KR101490540B1 - 플라즈마 반응기 - Google Patents

플라즈마 반응기 Download PDF

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Publication number
KR101490540B1
KR101490540B1 KR1020107001116A KR20107001116A KR101490540B1 KR 101490540 B1 KR101490540 B1 KR 101490540B1 KR 1020107001116 A KR1020107001116 A KR 1020107001116A KR 20107001116 A KR20107001116 A KR 20107001116A KR 101490540 B1 KR101490540 B1 KR 101490540B1
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KR
South Korea
Prior art keywords
gas
plasma
inlet
reduction reactor
reactor
Prior art date
Application number
KR1020107001116A
Other languages
English (en)
Korean (ko)
Other versions
KR20100037609A (ko
Inventor
게리 피터 나이트
앤드류 챔버스
Original Assignee
에드워즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20100037609A publication Critical patent/KR20100037609A/ko
Application granted granted Critical
Publication of KR101490540B1 publication Critical patent/KR101490540B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treating Waste Gases (AREA)
  • Plasma Technology (AREA)
KR1020107001116A 2007-07-19 2008-07-14 플라즈마 반응기 KR101490540B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0714025.4 2007-07-19
GBGB0714025.4A GB0714025D0 (en) 2007-07-19 2007-07-19 Plasma reactor
PCT/GB2008/050569 WO2009010792A2 (en) 2007-07-19 2008-07-14 Plasma reactor

Publications (2)

Publication Number Publication Date
KR20100037609A KR20100037609A (ko) 2010-04-09
KR101490540B1 true KR101490540B1 (ko) 2015-02-05

Family

ID=38476563

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107001116A KR101490540B1 (ko) 2007-07-19 2008-07-14 플라즈마 반응기

Country Status (6)

Country Link
KR (1) KR101490540B1 (zh)
CN (2) CN101755322B (zh)
DE (1) DE112008001790T5 (zh)
GB (1) GB0714025D0 (zh)
TW (1) TWI433718B (zh)
WO (1) WO2009010792A2 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102125818B (zh) * 2010-12-31 2013-12-11 武汉凯迪工程技术研究总院有限公司 用等离子体制取高温、富含活性粒子水蒸汽的方法及装置
GB2493752A (en) * 2011-08-17 2013-02-20 Edwards Ltd Apparatus for treating a gas stream
US9240308B2 (en) * 2014-03-06 2016-01-19 Applied Materials, Inc. Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
GB2534890A (en) * 2015-02-03 2016-08-10 Edwards Ltd Thermal plasma torch
GB2536905B (en) 2015-03-30 2020-01-08 Edwards Ltd Radiant burner
CN113371679A (zh) * 2021-05-27 2021-09-10 中国矿业大学 一种二氧化碳-甲烷等离子高温重整装置及高温重整方法
GB2625846A (en) * 2022-12-27 2024-07-03 Csk Inc Scrubber burner

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US6617538B1 (en) * 2000-03-31 2003-09-09 Imad Mahawili Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements
JP2005205330A (ja) 2004-01-23 2005-08-04 Kanken Techno Co Ltd パーフルオロコンパウンド排ガスのプラズマ分解処理方法および該方法を利用したプラズマ分解処理装置並びにこのプラズマ分解処理装置を搭載した排ガス処理システム
WO2006082357A1 (en) * 2005-02-07 2006-08-10 Edwards Limited Ejector pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW442842B (en) * 1996-12-31 2001-06-23 Atmi Ecosys Corp Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US6617538B1 (en) * 2000-03-31 2003-09-09 Imad Mahawili Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements
JP2005205330A (ja) 2004-01-23 2005-08-04 Kanken Techno Co Ltd パーフルオロコンパウンド排ガスのプラズマ分解処理方法および該方法を利用したプラズマ分解処理装置並びにこのプラズマ分解処理装置を搭載した排ガス処理システム
WO2006082357A1 (en) * 2005-02-07 2006-08-10 Edwards Limited Ejector pump

Also Published As

Publication number Publication date
TW200914124A (en) 2009-04-01
CN103021779B (zh) 2016-08-10
GB0714025D0 (en) 2007-08-29
CN101755322A (zh) 2010-06-23
TWI433718B (zh) 2014-04-11
WO2009010792A2 (en) 2009-01-22
DE112008001790T5 (de) 2010-04-29
CN103021779A (zh) 2013-04-03
CN101755322B (zh) 2014-02-19
KR20100037609A (ko) 2010-04-09
WO2009010792A3 (en) 2009-03-12

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