pin (111b)
The first and second pins 111a and 111b protrude from the upper surface of the stage 110 to contact and support the corner portion of the test specimen,
The clamping unit 120 is disposed at each vertex of the stage 110 so as to correspond to the pin set 111,
The clamping unit (120)
A supporter 121 extending upward from the upper surface of the stage 110;
A clamper 122 extending in the transverse direction and coupled to a hinge 122a at an upper end of the supporter 121 and having a contact end 122b made of an elastic material at one end thereof to be in contact with the upper surface of the specimen; And
And an actuator 123 spaced a predetermined distance from the hinge 122a to contact and support the other end of the clamper 122 and rotate the clamper 122 about the hinge 122a,
When the removal of the test specimen is detected by a sensor provided on the stage 110, the blower block 114 is operated for a predetermined period of time And is configured to inject compressed air,
The stage 110 is provided with a plurality of access holes 115 through which the second probes 140 are accessible to the bottom surface of the test specimen,
Each of the access holes 115 is formed such that a lower end opening 115a is formed to be tapered from the lower end opening 115a toward the upper end opening 115b by a predetermined size larger than the upper end opening 115b, A chamfer 115c is formed on the rim of the upper surface 115b,
Further comprising a counting unit (190) provided in the control box (CB) together with the calculation unit (160), the determination unit (170) and the control unit (180)
The counting unit 190 counts the number of inspections performed on the stage 110 through the sensor provided on the stage 110 and counts the number of inspections performed on the stage 110 when the counted number of inspections reaches a predetermined number. A flatness inspection device that notifies the user of the replacement timing of the image by means of audiovisual means. delete delete

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