KR101671332B1 - 레이저 방사선 셰이핑 장치 - Google Patents

레이저 방사선 셰이핑 장치 Download PDF

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Publication number
KR101671332B1
KR101671332B1 KR1020080124380A KR20080124380A KR101671332B1 KR 101671332 B1 KR101671332 B1 KR 101671332B1 KR 1020080124380 A KR1020080124380 A KR 1020080124380A KR 20080124380 A KR20080124380 A KR 20080124380A KR 101671332 B1 KR101671332 B1 KR 101671332B1
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KR
South Korea
Prior art keywords
refractive interface
laser radiation
partial beams
interface
refractive
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Expired - Fee Related
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KR1020080124380A
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English (en)
Korean (ko)
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KR20090067042A (ko
Inventor
다니엘 바르토쉐프스키
Original Assignee
리모 파텐트페어발퉁 게엠베하 운트 코. 카게
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Application filed by 리모 파텐트페어발퉁 게엠베하 운트 코. 카게 filed Critical 리모 파텐트페어발퉁 게엠베하 운트 코. 카게
Publication of KR20090067042A publication Critical patent/KR20090067042A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
KR1020080124380A 2007-12-19 2008-12-09 레이저 방사선 셰이핑 장치 Expired - Fee Related KR101671332B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007061358.1 2007-12-19
DE102007061358A DE102007061358B4 (de) 2007-12-19 2007-12-19 Vorrichtung zur Formung von Laserstrahlung

Publications (2)

Publication Number Publication Date
KR20090067042A KR20090067042A (ko) 2009-06-24
KR101671332B1 true KR101671332B1 (ko) 2016-11-16

Family

ID=40467125

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080124380A Expired - Fee Related KR101671332B1 (ko) 2007-12-19 2008-12-09 레이저 방사선 셰이핑 장치

Country Status (6)

Country Link
US (1) US7986461B2 (enExample)
EP (1) EP2073051A3 (enExample)
JP (1) JP5507837B2 (enExample)
KR (1) KR101671332B1 (enExample)
CN (1) CN101464563B (enExample)
DE (1) DE102007061358B4 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung
EP2389607B1 (de) 2009-01-23 2015-06-03 LIMO Patentverwaltung GmbH & Co. KG Vorrichtung zur strahlformung von laserdiodenarrays
US9214368B2 (en) * 2011-07-27 2015-12-15 Ipg Photonics Corporation Laser diode array with fiber optic termination for surface treatment of materials
DE102012107456A1 (de) 2012-08-14 2014-02-20 Limo Patentverwaltung Gmbh & Co. Kg Anordnung zur Formung von Laserstrahlung
US10203399B2 (en) 2013-11-12 2019-02-12 Big Sky Financial Corporation Methods and apparatus for array based LiDAR systems with reduced interference
US9360554B2 (en) 2014-04-11 2016-06-07 Facet Technology Corp. Methods and apparatus for object detection and identification in a multiple detector lidar array
US10036801B2 (en) 2015-03-05 2018-07-31 Big Sky Financial Corporation Methods and apparatus for increased precision and improved range in a multiple detector LiDAR array
US9866816B2 (en) 2016-03-03 2018-01-09 4D Intellectual Properties, Llc Methods and apparatus for an active pulsed 4D camera for image acquisition and analysis

Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2001516473A (ja) 1998-01-09 2001-09-25 イェーノプティク アクチエンゲゼルシャフト 一方が他方の上に配置される１つ以上のハイパワーダイオードレーザーの光ビームのバランスをとるための光学配置構成
JP2002239773A (ja) 2000-12-11 2002-08-28 Matsushita Electric Ind Co Ltd 半導体レーザー加工装置および半導体レーザー加工方法

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Publication number Priority date Publication date Assignee Title
KR100318520B1 (ko) * 1999-01-16 2001-12-22 윤덕용 유도 브릴루앙 산란 위상공액 거울을 이용한 광 차단기 및 이를 적용한 광 증폭계
JP2002141301A (ja) 2000-11-02 2002-05-17 Mitsubishi Electric Corp レーザアニーリング用光学系とこれを用いたレーザアニーリング装置
DE10106155A1 (de) 2001-02-10 2002-08-14 Lissotschenko Vitalij Strahlformungsvorrichtung für die Formung des Querschnitts eines Lichtstrahls sowie Anordnung zur Einkopplung eines von einer langgestreckten Laserlichtquelle ausgehenden Lichtstrahls mit einem länglichen Querschnitt in eine Lichtleitfaser
DE10118788A1 (de) * 2001-04-18 2002-10-24 Lissotschenko Vitalij Anordnung zur Kollimierung des von einer Laserlichtquelle ausgehenden Lichts sowie Strahltransformationsvorrichtung für eine derartige Anordnung
DE10136611C1 (de) 2001-07-23 2002-11-21 Jenoptik Laserdiode Gmbh Optische Anordnung zur Formung und Homogenisierung eines von einer Laserdiodenanordnung ausgehenden Laserstrahls
US6952510B1 (en) * 2001-08-31 2005-10-04 Nlight Photonics Corporation Optically corrected intracavity fiber coupled multigain element laser
US6750423B2 (en) 2001-10-25 2004-06-15 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
TWI289896B (en) 2001-11-09 2007-11-11 Semiconductor Energy Lab Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device
US7113527B2 (en) 2001-12-21 2006-09-26 Semiconductor Energy Laboratory Co., Ltd. Method and apparatus for laser irradiation and manufacturing method of semiconductor device
US6984573B2 (en) 2002-06-14 2006-01-10 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and apparatus
US7016393B2 (en) * 2003-09-22 2006-03-21 Coherent, Inc. Apparatus for projecting a line of light from a diode-laser array
CN100427995C (zh) 2004-03-06 2008-10-22 Limo专利管理有限及两合公司 用于使光均匀化的装置和用这种装置进行照明的结构
US7422988B2 (en) 2004-11-12 2008-09-09 Applied Materials, Inc. Rapid detection of imminent failure in laser thermal processing of a substrate
JP2008524662A (ja) 2004-12-22 2008-07-10 カール・ツアイス・レーザー・オプティクス・ゲーエムベーハー 線ビームを生成するための光学照射系
US7355800B2 (en) * 2005-02-07 2008-04-08 Coherent, Inc. Apparatus for projecting a line of light from a diode-laser array
US7881355B2 (en) * 2005-12-15 2011-02-01 Mind Melters, Inc. System and method for generating intense laser light from laser diode arrays
JP2007294411A (ja) * 2006-03-30 2007-11-08 Hitachi Maxell Ltd 直下型バックライト装置及び光学レンズシート
TW200801698A (en) * 2006-03-30 2008-01-01 Hitachi Maxell Direct underneath type backlight device, and optical lens sheet

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001516473A (ja) 1998-01-09 2001-09-25 イェーノプティク アクチエンゲゼルシャフト 一方が他方の上に配置される１つ以上のハイパワーダイオードレーザーの光ビームのバランスをとるための光学配置構成
JP2002239773A (ja) 2000-12-11 2002-08-28 Matsushita Electric Ind Co Ltd 半導体レーザー加工装置および半導体レーザー加工方法

Also Published As

Publication number Publication date
EP2073051A3 (de) 2010-12-22
JP2009151311A (ja) 2009-07-09
CN101464563A (zh) 2009-06-24
KR20090067042A (ko) 2009-06-24
CN101464563B (zh) 2013-01-09
US7986461B2 (en) 2011-07-26
EP2073051A2 (de) 2009-06-24
JP5507837B2 (ja) 2014-05-28
US20090159820A1 (en) 2009-06-25
DE102007061358A1 (de) 2009-07-02
DE102007061358B4 (de) 2012-02-16

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