KR101533768B1 - Microfiber cleaning device for small panels with cleaner - Google Patents

Abstract

The present invention relates to a cleaner equipped with a micro-panel cleaner for a small panel, and more particularly, to a cleaner provided with one or more rollers on an upper side of the small panel so as to remove foreign substances from a small panel conveyed by a conveyor, The present invention relates to a microfiber cleaning device having a microfiber cleaning device for a small panel that is provided with a microfiber cover surrounding a lower portion of a roller to rotate the roller in a direction opposite to the direction in which the small- A cleaning apparatus comprising a plurality of rollers provided on an upper side of the small panel when the small panel to be cleaned is transported while being conveyed by a conveyor belt is constituted so as to constitute a microfiber covering a lower portion of a roller of the cleaning apparatus, The rollers are rotated to rotate the rollers, And a vibrating device is provided on the lower side of the conveyor belt, and a micro-panel micro-washing device for cleaning the small panel using the cleaning device to generate vibration in the vibration device to increase the cleaning power The present invention relates to a cleaning device for cleaning a small panel, comprising a cleaning device comprising a roller and an auxiliary roller on an upper side of a conveyor belt for cleaning a small panel, The rollers of the cleaning device and the auxiliary rollers are ridden so that the rollers wrapping the lower surface of the microfibers can clean the upper surface of the small panel. At this time, the microfibers are wound in the opposite direction to the rotating direction of the conveyor belt, It is possible to clean small panels with micro-fibers in the direction opposite to the direction, The vibrating device is constituted at the corresponding portion of the roller around the belt so that the vibrating device vibrates at the same time when the small panel is cleaned by the roller, thereby doubling the cleaning force, thereby minimizing the defective rate to the small panel to be cleaned, To a cleaner equipped with a micro-panel cleaning device for a small panel which can improve the quality of a product and can shorten the working time and improve the productivity.

Description

Technical Field [0001] The present invention relates to a microfiber cleaning device for small panels,

The present invention relates to a cleaner equipped with a micro-panel cleaner for a small panel, and more particularly, to a cleaner provided with one or more rollers on an upper side of the small panel so as to remove foreign substances from a small panel conveyed by a conveyor, The present invention relates to a microfiber cleaning device having a microfine scrubbing device for a small panel, which is equipped with microfibers for wrapping a lower portion of a roller to rotate the roller in a direction opposite to the direction in which the small panel is conveyed to clean the upper surface of the small panel with microfibers.

Generally, in the manufacture of a liquid crystal display (LCD), a photolithograph is used to form a circuit such as an electrode pattern on a substrate such as a glass substrate.

In photolithography, a series of processing steps, that is, cleaning and drying of a substrate, formation of a resist film on a substrate, exposure of a resist film, and the like are performed. In the processing apparatus for carrying out these processing steps, the substrate taken out from the cassette formed on the cassette station is conveyed in turn to the processing unit while being held by the arm. Subsequently, the substrate is treated in a process including cleaning.

Thereafter, the substrate processed in each processing unit is conveyed to the cassette in turn while being held by the arm.

However, when the uppermost surface for supporting an undoped substrate relative to the uppermost surface of the arm carrying the substrate and the portion supporting the cleaned substrate are generally used, the following problems are easily caused.

That is, when the uncleaned substrate is placed on the arm, contaminants attached to the underside of the uncleaned substrate are transferred to the support portion of the arm, and while the cleaned substrate is carried to the arm, To the backside of the cleaned substrate.

To address the above problems,

Registration No. 10-018643 relates to a substrate cleaning apparatus having a cleaning brush and a substrate cleaning method, comprising brush cleaning means having upper and lower brush members for brush cleaning both sides of a substrate, and brush cleaning means for cleaning each of the upper and lower brush members And a pair of holding arms that are driven by a belt, the substrate is conveyed between the upper and lower brush members, and the substrate is held by the holding arm Transporting means for reciprocating the substrate in the transport direction at a position between the upper and lower brush members, and means for controlling the operation of the transporting means.

Registration No. 10-0551207 relates to a substrate transfer apparatus and a substrate transfer method, and is a substrate transfer apparatus for loading and unloading a substrate to or from a processing section, comprising: an arm for holding the substrate; A first suction pad provided on the arm for suctioning the substrate, and a second suction pad provided on the arm at a position adjacent to the first suction pad for suctioning the substrate, And a second adsorption pad provided on the first adsorption pad and the second adsorption pad so that the first adsorption pad and the second adsorption pad are brought into contact with the lowest surface of the substrate to adjust the shape of the substrate adsorbed to one of the first adsorption pad and the second adsorption pad, And a projection member provided between the first adsorption pad and the second adsorption pad.

The first suction pad and the second suction pad provided on the arm for selectively attracting the substrate, and a projection member provided between the first and second suction pads of the arm, Wherein the first adsorption pad and the substrate that are not cleaned are adsorbed by the first adsorption pad so that the first adsorption pad is adsorbed by the first adsorption pad and the second adsorption pad is adsorbed by the first adsorption pad, A step of bringing the second adsorption pad and the substrate subjected to the adsorption operation to be adsorbed by the second adsorption pad while holding the substrate which has not been subjected to the cleaning treatment with the projection member contacting the lowest surface of the substrate; A process of removing the substrate from the processing unit while holding the substrate subjected to the cleaning process with a projection member contacting the lowest surface of the substrate subjected to the cleaning process And the substrate transporting method.

No. 10-0530700, entitled " Device for Cleaning Both Sides of a Substrate ", comprises a spin chuck holding at least a substrate in contact with a central portion of a substrate, a hollow shaft connected to the spin chuck and transmitting rotational driving force to the spin chuck, A surface cleaning means for cleaning the surface of the substrate held by the spin chuck; a back cleaning means for cleaning the back surface of the substrate held by the spin chuck through the hollow portion of the hollow shaft; And a first seal portion for sealing a portion between the cover and the spin chuck, and a second seal portion for sealing a portion between the cover and the spin chuck.

No. 10-0806223 relates to a substrate cleaning apparatus comprising a work table having a work surface for performing a cleaning operation and a loading plate for loading a substrate for manufacturing a flat panel display panel, A cleaning roll brush disposed at a distance from the rotary transfer unit on the work surface to receive power from the driving source to brush the substrate for manufacturing the flat panel display panel while being rotated, A fluid supply unit for supplying a cleaning liquid to the roll brush for cleaning, and a driving means for changing the position of the cleaning roll brush in two or more directions on the working surface.

As described above, a large number of cleaning devices have been developed and used including various devices in the related art. However, a large size glass panel can be cleaned by a cleaning process during a process of flowing through a conveying rail or a conveyor, As a result of miniaturization, many parts where small panels are applied like mobile phones have been developed. Small panels, like large panels, flow through conveying rails or conveyors and can not go through the cleaning process. In cleaning of small panels, clamps So that there is a problem that the small panel is supported by the flow of the clamp.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a cleaning device having a plurality of rollers provided on a small panel on a small panel to be cleaned, So that the roller is rotated in a direction opposite to the direction in which the small panel is conveyed to clean the upper surface of the small panel with the microfibers wrapped around the roller and a cleaning device is formed on the upper side of the conveyor belt And a vibrating device is provided on the lower side to generate vibrations in the vibrating device when the small panel is cleaned with the cleaning device, thereby increasing the cleaning force. SUMMARY OF THE INVENTION .

According to an aspect of the present invention, there is provided a conveyor belt comprising: a conveyor belt; a first roller disposed above the conveyor belt and contacting an upper surface of the conveyor belt; A second cleaner provided on one side of the first cleaner and configured to contact a top surface of the conveyor belt, and a second roller disposed on one side of the second roller, And a winding unit configured to wind the microfibers unwound from the unwinding rollers, wherein the rollers are provided on both sides of the cleaning device, The microfibers unwound from the unwinding rollers are wound on the winding rollers so as to wrap the lower portion of the first rollers through the upper part of the first auxiliary rollers, and the direction of the microfibers wound by the winding rollers, To rotate in a direction opposite to the direction of rotation of the belt.

According to the washing machine equipped with the micro-panel cleaning device for a small panel according to the present invention, the cleaning device composed of the roller and the auxiliary roller is formed on the upper side of the conveyor belt so as to clean the small panel, So that the upper surface of the small panel can be cleaned by the rollers wrapping the lower surface of the microfibers so that the microfibers can be rotated in the opposite direction to the rotating direction of the conveyor belt The small panel can be cleaned by microfibers in the direction opposite to the flow direction of the small panel, thereby increasing the cleaning power. The vibrating device is formed on the corresponding portion of the roller around the conveyor belt, The vibrating device also vibrates at the same time to double the cleaning force, It is about to minimize the failure rate can reduce the material cost, and improve the quality of the product, as will the invention which can improve the work time and productivity.

1 is a front view showing a washing machine to which the present invention is applied;
2 is a front view showing a cleaning device in the structure of a washing machine to which the present invention is applied
FIG. 3 is a side view showing a cleaning device in the structure of a cleaning device to which the present invention is applied
4 is a front view showing a vibration device in a structure of a washing machine to which the present invention is applied
5 is a side view showing a vibration device in the structure of a washing machine to which the present invention is applied
6 is a front view showing an embodiment of the scrubber of the present invention
7 is a front view showing another embodiment of the scrubber of the present invention

1 to 7, a washing machine provided with a microfine cleaning device for a small panel according to the present invention is provided with a conveyor belt 13, which is disposed above the conveyor belt 13, A first cleaning part 110 constituted by a first roller 111 contacting the upper surface of the first roller 111 and a first auxiliary roller 113 provided on one side of the first roller 111, A second roller 121 constituting one side of the first roller 110 and contacting the upper surface of the conveyor belt 13 is constituted and a second auxiliary roller 113 A release roller 210 which is formed on both sides of the cleaning device 100 and which loosens the microfibers 30 and a second cleaning part 120 which is provided on both sides of the cleaning device 100, The roller unit 200 constituted of a take-up roller 220 for winding the microfibers 30 unwound from the take-up roller 210 and the microfibers 30 unwound from the release roller 210 The winding direction of the microfibers 30 wound around the winding rollers 220 is controlled so that the direction of the microfibers 30 wound around the winding rollers 220 is controlled by the conveyor belts 13 The microfine scrubbing apparatus for a small panel rotates in a direction opposite to the rotating direction of the washing machine.

1, 6, and 7, a cleaning device 10 having a micro-panel micro-cleaning device for a small panel according to the present invention includes a conveyor belt 13, and is disposed above the conveyor belt 13, A first cleaning unit 110 constituted by a first roller 111 contacting the upper surface of the conveyor belt 13 and a first auxiliary roller 113 provided on one side of the first roller 111 A release roller 210 which is provided on both sides of the cleaning device 100 and which releases the microfibers 30; a winding device 210 which winds the microfibers 30 unwound from the release roller 210; The roller unit 200 constituted of the take-up roller 220 is constructed so that the microfibers 30 unwound from the unwinding roller 210 wrap the lower part of the first roller 111 through the upper part of the first auxiliary roller 113 So that the direction of the microfibers 30 wound on the winding roller 220 is opposite to the direction of rotation of the conveyor belt 13 And a microfine scrubbing apparatus for a small panel that rotates in the direction of the washing machine.

The cleaning apparatus 100 will be described in detail with reference to FIGS. 1, 2, 3, 6,

A first roller 111 which is formed on the conveyor belt 13 and contacts the conveyor belt 13 and a first auxiliary roller 113 is provided on one side of the first roller 111 A first taxonomy 110 is constructed.

This is configured such that the lower surface of the first roller 111 is in contact with the conveyor belt 13 and a first auxiliary roller 113 is formed on one side of the first roller 111.

The first auxiliary roller 113 is wound around the upper surface of the first auxiliary roller 113 so that the microfibers 30 can be wrapped around the lower surface of the first roller 111, And passes through between the roller 113 and the first roller 111 to wrap the lower surface of the first roller 111.

In addition, referring to another embodiment of the cleaning unit of the cleaning device 100,

The second cleaner 120, which is configured on one side of the first cleaner 110, can be used to clean the small panel firstarily cleaned by the first cleaner 110, .

The second cleaner 120 is composed of a second roller 121 and a second aiding roller 123, and the configuration thereof is the same as that of the first cleaner 110.

Thus, the microfiber 30 can clean the small panels through the first washing unit 110 and the second washing unit 120, thereby increasing the washing power.

Since the second cleaner 120 can be configured according to use, the second cleaner 120 can be selectively configured according to a small panel to be cleaned.

The first cleansing part 110 and the second cleansing part 120 may adjust the height of the first roller 111 and the second roller 121. This is because when the height of the first roller 111 and the second roller 121 is low in cleaning the upper surface of the small panel that flows on the conveyor belt 13, the upper surface of the small panel can not be cleaned, The upper surface of the first roller 111 and the lower surface of the second roller 121 are covered with the microfibers 30 for cleaning the upper surface of the small panel, Can be finely cleaned even if they do not touch or touch the upper surface of the small panel, thereby preventing complete cleaning.

In addition, the cleaning apparatus 100 can be constructed by using one or more cleaning apparatuses 10 according to the use of the cleaner 10, thereby increasing the cleaning power of the small size panel.

Referring to FIGS. 1, 6 and 7, the roller unit 200 will be described in detail.

The roller unit 200 includes a release roller 210 and a take-up roller 220. The release roller 210 and the take-up roller 220 are disposed on both sides of the cleaner 100, The rollers are wound with the microfibers 30 for cleaning the upper surface of the small panel.

The winding roller 210 and the winding roller 220 clean the small size panel 30 while winding the microfibers 30 to be unwound from the unwinding roller 210 by the take up roller 220 for cleaning the small size panel, The microfibers 30 are loosened in a direction opposite to the direction in which the small panel is conveyed on the conveyor belt 13 to clean the upper surface of the small panel in a direction opposite to the advancing direction of the small panel, Increased washing power.

On both sides of the cleaning device 100, guide rollers 310 and 320 are formed,

Referring to FIGS. 1, 6 and 7, the guide rollers 310 and 320 will be described in detail.

A first guide roller 310 is disposed on one side of the cleaning device 100 to guide the microfibers 30 unwound from the unwinding roller 210 to surround the upper portion of the first auxiliary roller 113, A second guide roller 320 for guiding the microfiber 30 to the take-up roller 220 when the microfiber 30 is wound by the take-up roller 220 through the first auxiliary roller 113 and the first roller 111, Is configured on one side of the first roller (111).

The second guide roller 320 may be formed on one side of the second cleaner 120 in accordance with the use of the second cleaner 120. [

The microfiber 30 is unwound from the unwinding roller 210 of the roller unit 200 and wound around the winding roller 220 via the cleaning device 100 The microfibers 30 can be selectively used according to the structure of the cleaner 10.

The microfiber 30 is attached to a lower portion of the conveyor belt 13 to which the first roller 111 or the second roller 121 of the cleaning device 100 touches. (400)

Referring to FIGS. 1, 4, 5, 6 and 7, the vibration device 400 will be described in detail.

The vibrating device 400 includes a vibrating plate 410 which contacts the bottom of the conveyor belt 13 and vibrates and a fixing plate 420 which is spaced apart from the vibrating plate 410 by a predetermined distance to fix the vibrating device 400 And a flow member 430 connecting the vibration plate 410 and the fixing plate 420 to flow the vibration plate 410 in multiple directions.

The vibrating device 400 is configured at a corresponding portion of the first roller 111 configured in the first cleaner 110 of the cleaning apparatus 100. The vibrating device 400 includes a conveyor belt 13, (111), and the vibrating device (400) is formed on the lower side.

This is because when the microfiber 30 which rotates the conveyor belt 13 and wraps the first roller 111 of the first cleaner 110 against the small panel is cleaned, The vibration of the vibration plate 410, which is vibrated due to the flow of the formed flow member 430, further increases the cleaning power against the small panel.

In addition, the vibration device 400 described above can be selectively constructed and used according to the configuration of the second cleaner 120 of the cleaning device 100.

Referring to FIGS. 1 to 7, an embodiment of a scrubber equipped with a microfine scrubber for a small panel, to which the present invention is applied,

First, the small panel to be cleaned, which has been conveyed through the previous process, flows on the conveyor belt 13.

The small panel that is flowing on the conveyor belt 13 is drawn into the first roller 111 constituted in the cleaning apparatus 100 and the first roller 111 is cleaned against the upper surface of the small panel . At this time, the microfiber 30 surrounding the first roller 111 cleans the upper surface of the small panel.

When the first roller 111 is cleaned against the small panel, the vibration device 400 configured on the lower side of the conveyor belt 13 corresponding to the first roller 111 around the conveyor belt 13 is operated It further improves cleaning power when washing small panels.

The microfibers 30 are wound around the upper part of the first auxiliary roller 113 of the first cleaning part 110 by induction of the first induction roller 310 formed at one side of the first cleaning part 110 can do.

The small panel that is firstly cleaned by the first roller 111 against the small panel and flows by the conveyor belt 13 is drawn into the second roller 121 constituted by the cleaning device 100, The second roller 121 performs secondary cleaning on the upper surface of the small panel. At this time, the microfiber 30 surrounding the second roller 121 cleans the upper surface of the small panel.

When the second roller 121 is cleaned with respect to the small panel, the vibration device 400 configured on the lower side of the conveyor belt 13 corresponding to the second roller 121 around the conveyor belt 13 is operated It further improves cleaning power when washing small panels.

The small panel is cleaned while passing through the first cleaner 110 and the second cleaner 120 at the time of cleaning and the cleaning force for the small panel is reduced due to the vibration device 400 constructed at the lower part of the conveyor belt 13 This is because the vibration plate 410 connected to the flow member 430 flows due to the flow of the flow member 430 connected to the fixed plate 420 to increase the cleaning power by vibrating the small panel .

When the cleaning device 100 and the vibration device 400 have been cleaned for the small size panel, the small size panel flows on the conveyor belt 13 for the next process, 30 are wound by the take-up roller 220 of the roller unit 200.

At this time, the microfiber 30 can be wound on the take-up roller 220 by the second induction roll path 320 formed on one side of the first cleansing part 110 or the second cleansing part 120.

As described above, according to the present invention, a cleaning device 100 composed of rollers 111 and 121 and auxiliary rollers 113 and 123 is formed on a conveyor belt 13 so that a small panel can be cleaned, The microfibers 30 to be unwound from the roller unit 200 formed on both sides of the apparatus 100 ride on the rollers 111 and 121 and the auxiliary rollers 113 and 123 of the cleaning apparatus 100, And the rollers 111 and 121 wrapping the lower surface thereof can clean the upper surface of the miniature panel so that the microfibers 30 are wound in a direction opposite to the rotating direction of the conveyor belt 13, The vibrating device 400 is formed on the corresponding portion of the rollers 111 and 121 around the conveyor belt 13 so that the vibration of the small panel can be suppressed. When the small panel is cleaned by the rollers 111 and 121, the vibration device 400 is caused to vibrate at the same time Sikyeotgo doubles energetic, it is to minimize the failure rate for small panel that you want to clean and thereby to reduce material costs, improve the quality of the product, and will as invention to improve the work time and productivity.

10: Scrubber 13: Conveyor belt 30: Microfiber
100: Cleaning device
110: first fixing part 111: first roller 113: first auxiliary roller
120: Second fixing part 121: Second roller 123: Second auxiliary roller
200: roller portion 210: release roller 220: take-up roller
310: first induction roller 320: second induction roller
400: Vibrating device
410: Vibrating plate 420: Fixing plate 430: Flow member

Claims (6)

A conveyor belt 13 is provided and a first roller 111 is formed on the conveyor belt 13 and contacts the upper surface of the conveyor belt 13. The first roller 111 A first cleaning part 110 provided with a first auxiliary roller 113 on the side of the first cleaning part 110 and a second cleaning part 110 formed on one side of the first cleaning part 110 and contacting a top surface of the conveyor belt 13 (100) comprising a second cleaner (120) constituted by a first roller (121) and a second roller (123) on one side of the second roller (121) And a roller unit 200 constituted by a winding roller 210 for winding the microfibers 30 and a winding roller 220 for winding the microfibers 30 unwound from the unwinding roller 210 In the microfine cleaning apparatus,
The microfibers 30 unwound from the unwinding roller 210 are wound on the winding roller 220 so as to wrap the lower portion of the first roller 111 through the upper portion of the first auxiliary roller 113,
The direction of the microfibers 30 wound by the take-up roller 220 rotates in a direction opposite to the rotating direction of the conveyor belt 13,
The microfiber 30 generates vibrations by the small panel when cleaning the small panel on the conveyor belt 13 where the first roller 111 or the second roller 121 of the cleaning device 100 touches,
A vibrating plate 410 contacting the lower part of the conveyor belt 13 and vibrating, a fixing plate 420 fixing the vibrating device 400 at a predetermined distance from the vibrating plate 410, A vibrating device 400 including a flow member 430 connecting the vibrating plate 410 and the fixing plate 420 and flowing the vibrating plate 410 in multiple directions is formed,
A first induction roller 310 for guiding the microfibers 30 unwound from the unwinding roller 210 to be positioned above the first sub-roller 113 is formed on one side of the cleaning device 100,
A second induction unit 220 for guiding the microfibers 30 to the winding roller 220 when the winding unit 220 is wound on the winding roller 220 via the lower part of the first roller 111 or the second roller 121, And a roller (320) is formed on the surface of the cleaner.
A conveyor belt 13 is provided and a first roller 111 is formed on the conveyor belt 13 and contacts the upper surface of the conveyor belt 13. The first roller 111 A cleaning device 100 composed of a first cleaning part 110 having a first auxiliary roller 113 on the side of the cleaning device 100 and a release roller The present invention relates to a microfiber cleaning apparatus comprising a roller unit 200 comprising a winding roller 210 wound around a winding roller 210 and a winding roller 220 wound around the winding roller 210,
The microfibers 30 unwound from the unwinding roller 210 are wound on the winding roller 220 so as to wrap the lower portion of the first roller 111 through the upper portion of the first auxiliary roller 113,
The direction of the microfibers 30 wound by the take-up roller 220 rotates in a direction opposite to the rotating direction of the conveyor belt 13,
The microfiber 30 generates vibrations in a small panel when the small-size panel is cleaned, and the small-sized panel 30 generates vibrations in the lower portion of the conveyor belt 13 where the first roller 111 of the cleaning device 100 touches,
A vibrating plate 410 contacting the lower part of the conveyor belt 13 and vibrating, a fixing plate 420 fixing the vibrating device 400 at a predetermined distance from the vibrating plate 410, A vibrating device 400 including a flow member 430 connecting the vibrating plate 410 and the fixing plate 420 and flowing the vibrating plate 410 in multiple directions is formed,
A first induction roller 310 for guiding the microfibers 30 unwound from the unwinding roller 210 to be positioned above the first sub-roller 113 is formed on one side of the cleaning device 100,
A second guide roller 320 is disposed on the other side of the cleaning device 100 to guide the microfibers 30 to the take-up roller 220 when the take-up roller 220 is wound on the lower side of the first roller 111 Wherein the micro-panel cleaner is provided with a micro-panel cleaner for a small panel.

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