KR101654556B1 - The measurenent device and measurenent method of motion error in linear stage - Google Patents

Abstract

The present invention relates to an apparatus for measuring a motion error of a linear conveying mechanism, and more particularly, to an apparatus for measuring an error of a super-precision linear conveying mechanism including a stationary portion and a moving portion for moving the stationary portion with the guide as a guide, A sensor jig having one end formed on the moving part, a sensor having a plurality of openings on a vertical plane and a horizontal plane of the sensor jig, and a sensor mounted on a side surface of the fixing jig, And a reference portion including a reference plane, wherein the moving portion of the linear transport mechanism linearly moves in the y-axis direction (the longitudinal direction of the fixed portion) on the fixing portion, the reference portion of the reference portion arranged parallel to the fixed portion And a plurality of sensors arranged on the sensor jig coupled to the moving unit so as to face the moving unit, And measures the measured value for each sensor.
More particularly, the present invention relates to a method of measuring a motion error of a linear transport mechanism, and more particularly, to a method of measuring a motion error of a linear transport mechanism, A method for measuring a motion error of a linear transport mechanism having a yaw error and a pitch error, comprising the steps of: (a) moving a moving part of a linear transport mechanism in a linear motion in a y- Measuring a measurement value for each sensor including a part of the errors using a plurality of sensors arranged on a sensor jig coupled to the moving unit so as to face the reference surface of the reference unit; and (b) Wherein the sensor jig is a member having a cross section and is installed on the moving part, and a plurality of sensors are installed on the vertical and horizontal surfaces of the sensor jig Thing And a gong.
More particularly, the present invention relates to a method of measuring a motion error of a linear transport mechanism, and more particularly, to a method of measuring a motion error of a linear transport mechanism, A method for measuring a motion error of a linear transfer mechanism having a yaw error and a pitch error, the method comprising the steps of: (a) using a first sensor arranged to face a vertical reference plane of a reference arranged parallel to the y- Measuring a first measurement value including a shape error of a reference plane, a horizontal motion error, and a yaw error; (b) using a second sensor disposed at a predetermined distance from the first sensor in a y- Measuring a second measurement value including a shape error of a vertical reference plane and a horizontal motion error; and (c) using a third sensor spaced apart from the second sensor by a predetermined distance in the y- Including the shape error of plane, horizontal motion error, yaw error (D) measuring a shape error, a horizontal motion error, and a yaw error of a vertical reference plane using a fourth sensor disposed at a predetermined distance in the z-axis direction from the first sensor; (E) a fifth sensor disposed at a predetermined distance from the fourth sensor in the y-axis direction to measure a fourth measurement value including a shape error of the vertical reference surface and a horizontal motion error, Measuring a fifth measured value; and (f) using a sixth sensor arranged to face the horizontal reference plane of the reference portion arranged parallel to the y-axis, to measure the shape error, horizontal motion error, (G) measuring a sixth measurement value including a shape error of the horizontal reference surface and a horizontal motion error using a seventh sensor disposed at a predetermined distance in the y-axis direction from the sixth sensor; Measuring a seventh measured value; (h) Measuring an eighth measurement value including a shape error of a horizontal reference surface, a horizontal motion error, and a pitch error using an eighth sensor spaced at a predetermined interval, and (i) 2 and third measured values are used to calculate the lateral motion error and yaw error of the feed mechanism and the roll error of the feed mechanism is calculated using the fourth measured value and the fifth measured value, And calculating a vertical motion error and a pitch error of the transfer mechanism using the seventh measured value and the eighth measured value.
The present invention can easily obtain a 5-degree-of-freedom motion error of a linear feed mechanism in one measurement. Further, since the above-described errors can be obtained by one measurement, the present invention can measure the motion error more precisely because the measurement is not troublesome and unintentional errors (installation errors, etc.) that may occur during measurement do not occur.

Description

Technical Field [0001] The present invention relates to a device and a method for measuring a motion error of a linear transfer mechanism,

The present invention relates to an apparatus and method for measuring a motion error of a linear transfer mechanism, and more particularly, to a device and a method for measuring a motion error of a linear transfer mechanism capable of only evaluating a shape error of a reference object and a separated motion error by a single measurement will be.

Demand for flat panel displays, semiconductors, ultra-precision optical components, and next-generation IT products is increasing worldwide, and the importance of production equipment to produce them is growing. In particular, the ultra-precise linear stage for transporting objects is a typical production equipment, as well as ultra-precise position control, and high precision depend on the performance of the stage.

The linear stage including the mover moving along the linear guide has a horizontal movement error? Y which is an error occurring in the y-axis direction and a vertical movement error in the z-axis direction A roll error εx, a pitch error εy, and a yaw error, which are rotational motion error components in the x, y, and z axial directions, and translational motion error components including the motion error δz, (? z) occurs. Therefore, in manufacturing a super-precision linear stage, it is an inevitable process to measure the movement error of each feed axis, and the accuracy of the stage can be improved by compensating the measured error.

At present, a laser interferometer, an auto collimator, a capacitance sensor, and the like are used to measure the motion error of the super-precision linear stage as described above. In the case of the laser interferometer, it is possible to measure the rotational motion error, but in the case of the linear motion error, there is an accuracy limit that the noise is amplified several tens times or more. The auto-collimator is mainly used for measuring the rotational motion error. The linear motion error can be measured by calculation. However, there is a problem such as dependency on the reflector plane view and accuracy or low response speed due to the measurement distance. In addition, both of the above-mentioned two measuring apparatuses are incapable of measuring the roll error and have a disadvantage of being expensive.

In the case of the capacitive sensor, the motion error can not be directly obtained, and researches such as the two-point method and the three-point method using a plurality of probes have been carried out steadily. Also, it is difficult to reduce the noise and the measurement range is small, but it has a higher measurement resolution and lower cost than the above two measuring devices.

For this reason, it has recently been determined that it is very difficult to measure all five degrees of freedom motion error of a sub-micron band with one kind of sensor. Therefore, measurement methods that are determined to obtain relatively high measurement accuracy depending on each motion error component and measurement direction There has been research to build a 5 DOF motion error measurement system of ultra precision transfer table.

However, these various measuring instruments and measuring methods can increase the measurement accuracy, but this approach still has the problem of inconveniences and difficulties of measurement. That is, in order to obtain the 5-degree-of-freedom motion error, it is necessary to measure not less than 7 times, and to find the shape error of the reference surface for each measurement.

Korean Patent No. 10-1130703 has been proposed in order to overcome the above-mentioned problems, but there is still a problem in that it is troublesome and difficult to measure. That is, in order to obtain the 5-degree-of-freedom motion error, two or more measurements are required. In the second measurement, the sensor must be reversed to measure the troublesome measurement and installation error occurs when the sensor is reversed .

Korean Patent No. 10-1130703 Korean Patent No. 10-1210911

It is an object of the present invention to provide an apparatus and method for measuring a motion error of a linear feed mechanism capable of obtaining a 5-degree-of-freedom motion error of a linear feed mechanism by a single measurement using a plurality of capacitive sensors, This is to provide a method.

In order to achieve the above object, the present invention provides an apparatus for measuring an error of an ultra-precise linear feed mechanism including a fixing part and a moving part moving on the fixing part as a guide, A sensor including a sensor jig which is installed on the moving part at one end, a sensor in which a plurality of dogs are installed on a vertical plane and a horizontal plane of the sensor jig, and a reference plane including a reference plane corresponding to the shape of the sensor jig, Wherein the moving part of the linear transport mechanism linearly moves in the y-axis direction (the longitudinal direction of the fixing part) on the fixing part, A plurality of sensors arranged in the sensor jig coupled to the sensor jig are used to measure a measurement value for each sensor including a part of the errors It provides a motion error measurement of the linear transfer mechanism and wherein the.

The present invention also provides a method of driving a linear motor having a linear motion in a y-axis direction and a linear motion having a horizontal (x) motion error, a z-direction motion error, a roll error, a yaw error, (A) The moving part of the linear transport mechanism is coupled to the moving part so as to face the reference surface of the reference part arranged in parallel with the y-axis, while making a linear movement in the y-axis direction on the moving part Measuring a measurement value for each sensor including a part of the errors using a plurality of sensors arranged in the sensor jig; and (b) calculating the errors using the measurement values obtained in the step (a) And a plurality of sensor jigs are provided on a vertical surface and a horizontal surface of the sensor jig, the sensor jig being a member of a cross-sectional shape, one end of which is provided on the moving part, do.

The present invention also provides a method of driving a linear motor having a linear motion in a y-axis direction and a linear motion having a horizontal (x) motion error, a z-direction motion error, a roll error, a yaw error, A method for measuring a motion error of a transfer mechanism, comprising the steps of: (a) measuring a shape error, a horizontal motion error, and a yaw error of a vertical reference plane using a first sensor arranged to face a vertical reference plane of a reference portion arranged in parallel to a y- (B) a second sensor disposed at a predetermined distance from the first sensor in the y-axis direction to measure a first measurement value including a shape error of the vertical reference surface and a horizontal motion error, Measuring a second measurement value; and (c) using a third sensor disposed at a predetermined distance in the y-axis direction from the second sensor to include a shape error, a horizontal motion error, and a yaw error of the vertical reference plane (D) measuring a third measured value in the z-axis direction with respect to the first sensor; Measuring a fourth measurement value including a shape error of the vertical reference plane, a horizontal motion error, and a yaw error using a fourth sensor disposed at intervals; (e) Measuring a fifth measured value including a shape error of a vertical reference plane and a horizontal motion error using a fifth sensor spaced apart at regular intervals; Measuring a sixth measured value including a shape error of the horizontal reference surface, a horizontal motion error, and a pitch error using a sixth sensor disposed to face the reference surface; (g) Measuring a seventh measured value including a shape error of a horizontal reference plane and a horizontal motion error using a seventh sensor disposed at a predetermined interval; (h) The horizontal sensor 12 is disposed at a position Measuring an eighth measured value including a shape error of the surface, a horizontal motion error, and a pitch error; and (i) measuring a horizontal direction of the transport mechanism using the first measured value, the second measured value, The roll error of the feed mechanism is calculated using the fourth measured value and the fifth measured value, and the roll error of the feed mechanism is calculated using the sixth measured value, the seventh measured value, and the eighth measured value. And calculating a vertical motion error and a pitch error based on the motion error of the linear movement mechanism.

The present invention having the above-described configuration has the following effects.

First, the present invention can easily obtain a 5-degree-of-freedom motion error of a linear feed mechanism by one measurement. That is, since the formulas for obtaining the 5-DOF motion error of the transfer mechanism are derived from the measured values measured by the eight sensors, the 5-DOF motion error of the linear transfer mechanism can be easily obtained by one measurement.

Second, since the above-mentioned errors can be obtained by one measurement, the measurement of the motion error can be performed quickly because the measurement is not troublesome, and an unintended error (installation error, etc.) The motion error can be measured.

FIG. 1 is a schematic diagram showing a measuring apparatus for measuring a linear motion mechanism motion error according to the present invention.
2 is a cross-sectional view of Fig.
3 is a perspective view of a sensor jig in which sensors are arranged according to the present invention.
4 is a diagram showing vector components used for error modeling.
5 is a diagram showing vector components obtained from measurement results of the first sensor to the third sensor.
6 is a diagram showing vector components obtained from measurement results of the fourth sensor and the fifth sensor.
7 is a diagram showing vector components obtained from the measurement results of the sixth sensor to the eighth sensor.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

FIG. 1 is a schematic diagram showing a measuring apparatus for measuring a linear motion mechanism motion error according to the present invention, and FIG. 2 is a sectional view of FIG.

3 is a perspective view of a sensor jig in which sensors are arranged according to the present invention.

The present invention relates to an apparatus 10 for measuring a motion error of a linear transport mechanism 100, and more particularly to an apparatus for measuring an error of an ultra-precise linear transport mechanism including a moving unit 120 and a fixing unit 110, A sensor 140 having one end in the shape of a cross section and one end mounted on the moving part 120; a sensor 140 having a plurality of dogs installed on a vertical plane and a horizontal plane of the sensor jig 130; And a reference portion 200 including a reference surface 210 corresponding to the shape of the sensor jig 130. The reference portion 200 is spaced apart from the side surface of the sensor jig 110.

The linear transport mechanism 100 includes a stationary portion 110 and a moving portion 120 for moving the stationary portion 110 as a guide.

The sensor jig 130 is a member having a cross-sectional shape and one end of which is installed on the moving part 120. That is, in the sensor jig 130, two plate members of a rectangular shape are vertically coupled to each other, and one end of the plate member is installed on the moving unit 120. The sensor jig 130 is a member installed toward the reference surface 210 of the reference part 200 and is a member provided with a sensor 140 for measuring the reference surface 210.

The sensor 140 is configured to measure a reference surface 210 of the reference portion 200 by providing a plurality of teeth on a vertical surface and a horizontal surface of the sensor jig 130. Five sensors may be provided on the vertical surface of the sensor jig 130, and three sensors may be provided on the horizontal surface. That is, the sensor 140 may be installed in two rows on the vertical surface of the sensor jig 130, three rows are arranged at a predetermined interval d on the first row, a second row is spaced apart from the first row by a predetermined distance L, Two dots are arranged at a predetermined interval d, and a total of five dots are provided. Further, three sensor jigs 130 are arranged on the horizontal plane at regular intervals d. The sensor 140 may be a variety of sensors, but is preferably a capacitive sensor. The five degrees of freedom movement error of the feed mechanism 100 can be more easily calculated by measuring the reference surface 210 only once by the sensor 140 in which eight sensor jigs 130 are arranged. That is, since the formulas for obtaining the 5-DOF motion error of the transfer mechanism are derived from the measured values measured by the eight sensors, the 5-DOF motion error of the linear transfer mechanism can be easily obtained by one measurement.

The reference unit 200 includes a reference surface 210 corresponding to the shape of the sensor jig 130. The reference unit 200 is spaced apart from the side surface of the fixing unit 110. That is, the reference unit 200 includes a reference plane 210 to be measured by the sensor 140. The reference portion 200 is disposed on the side of the fixed portion 110 of the feed mechanism 100 so as to be parallel to the y axis which is the moving direction of the moving portion 120. The reference surface 210 may be formed in accordance with the shape of the sensor jig 130 as a surface measured by the sensor 140 in the present invention. That is, the reference surface 210 may be formed as a vertical reference surface 211 and a horizontal reference surface 212 to match the cross-sectional shape of the sensor jig 130.

Hereinafter, a method of measuring the error using the motion error measuring apparatus of the linear transport mechanism will be described. Each of the constitutions of the motion error measuring apparatus not described below is described above.

4 is a diagram showing vector components used for error modeling.

More particularly, the present invention relates to a method of measuring a motion error of a linear transport mechanism, and more particularly, to a method of measuring a motion error of a linear transport mechanism, (a) a moving part (120) of a linear feed mechanism (100) moves linearly in a y-axis direction on a fixing part (110), and a linear movement mechanism By using a plurality of sensors 140 disposed on the sensor jig 130 coupled to the moving unit 120 so as to face the reference plane 210 of the reference unit 200 arranged in parallel to the y axis, (B) calculating the errors using the measurement values obtained in step (a), wherein the sensor jig (130) has a cross section of ' And the sensor 140 is disposed on the vertical surface of the sensor jig 130, And a plurality of holes are provided on a horizontal plane.

In the step (a), the moving unit 120, to which the sensor jig 130 having the plurality of sensors 140 are connected, moves linearly in the y-axis direction, and measures the measured value of each sensor. In the step (a), a plurality of sensors 140 are installed so as to face the reference surface 210 of the reference unit 200, and measurement values of respective sensors including a part of errors are measured. Five sensors may be provided on the vertical surface of the sensor jig 130, and three sensors may be provided on the horizontal surface. The five degrees of freedom movement error of the feed mechanism 100 can be more easily calculated by measuring the reference surface 210 only once by the sensor 140 in which eight sensor jigs 130 are arranged. That is, the sensor 140 having the arrangement described above can derive a relational expression between the measured values measured for each sensor and the 5-degree-of-freedom motion trajectory with a single measurement.

(b) is a step of calculating the errors using the measured values obtained in the step (a). That is, step (b) is a step of calculating a motion error of the transport mechanism 100 using the equation derived in step (a).

Hereinafter, a method of measuring the error using the motion error measuring apparatus of the linear transport mechanism will be described step by step. Each of the constitutions of the motion error measuring apparatus not described below is described above.

FIG. 5 is a view showing vector components obtained from the measurement results of the first sensor to the third sensor, and FIG. 6 is a diagram showing vector components obtained from the measurement results of the fourth sensor and the fifth sensor.

7 is a diagram showing vector components obtained from the measurement results of the sixth sensor to the eighth sensor.

More particularly, the present invention relates to a method of measuring a motion error of a linear transport mechanism, and more particularly, to a method of measuring a motion error of a linear transport mechanism, (a) a measuring device for measuring a movement error of a reference member disposed parallel to a y-axis, the reference member being arranged to face a vertical reference surface of a reference portion, Measuring a first measurement value including a shape error, a horizontal motion error, and a yaw error of the vertical reference plane 211 using the first sensor 141 and the first measurement value including the yaw error, (b) Measuring a second measurement value including a shape error and a horizontal motion error of the vertical reference surface 211 using a second sensor 142 spaced apart at regular intervals in the direction of the first reference surface 211; A shape error of the vertical reference surface 211, a horizontal error of the horizontal reference plane 211, and a horizontal error of the vertical reference plane 211 by using the third sensor 143, (D) measuring a third measurement value including a yaw error, a yaw error, and a yaw error; and (d) Measuring a fourth measured value including a shape error of the reference surface 211, a horizontal motion error, and a yaw error; (e) measuring a fourth measured value including a shape error of the reference surface 211, Measuring a fifth measured value including a shape error of the vertical reference plane 211 and a horizontal motion error using the fifth sensor 145; and (f) comparing the reference value 200 Measuring a sixth measured value including a shape error, a horizontal motion error, and a pitch error of the horizontal reference surface 212 using a sixth sensor 146 arranged to face the horizontal reference surface 212 of the horizontal reference surface 212 (G) a shape error of the horizontal reference surface 212 and a horizontal direction of the horizontal reference surface 212 by using the seventh sensor 147 disposed at a certain distance in the y-axis direction from the sixth sensor 146, Measuring a seventh measured value including a directional motion error; and (h) using a horizontal reference plane (e.g., a horizontal reference plane) using an eighth sensor 148 spaced apart from the seventh sensor 147 by a predetermined distance in the y- Measuring the eighth measured value including the shape error, the horizontal motion error, and the pitch error of the transfer mechanism (100) using the first measured value, the second measured value, and the third measured value, And calculates the roll error of the feed mechanism 100 using the fourth measured value and the fifth measured value, and calculates the roll error of the feed mechanism 100 based on the sixth measured value, the seventh measured value, and the eighth measured value And calculating a vertical movement error and a pitch error of the feed mechanism 100 using the values of the pitch error and the pitch error.

The present invention comprises the steps of (a) to (i), in which the sensor 140 having eight sensor jig 130 arranges five reference points of the reference plane 210, The present invention relates to a method of measuring a motion error, which can more easily calculate a motion error.

), 수평방향 운동오차(

), 요 오차(

)를 포함하는 제1측정값을 측정하는 단계이다.the step (a) may be performed by using the first sensor 141 arranged to face the vertical reference surface 211 of the reference part 200 arranged in parallel to the y-axis to adjust the shape error of the vertical reference surface 211

), Horizontal motion error (

), Yaw error (

) Of the first measurement value.

In the step (a), the first measured value measured by the first sensor 141 is represented by one equation as follows.

), 수평방향 운동오차(

)를 포함하는 제2측정값을 측정하는 단계이다. (b) may be performed by using a second sensor 142 spaced apart from the first sensor 141 by a predetermined distance in the y-axis direction,

), Horizontal motion error (

) Of the first measurement value.

In the step (b), the second measured value measured by the first sensor 141 and the second sensor 142 spaced apart from each other by d intervals in the y-axis direction is expressed by the following equation.

), 수평방향 운동오차(

), 요 오차(

)를 포함하는 제3측정값을 측정하는 단계이다.(c) may be performed by using the third sensor 143 disposed at a predetermined distance in the y-axis direction from the second sensor 142 to detect the shape error of the vertical reference surface 211

), Horizontal motion error (

), Yaw error (

) Of the first measurement value.

In the step (c), the third measured value measured by the third sensor 143 disposed at a distance d from the second sensor 142 in the y-axis direction is represented by the following equation.

), 수평방향 운동오차(

), 요 오차(

)를 포함하는 제4측정값을 측정하는 단계이다.(d) is performed by using the fourth sensor 144 spaced apart from the first sensor 141 by a predetermined distance in the z-axis direction to calculate the shape error of the vertical reference surface 211

), Horizontal motion error (

), Yaw error (

) Of the first measurement value.

In the step (d), the fourth measurement value measured by the fourth sensor 144 disposed at a distance of L in the z-axis direction from the first sensor 141 is represented by the following equation.

), 수평방향 운동오차(

)를 포함하는 제5측정값을 측정하는 단계이다.(e) may be performed by using the fifth sensor 145 spaced apart from the fourth sensor 144 by a predetermined distance in the y-axis direction, and the shape error of the vertical reference surface 211

), Horizontal motion error (

) Of the second measurement value.

In the step (e), the fifth measurement value measured by the fifth sensor 145 disposed at a predetermined distance in the y-axis direction from the fourth sensor 144 is represented by the following equation.

), 수평방향 운동오차(

), 피치 오차(

)를 포함하는 제6측정값을 측정하는 단계이다.(f) may be performed by using a sixth sensor 146 arranged to face the horizontal reference surface 212 of the reference portion 200 arranged in parallel to the y-axis to detect the shape error of the horizontal reference surface 212

), Horizontal motion error (

), Pitch error (

) Of the second measurement value.

In step (f), the sixth measured value measured by the sixth sensor 146 arranged to face the horizontal reference surface 212 of the reference part 200 arranged in parallel to the y-axis is expressed by the following equation Is expressed.

), 수평방향 운동오차(

)를 포함하는 제7측정값을 측정하는 단계이다.(g) may be performed by using a seventh sensor 147 disposed at a predetermined distance in the y-axis direction from the sixth sensor 146 to calculate the shape error of the horizontal reference surface 212

), Horizontal motion error (

) Of the second measurement value.

In the step (g), the seventh measured value measured by the seventh sensor 147 arranged at a predetermined distance in the y-axis direction from the sixth sensor 146 is expressed by the following equation.

), 수평방향 운동오차(

), 피치 오차(

)를 포함하는 제8측정값을 측정하는 단계이다.(h) may be performed by using the eighth sensor 148 spaced apart from the seventh sensor 147 by a predetermined distance in the y-axis direction to calculate the shape error of the horizontal reference surface 212

), Horizontal motion error (

), Pitch error (

) Of the eighth measured value.

In the step (h), the eighth measured value measured by the eighth sensor 148 disposed at a certain distance in the y-axis direction from the seventh sensor 147 is represented by the following equation.

In step (i), the horizontal movement error and the yaw error of the feed mechanism 100 are calculated using the first measured value, the second measured value, and the third measured value, and the fourth measured value and the fifth measured value are used A roll error of the feed mechanism 100 is calculated and a vertical movement error and a pitch error of the feed mechanism 100 are calculated using the sixth measured value, the seventh measured value, and the eighth measured value.

Where i represents a number from 1 to N, and N is a number obtained by dividing the total length measured by the sample period. The sample is assumed to be taken at the same sample period s.

The horizontal movement error and the yaw error of the feed mechanism 100 are calculated through the following process using Equations 1, 2, and 3 calculated from the first measurement value, the second measurement value, and the third measurement value.

의 값은 다음과 같이 계산되어 지고,To offset the effect of motion error

Is calculated as follows,

의 값을 2번 적분하면 된다.The shape error of the vertical reference surface 211 measured by the first sensor 141 to the third sensor 143 is determined by the above-

Is integrated twice.

)을 산출할 수 있고, 다시 수평방향 운동오차와 형상오차를 수학식3에 대입하면 요 오차(

)를 산출할 수 있다.Therefore, when the above-described shape error is substituted into Equation (2), a horizontal motion error (i.e., a horizontal motion error) by the first sensor 141 to the third sensor 143

), And by substituting the horizontal motion error and the shape error into the equation (3), the yaw error

) Can be calculated.

In addition, the roll error of the transport mechanism 100 caused by the height difference L of the sensor using Equations 4 and 5 calculated from the fourth measured value and the fifth measured value is calculated through the following process.

의 값은 다음과 같이 계산되어 지고,To offset the effect of motion error

Is calculated as follows,

의 값을 1번 적분하면 된다.The shape error of the vertical reference surface 211 measured by the fourth sensor 144 and the fifth sensor 145 is the

Is integrated once.

)을 산출할 수 있고, 다시 상기 수평방향 운동오차를 이용하면 롤 오차(

)를 산출할 수 있다.Therefore, by solving the above-mentioned shape error into Equation 5, it is possible to solve the horizontal motion error (the horizontal motion error) by the fourth sensor 144 and the fifth sensor 145

), And using the horizontal motion error again, the roll error (

) Can be calculated.

Similarly to the horizontal motion error and the yaw error component extracted from Equations (11) and (12) using Equations (6), (7) and (8) calculated from the sixth measurement value, the seventh measurement value and the eighth measurement value, ) And the pitch error can be calculated.

의 값은 다음과 같이 계산되어 지고,To offset the effect of motion error

Is calculated as follows,

의 값을 2번 적분하면 된다.The shape errors of the horizontal reference surface 212 measured by the sixth sensor 146 to the eighth sensor 148 are as follows

Is integrated twice.

)을 산출할 수 있고, 다시 수평방향 운동오차와 형상오차를 수학식8에 대입하면 피치 오차(

)를 산출할 수 있다. 여기서 제6센서(146) 내지 제8센서(148)에 의한 수평방향 운동오차는 수평 참조면(212)에 대한 수평방향 운동오차이기 때문에 이송기구(100)의 수직방향 운동오차와 같다.Therefore, if the above-mentioned shape error is substituted into Equation (7), the horizontal motion error (

), And by substituting the horizontal motion error and the shape error into the equation (8), the pitch error (

) Can be calculated. Here, the horizontal motion error by the sixth sensor 146 to the eighth sensor 148 is the same as the vertical motion error of the transport mechanism 100 because it is a horizontal motion error with respect to the horizontal reference surface 212.

)와 요 오차(

), 롤 오차(

), 수직방향 운동오차(=

)와 피치 오차(

)를 산출하는 단계이다.
(i) is performed in the same manner as described above, so that the horizontal motion error of the transport mechanism 100 as calculated in Equations (11), (12), (16)

) And yaw error (

), Roll error

), Vertical motion error (=

) And pitch error (

).

Although the preferred embodiments of the apparatus and method for measuring the motion error of the linear transport mechanism according to the present invention have been described above, the present invention is not limited to the technical idea, structure and operation of the present invention. And the scope of the technical idea of the present invention is not limited to or limited by the description with reference to the drawings or the drawings. It will also be appreciated by those skilled in the art that the concepts and embodiments of the invention set forth herein may be used as a basis for modifying or designing other structures for carrying out the same purposes of the present invention It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims and their equivalents. And various changes, substitutions, and alterations can be made without departing from the scope of the invention.

10: Motion error measuring device
100: Feed mechanism
110: fixing part 120: moving part
130: sensor jig 140: sensor
200: Reference
210: Reference plane

Claims (5)

An apparatus for measuring an error of a super precise linear transport mechanism (100) including a stationary part (110) and a moving part (120) for moving the stationary part (110)
A sensor jig (130) having a cross-sectional shape and having one end mounted on the moving part (120);
A sensor 140 having five sensors on the vertical surface and three sensors on the horizontal surface of the sensor jig 130; And
A reference portion 200 including a reference surface 210 corresponding to the shape of the sensor jig 130 and spaced from the side surface of the fixing portion 110,
The sensors 140 are arranged in two rows on the vertical plane of the sensor jig 130, three sensors are arranged at a predetermined interval d on a first row, and three sensors are arranged on a second row spaced apart from the first row by a predetermined distance L, Two dots are arranged in the interval d and three dots are arranged on a horizontal plane of the sensor jig 130 at a predetermined interval d,
The moving part 120 of the linear transport mechanism 100 performs a linear motion in the y-axis direction (the longitudinal direction of the fixing part 110) on the fixing part 110, A plurality of sensors 140 disposed on the sensor jig 130 coupled to the moving unit 120 so as to face the reference surface 210 of the reference unit 200 arranged, And measuring a 5-degree-of-freedom motion error of the transfer mechanism (100) by measuring a measurement value for each sensor including a part of the linear motion measurement error.
delete a linear motion in the y axis direction and a linear motion mechanism error in a horizontal (x) direction movement error, a vertical (z) direction movement error, a roll error, a yaw error and a pitch error In the measuring method,
(a) The moving part 120 of the linear transport mechanism 100 linearly moves once in the y-axis direction on the fixed part 110, and the reference surface 210 of the reference part 200 arranged in parallel to the y- Measuring a measurement value for each sensor including a part of the errors using a plurality of sensors 140 disposed in the sensor jig 130 coupled to the moving unit 120 so as to face the moving unit 120; And
(b) calculating a 5-degree-of-freedom motion error of the transfer mechanism 100 using the measured value obtained through one linear motion of the transfer mechanism 100 in the step (a)
The sensor jig 130 is a member having a cross-sectional shape, one end of which is provided on the moving part 120,
The sensors 140 are arranged in two rows on the vertical plane of the sensor jig 130, three sensors are arranged at a predetermined interval d on a first row, and three sensors are arranged on a second row spaced apart from the first row by a predetermined distance L, Wherein two of the sensor jigs (130) are arranged at intervals (d), and three sensor jigs (130) are arranged on a horizontal plane at a predetermined interval (d).
delete a linear motion in the y axis direction and a linear motion mechanism error in a horizontal (x) direction movement error, a vertical (z) direction movement error, a roll error, a yaw error and a pitch error In the measuring method,
(a) Using the first sensor 141 arranged to face the vertical reference plane 211 of the reference unit 200 arranged in parallel to the y-axis, the shape error of the vertical reference plane 211, Measuring a first measurement value including an error and a yaw error;
(b) using a second sensor 142 spaced apart from the first sensor 141 by a predetermined distance in the y-axis direction, Measuring two measured values;
(c) Including a shape error, a horizontal motion error, and a yaw error of the vertical reference surface 211 using the third sensor 143 disposed at a certain distance in the y-axis direction from the second sensor 142 Measuring a third measured value;
(d) Including the shape error, the horizontal motion error, and the yaw error of the vertical reference surface 211 using the fourth sensor 144 disposed at a predetermined distance in the z-axis direction from the first sensor 141 Measuring a fourth measured value;
(e) a fifth sensor 145 disposed at a predetermined distance in the y-axis direction from the fourth sensor 144, Measuring a measured value;
(f) Using the sixth sensor 146 arranged to face the horizontal reference plane 212 of the reference unit 200 arranged parallel to the y-axis, the shape error of the horizontal reference plane 212, Measuring a sixth measured value including an error and a pitch error;
(g) Using the seventh sensor 147 disposed at a certain distance in the y-axis direction from the sixth sensor 146, the seventh sensor 147, which includes the shape error of the horizontal reference surface 212, Measuring a measured value;
(h) Including the shape error, horizontal motion error, and pitch error of the horizontal reference surface 212 using the eighth sensor 148 disposed at a certain distance in the y-axis direction from the seventh sensor 147 Measuring an eighth measured value; And
(i) calculating a horizontal motion error and a yaw error of the transfer mechanism (100) using the first measured value, the second measured value, and the third measured value, and calculating the fourth measured value and the fifth measured value And calculates a roll error of the feed mechanism 100 using the sixth measured value, the seventh measured value, and the eighth measured value to determine a vertical movement error and a pitch error of the feed mechanism 100 And a step of calculating,
The first to eighth measured values obtained in steps (a) to (h) are measured by only measuring the reference surface 210 once by eight sensors 140, And a fifth degree of freedom motion error of the linear movement mechanism is calculated.

Images