KR101542493B1 - 다중 절연 세그먼트들을 구비하는 절연된 도전 장치 - Google Patents

다중 절연 세그먼트들을 구비하는 절연된 도전 장치 Download PDF

Info

Publication number
KR101542493B1
KR101542493B1 KR1020107005409A KR20107005409A KR101542493B1 KR 101542493 B1 KR101542493 B1 KR 101542493B1 KR 1020107005409 A KR1020107005409 A KR 1020107005409A KR 20107005409 A KR20107005409 A KR 20107005409A KR 101542493 B1 KR101542493 B1 KR 101542493B1
Authority
KR
South Korea
Prior art keywords
conductor
conductive device
insulated conductive
segment
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020107005409A
Other languages
English (en)
Korean (ko)
Other versions
KR20100053652A (ko
Inventor
카세근 디. 테클렛사딕
스티븐 이. 크라우즈
에릭 디. 허맨슨
러셀 제이. 로우
Original Assignee
베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. filed Critical 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크.
Publication of KR20100053652A publication Critical patent/KR20100053652A/ko
Application granted granted Critical
Publication of KR101542493B1 publication Critical patent/KR101542493B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/56—Insulating bodies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cable Accessories (AREA)
  • Insulators (AREA)
  • Insulated Conductors (AREA)
  • Insulation, Fastening Of Motor, Generator Windings (AREA)
  • Transformers For Measuring Instruments (AREA)
KR1020107005409A 2007-08-20 2008-08-20 다중 절연 세그먼트들을 구비하는 절연된 도전 장치 Active KR101542493B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/841,086 US7799999B2 (en) 2007-08-20 2007-08-20 Insulated conducting device with multiple insulation segments
US11/841,086 2007-08-20

Publications (2)

Publication Number Publication Date
KR20100053652A KR20100053652A (ko) 2010-05-20
KR101542493B1 true KR101542493B1 (ko) 2015-08-06

Family

ID=40378967

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107005409A Active KR101542493B1 (ko) 2007-08-20 2008-08-20 다중 절연 세그먼트들을 구비하는 절연된 도전 장치

Country Status (6)

Country Link
US (1) US7799999B2 (https=)
JP (1) JP5605729B2 (https=)
KR (1) KR101542493B1 (https=)
CN (1) CN101903960B (https=)
TW (1) TWI433191B (https=)
WO (1) WO2009026340A2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999239B2 (en) * 2007-12-10 2011-08-16 Varian Semiconductor Equipment Associates, Inc. Techniques for reducing an electrical stress in an acceleration/deceleraion system
US8437156B2 (en) * 2009-08-06 2013-05-07 Gtat Corporation Mirror-image voltage supply
FR3001080B1 (fr) * 2013-01-11 2015-03-13 Schneider Electric Ind Sas Isolateur-support moyenne tension
CN103928281B (zh) * 2013-12-16 2017-08-25 宁波瑞曼特新材料有限公司 高压加速器的高压舱结构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3209345A (en) 1961-04-10 1965-09-28 Wayne George Corp Analog-to-digital shaft encoder
US5569974A (en) 1989-03-30 1996-10-29 Canon Kabushiki Kaisha Electron-emitting device and electron beam lithograph machine and image display apparatus making use of it
JP2001525655A (ja) * 1997-11-28 2001-12-11 エービービー エービー 回転電気機械用の接合部を有するステータの製造方法、ステータ、及び、回転電気機械

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519754A (en) * 1978-07-29 1980-02-12 Fuji Electric Co Ltd Ground side shield structure for bushing
JPS5930629Y2 (ja) * 1978-08-14 1984-08-31 日新電機株式会社 直流高電圧発生装置
JPS56131078U (https=) * 1980-03-06 1981-10-05
JPS6141218Y2 (https=) * 1980-07-22 1986-11-25
JPS63292514A (ja) * 1987-05-26 1988-11-29 Matsushita Electric Works Ltd 露出配線用電線
JP2898658B2 (ja) * 1989-08-28 1999-06-02 株式会社日立製作所 多段加速方式荷電粒子線加速装置
JPH06283299A (ja) * 1993-03-25 1994-10-07 Ulvac Japan Ltd イオン加速装置
KR100219411B1 (ko) 1995-11-24 1999-09-01 윤종용 반도체 이온주입설비의 패러데이컵 어셈블리
JPH1023620A (ja) * 1996-07-01 1998-01-23 Toshiba Corp 電界緩和装置
IL151155A0 (en) 2000-02-11 2003-04-10 Varian Semiconductor Equipment Methods and apparatus for operating high energy accelerator in low energy mode
JP4111441B2 (ja) * 2003-02-25 2008-07-02 独立行政法人 日本原子力研究開発機構 放電破壊防止機能を有する大口径静電加速器
JP2005108796A (ja) * 2003-09-29 2005-04-21 Taiyo Material:Kk 固体誘電体及び低気圧ガス絶縁による静電加速器
WO2006070744A1 (ja) * 2004-12-28 2006-07-06 Kyoto Institute Of Technology 荷電粒子発生装置及び加速器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3209345A (en) 1961-04-10 1965-09-28 Wayne George Corp Analog-to-digital shaft encoder
US5569974A (en) 1989-03-30 1996-10-29 Canon Kabushiki Kaisha Electron-emitting device and electron beam lithograph machine and image display apparatus making use of it
JP2001525655A (ja) * 1997-11-28 2001-12-11 エービービー エービー 回転電気機械用の接合部を有するステータの製造方法、ステータ、及び、回転電気機械

Also Published As

Publication number Publication date
KR20100053652A (ko) 2010-05-20
JP2010537386A (ja) 2010-12-02
WO2009026340A2 (en) 2009-02-26
US20090050347A1 (en) 2009-02-26
US7799999B2 (en) 2010-09-21
CN101903960B (zh) 2012-12-05
TW200910404A (en) 2009-03-01
TWI433191B (zh) 2014-04-01
JP5605729B2 (ja) 2014-10-15
CN101903960A (zh) 2010-12-01
WO2009026340A3 (en) 2009-04-23

Similar Documents

Publication Publication Date Title
CN102790372B (zh) 电缆端接装置及其预制方法和用于实现电缆端接的方法
EP3449492B1 (en) A hv apparatus and a method of manufacturing such apparatus
KR101542493B1 (ko) 다중 절연 세그먼트들을 구비하는 절연된 도전 장치
KR101365099B1 (ko) 이온 주입기의 단자 구조체
CN104396105A (zh) 用于电连接具有开关装置的两个面板的连接器
KR101560383B1 (ko) 유전 핀들을 갖는 절연된 도전체들을 구비하는 이온 주입기의 단자 구조체들
CN101802964A (zh) 离子植入机中终端隔离的技术
CN101501789B (zh) 用于电气屏蔽高压套管的装置
US11017938B2 (en) Methods, apparatus and systems for dry-type transformers
USRE48918E1 (en) Power cable termination device for gas-insulated switchgear
AU739656B2 (en) Overhead-line mast with an insulated mast head
CN1279813A (zh) 开关装置站
CN104658811A (zh) 一种固封极柱的极部件
BR112020018132B1 (pt) Transformador do tipo seco e método de montagem de um transformador do tipo seco
HK1167204B (en) Device for grounding

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20100311

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20130605

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20140530

Patent event code: PE09021S01D

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

Comment text: Final Notice of Reason for Refusal

Patent event date: 20141224

Patent event code: PE09021S02D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20150626

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20150731

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20150803

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20180629

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20180629

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20190719

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20190719

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20200701

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20200701

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20210628

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20210628

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20220627

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20220627

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20240625

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20250630

Start annual number: 11

End annual number: 11