KR20190093330A - 3D mesh grid filter and scrubber comprising the same - Google Patents

3D mesh grid filter and scrubber comprising the same Download PDF

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Publication number
KR20190093330A
KR20190093330A KR1020180012830A KR20180012830A KR20190093330A KR 20190093330 A KR20190093330 A KR 20190093330A KR 1020180012830 A KR1020180012830 A KR 1020180012830A KR 20180012830 A KR20180012830 A KR 20180012830A KR 20190093330 A KR20190093330 A KR 20190093330A
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South Korea
Prior art keywords
mesh grid
grid filter
filter
scrubber
filters
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KR1020180012830A
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Korean (ko)
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KR102074975B1 (en
Inventor
김현호
노학재
윤금수
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(주)명성씨.엠.아이
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0035Filters, i.e. particle separators or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by wetting, e.g. using surfaces covered with oil
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D47/00Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/022Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77Liquid phase processes
    • B01D53/78Liquid phase processes with gas-liquid contact

Abstract

The present invention relates to a 3D mesh grid filter having a plurality of flat mesh grid filters and a plurality of bent mesh grid filters for forming a liquid film with a sprayed cleaning liquid and purifying exhaust gas passing therethrough, and a scrubber comprising the same. The plurality of flat mesh grid filters has a flat plate shape having a plurality of first gratings, and a plurality of branches is formed inside the first grating in the plurality of first gratings. The plurality of bent mesh grid filters has a plurality of second gratings, each of which is bent repeatedly to form peaks and valleys, and is interposed and overlapped between the plurality of flat mesh grid filters to form a 3D mesh grid.

Description

3D mesh grid filter and scrubber comprising the same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scrubber, and more particularly, to a 3D mesh grid filter and a scrubber including the same to form a liquid film with a cleaning liquid to be injected to purify exhaust gas passing therethrough.

In the semiconductor manufacturing process and the display manufacturing process, various harmful chemicals such as hydrochloric acid, hydrofluoric acid, and ammonia are used, and as a result, emission gases containing harmful chemicals are generated.

In order to remove harmful chemicals contained in such exhaust gas, an exhaust gas purification device is installed and used at the final stage of the manufacturing process. Scrubber is used as an exhaust gas purification apparatus. Scrubber is a device that collects harmful chemicals contained in the exhaust gas by using a cleaning liquid such as water.

For example, hazardous chemicals generated in each process of semiconductor manufacturing are converted into stable particles and gaseous substances by oxidation process such as combustion for environmental and safety reasons, and then scrubbers for temperature reduction and primary removal of high concentration pollutants. Is released into the atmosphere via In other words, the concentration of pollutant emissions is finally determined according to the scrubber efficiency.

In addition, since environmental regulations on exhaust gases emitted into the air are being strengthened, the demand for scrubbers satisfying these requirements is increasing.

Registered Patent Publication No. 10-1688622 (registered Dec. 15, 2016)

In order to solve this problem, the present applicant has introduced a scrubber having a filter made of a mesh network. Such a scrubber forms a liquid film by forming a mesh network in a filter as compared to a scrubber using a conventional filler, thereby preventing a large size of the facility due to securing a packing space (increasing the space to increase efficiency). This can reduce the amount of water sprayed into the space and make maintenance easier.

On the other hand, in order to improve the purification efficiency of the filter consisting of a mesh network is required a mesh structure that can minimize the pressure drop (pressure drop) of the moving exhaust gas while improving the liquid film formation.

Accordingly, an object of the present invention is to provide a 3D mesh grid filter and a scrubber including the same that can improve the liquid film shape.

Another object of the present invention is to provide a 3D mesh grid filter and a scrubber including the same that can reduce the pressure loss of the exhaust gas passing through the filter.

In order to achieve the above object, the present invention is a scrubber 3D mesh grid filter for forming a liquid film with a sprayed cleaning liquid to purify the exhaust gas passing through, in the form of a flat plate having a plurality of first gratings, the plurality of first A plurality of flat mesh grid filters each having a plurality of branches formed inside the first grid in the grid; And a plurality of bent mesh grid filters having a plurality of second gratings, the bends being repeatedly formed with valleys and valleys, and interposed and superimposed between the plurality of flat mesh grid filters to form a 3D mesh grid. It provides a 3D mesh grid filter for a scrubber comprising a.

In the flat mesh grid filter, the plurality of first gratings are arranged in rows and columns in a rectangular frame shape, and the branches protrude from the edge of the first grating toward the center of the first grating.

The first grating may have a square frame shape.

In the curved mesh grid filter, the plurality of second grids are arranged in rows and columns in a rectangular shape, and the curved mesh grid filter is repeatedly formed in one of row and column directions.

The length of the short side of the second grating may be half the length of one side of the first grating, and the width between the acid and the acid may be equal to the sum of the lengths of the two first gratings.

The second grating may have one short side located on a mountain and the other short side located on a valley.

The plurality of curved mesh grid filters may include: at least one first curved mesh grid filter that is repeatedly curved in a row direction; And at least one second curved mesh grid filter in which the bending is repeatedly formed in the column direction.

The plurality of flat mesh grid filters may include three or more odd numbers, and at least one first curved mesh grid filter may be disposed on one side of the flat mesh grid filter positioned at the center and at least one on the other side. A second curved mesh grid filter may be disposed.

The plurality of flat mesh grid filters are five, and two first curved mesh grid filters are disposed on one side and two second curved mesh grid filters on the other side of the flat mesh grid filter located at the center. Can be arranged.

When the plurality of flat mesh grid filters and the plurality of curved mesh grid filters overlap, long sides of the second grids of the first and second curved mesh grid filters cross each other in a cross shape in the first grid. An intersection point of may be located at the center of the first grating.

The plurality of branches of the first grating extend toward the cross point of the cross.

The flat mesh grid filter and the curved mesh grid filter material include polypropylene or polyvinyl chloride (PVC).

The present invention also includes an inlet portion into which the exhaust gas is introduced, a reaction portion connected to the inlet portion to move and purify the introduced exhaust gas, and a discharge portion connected to the reaction portion to discharge the purified exhaust gas. A housing; A cleaning liquid spraying unit installed in the reaction unit to spray a cleaning liquid into the reaction unit; And a 3D mesh grid filter installed at least in the reaction part and forming a liquid film with the cleaning liquid injected from the cleaning liquid injection part to purify the exhaust gas moving to the reaction part.

According to the present invention, the 3D mesh grid filter is a planar mesh grid filter and a flexible mesh grid filter are sequentially arranged to form a 3D mesh grid, thereby maximizing liquid film, droplet, dispersion, collision, and mixing effects. Implementing can improve the purification efficiency of the exhaust gas passing through the 3D mesh grid filter.

In other words, the 3D mesh grid filter according to the present invention increases the surface area through the 3D mesh grid shape which increases the dispersion ratio of the sprayed cleaning liquid and the exhaust gas, increases the gas-liquid mixing efficiency while passing through the grid space, and diffuses through partial liquid film formation. It is possible to purify the exhaust gas by effectively removing the harmful chemicals contained in the exhaust gas.

In the 3D mesh grid filter according to the present invention, by forming a 3D mesh grid using a structure in which two grids are sequentially arranged, the pressure loss of the exhaust gas passing through the 3D mesh grid filter may be reduced.

1 is an exploded perspective view showing a 3D mesh grid filter for a scrubber according to an embodiment of the present invention.
FIG. 2 is a perspective view illustrating the 3D mesh grid filter of FIG. 1. FIG.
3 is a plan view illustrating the 3D mesh grid filter of FIG. 1.
4 is a cross-sectional view illustrating the 3D mesh grid filter of FIG. 2.
FIG. 5 is a perspective view illustrating the flat mesh grid filter of FIG. 1. FIG.
FIG. 6 is an enlarged view of a portion A of FIG. 5.
FIG. 7 is a perspective view illustrating the curved mesh grid filter of FIG. 1. FIG.
FIG. 8 is a plan view illustrating the curved mesh grip filter of FIG. 7. FIG.
9 and 10 are diagrams showing a scrubber including a 3D mesh grid filter according to the present embodiment.
11 and 12 are graphs showing the removal efficiency of the NH 3 gas of the scrubber including the 3D mesh grid filter according to the present embodiment.
13 is a graph showing the removal efficiency of the HCl gas of the scrubber including the 3D mesh grid filter according to the present embodiment.
14 is a graph showing the removal efficiency of the HF gas of the scrubber including the 3D mesh grid filter according to the present embodiment.

In the following description, only parts necessary for understanding the embodiments of the present invention will be described, it should be noted that the description of other parts will be omitted in a range that does not distract from the gist of the present invention.

The terms or words used in the specification and claims described below should not be construed as being limited to the ordinary or dictionary meanings, and the inventors are appropriate to the concept of terms in order to explain their invention in the best way. It should be interpreted as meanings and concepts in accordance with the technical spirit of the present invention based on the principle that it can be defined. Therefore, the embodiments described in the present specification and the configuration shown in the drawings are only preferred embodiments of the present invention, and do not represent all of the technical idea of the present invention, and various equivalents may be substituted for them at the time of the present application. It should be understood that there may be variations and variations.

Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment of the present invention.

1 is an exploded perspective view showing a 3D mesh grid filter for a scrubber according to an embodiment of the present invention. FIG. 2 is a perspective view illustrating the 3D mesh grid filter of FIG. 1. FIG. 3 is a plan view illustrating the 3D mesh grid filter of FIG. 1. 4 is a cross-sectional view illustrating the 3D mesh grid filter of FIG. 2.

1 to 4, the 3D mesh grid filter 10 according to the present embodiment is a scrubber filter for purifying the exhaust gas passing through the formation of a liquid film with the cleaning liquid is injected.

The 3D mesh grid filter 10 according to the present embodiment includes a plurality of flat mesh grid filters 20 and a plurality of curved mesh grid filters 30, and a plurality of flat mesh grid filters 20. A plurality of curved mesh grid filters 30 are superimposed to form a 3D mesh grid. Here, the plurality of flat mesh grid filters 20 are in the form of a flat plate having a plurality of first gratings 21, and each of the plurality of branches 23 into the first grating 21 in each of the plurality of first gratings 21. ) Is formed. The plurality of bent mesh grid filters 30 are provided with a plurality of second gratings 31, and are bent to repeat the peaks 32 and valleys 33, and the plurality of flat mesh grid filters ( 20) interposed and overlapping each other to form a 3D mesh grid.

As a material of the flat mesh grid filter 20 and the curved mesh grid filter 30, polypropylene and polyvinyl chloride (PVC) having excellent strength and chemical resistance to various harmful chemicals such as hydrochloric acid, hydrofluoric acid, and ammonia are excellent. Plastic material such as) may be used. The flat mesh grid filter 20 and the curved mesh grid filter 30 may be manufactured by injection molding using a plastic material.

The 3D mesh grid filter 10 according to the present exemplary embodiment will be described in detail with reference to FIGS. 1 to 8 as follows.

The flat mesh grid filter 20 will be described with reference to FIGS. 5 and 6 as follows. 5 is a perspective view illustrating the flat mesh grid filter 20 of FIG. 1. 6 is an enlarged view of a portion A of FIG. 5.

The planar mesh grid filter 20 has a plurality of first gratings 21 arranged in rows and columns in a rectangular shape, and branches 23 of the first grating 21 are formed at edges of the first grating 21. It protrudes toward the center. That is, the flat mesh grid filter 20 has a structure in which a plurality of first grids 21 are arranged in M rows x N columns (M and N are natural numbers of two or more). The first grating 21 according to the present embodiment has a square frame shape.

In addition, the flat mesh grid filter 20 may have the width of the branches 23 equal to or larger than the width of the first grating 21 so that the liquid film may be effectively formed by the cleaning liquid to be sprayed. In this embodiment, an example in which the width of the branches 23 is formed larger than the width of the first grating 21 is disclosed.

The curved mesh grid filter 30 will be described with reference to FIGS. 7 and 8 as follows. 7 is a perspective view illustrating the curved mesh grid filter 30 of FIG. 1. 8 is a plan view illustrating the curved mesh grease filter 30 of FIG. 7.

The curved mesh grid filter 30 has a plurality of second grids 31 arranged in rows and columns in a rectangular shape, and the curved mesh grid filter 30 is repeatedly formed in one of row and column directions. By overlapping the planar mesh grid filter 20 via the curved mesh grid filter 30, the 3D mesh grid filter 10 can be three-dimensionally formed. By increasing the surface area inside the 3D mesh grid filter 10, it is possible to improve the mixing and dispersion ratio of the cleaning liquid sprayed to the 3D mesh grid filter 10.

The bend may be formed of a triangular wave, a sinusoidal wave, etc. in which the peak 32 and the valley 33 are periodically repeated. In this embodiment, an example in which the bending is formed in a triangular waveform is disclosed.

The width of the second grating 31 may be equal to or smaller than the width of the first grating 21. In the present embodiment, an example in which the width of the second grating 31 is smaller than the width of the first grating 21 is disclosed.

The length of the short side of the second grating 31 is equal to the first grating 21 so that the curved mesh grid filter 30 can be stably overlapped with the flat mesh grid filter 20 to effectively form the liquid film with the sprayed cleaning liquid. Half of the length of one side of), and the spacing between the peak 32 and 32 is formed equal to the sum of the lengths of the two first gratings (21). The second grating 31 has one short side on the mountain 32 and the other short side on the valley 33.

The plurality of curved mesh grid filters 30 may include at least one first curved mesh grid filter 35 repeatedly formed in a row direction, and at least one second curved type repeatedly formed in a column direction. And a mesh grid filter 37.

As shown in Figs. 1 and 2, the plurality of flat mesh grid filters 20 include three or more odd numbers, and at least one centered flat mesh grid filter 20 on one side thereof. The first curved mesh grid filter 35 is disposed and at least one second curved mesh grid filter 37 is disposed on the other side.

In the present embodiment, there are five flat mesh grid filters 20, and two first curved mesh grid filters 35 are disposed on one side of the flat mesh grid filter 20 positioned at the center. Although the example in which the 2nd 2nd curved mesh grid filter 37 was arrange | positioned at the other side was disclosed, it is not limited to this. For example, the curved mesh grid filter 30 interposed between the plurality of flat mesh grid filters 20 may include a first curved mesh grid filter 35 and a second curved mesh grid filter 37. Can overlap.

When the plurality of flat mesh grid filters 20 and the plurality of curved mesh grid filters 30 are overlapped in this manner, the first and second curved mesh grid filters 35 and 37 in the first grid 21. The long sides of the second lattice 31 of cross each other crosswise. The cross point 39 of the cross shape is located at the center of the first grating 21. At this time, the plurality of branches 23 of the first grating 21 extends toward the cross point 39 of the cross shape.

As described above, in the 3D mesh grid filter 10 according to the present exemplary embodiment, the flat mesh grid filter 20 and the curved mesh grid filter 30 are sequentially arranged to form a 3D mesh grid, thereby forming liquid films, droplets, and dispersion. Implementing the collision, mixing effect to the maximum can improve the purification efficiency of the exhaust gas passing through the 3D mesh grid filter 10.

The 3D mesh grid filter 10 according to the present embodiment increases the surface area through the 3D mesh grid shape which increases the dispersion ratio of the injected cleaning liquid and the exhaust gas, increases the gas-liquid mixing efficiency while passing through the grid space, and forms a partial liquid film. Through diffusion, it is possible to purify the exhaust gas by effectively removing the harmful chemicals contained in the exhaust gas. Here, the grid space is a space formed by overlapping the first grating 21 and the second grating 31.

The 3D mesh grid filter 10 according to the present embodiment forms a 3D mesh grid by using a structure in which two grids, that is, the first lattice 21 and the second lattice 31 are sequentially arranged, thereby creating a 3D mesh grid. Pressure drop of the exhaust gas passing through the mesh grid filter 10 can be reduced.

The scrubber 100 including the 3D mesh grid filter 10 according to the present exemplary embodiment will be described with reference to FIGS. 9 and 10 as follows. 9 and 10 are diagrams illustrating the scrubber 100 including the 3D mesh grid filter 10 according to the present embodiment.

9 and 10, the scrubber 100 according to the present embodiment includes a housing 40, a cleaning liquid spray unit 50, and at least one 3D mesh grid filter 10. In this embodiment, an example in which two 3D mesh grid filters 10 are installed in the housing 40 is disclosed.

The housing 40 is connected to the inlet part 41 into which the exhaust gas is introduced, the reaction part 45 connected to the inlet part 41, and the inlet gas moving to purify the purified gas, and the reaction part 45. A discharge unit 47 for discharging the purified exhaust gas is provided.

A mixing chamber 43 for mixing the discharge gas may be connected to the inlet part 41 in the middle.

The cleaning liquid injection unit 50 is installed in the reaction unit 45 to inject the cleaning liquid into the reaction unit 45. Water may be used as the cleaning liquid, and other cleaning liquids suitable for the type of hazardous chemical to be cleaned may be used. As another cleaning liquid, NaOH, H 2 SO 4, or the like may be used. NaOH can be used to purify acid gases such as HCl, HF. H 2 SO 4 can be used to purify alkali gas, such as NH 3 .

In addition, the 3D mesh grid filter 10 is installed in at least one place in the reaction unit 45 to form a liquid film with the cleaning liquid injected from the cleaning liquid injection unit 50 to purify the exhaust gas moving to the reaction unit 45. In the present embodiment, two 3D mesh grid filters 10 are disclosed in which the reaction unit 40 is installed at a predetermined interval.

The performance evaluation of the 3D mesh grid filter 10 with the scrubber 100 including the 3D mesh grid filter 10 according to the present embodiment was evaluated as follows.

In order to measure the removal efficiency (purification efficiency) of the exhaust gas, HCl, HF, and NH 3 gas were used as the exhaust gas (influent gas).

The scrubber according to the present embodiment was evaluated for performance under a pilot scale condition of treatment capacity 100㎥ / min, liquid ratio 3.5L / ㎥, reaction rate 2m / sec. Washing liquid and pH conditions are shown in Table 1 below.

Item Influent gas Cleaning solution pH condition Injection volume Acid gas HCl NaOH 10-11 350ℓ / min Acid gas HF NaOH 10-11 350ℓ / min Alkali gas NH 3 H 2 SO 4 2.5 ~ 3.0 350ℓ / min

The pressure loss information was measured for each demister at one point of inlet and four points of reaction.

In addition, the gas concentration introduced through the mass flow controller (MFC) was measured first at the inlet of the mixing chamber, and the second concentration was measured at the outlet to confirm the change in the concentration of the gas.

[NH 3 gas removal performance evaluation]

The reduction performance and pressure loss of NH 3 gas were measured. The measurement was performed for 1 week for 4 hours a day for IN, OUT measurements in units of 10 minutes, the pH value was set to 2.0 to 3.5, and the average value was summarized and displayed in the graphs of FIGS. 11 and 12. 11 and 12 are graphs showing the removal efficiency of the NH 3 gas of the scrubber including the 3D mesh grid filter according to the present embodiment.

11 and 12, it can be seen that the 3D mesh grid filter according to the present embodiment has high diffusion and gas-liquid dispersion and mixing effects and high NH 3 gas removal performance. In other words, when the inlet concentration of NH 3 is 100 ~ 120ppm, the same criteria as the actual gas conditions, but 100% removal was possible. The reduction efficiency was high even at pH 3. In addition, the test was carried out by increasing the concentration to 200ppm or more, and the change in concentration was insignificant at 99% to 98% depending on the pH condition. The pressure loss value generated in the reaction part was measured at a low level of 12 mmH 2 O based on 2 m / sec.

[HCl, HF Degassing performance evaluation]

Performance evaluation was performed with HCl gas and HF gas, which are representative acid gases generated in the semiconductor manufacturing process. A purity of 99.999% gas was used, and the inlet concentration (ppm) was uniformly diluted with dilution air and supplied to the reaction part by controlling the amount of injected gas with MFC installed at the front end of the inlet in the same manner as the NH 3 performance evaluation. The chemical liquid cleaner was mixed with a 25% NaOH solution in the washing solution and sprayed into the reaction unit to adjust the pH to 10-11. Under these conditions, the removal efficiency and the pressure loss in the reaction part were measured.

In this case, the measurement was performed for 1 week for 4 hours a day for IN and OUT measurements in units of 10 minutes, and the pH values were set at 10 to 11, and the average values were arranged in the graphs of FIGS. 13 and 14. 13 is a graph showing the removal efficiency of the HCl gas of the scrubber including the 3D mesh grid filter according to the present embodiment. 14 is a graph showing the removal efficiency of the HF gas of the scrubber including the 3D mesh grid filter according to the present embodiment.

Referring to FIGS. 13 and 14, as a result of reducing the HCl gas and the HF gas of the 3D mesh grid filter according to the present embodiment, the HCl showed 100% reduction performance under the inflow concentration of 20 ppm or less. The reduction performance was 96% at 40 ppm. The HF gas showed the same 100% reduction performance as the HCl gas under the inflow concentration of 20 ppm or less and the excellent reduction performance of 97% under the high concentration of the inflow concentration up to 55 ppm. In addition, since the pressure loss value generated in the reaction part was measured at a low level of 4 mmH 2 O on the basis of 2 m / sec, it was confirmed that the 3D mesh grid filter according to the present embodiment was the most applicable filter to the actual scrubber.

On the other hand, the embodiments disclosed in the specification and drawings are merely presented specific examples to aid understanding, and are not intended to limit the scope of the present invention. It is apparent to those skilled in the art that other modifications based on the technical idea of the present invention can be carried out in addition to the embodiments disclosed herein.

10: 3D Mesh Grid Filter
20: flat mesh grid filter
21: first grid
23: eggplant
30: bent mesh grid filter
31: second lattice
32: acid
33: goal
35: first bend mesh grid filter
37: second bend mesh grid filter
39: intersection point of the cross
40 housing
41: inlet
43: Mixing Chamber
45: reaction part
47: discharge part
50: cleaning liquid injection unit
100: scrubber

Claims (13)

  1. A 3D mesh grid filter for a scrubber for forming a liquid film with sprayed cleaning liquid to purify exhaust gas passing therethrough,
    A plurality of flat mesh grid filters each having a plurality of first gratings, the plurality of first gratings having a plurality of branches formed inside the first grating; And
    A plurality of bent mesh grid filters having a plurality of second gratings, the bends being repeatedly formed with valleys and valleys, and interposed and superimposed between the plurality of flat mesh grid filters to form a 3D mesh grid;
    3D mesh grid filter for scrubber comprising.
  2. According to claim 1, The flat mesh grid filter,
    Wherein the plurality of first gratings are arranged in rows and columns in a rectangular frame shape, wherein the branches protrude from the edge of the first grating toward the center of the first grating. .
  3. The method of claim 2,
    3D mesh grid filter for a scrubber, characterized in that the first grid has a square frame shape.
  4. The method of claim 3,
    The curved mesh grid filter is a 3D mesh grid filter for a scrubber, characterized in that the plurality of second grid is arranged in a row to form a column in a rectangular shape, the bend is repeatedly formed in one of the row and column direction. .
  5. The method of claim 4, wherein
    The length of the short side of the second grating is half of the length of one side of the first grating,
    3. The 3D mesh grid filter for a scrubber, wherein the width between the mountains is equal to the sum of the lengths of the two first grids.
  6. The method of claim 5,
    The second grating is a 3D mesh grid filter for a scrubber, characterized in that one short side is located in the mountain and the other short side is located in the valley.
  7. The method of claim 6, wherein the plurality of curved mesh grid filter,
    At least one first bent mesh grid filter that is repeatedly curved in a row direction; And
    At least one second curved mesh grid filter in which the curve is repeatedly formed in a column direction;
    3D mesh grid filter for a scrubber comprising a.
  8. The method of claim 7, wherein
    The plurality of flat mesh grid filters may include three or more odd numbers, and at least one first curved mesh grid filter may be disposed on one side of the flat mesh grid filter positioned at the center and at least one on the other side. A 3D mesh grid filter for a scrubber, wherein the second curved mesh grid filter is disposed.
  9. The method of claim 8,
    The plurality of flat mesh grid filters are five, and two first curved mesh grid filters are disposed on one side and two second curved mesh grid filters on the other side of the flat mesh grid filter located at the center. 3D mesh grid filter for scrubber, characterized in that disposed.
  10. The method of claim 8,
    When the plurality of flat mesh grid filters and the plurality of curved mesh grid filters overlap, the long sides of the second lattice of the first and second curved mesh grid filters cross each other in a cross shape in the first lattice. The intersection of the 3D mesh grid filter for the scrubber, characterized in that located in the center of the first grating.
  11. The method of claim 10,
    3. The 3D mesh grid filter for the scrubber, wherein the plurality of branches of the first grating extend toward the cross point of the cross.
  12. The method of claim 1,
    The flat mesh grid filter and the curved mesh grid filter material is a 3D mesh grid filter for a scrubber, characterized in that the polypropylene or polyvinyl chloride.
  13. A housing including an inlet part through which the exhaust gas is introduced, a reaction part connected to the inlet part to move and purge the exhaust gas, and a discharge part connected to the reaction part to discharge the purified exhaust gas;
    A cleaning liquid spraying unit installed in the reaction unit to spray a cleaning liquid into the reaction unit; And
    And a 3D mesh grid filter installed at least in the reaction part and forming a liquid film with the cleaning liquid injected from the cleaning liquid injection part to purify the exhaust gas moving to the reaction part.
    The 3D mesh grid filter,
    A plurality of flat mesh grid filters each having a plurality of first gratings, the plurality of first gratings having a plurality of branches formed inside the first grating; And
    A plurality of bent mesh grid filters having a plurality of second gratings, the bends being repeatedly formed with valleys and valleys, and interposed and superimposed between the plurality of flat mesh grid filters to form a 3D mesh grid;
    Scrubber comprising a.
KR1020180012830A 2018-02-01 2018-02-01 3D mesh grid filter and scrubber comprising the same KR102074975B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06285357A (en) * 1991-08-20 1994-10-11 Nippon Polyester Kk Gas-liquid contact unit and gas-liquid contact device
KR101320638B1 (en) * 2013-06-04 2013-10-23 엔텍이앤씨 주식회사 Porous filter and using the gas-liquid contact device
KR101688622B1 (en) 2016-03-11 2016-12-21 (주)명성씨.엠.아이 Scrubber with 3d-mesh filter
KR101783373B1 (en) * 2016-07-28 2017-10-23 (주)효진아이디에스 Scrubber for removing waste gas discharged from a semiconductor process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06285357A (en) * 1991-08-20 1994-10-11 Nippon Polyester Kk Gas-liquid contact unit and gas-liquid contact device
KR101320638B1 (en) * 2013-06-04 2013-10-23 엔텍이앤씨 주식회사 Porous filter and using the gas-liquid contact device
KR101688622B1 (en) 2016-03-11 2016-12-21 (주)명성씨.엠.아이 Scrubber with 3d-mesh filter
KR101783373B1 (en) * 2016-07-28 2017-10-23 (주)효진아이디에스 Scrubber for removing waste gas discharged from a semiconductor process

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