KR101542270B1 - Plasma treatment device - Google Patents
Plasma treatment device Download PDFInfo
- Publication number
- KR101542270B1 KR101542270B1 KR1020107009477A KR20107009477A KR101542270B1 KR 101542270 B1 KR101542270 B1 KR 101542270B1 KR 1020107009477 A KR1020107009477 A KR 1020107009477A KR 20107009477 A KR20107009477 A KR 20107009477A KR 101542270 B1 KR101542270 B1 KR 101542270B1
- Authority
- KR
- South Korea
- Prior art keywords
- plasma
- processing apparatus
- plasma processing
- generating means
- film
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
Abstract
It is an object of the present invention to provide a plasma processing apparatus capable of efficiently using generated plasma. A plasma processing apparatus 10 according to the present invention includes a vacuum vessel 11, an antenna (plasma generating means) supporter 12 protruding into the inner space 111 of the vacuum vessel 11, And a high frequency antenna (plasma generating means) As a result, the area of the portion where the high-frequency antenna is mounted is reduced, and the utilization efficiency of the plasma is improved.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma processing apparatus for generating plasma in the vicinity of a substrate to be processed in a vacuum container and performing deposition processing, etching processing, and the like on the processing target gas using the plasma.
Plasma processing apparatuses are widely used for deposition processing, etching processing, cleaning processing, and the like. For example, a plasma is generated from a gas containing silicon and nitrogen, and a silicon nitride thin film is deposited on a glass substrate to obtain a substrate used for a liquid crystal display or a solar cell. Here, the silicon nitride thin film has a function as a passivation film for preventing the diffusion of impurities from the glass. When a liquid crystal display or a solar cell unit is manufactured using such a substrate, the entire surface or a part of the substrate is etched or cleaned. Hereinafter, a substrate (a glass substrate in the above-described example) on which a plasma treatment is performed is referred to as a substrate to be processed.
In recent years, there has been a tendency that the number of the target gases to be treated at one time increases even if the size of the gas to be treated is large, or the size of the gas to be treated is increased, and the plasma processing apparatus is becoming larger in size. Among them, in the case of processing a large-sized target gas, it is necessary to uniformly generate plasma for all of the large-sized gas to be treated and a large number of relatively small substrates to be processed. For example, the quality such as the film thickness of a thin film formed on a glass substrate must fall within a predetermined limited range. Therefore, it is required that the variation of the density of the plasma generated in the plasma processing apparatus is accommodated within a certain range regardless of the enlargement of the plasma generation region.
Examples of the plasma processing apparatus include an ECR (electron cyclotron resonance) plasma method, a microwave plasma method, an inductively coupled plasma method, and a capacitively coupled plasma method. In the inductively coupled plasma processing apparatus, a gas is introduced into a vacuum container to cause a high-frequency current to flow in a high-frequency antenna (induction coil), thereby accelerating induction electric field electrons induced in the interior of the vacuum container, By colliding the gas molecules, the gas molecules are ionized to generate the plasma. For example, Patent Document 1 discloses an inductively coupled plasma processing apparatus in which a spiral coil is placed on the top surface of a ceiling outside a vacuum container. However, in the plasma processing apparatus described in Patent Document 1, merely enlarging the spiral coil in accordance with the enlargement of the plasma generation region simply increases the difference in plasma density between the central portion and the peripheral portion. Therefore, The standard of uniformity over the entire generated area is not satisfied. In addition, if the antenna is made larger, the conductor of the antenna becomes longer, and accordingly, the standing wave is formed in the antenna, so that the intensity distribution of the high-frequency current becomes uneven, and consequently, the plasma density distribution may become uneven (refer to Non-Patent Document 1 Reference).
Patent Document 2 and Non-Patent Document 1 describe a multi-antenna type inductively coupled plasma processing apparatus in which a plurality of high frequency antennas are mounted on the inner wall of a vacuum container. According to this apparatus, the distribution of the plasma in the vacuum container can be controlled by suitably setting the arrangement of the plurality of antennas. Further, since the length of the conductors of the respective antennas can be shortened, it is possible to prevent the adverse influence caused by the standing wave. For these reasons, the plasma processing apparatus disclosed in Patent Document 2 and Non-Patent Document 1 can generate a plasma with higher uniformity than the conventional plasma processing apparatus.
The uniformity of the plasma density in the vacuum container is enhanced by the plasma processing apparatus described in Patent Document 2 and Non-Patent Document 1. [ However, in these devices, about half of the generated plasma is not used for the plasma treatment because it spreads toward the inner wall of the vacuum container, rather than toward the center of the vacuum container. Further, in a plasma CVD apparatus for forming a film on a to-be-processed substrate, approximately half of the radicals (film precursor) generated by the plasma adhere to the inner wall of the vacuum vessel to form particles, which causes the quality of the film to fall do. As a result, it is necessary to periodically perform cleaning in the vacuum container, thereby lowering the operating rate of the apparatus. In addition, since it is necessary to use a large amount of expensive cleaning gas, the running cost rises.
A problem to be solved by the present invention is to provide a plasma processing apparatus which can efficiently use the plasma and can suppress the running cost.
According to an aspect of the present invention, there is provided a plasma processing apparatus,
(A) a vacuum container,
(B) a plasma generating means support portion provided so as to protrude in the internal space of the vacuum chamber;
(1) One or a plurality of plasma generating means
And FIG.
The plasma generating means generates plasma by ionizing gas molecules in the vacuum chamber. Various types of plasma generating means can be used, and a typical example thereof is a high frequency antenna. Further, a slit provided in the microwave waveguide, a high-frequency electrode, or the like can also be used as the plasma generating means.
In the present invention, the " plasma generating means supporting portion provided so as to protrude in the inner space "
In the plasma processing apparatus according to the present invention, a plurality of the plasma generating means may be radially arranged from the plasma generating means supporting portion toward the wall surface of the vacuum container. For example, the plasma generating means may be a high frequency antenna, and the plasma generating means may be provided on the side surface of the cylindrical plasma generating means supporting portion or on the surface of the spherical plasma generating means supporting portion from these surfaces toward the wall surface (outside of the cylinder or sphere) A plurality of high-frequency antennas can be provided.
The plasma processing apparatus according to the present invention may include a gas holding section for holding a plurality of target gases so as to surround the plasma generating section supporting section.
The gas holding portion may include a cooperating portion for rotating the target gas around the plasma generating means supporting portion and / or a magnetic field portion for rotating the target gas.
The gas holding unit may further include a film-shaped gas holding unit for holding the film-shaped gas such that a film-like gas surrounds the plasma generating unit supporting unit. In this case, it may further comprise a delivery portion for sequentially delivering the strip-shaped film-shaped substrate to the film-shaped substrate holder, and a take-in portion for sequentially taking the film-like substrate from the film-shaped substrate holder.
In the plasma processing apparatus according to the present invention, the plasma generating means is mounted on a plasma generating means supporting portion provided so as to protrude into the internal space of the vacuum chamber. Since the surface area of the plasma generating means supporting portion is generally smaller than the surface area of the inner wall of the vacuum container, the plasma generating device is mounted on the inner wall of the vacuum container as in the case of the plasma processing device described in Patent Document 2 and Non- The smaller the total area of the portion to be formed. As a result, the use efficiency of the plasma is improved, and in the plasma CVD apparatus, the deposit deposited on the inner wall of the vacuum container can be reduced. As a result, the frequency of cleaning of the inner wall can be reduced, the operating rate of the apparatus can be improved, and the running cost can be suppressed.
When the plasma processing apparatus according to the present invention has an orbiting portion, the plasma processing can be performed on all of the target gases under the same conditions by revolving the target gas around the plasma generating means supporting portion during the plasma processing.
When the plasma processing apparatus according to the present invention has a magnetic field portion, the plasma processing can be performed uniformly on the surface of each target gas by rotating the gas to be processed.
By providing the film-shaped gas-holding portion in the plasma processing apparatus according to the present invention, plasma treatment can be suitably performed on the surface of the film-like base body. Particularly, the plasma processing can be performed over a large area by blowing and blowing the film-shaped substrate sequentially into the region where the plasma is generated by the sending portion and the blowing portion.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a longitudinal sectional view showing a plasma processing apparatus having a gas holding portion having a magnetic field portion and a revolving portion, which is a first embodiment of the present invention; Fig.
Fig. 2 is a top view of the plasma processing apparatus of the first embodiment; Fig.
3 is a top view showing a
Fig. 4 is a top view showing a
An embodiment of the plasma processing apparatus according to the present invention will be described with reference to Figs. 1 to 4. Fig.
[Example 1]
The
A gas holding portion 16 is provided at the bottom of the
In addition, the present
The operation of the
In the
In addition, in the
In the conventional plasma processing apparatuses described in Patent Document 2 and Non-Patent Document 1, a plurality of high frequency antennas are dispersedly arranged on the wall surface of the vacuum container. Therefore, if a large number of high frequency power sources or impedance matching devices are connected to a small number of high frequency power sources or impedance matching devices, the wiring becomes long to increase the power loss when power is supplied. If a large number of high frequency power sources or impedance matching devices are arranged to increase the cost There was a problem that said. On the other hand, in the plasma processing apparatus according to the present embodiment, since the
In this embodiment, the
[Example 2]
The
The
A
In addition, as in the first embodiment, a vacuum pump, a gas inlet, and the like are provided.
The operation of the
Since the
[Example 3]
The
The
A film-like base
In addition, as in the first and second embodiments, a vacuum pump, a gas inlet, and the like are provided.
The operation of the
Next, after the air in the
With the plasma processing apparatus of the third embodiment, the plasma processing can be performed over the entire surface of the target surface. At that time, since the film-shaped substrate to be processed 23 is moved in order, the processing on the surface of the film-shaped substrate to be processed 23 can be performed uniformly. Since the
In the third embodiment, similarly to the first embodiment, the shape, number, position, and the like of the
10: Plasma processing apparatus of the first embodiment
11, 31, 41: vacuum container
111, 311, 411: inner space
12, 32, 42: antenna supporting portion (plasma generating means supporting portion)
13, 33, 43: a high frequency antenna (plasma generating means)
14: Power supply
15: Impedance matcher
16:
161: All balls
162: All in all
163: Holding
21:
23: film-shaped object to be processed
30: Plasma processing apparatus of the second embodiment
38: Load lock chamber
381: Vacuum container side entrance / exit
382: Outside entrance
40: Plasma processing apparatus of the third embodiment
46: Film-like gas holding part
461: large roller
462: small roller
471:
472:
Claims (9)
(B) a plasma generating means support portion provided so as to protrude in the internal space of the vacuum chamber;
One or more inductively coupled high frequency antennas mounted on the surface of the plasma generating means supporting part;
A gas holding unit for holding a plurality of substrates to be processed so as to surround the plasma generating means supporting unit;
Wherein the plasma processing apparatus further comprises:
A plurality of the plasma generating means are radially arranged from the plasma generating means supporting portion toward the wall surface of the vacuum container
And the plasma processing apparatus.
And the gas holding portion is provided with a revolving portion for rotating the target gas around the plasma generating means supporting portion
And the plasma processing apparatus.
And the gas holding portion is provided with a magnetic field portion for rotating the substrate to be processed
And the plasma processing apparatus.
(B) a plasma generating means support portion provided so as to protrude in the internal space of the vacuum chamber;
A plasma generating means, which is a plurality of inductively coupled high-frequency antennas mounted on the surface of the plasma generating means supporting portion;
A film-like substrate holder for holding the film-shaped substrate such that a film-shaped substrate surrounds the plasma-generating-
Wherein the plasma processing apparatus further comprises:
A delivery portion for sequentially delivering the strip-like film-like base body to the film-like base body holding portion, and a take-in portion for sequentially taking the film-like base body from the film-like base body holding portion
And the plasma processing apparatus.
And a load lock chamber for loading / unloading the target gas between the inside of the vacuum chamber and the outside of the vacuum chamber
And the plasma processing apparatus.
And a load lock chamber for loading / unloading the target gas between the inside of the vacuum chamber and the outside of the vacuum chamber
And the plasma processing apparatus.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007296119A JP5138342B2 (en) | 2007-11-14 | 2007-11-14 | Plasma processing equipment |
JPJP-P-2007-296119 | 2007-11-14 |
Publications (2)
Publication Number | Publication Date |
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KR20100096068A KR20100096068A (en) | 2010-09-01 |
KR101542270B1 true KR101542270B1 (en) | 2015-08-06 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020107009477A KR101542270B1 (en) | 2007-11-14 | 2008-11-12 | Plasma treatment device |
Country Status (5)
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JP (1) | JP5138342B2 (en) |
KR (1) | KR101542270B1 (en) |
CN (1) | CN101855947B (en) |
TW (1) | TWI450644B (en) |
WO (1) | WO2009063631A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5659809B2 (en) * | 2011-01-17 | 2015-01-28 | 株式会社Ihi | Auxiliary jig and array antenna type CVD plasma apparatus |
JP5659808B2 (en) * | 2011-01-17 | 2015-01-28 | 株式会社Ihi | Array antenna type CVD plasma apparatus and array antenna unit |
WO2013030953A1 (en) * | 2011-08-30 | 2013-03-07 | 株式会社イー・エム・ディー | Antenna for plasma processing apparatus, and plasma processing apparatus using antenna |
CN102560439A (en) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | Method and device for carrying out surface treatment on plasma |
CN103060778B (en) * | 2013-01-23 | 2015-03-11 | 深圳市劲拓自动化设备股份有限公司 | Flat plate type PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
JP6373707B2 (en) * | 2014-09-30 | 2018-08-15 | 株式会社Screenホールディングス | Plasma processing equipment |
KR101847530B1 (en) | 2016-10-31 | 2018-04-10 | (주)울텍 | plasma processing apparatus |
US11646182B2 (en) * | 2019-12-18 | 2023-05-09 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating apparatus and coating method |
Citations (1)
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JP2004228354A (en) * | 2003-01-23 | 2004-08-12 | Japan Science & Technology Agency | Plasma producing device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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IT1223074B (en) * | 1986-11-19 | 1990-09-12 | Martin Processing Co Inc | SAFETY WINDSHIELD AND METHOD TO MANUFACTURE IT |
JPS63134052A (en) * | 1986-11-25 | 1988-06-06 | Kuraray Co Ltd | Plasma treating device for sheet material |
DE4117332C2 (en) * | 1991-05-31 | 1995-11-23 | Ivanovskij Ni Skij Eksperiment | Process for treating moving substrate using an electrical discharge plasma and device for carrying it out |
JP3630831B2 (en) * | 1995-04-03 | 2005-03-23 | キヤノン株式会社 | Method for forming deposited film |
TW422775B (en) * | 1996-04-18 | 2001-02-21 | Ga Tek Corp | Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
JP2001115265A (en) * | 1999-10-14 | 2001-04-24 | Canon Inc | High frequency plasma cvd process and high frequency plasma cvd system |
JP3897582B2 (en) * | 2000-12-12 | 2007-03-28 | キヤノン株式会社 | Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method, and semiconductor device |
JP2003297275A (en) * | 2002-04-05 | 2003-10-17 | Hitachi High-Technologies Corp | Ion beam milling method and ion beam milling machine |
JP2004339570A (en) * | 2003-05-15 | 2004-12-02 | Sony Corp | Plasma cvd apparatus and film deposition method using the same |
JP4675617B2 (en) * | 2004-12-14 | 2011-04-27 | 神港精機株式会社 | Surface treatment equipment |
JP4425167B2 (en) * | 2005-03-22 | 2010-03-03 | 富士フイルム株式会社 | Gas barrier film, substrate film and organic electroluminescence device |
JP2007123008A (en) * | 2005-10-27 | 2007-05-17 | Nissin Electric Co Ltd | Plasma generation method and its device, and plasma processing device |
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2007
- 2007-11-14 JP JP2007296119A patent/JP5138342B2/en active Active
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2008
- 2008-11-12 KR KR1020107009477A patent/KR101542270B1/en active IP Right Grant
- 2008-11-12 WO PCT/JP2008/003291 patent/WO2009063631A1/en active Application Filing
- 2008-11-12 CN CN2008801158320A patent/CN101855947B/en active Active
- 2008-11-13 TW TW097143835A patent/TWI450644B/en active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004228354A (en) * | 2003-01-23 | 2004-08-12 | Japan Science & Technology Agency | Plasma producing device |
Also Published As
Publication number | Publication date |
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KR20100096068A (en) | 2010-09-01 |
TW200939904A (en) | 2009-09-16 |
JP5138342B2 (en) | 2013-02-06 |
WO2009063631A1 (en) | 2009-05-22 |
CN101855947B (en) | 2012-09-05 |
CN101855947A (en) | 2010-10-06 |
JP2009123513A (en) | 2009-06-04 |
TWI450644B (en) | 2014-08-21 |
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