KR101622167B1 - Apparatus for packaging an electronic components - Google Patents
Apparatus for packaging an electronic components Download PDFInfo
- Publication number
- KR101622167B1 KR101622167B1 KR1020150034640A KR20150034640A KR101622167B1 KR 101622167 B1 KR101622167 B1 KR 101622167B1 KR 1020150034640 A KR1020150034640 A KR 1020150034640A KR 20150034640 A KR20150034640 A KR 20150034640A KR 101622167 B1 KR101622167 B1 KR 101622167B1
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- South Korea
- Prior art keywords
- dielectric
- dielectric sheet
- sheets
- conductive patterns
- sheet
- Prior art date
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/142—Metallic substrates having insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/073—Apertured devices mounted on one or more rods passed through the apertures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
An electronic component packaging apparatus according to an embodiment of the present invention includes a dielectric layer formed by stacking at least two dielectric sheets, a plurality of conductive patterns formed on a partial upper region of each of the dielectric sheets, and at least one dielectric sheet At least one mounting region capable of mounting at least one or more semiconductor chips by patterning the dielectric sheets; and a plurality of conductive patterns formed through patterning for each of the dielectric sheets and selectively interconnecting the plurality of conductive patterns, A plurality of vias for selectively connecting the conductive patterns to the semiconductor chip, a capacitor formed by using at least one or more dielectric sheets of the dielectric sheets and the plurality of conductive patterns, One of A resistor formed by forming a resistance pattern on an upper portion of the resistance pattern and connecting both sides of the resistance pattern to conductive patterns on a dielectric sheet on which the resistance pattern is formed, and conductive patterns formed on at least two of the dielectric sheets, And an inductor formed by interconnecting via vias formed in the sheets.
Description
BACKGROUND OF THE
BACKGROUND ART [0002] With the recent development of ultra-small wearable devices, the demand for ultra-small parts has been increasing. Thus, module technologies are being developed that incorporate resistors, capacitors, and inductors in chip-scale packaging or multi-layer PCBs.
Conventional modularization technology has a problem that the design and manufacture of electronic products and electronic devices are limited according to the size of the PCB board because the semiconductor chip and the driving elements for surface mounting such as resistors, capacitors, and inductors are all mounted on the PCB board, There is a limitation in miniaturization.
Resistors, inductors, and capacitors are integrated using multi-layer substrate technologies such as low-teperature co-fired ceramic (LTCC) to form various functional circuits such as filters, duplexers, And is manufactured as a module. However, it is mainly applied to microwave components and modules because it uses a ceramic substrate with a low relative dielectric constant of about 5 to 9.
In the case of a capacitor or an inductor having various capacitances or inductances required for driving various semiconductor chips including a digital semiconductor chip, a multilayer ceramic capacitor (hereinafter referred to as " multilayer ceramic capacitor ") using a ceramic substrate having a dielectric constant value as high as 30 to 100, MLCC ') and ferrite. The capacitors and inductors are fabricated individually using chip inductor technology using a magnetic substrate with a magnetic permeability as high as 100, and assembled on a PCB substrate.
Therefore, there is a problem that it is difficult to fabricate a capacitor and an inductor simultaneously on a single substrate.
The present invention provides an electronic component packaging apparatus capable of implementing a semiconductor chip and resistors, inductors, and capacitors necessary for driving the semiconductor chip using conductive patterns and vias formed in the stacked dielectric sheets.
The present invention also provides a method of fabricating electronic components by stacking dielectric sheets using multilayer substrate technology such as LTCC, MLCC, or multilayer PCB, forming conductive patterns and vias in the stacked dielectric sheets, The present invention also provides an electronic component packaging apparatus capable of performing packaging.
The present invention provides an electronic component packaging apparatus capable of implementing an inductor having a high inductance value in a structure in which dielectric sheets are laminated by applying a magnetic material to an electronic component packaging.
The present invention also provides an electronic component packaging apparatus capable of realizing a capacitor having a high capacitance value by using a dielectric material having a high dielectric constant of dielectric sheets.
According to an embodiment of the present invention, there is provided a semiconductor device comprising: a dielectric layer formed by stacking at least two dielectric sheets; a plurality of conductive patterns formed on an upper partial area of each of the dielectric sheets; At least one mounting area capable of mounting one or more semiconductor chips; patterning for each of the dielectric sheets and selectively interconnecting the plurality of conductive patterns; interconnecting the dielectric sheets; A plurality of vias for selectively connecting the patterns to the semiconductor chip; a capacitor formed by using at least one or more dielectric sheets of the dielectric sheets and at least one of the plurality of conductive patterns; A resistance pattern A resistor formed by connecting both sides of the resistance pattern to the conductive patterns on the dielectric sheet on which the resistance pattern is formed and conductive patterns formed on at least two of the dielectric sheets by vias formed in the at least two dielectric sheets And an inductor formed by interconnecting the plurality of semiconductor devices with each other.
According to an embodiment of the present invention, the dielectric layer is formed by stacking
According to an embodiment of the present invention, the capacitor interconnects the conductive patterns formed on the
According to the embodiment of the present invention, the inductor is formed by interconnecting one end portions of the conductive patterns formed in the upper part of the
According to an embodiment of the present invention, the packaging apparatus includes a structure for wrapping the inside and the outside of another inductor, in which conductive patterns on at least two or more dielectric sheets of the dielectric sheets are interconnected using a plurality of vias, using a magnetic material And a magnetic body inductor.
According to an embodiment of the present invention, the magnetic inductor interconnects the one end portions of the conductive patterns formed in the upper part of the dielectric sheet 3 to the dielectric sheet 6 using vias formed in the dielectric sheet 4 to the dielectric sheet 6 First and second magnetic patterns formed on the dielectric sheet 2 and on the dielectric sheet 7, and first and second magnetic material vias formed through the dielectric sheets 2 to 7, And a structure that surrounds the conductive patterns connected to each other via the vias of the dielectric sheet 6.
According to an embodiment of the present invention, the capacitor may be formed by forming the magnetic material on the dielectric sheets through an LTCC or MLCC or PCB process to form the first and second magnetic material vias and the first and second magnetic patterns .
According to an embodiment of the present invention, the magnetic inductor further includes a magnetic pattern formed inside the conductive patterns formed on the upper portion of the dielectric sheet 3 to the dielectric sheet 6.
According to an embodiment of the present invention, the packaging apparatus includes a dielectric pattern having a higher dielectric constant than the dielectric sheets surrounding a part of the conductive pattern formed on the upper portion of the dielectric sheet 8, and a dielectric pattern And a capacitor.
According to an embodiment of the present invention, the packaging apparatus further comprises a parallel plate capacitor formed by using a conductive pattern formed on the dielectric sheet 8 having a high relative dielectric constant among the dielectric sheets and a conductive pattern formed on the dielectric sheet 7 .
According to an embodiment of the present invention, the dielectric sheets are formed through LTCC or MLCC or PCB processes.
According to an embodiment of the present invention, the dielectric sheets are formed of a material having a dielectric constant different from that of the capacitor according to the capacitance of the capacitor.
According to an embodiment of the present invention, a semiconductor chip mounted on the mounting region is connected to a conductive pattern formed on the dielectric sheet through wire bonding or solder bumps.
According to an embodiment of the present invention, the mounting area and the plurality of vias are formed by patterning the dielectric sheets by laser machining or mechanical punching.
According to an embodiment of the present invention, a buffer material is buried after the semiconductor chip is mounted on the mounting region.
According to an embodiment of the present invention, the resistance pattern is formed by overlapping the conductive patterns on the dielectric sheet on which the resistance pattern is formed.
According to an embodiment of the present invention, the dielectric layer further includes a solder bump or a surface mounting pad for inputting and outputting an electric signal to the lower surface.
According to the embodiments of the present invention, since the passive elements necessary for driving the semiconductor chip are three-dimensionally integrated in the package using a plurality of dielectric sheets, conductive patterns and vias, the size of the entire electronic component board can be reduced .
In addition, according to the embodiments of the present invention, since terminals of most semiconductor chips except for input and output of power and signals are used for connecting passive elements for driving, in the present invention, three- The number of electronic component package terminals can be reduced, which reduces the size of the package and facilitates assembly with electronic devices.
According to the embodiment of the present invention, by forming the electronic component packaging apparatus using the dielectric sheets formed through the LTCC, MLCC, or PCB process, the processes necessary for manufacturing and assembling electronic components can be omitted, Generation and energy can be reduced.
1 is a perspective view showing an electronic component packaging apparatus according to an embodiment of the present invention,
2 is a cross-sectional view of an electronic component packaging apparatus according to an embodiment of the present invention,
3A and 3B are plan views illustrating a process of forming first and second resistors in an electronic part packaging apparatus according to an embodiment of the present invention,
4 is a perspective view illustrating a process of forming an inductor in an electronic component packaging apparatus according to an embodiment of the present invention,
FIG. 5 is a cross-sectional view illustrating a process of forming an inductor in an electronic component packaging apparatus according to an embodiment of the present invention,
6 is a perspective view for explaining a structure of a magnetic body inductor according to an embodiment of the present invention,
7 is a layered exploded view for explaining a structure of a magnetic body inductor according to an embodiment of the present invention,
8 is a perspective view illustrating a structure of a capacitor according to an embodiment of the present invention,
9 is a plan view for explaining a structure of a capacitor according to an embodiment of the present invention,
10 is a sectional view for explaining a dielectric patterned capacitor of an electronic part packaging apparatus according to an embodiment of the present invention,
11 is a cross-sectional view illustrating a parallel plate capacitor of an electronic part packaging apparatus according to an embodiment of the present invention,
12 is a plan view showing a structure of a mounting region for mounting a semiconductor chip of an electronic component packaging apparatus according to an embodiment of the present invention.
Hereinafter, specific embodiments of the present invention will be described with reference to the drawings. The following detailed description is provided to provide a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, this is merely an example and the present invention is not limited thereto.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. The following terms are defined in consideration of the functions of the present invention, and may be changed according to the intention or custom of the user, the operator, and the like. Therefore, the definition should be based on the contents throughout this specification. The terms used in the detailed description are intended only to describe embodiments of the invention and should in no way be limiting.
FIG. 1 is a perspective view showing an electronic component packaging apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view of an electronic component packaging apparatus according to an embodiment of the present invention.
1 and 2, an electronic component packaging apparatus includes a
The electronic component packaging apparatus may further include a
The
The
The first to eighth
The first to
The first to eighth
The electronic component packaging apparatus according to the embodiment of the present invention includes a magnetic body inductor (not shown) electrically connected to the
The first and
A process of forming the first and
FIGS. 3A and 3B are plan views illustrating a process of forming first and
3A, the
In this manner, a
The
The process of forming such an
FIG. 4 is a perspective view illustrating a process of forming an
4 to 5, the
One end of the first
The inductance value of the
Meanwhile, the electronic component packaging apparatus according to the embodiment of the present invention may further include a
FIG. 6 is a perspective view for explaining the structure of the
6 and 7, the
In addition, the third to sixth
The
In the embodiment of the present invention, the magnetic material may mean a material having a specific permeability of 1 or more.
As described above, by covering the
The other end portion of the third
The sixth
The
FIG. 8 is a perspective view illustrating a structure of a
8 to 9, the
More specifically, the
The electronic component packaging apparatus according to the embodiment of the present invention may further include a dielectric patterned
The dielectric
10 is a cross-sectional view for explaining a dielectric patterned
10, the dielectric patterned
In an embodiment of the present invention, the
One end of the ninth
The capacity of the dielectric
The electronic component packaging apparatus according to the embodiment of the present invention may further include a
11 is a cross-sectional view illustrating a
As shown in Fig. 11, the
The capacitance of the
The
12 is a plan view showing the structure of the mounting
First, as shown in FIG. 12, a mounting
A plurality of sixth
The size and shape of the sixth
In addition, after the
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, . Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be determined by equivalents to the appended claims, as well as the appended claims.
100:
130: Inductor 140: Capacitor
150: semiconductor chip 160: chip mounting area
170: Surface mounting pad 180: Solder bump
Claims (18)
A plurality of conductive patterns formed on an upper portion of each of the dielectric sheets,
At least one mounting region capable of mounting at least one semiconductor chip by patterning at least one dielectric sheet in the dielectric layer,
A plurality of vias formed through patterning for each of the dielectric sheets and selectively interconnecting the plurality of conductive patterns, interconnecting the dielectric sheets, selectively connecting the conductive patterns to the semiconductor chip,
A capacitor formed by using at least one or more dielectric sheets of the dielectric sheets and the plurality of conductive patterns,
A resistor formed by forming a resistance pattern on one of the dielectric sheets and connecting both sides of the resistance pattern to the conductive patterns on the dielectric sheet on which the resistance pattern is formed;
And an inductor formed by interconnecting conductive patterns formed on at least two of the dielectric sheets with vias formed in the at least two dielectric sheets,
The dielectric layer may be formed by stacking dielectric sheets 1, 2, 3, 4, 5, 6, 7, and 8 made of the same material,
The capacitors are formed using conductive patterns and vias formed on the dielectric sheets 1 to 6,
Further comprising a magnetic material inductor having a structure that surrounds the inside and outside of another inductor in which the conductive patterns on at least two dielectric sheets of the dielectric sheets are interconnected by using a plurality of vias using a magnetic material. Component packaging device.
The capacitor
The conductive patterns formed on the dielectric sheets 1, 3, and 5 are interconnected using vias formed in the dielectric sheet 2 to the dielectric sheet 5, and conductive patterns formed on the dielectric sheets 2, 4, And a conductive pattern formed on the dielectric sheet 1 is formed on the lower surface of the dielectric sheet 1 through vias formed in the dielectric sheet 1, To the electronic component packaging device.
The inductor includes:
Wherein one end portions of the conductive patterns formed in the upper part of the dielectric sheet 1 to the dielectric sheet 4 are interconnected by using vias formed in the dielectric sheet 2 to the dielectric sheet 4.
Wherein the magnetic body inductor comprises:
One ends of the conductive patterns formed in the upper part of the dielectric sheet 3 to the dielectric sheet 6 are interconnected by using vias formed in the dielectric sheet 4 to the dielectric sheet 6,
The first and second magnetic patterns formed on the dielectric sheet 2 and the dielectric sheet 7, and the first and second magnetic material vias formed through the dielectric sheet 2 to the dielectric sheet 7, Wherein the dielectric sheet (6) has a structure of wrapping with conductive patterns interconnected via vias of the dielectric sheet (6).
The capacitor
Wherein the magnetic material is formed on the dielectric sheets through an LTCC, an MLCC, or a PCB process to form the first and second magnetic material vias and the first and second magnetic patterns.
Wherein the magnetic body inductor comprises:
And a magnetic pattern formed inside the conductive patterns formed on the upper part of the dielectric sheet (3) to the dielectric sheet (6).
Further comprising a dielectric pattern having a dielectric constant higher than that of the dielectric sheets surrounding a part of the conductive pattern formed on an upper portion of the dielectric sheet and a dielectric pattern capacitor surrounding a part of the dielectric pattern. Device.
The dielectric pattern may be formed,
A screen printing process, an inkjet printing process, or a three-dimensional printing process.
Further comprising a parallel plate capacitor formed by using a conductive pattern formed on an upper portion of the dielectric sheet (8) having a high dielectric constant and a conductive pattern formed on the dielectric sheet (7) among the dielectric sheets.
The dielectric sheets are,
Lt; RTI ID = 0.0 > LTCC < / RTI > or MLCC or PCB process.
The dielectric sheets are,
Wherein the capacitor is formed of a material having a different relative dielectric constant depending on the capacity of the capacitor.
And a semiconductor chip mounted on the mounting region,
Wherein the conductive pattern is connected to the conductive pattern formed on the dielectric sheet through wire bonding.
Wherein the mounting region and the plurality of vias are electrically connected,
Wherein the dielectric sheet is formed by patterning the dielectric sheets by laser processing or mechanical punching.
In the mounting region,
Wherein the cushioning material is embedded after the semiconductor chip is mounted.
The resistance pattern
Wherein the resistance pattern is formed to overlap with the conductive patterns on the dielectric sheet on which the resistance pattern is formed.
Wherein,
Further comprising a solder bump or a surface mounting pad for inputting and outputting an electric signal to the lower surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150034640A KR101622167B1 (en) | 2015-03-12 | 2015-03-12 | Apparatus for packaging an electronic components |
Applications Claiming Priority (1)
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KR1020150034640A KR101622167B1 (en) | 2015-03-12 | 2015-03-12 | Apparatus for packaging an electronic components |
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KR101622167B1 true KR101622167B1 (en) | 2016-05-18 |
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KR1020150034640A KR101622167B1 (en) | 2015-03-12 | 2015-03-12 | Apparatus for packaging an electronic components |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007149992A (en) * | 2005-11-28 | 2007-06-14 | Kyocera Corp | Multilayer printed circuit board |
US20100046137A1 (en) * | 2008-03-13 | 2010-02-25 | Murata Manufacturing Co., Ltd. | Glass ceramic composition, glass ceramic sintered body, and multilayer ceramic electronic device |
-
2015
- 2015-03-12 KR KR1020150034640A patent/KR101622167B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007149992A (en) * | 2005-11-28 | 2007-06-14 | Kyocera Corp | Multilayer printed circuit board |
US20100046137A1 (en) * | 2008-03-13 | 2010-02-25 | Murata Manufacturing Co., Ltd. | Glass ceramic composition, glass ceramic sintered body, and multilayer ceramic electronic device |
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