KR101676871B1 - Photosensitive resin composition and display - Google Patents
Photosensitive resin composition and display Download PDFInfo
- Publication number
- KR101676871B1 KR101676871B1 KR1020090109593A KR20090109593A KR101676871B1 KR 101676871 B1 KR101676871 B1 KR 101676871B1 KR 1020090109593 A KR1020090109593 A KR 1020090109593A KR 20090109593 A KR20090109593 A KR 20090109593A KR 101676871 B1 KR101676871 B1 KR 101676871B1
- Authority
- KR
- South Korea
- Prior art keywords
- group
- meth
- acrylate
- methyl
- ether
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims description 52
- -1 glycol dialkyl ether Chemical class 0.000 claims abstract description 143
- 150000001875 compounds Chemical class 0.000 claims abstract description 80
- 239000002904 solvent Substances 0.000 claims abstract description 57
- 239000003505 polymerization initiator Substances 0.000 claims abstract description 37
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 36
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims abstract description 21
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 14
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 11
- 238000000576 coating method Methods 0.000 claims description 60
- 239000011248 coating agent Substances 0.000 claims description 58
- 238000000034 method Methods 0.000 claims description 16
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical group OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 claims description 11
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 14
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 84
- 229920005989 resin Polymers 0.000 description 39
- 239000011347 resin Substances 0.000 description 39
- 239000000243 solution Substances 0.000 description 29
- 229920001577 copolymer Polymers 0.000 description 17
- 125000003700 epoxy group Chemical group 0.000 description 15
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 14
- 239000000203 mixture Substances 0.000 description 14
- 239000000178 monomer Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- 239000003513 alkali Substances 0.000 description 13
- 239000000470 constituent Substances 0.000 description 12
- 238000001035 drying Methods 0.000 description 12
- 125000003118 aryl group Chemical group 0.000 description 11
- 239000000049 pigment Substances 0.000 description 11
- 125000005843 halogen group Chemical group 0.000 description 10
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000003999 initiator Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 239000004094 surface-active agent Substances 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 9
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Natural products C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 7
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 125000001931 aliphatic group Chemical group 0.000 description 6
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 6
- 235000014113 dietary fatty acids Nutrition 0.000 description 6
- 239000000194 fatty acid Substances 0.000 description 6
- 229930195729 fatty acid Natural products 0.000 description 6
- OTTZHAVKAVGASB-UHFFFAOYSA-N hept-2-ene Chemical compound CCCCC=CC OTTZHAVKAVGASB-UHFFFAOYSA-N 0.000 description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 description 5
- SGUYGLMQEOSQTH-UHFFFAOYSA-N 2-propoxyacetic acid Chemical compound CCCOCC(O)=O SGUYGLMQEOSQTH-UHFFFAOYSA-N 0.000 description 5
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 5
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Natural products CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical group CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 5
- 125000002723 alicyclic group Chemical group 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 239000012965 benzophenone Substances 0.000 description 5
- 150000004292 cyclic ethers Chemical group 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 5
- 125000003566 oxetanyl group Chemical group 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 4
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000008065 acid anhydrides Chemical class 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 4
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- 125000006353 oxyethylene group Chemical group 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 4
- WEZYFYMYMKUAHY-UHFFFAOYSA-N tert-butyl 2,4-dibenzylpiperazine-1-carboxylate Chemical compound C1C(CC=2C=CC=CC=2)N(C(=O)OC(C)(C)C)CCN1CC1=CC=CC=C1 WEZYFYMYMKUAHY-UHFFFAOYSA-N 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 0 *C(C(O*C(C1)C2C(C3)(C3C(C3)O)C3C1C2)=O)=C Chemical compound *C(C(O*C(C1)C2C(C3)(C3C(C3)O)C3C1C2)=O)=C 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- KUGJLFCEVQECCS-UHFFFAOYSA-N 2-(3-methyl-1,3-benzothiazol-2-ylidene)-1-naphthalen-2-ylethanone Chemical compound C1=CC=CC2=CC(C(=O)C=C3N(C4=CC=CC=C4S3)C)=CC=C21 KUGJLFCEVQECCS-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- LAXBNTIAOJWAOP-UHFFFAOYSA-N 2-chlorobiphenyl Chemical group ClC1=CC=CC=C1C1=CC=CC=C1 LAXBNTIAOJWAOP-UHFFFAOYSA-N 0.000 description 3
- WDQIDQYSOAQPNJ-UHFFFAOYSA-N 3,4-epoxytricyclo[5.2.1.02,6]decyl acrylate Chemical compound C12CC3OC3C2C2(OC(=O)C=C)CC1CC2 WDQIDQYSOAQPNJ-UHFFFAOYSA-N 0.000 description 3
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 3
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical group CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- IPTNXMGXEGQYSY-UHFFFAOYSA-N acetic acid;1-methoxybutan-1-ol Chemical compound CC(O)=O.CCCC(O)OC IPTNXMGXEGQYSY-UHFFFAOYSA-N 0.000 description 3
- 150000008064 anhydrides Chemical class 0.000 description 3
- 239000003945 anionic surfactant Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- 125000006267 biphenyl group Chemical group 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 239000003093 cationic surfactant Substances 0.000 description 3
- MVPPADPHJFYWMZ-IDEBNGHGSA-N chlorobenzene Chemical group Cl[13C]1=[13CH][13CH]=[13CH][13CH]=[13CH]1 MVPPADPHJFYWMZ-IDEBNGHGSA-N 0.000 description 3
- 229920006026 co-polymeric resin Polymers 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- UFDHBDMSHIXOKF-UHFFFAOYSA-N cyclohexene-1,2-dicarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- KNFXXAGQEUUZAZ-UHFFFAOYSA-N ethyl ethaneperoxoate Chemical compound CCOOC(C)=O KNFXXAGQEUUZAZ-UHFFFAOYSA-N 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 238000013007 heat curing Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 3
- 230000000977 initiatory effect Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000002736 nonionic surfactant Substances 0.000 description 3
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- IYVPXMGWHZBPIR-UHFFFAOYSA-N propyl 3-ethoxypropanoate Chemical compound CCCOC(=O)CCOCC IYVPXMGWHZBPIR-UHFFFAOYSA-N 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- CBDKQYKMCICBOF-UHFFFAOYSA-N thiazoline Chemical compound C1CN=CS1 CBDKQYKMCICBOF-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 2
- WQONPSCCEXUXTQ-UHFFFAOYSA-N 1,2-dibromobenzene Chemical group BrC1=CC=CC=C1Br WQONPSCCEXUXTQ-UHFFFAOYSA-N 0.000 description 2
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical group ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 2
- BWSIKJKXQWLTLS-UHFFFAOYSA-N 1,2-dimethoxyanthracene Chemical compound C1=CC=CC2=CC3=C(OC)C(OC)=CC=C3C=C21 BWSIKJKXQWLTLS-UHFFFAOYSA-N 0.000 description 2
- MDAXKAUIABOHTD-UHFFFAOYSA-N 1,4,8,11-tetraazacyclotetradecane Chemical compound C1CNCCNCCCNCCNC1 MDAXKAUIABOHTD-UHFFFAOYSA-N 0.000 description 2
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 description 2
- KTADSLDAUJLZGL-UHFFFAOYSA-N 1-bromo-2-phenylbenzene Chemical group BrC1=CC=CC=C1C1=CC=CC=C1 KTADSLDAUJLZGL-UHFFFAOYSA-N 0.000 description 2
- JTPNRXUCIXHOKM-UHFFFAOYSA-N 1-chloronaphthalene Chemical group C1=CC=C2C(Cl)=CC=CC2=C1 JTPNRXUCIXHOKM-UHFFFAOYSA-N 0.000 description 2
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 2
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 2
- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- JJRUAPNVLBABCN-UHFFFAOYSA-N 2-(ethenoxymethyl)oxirane Chemical compound C=COCC1CO1 JJRUAPNVLBABCN-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
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- XVKLLVZBGMGICC-UHFFFAOYSA-N o-[3-propanethioyloxy-2,2-bis(propanethioyloxymethyl)propyl] propanethioate Chemical compound CCC(=S)OCC(COC(=S)CC)(COC(=S)CC)COC(=S)CC XVKLLVZBGMGICC-UHFFFAOYSA-N 0.000 description 1
- 239000001053 orange pigment Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- RZFODFPMOHAYIR-UHFFFAOYSA-N oxepan-2-one;prop-2-enoic acid Chemical compound OC(=O)C=C.O=C1CCCCCO1 RZFODFPMOHAYIR-UHFFFAOYSA-N 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 125000000466 oxiranyl group Chemical group 0.000 description 1
- 125000005702 oxyalkylene group Chemical group 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- LGOPTUPXVVNJFH-UHFFFAOYSA-N pentadecanethioic s-acid Chemical compound CCCCCCCCCCCCCCC(O)=S LGOPTUPXVVNJFH-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- WRAQQYDMVSCOTE-UHFFFAOYSA-N phenyl prop-2-enoate Chemical compound C=CC(=O)OC1=CC=CC=C1 WRAQQYDMVSCOTE-UHFFFAOYSA-N 0.000 description 1
- HPAFOABSQZMTHE-UHFFFAOYSA-N phenyl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)C1=CC=CC=C1 HPAFOABSQZMTHE-UHFFFAOYSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- AMLFJZRZIOZGPW-UHFFFAOYSA-N prop-1-en-1-amine Chemical group CC=CN AMLFJZRZIOZGPW-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- GYOCIFXDRJJHPF-UHFFFAOYSA-N propyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCC GYOCIFXDRJJHPF-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- FIABMSNMLZUWQH-UHFFFAOYSA-N propyl 2-methoxyacetate Chemical compound CCCOC(=O)COC FIABMSNMLZUWQH-UHFFFAOYSA-N 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- KNCDNPMGXGIVOM-UHFFFAOYSA-N propyl 3-hydroxypropanoate Chemical compound CCCOC(=O)CCO KNCDNPMGXGIVOM-UHFFFAOYSA-N 0.000 description 1
- YTUFRRBSSNRYID-UHFFFAOYSA-N propyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCCC YTUFRRBSSNRYID-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- FBONOZIMJLFIJZ-UHFFFAOYSA-N propyl propaneperoxoate Chemical compound CCCOOC(=O)CC FBONOZIMJLFIJZ-UHFFFAOYSA-N 0.000 description 1
- NJSJBTVAKUBCKG-UHFFFAOYSA-N propylazanide Chemical compound CCC[NH-] NJSJBTVAKUBCKG-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- KOUKXHPPRFNWPP-UHFFFAOYSA-N pyrazine-2,5-dicarboxylic acid;hydrate Chemical compound O.OC(=O)C1=CN=C(C(O)=O)C=N1 KOUKXHPPRFNWPP-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229940116351 sebacate Drugs 0.000 description 1
- CXMXRPHRNRROMY-UHFFFAOYSA-L sebacate(2-) Chemical compound [O-]C(=O)CCCCCCCCC([O-])=O CXMXRPHRNRROMY-UHFFFAOYSA-L 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229960004599 sodium borate Drugs 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 125000005931 tert-butyloxycarbonyl group Chemical group [H]C([H])([H])C(OC(*)=O)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- LVEOKSIILWWVEO-UHFFFAOYSA-N tetradecyl 3-(3-oxo-3-tetradecoxypropyl)sulfanylpropanoate Chemical compound CCCCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCCCC LVEOKSIILWWVEO-UHFFFAOYSA-N 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
수지 (A), 중합성 화합물 (B), 중합 개시제 (C) 및 용제 (D) 를 함유하고,(A), a polymerizable compound (B), a polymerization initiator (C) and a solvent (D)
용제 (D) 가 탄소수 1 ∼ 3 의 알킬렌기 및 탄소수 1 ∼ 4 의 알킬기를 갖는 디알킬렌글리콜디알킬에테르와, 탄소수 1 ∼ 6 의 알코올을 함유하는 용제인 감광성 수지 조성물.Wherein the solvent (D) is a solvent containing a dialkylene glycol dialkyl ether having an alkylene group having 1 to 3 carbon atoms and an alkyl group having 1 to 4 carbon atoms and an alcohol having 1 to 6 carbon atoms.
Description
본 발명은 감광성 수지 조성물 및 표시 장치에 관한 것이다. The present invention relates to a photosensitive resin composition and a display device.
최근의 액정 표시 패널 등에서는 기판 사이즈의 대형화가 진행되고 있어, 통상 기판면에는 코트층 등의 투명막 또는 패턴을 형성하기 위해서 감광성 수지 조성물이 스핀 도포법, 슬릿 & 스핀법 등에 의해 도포 형성되어 있다. In recent liquid crystal display panels and the like, the size of the substrate is becoming larger. In order to form a transparent film or pattern such as a coat layer on the surface of a substrate, a photosensitive resin composition is formed by spin coating, slit & spin method or the like .
한편, 생산성 향상, 대형 화면에 대한 대응 등의 관점에서, 감광성 수지 조성물 용액을 절약하면서, 고품질의 균일한 도포막을 형성하는 방법이 연구되고 있다. On the other hand, from the viewpoints of productivity improvement, response to a large screen, and the like, a method of forming a uniform coating film of high quality while saving the photosensitive resin composition solution has been researched.
이러한 배경에서, 우수한 품질의 도포막을 형성하기 위해서 용매종의 선택이 모색되고 있다. 예를 들어, 용제로서 프로필렌글리콜모노메틸에테르아세테이트, 3-에톡시에틸프로피오네이트, 3-메톡시1-부탄올 및 3-메톡시부틸아세테이트의 혼합물을 사용한 감광성 수지 조성물을 이용하는 것이 개시되어 있다 (예를 들어, 특허 문헌 1). In this background, selection of a solvent type is sought to form a coating film of excellent quality. For example, a photosensitive resin composition using a mixture of propylene glycol monomethyl ether acetate, 3-ethoxyethyl propionate, 3-methoxy-1-butanol and 3-methoxybutyl acetate as a solvent has been disclosed For example, Patent Document 1).
[특허 문헌 1] 일본 공개특허공보 2008-181087호 단락 91[Patent Document 1] Japanese Unexamined Patent Application Publication No. 2008-181087 Paragraph 91
그러나, 상기 서술한 용제를 사용한 감광성 수지 조성물을 대표적인 도포 방법인 슬릿 다이 도포법 등에 적용한 경우, 뿌연 얼룩, 세로줄 얼룩 및 핀 자국이 발생하는 경우가 있어, 고품질의 도포막을 얻지 못하는 것이 현상황이다. However, when a photosensitive resin composition using the above-described solvent is applied to a slit die coating method, which is a typical coating method, cloudy unevenness, vertical line unevenness and pin marks may occur, and a high quality coating film can not be obtained.
본 발명은 뿌연 얼룩, 세로줄 및 핀 자국의 발생이 억제되어 도포막 전체에 걸쳐 균일하고, 고품질인 도포막을 형성할 수 있는 감광성 수지 조성물 및 그것을 사용한 표시 장치 등을 제공하는 것을 목적으로 한다. It is an object of the present invention to provide a photosensitive resin composition capable of forming a uniform and high quality coating film throughout the coating film by suppressing occurrence of cloudiness, vertical lines and pin marks, and a display device using the same.
즉, 본 발명은 이하의 [1] ∼ [8] 을 제공하는 것이다. That is, the present invention provides the following [1] to [8].
[1] 수지 (A), 중합성 화합물 (B), 중합 개시제 (C) 및 용제 (D) 를 함유하고, 용제 (D) 가 탄소수 1 ∼ 3 의 알킬렌기 및 탄소수 1 ∼ 4 의 알킬기를 갖는 디알킬렌글리콜디알킬에테르와, 탄소수 1 ∼ 6 의 알코올을 함유하는 용제인 감광성 수지 조성물. (1) A positive resist composition comprising a resin (A), a polymerizable compound (B), a polymerization initiator (C) and a solvent (D), wherein the solvent (D) contains an alkylene group having 1 to 3 carbon atoms and an alkyl group having 1 to 4 carbon atoms Wherein the solvent is a solvent containing a dialkylene glycol dialkyl ether and an alcohol having 1 to 6 carbon atoms.
[2] 용제 (D) 가 용제 전체량에 대하여 디알킬렌글리콜디알킬에테르를 30 ∼ 90 질량% 함유하는 용제인 [1] 에 기재된 감광성 수지 조성물. [2] The photosensitive resin composition according to [1], wherein the solvent (D) is a solvent containing 30 to 90% by mass of a dialkylene glycol dialkyl ether based on the total amount of the solvent.
[3] 용제 (D) 가 용제 전체량에 대하여 탄소수 1 ∼ 6 의 알코올을 10 ∼ 50 질량% 함유하는 용제인 [1] 또는 [2] 에 기재된 감광성 수지 조성물. [3] The photosensitive resin composition according to [1] or [2], wherein the solvent (D) is a solvent containing 10 to 50 mass% of an alcohol having 1 to 6 carbon atoms relative to the total amount of the solvent.
[4] 디알킬렌글리콜디알킬에테르가 디에틸렌글리콜에틸메틸에테르인 [1] ∼ [3] 중 어느 하나에 기재된 감광성 수지 조성물.[4] The photosensitive resin composition according to any one of [1] to [3], wherein the dialkylene glycol dialkyl ether is diethylene glycol ethyl methyl ether.
[5] 탄소수 1 ∼ 6 의 알코올이 3-메톡시부탄올인 [1] ∼ [4] 중 어느 하나에 기재된 감광성 수지 조성물.[5] The photosensitive resin composition according to any one of [1] to [4], wherein the alcohol having 1 to 6 carbon atoms is 3-methoxybutanol.
[6] [1] ∼ [5] 중 어느 하나에 기재된 감광성 수지 조성물을 사용하여 형성되는 도포막. [6] A coated film formed by using the photosensitive resin composition according to any one of [1] to [5].
[7] [1] ∼ [5] 중 어느 하나에 기재된 감광성 수지 조성물을 사용하여 형성되는 패턴. [7] A pattern formed by using the photosensitive resin composition according to any one of [1] to [5].
[8] [6] 의 도포막 및 청구항 7 에 기재된 패턴으로 이루어지는 군에서 선택되는 적어도 1 종을 포함하는 표시 장치. [8] A display device comprising at least one selected from the group consisting of the coating film of [6] and the pattern described in claim 7.
본 발명에 의하면, 뿌연 얼룩, 세로줄 얼룩 및 핀 자국의 발생이 억제되어 도포막 전체에 걸쳐 균일하고, 고품질인 도포막을 형성할 수 있다. According to the present invention, it is possible to form a uniform and high-quality coating film over the entire coating film by suppressing the occurrence of cloudiness, vertical line unevenness and pin marks.
또, 이 감광성 수지 조성물을 이용함으로써 고품질의 표시 장치 등을 얻을 수 있게 된다. Further, by using this photosensitive resin composition, a high-quality display device or the like can be obtained.
본 발명의 감광성 수지 조성물은 수지 (A), 중합성 화합물 (B), 중합 개시제 (C) 및 용제 (D) 를 함유한다. 또한, 본 명세서에서는 각 성분으로서 예시하는 화합물은 특별히 언급하지 않는 한 단독으로, 또는 조합하여 사용할 수 있다.The photosensitive resin composition of the present invention contains a resin (A), a polymerizable compound (B), a polymerization initiator (C) and a solvent (D). In the present specification, the compounds exemplified as respective components can be used alone or in combination, unless otherwise specified.
본 발명의 감광성 수지 조성물에 사용되는 수지 (A) 로는, 알칼리 용해성을 갖는 수지 (A1), 알칼리 용해성 그리고 광 및 열의 적어도 어느 일방의 작용에 의해 반응성을 갖는 수지 (A2) 등이 예시된다. Examples of the resin (A) used in the photosensitive resin composition of the present invention include a resin (A1) having alkali solubility, a resin (A2) having an alkali solubility and at least one of the action of light and heat, and the like.
알칼리 용해성을 갖는 수지 (A1) 로는, 불포화 카르복실산 및 불포화 카르복실산 무수물로 이루어지는 군에서 선택되는 적어도 1 종 (a) (이하 「(a)」 라고 하는 경우가 있다) 과, (a) 와 공중합 가능한 단량체 (c) (이하 「(c)」 라고 하는 경우가 있다) 의 공중합체 등이 예시된다. Examples of the resin (A1) having alkali solubility include (a) at least one (a) (hereinafter sometimes referred to as "(a)") selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride, And a monomer (c) copolymerizable therewith (hereinafter referred to as " (c) ").
(a) 로는 구체적으로는 예를 들어, 아크릴산, 메타크릴산, 크로톤산, o-, m-, p-비닐벤조산 등의 불포화 모노카르복실산류 ; (a) specifically include, for example, unsaturated monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, o-, m-, p-vinylbenzoic acid;
1,4-시클로헥센디카르복실산, 메틸-5-노르보르넨-2,3-디카르복실산 등의 불포화 디카르복실산류 ; Unsaturated dicarboxylic acids such as 1,4-cyclohexene dicarboxylic acid and methyl-5-norbornene-2,3-dicarboxylic acid;
말레산, 푸마르산, 시트라콘산, 메사콘산, 이타콘산, 3-비닐프탈산, 4-비닐프탈산, 3,4,5,6-테트라히드로프탈산, 1,2,3,6-테트라히드로프탈산, 디메틸테트라히드로프탈산 등의 불포화 디카르복실산류 ;Maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinylphthalic acid, 4-vinylphthalic acid, 3,4,5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, Unsaturated dicarboxylic acids such as tetrahydrophthalic acid;
이들 불포화 디카르복실산류의 무수물 ; Anhydrides of these unsaturated dicarboxylic acids;
숙신산모노〔2-(메트)아크릴로일옥시에틸〕, 프탈산모노〔2-(메트)아크릴로일옥시에틸〕 등의 2 가 이상의 다가 카르복실산의 불포화 모노〔(메트)아크릴로일옥시알킬〕에스테르류 ; (Meth) acryloyloxyalkyl (meth) acrylate of a divalent or higher polyvalent carboxylic acid such as succinic acid mono [2- (meth) acryloyloxyethyl], phthalic acid mono [2- Esters;
-(히드록시메틸)아크릴산과 같은, 동일 분자 중에 히드록시기 및 카르복시기를 함유하는 불포화 아크릴레이트류 등을 들 수 있다. And unsaturated acrylates containing a hydroxy group and a carboxyl group in the same molecule, such as - (hydroxymethyl) acrylic acid.
이들 중, 아크릴산, 메타크릴산, 무수 말레산 등이 공중합 반응성의 면이나 알칼리 용해성의 면에서 바람직하게 사용된다. Of these, acrylic acid, methacrylic acid, maleic anhydride and the like are preferably used in terms of copolymerization reactivity and alkali solubility.
(c) 로는, 메틸(메트)아크릴레이트, 에틸(메트)아크릴레이트, n-부틸(메트) 아크릴레이트, sec-부틸(메트)아크릴레이트, tert-부틸(메트)아크릴레이트 등의 (메트)아크릴산알킬에스테르류 ; (meth) acrylate such as methyl (meth) acrylate, ethyl (meth) acrylate, n-butyl (meth) acrylate, sec-butyl (meth) acrylate, Acrylic acid alkyl esters;
시클로헥실(메트)아크릴레이트, 2-메틸시클로헥실(메트)아크릴레이트, 트리시클로[5.2.1.02,6]데칸-8-일(메트)아크릴레이트 (당해 기술 분야에서는, 관용명으로서 디시클로펜타닐(메트)아크릴레이트라고 불린다), 디시클로펜타닐옥시에틸(메트)아크릴레이트, 이소보로닐(메트)아크릴레이트 등의 (메트)아크릴산 고리형 알킬에스테르류 ; Cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, tricyclo [5.2.1.0 2,6 ] decan-8-yl (meth) acrylate (in the art, dicyclopentanil (Meth) acrylate), dicyclopentanyloxyethyl (meth) acrylate, isobornyl (meth) acrylate, and other (meth) acrylic acid cyclic alkyl esters;
시클로헥실아크릴레이트, 2-메틸시클로헥실아크릴레이트, 트리시클로[5.2.1.02,6]데칸-8-일아크릴레이트 (당해 기술 분야에서 관용명으로서 디시클로펜타닐아크릴레이트라고 불린다), 디시클로펜타옥시에틸아크릴레이트, 이소보로닐아크릴레이트 등의 아크릴산 고리형 알킬에스테르류 ; Cyclohexyl acrylate, 2-methylcyclohexyl acrylate, tricyclo [5.2.1.0 2,6 ] decan-8-yl acrylate (referred to in the art as dicyclopentanyl acrylate), dicyclopentoxy Acrylic acid cyclic alkyl esters such as ethyl acrylate and isobornyl acrylate;
페닐(메트)아크릴레이트, 벤질(메트)아크릴레이트 등의 (메트)아크릴산아릴 에스테르류 ; (Meth) acrylic acid aryl esters such as phenyl (meth) acrylate and benzyl (meth) acrylate;
페닐아크릴레이트, 벤질아크릴레이트 등의 아크릴산아릴에스테르류 ; 말레산디에틸, 푸마르산디에틸, 이타콘산디에틸 등의 디카르복실산디에스테르 ; Aryl acrylates such as phenyl acrylate and benzyl acrylate; Dicarboxylic acid diesters such as diethyl maleate, diethyl fumarate, and diethyl itaconate;
2-히드록시에틸(메트)아크릴레이트, 2-히드록시프로필(메트)아크릴레이트 등의 히드록시알킬에스테르류 ; Hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylate and 2-hydroxypropyl (meth) acrylate;
비시클로[2.2.1]헵토-2-엔, 5-메틸비시클로[2.2.1]헵토-2-엔, 5-에틸비시클로[2.2.1]헵토-2-엔, 5-히드록시비시클로[2.2.1]헵토-2-엔, 5-카르복시비시클 로[2.2.1]헵토-2-엔, 5-히드록시메틸비시클로[2.2.1]헵토-2-엔, 5-(2'-히드록시에틸)비시클로[2.2.1]헵토-2-엔, 5-메톡시비시클로[2.2.1]헵토-2-엔, 5-에톡시비시클로[2.2.1]헵토-2-엔, 5,6-디히드록시비시클로[2.2.1]헵토-2-엔, 5,6-디카르복시비시클로[2.2.1]헵토-2-엔, 5,6-디(히드록시메틸)비시클로[2.2.1]헵토-2-엔, 5,6-디(2'-히드록시에틸)비시클로[2.2.1]헵토-2-엔, 5,6-디메톡시비시클로[2.2.1]헵토-2-엔, 5,6-디에톡시비시클로[2.2.1]헵토-2-엔, 5-히드록시-5-메틸비시클로[2.2.1]헵토-2-엔, 5-히드록시-5-에틸비시클로[2.2.1]헵토-2-엔, 5-카르복시-5-메틸비시클로[2.2.1]헵토-2-엔, 5-카르복시-5-에틸비시클로[2.2.1]헵토-2-엔, 5-히드록시메틸-5-메틸비시클로[2.2.1]헵토-2-엔, 5-카르복시-6-메틸비시클로[2.2.1]헵토-2-엔, 5-카르복시-6-에틸비시클로[2.2.1]헵토-2-엔, 5,6-디카르복시비시클로[2.2.1]헵토-2-엔 무수물 (하이믹산 무수물), 5-tert-부톡시카르보닐비시클로[2.2.1]헵토-2-엔, 5-시클로헥실옥시카르보닐비시클로[2.2.1]헵토-2-엔, 5-페녹시카르보닐비시클로[2.2.1]헵토-2-엔, 5,6-디(tert-부톡시카르보닐)비시클로[2.2.1]헵토-2-엔, 5,6-디(시클로헥실옥시카르보닐)비시클로[2.2.1]헵토-2-엔 등의 비시클로 불포화 화합물류 ; 2-ene, 5-ethylbicyclo [2.2.1] hept-2-ene, 2.2.1] hept-2-ene, 5-carboxybicyclo [2.2.1] hepto-2-ene, 5-hydroxymethylbicyclo [2.2.1] 2.2.1] hepto-2-ene, 5-ethoxybicyclo [2.2.1] 2,6-dihydroxybicyclo [2.2.1] hept-2-ene, 5,6-dicarboxybicyclo [2.2.1] ) Bicyclo [2.2.1] hept-2-ene, 5,6-di (2'-hydroxyethyl) bicyclo [2.2.1] hept- 2,1] hept-2-ene, 5,6-diethoxybicyclo [2.2.1] hepto-2- 2-ene, 5-carboxy-5-ethylbicyclo [2.2.1] hept- 2.2.1] hepto-2-ene, 5-hydroxymethyl-5-methylbicyclo [ 2.2.1] hepto-2-ene, 5-carboxy-6-ethylbicyclo [2.2.1] 5,6-dicarboxybicyclo [2.2.1] hepto-2-ene anhydride (hydamic anhydride), 5-tert-butoxycarbonylbicyclo [2.2.1] hept- 2,6-di (tert-butoxycarbonyl) bicyclo [2.2.1] hept-2-ene, 5-phenoxycarbonylbicyclo [2.2.1] 2.2.1] hept-2-ene, and 5,6-di (cyclohexyloxycarbonyl) bicyclo [2.2.1] hept-2-ene;
N-페닐말레이미드, N-시클로헥실말레이미드, N-벤질말레이미드, N-숙신이미딜-3-말레이미드벤조에이트, N-숙신이미딜-4-말레이미드부틸레이트, N-숙신이미딜6-말레이미드카프로에이트, N-숙신이미딜-3-말레이미드프로피오네이트, N-(9-아크리디닐)말레이미드 등의 디카르보닐이미드 유도체류 ; N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, N-succinimidyl-3-maleimide benzoate, N-succinimidyl-4-maleimide butyrate, N- Dicarbonylimide derivatives such as 6-maleimidocaproate, N-succinimidyl-3-maleimidopropionate and N- (9-acridinyl) maleimide;
스티렌, -메틸스티렌, m-메틸스티렌, p-메틸스티렌, 비닐톨루엔, p-메톡시 스티렌, 아크릴로니트릴, 메타크릴로니트릴, 염화비닐, 염화비닐리덴, 아크릴아미드, 메타크릴아미드, 아세트산비닐, 1,3-부타디엔, 이소프렌, 2,3-디메틸-1,3-부타디엔 등을 들 수 있다. Styrene, Methylstyrene, m-methylstyrene, p-methylstyrene, vinyltoluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, vinylidene chloride, acrylamide, methacrylamide, vinyl acetate, , 3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene and the like.
이들 중, 스티렌, N-페닐말레이미드, N-시클로헥실말레이미드, N-벤질말레이미드, 비시클로[2.2.1]헵토-2-엔 등이, 공중합 반응성 및 알칼리 용해성의 면에서 바람직하다. Of these, styrene, N-phenylmaleimide, N-cyclohexylmaleimide, N-benzylmaleimide, and bicyclo [2.2.1] hept-2-ene are preferable in terms of copolymerization reactivity and alkali solubility.
(a) 및 (c) 는 단독으로 또는 조합하여 사용된다. (a) and (c) are used alone or in combination.
또한 본 명세서에서 (메트)아크릴레이트란, 아크릴레이트 및/또는 메타크릴레이트를 의미한다. Also, in the present specification, (meth) acrylate means acrylate and / or methacrylate.
(a) 및 (c) 를 공중합시켜 얻어지는 공중합체에 있어서는, 각각으로부터 유도되는 구성 성분의 비율이 상기 공중합체를 구성하는 구성 성분의 합계 몰수를 100 몰% 로 했을 때에 몰분율로 이하의 범위에 있는 것이 바람직하다. in the copolymer obtained by copolymerizing (a) and (c), the ratio of the constituent component derived from each other is in the range of the molar fraction in the range of the molar ratio of the constituent components constituting the copolymer to 100 mol% .
(a) 로부터 유도되는 구성 단위 ; 2 ∼ 40 몰% (a); 2 to 40 mol%
(c) 로부터 유도되는 구성 단위 ; 60 ∼ 98 몰%(c); 60 to 98 mol%
또, 상기 구성 성분의 비율이 이하의 범위이면 보다 바람직하다. It is more preferable that the ratio of the constituent components is within the following range.
(a) 로부터 유도되는 구성 단위 ; 5 ∼ 35 몰%(a); 5 to 35 mol%
(c) 로부터 유도되는 구성 단위 ; 65 ∼ 95 몰%(c); 65 to 95 mol%
상기 구성 비율이 상기 범위에 있으면, 보존 안정성, 현상성, 내용제성이 양호해지는 경향이 있다. When the composition ratio is in the above range, storage stability, developability and solvent resistance tends to be good.
상기 알칼리 용해성을 갖는 수지 (A1) 는 예를 들어, 문헌 「고분자 합성의 실험법」 (오오츠 타카유키 저 발행소 (주) 화학동인 제 1 판 제 1 쇄 1972년 3월 1일 발행) 에 기재된 방법 및 당해 문헌에 기재된 인용 문헌 등을 참고로 하여 제조할 수 있다. The above-mentioned alkali-soluble resin (A1) can be produced by, for example, the method described in "Experimental Method of Polymer Synthesis" (published by Otsu Takayuki Co., Ltd., 1st Edition, First Edition, March 1, 1972, Quot ;, references cited in the document, and the like.
구체적으로는, 공중합체를 구성하는 단위 (a) 및 (c) 의 소정량, 중합 개시제 및 용제 등을 반응 용기 내에 주입하고 질소에 의해 산소를 치환함으로써, 산소 비존재 하에서 교반, 가열, 보온하는 방법이 예시된다. 또한, 여기에서 사용되는 중합 개시제 및 용제 등은 특별히 한정되지 않고, 당해 분야에서 통상 사용되고 있는 것 모두를 사용할 수 있다. 예를 들어, 후술하는 중합 개시제 및 용제 등을 사용할 수 있다. Specifically, a predetermined amount of the units (a) and (c) constituting the copolymer, a polymerization initiator and a solvent are injected into a reaction vessel, and oxygen is substituted by nitrogen, thereby stirring, heating and keeping the mixture in the presence of oxygen A method is exemplified. The polymerization initiator and solvent used herein are not particularly limited, and any of those conventionally used in the art can be used. For example, a polymerization initiator and a solvent to be described later may be used.
또한, 얻어진 공중합체는 반응 후의 용액을 그대로 사용해도 되고, 농축 또는 희석시킨 용액을 사용해도 되며, 재침전 등의 방법에 의해 고체 (분체) 로서 취출한 것을 사용해도 된다. 특히, 이 중합시에 용제로서, 후술하는 용제 (D) 를 사용함으로써 반응 후의 용액을 그대로 사용할 수 있고, 제조 공정을 간략화할 수 있다 (이하, 수지 (A2) 에 있어서도 마찬가지임). The resulting copolymer may be a solution after the reaction as it is, or a concentrated or diluted solution may be used, or it may be taken out as a solid (powder) by a method such as re-precipitation. In particular, by using a solvent (D) described later as a solvent in the polymerization, the solution after the reaction can be used as it is, and the production process can be simplified (the same applies to the resin (A2)).
상기 알칼리 용해성을 갖는 수지 (A1) 의 폴리스티렌 환산의 중량 평균 분자량은 바람직하게는 3,000 ∼ 100,000, 보다 바람직하게는 5,000 ∼ 50,000 이다. 알칼리 용해성을 갖는 수지 (A1) 의 중량 평균 분자량이 상기 범위에 있으면, 도포성이 양호해지는 경향이 있고, 또 현상시에 막 감소가 잘 발생하지 않으며, 또한 현상시에 비화소 부분의 빠짐성이 양호한 경향이 있기 때문에 바람직하다. The weight average molecular weight of the resin (A1) having alkali solubility in terms of polystyrene is preferably 3,000 to 100,000, more preferably 5,000 to 50,000. When the weight average molecular weight of the resin (A1) having alkali solubility is within the above range, the coating property tends to be good, the film is not easily reduced at the time of development, and the dropout of the non- It is preferable because it tends to be good.
알칼리 용해성을 갖는 수지 (A1) 의 분자량 분포 [중량 평균 분자량 (Mw) / 수평균 분자량 (Mn)] 은 바람직하게는 1.1 ∼ 6.0 이며, 보다 바람직하게는 1.2 ∼ 4.0 이다. 분자량 분포가 상기 범위에 있으면, 현상성이 우수한 경향이 있기 때문에 바람직하다. The molecular weight distribution (weight average molecular weight (Mw) / number average molecular weight (Mn)) of the alkali-soluble resin (A1) is preferably 1.1 to 6.0, and more preferably 1.2 to 4.0. When the molecular weight distribution is within the above range, the developing property tends to be excellent.
본 발명의 감광성 수지 조성물에 사용할 수 있는 알칼리 용해성을 갖는 수지 (A1) 의 함유량은 감광성 수지 조성물 중의 고형분에 대하여 질량 분율로 바람직하게는 5 ∼ 90 질량%, 보다 바람직하게는 10 ∼ 70 질량% 이다. 알칼리 용해성을 갖는 수지 (A1) 의 함유량이 상기 범위에 있으면, 현상액에 대한 용해성이 충분하고, 비화소 부분의 기판 상에 현상 잔류물이 잘 발생하지 않고, 또 현상시에 노광부의 화소 부분의 막 감소가 잘 발생하지 않으며, 비노광 부분의 빠짐성이 양호한 경향이 있기 때문에 바람직하다. The content of the alkali-soluble resin (A1) which can be used in the photosensitive resin composition of the present invention is preferably 5 to 90% by mass, more preferably 10 to 70% by mass, based on the solid content in the photosensitive resin composition . When the content of the resin (A1) having alkali solubility is in the above range, solubility in a developing solution is sufficient, development residues do not easily occur on the substrate of the non-pixel portion, It is preferable that the amount of the unexposed portion tends to be satisfactory.
알칼리 용해성 그리고 광 및 열의 적어도 일방의 작용에 의해 반응성을 갖는 수지 (A2) 로는,As the resin (A2) having alkali solubility and reactivity by the action of at least one of light and heat,
수지 (A2-1) : (a) 와, (c) 와, 탄소수 2 ∼ 4 의 고리형 에테르 구조를 갖는 화합물 (b) (이하 「(b)」 라고 하는 경우가 있다) 의 공중합체, (A2-1): Copolymers of (a) and (c) and a compound (b) having a cyclic ether structure having 2 to 4 carbon atoms (hereinafter may be referred to as "(b)")
수지 (A2-2) : (a) 와, (c) 의 공중합체에 (b) 를 반응시켜 얻어지는 공중합체,Resin (A2-2): A copolymer obtained by reacting the copolymer (a) and (c) with (b)
수지 (A2-3) : (a) 와 (b) 의 공중합체 등을 들 수 있다. Resin (A2-3): Copolymers of (a) and (b).
(b) 는 탄소수 2 ∼ 4 의 고리형 에테르 구조를 갖는 화합물로서, 에폭시기, 옥세타닐기 및 테트라히드로푸릴기로 이루어지는 군에서 선택되는 적어도 1 종의 기를 갖는 중합성 화합물을 말한다. (b) 는 탄소수 2 ∼ 4 의 고리형 에테르 구조를 갖고, 또한 에틸렌성 탄소-탄소 불포화 결합을 갖는 화합물인 것이 바람직하고, 탄소수 2 ∼ 4 의 고리형 에테르 구조를 갖고, 또한 아크릴로일기 또는 메타크릴로일기를 갖는 화합물인 것이 보다 바람직하다. (b) is a compound having a cyclic ether structure having 2 to 4 carbon atoms, and refers to a polymerizable compound having at least one kind of group selected from the group consisting of an epoxy group, an oxetanyl group and a tetrahydrofuryl group. (b) is preferably a compound having a cyclic ether structure of 2 to 4 carbon atoms and also having an ethylenic carbon-carbon unsaturated bond, having a cyclic ether structure of 2 to 4 carbon atoms, and having an acryloyl group or a meta And more preferably a compound having a fluoroalkyl group.
(b) 로는 예를 들어, 에폭시기를 갖는 단량체 (b1) (이하 「(b1)」이라고 하는 경우가 있다), 옥세타닐기를 갖는 단량체 (b2) (이하 「(b2)」 라고 하는 경우가 있다), 테트라히드로푸릴기를 갖는 단량체 등을 들 수 있다. (b1) having an epoxy group (hereinafter sometimes referred to as "(b1)") and an oxetanyl group-containing monomer (b2) (hereinafter referred to as "(b2)" ), A monomer having a tetrahydrofuryl group, and the like.
(b1) 이란, 예를 들어, 지방족 에폭시기 및 지환식 에폭시기로 이루어지는 군에서 선택되는 적어도 1 종의 기를 갖는 중합성 화합물을 말한다. 당해 에폭시기를 갖는 단량체는 지방족 에폭시기 및 지환식 에폭시기로 이루어지는 군에서 선택되는 적어도 1 종의 기를 갖고, 또한 에틸렌성 탄소-탄소 불포화 결합을 갖는 화합물인 것이 바람직하고, 지방족 에폭시기 및 지환식 에폭시기로 이루어지는 군에서 선택되는 적어도 1 종의 구조를 가지며, 또한 아크릴로일기 또는 메타크릴로일기를 갖는 화합물인 것이 보다 바람직하다. (b1) refers to, for example, a polymerizable compound having at least one group selected from the group consisting of an aliphatic epoxy group and an alicyclic epoxy group. The monomer having an epoxy group is preferably a compound having at least one kind of group selected from the group consisting of an aliphatic epoxy group and an alicyclic epoxy group and also having an ethylenic carbon-carbon unsaturated bond. The monomer having an aliphatic epoxy group and an alicyclic epoxy group , And more preferably a compound having an acryloyl group or a methacryloyl group.
여기에서 지방족 에폭시기란, 단고리의 옥시라닐기를 말하고, 지환식 에폭시기란, 지환식 탄화수소의 고리와 옥시란 고리가 축합된 구조를 갖는 기를 말한다.Here, the aliphatic epoxy group means a monocyclic oxyanyl group, and the alicyclic epoxy group means a group having a structure in which a ring of an alicyclic hydrocarbon and an oxirane ring are condensed.
(A2) 에 있어서의 (b1) 중, 지방족 에폭시기를 갖고, 또한 에틸렌성 탄소-탄소 불포화 결합을 갖는 화합물로는 구체적으로는, 글리시딜(메트)아크릴레이트, β-메틸글리시딜(메트)아크릴레이트, β-에틸글리시딜(메트)아크릴레이트, 글리시딜비닐에테르, 일본 공개특허공보 평7-248625호에 기재된 하기 식으로 나타내는 화합물 등을 들 수 있다. (B1) in the general formula (A2) include compounds having an aliphatic epoxy group and having an ethylenic carbon-carbon unsaturated bond such as glycidyl (meth) acrylate,? -Methyl glycidyl Acrylate,? -Ethylglycidyl (meth) acrylate, glycidyl vinyl ether, and compounds represented by the following formulas described in Japanese Patent Application Laid-Open No. 7-248625.
(식 중, R11 ∼ R13 은 각각 독립적으로 수소 원자 또는 탄소 원자수 1 ∼ 10 의 알킬기이며, m 은 1 ∼ 5 의 정수이다). (Wherein R 11 to R 13 are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and m is an integer of 1 to 5).
상기 식으로 나타내는 화합물로는 예를 들어, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르, -메틸-o-비닐벤질글리시딜에테르, -메틸-m-비닐벤질글리시딜에테르, -메틸-p-비닐벤질글리시딜에테르, 2,3-디글리시딜옥시메틸스티렌, 2,4-디글리시딜옥시메틸스티렌, 2,5-디글리시딜옥시메틸스티렌, 2,6-디글리시딜옥시메틸스티렌, 2,3,4-트리글리시딜옥시메틸스티렌, 2,3,5-트리글리시딜옥시메틸스티렌, 2,3,6-트리글리시딜옥시메틸스티렌, 3,4,5-트리글리시딜옥시메틸스티렌, 2,4,6-트리글리시딜옥시메틸스티렌 등을 들 수 있다. Examples of the compound represented by the above formula include o-vinylbenzyl glycidyl ether, m-vinyl benzyl glycidyl ether, p-vinyl benzyl glycidyl ether, Methyl-o-vinylbenzyl glycidyl ether, Methyl-m-vinylbenzyl glycidyl ether, -Methyl-p-vinylbenzyl glycidyl ether, 2,3-diglycidyloxymethylstyrene, 2,4-diglycidyloxymethylstyrene, 2,5-diglycidyloxymethylstyrene, 2, Diglycidyloxymethylstyrene, 2,3,4-triglycidyloxymethylstyrene, 2,3,5-triglycidyloxymethylstyrene, 2,3,6-triglycidyloxymethylstyrene, 3, , 4,5-triglycidyloxymethylstyrene, 2,4,6-triglycidyloxymethylstyrene, and the like.
(A2) 에 있어서의 (b1) 중, 지환식 에폭시기를 갖고, 또한 에틸렌성 탄소-탄소 불포화 결합을 갖는 화합물로는, 비닐시클로헥센모노옥사이드1,2-에폭시-4-비닐시클로헥산 (예를 들어, 셀록사이드 2000 ; 다이셀 화학 공업 (주) 제조), 3,4-에폭시시클로헥실메틸아크릴레이트 (예를 들어, 사이클로마 A 400 ; 다이셀 화학 공업 (주) 제조), 3,4-에폭시시클로헥실메틸메타아크릴레이트 (예를 들어, 사이클로마 M 100 ; 다이셀 화학 공업 (주) 제조) 또는, 식 (I) 로 나타내는 화합물 및 식 (Ⅱ) 로 나타내는 화합물로 이루어지는 군에서 선택되는 적어도 1 종의 화합물을 들 수 있다. Examples of the compound having an alicyclic epoxy group and having an ethylenic carbon-carbon unsaturated bond in the component (A2) include vinylcyclohexene monoxide 1,2-epoxy-4-vinylcyclohexane (for example, (Manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl acrylate (for example, Cyclam A 400, manufactured by Daicel Chemical Industries, Ltd.), 3,4- At least one compound selected from the group consisting of epoxy cyclohexylmethyl methacrylate (for example, Cyclam M 100, manufactured by Daicel Chemical Industries, Ltd.) or a compound represented by formula (I) and a compound represented by formula (II) And one kind of compound.
[식 (Ⅰ) 및 식 (Ⅱ) 에 있어서, R 및 R' 는 각각 독립적으로 수소 원자 또는 히드록시기로 치환되어 있어도 되는 탄소수 1 ∼ 4 의 알킬기를 나타낸다.[In the formulas (I) and (II), R and R 'each independently represent an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydrogen atom or a hydroxyl group.
X 및 X' 는 각각 독립적으로 단결합, C1∼6 알킬렌기, 옥시-C1∼6 알킬렌기, 티오-C1∼6 알킬렌기, 아미노-C1∼6 알킬렌기, C1∼6 알킬렌기-옥시, C1∼6 알킬렌기-티오, 또는 C1∼6 알킬렌기-아미노기를 나타낸다]X and X 'represents a single bond, each independently, C 1~6 alkylene group, an oxy -C 1~6 alkylene group, thio -C 1~6 alkylene group, amino -C 1~6 alkylene group, C 1~6 alkyl Oxy, C 1-6 alkylene group-thio, or C 1-6 alkylene-amino group,
알킬기로는 구체적으로는, 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, sec-부틸기, tert-부틸기 등을 들 수 있다. Examples of the alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl and tert-butyl.
히드록시알킬기로는, 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기, 1-히드록시-n-프로필기, 2-히드록시-n-프로필기, 3-히드록시-n-프로필기, 1-히드록시-이소프로필기, 2-히드록시-이소프로필기, 1-히드록시-n-부틸기, 2-히드록시-n-부틸기, 3-히드록시-n-부틸기, 4-히드록시-n-부틸기 등을 들 수 있다. Examples of the hydroxyalkyl group include a hydroxymethyl group, a 1-hydroxyethyl group, a 2-hydroxyethyl group, a 1-hydroxy-n-propyl group, a 2-hydroxy- Butyl group, a 2-hydroxy-n-butyl group, a 3-hydroxy-n-butyl group, A 4-hydroxy-n-butyl group and the like.
치환기 R 및 R' 로는, 바람직하게는 수소 원자, 메틸기, 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기를 들 수 있고, 보다 바람직하게는 수소 원자, 메틸기를 들 수 있다. The substituents R and R 'are preferably a hydrogen atom, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group, or a 2-hydroxyethyl group, more preferably a hydrogen atom or a methyl group.
알킬렌기로는, 메틸렌기, 에틸렌기, 프로필렌기 등을 들 수 있다. Examples of the alkylene group include a methylene group, an ethylene group and a propylene group.
옥시알킬렌기로는, 옥시메틸렌기, 옥시에틸렌기, 옥시프로필렌기 등을 들 수 있다. Examples of oxyalkylene groups include oxymethylene group, oxyethylene group, and oxypropylene group.
알킬렌옥시기로는, 메틸렌옥시기, 에틸렌옥시기, 프로필렌옥시기 등을 들 수 있다. Examples of the alkyleneoxy group include a methyleneoxy group, an ethyleneoxy group and a propyleneoxy group.
티오알킬렌기로는, 티오메틸렌기, 티오에틸렌기, 티오프로필렌기 등을 들 수 있다. Examples of the thioalkylene group include a thiomethylene group, a thioethylene group, and a thiopropylene group.
알킬렌티오기로는, 메틸렌티오기, 에틸렌티오기, 프로필렌티오기 등을 들 수 있다. Examples of the alkylene thio group include a methylene thio group, an ethylene tie group and a propylene thio group.
아미노알킬렌기로는, 아미노메틸렌기, 아미노에틸렌기, 아미노프로필렌기 등을 들 수 있다. Examples of the aminoalkylene group include an aminomethylene group, an aminoethylene group, and an aminopropylene group.
알킬렌아미노기로는, 메틸렌아미노기, 에틸렌아미노기, 프로필렌아미노기 등을 들 수 있다. Examples of the alkyleneamino group include a methyleneamino group, an ethyleneamino group and a propyleneamino group.
치환기 X 및 X' 로는, 바람직하게는 단결합, 메틸렌기, 에틸렌기, 옥시메틸렌기, 옥시에틸렌기 를 들 수 있고, 보다 바람직하게는 단결합, 옥시에틸렌기를 들 수 있다. The substituents X and X 'are preferably a single bond, a methylene group, an ethylene group, an oxymethylene group or an oxyethylene group, more preferably a single bond or an oxyethylene group.
식 (I) 로 나타내는 화합물로는, 식 (I-1) ∼ 식 (I-15) 로 나타내는 화합물 등을 들 수 있다. 바람직하게는 식 (I-1), 식 (I-3), 식 (I-5), 식 (I-7), 식 (I-9), 식 (I-11) ∼ 식 (I-15) 를 들 수 있다. 보다 바람직하게는 식 (I-1), 식 (I-7), 식 (I-9), 식 (I-15) 를 들 수 있다. Examples of the compound represented by formula (I) include compounds represented by formulas (I-1) to (I-15). (I-1), (I-3), (I-5), (I-7) ). (I-1), (I-7), (I-9) and (I-15) are more preferable.
식 (Ⅱ) 로 나타내는 화합물로는, 식 (Ⅱ-1) ∼ 식 (Ⅱ-15) 로 나타내는 화합물 등을 들 수 있다. 바람직하게는 식 (Ⅱ-1), 식 (Ⅱ-3), 식 (Ⅱ-5), 식 (Ⅱ-7), 식 (Ⅱ-9), 식 (Ⅱ-11) ∼ 식 (Ⅱ-15) 를 들 수 있다. 보다 바람직하게는 식 (Ⅱ-1), 식 (Ⅱ-7), 식 (Ⅱ-9), 식 (Ⅱ-15) 를 들 수 있다. Examples of the compound represented by the formula (II) include compounds represented by the formulas (II-1) to (II-15). (II-1), Formula (II-3), Formula (II-5), Formula (II-7), Formula ). (II-1), (II-7), (II-9) and (II-15).
식 (I) 로 나타내는 화합물 및 식 (Ⅱ) 로 나타내는 화합물로 이루어지는 군에서 선택되는 적어도 1 종의 화합물은 각각 단독으로 사용할 수 있다. 또, 그들은 임의의 비율로 혼합할 수 있다. 혼합하는 경우, 그 혼합 비율은 몰 비로, 바람직하게는 식 (I) : 식 (Ⅱ) 에서, 5 : 95 ∼ 95 : 5, 보다 바람직하게는 10 : 90 ∼ 90 : 10, 더욱 바람직하게는 20 : 80 ∼ 80 : 20 이다. At least one kind of compound selected from the group consisting of the compound represented by formula (I) and the compound represented by formula (II) may be used alone. In addition, they can be mixed at an arbitrary ratio. In the case of mixing, the mixing ratio thereof is preferably from 5:95 to 95: 5, more preferably from 10:90 to 90:10, and even more preferably from 20:10 to 90:10 in the formula (I): formula (II) : 80 to 80:20.
공중합체 (A2-1) 및 (A2-2) 에 있어서의 (b2) 의 옥세타닐기를 갖고, 또한 불포화 결합을 갖는 화합물로는, 예를 들어, 3-메틸-3-메타크릴옥시메틸옥세탄, 3-메틸-3-아크릴옥시메틸옥세탄, 3-에틸-3-메타크릴옥시메틸옥세탄, 3-에틸-3-아크릴옥시메틸옥세탄, 3-메틸-3-메타크릴옥시에틸옥세탄, 3-메틸-3-아크릴옥시에틸옥세탄, 3-에틸-3-메타크릴옥시에틸옥세탄, 3-에틸-3-아크릴옥시에틸옥세탄 등을 들 수 있다. Examples of the compound having an oxetanyl group (b2) in the copolymers (A2-1) and (A2-2) and having an unsaturated bond include, for example, 3-methyl-3-methacryloxymethylox Cetyl, 3-methyl-3-acryloxymethyloxetane, 3-ethyl-3-methacryloxymethyloxetane, 3-ethyl-3-acryloxymethyloxetane, Cetane, 3-methyl-3-acryloxyethyl oxetane, 3-ethyl-3-methacryloxyethyl oxetane and 3-ethyl-3-acryloxyethyl oxetane.
공중합체 (A2-1) 에 있어서, 각각으로부터 유도되는 구성 성분의 비율이 공중합체 (A2-1) 을 구성하는 구성 성분의 합계 몰수에 대하여 몰분율로 이하의 범위에 있는 것이 바람직하다. In the copolymer (A2-1), it is preferable that the ratio of the component derived from each component is in the following range in terms of the mole ratio with respect to the total number of moles of the constituent components constituting the copolymer (A2-1).
(a) 로부터 유도되는 구성 단위 ; 2 ∼ 40 몰% (a); 2 to 40 mol%
(c) 로부터 유도되는 구성 단위 ; 1 ∼ 65 몰% (c); 1 to 65 mol%
(b1) 또는 (b2) 로부터 유도되는 구성 단위 ; 2 ∼ 95 몰% (b1) or (b2); 2 to 95 mol%
또, 상기 구성 성분의 비율이 이하의 범위이면 보다 바람직하다. It is more preferable that the ratio of the constituent components is within the following range.
(a) 로부터 유도되는 구성 단위 ; 5 ∼ 35 몰% (a); 5 to 35 mol%
(c) 로부터 유도되는 구성 단위 ; 1 ∼ 60 몰% (c); 1 to 60 mol%
(b1) 또는 (b2) 로부터 유도되는 구성 단위 ; 5 ∼ 80 몰%(b1) or (b2); 5 to 80 mol%
상기 구성 비율이 상기 범위에 있으면, 보존 안정성, 현상성, 내용제성, 내열성 및 기계 강도가 양호해지는 경향이 있다. When the composition ratio is in the above range, storage stability, developability, solvent resistance, heat resistance and mechanical strength tend to be improved.
상기 알칼리 용해성을 갖는 수지 (A2-1) 은 예를 들어, 문헌 「고분자 합성의 실험법」 (오오츠 타카유키 저 발행소 (주) 화학동인 제 1 판 제 1 쇄 1972년 3월 1일 발행) 에 기재된 방법 및 당해 문헌에 기재된 인용 문헌 등을 참고로 하여 제조할 수 있다.The above-mentioned alkali-soluble resin (A2-1) can be produced, for example, by a method described in "Experimental Method of Polymer Synthesis" (published by Otsu Takayuki Co., Ltd., And reference documents cited therein, and the like.
구체적으로는, 공중합체를 구성하는 단위 (a), (c), 및 (b1) 또는 (b2) 를 유도하는 화합물의 소정량, 중합 개시제 및 용제를 반응 용기 내에 주입하고 질소에 의해 산소를 치환함으로써, 산소 비존재 하에서 교반, 가열, 보온하는 방법을 들 수 있다. Specifically, a predetermined amount of a compound that derives units (a), (c), and (b1) or (b2) constituting the copolymer, a polymerization initiator and a solvent are injected into a reaction vessel, , And stirring, heating, and keeping the mixture in the presence of oxygen.
수지 (A2-2) 는 예를 들어, 2 단계의 공정을 거쳐 제조할 수 있다. 이 경우에도, 상기 서술한 문헌 「고분자 합성의 실험법」 (오오츠 타카유키 저 발행소 (주) 화학동인 제 1 판 제 1 쇄 1972년 3월 1일 발행) 에 기재된 방법, 일본 공개특허공보 2001-89533호에 기재된 방법 등을 참고로 하여 제조할 수 있다. The resin (A2-2) can be produced, for example, by a two-step process. Also in this case, the method described in the aforementioned " Experimental Method of Polymer Synthesis " (issued by Otsu Takayuki Co., Ltd., 1st Edition, First Edition, March 1, 1972), JP-A 2001-89533 And the like.
먼저, 제 1 단계로서, 상기 서술한 알칼리 용해성을 갖는 수지 (A1) 의 제조 방법과 동일하게 하여, 공중합체 (즉, 알칼리 가용성을 갖는 수지) 를 얻는다. First, as a first step, a copolymer (i.e., a resin having alkali solubility) is obtained in the same manner as in the above-described method for producing an alkali-soluble resin (A1).
이 경우, 상기와 마찬가지로 여러 가지 형태로 계속 사용할 수 있다. 또, 상기와 동일한 폴리스티렌 환산의 중량 평균 분자량 및 분자량 분포 [중량 평균 분자량 (Mw) / 수평균 분자량 (Mn)] 으로 하는 것이 적합하다. In this case, it can be continuously used in various forms as described above. The weight average molecular weight and the molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] in terms of polystyrene are suitable.
단, (a) 및 (c) 로부터 각각 유도되는 구성 성분의 비율이 상기 공중합체를 구성하는 구성 성분의 합계 몰수에 대하여 몰분율로 이하의 범위에 있는 것이 바람직하다. However, it is preferable that the proportion of the constituent components derived from (a) and (c), respectively, falls within the following range in terms of the molar ratio with respect to the total number of moles of the constituent components constituting the copolymer.
(a) 로부터 유도되는 구성 단위 ; 5 ∼ 50 몰% (a); 5 to 50 mol%
(c) 로부터 유도되는 구성 단위 ; 50 ∼ 95 몰% (c); 50 to 95 mol%
또, 상기 구성 성분의 비율이 이하의 범위이면 보다 바람직하다. It is more preferable that the ratio of the constituent components is within the following range.
(a) 로부터 유도되는 구성 단위 ; 10 ∼ 45 몰%(a); 10 to 45 mol%
(c) 로부터 유도되는 구성 단위 ; 55 ∼ 90 몰%(c); 55 to 90 mol%
다음으로 제 2 단계로서, 얻어진 공중합체에서 유래하는 (a) 의 카르복실산 및 카르복실산 무수물의 일부를, 전술한 (b1) 또는 (b2) 에서 유래하는 에폭시기 또는 옥세타닐기와 반응시킨다. Next, as a second step, a part of the carboxylic acid and carboxylic acid anhydride (a) derived from the obtained copolymer is reacted with an epoxy group or an oxetanyl group derived from the above-mentioned (b1) or (b2).
구체적으로는, 상기에 이어서 플라스크 내 분위기를 질소에서 공기로 치환하고, 구성 성분 (a) 의 몰수에 대하여 5 ∼ 80 몰% 의 구성 성분 (b1) 또는 (b2), 카르복시기와 에폭시기 또는 옥세타닐기의 반응 촉매로서, 예를 들어 트리스디메틸아미노메틸페놀을 모노머 (a) ∼ (c) 의 합계량에 대하여 질량 기준으로 0.001 ∼ 5 % 및 중합 금지제로서, 예를 들어 하이드로퀴논을 모노머 (a) ∼ (c) 의 합계량에 대하여 질량 기준으로 0.001 ∼ 5 % 를 플라스크 내에 넣고, 60 ∼ 130 ℃ 에서 1 ∼ 10 시간 반응을 계속한다. 이로써, 수지 (A2-2) 를 얻을 수 있다. 또한, 중합 조건과 마찬가지로, 제조 설비나 중합에 의한 발열량 등을 고려하여 주입 방법이나 반응 온도를 적절히 조정할 수 있다. Concretely, the atmosphere in the flask is replaced with air in the flask, and then air is introduced into the flask so that the amount of the component (b1) or (b2) is 5 to 80 mol% based on the number of moles of the component (a), the number of the carboxyl group and the epoxy group or the oxetanyl group For example, 0.001 to 5% by mass of trisdimethylaminomethylphenol based on the total amount of the monomers (a) to (c), and a polymerization inhibitor such as hydroquinone as monomers (a) to (c) is added to the flask in an amount of 0.001 to 5% by mass based on the total amount, and the reaction is continued at 60 to 130 ° C for 1 to 10 hours. Thus, the resin (A2-2) can be obtained. In addition, as with the polymerization conditions, the injection method and the reaction temperature can be appropriately adjusted in consideration of the amount of heat generated by the production equipment or polymerization.
또, 이 경우, (b1) 또는 (b2) 의 몰수는 (a) 의 몰수에 대하여 10 ∼ 75 몰% 로 하는 것이 바람직하고, 보다 바람직하게는 15 ∼ 70 몰% 이다. 이 범위로 함으로써, 보존 안정성, 현상성, 내용제성, 내열성, 기계 강도 및 감도의 밸런스가 양호해지는 경향이 있다. In this case, the number of moles of (b1) or (b2) is preferably 10 to 75 mol%, and more preferably 15 to 70 mol% based on the number of moles of (a). When the content is in this range, the balance between storage stability, developability, solvent resistance, heat resistance, mechanical strength and sensitivity tends to be good.
수지 (A2-3) 에 있어서, 각각으로부터 유도되는 구성 성분의 비율이 알칼리 가용성 수지 (A2-3) 을 구성하는 구성 성분의 합계 몰수에 대하여 몰분율로 이하의 범위에 있는 것이 바람직하다. In the resin (A2-3), it is preferable that the ratio of the constituent component derived from each of the resins (A2-3) falls within the following range in terms of the molar ratio with respect to the total number of moles of constituent components constituting the alkali-soluble resin (A2-3).
(a) 로부터 유도되는 구성 단위 ; 5 ∼ 95 몰%(a); 5 to 95 mol%
(b1) 또는 (b2) 로부터 유도되는 구성 단위 ; 5 ∼ 95 몰% (b1) or (b2); 5 to 95 mol%
또, 상기 구성 성분의 비율이 이하의 범위이면 보다 바람직하다. It is more preferable that the ratio of the constituent components is within the following range.
(a) 로부터 유도되는 구성 단위 ; 10 ∼ 90 몰%(a); 10 to 90 mol%
(b1) 또는 (b2) 로부터 유도되는 구성 단위 ; 10 ∼ 90 몰%(b1) or (b2); 10 to 90 mol%
상기 구성 비율이 상기 범위에 있으면, 보존 안정성, 현상성, 내용제성, 내열성 및 기계 강도가 양호해지는 경향이 있다. When the composition ratio is in the above range, storage stability, developability, solvent resistance, heat resistance and mechanical strength tend to be improved.
수지 (A2-3) 은 예를 들어, 문헌 「고분자 합성의 실험법」 (오오츠 타카유키 저 발행소 (주) 화학동인 제 1 판 제 1 쇄 1972년 3월 1일 발행) 에 기재된 방법 및 당해 문헌에 기재된 인용 문헌 등을 참고로 하여 제조할 수 있다. Resin (A2-3) can be synthesized by, for example, a method described in "Experimental Method of Polymer Synthesis" (published by Otsu Takayuki Co., Ltd., 1st Edition, First Edition, March 1, 1972) Quot ;, and references cited therein.
구체적으로는, 공중합체를 구성하는 단위 (a) 및 (b1) 또는 (b2) 를 유도하는 화합물의 소정량, 중합 개시제 및 용제를 반응 용기 내에 주입하고 질소에 의해 산소를 치환함으로써, 산소 비존재 하에서 교반, 가열, 보온함으로써 중합체가 얻어진다. 또한, 얻어진 공중합체는 반응 후의 용액을 그대로 사용해도 되고, 농축 또는 희석시킨 용액을 사용해도 되며, 재침전 등의 방법으로 고체 (분체) 로서 취출한 것을 사용해도 된다. Specifically, a predetermined amount of a compound which derives units (a) and (b1) or (b2) constituting the copolymer, a polymerization initiator and a solvent are injected into a reaction vessel and oxygen is replaced by nitrogen, Under stirring, heating, and warming, a polymer is obtained. The solution obtained after the reaction may be used as it is, or a concentrated or diluted solution may be used, or it may be taken out as a solid (powder) by re-precipitation or the like.
본 발명의 감광성 수지 조성물에 함유되는 중합성 화합물 (B) 는 중합성을 갖는 한 특별히 한정되지 않고, 예를 들어, 단관능 모노머, 2 관능 모노머, 3 관능 이상의 다관능 모노머 등이 예시된다. The polymerizable compound (B) contained in the photosensitive resin composition of the present invention is not particularly limited as far as it has polymerizability, and examples thereof include monofunctional monomers, bifunctional monomers, and multifunctional monomers having three or more functionalities.
단관능 모노머로는, 노닐페닐카르비톨(메트)아크릴레이트, 2-히드록시-3-페녹시프로필(메트)아크릴레이트, 2-에틸헥실카르비톨(메트)아크릴레이트, 2-(2-에톡시에톡시)에틸(메트)아크릴레이트, 카프로락톤(메트)아크릴레이트, 에톡시화노닐페놀(메트)아크릴레이트, 프로폭시화노닐페놀(메트)아크릴레이트 등의 (메트)아크릴레이트 ; 스티렌, -, o-, m-, p-메틸스티렌, p-메톡시스티렌, p-tert부톡시스티렌, 클로로메틸스티렌 등의 스티렌류 ; Examples of monofunctional monomers include nonylphenylcarbitol (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, 2-ethylhexylcarbitol (meth) acrylate, 2- (Meth) acrylates such as caprolactone (meth) acrylate, ethoxylated nonylphenol (meth) acrylate and propoxylated nonylphenol (meth) acrylate; Styrene, -, o-, m-, p-methylstyrene, p-methoxystyrene, p-tert-butoxystyrene, chloromethylstyrene and the like;
부타디엔, 2,3-디메틸부타디엔, 이소프렌 등의 디엔류 : Dienes such as butadiene, 2,3-dimethylbutadiene, and isoprene;
(메트)아크릴산-메틸, (메트)아크릴산-에틸, (메트)아크릴산-n-프로필, (메트)아크릴산-i-프로필, (메트)아크릴산-n-부틸, (메트)아크릴산-sec-부틸, (메트)아크릴산-tert-부틸, (메트)아크릴산-2-에틸헥실, (메트)아크릴산-라우릴, (메트)아크릴산-도데실, (메트)아크릴산-스테아릴, (메트)아크릴산-디시클로펜타닐, (메트)아크릴산-이소보로닐, (메트)아크릴산-시클로헥실, (메트)아크릴산-2-메틸시클로헥실, (메트)아크릴산-디시클로헥실, (메트)아크릴산-아다만틸, (메트)아크릴산-알릴, (메트)아크릴산-프로바길, (메트)아크릴산-페닐, (메트)아크릴산-나프틸, (메트)아크릴산-안트라세닐, (메트)아크릴산-시클로펜틸, (메트)아크릴산-푸릴, (메트)아크릴산-테트라히드로푸릴, (메트)아크릴산-피라닐, (메트)아크릴산-벤질, (메트)아크릴산-페네실, (메트)아크릴산-크레실, (메트)아크릴산-1,1,1-트리플루오로에틸, (메트)아크릴산-퍼플루오로에틸, (메트)아크릴산-퍼플루오로-n-프로필, (메트)아크릴산-퍼플루오로-i-프로필, (메트)아크릴산-트리페닐메틸, (메트)아크릴산-아다만틸, (메트)아크릴산-쿠밀 등의 (메트)아크릴산알킬에스테르, (메트)아크 릴산시클로알킬 또는 (메트)아크릴산아릴에스테르 ; (Meth) acrylate, n-propyl (meth) acrylate, n-butyl (meth) acrylate, sec- (Meth) acrylic acid-dicyclohexyl (meth) acrylate, stearyl (meth) acrylate, dodecyl (meth) (Meth) acrylate-dicyclohexyl, (meth) acrylic acid-adamantyl, (meth) acrylic acid-isobornyl, (Meth) acrylic acid-anthracenyl, (meth) acrylic acid-cyclopentyl, (meth) acrylic acid-naphthyl, (meth) (Meth) acrylic acid-benzene, (meth) acrylic acid-phenesil, (meth) acrylic acid-cresyl (meth) Perfluoro-n-propyl (meth) acrylate, perfluoro (meth) acrylate, perfluoro (meth) acrylate, perfluoro Acrylic acid alkyl ester such as (meth) acrylic acid-triphenylmethyl, (meth) acrylic acid-adamantyl or (meth) acrylic acid-cumyl, cycloalkyl (meth) acrylate or aryl (meth) ;
(메트)아크릴산-2-히드록시에틸, (메트)아크릴산-2-히드록시프로필 등의 (메트)아크릴산히드록시알킬에스테르 ; (Meth) acrylic acid hydroxyalkyl esters such as 2-hydroxyethyl (meth) acrylate and 2-hydroxypropyl (meth) acrylate;
(메트)아크릴산-아미드, -N,N-디메틸아미드, -N,N-프로필아미드 등의 (메트)아크릴산아미드 ; (Meth) acrylic acid amides such as (meth) acrylic acid amide, -N, N-dimethylamide and -N, N-propylamide;
(메트)아크릴산-아닐리드, (메트)아크릴로니트릴, 아크롤레인, 염화비닐, 염화비닐리덴, N-비닐피롤리돈, 아세트산비닐 등의 비닐 화합물 ; Vinyl compounds such as (meth) acrylic acid anilide, (meth) acrylonitrile, acrolein, vinyl chloride, vinylidene chloride, N-vinylpyrrolidone and vinyl acetate;
말레산디에틸, 푸마르산디에틸, 이타콘산디에틸 등의 불포화 디카르복실산디에스테르 ; Unsaturated dicarboxylic acid diesters such as diethyl maleate, diethyl fumarate and diethyl itaconate;
글리시딜(메트)아크릴레이트, -에틸글리시딜(메트)아크릴레이트, -n-프로필글리시딜(메트)아크릴레이트, -n-부틸글리시딜(메트)아크릴레이트, 3,4-에폭시부틸(메트)아크릴레이트, 3,4-에폭시헵틸(메트)아크릴레이트, -에틸-6,7-에폭시헵틸(메트)아크릴레이트, 알릴글리시딜에테르, 비닐글리시딜에테르 등 글리시딜 화합물 등을 들 수 있다.Glycidyl (meth) acrylate, - ethyl glycidyl (meth) acrylate, n-propyl glycidyl (meth) acrylate, (meth) acrylate, 3,4-epoxybutyl (meth) acrylate, 3,4-epoxyheptyl (meth) -Ethyl-6,7-epoxyheptyl (meth) acrylate, allyl glycidyl ether, vinyl glycidyl ether, and the like.
2 관능 모노머의 구체예로는, 1,3-부탄디올디(메트)아크릴레이트, 1,3-부탄디올(메트)아크릴레이트, 1,6-헥산디올디(메트)아크릴레이트, 에틸렌글리콜디(메트)아크릴레이트, 디에틸렌글리콜디(메트)아크릴레이트, 네오펜틸글리콜디(메트)아크릴레이트, 트리에틸렌글리콜디(메트)아크릴레이트, 테트라에틸렌글리콜디(메트)아크릴레이트, 폴리에틸렌글리콜디아크릴레이트, 비스페놀 A 의 비스(아크릴로일옥 시에틸)에테르, 에톡시화비스페놀A디(메트)아크릴레이트, 프로폭시화네오펜틸글리콜디(메트)아크릴레이트, 에톡시화네오펜틸글리콜디(메트)아크릴레이트, 3-메틸펜탄디올디(메트)아크릴레이트 등을 들 수 있다.Specific examples of the bifunctional monomer include 1,3-butanediol di (meth) acrylate, 1,3-butanediol (meth) acrylate, 1,6-hexanediol di (meth) acrylate, ethylene glycol di Acrylate, diethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, polyethylene glycol diacrylate, Bis (acryloyloxyethyl) ether of bisphenol A, ethoxylated bisphenol A di (meth) acrylate, propoxylated neopentyl glycol di (meth) acrylate, ethoxylated neopentyl glycol di (meth) -Methylpentanediol di (meth) acrylate, and the like.
3 관능 이상의 다관능 모노머로는, 트리메틸올프로판트리(메트)아크릴레이트, 펜타에리트리톨트리(메트)아크릴레이트, 트리스(2-히드록시에틸)이소시아누레이트트리(메트)아크릴레이트, 에톡시화트리메틸올프로판트리(메트)아크릴레이트, 프로폭시화트리메틸올프로판트리(메트)아크릴레이트, 펜타에리트리톨테트라(메트)아크릴레이트, 디펜타에리트리톨펜타(메트)아크릴레이트, 디펜타에리트리톨헥사(메트)아크릴레이트, 트리펜타에리트리톨테트라(메트)아크릴레이트, 트리펜타에리트리톨펜타(메트)아크릴레이트, 트리펜타에리트리톨헥사(메트)아크릴레이트, 트리펜타에리트리톨헵타(메트)아크릴레이트, 트리펜타에리트리톨옥타(메트)아크릴레이트, 펜타에리트리톨트리(메트)아크릴레이트와 산무수물의 반응물, 디펜타에리트리톨펜타(메트)아크릴레이트와 산무수물의 반응물, 트리펜타에리트리톨헵타(메트)아크릴레이트와 산무수물 카프로락톤 변성 트리메틸올프로판트리(메트)아크릴레이트, 카프로락톤 변성 펜타에리트리톨트리(메트)아크릴레이트, 카프로락톤 변성 트리스(2-히드록시에틸)이소시아누레이트트리(메트)아크릴레이트, 카프로락톤 변성 펜타에리트리톨테트라(메트)아크릴레이트, 카프로락톤 변성 디펜타에리트리톨펜타(메트)아크릴레이트, 카프로락톤 변성 디펜타에리트리톨헥사(메트)아크릴레이트, 카프로락톤 변성 트리펜타에리트리톨테트라(메트)아크릴레이트, 카프로락톤 변성 트리펜타에리트리톨펜타(메트)아크릴레이트, 카프로락톤 변성 트리펜타에리트리톨헥사(메 트)아크릴레이트, 카프로락톤 변성 트리펜타에리트리톨헵타(메트)아크릴레이트, 카프로락톤 변성 트리펜타에리트리톨옥타(메트)아크릴레이트, 카프로락톤 변성 펜타에리트리톨트리(메트)아크릴레이트와 산무수물의 반응물, 카프로락톤 변성 디펜타에리트리톨펜타(메트)아크릴레이트와 산무수물의 반응물, 카프로락톤 변성 트리펜타에리트리톨헵타(메트)아크릴레이트와 산무수물 등을 들 수 있다. 그 중에서도, 2 관능 이상의 모노머가 바람직하게 사용된다. Examples of the multifunctional monomer having three or more functional groups include trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, tris (2-hydroxyethyl) isocyanurate tri (meth) acrylate, (Meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, (Meth) acrylate, tripentaerythritol tetra (meth) acrylate, tripentaerythritol penta (meth) acrylate, tripentaerythritol hexa (meth) acrylate, tripentaerythritol Pentaerythritol tri (meth) acrylate, pentaerythritol tri (meth) acrylate and acid anhydride, dipentaerythritol penta (meth) acrylate, (Meth) acrylate, caprolactone-modified caprolactone-modified trimethylolpropane tri (meth) acrylate, caprolactone-modified pentaerythritol tri (meth) acrylate, caprolactone-modified (Meth) acrylate, caprolactone-modified pentaerythritol tetra (meth) acrylate, caprolactone-modified dipentaerythritol penta (meth) acrylate, caprolactone-modified di Caprolactone-modified tripentaerythritol tetra (meth) acrylate, caprolactone-modified tripentaerythritol penta (meth) acrylate, caprolactone-modified tripentaerythritol hexa (meth) acrylate, caprolactone- Acrylate, caprolactone-modified tripentaerythritol hepta (meth) acrylate, caprolactone-modified (Meth) acrylate, a reaction product of caprolactone-modified pentaerythritol tri (meth) acrylate and an acid anhydride, a reaction product of caprolactone-modified dipentaerythritol penta (meth) acrylate and an acid anhydride, caprolactone Modified tripentaerythritol hepta (meth) acrylate and acid anhydride. Of these, monofunctional or higher functional monomers are preferably used.
중합성 화합물 (B) 의 함유량은 수지 (A) 및 중합성 화합물 (B) 의 합계량에 대하여 질량 분율로 바람직하게는 1 ∼ 70 질량%, 보다 바람직하게는 5 ∼ 60 질량% 이다. 중합성 화합물 (B) 의 함유량이 상기 범위에 있으면, 감도나, 도포막 및 패턴의 강도나 평활성, 신뢰성, 기계 강도가 양호해지는 경향이 있기 때문에 바람직하다. The content of the polymerizable compound (B) is preferably 1 to 70% by mass, more preferably 5 to 60% by mass, based on the total amount of the resin (A) and the polymerizable compound (B). When the content of the polymerizable compound (B) is within the above range, the sensitivity and the strength, smoothness, reliability, and mechanical strength of the coating film and pattern tend to be favorable.
본 발명의 감광성 수지 조성물에 함유되는 중합 개시제 (C) 로는, 광 또는 열의 작용에 의해 중합을 개시하는 화합물이면 특별히 한정되지 않고, 공지된 중합 개시제를 사용할 수 있다. The polymerization initiator (C) contained in the photosensitive resin composition of the present invention is not particularly limited as far as it is a compound that initiates polymerization by the action of light or heat, and a known polymerization initiator can be used.
중합 개시제 (C) 로서 예를 들어, 비이미다졸계 화합물, 아세토페논계 화합물, 트리아진계 화합물, 아실포스핀옥사이드계 화합물, 옥심계 화합물이 바람직하다. 또, 일본 공개특허공보 2008-181087호에 기재된 광 및/또는 열 카티온 중합 개시제 (예를 들어, 오늄 카티온과 루이스산에서 유래된 아니온으로 구성되어 있는 것) 를 사용해도 된다. 그 중에서도, 비이미다졸계 화합물이 감도가 우수하기 때문에 보다 바람직하다. As the polymerization initiator (C), for example, a nonimidazole-based compound, an acetophenone-based compound, a triazine-based compound, an acylphosphine oxide-based compound or an oxime-based compound is preferable. It is also possible to use the photo- and / or thermal cationic polymerization initiator described in JP-A-2008-181087 (for example, an onium cation and an anion derived from Lewis acid). Among them, a nonimidazole-based compound is more preferable because of its excellent sensitivity.
상기 비이미다졸 화합물로는, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸 (예를 들어, 일본 공개특허공보 평6-75372호, 일본 공개특허공보 평6-75373호 등 참조), 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(알콕시페닐)비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(디알콕시페닐)비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(트리알콕시페닐)비이미다졸 (예를 들어, 일본 특허공보 소48-38403호, 일본 공개특허공보 소62-174204호 등 참조), 4,4'5,5'-위치의 페닐기가 카르보알콕시기에 의해 치환되어 있는 이미다졸 화합물 (예를 들어, 일본 공개특허공보 평7-10913호 등 참조) 등을 들 수 있다. 바람직하게는 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸을 들 수 있다. Examples of the imidazole compound include 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2,3- ) -4,4 ', 5,5'-tetraphenylbiimidazole (see, for example, JP-A 6-75372, JP-A 6-75373, etc.), 2,2'- Bis (2-chlorophenyl) -4,4 ', 5,5'-tetra (alkoxy) Phenyl) imidazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetra (dialkoxyphenyl) ) -4,4 ', 5,5'-tetra (trialkoxyphenyl) biimidazole (see, for example, Japanese Patent Publication No. 48-38403, Japanese Patent Application Laid-open No. 62-174204, Imidazole compounds in which the phenyl group at the 4'5,5'-position is substituted by a carboalkoxy group (see, for example, JP-A-7-10913). Preferred are 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2,3-dichlorophenyl) ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2,4-dichlorophenyl) -4,4', 5,5'-tetraphenylbiimidazole.
상기 아세토페논계 화합물로는, 디에톡시아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 벤질디메틸케탈, 2-히드록시-1-〔4-(2-히드록시에톡시)페닐〕-2-메틸프로판-1-온, 2-히드록시-1-{4-[4-(2-히드록시-2-메틸-프로피오닐)-벤질]-페닐}-2-메틸-프로판-1-온, 1-히드록시시클로헥실페닐케톤, 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온, 2-(2-메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(3-메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(4-메틸벤질)-2-디메틸아미노 -1-(4-모르폴리노페닐)-부타논, 2-(2-에틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-프로필벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-부틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2,3-디메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2,4-디메틸벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-클로로벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-브로모벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(3-클로로벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(4-클로로벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(3-브로모벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(4-브로모벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-메톡시벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(3-메톡시벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(4-메톡시벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-메틸-4-메톡시벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-메틸-4-브로모벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-(2-브로모-4-메톡시벤질)-2-디메틸아미노-1-(4-모르폴리노페닐)-부타논, 2-히드록시-2-메틸-1-〔4-(1-메틸비닐)페닐〕프로판-1-온의 올리고머 등을 들 수 있다. Examples of the acetophenone compound include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethylketal, 2-hydroxy- 1- [4- Phenyl} -2-methylpropan-1-one, 2-hydroxy-1- {4- [4- (2- Methyl-1- (4-methylthiophenyl) -2-morpholinopropane-1-one, 2-benzyl-2-dimethylamino 1- (4-morpholinophenyl) -butanone, 2- (3-methylphenyl) butan- (4-morpholinophenyl) -butanone, 2- (4-methylbenzyl) -2-dimethylamino-1- , 2- (2-ethylbenzyl) -2-dimethylamino-1- (4-morpholinophenyl) 2-dimethylamino-1- (4-morpholinophenyl) -butanone, 2- (2,3- Dimethylbenzyl) -2-dimethylamino-1- (4-morpholinophenyl) -butanone, 2- 2- (2-chlorobenzyl) -2-dimethylamino-1- (4-morpholinophenyl) 2-dimethylamino-1- (4-morpholinophenyl) -butanone, 2- (4-chlorobenzyl) -2-dimethyl 2- (4-morpholinophenyl) -butanone, 2- (3-bromobenzyl) -2-dimethylamino- (4-morpholinophenyl) -butanone, 2- (2-methoxybenzyl) -2-dimethylamino-1- Butanone, 2- (3-methoxybenzyl) -2-dimethylamino-1- (4-morpholinophenyl) (4-morpholinophenyl) -butanone, 2- (2-methoxybenzyl) -2-methylamino- (2-bromo-4-methoxybenzyl) -2-dimethylamino-1- ( Oligomers of 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl] propan-1-one.
상기 트리아진계 화합물로는, 2,4-비스(트리클로로메틸)-6-(4-메톡시페닐)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시나프틸)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-피페로닐-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시스티릴)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-〔2-(5-메틸푸란 -2-일)에테닐〕-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-〔2-(푸란-2-일)에테닐〕-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(4-디에틸아미노-2-메틸페닐)에테닐〕-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-〔2-(3,4-디메톡시페닐)에테닐〕-1,3,5-트리아진 등을 들 수 있다. Examples of the triazine compound include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-triazine, 2,4- (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4-bis (Trichloromethyl) -6- [2- (5-methylfuran-2-yl) -1,3,5-triazine, ) Ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] Bis (trichloromethyl) -6- [2- (4-diethylamino-2-methylphenyl) ethenyl] -1,3,5-triazine, 2,4- -6- [2- (3,4-dimethoxyphenyl) ethenyl] -1,3,5-triazine.
상기 아실포스핀옥사이드계 개시제로는 2,4,6-트리메틸벤조일디페닐포스핀옥사이드 등을 들 수 있다. Examples of the acylphosphine oxide-based initiator include 2,4,6-trimethylbenzoyldiphenylphosphine oxide and the like.
상기 옥심 화합물로는, 0-에톡시카르보닐--옥시이미노-1-페닐프로판-1-온, 식 (Ⅲ) 으로 나타내는 화합물, 식 (Ⅳ) 로 나타내는 화합물 등을 들 수 있다. As the oxime compound, 0-ethoxycarbonyl- -Oxyimino-1-phenylpropan-1-one, a compound represented by the formula (III) and a compound represented by the formula (IV).
또한, 상기 서술한 중합 개시제 (C) 와 함께, 중합 개시 보조제 (C-1) 을 사용하는 것이 바람직하다. 중합 개시 보조제 (C-1) 로는, 식 (V) 로 나타내는 화합물을 들 수 있다. It is also preferable to use the polymerization initiator (C-1) together with the polymerization initiator (C) described above. Examples of the polymerization initiation aid (C-1) include compounds represented by the formula (V).
[식 (V) 중, X 로 나타내는 점선은 할로겐 원자로 치환되어 있어도 되는 탄 소수 6 ∼ 12 의 방향 고리를 나타낸다. [In the formula (V), the dotted line X represents an aromatic ring having 6 to 12 carbon atoms which may be substituted with a halogen atom.
Y 는 산소 원자, 황 원자를 나타낸다. Y represents an oxygen atom or a sulfur atom.
R1 은 탄소수 1 ∼ 6 의 알킬기를 나타낸다. R 1 represents an alkyl group having 1 to 6 carbon atoms.
R2 는 할로겐 원자로 치환되어 있어도 되는 탄소수 1 ∼ 12 의 알킬기 또는 할로겐 원자로 치환되어 있어도 되는 아릴기를 나타낸다]R 2 represents an alkyl group having 1 to 12 carbon atoms which may be substituted with a halogen atom or an aryl group which may be substituted with a halogen atom;
할로겐 원자로는, 불소 원자, 염소 원자, 브롬 원자 등을 들 수 있다. 탄소수 6 ∼ 12 의 방향 고리로는, 벤젠 고리, 나프탈렌 고리 등을 들 수 있다. Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom. Examples of the aromatic ring having 6 to 12 carbon atoms include a benzene ring and a naphthalene ring.
할로겐 원자로 치환되어 있어도 되는 탄소수 6 ∼ 12 의 방향 고리로는, 벤젠 고리, 메틸벤젠 고리, 디메틸벤젠 고리, 에틸벤젠 고리, 프로필벤젠 고리, 부틸벤젠 고리, 펜틸벤젠 고리, 헥실벤젠 고리, 시클로헥실벤젠 고리, 클로로벤젠 고리, 디클로로벤젠 고리, 브로모벤젠 고리, 디브로모벤젠 고리, 페닐벤젠 고리, 클로로페닐벤젠 고리, 브로모페닐벤젠 고리, 나프탈렌 고리, 클로로나프탈렌 고리, 브로모나프탈렌 고리 등을 들 수 있다. Examples of the aromatic ring having 6 to 12 carbon atoms which may be substituted with a halogen atom include a benzene ring, a methylbenzene ring, a dimethylbenzene ring, an ethylbenzene ring, a propylbenzene ring, a butylbenzene ring, a pentylbenzene ring, a hexylbenzene ring, Examples of the ring include a ring, a chlorobenzene ring, a dichlorobenzene ring, a bromobenzene ring, a dibromobenzene ring, a phenylbenzene ring, a chlorophenylbenzene ring, a bromophenylbenzene ring, a naphthalene ring, a chloronaphthalene ring, a bromonaphthalene ring, .
탄소수 1 ∼ 6 의 알킬기로는, 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, 1-메틸-n-프로필기, 2-메틸-n-프로필기, tert-부틸기, n-펜틸기, 1-메틸-n-부틸기, 2-메틸-n-부틸기, 3-메틸-n-부틸기, 1,1-디메틸-n-프로필기, 1,2-디메틸-n-프로필기, 2,2-디메틸-n-프로필기, n-헥실기, 시클로헥실기 등을 들 수 있다. Examples of the alkyl group having 1 to 6 carbon atoms include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a 1-methyl- butyl group, a 3-methyl-n-butyl group, a 1,1-dimethyl-n-propyl group, a 1,2-dimethyl-n-butyl group, -Propyl group, 2,2-dimethyl-n-propyl group, n-hexyl group, cyclohexyl group and the like.
할로겐 원자로 치환되어 있어도 되는 탄소수 1 ∼ 12 의 알킬기로는, 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, 1-메틸-n-프로필기, 2-메틸-n- 프로필기, tert-부틸기, n-펜틸기, 1-메틸-n-부틸기, 2-메틸-n-부틸기, 3-메틸-n-부틸기, 1,1-디메틸-n-프로필기, 1,2-디메틸-n-프로필기, 2,2-디메틸-n-프로필기, n-헥실기, 시클로헥실기, 1-클로로-n-부틸기, 2-클로로-n-부틸기, 3-클로로-n-부틸기 등을 들 수 있다. Examples of the alkyl group having 1 to 12 carbon atoms which may be substituted with a halogen atom include a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, 1-methyl- butyl group, a 1-methyl-n-butyl group, a 1-methyl-n-propyl group, a 1-methyl- N-propyl group, a 2-dimethyl-n-propyl group, an n-hexyl group, a cyclohexyl group, Chloro-n-butyl group and the like.
할로겐 원자로 치환되어 있어도 되는 아릴기로는, 페닐기, 클로로페닐기, 디클로로페닐기, 브로모페닐기, 디브로모페닐기, 클로로브로모페닐기, 비페닐기, 클로로비페닐기, 디클로로비페닐기, 브로모페닐기, 디브로모페닐기, 나프틸기, 클로로나프틸기, 디클로로나프틸기, 브로모나프틸기, 디브로모나프틸기 등을 들 수 있다. Examples of the aryl group which may be substituted with a halogen atom include a phenyl group, a chlorophenyl group, a dichlorophenyl group, a bromophenyl group, a dibromophenyl group, a chlorobenzophenyl group, a biphenyl group, a chlorobiphenyl group, a dichlorobiphenyl group, a bromophenyl group, A phenyl group, a naphthyl group, a chloronaphthyl group, a dichloronaphthyl group, a bromonaphthyl group, and a dibromonaphthyl group.
또한, 본 명세서에서는 어느 화학 구조식에 있어서도, 탄소수에 따라 상이한데, 특별한 언급이 없는 한 각 치환기는 상기의 예시가 적용된다. 또, 직사슬 또는 분기의 쌍방을 취할 수 있는 것은 그 전부를 포함한다. In the present specification, any of the chemical structural formulas is different depending on the number of carbon atoms. Unless otherwise specified, the examples given above apply to the respective substituents. Incidentally, all that can take both of a linear chain and a branch are included.
식 (V) 로 나타내는 화합물로서, 구체적으로는,As the compound represented by the formula (V), specifically,
2-벤조일메틸렌-3-메틸-나프토[2,1-d]티아졸린,2-benzoylmethylene-3-methyl-naphtho [2,1-d] thiazoline,
2-벤조일메틸렌-3-메틸-나프토[1,2-d]티아졸린, 2-benzoylmethylene-3-methyl-naphtho [1,2-d] thiazoline,
2-벤조일메틸렌-3-메틸-나프토[2,3-d]티아졸린,2-benzoylmethylene-3-methyl-naphtho [2,3-d] thiazoline,
2-(2-나프토일메틸렌)-3-메틸벤조티아졸린, 2- (2-naphthoylmethylene) -3-methylbenzothiazoline,
2-(1-나프토일메틸렌)-3-메틸벤조티아졸린, 2- (1-naphthoylmethylene) -3-methylbenzothiazoline,
2-(2-나프토일메틸렌)-3-메틸-5-페닐벤조티아졸린,2- (2-naphthoylmethylene) -3-methyl-5-phenylbenzothiazoline,
2-(1-나프토일메틸렌)-3-메틸-5-페닐벤조티아졸린,2- (1-naphthoylmethylene) -3-methyl-5-phenylbenzothiazoline,
2-(2-나프토일메틸렌)-3-메틸-5-플루오로벤조티아졸린,2- (2-naphthoylmethylene) -3-methyl-5-fluorobenzothiazoline,
2-(1-나프토일메틸렌)-3-메틸-5-플루오로벤조티아졸린,2- (1-naphthoylmethylene) -3-methyl-5-fluorobenzothiazoline,
2-(2-나프토일메틸렌)-3-메틸-5-클로로벤조티아졸린,2- (2-naphthoylmethylene) -3-methyl-5-chlorobenzothiazoline,
2-(1-나프토일메틸렌)-3-메틸-5-클로로벤조티아졸린,2- (1-naphthoylmethylene) -3-methyl-5-chlorobenzothiazoline,
2-(2-나프토일메틸렌)-3-메틸-5-브로모벤조티아졸린,2- (2-naphthoylmethylene) -3-methyl-5-bromobenzothiazoline,
2-(1-나프토일메틸렌)-3-메틸-5-브로모벤조티아졸린,2- (1-naphthoylmethylene) -3-methyl-5-bromobenzothiazoline,
2-(4-비페노일메틸렌)-3-메틸벤조티아졸린, 2- (4-biphenoylmethylene) -3-methylbenzothiazoline,
2-(4-비페노일메틸렌)-3-메틸-5-페닐벤조티아졸린,2- (4-biphenoylmethylene) -3-methyl-5-phenylbenzothiazoline,
2-(2-나프토일메틸렌)-3-메틸-나프토[2,1-d]티아졸린,2- (2-naphthoylmethylene) -3-methyl-naphtho [2,1-d] thiazoline,
2-(2-나프토일메틸렌)-3-메틸-나프토[1,2-d]티아졸린,2- (2-naphthoylmethylene) -3-methyl-naphtho [1,2-d] thiazoline,
2-(4-비페노일메틸렌)-3-메틸-나프토[2,1-d]티아졸린,2- (4-biphenoylmethylene) -3-methyl-naphtho [2,1-d] thiazoline,
2-(4-비페노일메틸렌)-3-메틸-나프토[1,2-d]티아졸린,2- (4-biphenoylmethylene) -3-methyl-naphtho [1,2-d] thiazoline,
2-(p-플루오로벤조일메틸렌)-3-메틸-나프토[2,1-d]티아졸린,2- (p-fluorobenzoylmethylene) -3-methyl-naphtho [2,1-d] thiazoline,
2-(p-플루오로벤조일메틸렌)-3-메틸-나프토[1,2-d]티아졸린,2- (p-fluorobenzoylmethylene) -3-methyl-naphtho [1,2-d] thiazoline,
2-벤조일메틸렌-3-메틸-나프토[2,1-d]옥사졸린, 2-benzoylmethylene-3-methyl-naphtho [2,1-d] oxazoline,
2-벤조일메틸렌-3-메틸-나프토[1,2-d]옥사졸린,2-benzoylmethylene-3-methyl-naphtho [1,2-d] oxazoline,
2-벤조일메틸렌-3-메틸-나프토[2,3-d]옥사졸린,2-benzoylmethylene-3-methyl-naphtho [2,3-d] oxazoline,
2-(2-나프토일메틸렌)-3-메틸벤조옥사졸린, 2- (2-naphthoylmethylene) -3-methylbenzooxazoline,
2-(1-나프토일메틸렌)-3-메틸벤조옥사졸린, 2- (1-naphthoylmethylene) -3-methylbenzooxazoline,
2-(2-나프토일메틸렌)-3-메틸-5-페닐벤조옥사졸린,2- (2-naphthoylmethylene) -3-methyl-5-phenylbenzooxazoline,
2-(1-나프토일메틸렌)-3-메틸-5-페닐벤조옥사졸린,2- (1-naphthoylmethylene) -3-methyl-5-phenylbenzooxazoline,
2-(2-나프토일메틸렌)-3-메틸-5-플루오로벤조옥사졸린,2- (2-naphthoylmethylene) -3-methyl-5-fluorobenzooxazoline,
2-(1-나프토일메틸렌)-3-메틸-5-플루오로벤조옥사졸린,2- (1-naphthoylmethylene) -3-methyl-5-fluorobenzooxazoline,
2-(2-나프토일메틸렌)-3-메틸-5-클로로벤조옥사졸린,2- (2-naphthoylmethylene) -3-methyl-5-chlorobenzooxazoline,
2-(1-나프토일메틸렌)-3-메틸-5-클로로벤조옥사졸린,2- (1-naphthoylmethylene) -3-methyl-5-chlorobenzooxazoline,
2-(2-나프토일메틸렌)-3-메틸-5-브로모벤조옥사졸린,2- (2-naphthoylmethylene) -3-methyl-5-bromobenzooxazoline,
2-(1-나프토일메틸렌)-3-메틸-5-브로모벤조옥사졸린,2- (1-naphthoylmethylene) -3-methyl-5-bromobenzooxazoline,
2-(4-비페노일메틸렌)-3-메틸벤조옥사졸린, 2- (4-biphenoylmethylene) -3-methylbenzooxazoline,
2-(4-비페노일메틸렌)-3-메틸-5-페닐벤조옥사졸린,2- (4-biphenoylmethylene) -3-methyl-5-phenylbenzooxazoline,
2-(2-나프토일메틸렌)-3-메틸-나프토[2,1-d]옥사졸린,2- (2-naphthoylmethylene) -3-methyl-naphtho [2,1-d] oxazoline,
2-(2-나프토일메틸렌)-3-메틸-나프토[1,2-d]옥사졸린,2- (2-naphthoylmethylene) -3-methyl-naphtho [1,2-d] oxazoline,
2-(4-비페노일메틸렌)-3-메틸-나프토[2,1-d]옥사졸린, 2- (4-biphenoylmethylene) -3-methyl-naphtho [2,1-d] oxazoline,
2-(4-비페노일메틸렌)-3-메틸-나프토[1,2-d]옥사졸린,2- (4-biphenoylmethylene) -3-methyl-naphtho [1,2-d] oxazoline,
2-(p-플루오로벤조일메틸렌)-3-메틸-나프토[2,1-d]옥사졸린, 2- (p-fluorobenzoylmethylene) -3-methyl-naphtho [2,1-d] oxazoline,
2-(p-플루오로벤조일메틸렌)-3-메틸-나프토[1,2-d]옥사졸린 등을 들 수 있다. 2- (p-fluorobenzoylmethylene) -3-methyl-naphtho [1,2-d] oxazoline.
그 중에서도 바람직하게는, 식 (V-1) 로 나타내는 2-(2-나프토일메틸렌)-3-메틸벤조티아졸린, 식 (V-2) 로 나타내는 2-벤조일메틸렌-3-메틸-나프토[1,2-d]티아졸린 및 식 (V-3) 으로 나타내는 2-(4-비페노일메틸렌)-3-메틸-나프토[1,2-d]티아졸린을 들 수 있다. Among them, 2- (2-naphthoylmethylene) -3-methylbenzothiazoline represented by the formula (V-1) and 2-benzoylmethylene-3-methylnaphtho [1,2-d] thiazoline and 2- (4-biphenoylmethylene) -3-methyl-naphtho [1,2-d] thiazoline represented by the formula (V-3).
이들 화합물을 사용함으로써 얻어지는 감광성 수지 조성물은 더욱 고감도가 된다. 얻어지는 감광성 수지 조성물을 사용하여 도포막이나 패턴을 형성함으로써, 도포막이나 패턴의 생산성이 향상되기 때문에 바람직하다. 식 (V) 로 나타내는 화합물은 도포막의 포스트베이크시의 열에 의해 승화되지 않고, 광 및 열의 적어도 어느 일방의 작용에 의해 퇴색되어 투명성이 향상되기 때문에 바람직하다.The sensitivity of the photosensitive resin composition obtained by using these compounds becomes higher. It is preferable to form a coating film or a pattern by using the obtained photosensitive resin composition because the productivity of the coating film and the pattern can be improved. The compound represented by the formula (V) is preferable because it is not sublimated by the post-baking heat of the coating film but is discolored by the action of at least one of light and heat to improve transparency.
또, 중합 개시 보조제 (C-1) 로는, 식 (Ⅵ) 및 식 (Ⅶ) 로 이루어지는 군에서 선택되는 적어도 1 종으로 나타내는 화합물을 사용해도 된다. As the polymerization initiator (C-1), a compound represented by at least one kind selected from the group consisting of the formulas (VI) and (VII) may be used.
[식 (Ⅵ) 및 식 (Ⅶ) 중, 고리 X1 및 고리 X2 는 각각 독립적으로 할로겐 원자로 치환되어 있어도 되는 탄소수 6 ∼ 12 의 방향 고리 또는 복소 고리를 나타낸다. Y1 및 Y2 는 산소 원자 또는 황 원자를 나타낸다. R1 및 R2 는 탄소수 1 ∼ 12 의 알킬기 또는 탄소수 6 ∼ 12 의 아릴기를 나타낸다. 이들 알킬기 및 아릴기는 할로겐 원자, 히드록시기 또는 탄소수 1 ∼ 6 의 알콕시기로 치환되어 있어도 된다. In the formulas (VI) and (VII), the rings X 1 and X 2 each independently represents an aromatic ring or heterocyclic ring having 6 to 12 carbon atoms which may be substituted with a halogen atom. Y 1 and Y 2 represent an oxygen atom or a sulfur atom. R 1 and R 2 represent an alkyl group having 1 to 12 carbon atoms or an aryl group having 6 to 12 carbon atoms. These alkyl groups and aryl groups may be substituted with a halogen atom, a hydroxy group or an alkoxy group having 1 to 6 carbon atoms.
할로겐 원자로 치환되어 있어도 되는 방향 고리 또는 복소 고리로는, 벤젠 고리, 메틸벤젠 고리, 디메틸벤젠 고리, 에틸벤젠 고리, 프로필벤젠 고리, 부틸벤젠 고리, 펜틸벤젠 고리, 헥실벤젠 고리, 시클로헥실벤젠 고리, 클로로벤젠 고리, 디클로로벤젠 고리, 브로모벤젠 고리, 디브로모벤젠 고리, 페닐벤젠 고리, 클로로페닐벤젠 고리, 브로모페닐벤젠 고리, 나프탈렌 고리, 클로로나프탈렌 고리, 브로모나프탈렌 고리, 페난트렌 고리, 크리센 고리, 플루오란텐 고리, 벤조[a]피렌 고리, 벤조[e]피렌 고리, 페릴렌 고리 및 그들의 유도체 등을 들 수 있다. Examples of the aromatic ring or heterocyclic ring which may be substituted with a halogen atom include a benzene ring, a methylbenzene ring, a dimethylbenzene ring, an ethylbenzene ring, a propylbenzene ring, a butylbenzene ring, a pentylbenzene ring, a hexylbenzene ring, a cyclohexylbenzene ring, A chlorobenzene ring, a chlorobenzene ring, a dichlorobenzene ring, a bromobenzene ring, a dibromobenzene ring, a phenylbenzene ring, a chlorophenylbenzene ring, a bromophenylbenzene ring, a naphthalene ring, a chloronaphthalene ring, a bromanaphthalene ring, A chrysene ring, a fluoranthene ring, a benzo [a] pyrene ring, a benzo [e] pyrene ring, a perylene ring and derivatives thereof.
히드록시기 치환 알킬기로는, 히드록시메틸기, 히드록시에틸기, 히드록시프로필기, 히드록시부틸기 등을 들 수 있다. Examples of the hydroxy-substituted alkyl group include a hydroxymethyl group, a hydroxyethyl group, a hydroxypropyl group, and a hydroxybutyl group.
히드록시기 치환 아릴기로는, 히드록시페닐기, 히드록시나프틸기 등을 들 수 있다. Examples of the hydroxyl group-substituted aryl group include a hydroxyphenyl group and a hydroxynaphthyl group.
알콕시 치환 알킬기로는, 메톡시메틸기, 메톡시에틸기, 메톡시프로필기, 메톡시부틸기, 부톡시메틸기, 에톡시에틸기, 에톡시프로필기, 프로폭시부틸기 등을 들 수 있다. Examples of the alkoxy-substituted alkyl group include a methoxymethyl group, a methoxyethyl group, a methoxypropyl group, a methoxybutyl group, a butoxymethyl group, an ethoxyethyl group, an ethoxypropyl group, and a propoxybutyl group.
알콕시 치환 아릴기로는, 메톡시페닐기, 에톡시나프틸기 등을 들 수 있다. Examples of the alkoxy-substituted aryl group include a methoxyphenyl group and an ethoxynaphthyl group.
식 (Ⅵ) 및 식 (Ⅶ) 로 나타내는 화합물은 구체적으로는, Specifically, the compounds represented by the formulas (VI) and (VII)
디메톡시나프탈렌, 디에톡시나프탈렌, 디프로폭시나프탈렌, 디이소프로폭시나프탈렌, 디부톡시나프탈렌 등의 디알콕시나프탈렌류Dialkoxynaphthalenes such as dimethoxynaphthalene, diethoxynaphthalene, dipropoxynaphthalene, diisopropoxynaphthalene, dibutoxynaphthalene and the like
디메톡시안트라센, 디에톡시안트라센, 디프로폭시안트라센, 디이소프로폭시안트라센, 디부톡시안트라센, 디펜타옥시안트라센, 디헥사옥시안트라센, 메톡시에톡시안트라센, 메톡시프로폭시안트라센, 메톡시이소프로폭시안트라센, 메톡시부톡시안트라센, 에톡시프로폭시안트라센, 에톡시이소프로폭시안트라센, 에톡시부톡시안트라센, 프로폭시이소프로폭시안트라센, 프로폭시부톡시안트라센, 이소프로폭시부톡시안트라센 등의 디알콕시안트라센류 But are not limited to, dimethoxyanthracene, dimethoxyanthracene, diethoxyanthracene, dipropoxyanthracene, diisopropoxyanthracene, dibutoxyanthracene, dipentaoxyanthracene, dihexaooxyanthracene, methoxyethoxyanthracene, methoxypropoxyanthracene, methoxyisopropoxy Examples of the alkoxy include alkoxy groups such as anthracene, methoxybutoxyanthracene, ethoxypropoxyanthracene, ethoxyisopropoxyanthracene, ethoxybutoxyanthracene, propoxyisopropoxyanthracene, propoxybutoxyanthracene, isopropoxybutoxyanthracene, Anthracene
디메톡시나프타센, 디에톡시나프타센, 디프로폭시나프타센, 디이소프로폭시나프타센, 디부톡시나프타센 등의 디알콕시나프타센류 등을 들 수 있다. And dialkoxynaphthacenes such as dimethoxynaphthacene, diethoxynaphthacene, dipropoxynaphthacene, diisopropoxynaphthacene, dibutoxynaphthacene, and the like.
또, 상기 서술한 중합 개시제 (C) 로서 광중합 개시제를 사용해도 된다. A photopolymerization initiator may be used as the polymerization initiator (C) described above.
광중합 개시제로는 예를 들어, 벤조인계 화합물, 벤조페논계 화합물, 티옥산톤계 화합물, 안트라센계 화합물 등을 들 수 있다. Examples of the photopolymerization initiator include a benzoin-based compound, a benzophenone-based compound, a thioxanthone-based compound, and an anthracene-based compound.
벤조인계 화합물로는 예를 들어, 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르, 벤조인이소부틸에테르 등을 들 수 있다. Examples of the benzoin-based compound include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether.
상기 벤조페논계 화합물로는 예를 들어, 벤조페논, o-벤조일벤조산메틸, 4-페닐벤조페논, 4-벤조일-4'-메틸디페닐설파이드, 3,3',4,4'-테트라(tert-부틸퍼옥 시카르보닐)벤조페논, 2,4,6-트리메틸벤조페논 등을 들 수 있다. Examples of the benzophenone compound include benzophenone, methyl o-benzoylbenzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenylsulfide, 3,3 ', 4,4'-tetra tert-butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone, and the like.
상기 티옥산톤계 화합물로는, 예를 들어, 2-이소프로필티옥산톤, 4-이소프로필티옥산톤, 2,4-디에틸티옥산톤, 2,4-디클로로티옥산톤, 1-클로로-4-프로폭시티옥산톤 등을 들 수 있다. Examples of the thioxanthone compound include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1- Propoxyoctanoate and the like.
상기 안트라센계 화합물로는, 예를 들어, 9,10-디메톡시안트라센, 2-에틸-9,10-디메톡시안트라센, 9,10-디에톡시안트라센, 2-에틸-9,10-디에톡시안트라센 등을 들 수 있다. Examples of the anthracene-based compound include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene And the like.
또한, 10-부틸-2-클로로아크리돈, 2-에틸안트라퀴논, 벤질, 9,10-페난트렌퀴논, 캄파퀴논, 페닐글리옥실산메틸, 티타노센 화합물 등을 광중합 개시제로서 사용해도 된다. Further, 10-butyl-2-chloroacridone, 2-ethyl anthraquinone, benzyl, 9,10-phenanthrenequinone, camphaquinone, methyl phenylglyoxylate, a titanocene compound and the like may be used as a photopolymerization initiator.
또, 연쇄 이동을 일으킬 수 있는 기를 갖는 광중합 개시제로서, 일본 공표특허공보 2002-544205호에 기재되어 있는 광중합 개시제를 사용해도 된다. As a photopolymerization initiator having a group capable of causing chain transfer, a photopolymerization initiator described in JP-A-2002-544205 may be used.
상기 연쇄 이동을 일으킬 수 있는 기를 갖는 광중합 개시제로는 예를 들어, 하기 식 (1) ∼ (6) 의 광중합 개시제를 들 수 있다. Examples of the photopolymerization initiator having a group capable of causing chain transfer include photopolymerization initiators represented by the following formulas (1) to (6).
상기 연쇄 이동을 일으킬 수 있는 기를 갖는 광중합 개시제는 수지 (A) 를 구성하는 성분으로서도 사용할 수 있다. The photopolymerization initiator having a group capable of causing chain transfer can also be used as a component constituting the resin (A).
또한, 상기 서술한 중합 개시제와 함께, 중합 개시 보조제 (C-2) 를 사용하는 것이 바람직하다It is also preferable to use the polymerization initiator (C-2) together with the above-mentioned polymerization initiator
중합 개시 보조제 (C-2) 로는 아민 화합물 및 카르복실산 화합물 등을 들 수 있다. Examples of the polymerization initiator (C-2) include an amine compound and a carboxylic acid compound.
아민 화합물로는, 트리에탄올아민, 메틸디에탄올아민, 트리이소프로판올아민 등의 지방족 아민 화합물, 4-디메틸아미노벤조산메틸, 4-디메틸아미노벤조산에틸, 4-디메틸아미노벤조산이소아밀, 4-디메틸아미노벤조산2-에틸헥실, 벤조산2-디메틸아미노에틸, N,N-디메틸파라톨루이딘, 4,4'-비스(디메틸아미노)벤조페논 (통칭 ; 미힐러케톤), 4,4'-비스(디에틸아미노)벤조페논과 같은 방향족 아민 화합물을 들 수 있다. Examples of the amine compound include aliphatic amine compounds such as triethanolamine, methyldiethanolamine and triisopropanolamine; aliphatic amine compounds such as methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 2-ethylhexyl benzoate, 2-dimethylaminoethyl benzoate, N, N-dimethyl paratoluidine, 4,4'-bis (dimethylamino) benzophenone (commonly known as Michler's ketone), 4,4'- ) Benzophenone. ≪ / RTI >
카르복실산 화합물로는, 페닐티오아세트산, 메틸페닐티오아세트산, 에틸페닐티오아세트산, 메틸에틸페닐티오아세트산, 디메틸페닐티오아세트산, 메톡시페닐티오아세트산, 디메톡시페닐티오아세트산, 클로로페닐티오아세트산, 디클로로페닐티오아세트산, N-페닐글리신, 페녹시아세트산, 나프틸티오아세트산, N-나프틸글리신, 나프톡시아세트산 등의 방향족 헤테로아세트산류를 들 수 있다. Examples of the carboxylic acid compound include phenylthioacetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, dimethylphenylthioacetic acid, methoxyphenylthioacetic acid, dimethoxyphenylthioacetic acid, chlorophenylthioacetic acid, dichlorophenyl And aromatic heteroacetic acids such as thioacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine, and naphthoxyacetic acid.
중합 개시제 (C) 의 함유량은 수지 (A) 및 중합성 화합물 (B) 의 합계량에 대하여 질량 분율로 바람직하게는 0.1 ∼ 40 질량%, 보다 바람직하게는 1 ∼ 30 질량% 이다. The content of the polymerization initiator (C) is preferably 0.1 to 40% by mass, more preferably 1 to 30% by mass, based on the total amount of the resin (A) and the polymerizable compound (B).
중합 개시제 (C) 의 합계량이 이 범위에 있으면, 감광성 수지 조성물이 고감도가 되어, 이 감광성 수지 조성물을 사용하여 형성한 도포막이나 패턴의 강도나, 도포막이나 패턴의 표면에서의 평활성이 양호해지는 경향이 있기 때문에 바람직하다. When the total amount of the polymerization initiator (C) is within this range, the photosensitive resin composition becomes highly sensitive, and the strength of the coating film or pattern formed by using the photosensitive resin composition and the smoothness of the surface of the coating film or pattern become good It is preferable because there is a tendency.
중합 개시 보조제 (C-1) 및/또는 (C-2) 의 사용량은 수지 (A) 및 중합성 화합물 (B) 의 합계량에 대하여 질량 분율로 바람직하게는 0.01 ∼ 50 질량%, 보다 바람직하게는 0.1 ∼ 40 질량% 이다. The amount of the polymerization initiator (C-1) and / or the polymerization initiator (C-2) to be used is preferably 0.01 to 50% by mass, more preferably 0.01 to 50% by mass, based on the total amount of the resin (A) 0.1 to 40% by mass.
중합 개시 보조제 (C-1) 및/또는 (C-2) 의 양이 이 범위에 있으면, 얻어지는 감광성 수지 조성물의 감도가 더욱 높아져, 이 감광성 수지 조성물을 사용하여 형성하는 패턴 기판의 생산성이 향상되는 경향이 있기 때문에 바람직하다. When the amount of the polymerization initiator (C-1) and / or the amount of the polymerization initiator (C-2) is within the above range, the sensitivity of the resulting photosensitive resin composition is further increased and productivity of the pattern substrate formed using the photosensitive resin composition is improved It is preferable because there is a tendency.
특히, 식 (V) 로 나타내는 화합물을 사용하는 경우에는, 그 함유량은 중합 개시 보조제 (C-1) 의 함유량에 대하여, 바람직하게는 50 ∼ 100 %, 보다 바람직하게는 60 ∼ 100 %, 더욱 바람직하게는 65 ∼ 100 % 로 한다. 식 (V) 로 나타내는 화합물의 함유량이 이 범위에 있으면, 이것을 함유하는 감광성 수지 조성물을 사용하여 도포막을 형성했을 때에 도포막의 투명성이 양호해져 바람직하다.Particularly, when the compound represented by the formula (V) is used, the content thereof is preferably 50 to 100%, more preferably 60 to 100%, even more preferably 60 to 100% based on the content of the polymerization initiator (C-1) Is set at 65 to 100%. When the content of the compound represented by the formula (V) is within the above range, transparency of the coating film is favorable when the coating film is formed using the photosensitive resin composition containing the compound.
또, 본 발명의 감광성 수지 조성물은 추가로 다관능 티올 화합물 (T) 을 함유하고 있어도 된다. 이 다관능 티올 화합물 (T) 은 분자 내에 2 개 이상의 설파닐기를 갖는 화합물이다. 그 중에서도, 2 개 이상의 지방족 탄화수소기의 탄소 원자와 결합하는 설파닐기를 2 개 이상 갖는 화합물을 사용하는 경우에는, 본 발명의 감광성 수지 조성물의 감도가 높아지기 때문에 바람직하다. The photosensitive resin composition of the present invention may further contain a polyfunctional thiol compound (T). The polyfunctional thiol compound (T) is a compound having two or more sulfanyl groups in the molecule. Among them, when a compound having two or more sulfanyl groups bonded to carbon atoms of two or more aliphatic hydrocarbon groups is used, the sensitivity of the photosensitive resin composition of the present invention is high, which is preferable.
다관능 티올 화합물 (T) 로는 구체적으로는, 헥산디티올, 데칸디티올, 1,4-디메틸메르캅토벤젠, 부탄디올비스티오프로피오네이트, 부탄디올비스티오글리콜레 이트, 에틸렌글리콜비스티오글리콜레이트, 트리메틸올프로판트리스티오글리콜레이트, 부탄디올비스티오프로피오네이트, 트리메틸올프로판트리스티오프로피오네이트, 트리메틸올프로판트리스티오글리콜레이트, 펜타에리트리톨테트라키스티오프로피오네이트, 펜타에리트리톨테트라키스티오글리콜레이트, 트리스히드록시에틸트리스티오프로피오네이트, 펜타에리트리톨테트라키스(3-메르캅토부틸레이트), 1,4-비스(3-메르캅토부티릴옥시)부탄 등을 들 수 있다. Specific examples of the polyfunctional thiol compound (T) include hexane dithiol, decane dithiol, 1,4-dimethyl mercaptobenzene, butanediol bis-thiophosphate, butanediol bis-thioglycolate, ethylene glycol bis- Trimethylolpropane trisphosphate, trimethylolpropane tristhioglycolate, butanediol bisthiouropionate, trimethylolpropane tristhiopropionate, trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate , Trishydroxyethyl tris thiopropionate, pentaerythritol tetrakis (3-mercaptobutyrate), and 1,4-bis (3-mercaptobutyryloxy) butane.
다관능 티올 화합물 (T) 의 함유량은 중합 개시제 (C) 에 대하여 질량 분율로 바람직하게는 0.5 ∼ 100 질량%, 보다 바람직하게는 1 ∼ 90 질량% 이다. 또, 다관능 티올 화합물의 함유량은 바인더 수지 (A) 및 광중합성 화합물 (C) 의 합계량에 대하여 질량 분율로 바람직하게는 0.1 ∼ 20 질량%, 보다 바람직하게는 1 ∼ 10 질량% 이다. 다관능 티올 화합물 (T) 의 함유량이 이 범위에 있으면 감도가 높아지고, 또 현상성이 양호해지는 경향이 있기 때문에 바람직하다. The content of the polyfunctional thiol compound (T) is preferably 0.5 to 100% by mass, more preferably 1 to 90% by mass, based on the mass of the polymerization initiator (C). The content of the polyfunctional thiol compound is preferably 0.1 to 20% by mass, more preferably 1 to 10% by mass, based on the total amount of the binder resin (A) and the photopolymerizable compound (C). When the content of the polyfunctional thiol compound (T) is within this range, the sensitivity is preferably high and the developing property tends to be good.
본 발명의 감광성 수지 조성물에 사용되는 용제 (D) 는 수지 (A), 중합성 화합물 (B) 및 중합 개시제 (C) 등의 구성 성분을 균일하게 용해시키고, 또한 각 성분과 반응하지 않는 것이 바람직하다. 또, 용제 (D) 는 적어도 특정 디알킬렌글리콜디알킬에테르와, 특정 알코올의 쌍방을 함유하는 용제인 것이 보다 바람직하다. 또한, 디알킬렌글리콜디알킬에테르 및 알코올은 각각 단독으로 사용해도 되고, 2 종 이상을 병용해도 된다. The solvent (D) used in the photosensitive resin composition of the present invention preferably dissolves the components such as the resin (A), the polymerizable compound (B) and the polymerization initiator (C) uniformly and does not react with each component Do. It is more preferable that the solvent (D) is a solvent containing at least both of a specific dialkylene glycol dialkyl ether and a specific alcohol. The dialkylene glycol dialkyl ether and the alcohol may be used alone or in combination of two or more.
디알킬렌글리콜디알킬에테르로는, 탄소수 1 ∼ 3 의 알킬렌기 및 탄소수 1 ∼ 4 의 알킬기를 각각 2 개 이상 함유하는 용매로서, 알킬렌기 및 알킬기는 각각 동일하거나 또는 상이해도 된다. As the dialkylene glycol dialkyl ether, a solvent containing two or more alkylene groups each having 1 to 3 carbon atoms and an alkyl group having 1 to 4 carbon atoms, the alkylene group and the alkyl group may be the same or different.
이와 같은 디알킬렌글리콜디알킬에테르로는 예를 들어, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜에틸메틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜디-n-프로필에테르, 디에틸렌글리콜이소프로필메틸에테르, 디에틸렌글리콜부틸메틸에테르, 디에틸렌글리콜디부틸에테르, 디프로필렌글리콜디메틸에테르, 디프로필렌글리콜에틸메틸에테르, 디프로필렌글리콜디에틸에테르, 디프로필렌글리콜메틸프로필에테르, 디프로필렌글리콜부틸메틸에테르, 디프로필렌글리콜에틸프로필에테르, 디프로필렌글리콜부틸에틸에테르, 디프로필렌글리콜부틸프로필에테르, 디프로필렌글리콜디부틸에테르 등을 들 수 있다. 그 중에서도, 디에틸렌글리콜에틸메틸에테르가 바람직하다. Examples of such dialkylene glycol dialkyl ethers include diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, diethylene glycol di-n-propyl ether, diethylene glycol isopropyl Methyl ethyl ether, diethylene glycol butyl methyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether, dipropylene glycol ethyl methyl ether, dipropylene glycol diethyl ether, dipropylene glycol methyl propyl ether, dipropylene glycol butyl methyl ether , Dipropylene glycol ethyl propyl ether, dipropylene glycol butyl ethyl ether, dipropylene glycol butyl propyl ether, and dipropylene glycol dibutyl ether. Among them, diethylene glycol ethyl methyl ether is preferable.
디알킬렌글리콜디알킬에테르는 용매 (D) 전체량에 대하여, 바람직하게는 30 ∼ 90 질량%, 보다 바람직하게는 30 ∼ 80 질량%, 더욱 바람직하게는 30 ∼ 70 질량% 로 함유된다. 이 범위로 함으로써 도포막의 건조 불균일을 억제할 수 있다. 요컨대, 도포막을 건조시키는 경우, 통상 감압 건조로 용제를 건조시키는데, 건조 시간을 단축시키는 경향이 있기 때문에 단시간에 감압이 이루어진다. 그 때, 용제가 돌비 (突沸) 하여 건조 불균일의 발생 원인이 되는데, 디알킬렌글리콜디알킬에테르를 이 범위에서 사용함으로써, 유효하게 도포막의 건조 불균일을 방지할 수 있다. The dialkylene glycol dialkyl ether is contained preferably in an amount of 30 to 90 mass%, more preferably 30 to 80 mass%, and still more preferably 30 to 70 mass%, based on the total amount of the solvent (D). By setting this range, drying non-uniformity of the coating film can be suppressed. In short, when the coated film is dried, the solvent is usually dried by reduced pressure drying, and the pressure is reduced in a short time because the drying time is shortened. At this time, the solvent causes sudden boiling and causes drying non-uniformity. By using the dialkylene glycol dialkyl ether in this range, it is possible to effectively prevent drying non-uniformity of the coating film.
알코올로는 탄소수 1 ∼ 6 의 알코올이 바람직하다. 이 알코올은 모노알코올이어도 되고, 2 가 이상의 다가 알코올이어도 된다. As the alcohol, an alcohol having 1 to 6 carbon atoms is preferable. The alcohol may be a monoalcohol or a polyhydric alcohol having two or more hydroxyl groups.
이와 같은 알코올로는, 메탄올, 에탄올, 프로판올, 부탄올, 펜탄올, 헥산올, 시클로헥산올, 프로필렌글리콜메틸에테르, 프로필렌글리콜에틸에테르, 프로필렌글리콜프로필에테르, 에틸렌글리콜, 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노프로필에테르, 에틸렌글리콜모노부틸에테르, 락트산메틸, 락트산에틸, 락트산프로필, 2-메틸락트산메틸, 디아세톤알코올, 3-메톡시부탄올, 글리세린, 2-히드록시프로피온산에틸, 2-히드록시-2-메틸프로피온산메틸, 2-히드록시-2-메틸프로피온산에틸, 3-히드록시프로피온산메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산프로필, 히드록시아세트산메틸, 히드록시아세트산에틸, 히드록시아세트산부틸 등을 들 수 있다. 그 중에서도, 3-메톡시부탄올이 바람직하다. Examples of such alcohols include methanol, ethanol, propanol, butanol, pentanol, hexanol, cyclohexanol, propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol propyl ether, ethylene glycol, ethylene glycol monomethyl ether, ethylene glycol Propylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, methyl lactate, ethyl lactate, propyl lactate, methyl 2-methyl lactate, diacetone alcohol, 3-methoxybutanol, glycerin, Methyl 2-hydroxypropionate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, methylhydroxyacetate, hydroxy Ethyl acetate, butyl hydroxyacetate, and the like. Among them, 3-methoxybutanol is preferred.
알코올은 용매 (D) 전체량에 대하여, 바람직하게는 10 ∼ 50 질량%, 보다 바람직하게는 10 ∼ 45 질량%, 더욱 바람직하게는 15 ∼ 40 질량% 로 함유된다.The content of the alcohol is preferably 10 to 50 mass%, more preferably 10 to 45 mass%, and still more preferably 15 to 40 mass% with respect to the total amount of the solvent (D).
알코올을 이 범위로 함유함으로써, 수지 등의 용해성을 충분히 얻을 수 있음과 함께, 적당한 점도로 조정하여 얻어지는 도포막의 균일성을 도모할 수 있다. 또, 슬릿 다이 코터를 사용하여 감광성 수지 조성물의 도포를 실시하는 경우에 있어서도, 노즐 선단의 건조를 방지하여 건조물에 의한 이물질의 석출을 억제하여, 이물질에서 기인되는 세로줄이 발생하는 것을 확실히 방지할 수 있게 된다. By containing the alcohol in this range, the solubility of the resin and the like can be sufficiently obtained, and the uniformity of the coating film obtained by adjusting the viscosity to an appropriate level can be achieved. In addition, even when the photosensitive resin composition is applied using a slit die coater, the drying of the tip of the nozzle is prevented to prevent the foreign matter from being precipitated by the dried material, and the generation of vertical lines caused by the foreign matter can be reliably prevented .
또, 필요에 따라 추가로 이하의 용매를 병용해도 된다. Further, if necessary, the following solvents may be used in combination.
예를 들어, 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트, 에틸렌글리콜모노부틸에테르아세테이트, 에틸렌글리콜모노에틸에테르아세테이트 등의 에틸렌글 리콜알킬에테르아세테이트류 ; For example, ethylene glycol alkyl ether acetates such as methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate and ethylene glycol monoethyl ether acetate;
프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노프로필에테르아세테이트, 메톡시부틸아세테이트, 메톡시펜틸아세테이트 등의 알킬렌글리콜알킬에테르아세테이트류 ;Alkylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxybutyl acetate, and methoxypentyl acetate;
프로필렌글리콜모노부틸에테르 등의 탄소수 7 이상의 프로필렌글리콜모노알킬에테르류 ; Propylene glycol monoalkyl ethers having 7 or more carbon atoms such as propylene glycol monobutyl ether;
프로필렌글리콜디메틸에테르, 프로필렌글리콜디에틸에테르, 프로필렌글리콜에틸메틸에테르, 프로필렌글리콜디프로필에테르프로필렌글리콜프로필메틸에테르, 프로필렌글리콜에틸프로필에테르 등의 프로필렌글리콜디알킬에테르류Propylene glycol dialkyl ethers such as propylene glycol dimethyl ether, propylene glycol diethyl ether, propylene glycol ethyl methyl ether, propylene glycol dipropyl ether propylene glycol propyl methyl ether and propylene glycol ethyl propyl ether
프로필렌글리콜메틸에테르프로피오네이트, 프로필렌글리콜에틸에테르프로피오네이트, 프로필렌글리콜프로필에테르프로피오네이트, 프로필렌글리콜부틸에테르프로피오네이트 등의 프로필렌글리콜알킬에테르프로피오네이트류 ; Propylene glycol alkyl ether propionates such as propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate and propylene glycol butyl ether propionate;
프로폭시부탄올, 부톡시부탄올 등의 탄소수 7 이상의 부탄디올모노알킬에테르류 ;Butanediol monoalkyl ethers having 7 or more carbon atoms such as propoxybutanol and butoxybutanol;
메톡시부틸아세테이트, 에톡시부틸아세테이트, 프로폭시부틸아세테이트, 부톡시부틸아세테이트 등의 부탄디올모노알킬에테르아세테이트류 ; Butanediol monoalkyl ether acetates such as methoxybutyl acetate, ethoxybutyl acetate, propoxybutyl acetate and butoxybutyl acetate;
메톡시부틸프로피오네이트, 에톡시부틸프로피오네이트, 프로폭시부틸프로피오네이트, 부톡시부틸프로피오네이트 등의 부탄디올모노알킬에테르프로피오네이트류 ; Butanediol monoalkyl ether propionates such as methoxy butyl propionate, ethoxy butyl propionate, propoxy butyl propionate and butoxy butyl propionate;
벤젠, 톨루엔, 자일렌, 메시틸렌 등의 방향족 탄화수소류 ; Aromatic hydrocarbons such as benzene, toluene, xylene and mesitylene;
메틸에틸케톤, 아세톤, 메틸아밀케톤, 메틸이소부틸케톤, 시클로헥사논 등의 케톤류 ; Ketones such as methyl ethyl ketone, acetone, methyl amyl ketone, methyl isobutyl ketone, and cyclohexanone;
아세트산메틸, 아세트산에틸, 아세트산프로필, 아세트산부틸, 메톡시아세트산메틸, 메톡시아세트산에틸, 메톡시아세트산프로필, 메톡시아세트산부틸, 에톡시아세트산메틸, 에톡시아세트산에틸, 에톡시아세트산프로필, 에톡시아세트산부틸, 프로폭시아세트산메틸, 프로폭시아세트산에틸, 프로폭시아세트산프로필, 프로폭시아세트산부틸, 부톡시아세트산메틸, 부톡시아세트산에틸, 부톡시아세트산프로필, 부톡시아세트산부틸, 2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산프로필, 2-메톡시프로피온산부틸, 2-에톡시프로피온산메틸, 2-에톡시프로피온산에틸, 2-에톡시프로피온산프로필, 2-에톡시프로피온산부틸, 2-부톡시프로피온산메틸, 2-부톡시프로피온산에틸, 2-부톡시프로피온산프로필, 2-부톡시프로피온산부틸, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-메톡시프로피온산프로필, 3-메톡시프로피온산부틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산프로필, 3-에톡시프로피온산부틸, 3-프로폭시프로피온산메틸, 3-프로폭시프로피온산에틸, 3-프로폭시프로피온산프로필, 3-프로폭시프로피온산부틸, 3-부톡시프로피온산메틸, 3-부톡시프로피온산에틸, 3-부톡시프로피온산프로필, 3-부톡시프로피온산부틸 등의 에스테르류 ; And examples thereof include methyl acetate, ethyl acetate, propyl acetate, butyl acetate, methyl methoxyacetate, ethyl methoxyacetate, propyl methoxyacetate, butyl methoxyacetate, ethoxyacetate, ethoxyacetate, ethoxyacetate, Propoxyacetic acid, propoxyacetic acid, propoxyacetic acid, propoxyacetic acid, propoxyacetic acid, butoxyacetic acid, butoxyacetic acid, butoxyacetic acid, butoxyacetic acid, Ethoxypropionate, propyl 2-ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, ethyl 2- methoxypropionate, propyl 2-methoxypropionate, butyl 2-methoxypropionate, Butoxy propionate, ethyl 2-butoxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, 3-methoxy Ethoxypropionate, propyl 3-ethoxypropionate, propyl 3-ethoxypropionate, propyl 3-ethoxypropionate, propyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, Propoxy propionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, butyl 3-propoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, propyl 3-propoxypropionate, butyl 3-propoxypropionate, Esters such as propyl propionate and butyl 3-butoxy propionate;
락트산부틸, 3-히드록시프로피온산부틸, 2-히드록시-3-메틸부탄산메틸 등의 탄소수 7 이상의 히드록시기 함유 에스테르류 ; Esters having a hydroxyl group having 7 or more carbon atoms such as butyl lactate, butyl 3-hydroxypropionate and methyl 2-hydroxy-3-methylbutanoate;
테트라히드로푸란, 피란 등의 고리형 에테르류 ; Cyclic ethers such as tetrahydrofuran and pyran;
γ-부티로락톤 등의 고리형 에스테르류 등을 들 수 있다. and cyclic esters such as? -butyrolactone.
상기 용제 중, 도포성, 건조성의 면에서, 비점이 100 ℃ ∼ 200 ℃ 인 유기 용제가 바람직하다. 그 중에서도, 알킬렌글리콜알킬에테르아세테이트류, 케톤류, 부탄디올알킬에테르아세테이트류, 탄소수 7 이상의 부탄디올모노알킬에테르류, 3-에톡시프로피온산에틸, 3-메톡시프로피온산메틸 등의 에스테르류가 보다 바람직하고, 더욱 바람직하게는 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 시클로헥사논, 메톡시부틸아세테이트, 3-에톡시프로피온산에틸, 3-메톡시프로피온산메틸이다. Among these solvents, an organic solvent having a boiling point of 100 占 폚 to 200 占 폚 is preferable from the viewpoint of coatability and drying property. Among them, esters such as alkylene glycol alkyl ether acetates, ketones, butanediol alkyl ether acetates, butanediol monoalkyl ethers having 7 or more carbon atoms, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate are more preferable, More preferred are propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, methoxybutyl acetate, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate.
단, 상기 서술한 디알킬렌글리콜디알킬에테르 및 알코올만을 사용하는 것이 바람직하다. However, it is preferable to use only the above-mentioned dialkylene glycol dialkyl ether and alcohol.
본 발명의 감광성 수지 조성물에 있어서의 용제 (D) 의 함유량은 감광성 수지 조성물에 대하여 질량 분율로 60 ∼ 90 질량% 가 바람직하고, 65 ∼ 85 질량% 가 보다 바람직하다. 용제 (D) 의 함유량이 이 범위에 있으면, 스핀 코터, 슬릿 & 스핀 코터, 슬릿 코터 (다이 코터, 커튼 플로우 코터라고도 불리는 경우가 있다), 잉크젯, 롤 코터, 딥 코터 등의 각종 도포 장치에 있어서, 양호한 도포성을 기대할 수 있다. The content of the solvent (D) in the photosensitive resin composition of the present invention is preferably 60 to 90% by mass, more preferably 65 to 85% by mass, based on the mass of the photosensitive resin composition. When the content of the solvent (D) is within this range, in the various coating devices such as a spin coater, a slit & spin coater, a slit coater (also referred to as a die coater or a curtain flow coater), an ink jet, a roll coater, , A good coating property can be expected.
본 발명의 감광성 수지 조성물은 안료 및 염료 등의 착색제를 실질적으로 함유하지 않는다. 즉, 본 발명의 감광성 수지 조성물에 있어서, 조성물 전체에 대한 착색제의 함량은 예를 들어, 질량 분율로 1 질량% 미만, 바람직하게는 0.5 질량% 미만이다. The photosensitive resin composition of the present invention contains substantially no coloring agent such as pigment and dye. That is, in the photosensitive resin composition of the present invention, the content of the colorant in the entire composition is, for example, less than 1% by mass, preferably less than 0.5% by mass.
예를 들어, 본 발명의 감광성 수지 조성물은 당해 분야에서 사용되는 이하의 착색제를 실질적으로 함유하지 않는다. For example, the photosensitive resin composition of the present invention is substantially free from the following colorants used in the art.
컬러 인덱스 (The Society of Dyers and Colourists 출판) 에 의해 피그먼트 (Pigment) 로 분류되어 있는 화합물, 구체적으로는,A compound classified as a pigment by the color index (published by The Society of Dyers and Colourists), specifically,
C.I. 피그먼트 옐로우 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 128, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 194, 214 등의 황색 안료 ; C.I. Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 128, 137, 138, 139 , 147, 148, 150, 153, 154, 166, 173, 194 and 214;
C.I. 피그먼트 오렌지 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73 등의 오렌지색 안료 ; C.I. Orange pigments such as Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73;
C.I. 피그먼트 레드 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265 등의 적색 안료 ; C.I. Red pigments such as Pigment Red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, ;
C.I. 피그먼트 블루 15, 15 : 3, 15 : 4, 15 : 6, 60 등의 청색 안료 ; C.I. Pigment Blue 15, 15: 3, 15: 4, 15: 6, and 60;
C.I. 피그먼트 바이올렛 1, 19, 23, 29, 32, 36, 38 등의 바이올렛색 안료 ; C.I. Violet pigments such as Pigment Violet 1, 19, 23, 29, 32, 36, 38;
C.I. 피그먼트 그린 7, 36 등의 녹색 안료 ; C.I. Green pigments such as Pigment Green 7, 36;
C.I. 피그먼트 브라운 23, 25 등의 브라운색 안료 ; C.I. Brown pigments such as Pigment Brown 23 and 25;
C.I. 피그먼트 블랙 1, 7 등의 흑색 안료. C.I. Pigment Black 1, 7 black pigments.
본 발명의 감광성 수지 조성물에는, 필요에 따라 충전제, 다른 고분자 화합물, 계면 활성제, 밀착 촉진제, 산화 방지제, 자외선 흡수제, 광 안정제, 연쇄 이동제 등의 여러 가지 첨가제를 병용해도 된다. Various additives such as fillers, other polymer compounds, surfactants, adhesion promoters, antioxidants, ultraviolet absorbers, light stabilizers, and chain transfer agents may be used in combination in the photosensitive resin composition of the present invention.
충전제로서 예를 들어, 유리, 실리카, 알루미나 등이 예시된다. Examples of the filler include glass, silica, alumina and the like.
다른 고분자 화합물로는 예를 들어, 에폭시 수지, 말레이미드 수지 등의 경화성 수지 폴리비닐알코올, 폴리아크릴산, 폴리에틸렌글리콜모노알킬에테르, 폴리 플루오로알킬아크릴레이트, 폴리에스테르, 폴리우레탄 등의 열가소성 수지 등을 들 수 있다. Examples of the other polymer compound include thermoplastic resins such as curable resin polyvinyl alcohol such as epoxy resin and maleimide resin, polyacrylic acid, polyethylene glycol monoalkyl ether, polyfluoroalkyl acrylate, polyester, polyurethane and the like .
계면 활성제로는 실리콘계, 불소계, 에스테르계, 카티온계, 아니온계, 노니온계, 양쪽성 등의 계면 활성제 등의 어느 것이어도 된다. 구체적으로는, 폴리옥시에틸렌알킬에테르류, 폴리옥시에틸렌알킬페닐에테르류, 폴리에틸렌글리콜디에스테르류, 소르비탄 지방산 에스테르류, 지방산 변성 폴리에스테르류, 3 급 아민 변성 폴리우레탄류, 폴리에틸렌이민류 등 이외에, 시판되는 계면 활성제를 사용할 수 있다. 예를 들어, 상품명으로 KP (신에츠 화학 공업 (주) 제조), 폴리플로우 (쿄에이 화학 (주) 제조), 에프톱 (미쓰비시 마테리알 전자 화성 (주)), 메가팩 (DIC (주) 제조), 후로라드 (스미또모 3M (주) 제조), 사프론 (AGC 세이미 케미칼 (주) 제조), 솔스퍼스 (제네카 (주) 제조), EFKA (CIBA 사 제조), 아지스파 PB821 (아지노모토 (주) 제조) 등을 들 수 있다.The surfactant may be any of a silicone surfactant, a fluorine surfactant, an ester surfactant, a cationic surfactant, an anionic surfactant, a nonionic surfactant, and an amphoteric surfactant. Specific examples include polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyethylene glycol diesters, sorbitan fatty acid esters, fatty acid-modified polyesters, tertiary amine-modified polyurethanes, polyethyleneimines and the like , Commercially available surfactants can be used. (Manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow (manufactured by Kyoei Chemical Co., Ltd.), F-top (manufactured by Mitsubishi Materials Corporation), Megapack (manufactured by DIC Corporation) (Manufactured by Sumitomo 3M Ltd.), Safron (manufactured by AGC Seiyam Chemical Co., Ltd.), Solsperse (manufactured by Zeneca), EFKA (manufactured by CIBA), Ajisera PB821 Ltd.) and the like.
밀착 촉진제로는 예를 들어, 비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필메틸디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필메틸디메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 3-클로로프로필메틸디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴로일옥시프로필트리메톡시실란, 3-메르캅토프로 필트리메톡시실란 등을 들 수 있다. Examples of the adhesion promoter include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris (2-methoxyethoxy) silane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, Aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2 (aminoethyl) - (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, 3- Tripropyl trimethoxysilane, and the like.
산화 방지제로는 예를 들어, 2-tert-부틸-6-(3-tert-부틸-2-히드록시-5-메틸벤질)-4-메틸페닐아크릴레이트, 2-[1-(2-히드록시-3,5-디-tert-펜틸페닐)에틸]-4,6-디-tert-펜틸페닐아크릴레이트, 6-[3-(3-tert-부틸-4-히드록시-5-메틸페닐)프로폭시]-2,4,8,10-테트라-tert-부틸디벤즈[d,f][1,3,2]디옥사포스페핀, 3,9-비스[2-{3-(3-tert-부틸-4-히드록시-5-메틸페닐)프로피오닐옥시}-1,1-디메틸에틸]-2,4,8,10-테트라옥사스피로[5.5]운데칸, 2,2'-메틸렌비스(6-tert-부틸-4-메틸페놀), 4,4'-부틸리덴비스(6-tert-부틸-3-메틸페놀), 4,4'-티오비스(2-tert-부틸-5-메틸페놀), 2,2'-티오비스(6-tert-부틸-4-메틸페놀), 디라우릴3,3'-티오디프로피오네이트, 디미리스틸3,3'-티오디프로피오네이트, 디스테아릴3,3'-티오디프로피오네이트, 펜타에리트리틸테트라키스(3-라우릴티오프로피오네이트), 1,3,5-트리스(3,5-디-tert-부틸-4-히드록시벤질)-1,3,5-트리아진-2,4,6(1H,3H,5H)-트리온, 3,3',3",5,5',5"-헥사-tert-부틸-a,a',a"-(메시틸렌-2,4,6-트리일)트리-p-크레졸, 펜타에리트리톨테트라키스[3-(3,5-디-tert-부틸-4-히드록시페닐)프로피오네이트], 2,6-디-tert-부틸-4-메틸페놀 등을 들 수 있다. Examples of the antioxidant include 2-tert-butyl-6- (3- tert -butyl-2-hydroxy-5-methylbenzyl) -4-methylphenyl acrylate, 2- [1- -3,5-di-tert-butylphenyl) ethyl] -4,6-di-tert-pentylphenyl acrylate, 6- [3- (3- Bis [2- {3- [3- tert -butyl] benzo [d, f] [1,3,2] dioxaphospepine, 3,9- -Butyl-4-hydroxy-5-methylphenyl) propionyloxy} -1,1-dimethylethyl] -2,4,8,10-tetraoxaspiro [5.5] undecane, 2,2'-methylenebis 6-tert-butyl-4-methylphenol), 4,4'-butylidenebis (6-tert- Methylphenol), 2,2'-thiobis (6-tert-butyl-4-methylphenol), dilauryl 3,3'-thiodipropionate, dimyristyl 3,3'-thiodipropionate , Distearyl 3,3'-thiodipropionate, pentaerythrityl tetrakis (3-laurylthiopropionate), 1,3,5-tris (3,5-di-tert- 4- 3,3 ', 3 ", 5,5', 5" -hexa-tert-butoxycarbonylamino) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) Butyl-a, a ', a "- (mesitylene-2,4,6-triyl) tri-p-cresol, pentaerythritol tetrakis [3- (3,5- Hydroxyphenyl) propionate], 2,6-di-tert-butyl-4-methylphenol and the like.
자외선 흡수제로는 예를 들어, 2-(2-히드록시-5-tert-부틸페닐)-2H-벤조트리아졸, 옥틸-3-[3-tert-부틸-4-히드록시-5-(5-클로로-2H-벤조트리아졸-2-일)페닐]프로피오네이트, 2-[4-[(2-히드록시-3-도데실옥시프로필)옥시]-2-히드록시페닐]-4,6-비스(2,4-디메틸페닐)-1,3,5-트리아진, 2-[4-[(2-히드록시-3-(2'-에틸)헥실)옥시]-2-히드록시페닐]-4,6-비스(2,4-디메틸페닐)-1,3,5-트리아진, 2,4-비스(2-히드록시- 4-부틸옥시페닐)-6-(2,4-비스-부틸옥시페닐)-1,3,5-트리아진, 2-(2-히드록시-4-[1-옥틸옥시카르보닐에톡시]페닐)-4,6-비스(4-페닐페닐)-1,3,5-트리아진, 2-(2H-벤조트리아졸-2-일)-4,6-비스(1-메틸-1-페닐에틸)페놀, 2-(2H-벤조트리아졸-2-일)-6-(1-메틸-1-페닐에틸)-4-(1,1,3,3-테트라메틸부틸)페놀, 2-(3-tert-부틸-2-히드록시-5-메틸페닐)-5-클로로벤조트리아졸, 알콕시벤조페논 등을 들 수 있다. Examples of the ultraviolet absorber include 2- (2-hydroxy-5-tert-butylphenyl) -2H-benzotriazole, octyl-3- [3- Phenyl] propionate, 2- [4 - [(2-hydroxy-3-dodecyloxypropyl) oxy] -2- (2,4-dimethylphenyl) -1,3,5-triazine, 2- [4 - [(2-hydroxy-3- Phenyl] -4,6-bis (2,4-dimethylphenyl) -1,3,5-triazine, 2,4-bis (2-hydroxy- (2-hydroxy-4- [1-octyloxycarbonylethoxy] phenyl) -4,6-bis (4-phenylphenyl) -1,3,5-triazine, ) -1,3,5-triazine, 2- (2H-benzotriazol-2-yl) -4,6-bis 2- (3-tert-butyl-2-hydroxy-phenyl) -4- (1,1,3,3-tetramethylbutyl) 5-methylphenyl) -5-chlorobenzotriazole, and alkoxybenzophenone.
광 안정제로는 예를 들어, 숙신산과 (4-히드록시-2,2,6,6-테트라메틸피페리딘-1-일)에탄올로 이루어지는 고분자, N,N',N",N'''-테트라키스(4,6-비스(부틸- (N-메틸-2,2,6,6-테트라메틸피페리딘-4-일)아미노)트리아진-2-일)-4,7-디아자데칸-1,10-디아민, 데칸디오익애시드와 비스(2,2,6,6-테트라메틸-1-(옥틸옥시)-4-피페리디닐)에스테르와 1,1-디메틸에틸히드로퍼옥사이드의 반응물, 비스(1,2,2,6,6-펜타메틸-4-피페리디닐)-[[3,5-비스(1,1-디메틸에틸)-4-히드록시페닐]메틸]부틸말로네이트, 2,4-비스[N-부틸-N-(1-시클로헥실옥시-2,2,6,6-테트라메틸피페리딘-4-일)아미노]-6-(2-히드록시에틸아민)-1,3,5-트리아진, 비스(1,2,2,6,6-펜타메틸-4-피페리디닐)세바케이트, 메틸(1,2,2,6,6-펜타메틸-4-피페리디닐)세바케이트 등을 들 수 있다. Examples of the light stabilizer include a polymer comprising succinic acid and (4-hydroxy-2,2,6,6-tetramethylpiperidin-1-yl) ethanol, N, N ', N " -Tetrakis (4,6-bis (butyl- (N-methyl-2,2,6,6-tetramethylpiperidin-4- yl) amino) triazin- (2,2,6,6-tetramethyl-1- (octyloxy) -4-piperidinyl) ester and 1,1-dimethylethylhydroxy ester of diazadecane-1,10- (1,2,2,6,6-pentamethyl-4-piperidinyl) - [[3,5-bis (1,1-dimethylethyl) -4- hydroxyphenyl] methyl ] Butyl malonate, 2,4-bis [N-butyl-N- (1-cyclohexyloxy-2,2,6,6-tetramethylpiperidin- - (hydroxyethylamine) -1,3,5-triazine, bis (1,2,2,6,6-pentamethyl-4-piperidinyl) sebacate, methyl Pentamethyl-4-piperidinyl) sebacate, and the like.
연쇄 이동제로는 예를 들어, 도데실메르캅탄, 2,4-디페닐-4-메틸-1-펜텐 등을 들 수 있다. Examples of the chain transfer agent include dodecyl mercaptan, 2,4-diphenyl-4-methyl-1-pentene, and the like.
본 발명의 감광성 수지 조성물은 예를 들어, 후술하는 바와 같이 기재, 예를 들어, 유리, 금속, 플라스틱 등의 기판, 컬러 필터, 각종 절연막 또는 도전막, 구동 회로 등을 형성한 이들 기판 상에 도포함으로써 도포막으로서 형성할 수 있다. 도포막은 건조 및 경화시킨 것이 바람직하다. 또, 얻어진 도포막을 원하는 형상으로 패터닝하여 패턴으로서 사용할 수도 있다. 또한 이들 도포막 및/또는 패턴을 표시 장치 등의 구성 부품의 일부로서 형성하여 사용해도 된다. The photosensitive resin composition of the present invention can be applied to a substrate such as a substrate such as glass, metal, and plastic, a color filter, various insulating films or conductive films, a driving circuit, etc., Whereby a coating film can be formed. The coating film is preferably dried and cured. The obtained coating film may be patterned into a desired shape and used as a pattern. These coating films and / or patterns may also be formed and used as part of component parts such as display devices.
또, 본 발명의 경화성 수지 조성물은 광로 길이가 1 ㎝ 인 석영 셀에 충전시키고, 분광 광도계를 이용하여, 측정 파장 400 ∼ 700 ㎚ 의 조건 하에서 투과율을 측정하면, 평균 투과율이 바람직하게는 70 % 이상이며, 보다 바람직하게는 75 % 이상이다. 이로써, 가시광 영역에서 투명한 패턴이나 도포막을 형성할 수 있다. When the curable resin composition of the present invention is packed in a quartz cell having an optical path length of 1 cm and the transmittance is measured under the condition of a measurement wavelength of 400 to 700 nm using a spectrophotometer, the average transmittance is preferably 70% or more , And more preferably at least 75%. This makes it possible to form a transparent pattern or a coating film in the visible light region.
먼저, 본 발명의 감광성 수지 조성물을 기재 상에 도포한다. First, the photosensitive resin composition of the present invention is applied onto a substrate.
도포는 상기 서술한 바와 같이 스핀 코터, 슬릿 & 스핀 코터, 슬릿 코터, 잉크젯, 롤 코터, 딥 코터 등의 각종 도포 장치를 이용하여 실시할 수 있다. 그 중에서도, 용해성, 건조 방지, 이물질의 발생 방지 등 면에서, 슬릿 도포법에 의한 도포, 즉 슬릿 & 스핀 코터 및 슬릿 코터 등을 이용하는 도포를 실시하는 것이 바람직하다. The application can be carried out using various coating apparatuses such as a spin coater, a slit & spin coater, a slit coater, an ink jet, a roll coater and a dip coater as described above. Among them, it is preferable to apply coating using a slit coating method, that is, coating using a slit & spin coater, a slit coater or the like, in terms of solubility, prevention of drying, prevention of generation of foreign matter,
이어서, 건조 및/또는 프리베이크하여 용제 등의 휘발 성분을 제거하는 것이 바람직하다. 이로써, 평활한 미경화 도포막을 얻을 수 있다. Then, it is preferable to remove the volatile components such as a solvent by drying and / or prebaking. Thus, a smooth uncured coating film can be obtained.
이 경우의 도포막의 막 두께는 특별히 한정되지 않고, 사용하는 재료, 용도 등에 따라 적절히 조정할 수 있으며, 예를 들어 1 ∼ 6 ㎛ 정도가 예시된다. The film thickness of the coating film in this case is not particularly limited and can be appropriately adjusted depending on the material to be used, the use, and the like, and is, for example, about 1 to 6 mu m.
또한, 얻어진 미경화 도포막에, 목적으로 하는 패턴을 형성하기 위한 마스크를 개재하여, 광 예를 들어, 수은등, 발광 다이오드로부터 발생하는 자외선 등을 조사 한다. 이 때의 마스크 형상은 특별히 한정되지 않고, 여러 가지 형상을 들 수 있다. 또, 선폭 등도 마스크 사이즈 등에 따라 적절히 조정할 수 있다.Further, ultraviolet rays or the like generated from light-emitting diodes or the like is irradiated to the obtained uncured coating film through a mask for forming a desired pattern. The shape of the mask at this time is not particularly limited, and various shapes can be cited. In addition, the line width and the like can be appropriately adjusted in accordance with the mask size or the like.
최근의 노광기에서는, 350 ㎚ 미만의 광을, 이 파장역을 컷하는 필터를 이용하여 컷하거나, 436 ㎚ 부근, 408 ㎚ 부근, 365 ㎚ 부근의 광을, 이들 파장역을 취출하는 밴드 패스 필터를 이용하여 선택적으로 취출하여, 노광면 전체에 균일하게 평행 광선을 조사하거나 할 수 있다. 이 때 마스크와 기재의 정확한 위치 맞춤을 실시하기 위해서, 마스크 얼라이너, 스테퍼 등의 장치를 사용해도 된다. In recent exposures, light having a wavelength of less than 350 nm is cut using a filter that cuts this wavelength region, or light having wavelengths around 436 nm, around 408 nm, and around 365 nm is extracted by a band- So that the parallel rays can be uniformly irradiated onto the entire exposure surface. In this case, a mask aligner, a stepper, or the like may be used to accurately align the mask and the substrate.
그 후, 도포막을 알칼리 수용액에 접촉시켜 소정 부분, 예를 들어, 비노광부를 용해시키고 현상함으로써, 목적으로 하는 패턴 형상을 얻을 수 있다. Thereafter, a desired pattern shape can be obtained by bringing the coating film into contact with an aqueous alkali solution to dissolve and develop a predetermined portion, for example, an unexposed portion.
현상 방법은 액 마운팅법, 딥핑법, 스프레이법 등 중 어느 것이어도 된다. 또한 현상시에 기재를 임의의 각도로 기울여도 된다. The developing method may be any of a liquid mounting method, a dipping method, and a spraying method. Also, the base material may be inclined at an arbitrary angle during development.
현상에 사용하는 현상액은 통상 알카리성 화합물과 계면 활성제를 포함하는 수용액이다.The developing solution used for development is usually an aqueous solution containing an alkaline compound and a surfactant.
알카리성 화합물은 무기 및 유기의 알카리성 화합물 중 어느 것이어도 된다. The alkaline compound may be any of inorganic and organic alkaline compounds.
무기 알칼리성 화합물의 구체예로는, 수산화나트륨, 수산화칼륨, 인산수소2나트륨, 인산2수소나트륨, 인산수소2암모늄, 인산2수소암모늄, 인산2수소칼륨, 규산나트륨, 규산칼륨, 탄산나트륨, 탄산칼륨, 탄산수소나트륨, 탄산수소칼륨, 붕산나트륨, 붕산칼륨, 암모니아 등을 들 수 있다. Specific examples of the inorganic alkaline compound include sodium hydroxide, potassium hydroxide, disodium hydrogenphosphate, sodium dihydrogenphosphate, ammonium dihydrogenphosphate, ammonium dihydrogenphosphate, potassium dihydrogenphosphate, sodium silicate, sodium silicate, sodium carbonate, potassium carbonate , Sodium hydrogencarbonate, potassium hydrogencarbonate, sodium borate, potassium borate, and ammonia.
또, 유기 알카리성 화합물로는 예를 들어, 테트라메틸암모늄히드록시드, 2-히드록시에틸트리메틸암모늄히드록시드, 모노메틸아민, 디메틸아민, 트리메틸아민, 모노에틸아민, 디에틸아민, 트리에틸아민, 모노이소프로필아민, 디이소프로필아민, 에탄올아민 등을 들 수 있다.The organic alkaline compound includes, for example, tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine , Monoisopropylamine, diisopropylamine, ethanolamine, and the like.
이들 무기 및 유기 알카리성 화합물의 알칼리 현상액 중의 농도는 바람직하게는 0.01 ∼ 10 질량% 이며, 보다 바람직하게는 0.03 ∼ 5 질량% 이다. The concentration of these inorganic and organic alkaline compounds in the alkali developer is preferably 0.01 to 10% by mass, and more preferably 0.03 to 5% by mass.
계면 활성제는 노니온계 계면 활성제, 아니온계 계면 활성제 또는 카티온계 계면 활성제 중 어느 것이어도 된다. The surfactant may be any of a nonionic surfactant, an anionic surfactant, and a cationic surfactant.
노니온계 계면 활성제로는 예를 들어, 폴리옥시에틸렌알킬에테르, 폴리옥시에틸렌아릴에테르, 폴리옥시에틸렌알킬아릴에테르, 그 밖의 폴리옥시에틸렌 유도체, 옥시에틸렌/옥시프로필렌 블록 코폴리머, 소르비탄 지방산 에스테르, 폴리옥시에틸렌소르비탄 지방산 에스테르, 폴리옥시에틸렌소르비톨 지방산 에스테르, 글리세린 지방산 에스테르, 폴리옥시에틸렌 지방산 에스테르, 폴리옥시에틸렌알킬아민 등을 들 수 있다. Examples of nonionic surfactants include polyoxyethylene alkyl ethers, polyoxyethylene aryl ethers, polyoxyethylene alkyl aryl ethers, other polyoxyethylene derivatives, oxyethylene / oxypropylene block copolymers, sorbitan fatty acid esters, Polyoxyethylene sorbitan fatty acid esters, polyoxyethylene sorbitol fatty acid esters, glycerin fatty acid esters, polyoxyethylene fatty acid esters, and polyoxyethylene alkylamines.
아니온계 계면 활성제로는 예를 들어, 라우릴알코올황산에스테르나트륨이나 올레일알코올황산에스테르나트륨과 같은 고급 알코올황산에스테르염류, 라우릴황산나트륨이나 라우릴황산암모늄과 같은 알킬황산염류, 도데실벤젠술폰산나트륨이나 도데실나프탈렌술폰산나트륨과 같은 알킬아릴술폰산염류 등을 들 수 있다. Examples of the anionic surfactant include higher alcohol sulfuric acid ester salts such as sodium lauryl alcohol sulfate ester and sodium oleyl alcohol sulfate ester, alkylsulfates such as sodium laurylsulfate and ammonium laurylsulfate, sodium dodecylbenzenesulfonate And alkylarylsulfonic acid salts such as sodium dodecylnaphthalenesulfonate.
카티온계 계면 활성제로는 예를 들어, 스테아릴아민염산염이나 라우릴트리메틸암모늄클로라이드와 같은 아민염 또는 제 4 급 암모늄염 등을 들 수 있다. Examples of cationic surfactants include amine salts such as stearylamine hydrochloride and lauryltrimethylammonium chloride, and quaternary ammonium salts.
알칼리 현상액 중의 계면 활성제의 농도는 바람직하게는 0.01 ∼ 10 질량%의 범위, 보다 바람직하게는 0.05 ∼ 8 질량%, 더욱 바람직하게는 0.1 ∼ 5 질량 % 이다. The concentration of the surfactant in the alkali developer is preferably in the range of 0.01 to 10 mass%, more preferably 0.05 to 8 mass%, and still more preferably 0.1 to 5 mass%.
현상 후, 수세를 실시하고, 추가로 필요에 따라 포스트베이크를 실시해도 된다. 포스트베이크는 예를 들어, 150 ∼ 230 ℃ 의 온도 범위, 10 ∼ 180 분이 적합하다. After the development, washing with water may be carried out, and further post baking may be carried out if necessary. The post bake is suitable, for example, in a temperature range of 150 to 230 DEG C for 10 to 180 minutes.
본 발명의 경화성 수지 조성물은 가열 경화 (예를 들어, 150 ∼ 250 ℃, 0.1 ∼ 3 시간) 후의 3 ㎛ 두께의 도포막에 대하여, 분광 광도계를 이용하여 측정 파장 400 ∼ 700 ㎚ 의 조건 하에서 투과율을 측정하면, 투과율이 바람직하게는 90 % 이상이며, 보다 바람직하게는 95 % 이상이다. 이로써, 가시광 영역에서 투명한 패턴이나 도포막을 형성할 수 있다. The curable resin composition of the present invention has a transmittance of 3 占 퐉 thick after heat curing (for example, at 150 to 250 占 폚 for 0.1 to 3 hours) under a condition of a wavelength of 400 to 700 nm using a spectrophotometer When measured, the transmittance is preferably 90% or more, and more preferably 95% or more. This makes it possible to form a transparent pattern or a coating film in the visible light region.
이와 같이 하여 얻어지는 도포막 또는 패턴은 예를 들어, 액정 표시 장치에 사용되는 포토 스페이서, 패터닝 가능한 오버 코트로서 유용하다. 또, 미경화 도포막에 대한 패터닝 노광시에, 홀 형성용 포토마스크를 사용함으로써 홀을 형성할 수 있어, 층간 절연막으로서 유용하다. 또한, 미경화 도포막에 대한 노광시에, 포토마스크를 사용하지 않고 전체면 노광 및 가열 경화 또는 가열 경화만을 실시함으로써 투명막을 형성할 수 있다. 이 투명막은 오버 코트로서 유용하다. 또, 터치 패널 등의 표시 장치에도 사용할 수 있다. 이로써, 고품질의 도포막 또는 패턴을 구비한 표시 장치를 높은 수율로 제조할 수 있다. The coating film or pattern thus obtained is useful as, for example, a photo-spacer used in a liquid crystal display device, a patternable overcoat. In the patterning exposure of the uncured coating film, holes can be formed by using a photomask for forming a hole, which is useful as an interlayer insulating film. Further, at the time of exposure for the uncured coating film, the transparent film can be formed by performing only the entire surface exposure and heat curing or heat curing without using a photomask. This transparent film is useful as an overcoat. It can also be used for a display device such as a touch panel. Thus, a display device having a high-quality coating film or pattern can be manufactured at a high yield.
본 발명의 감광성 수지 조성물은 여러 가지의 막 및 패턴을 형성하기 위한 재료, 예를 들어, 투명막, 특히 컬러 필터의 일부를 구성하는 투명막, 패턴, 포토 스페이서, 오버 코트, 절연막, 액정 배향 제어용 돌기, 마이크로 렌즈, 상이한 막 두께를 조합한 착색 패턴, 코트층 등을 형성하기 위해서 바람직하게 이용할 수 있다. 또, 이들 도포막 또는 패턴을 그 구성 부품의 일부로서 구비하는 컬러 필터, 어레이 기판 등, 또한 이들 컬러 필터 및/또는 어레이 기판 등을 구비하는 표시 장치, 예를 들어, 액정 표시 장치, 유기 EL 장치 등에 이용할 수 있다. The photosensitive resin composition of the present invention can be used for various films and materials for forming a pattern, for example, a transparent film, a transparent film constituting a part of a color filter, a pattern, a photo spacer, an overcoat, A microstructure, a projection, a micro lens, a coloring pattern combining a different film thickness, a coat layer, and the like. In addition, a color filter, an array substrate, and the like having these coating films or patterns as a part of their constituent parts, display devices including these color filters and / or array substrates, for example, liquid crystal display devices, organic EL devices And the like.
실시예Example
이하, 실시예에 의해 본 발명의 감광성 수지 조성물을 더욱 상세히 설명하는데, 본 발명은 이들 실시예에 의해 한정되는 것은 아니다. 또, 이하의 실시예 및 비교예에 있어서 함유량 또는 사용량을 나타내는 % 및 부는 특별히 언급하지 않는 한 질량 기준이다. Hereinafter, the photosensitive resin composition of the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples. In the following Examples and Comparative Examples,% and parts representing the content or amount are based on mass unless otherwise specified.
합성예 1Synthesis Example 1
환류 냉각기, 적하 깔때기 및 교반기를 구비한 1 ℓ 의 플라스크 내에 질소를 0.02 ℓ/분으로 흘려 보내어 질소 분위기로 하고, 디에틸렌글리콜에틸메틸에테르 140 부를 넣고 교반하면서 70 ℃ 까지 가열하였다. 이어서, 메타크릴산 40 부, 3,4-에폭시트리시클로[5.2.1.02,6]데실아크릴레이트 (식 (I-1) 로 나타내는 화합물 및 식 (Ⅱ-1) 로 나타내는 화합물을, 몰 비로 50 : 50 의 혼합물) 360 부 그리고 디에틸렌글리콜에틸메틸에테르 190 부에 용해시켜 용액을 조제하고, 얻어진 용해액을, 적하 펌프를 이용하여 4 시간에 걸쳐 70 ℃ 로 보온한 플라스크 내에 적하하였다. In a one liter flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was flowed at 0.02 L / min to make a nitrogen atmosphere, 140 parts of diethylene glycol ethyl methyl ether was added, and the mixture was heated to 70 DEG C with stirring. Subsequently, 40 parts of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 2,6 ] decyl acrylate (the compound represented by formula (I-1) and the compound represented by formula (II-1) 50: 50) and 190 parts of diethylene glycol ethyl methyl ether to prepare a solution, and the obtained solution was dropped into a flask maintained at 70 캜 for 4 hours by using a dropping pump.
한편, 중합 개시제 2,2'-아조비스(2,4-디메틸발레로니트릴) 30 부를 디에틸렌글리콜에틸메틸에테르 240 부에 용해시킨 용액을, 다른 적하 펌프를 이용하여 5 시간에 걸쳐 플라스크 내에 적하하였다. 중합 개시제 용액의 적하가 종료된 후, 4 시간, 70 ℃ 로 유지하고, 그 후 실온까지 냉각시켜 고형분 42.6 %, 산가 60 ㎎-KOH/g 의 공중합체 (수지 Aa) 의 용액을 얻었다. 얻어진 수지 Aa 의 중량 평균 분자량 (Mw) 은 8000, 분산도는 1.91 였다. On the other hand, a solution prepared by dissolving 30 parts of polymerization initiator 2,2'-azobis (2,4-dimethylvaleronitrile) in 240 parts of diethylene glycol ethyl methyl ether was dropped into a flask over 5 hours using another dropping pump Respectively. After completion of the dropwise addition of the polymerization initiator solution, the solution was maintained at 70 占 폚 for 4 hours and then cooled to room temperature to obtain a solution of a copolymer (resin Aa) having a solid content of 42.6% and an acid value of 60 mg-KOH / g. The weight average molecular weight (Mw) of the obtained resin Aa was 8000 and the degree of dispersion was 1.91.
합성예 2Synthesis Example 2
환류 냉각기, 적하 깔때기 및 교반기를 구비한 1 ℓ 의 플라스크 내에 질소를 0.02 ℓ/분으로 흘려 보내어 질소 분위기로 하고, 디에틸렌글리콜에틸메틸에테르 305 부를 넣고 교반하면서 70 ℃ 까지 가열하였다. 이어서, 메타크릴산 60 부, 3,4-에폭시트리시클로[5.2.1.02,6]데실아크릴레이트 (식 (I-1) 로 나타내는 화합물 및 식 (Ⅱ-1) 로 나타내는 화합물의, 몰 비 50 : 50 의 혼합물) 240 부를, 디에틸렌글리콜에틸메틸에테르 140 부에 용해시켜 용액을 조제하고, 그 용해액을, 적하 깔때기를 이용하여 4 시간에 걸쳐 70 ℃ 로 보온한 플라스크 내에 적하하였다. 한편, 중합 개시제 2,2'-아조비스(2,4-디메틸발레로니트릴) 30 부를 디에틸렌글리콜에틸메틸에테르 225 부에 용해시킨 용액을, 다른 적하 깔때기를 이용하여 4 시간에 걸쳐 플라스크 내에 적하하였다. 중합 개시제 용액의 적하가 종료된 후, 4 시간, 70 ℃ 로 유지시키고, 그 후 실온까지 냉각시켜 고형분 32.6 %, 산가 110 ㎎-KOH/g (고형분 환산) 의 공중합체 (수지 Ab) 용액을 얻었다. 얻어진 수지 Ab 의 중량 평균 분자량 Mw 는 13,600, 분산도는 2.49 였다. In a 1 liter flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was flowed at 0.02 L / min to make a nitrogen atmosphere, and 305 parts of diethylene glycol ethyl methyl ether was added and heated to 70 deg. C with stirring. Subsequently, a mixture of 60 parts of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 2,6 ] decyl acrylate (the compound represented by formula (I-1) and the compound represented by formula (II- 50: 50) was dissolved in 140 parts of diethylene glycol ethyl methyl ether to prepare a solution. The solution was dropped into a flask maintained at 70 캜 for 4 hours using a dropping funnel. On the other hand, a solution prepared by dissolving 30 parts of polymerization initiator 2,2'-azobis (2,4-dimethylvaleronitrile) in 225 parts of diethylene glycol ethyl methyl ether was added dropwise to the flask over 4 hours using another dropping funnel Respectively. After the dropwise addition of the polymerization initiator solution was completed, the solution was kept at 70 캜 for 4 hours and then cooled to room temperature to obtain a copolymer (resin Ab) solution having a solid content of 32.6% and an acid value of 110 mg-KOH / g . The weight average molecular weight Mw of the obtained resin Ab was 13,600 and the degree of dispersion was 2.49.
합성예 3Synthesis Example 3
환류 냉각기, 적하 깔때기 및 교반기를 구비한 1 ℓ 의 플라스크 내에 질소를 0.02 ℓ/분으로 흘려 보내어 질소 분위기로 하고, 3-메톡시-1-부탄올 200 부 및 3-메톡시부틸아세테이트 105 부를 넣고 교반하면서 70 ℃ 까지 가열하였다. 이어서, 메타크릴산 60 부, 3,4-에폭시트리시클로[5.2.1.02,6]데실아크릴레이트 (식 (I-1) 로 나타내는 화합물 및 식 (Ⅱ-1) 로 나타내는 화합물의, 몰 비 50 : 50 의 혼합물) 240 부를, 3-메톡시부틸아세테이트 140 부에 용해시켜 용액을 조제하고, 그 용해액을, 적하 깔때기를 이용하여 4 시간에 걸쳐 70 ℃ 로 보온한 플라스크 내에 적하하였다. 한편, 중합 개시제 2,2'-아조비스(2,4-디메틸발레로니트릴) 30 부를 3-메톡시부틸아세테이트 225 부에 용해시킨 용액을, 다른 적하 깔때기를 이용하여 4 시간에 걸쳐 플라스크 내에 적하하였다. 중합 개시제 용액의 적하가 종료된 후, 4 시간, 70 ℃ 로 유지시키고, 그 후 실온까지 냉각시켜 고형분 32.6 %, 산가 110 ㎎-KOH/g (고형분 환산) 의 공중합체 (수지 Ac) 용액을 얻었다. 얻어진 수지 Ac 의 중량 평균 분자량 Mw 는 13,400, 분산도는 2.50 였다. In a 1 L flask equipped with a reflux condenser, a dropping funnel and a stirrer, nitrogen was flowed at 0.02 L / min to make a nitrogen atmosphere, 200 parts of 3-methoxy-1-butanol and 105 parts of 3-methoxybutyl acetate were added, Lt; 0 > C. Subsequently, a mixture of 60 parts of methacrylic acid, 3,4-epoxytricyclo [5.2.1.0 2,6 ] decyl acrylate (the compound represented by formula (I-1) and the compound represented by formula (II- 50: 50) was dissolved in 140 parts of 3-methoxybutyl acetate to prepare a solution. The solution was dropped into a flask maintained at 70 캜 for 4 hours using a dropping funnel. On the other hand, a solution prepared by dissolving 30 parts of polymerization initiator 2,2'-azobis (2,4-dimethylvaleronitrile) in 225 parts of 3-methoxybutyl acetate was dropped into a flask over 4 hours using another dropping funnel Respectively. After the dropwise addition of the polymerization initiator solution was completed, the solution was kept at 70 캜 for 4 hours and then cooled to room temperature to obtain a copolymer (Resin Ac) solution having a solid content of 32.6% and an acid value of 110 mg-KOH / g . The weight average molecular weight Mw of the obtained resin Ac was 13,400 and the degree of dispersion was 2.50.
공중합체 (수지 Aa ∼ Ac) 의 중량 평균 분자량 (Mw) 및 수평균 분자량 (Mn) 의 측정은 GPC 법을 이용하여 이하의 조건으로 실시하였다. The weight average molecular weight (Mw) and number average molecular weight (Mn) of the copolymers (Resins Aa to Ac) were measured by the GPC method under the following conditions.
장치 ; K2479 ((주) 시마즈 제작소 제조) Device ; K2479 (manufactured by Shimadzu Corporation)
칼럼 ; SHIMADZU Shim-pack GPC-80M column ; SHIMADZU Shim-pack GPC-80M
칼럼 온도 ; 40 ℃ Column temperature; 40 ℃
용매 ; THF (테트라히드로푸란) Solvent; THF (tetrahydrofuran)
유속 ; 1.0 ㎖/minFlow rate; 1.0 ml / min
검출기 ; RIDetector; RI
상기에서 얻어진 폴리스티렌 환산의 중량 평균 분자량 및 수평균 분자량의 비를 분산도 (Mw/Mn) 로 하였다. The ratio of the weight average molecular weight and the number average molecular weight in terms of polystyrene obtained as described above was determined as the degree of dispersion (Mw / Mn).
실시예 1 ∼ 9, 비교예 1Examples 1 to 9, Comparative Example 1
표 1 의 조성물을 혼합하여 감광성 수지 조성물 1 ∼ 10 을 얻었다. The compositions of Table 1 were mixed to obtain photosensitive resin compositions 1 to 10.
<뿌연 얼룩 평가><Evaluation of cloudy smudge>
가로 세로 15 ㎝ 의 ITO 막형성 유리 기판 상에, 실시예 및 비교예에서 얻어진 감광성 수지 조성물의 용액을, 각각 슬릿 다이 코터 (타쿠다이-100 이토츄 산기 (주) 제조) 를 사용하여, 경화 후의 막 두께가 5.5 ㎛ 가 되는 조건으로 도포하였다. Using a slit die coater (Takuda-100, manufactured by Itochu-Kagaku Co., Ltd.), the solution of the photosensitive resin composition obtained in the examples and the comparative examples was applied onto the ITO film-formed glass substrate of 15 cm in length and 15 cm, To a thickness of 5.5 m.
그 후, 감압 건조기 (VCD 마이크로테크 (주) 제조) 로 감압도를 0.5 torr 까지 감압 건조시켰다. 핫 플레이트 상에서, 90 ℃ 에서 2 분간 프리베이크하여 도포막을 형성하였다. Thereafter, the reduced pressure was dried under reduced pressure to 0.5 torr with a vacuum dryer (VCD Microtech Co., Ltd.). And then prebaked on a hot plate at 90 DEG C for 2 minutes to form a coating film.
냉각 후, 막 표면을 Na 램프로 비춰 육안으로 도포막 표면을 확인하였다. After cooling, the surface of the coating film was visually observed by irradiating the film surface with an Na lamp.
뿌연 얼룩 (구름 형상의 얼룩) 이 분명히 확인된 경우에는 ×, 약간 확인된 경우에는 △, 거의 확인되지 않은 경우에는 ○ 로 하였다. When cloudy unevenness (cloud-shaped unevenness) was clearly confirmed, it was determined as " C ", when it was slightly confirmed, &
<핀 자국 평가> <Pin Mark Evaluation>
상기와 마찬가지로, 도포막을 형성한 후 감압 건조시켰다. 그 후, 직경 60 ㎜ 의 구멍이 형성된 두께 20 ㎜ 의 스테인리스 판을 90 ℃ 로 설정된 핫 플레이트 상에 탑재하고, 그 위에서 2 분간 프리베이크하여 도포막을 형성하였다. Similarly to the above, a coating film was formed and then dried under reduced pressure. Thereafter, a stainless steel plate having a hole of 60 mm in diameter and having a thickness of 20 mm was mounted on a hot plate set at 90 占 폚, and then prebaked thereon for 2 minutes to form a coating film.
냉각 후, 막 표면을 Na 램프로 비춰 육안으로 도포막 표면을 확인하였다.After cooling, the surface of the coating film was visually observed by irradiating the film surface with an Na lamp.
핀 자국이 분명히 확인된 경우에는 ×, 약간 확인된 경우에는 △, 거의 확인 되지 않은 경우에는 ○ 로 하였다. When the pin marks were clearly identified, the marks were marked as " x ", when the pin marks were slightly identified, and when the pin marks were hardly identified, "
<슬릿 노즐 건조성 평가><Slit nozzle dryness evaluation>
상기와 마찬가지로 도포막을 형성하였다. A coating film was formed in the same manner as described above.
그 후에는 노즐 선단을 세정하지 않고 그대로 방치하였다. 1 분 후, 노즐 선단을 세정하지 않고 동일한 도포를 실시하였다. Thereafter, the tip of the nozzle was left without being cleaned. After one minute, the same application was carried out without cleaning the tip of the nozzle.
계속해서, 감압 건조기 (VCD 마이크로테크 (주) 제조) 로 감압도를 0.5 torr 까지 감압 건조시키고, 핫 플레이트 상에서 90 ℃ 에서 2 분간 프리베이크하여 도포막을 형성하였다. Subsequently, the reduced pressure was reduced to a pressure of 0.5 torr with a vacuum dryer (VCD Microtech) and prebaked on a hot plate at 90 DEG C for 2 minutes to form a coating film.
냉각 후, 막 표면을 Na 램프로 비춰 육안으로 도포막 표면을 확인하였다.After cooling, the surface of the coating film was visually observed by irradiating the film surface with an Na lamp.
세로줄 얼룩이 분명히 확인된 경우에는 ×, 약간 확인된 경우에는 △, 거의 확인되지 않은 경우에는 ○ 로 하였다. When the vertical line unevenness was clearly identified, it was determined as " C ", when it was slightly confirmed, " DELTA, "
<조성물의 평균 투과율>≪ Average transmittance of the composition >
각 감광성 수지 조성물에 대하여, 자외 가시 근적외 분광 광도계 (V-650 ; 닛폰 분광 (주) 제조) (석영 셀, 광로 길이 ; 1 ㎝) 를 이용하여, 400 ∼ 700 ㎚ 에서의 평균 투과율 (%) 을 측정하였다. The average transmittance (%) at 400 to 700 nm was measured for each photosensitive resin composition using an ultraviolet visible near infrared spectrophotometer (V-650; Nippon Spectroscopy) (quartz cell, optical path length: Were measured.
<패턴의 평균 투과율>≪ Average transmittance of pattern >
각 감광성 수지 조성물을 사용하여, 경화 후의 막 두께가 3 ㎛ 가 되도록 이하와 같이 하여 경화막을 제조하였다. Each of the photosensitive resin compositions was used to produce a cured film in such a manner that the film thickness after curing was 3 占 퐉.
가로 세로 5 ㎝ 의 유리 기판을, 중성 세제, 물 및 2-프로판올로 순차 세정하고 나서 건조시켰다. 이 기판 상에, 포스트베이크 후의 패턴의 막 두께가 3 ㎛ 가 되도록 스핀 코트로 조성물을 도포하였다. 다음으로 감압 건조기 (VCD 마이크로테크 (주) 제조) 로 감압도를 0.5 torr 까지 감압하고 건조시켜 도포막을 형성하였다. 이 도포막을, 핫 플레이트 내에서 90 ℃ 에서 2 분간 프리베이크하였다. 기판과 석영 유리제 포토마스크의 간격을 10 ㎛ 로 하고, 노광기 (TME-150RSK ; 토프콘 (주) 제조, 광원 ; 초고압 수은등) 를 사용하여, 대기 분위기 하에서 100 mJ/㎠ 의 노광량 (405 ㎚ 기준) 으로, 프리베이크 후의 도포막을 노광하였다. 또한 이 노광에서는 초고압 수은등으로부터의 방사광은 광학 필터 (LU0400 ; 아사히 분광 (주) 제조) 를 통과시켜 조사하였다. 또 100 ㎛ 의 라인 앤드 스페이스 패턴을 형성하기 위한 포토마스크를 사용하였다. 노광 후, 23 ℃ 의 테트라메틸암모늄히드록시드 수용액 (수용액 100 부 중에 테트라메틸암모늄히드록시드를 2.38 부 함유한다) 에서 60 초간 침지시켜 현상하고 수세한 후, 핫 플레이트로 235 ℃ 에서 11 분간 포스트베이크를 실시하여, 라인 앤드 스페이스 패턴을 형성하였다. A glass substrate of 5 cm in length and width was sequentially washed with a neutral detergent, water and 2-propanol, and then dried. On this substrate, the composition was applied by spin-coating so that the post-baked pattern had a film thickness of 3 占 퐉. Next, the reduced pressure was reduced to 0.5 torr with a vacuum dryer (VCD Microtech Co., Ltd.) and dried to form a coating film. This coated film was prebaked in a hot plate at 90 캜 for 2 minutes. (Based on 405 nm) of 100 mJ / cm < 2 > in an atmospheric environment using an exposure apparatus (TME-150RSK; manufactured by Topcon Co., , The coated film after pre-baking was exposed. In this exposure, the light emitted from the ultra-high pressure mercury lamp was irradiated through an optical filter (LU0400, manufactured by Asahi Spectroscopy). A photomask for forming a line-and-space pattern of 100 mu m was also used. After exposure, the substrate was immersed in an aqueous solution of tetramethylammonium hydroxide (containing 2.38 parts of tetramethylammonium hydroxide in 100 parts of an aqueous solution) at 23 占 폚 for 60 seconds, developed and washed with water, and then transferred to a hot plate at 235 占 폚 for 11 minutes Baked to form a line and space pattern.
얻어진 각 패턴에 대하여 현미 분광 측광 장치 (OSP-SP200 ; OLYMPUS 사 제조) 를 이용하여, 400 ∼ 700 ㎚ 에서의 평균 투과율 (%) 을 측정하였다. The average transmittance (%) at 400 to 700 nm was measured for each obtained pattern using a microscopic spectrophotometric apparatus (OSP-SP200, manufactured by OLYMPUS CO., LTD.).
투과율이 높아지는 것은 흡수가 작아지는 것을 의미한다. The higher the transmittance means the smaller the absorption.
표 1 중 각 성분은 이하와 같다. The components in Table 1 are as follows.
중합성 화합물 (B) ; 디펜타에리트리톨헥사아크릴레이트 (KAYARAD DPHA ; 닛폰 화약 (주) 제조) Polymerizable compound (B); Dipentaerythritol hexaacrylate (KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.)
중합 개시제 (C) Ca ; 1-(4-페닐설파닐페닐)옥탄-1,2-디온-2-옥심-O-벤조에이트 (OXE 01 ; 치바·재팬사 제조) Polymerization initiator (C) Ca; Dioxo-2-oxime-O-benzoate (OXE 01; manufactured by Chiba Japan K.K.) was added to a solution of 1- (4-phenylsulfanylphenyl)
중합 개시제 (C) Cb ; 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 (B-CIM ; 호도가야 화학 (주) 제조) Polymerization initiator (C) Cb; 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole (B-CIM; manufactured by Hodogaya Chemical Co.,
개시 보조제 C2a ; 펜타에리트리톨테트라키스프로피오네이트 (SC 유기 화학 (주) 제조 PEMP) Initiation aid C2a; Pentaerythritol tetrakispropionate (PEMP manufactured by SC Organic Chemicals Co., Ltd.)
개시 보조제 C2b ; 2-(2-나프토일메틸렌)-3-메틸벤조티아졸린 Initiation aid C2b; 2- (2-naphthoylmethylene) -3-methylbenzothiazoline
용제 Da ; 3-메톡시1-부탄올 Solvent Da; 3-Methoxy-1-butanol
용제 Db ; 프로필렌글리콜모노메틸에테르 Solvent Db; Propylene glycol monomethyl ether
용제 Dc ; 디에틸렌글리콜에틸메틸에테르 Solvent Dc; Diethylene glycol ethyl methyl ether
용제 Dd ; 프로필렌글리콜모노메틸에테르아세테이트 Solvent Dd; Propylene glycol monomethyl ether acetate
용제 De ; 3-메톡시부틸아세테이트 Solvent De; 3-methoxybutylacetate
용제 Df ; 3-에톡시에틸프로피오네이트Solvent Df; 3-ethoxyethyl propionate
상기 서술한 바와 같이 본 발명의 감광성 수지 조성물을 사용하여 도포막을 형성했을 때, 비교적 후막으로 도포 형성한 경우에 있어서도, 뿌연 얼룩, 세로줄 얼룩 및 핀 자국이 발생하지 않고, 도포막 전체에 걸쳐 균일하고 또한 평활하며, 고품질인 도포막을 형성할 수 있다. 요컨대, 비교적 비점이 낮기 때문에 도포 건조 시간을 단축할 수 있어, 생산성의 향상을 도모할 수 있는 한편, 슬릿 노즐 선단의 건조를 억제하여, 건조에서 기인하는 이물질의 발생, 도포막에 대한 혼입 및 세로줄을 방지할 수 있다. As described above, even when a coating film is formed using the photosensitive resin composition of the present invention and a comparatively thick film is formed thereon, cloudiness, vertical line unevenness and pin marks are not generated, and evenness over the entire coating film And a smooth, high-quality coating film can be formed. In other words, since it has a relatively low boiling point, it is possible to shorten the coating drying time and to improve the productivity, while suppressing the drying of the tip of the slit nozzle and to prevent the generation of foreign substances caused by drying, Can be prevented.
또, 수지 및 각종 성분의 용해성이 양호하며, 보존 안정성을 향상시킬 수 있다.In addition, the solubility of the resin and various components is good, and the storage stability can be improved.
이와 같은 감광성 수지 조성물을 사용하여 도포막 또는 패턴을 형성하고, 그것들을 이용하여 표시 장치를 제조함으로써 수율을 향상시킬 수 있게 된다. By using such a photosensitive resin composition, a coating film or a pattern is formed, and the yield can be improved by manufacturing a display device using them.
본 발명에 의하면, 뿌연 얼룩, 세로줄 얼룩 및 핀 자국이 발생하지 않고, 도포막 전체에 걸쳐 균일하고, 고품질인 도포막을 형성할 수 있다. INDUSTRIAL APPLICABILITY According to the present invention, it is possible to form a uniform and high-quality coating film over the entire coating film without causing cloudiness, vertical line unevenness and pin marks.
또, 본 발명의 감광성 수지 조성물을 이용함으로써 고품질의 표시 장치 등을 얻을 수 있게 된다.Further, by using the photosensitive resin composition of the present invention, it becomes possible to obtain a high-quality display device or the like.
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TWI521300B (en) | 2016-02-11 |
TW201033731A (en) | 2010-09-16 |
JP2010152335A (en) | 2010-07-08 |
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