KR101651879B1 - Apparatus for leveling a heater - Google Patents

Abstract

A heater leveling apparatus according to an embodiment of the present invention includes: a chamber having a showerhead mounted therein; A heater disposed at a lower portion of the shaft and having a substrate mounted thereon, and a heater connected to the heater block; And a leveling unit connected to the chamber and the shaft, outside the chamber, for adjusting the level of the heater block so that the reactive gas injected from the showerhead is uniformly deposited on the substrate.

Description

[0001] APPARATUS FOR LEVELING A HEATER [0002]

The present invention relates to a heater leveling apparatus, and more particularly, to a heater leveling apparatus for adjusting the level of a heater.

Generally, when a thin film is formed on a substrate by using a chemical vapor deposition apparatus, as the cumulative number of substrates subjected to the deposition process in the reaction chamber of the chemical vapor deposition apparatus is increased, not only on the substrate but also on the heater block inside the reaction chamber A thin film can be deposited.

This is because during the thin film deposition process, the reaction gas penetrates the edge of the heater block through the substrate edge portion in the reaction chamber to form a thin film deposition layer at this portion. When the thin film deposition layer is formed on the heater block, the substrate is placed obliquely when the substrate is placed on the heater block, so that the deposition characteristics of the thin film become poor and the reproducibility of the deposition process can not be secured.

When such a phenomenon occurs, the operation of the chemical vapor deposition apparatus is stopped, the thin film deposition layer deposited on the heater block and the foreign materials inside the reaction chamber are removed, and the apparatus is restored again. Thereafter, the position of the heater block Adjust.

For example, in a chemical vapor deposition apparatus as shown in Fig. 1, the position of the heater block 20 inside the chamber 10 is adjusted by using a heater block lifting unit 30 located below the chamber 10 . Then, the heater block leveling device 40 is used to adjust the level of the heater block.

On the other hand, a three-dimensional map (3D map) of the thin film obtained by performing the deposition process may be uneven. In order to obtain a uniform thin film thickness, a heater block leveling device 40 ) Should be performed to adjust the inclination of the heater block.

The method of adjusting the inclination of the heater block 20 using the heater block leveling device 40 adjusts the inclination of the leveling plate 41 fastened to the leveling screw 42. Then, the leveling plate 41 is fixed to the leveling screw 42 while tightening the upper nut 43 and the lower nut 44 connected to the leveling screw 42 in opposite directions. However, in this process, the leveling screw 42 is warped by the inclined angle &thetas; of the leveling plate 41 as shown in Figs. 1 and 2B at the portion abutting the upper nut 43 and the lower nut 44 .

As a result, when the upper nut 43 and the lower nut 44 are fastened with the leveling screw 42, the thread is lost and the role of the screw is lost. Also, due to the warping of the leveling screw 42, The positional manipulation can not be easily performed. Further, in this case, there is a situation in which the heater 10 needs to be separated from the chamber 10 in order to replace the broken heater block leveling device 40, and it takes a lot of time to replace it.

In order to replace the heater block leveling device 40, the temperature of the chamber 10 is lowered and the vacuum state in the chamber is released to make the chamber 10 in the standby state. Thereafter, the heater block 20 is removed and the heater block leveling device 40 by using a cutter.

If the leveling screw 42 is bent at the upper end of the leveling plate 41, cutting is not required. However, if a force is first applied to the lower portion of the leveling screw 42 when the upper nut 43 and the lower nut 44 are tightened, . At this time, the lower nut 44 may not be separated from the leveling screw 42 and may be cut off.

After replacing the heater block leveling device 40 through the above-described process, the heater block leveling device 40 is reassembled in the reverse order of the above-described procedure.

At this time, in the process of re-mounting the heater block 20 in the chamber 10, the centering and position calibration of the heater block 20 is performed. Thereafter, the chamber 10 is brought into a vacuum state, Go ahead. At this time, whether or not the state in the chamber 10 is reproduced as it is before the replacement is incomplete, and if a problem such as foreign matter detection occurs in the replacement process, the chamber 10 can not be used for a long time.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a heater leveling device capable of easily controlling a tilt of a heater, The purpose.

It is another object of the present invention to provide a heater leveling device for adjusting the inclination of a heater so that the quality of a film grown on a substrate is uniform during a chemical vapor deposition process.

According to an aspect of the present invention, there is provided a heater leveling apparatus comprising: a chamber;

A heater block on which the substrate is placed, and a heater connected to the heater block; And a leveling unit connected to the chamber and the shaft outside the chamber to adjust the inclination of the heater block, wherein the leveling unit includes: a leveling plate connected to the heater unit; A fixing member connecting the chamber and the leveling plate; And a plurality of leveling members connected to the chamber and the leveling plate for adjusting a height of the leveling plate.

Wherein the fixing member has one end screwed to the bottom surface of the chamber and the other end has a spherical head and the spherical head of the fixing member is seated on a fixing concave groove provided in the leveling plate, And is rotated.

The leveling plate is provided with a plurality of leveling through holes through which the plurality of leveling members are respectively passed, and an annular concave groove is formed in the inner circumferential surface of the plurality of leveling through holes along the circumferential direction of the leveling through hole.

A leveling shaft having one end coupled to a bottom surface of the chamber; And a spherical washer that surrounds the outer circumferential surface of the leveling shaft and is seated on the annular recessed groove and slidably rotates on a contact surface with the annular recessed groove.

The leveling member having a spherical head at one end and provided at a chamber recessed groove provided at the bottom surface of the chamber and the other end penetrating the leveling plate to connect the chamber and the leveling plate; And a fixing block that is seated on the chamber concave groove so as to surround one end of the leveling shaft, wherein the spherical head of the leveling shaft slides and rotates at a contact surface with the chamber concave groove and the fixing block.

The leveling member includes a leveling shaft connecting the chamber and the leveling plate; An upper washer portion having an upper convex washer and an upper concave washer provided with a concave surface abutting the convex surface of the upper convex washer; And a lower washer portion having a lower convex washer and a lower concave washer provided with a concave surface contacting the convex surface of the lower convex washer.

And the upper convex washers and the lower convex washers are slidable relative to the upper concave washer and the lower concave washer, respectively.

According to the present invention, it is possible to prevent the leveling shaft from being warped even if the leveling shaft has an inclination angle with respect to the vertical direction by adjusting the inclination of the leveling plate by the configuration of the leveling shaft and the leveling plate as described above, Can be prevented from being damaged.

According to another embodiment of the present invention, even when the leveling plate is inclined, the leveling shaft can be prevented from generating a bending stress in the leveling shaft while maintaining the inclining angle with respect to the vertical direction, Can be prevented.

In addition, by finely adjusting the position of the leveling plate connected to the leveling shaft, the reaction gas injected from the showerhead is uniformly deposited on the substrate placed on the heater block, thereby uniformly inducing film quality growth of the substrate, The defective rate can be reduced.

Further, the present invention can prevent the leveling member from being damaged, thereby eliminating the process of separating and reassembling the leveling device from the chamber in order to replace the leveling device due to the damage of the leveling device. Cost can be saved, and cost loss due to failure to perform the process while replacing parts can be prevented, which is economical.

In addition, the present invention prevents the leveling shaft from being warped, so that the leveling portion replacement and reassembling process due to the damage of the leveling shaft generated in the prior art does not have to be performed during the chemical vapor deposition process, It is possible to prevent a process mistake that may occur during reassembly (for example, a process environment can not be reproduced under the same conditions as the previous process, or a problem such as foreign matter into the chamber during the reassembling process).

Fig. 1 schematically shows a configuration diagram of a heater leveling apparatus according to the prior art.
FIG. 2A schematically shows a connection state diagram of a leveling screw and a leveling plate in a steady state, and FIG. 2B schematically shows a connection state diagram of a leveling plate in a bending state of the leveling screw.
3 schematically illustrates a configuration of a heater leveling apparatus according to an embodiment of the present invention.
4 schematically shows a plan view of the arrangement of the heating leveling portions according to an embodiment of the present invention.
FIG. 5A schematically shows an AA section of FIG. 3 in a steady state, and FIG. 5B schematically shows an AA section of FIG. 3 in a bent state.
FIG. 6 schematically shows a configuration of a heating leveling unit according to an embodiment of the present invention.
7 schematically shows a configuration of a heating leveling unit according to another example of the present invention.

Hereinafter, a heater leveling apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

≪ Embodiment 1 >

3 and 4, the heater leveling apparatus 100 according to the present embodiment includes a chamber 110, a heater unit 120, an elevation driving unit 130, and a leveling unit 140.

A showerhead 115 for spraying a reaction gas into the substrate 1 is installed in the chamber 110.

The shower head 115 is provided with a heater unit 120 on which a substrate is placed and heated. The heater unit 120 includes a heater block 121 and a shaft 122 for supporting the heater block. The shaft 122 is connected to an elevation driving unit 130 located outside the chamber 110.

The lifting and lowering driving unit 130 lifts and drives the shaft 122 to adjust the height of the heater block 121. The lifting and lowering driving unit 130 includes a lifting plate 131, a lifting shaft 132, a guide rail 133, a lifting member 134, and a driving motor 135.

The lifting shaft 132 is located outside the chamber 110 and a leveling plate 141 is connected to the upper surface of the lifting shaft 132. A guide rail 133 is provided on a side surface of the lifting shaft 132 and the lifting plate 131 is connected to the guide rail 133 through the lifting member 134.

The shaft 122 is connected to the lifting plate 131. The lifting member 134 is lifted and lowered along the guide rails 133 by driving the driving motor 135. The lifting plate 131 connected to the lifting member 134 and the shaft 122 and the heater block 121 supported by the lifting plate 131 are raised and lowered.

The leveling unit 140 is installed between the chamber 110 and the lifting and lowering driving unit 130. The leveling unit 140 includes a leveling plate 141, a fixing member 143, and a plurality of leveling members 145.

The leveling plate 141 has a flat plate-like structure having a shaft hole 141a through which the shaft 122 passes. The leveling plate 141 is fixed to the lifting shaft 132 and adjusts the inclination of the leveling plate 141 to move the lifting shaft 132 and the shaft 122 connected to the lifting shaft 132. [ And the inclination of the heater block 121 can be adjusted.

The leveling plate 141 is connected to the chamber 110 by a fixing member 143 and a plurality of leveling members 145. The leveling plate 141 is provided with a fixed concave groove 141b in which a spherical head portion of the fixing member 143 is seated and concaved in a shape corresponding to the spherical head portion and a plurality of leveling members 145 A plurality of leveling through holes 141c are formed so as to penetrate through them.

The fixing member 143 has a fixing height with the leveling plate 141 and is slidably rotatable with respect to the leveling plate 141 to connect the leveling plate 141 and the chamber 110 . As shown in FIG. 3, one end 143a of the fixing member 143 is provided with a thread, and the other end 143b has a spherical structure. The fixing member 143 is fixed to the fixed concave groove 141b so that one end 143a is screwed to the bottom surface of the chamber 110 and the other end 143b is seated on the fixing concave groove 141b and covers the fixing concave groove 141b. And is coupled to the leveling plate 141 by an elastic member 142.

The plurality of leveling members 145 can adjust the tightening height with the leveling plate 141 and are slidably pivotable with respect to the bottom surface of the chamber 110. The leveling plate 141 and the chamber 110 ). The inclination of the leveling plate 141 is adjusted by adjusting the level of the leveling member 145 and the leveling plate 141. 4, the plurality of leveling members 145 are connected to the chamber 110 and the leveling plate 141 at a position substantially triangularly separated from the fixing member 143. As shown in FIG.

3 to 5B, the leveling member 145 includes a leveling shaft 146, a fixing block 146d, a first nut member 147, and a second nut member 148. [

The leveling shaft 146 has a spherical structure at one end and is slidably seated in a chamber concave groove 116 provided on the bottom surface of the chamber 110. The leveling shaft 146 is fixed to the chamber 110).

The leveling shaft 146 is installed in the chamber concave groove 116 so as to surround one end of the leveling shaft 146 and the portion where the leveling shaft is mounted corresponds to a sphere of one end of the leveling shaft 146 As shown in Fig. The fixed block 146d is coupled to the chamber 110 by an engaging bolt.

The other end of the leveling shaft 146 is connected to the leveling plate 141 through a leveling through hole 141c. The leveling shaft 146 is coupled to the leveling plate 141 by a first nut member 147 and a second nut member 148.

The heater leveling apparatus 100 according to the present embodiment is provided between the first nut member 147 and the upper surface of the leveling plate 141 and the lower surface of the leveling plate 141 in order to protect the leveling plate 141. [ And a flat washer 149 may be further provided between the first nut member 148 and the second nut member 148.

The inclination of the leveling plate 141 can be adjusted by adjusting the level of the leveling shaft 146 and the leveling plate 141. At this time, the leveling shaft 146 is smoothly rotated at the contact surface of the spherical head portion with the chamber concave groove 116 and the fixed block 146d, so that the leveling shaft 146 and the leveling plate 141 As before the tilt adjustment can be done at right angles.

This prevents the leveling shaft 146 from being bent and prevents the nut members 147 and 148 from being damaged when the nut member is tightened and fixed by the bent leveling shaft as in the prior art .

The heater leveling apparatus 100 according to the present embodiment is configured to prevent the leveling shaft 146 from being warped so that the first nut member 147 and the second nut member 148 are tightened or loosened It can be performed smoothly, and leveling can be facilitated.

It is also possible to prevent the leveling shaft 146 from being warped and replace and reassemble the leveling unit 140 during the CVD process so that the leveling unit 140 can be removed from the chamber 110 It is possible to prevent a process mistake that may occur during desorption and reassembly (for example, a process environment can not be reproduced under the same conditions as the previous process, or a problem such as foreign matter into the chamber 110 in the reassembling process).

The position of the leveling plate 141 is finely adjusted so that the reaction gas injected from the showerhead 115 is uniformly deposited on the substrate 1 placed on the heater block 121, 1) can be reduced.

≪ Embodiment 2 >

Hereinafter, a heater leveling apparatus according to a second embodiment of the present invention will be described with reference to FIG.

Since the structure of the leveling members of the heater leveling device according to the present embodiment is different from that of the first embodiment, the same reference numerals are assigned to the same structures as those of the first embodiment, and a duplicated description is omitted

6, the leveling member 245 according to the present embodiment includes a leveling shaft 246, a spherical washer 246c, a first nut member 247, and a second nut member 248. [ The leveling plate 241 is provided with a fixed concave groove on which a fixing member (not shown) is seated as in the above-described first embodiment and includes a plurality of leveling through holes 241c ).

An annular recessed groove portion 241e is formed in the inner peripheral surface of the plurality of leveling through holes 241c along the circumferential direction. It is preferable that the annular concave groove portion 241e has a structure that can be bolted to the leveling through hole 241c of the leveling plate 241. [

One end (246a) of the leveling shaft (246) is threaded and screwed to the bottom surface of the chamber (110).

A spherical washer 246c is installed on the outer circumferential surface of the leveling shaft 246 according to the present embodiment. The spherical washer 246c surrounds the outer circumferential surface of the leveling shaft 246 and has a structure rotatably mounted on the annular concave groove portion 241e.

 The leveling shaft 246 is coupled to the leveling plate 241 by a first nut member 247 and a second nut member 248.

A flat washer 249 is provided between the first nut member 247 and the leveling plate 241 and between the second nut member 248 and the leveling plate 241 to protect the leveling plate 241 It is possible.

The inclination of the leveling plate 241 can be adjusted by adjusting the level of the leveling shaft 246 and the leveling plate 241. At this time, the leveling plate 241 is smoothly rotated at the contact surface with the spherical washer 246c.

Thus, the leveling shaft 246 maintains a vertical state with respect to the bottom surface of the chamber 110, but it is possible to prevent a warp from occurring between the leveling shaft 241 and the leveling shaft 246, It is possible to prevent the nut members 247 and 248 from being damaged when the nut member is fastened and fixed by the leveling shaft.

≪ Third Embodiment >

Hereinafter, a heater leveling apparatus according to a third embodiment of the present invention will be described with reference to FIGS. 7A and 7B. FIG.

Since the structure of the leveling members of the heater leveling apparatus according to the present embodiment is different from that of the first and second embodiments, the same reference numerals are given to the same structures as those of the first and second embodiments, Omit

The leveling portion of this embodiment includes a leveling plate 341, a fixing member (not shown), and a plurality of leveling members 345.

7A, the leveling member 345 includes a leveling shaft 346, a first nut member 347, a second nut member 348, an upper washer portion 347a and a lower washer portion 348a, . Here, the leveling plate 341 is provided with a fixed concave groove (not shown) in which the fixing member (not shown) is seated, and a plurality of leveling through holes 341c (not shown) through which the plurality of leveling members 345 penetrate ).

One end of the leveling shaft 346 is screwed to the bottom surface of the chamber 110. The leveling shaft 346 is coupled to the leveling plate 341 by a first nut member 347 and a second nut member 348

The leveling member 345 includes an upper washer portion 347a disposed between the first nut member 347 and the leveling plate 341 and a lower washer portion 347b between the leveling plate 341 and the second nut member 348. [ And a lower washer portion 348a.

The upper washer portion 347a is composed of an upper convex washer 347b and an upper concave washer 347c. The upper convex washer 347b is positioned such that its flat side is in contact with the first nut member 347 and the convex side is positioned to contact the concave side of the upper concave washer 347c. The upper concave washer 347c is positioned such that a flat surface is in contact with the leveling plate 341 and a concave surface is in contact with the convex surface of the upper convex washer 347b.

The lower washer portion 348a includes a lower convex washer 348b and a lower concave washer 348c. The construction of the lower convex washer 348b and the lower concave washer 348c is the same as that of the upper convex washer 347b and the upper concave washer 347c, and thus a duplicated description will be omitted.

The inclination of the leveling plate 341 can be adjusted by adjusting the level of the leveling shaft 346 and the leveling plate 341. At this time, the upper convex washer 347b and the lower convex washer 348b disposed at the upper and lower portions of the leveling plate 341 are respectively engaged with the upper concave washer 347c and the lower concave washer 348c It slides smoothly and moves.

Thus, the leveling shaft 346 maintains a vertical state with respect to the bottom surface of the chamber 110, but it is possible to prevent a warp from occurring between the leveling shaft 341 and the leveling shaft 341, It is possible to prevent the nut members 347 and 348 from being damaged when the nut member is fastened and fixed by the leveling shaft.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

100: heater leveling device
110: chamber 120: heater part
121: Heater block 122: shaft
130: lifting opening portion 131: lifting plate
132; Lifting shaft 133: guide rail
134: lifting member 135: drive motor
140: Leveling section 141: Leveling plate
143: fixing member 145, 245, 345: leveling member
146, 246, 346: leveling shaft 146d: fixed block
147, 247, 347: first nut member 148, 248, 348: second nut member
347a: upper washer portion 347b: upper convex washer
347c: upper concave washer 348a: lower washer portion
348b: Lower convex washer 348c: Lower concave washer

Claims (8)

delete delete delete chamber;
A heater block on which the substrate is placed, and a heater connected to the heater block; And
A leveling plate connected to the heater unit, a fixing member connecting the chamber and the leveling plate, And a leveling member connected to the chamber and the leveling plate and having a plurality of leveling members for adjusting a height of the leveling plate, wherein the leveling member is connected to the chamber and the shaft outside the chamber to adjust a tilt of the heater block, ≪ / RTI >
Wherein the fixing member has one end screwed to the bottom surface of the chamber and the other end has a spherical head and the spherical head of the fixing member is seated on a fixing concave groove provided in the leveling plate, However,
Wherein the leveling member includes a leveling shaft having one end coupled to a bottom surface of the chamber, a spherical washer that surrounds the outer circumferential surface of the leveling shaft and is seated on the annular recessed groove and slidably rotates on a contact surface of the annular recessed groove, Wherein the leveling plate is provided with a plurality of leveling through holes through which the plurality of leveling members are respectively passed and the annular recessed grooves are formed in the inner circumferential surface of the plurality of leveling through holes along the circumferential direction of the leveling through hole. Device.
chamber;
A heater block on which the substrate is placed, and a heater connected to the heater block; And
A leveling plate connected to the heater unit, a fixing member connecting the chamber and the leveling plate, And a leveling member connected to the chamber and the leveling plate and having a plurality of leveling members for adjusting a height of the leveling plate, wherein the leveling member is connected to the chamber and the shaft outside the chamber to adjust a tilt of the heater block, ≪ / RTI >
Wherein the fixing member has one end screwed to the bottom surface of the chamber and the other end has a spherical head and the spherical head of the fixing member is seated on a fixing concave groove provided in the leveling plate, However,
The leveling member
A leveling shaft having a spherical head and provided at a chamber concave groove provided in a bottom surface of the chamber and having the other end penetrating the leveling plate to connect the chamber and the leveling plate;
And a fixing block which is seated on the chamber recessed groove so as to surround one end of the leveling shaft,
Wherein the spherical head of the leveling shaft slides and rotates at a contact surface with the chamber recessed groove and the fixed block.
chamber;
A heater block on which the substrate is placed, and a heater connected to the heater block; And
And a leveling unit connected to the chamber and the shaft, outside the chamber, for adjusting a tilt of the heater block,
The leveling unit,
A leveling plate connected to the heater unit;
A fixing member connecting the chamber and the leveling plate; And
And a plurality of leveling members connected to the chamber and the leveling plate for adjusting a height of the leveling plate,
The leveling member
A leveling shaft connecting the chamber and the leveling plate;
An upper washer portion having an upper convex washer and an upper concave washer provided with a concave surface abutting the convex surface of the upper convex washer; And
And a lower washer portion having a lower convex washer and a lower concave washer provided with a concave surface abutting against the convex surface of the lower convex toothed portion. The method according to claim 6,
Wherein the upper convex washer and the lower convex washer are slidable relative to the upper concave washer and the lower concave washer, respectively.
8. The method according to claim 6 or 7,
Wherein the fixing member has one end screwed to the bottom surface of the chamber and the other end has a spherical head,
Wherein the spherical head of the fixing member is seated on a fixed concave groove provided on the leveling plate and slidably rotates on a contact surface with the fixed concave groove.

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