KR101688622B1

KR101688622B1 - Scrubber with 3d-mesh filter

Info

Publication number: KR101688622B1
Application number: KR1020160029736A
Authority: KR
Inventors: 김현호; 윤금수; 성하윤
Original assignee: (주)명성씨.엠.아이
Priority date: 2016-03-11
Filing date: 2016-03-11
Publication date: 2016-12-21

Abstract

The present invention relates to a scrubber installed to purify polluted air, and more particularly, to a scrubber installed to purify polluted air, comprising a housing into which a contaminated gas flows, a filter provided in the housing, It is possible to downsize the equipment because there is no need to use a conventional filler and it is unnecessary for the operator to directly enter the inside of the filler to replace the filler, To a scrubber equipped with a mesh filter.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a scrubber with a filter made of a meshed network (SCRUBBER WITH 3D-MESH FILTER)

In the semiconductor process using various hazardous chemicals, harmful chemical substances such as hydrochloric acid, hydrofluoric acid, and ammonia are discharged as exhaust gas. In order to remove such exhaust gas, cleaning and dust collecting device is installed at the final stage. However, these facilities have many difficulties due to limitations in processing efficiency and structural problems, and an alternative solution is needed.

The harmful substances generated in each process of semiconductor manufacturing are transformed into stable particulate and gaseous materials by oxidation process such as combustion due to environmental and safety problems, and then they are passed through a scrubber for temperature reduction and primary removal of highly concentrated pollutants, , And the pollutant discharge concentration is finally determined according to the efficiency of the scrubber system.

However, due to the recent rapid response of enforced environmental regulations and the formation of residential areas around the industry, the company has strengthened its own pollution control regulations. In addition, although it can be considered that the air pollution control equipment market has been activated due to various technological developments, the new technology actually applied to the field is inadequate compared with the development, and it is difficult to satisfy consumers in terms of specific conditions, I can not.

In the case of conventional packed bed type scrubbing dust collector, which is currently used most frequently, the treating efficiency is about 60 ~ 80%, which is caused by the absorption effect due to the diffusion effect of gaseous substance rather than particulate matter removal. In order to enhance the abatement effect, it is considered that the performance of the facility is evaluated by the use of water and the filler. For this reason, the reaction zone is widened and the water usage is excessively installed in order to meet the pollutant abatement effect. However, due to the huge size of the facility, there is a lot of difficulties in the actual site due to the lack of installation site and the energy usage. Also, packing maintenance causes anxiety about industrial safety and maintenance Time resource wasting problem. Therefore, the optimum design method of compact structure that can obtain high efficiency expectation to remove particles and gaseous materials generated in semiconductor process and the development of dust collecting facility which can be complemented without replacing whole existing facility and can reduce energy usage Is required. In addition, it is urgent to develop a dust collecting system that can utilize the technology to meet the emission characteristics of various industrial facilities, compensate for the disadvantages of the existing facilities, reduce the maintenance cost and the processing cost, and can easily maintain the facility.

Accordingly, various techniques have been proposed regarding the scrubber for purifying the air.

Such prior art is the " Duct-coupled air purification system ", Registered Patent No. 10-0887922,

In the conventional art, an air purifying unit is provided in an air supply duct, and duct coupling units are provided on both sides of the air purifying unit. The air purifying unit is provided to spray purifying water from an upper water spray nozzle, A water supply device for supplying purified water to the water spray nozzle is installed and the air purifier is provided in a tunnel shape having a long length in the air flow direction to provide clean and safe air, have.

However, the above-mentioned prior art is provided in the duct to purify the air through the water for purification, and has a lower air purification function than a scrubber using a general filler. In particular, it is difficult to completely remove the contaminated gas contained in the air.

Also, in the prior art, there is a " air purifier ", registered patent No. 10-0397208,

In the prior art, a plurality of free rotation fans are provided, a water stream is injected into the free rotation fan, the internal air including the dust passes between the free rotation fans, and the water drops, So that the air is only discharged through the suction fan, and the water collected in the settling tank is supplied to the nozzle by using the pump after the dust is settled down. Air purifying device.

However, the above-described conventional technique also purifies air by collecting dust on a water droplet formed by simply bumping into a fan, which causes a problem that the purification efficiency is lowered and that a large number of fans are installed to increase the size of the facility.

Accordingly, techniques for purifying contaminated air by injecting a large amount of a filler in order to improve the purification efficiency have been proposed in order to solve the above problems. In the prior art (Patent No. 10-1152015) .

Such a scrubber facility sprays water in a space containing a filler (reaction tri-pack) to form a liquid film on the filler. At this time, the contaminant gas (water-soluble: acid, alkali gas, etc.) that has entered the filling section is absorbed and removed by the liquid film and the droplet, and the gas from which the contaminant is removed is discharged to the end of the scrubber apparatus.

Therefore, the gas retention time in the filler is the most important factor in the scrubber absorption process, and the larger the surface area, the larger the area of the liquid film is formed, and the amount of absorption of the gas into the liquid increases.

However, since the existing facilities have a wide range of packing and the water consumption is high, the efficiency of the equipment is high. Therefore, the volume of the equipment is getting big and as a result, the shortage of the installation site appears, and when the maintenance period comes, the packing is taken out to the outside, As a result, the risk of safety accidents and maintenance costs and time are increased.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a scrubber having a mesh network,

And a filter including a mesh net so as to form a liquid film by the injected nozzles,

The present invention provides a scrubber having a mesh network in which a rigid mesh and a soft mesh are arranged in a superposed arrangement so that a liquid film and a liquid droplet can be more easily generated and a purification efficiency can be enhanced.

The present invention also provides a scrubber having a filter made of a mesh network having a structure in which a rigid mesh and a soft mesh are formed as a 3D mesh network having a space for forming a liquid film and mixing a gas and a liquid to maximize liquid film formation .

Further, a plurality of mesh networks are arranged in a superimposed manner on the filter frame constituting the filter, so that the polluted gas can pass through the liquid film,

And a filter made of a mesh network that facilitates installation and maintenance of the filter frame so that a plurality of filter frames can be coupled to each other.

In order to accomplish the above object, a scrubber having a filter made of a mesh network according to the present invention comprises:

A housing including an inflow portion into which the contaminated gas flows, a moving path connected to the inflow portion and flowing through the inflow portion, and a discharge portion connected to the moving path to discharge the inflow air;

A nozzle provided in the moving path of the housing to spray water;

A filter provided in the traveling path and including a filter frame and a mesh net embedded in the filter frame to form a liquid film by injected water;

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And the polluted gas passes through the liquid film and is removed.

As described above, according to the present invention,

As compared with the equipment using conventional fillers, mesh network is formed in the filter to form a liquid film, which can prevent a large size of equipment due to securing a packing space (increase in space for increasing efficiency), and water consumption Can be reduced,

Particularly, in order to maintain the existing packing, workers must shovel out the filler, and it is necessary to use a saddle to hold the filling material. Also, since the size of the equipment is large, there is a problem that the operator has to enter the facility ) However, when the filter including mesh network is used, it is possible to reduce the cost and time because it is possible to change the filter only by setting the replacement period and the maintenance cycle is long because of the excellent permeability and less sludge generation. Work is done)

Further, since the mesh network is structured by superimposing the rigid mesh and the soft mesh, it is possible to further improve the liquid film formation, thereby improving the purification efficiency,

The filter frame having a configuration in which a plurality of filter frames constituting the filter are coupled to each other has the effect of facilitating maintenance work.

1 is a schematic view of a scrubber with a filter including a mesh net according to the present invention
2 is a perspective view of a filter including a mesh network according to the present invention.
FIG. 3 is a photograph of a mesh net provided in the filter according to the present invention
4 is a rear view and a cross-sectional view of a filter including a mesh net according to the present invention;
5 is a schematic diagram of a filter including a mesh network according to the present invention
Figure 6 is a further embodiment of the scrubber according to the invention
7 is a graph showing the results of experiments showing the acid gas removal efficiency of the scrubber according to the present invention
8 is a graph showing the results of experiments showing the alkaline gas removal efficiency of the scrubber according to the present invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

While the present invention has been described in connection with certain exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

In the drawings, the same reference numerals are used for the same reference numerals, and in particular, the numerals of the tens and the digits of the digits, the digits of the tens, the digits of the digits and the alphabets are the same, Members referred to by reference numerals can be identified as members corresponding to these standards.

In the drawings, the components are expressed by exaggeratingly larger (or thicker) or smaller (or thinner) in size or thickness in consideration of the convenience of understanding, etc. However, It should not be.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the term " comprising " or " consisting of ", or the like, refers to the presence of a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

1, a scrubber A having a filter 30 composed of a mesh net 33 according to the present invention includes a housing 10 into which a contaminated gas flows and a filter unit 30 installed in the housing 10 And a filter (30) including a nozzle (20) for spraying water and a mesh net (33) provided in the housing (10) to form a liquid film by the jetted water.

More specifically, the housing 10 is provided with an inflow portion 11 through which contaminated gas flows, a moving path 13 through which the inflowing gas moves, and a discharge portion 12 through which the gas purified by the filter 30 is discharged. (15).

First, the inflow part 11 is a place where contaminated gas is introduced. In particular, a fan 111 is provided for sucking an external gas or connected to a duct to smoothly transfer gas, A jetting member 113 for jetting a cleaning liquid or water is provided at the downstream end of the jetting member 113 so as to mix gas and water. Particularly, the injection member 113 is to spray a cleaning liquid or water in the form of particles to the contaminated gas.

The gas introduced through the inlet 11 again moves through the transfer passage 13 and the cleaned gas is discharged through the outlet 15. [

In this specification, the inlet 11 is referred to as the front end and the outlet 15 is referred to as the rear end based on the moving direction of the gas.

In addition, the moving path 13 is provided with a filter forming part 131 having a filter 30, and the filter forming part 131 may include a plurality of filter forming parts 131, There is formed a micro fluid solution integrating portion 133 which can be sprayed with a cleaning solution.

A plurality of nozzles 20 for spraying water are provided on the upper portion of the micro fluid solution integrating portion 133. The nozzle 20 is connected to the filter 30 and the filter 30 provided in the filter forming portion 131, And injects water to all of the liquid-free integrating portion 133 between the forming portions 131.

Furthermore, it is more preferable that the lower portion of the housing 10 is provided with a water rejection portion 135 for absorbing and collecting the contaminated gas into the liquid film.

The present invention relates to a technique for forming a liquid film by constituting a filter 30 without using a conventional filler, and the filter 30 will be described in more detail with reference to the drawings.

2 is a perspective view of a filter 30 provided in a filter forming part 131 of a housing 10 according to the present invention,

The filter 30 includes a filter frame 31 and a mesh net 33 that is built in the filter frame 31 and forms a liquid film by the jetted water.

Referring to FIGS. 2 and 4, the filter 30 will be described in more detail. First, the filter 30 has a square shape. The filter 30 has a receiving portion And a filter frame (31) for forming a filter (311)

Both side surfaces of the filter frame 31 are formed in a hexagonal net shape so as to penetrate the inflowed gas and to form a liquid film more effectively.

The accommodating portion 311 is further provided with a reinforcing frame 313 for improving the durability of the filter frame 31 and forming a spacing portion 313a between a plurality of mesh meshes 33 to be embedded therein Referring to FIG. 4, the receiving portion 311 may be divided into a first space 311a and a second space 311b with respect to the reinforcing frame 313.

The filter 30 is formed in an assembled shape that is connected to another adjacent filter 30 so that the filter frame 31 can be slidably coupled to the adjacent filter frame 31 on both sides of the filter frame 31. [ The engaging portion 315 is formed.

2 and 4, the coupling portion 315 provided on the filter frame 31 includes a sliding protrusion 315a provided on one side of the filter frame 31, And a sliding groove 315b which can be fastened to the sliding protrusion 315a.

5, when the adjacent plurality of filter frames 31 are connected to each other, the sliding protrusions 315a and the sliding grooves 315b may be fixed without being shaken when they are engaged with each other. As shown in FIG. 5, when the filter frame 31 is provided in multiple layers, a device for connecting the filter frames 31 to each other is required. Accordingly, the filter frame 31 is provided with a protrusion protrusion 316, In the lower portion of the filter frame 31, coupling grooves 317 corresponding to the coupling protrusions are formed, so that adjacent filter frames 31 can be connected and fixed to each other.

Water injected from the nozzle 20 provided in the housing 10 flows into the upper part of the filter frame 31 to form a liquid film while descending, and the contaminated gas falls downward. To this end, A plurality of communication holes 319 are formed in upper and lower portions of the filter frame 31 so that adjacent filter frames 31 can communicate with each other.

The mesh network 33 is provided in the receiving portion 311 of the filter frame 31 and the mesh network 33 will be described in more detail with reference to FIGS. 2 to 5, particularly FIGS. 3 and 4 do.

The mesh network 33 is provided in the receiving portion 311 of the filter frame 31. The mesh network 33 according to the present invention includes two types of rigid meshes 331 and a flexible mesh 333 .

3 (A), the rigid mesh 331 is composed of a rigid first mesh member 331a and a rigid second mesh member 331b woven into a mesh, And a plurality of first connecting members 331c connecting the member 331a and the rigid second mesh member 331b in parallel with each other.

The stiffness mesh 331 is formed by woven mesh in a mesh form and then subjected to thermal coating treatment to improve its strength. The stiffness mesh 331 has a meshed 3D structure with a low porosity and low pressure loss and is advantageous for liquid film formation.

That is, when viewed in cross section, it is a point to form a liquid film in the rigid first mesh member 331a and the rigid second mesh member 331b, and the first connecting member 331c between them And a point where a gas and a liquid are mixed together with a liquid film formation, so that the liquid film formation can be more effectively promoted.

3 (B), the soft mesh 333 is composed of a soft first mesh member 333a and a soft second mesh member 333b woven into a net shape, And a plurality of second linking members 333c for cross-connecting the first and second flexible mesh members 333a and 333b.

The flexible mesh 333 is made of a soft material by heating the mesh to a lesser extent than the rigid mesh 331. The rigid mesh 331 is made of a soft material, ), It has a high porosity and low pressure loss, and has a mesh 3D structure favorable for liquid film formation.

That is, in view of the cross section, it is a point to form a liquid film in the flexible first mesh member 333a and the flexible second mesh member 333b which are spaced apart from each other, and the second connection member 333c And the second connecting member 333c is disposed at a position where the gas and the liquid are mixed with each other so that the liquid film formation can be performed more effectively. The effect is the same as that of the rigid mesh 331, And is characterized in that a liquid film is formed so as to be denser than the rigid mesh 331 by being provided on the first mesh member 333a and the second flexible mesh member 333b so as to cross each other.

The rigid mesh 331 and the flexible mesh 333 are inserted into the receiving portion 311 of the filter 30,

More specifically, the rigid mesh 331 is provided in the first space 311a located at the front end with respect to the reinforcing frame 313 provided in the accommodating portion 311, and the second space 311b at the rear end is provided. A flexible mesh 333 and a rigid mesh 331 are provided sequentially from the front end to the rear end and separated from each other between the rigid mesh 331 on both sides of the reinforcing frame 313 and the flexible mesh 333, And a portion 313a is formed.

That is, due to such a structure, a liquid film is formed by the rigid mesh 331 of the first spatial section 311a, and a liquid film is formed by the flexible mesh 333 and the rigid mesh 331 of the second spatial section 311b ,

The spacing portion 313a between the first space portion 311a and the second space portion 311b can serve as a clearance space for mixing the gas and the liquid.

As a result, the rigid mesh 331 and the flexible mesh 333 constituting the mesh net 33 are each formed in a three-dimensional shape, and the entire mesh net 33 constituting the filter 30 is also formed into a 3D solid shape And thus the liquid film formation and the pollution gas removal efficiency are further improved.

FIG. 6 shows an embodiment of the scrubber A according to the present invention, in which three filters 30 are provided. The filter 30 can be provided in a plurality of three or more, The scope of the rights should not be construed as limiting.

In order to confirm the effect of the scrubber having the filter made of the mesh network according to the present invention, the removal efficiency was confirmed by using acidic gas (HCl) and alkaline gas (NH ₃ ) as follows.

Experimental Example 1 Confirm removal efficiency of acid gas (HCL)

[Table 1]

Under the same conditions as in Table 1 above, the experiment was conducted with four experimental groups as described below with reference to Fig. 7 [A].

a: Washing tower injection

d: US tax payment

b: Unlimited volume + washing tower injection

e: Cleaning tower injection + M-Filter (Mesh mesh filter)

[Table 2]

As can be seen from the above Table 2 and FIG. 7, when the mesh net filter is used in the cleaning tower, the reduction efficiency of HCl gas is more than 95%.

Experimental Example 2 Check alkaline gas (NH ₃ ) removal efficiency

[Table 3]

[Table 4]

The experiment was carried out as in Table 4 with reference to Fig. 8 [A] under the same conditions as in Table 3 above.

As shown in FIG. 8 [B], NH ₃ removal efficiency was 98% at the liquid ratio of 2 when the washing tower and the mesh net filter were composed of two stages,

As shown in Fig. 8 [C], it was found that the effluent concentration was 0.4 ppm at the liquid ratio of 2.2 L / m 3 and the removal efficiency was 98% or more in terms of the efficiency according to the liquid ratio and the cleaning position.

It was confirmed that these results are very effective in removing both acidic and alkaline gases.

While the present invention has been described with reference to the accompanying drawings, it is to be understood that the scope of the present invention is not limited to the above embodiments, and various modifications, alterations, and substitutions may be made by those skilled in the art Such modifications, alterations, and substitutions are to be construed as being within the scope of the present invention.

A: scrubber 10: housing
11: inlet portion 111: fan
113: jetting member 131: filter forming unit
133: Uncounted amount of missing part 135:
15: discharge part 20: nozzle
30: filter 31: filter frame
311: accommodating portion 311a: first space portion
311b: second space part 313: reinforcing frame
313a: separation part 315:
315a: Sliding projection 315b: Sliding groove
316: projecting projection 317: engaging groove
319: communication hole 33: mesh network
331: rigid mesh 331a: rigid first mesh member
331b: rigid second mesh member 331c: first connecting member
333: soft mesh 333a: soft first mesh member
333b: flexible second mesh member 333c: second connection member

Claims

(13) which is connected to the inflow part (11) and into which the inflow gas flows, and a discharge part connected to the transfer path (13) and discharging the inflowing gas A housing (10) including a portion (15);
A nozzle (20) provided in the moving path (13) of the housing (10) for spraying water;
A filter 30 provided in the traveling path 13 and including a filter frame 31 and a mesh net 33 formed in the filter frame 31 to form a liquid film by the jetted water;
Wherein the pollutant gas is removed through the liquid film,

The mesh network (33) of the filter (30)
The rigid mesh 331 and the flexible mesh 333 are arranged in an overlapping manner,
The rigid mesh 331
The first and second rigid first and second mesh members 331a and 331b spaced apart from each other in parallel and the first and second rigid members 331a and 331b, And a connecting member 331c,
The flexible mesh 333
A plurality of first and second mesh members 333a and 333b spaced apart from each other in parallel to each other and a plurality of first and second mesh members 333a and 333b connecting the first and second mesh members 333a and 333b, And a connecting member (333c).

The method according to claim 1,
The filter frame 31 is formed with a receiving part 311 including a first space part 311a and a second space part 311b so as to have a mesh network 33,
The first space 311a is provided with a rigid mesh 331,
Wherein a soft mesh (333) and a rigid mesh (331) are sequentially disposed in the second space (311b) formed at a rear end of the first space (311a).

3. The method of claim 2,
And a spacing part (313a) is formed between the first space part (311a) and the second space part (311b).

4. The method according to any one of claims 1 to 3,
In the filter frame 31 of the filter 30,
And a plurality of communication holes (319) communicating with adjacent filter frames are formed in a coupling part (315) slidingly coupled with the adjacent filter frame (31) .