CN202041135U - Solar silicon chip inspection device - Google Patents
Solar silicon chip inspection device Download PDFInfo
- Publication number
- CN202041135U CN202041135U CN2011201243534U CN201120124353U CN202041135U CN 202041135 U CN202041135 U CN 202041135U CN 2011201243534 U CN2011201243534 U CN 2011201243534U CN 201120124353 U CN201120124353 U CN 201120124353U CN 202041135 U CN202041135 U CN 202041135U
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- solar silicon
- silicon wafers
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- plate face
- check
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Abstract
The utility model discloses a solar silicon chip inspection device, which comprises a transparent substrate. The face of the substrate is provided with a bright-spot and bright-line measuring portion, a pollution measuring portion and an impurity and dark spot measuring portion, where the bright-spot and bright-line measuring portion comprises a scale line arranged on the face edge of the substrate, the pollution measuring portion comprises a plurality of inspection frames sequentially arranged according to dimensions, and the impurity and dark spot measuring portion comprises a strip-shaped area filled with colors. The strip-shaped area is provided with a plurality of transparent round spots which are not filled with colors and sequentially arranged according to diameters, and further comprises a plurality of colored round spots which are arranged on the face of the substrate and sequentially arranged according to diameters. Because the adopted technical scheme, the solar silicon chip inspection device can be utilized to conveniently inspect the quality of solar silicon chips, the inspecting methods are simple and practical, and operators are benefited in chip inspection according to requirements. Compared with chip inspections using a magnifier, the solar silicon chip inspection device is simple in operational methods, reduces the chip breaking rate during the chip inspection process, saves costs, and improves production efficiency.
Description
Technical field
The utility model relates to solar silicon wafers, relates in particular to a kind of solar silicon wafers testing fixture.
Background technology
At present, in the production run of silicon chip of solar cell, solar wafer will be passed through operating personnel's visual inspection after cleaning.In the visual inspection process, operating personnel need carry out specification check with wafer, choose bad according to specification requirement, next step the mechanical detection of determining to be allowed for access behind the no tangible physical imperfection.Detect the magnifier of the device of bad silicon chip at present for 10 times of amplifications, because silicon chip hardness is bigger, the enlarging lens that very easily weares and teares shortens the serviceable life of magnifier, therefore need the low and nonabradable instrument of a kind of cost of development, be used for solar silicon wafers is checked.
Summary of the invention
Technical problem to be solved in the utility model is: a kind of solar silicon wafers testing fixture is provided, with convenient solar silicon wafers is carried out every check.
For solving the problems of the technologies described above, the technical solution of the utility model is: the solar silicon wafers testing fixture, comprise transparent substrate, and the plate face of described substrate is provided with bright spot and bright line measurement section, comprises the scale mark of being located at plate face edge; Described plate face is provided with measuring contamination portion, comprises the check box that several are arranged in order according to size; Described plate face is provided with impurity and stain measurement section, comprise and fill coloured strip region, described strip region is provided with not several fish eyes that are arranged in order according to diameter of Fill Color, also comprises several coloured round dots that are arranged in order according to diameter of being located on the described plate face.
As a kind of improvement, described check box comprises that a row arranges the circular check box that is arranged in order according to size according to the square check box and that size is arranged in order.
As a kind of improvement, in described impurity and stain measurement section, described coloured round dot is corresponding one by one with described fish eyes, and corresponding coloured round dot is identical with the fish eyes diameter.
As a kind of improvement, described plate face is provided with black line to silicon chip edge range observation portion, comprises coloured lines that several are arranged in order according to the live width size.
As a kind of improvement, described coloured lines are located at a side of described coloured round dot and corresponding one by one with described coloured round dot, and the live width of corresponding coloured lines is identical with the diameter of coloured round dot.
As a kind of improvement, described plate face is provided with crystallite takeoff portion, comprises the check face of fixed-area.
As a kind of improvement, described check face comprises two.
As a kind of improvement, the shape of described two check faces is respectively rectangle and square.
As a kind of improvement, the area of described two check faces is 2cm
2
Owing to adopted above technical scheme, the utility model can conveniently be tested to the quality of solar silicon wafers, the method of inspection is simple, the handled easily personnel examine sheet as requested, compare with using amplification microscopy sheet, method of operating is simple, has reduced the fragmentation rate in the inspection sheet process, save cost, enhance productivity.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the structural representation of the utility model embodiment;
Among the figure: the 10-substrate; The 11-scale mark; 12-rectangle check box; The circular check box of 13-; The 14-strip region; The 141-fish eyes; The coloured round dot of 15-; The coloured lines of 16-; 17-square check face; 18-rectangle check face; 19-labeling hurdle.
Embodiment
As shown in Figure 1, the solar silicon wafers testing fixture includes the substrate 10 that transparent material makes, substrate 10 is provided with bright spot and bright line measurement section, comprise that the edge part that is positioned at substrate 10 is provided with scale mark 11, scale mark 11 is used for measuring the bright spot that solar silicon wafers produces in process of production, the length or the degree of depth of bright line.
The plate face of substrate 10 is provided with measuring contamination portion, comprise the big or small check box that is used for measuring pollution, the shape of water stain size on the solar silicon wafers and pollution piece differs, therefore in the present embodiment, the shape of check box comprises circular and square two kinds, rectangle check box 12 all comprises the check box that a plurality of dimensions are different with circular check box 13, as shown in fig. 1, rectangle check box 12 comprises that the length of side is totally 15 rectangles of 0.5mm-10mm, 15 rectangles are arranged in order into a row according to size, circular check box 13 comprises that also diameter is 15 circles of 0.5mm-10mm, be arranged in order according to diameter, in the present embodiment, for saving the space, rectangle check box 12 size from left to right reduces to be arranged in a row gradually, and circular check box 13 is being arranged in a row of increasing gradually of diameter from left to right, and rectangle check box 12 is positioned at the top of circular check box 13.During check, for example, the size that requires to pollute piece is no more than 2mm, and the selected length of side or diameter are the check box of 2mm, and substrate 10 is covered on the solar silicon wafers, if pollute the rectangle that is shaped as of piece, moving substrate 10 is that the check box of 2mm covers and pollutes on the piece with the length of side, is positioned at this check box fully if pollute piece, and this solar silicon wafers is certified products, otherwise, be unacceptable product.
In the present embodiment, the plate face of substrate 10 is provided with the measurement section of impurity and stain, comprise and be positioned at the check box below and fill coloured strip region 14, be provided with several not fish eyes 141 of Fill Color in the strip region 14, fish eyes 141 is arranged in order and diameter increases gradually by left-to-right, the below of strip region 14 is provided with the coloured round dot 15 that is filled with black, coloured round dot 15 is corresponding one by one with fish eyes 141, and corresponding coloured round dot 15 is identical with the diameter of fish eyes 141.
The position that is positioned at coloured round dot 15 belows on the substrate 10 also is provided with the measurement section of black line to the silicon chip edge distance, include colo(u)r streak bar 16, coloured lines 16 are corresponding one by one with coloured round dot 15 and fish eyes 141, and the live width of coloured lines 16 size is identical with the diameter of coloured round dot 15 and fish eyes 141.
Fish eyes 141 on coloured round dot 15 and the strip region 14 is used for checking stain or the impurity on the solar silicon wafers, for example, the diameter of the impurity meeting stain on the product requirement solar silicon wafers must not surpass 0.5mm, selected diameter is that the round dot of 0.5mm is compared, if the edge of stain is positioned at fish eyes inside, or the edge of stain do not exceed the border of coloured round dot, and then this solar silicon wafers is certified products, otherwise, be unacceptable product.
Coloured lines 16 are used for measuring the distance of black line to silicon chip edge, production run in, the edge of solar silicon wafers produces some black lines, and the product requirement black line must not surpass a certain numerical value to the distance at edge, for example, the product requirement black line is no more than 0.5mm to the distance at edge, selected live width is coloured lines of 0.5mm, if black line does not exceed the width of coloured lines, then is certified products, otherwise, be unacceptable product.
Because the surface of solar silicon wafers can produce crystallite, in process of production, requires every 2cm
2Area in the quantity of crystallite be no more than a certain numerical value, so substrate 10 is provided with crystallite takeoff portion, comprises the check face of fixed-area, is used to detect every 2cm
2Area in crystallite quantity, check face comprises two kinds in square check face 17 and rectangle 18 check faces, and area is identical, is all 2cm
2, during check, substrate 10 is covered on the solar silicon wafers, observe the quantity that solar silicon wafers drops on the crystallite in the check face, if crystallite quantity less than setting, then is certified products, otherwise is unacceptable product.
The bight of verifying attachment is provided with labeling hurdle 19, makes things convenient for the user to carry out the instrument distribution archive.
Owing to adopted above technical scheme, the utility model can conveniently be tested to the quality of solar silicon wafers, the method of inspection is simple, the handled easily personnel examine sheet as requested, compare with using amplification microscopy sheet, method of operating is simple, has reduced the fragmentation rate in the inspection sheet process, save cost, enhance productivity.
More than show and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; under the prerequisite that does not break away from the utility model spirit and scope, the utility model also has various changes and modifications, and these changes and improvements all fall in claimed the utility model scope.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (9)
1. the solar silicon wafers testing fixture comprises transparent substrate, it is characterized in that:
The plate face of described substrate is provided with bright spot and bright line measurement section, comprises the scale mark of being located at plate face edge;
Described plate face is provided with measuring contamination portion, comprises the check box that several are arranged in order according to size;
Described plate face is provided with impurity and stain measurement section, comprise and fill coloured strip region, described strip region is provided with not several fish eyes that are arranged in order according to diameter of Fill Color, also comprises several coloured round dots that are arranged in order according to diameter of being located on the described plate face.
2. solar silicon wafers testing fixture as claimed in claim 1 is characterized in that: described check box comprises that a row arranges the circular check box that is arranged in order according to size according to the square check box and that size is arranged in order.
3. solar silicon wafers testing fixture as claimed in claim 1 is characterized in that: in described impurity and stain measurement section, described coloured round dot is corresponding one by one with described fish eyes, and corresponding coloured round dot is identical with the fish eyes diameter.
4. as claim 1,2 or 3 described solar silicon wafers testing fixtures, it is characterized in that: described plate face is provided with black line to silicon chip edge range observation portion, comprises coloured lines that several are arranged in order according to the live width size.
5. solar silicon wafers testing fixture as claimed in claim 4 is characterized in that: described coloured lines are located at a side of described coloured round dot and corresponding one by one with described coloured round dot, and the live width of corresponding coloured lines is identical with the diameter of coloured round dot.
6. as claim 1,2 or 3 described solar silicon wafers testing fixtures, it is characterized in that: described plate face is provided with crystallite takeoff portion, comprises the check face of fixed-area.
7. solar silicon wafers testing fixture as claimed in claim 6 is characterized in that: described check face comprises two.
8. solar silicon wafers testing fixture as claimed in claim 7 is characterized in that: the shape of described two check faces is respectively rectangle and square.
9. solar silicon wafers testing fixture as claimed in claim 8 is characterized in that: the area of described two check faces is 2cm
2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201243534U CN202041135U (en) | 2011-04-25 | 2011-04-25 | Solar silicon chip inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201243534U CN202041135U (en) | 2011-04-25 | 2011-04-25 | Solar silicon chip inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202041135U true CN202041135U (en) | 2011-11-16 |
Family
ID=44968574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201243534U Expired - Fee Related CN202041135U (en) | 2011-04-25 | 2011-04-25 | Solar silicon chip inspection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202041135U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106066143A (en) * | 2016-06-28 | 2016-11-02 | 河南平芝高压开关有限公司 | Cambered surface defectoscopy card |
-
2011
- 2011-04-25 CN CN2011201243534U patent/CN202041135U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106066143A (en) * | 2016-06-28 | 2016-11-02 | 河南平芝高压开关有限公司 | Cambered surface defectoscopy card |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111116 Termination date: 20180425 |