KR101490328B1

KR101490328B1 - Particle Counter

Info

Publication number: KR101490328B1
Application number: KR20140126584A
Authority: KR
Inventors: 박진수; 김현재; 최진수; 성민영; 전하은; 오준; 한진석; 홍유덕; 강기태
Original assignee: 대한민국
Priority date: 2014-09-23
Filing date: 2014-09-23
Publication date: 2015-02-16

Abstract

The present invention relates to an apparatus for measuring the concentration of particulate matter, which can simultaneously measure aerosol particles having a reference size or larger and aerosol particles having a reference size smaller than that of a reference particle size detecting unit and a fine particle detecting unit, By mounting a neutralizer on the front and rear of the particle separator in the particle detector that can measure less than the size of aerosol particles, it is possible to neutralize the particles passing through the particle separator and then flow into the condenser particle counter It is possible to minimize the loss of the aerosol particles and improve the accuracy of the measurement result of the fine particles. By mounting a separate impactor and impactor detection measurement unit in front of the fine particle detection unit, the aerosol particles flowing into the fine particle detection unit It can be limited to particles. The accuracy of the static result can be improved and the number of aerosol particles larger than the reference size trapped in the impactor can be analyzed and compared with the result of the coarse particle detection unit, A particle number concentration measuring device capable of more accurate measurement is provided.

Description

[Particle Counter]

The present invention relates to a particle number concentration measuring apparatus. More specifically, it is possible to simultaneously measure aerosol particles having a reference size or more and aerosol particles having a reference size or smaller with respect to fine aerosol particles mixed in various sizes through the coarse particle detection section and the fine particle detection section, The particles passing through the particle separating device can be neutralized by attaching the neutralizer to the front and rear of the particle separating device in the fine particle detecting portion that can be used to minimize the loss of the aerosol particles The accuracy of the fine particle measurement result can be improved and the additional aerosol particles introduced into the fine particle detection portion can be restricted to particles smaller than the reference size by mounting a separate impactor and impactor detection measurement portion in front of the fine particle detection portion, Improve the accuracy of the results In addition, since the number of aerosol particles larger than the reference size captured in the impactor is analyzed and compared with the result of the coarse particle detection unit, the measurement result of the coarse particle detection unit can be verified once more, And a number density measuring apparatus.

Fine particles in particulate matter (PM) contained in dust, automobile exhaust, and automobile exhaust gas easily penetrate and accumulate in the respiratory system of the human body, which is a major cause of respiratory diseases, visibility problems and smog phenomenon in large cities. As the size is recognized as an important variable for determining the risk of human body, it is a tendency to be converted to the regulation of the number concentration by particle size in the existing mass regulation.

In addition, it is necessary to reduce the defect rate by monitoring the amount of fine particles contained in the air in various advanced production processes including the semiconductor production process, and the application range of particles having a nanometer to micro size structure is expanded Therefore, the importance of particle size measurement and its applications are rapidly expanding to study ultrafine size particles.

Ultrafine particles can be recovered mainly by electrostatic methods and methods by condensation growth of particles. Coagulation particle counter (ultrafine particles), which can measure ultrafine particles in the range of 0.002 μm to 1 μm which are difficult to measure optically CPC, and condensation particle counter) are most often used for particle counting.

These condensed nuclear particle counters generally consist of a saturator, a condenser and an optical detector, which saturate the air sample while passing through the saturator wetted with the working fluid (mainly alcohol) The condensed water is introduced into the condenser maintained at a low temperature (about 10 ° C) to cause condensation and growth on the surface of the ultra-fine tenant, and the number of particles is measured by the light scattering phenomenon using the optical detector at the outlet of the condenser As shown in FIG.

DMA (differential mobility analyzer) is a device that classifies particles according to their electrical mobility. In general, it is used to extract monodisperse particles of necessary size among polydisperse particles and to flow them into the condensed particle counter And a scanning mobility particle sizer (SMPS) for measuring the number of particles by the condensing core particle counter while exponentially changing the voltage of the DMA is used for real time measurement of particles.

As described above, particles of 1 μm or less in ultrafine particles can be measured using a condensation particle counter, which is not suitable for measuring particles of 1 μm or more. Therefore, in general, an optical particle counter is separately used for particles having a particle size of 1 탆 or more, and an optical particle counter measures the number of particles by a method of detecting scattered light generated by irradiating a particle with a laser beam.

However, if the number concentration of the particles is measured using a separate apparatus according to the particle size, the inflow environment and the flow condition of the aerosol particles are different for each particle measuring apparatus. Therefore, There was a problem that the concentration could not be measured accurately.

Korean Patent No. 10-0567789

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art, and an object of the present invention is to provide an aerosol particle having a reference size or larger and an aerosol particle smaller than a reference size, The present invention provides a particle number concentration measuring apparatus capable of simultaneously measuring the particle number concentration.

Another object of the present invention is to neutralize particles passing through the particle separating device by mounting a neutralizer on the front and rear of the particle separating device in the fine particle detecting section capable of measuring aerosol particles smaller than the reference size, The present invention provides a particle number concentration measuring apparatus capable of minimizing the loss of aerosol particles in the process of being introduced into a nuclear particle counter and improving the accuracy of measurement results of fine particles.

It is a further object of the present invention to provide an apparatus and method for detecting fine particles by mounting a separate impactor and impactor detection measurement unit in front of the fine particle detection unit to limit the aerosol particles flowing into the fine particle detection unit to particles less than a reference size, In addition, since the number of aerosol particles larger than the reference size captured in the impactor is analyzed and compared with the result of the coarse particle detection unit, the measurement result of the coarse particle detection unit can be verified once more, And to provide a particle number concentration measuring apparatus.

According to the present invention, there is provided a spraying apparatus comprising: a particle introducing portion formed so that aerosol particles flow in and flow at constant velocity; A coarse particle detector configured to detect the number of aerosol particles that are larger than a reference size among the inflowed aerosol particles, A fine particle detection unit formed to allow the aerosol particles branched from the particle introduction unit to flow therein and measuring the number of aerosol particles smaller than a reference size among the introduced aerosol particles; And a suction pump connected to the coarse particle detection unit and the fine particle detection unit to generate a flow of aerosol particles, wherein the fine particle detection unit comprises a first Neutralizer; A particle separator for separating the neutralized aerosol particles through the first neutralizer into sizes according to electrical mobility and discharging aerosol particles of a specific size; A second neutralizer for neutralizing the aerosol particles of a specific size emitted from the particle separating device by irradiating soft X-rays; And a condensing core particle counter configured to receive the neutralized aerosol particles through the second neutralizer and to measure the number of the aerosol particles introduced into the second neutralizer.

The coarse particle detection unit includes an optical particle counter configured to receive the aerosol particles branched and discharged from the particle introduction unit and irradiating the aerosol particles with a laser beam to measure the number of aerosol particles, The counter can measure the number of aerosol particles above the reference size among the incoming aerosol particles.

Further, a separate impactor for collecting aerosol particles of a reference size or more out of the aerosol particles branching off from the particle introduction part is mounted between the particle introduction part and the first neutralizer of the fine particle detection part, and the impactor has a collector plate An impactor detection measuring unit for measuring the number of aerosol particles by analyzing the captured aerosol particles may be mounted.

The apparatus may further include a comparison operation unit for comparing and verifying the number of aerosol particles measured by the impact detector detection unit and the number of aerosol particles measured by the optical particle counter of the coarse particle detection unit.

In addition, when the comparison and verification value of the comparison operation unit is equal to or greater than the reference error, it is possible to control operation by a separate control unit so that a separate warning signal is output.

The particle introducing portion may include a buffer chamber formed to allow aerosol particles to flow from the outside; A laminar flow tube connected to the buffer chamber to allow aerosol particles to flow from the buffer chamber and formed so that the flow of aerosol particles appears in a laminar flow form; And a branch pipe branching from the laminar flow pipe and connected to the coarse particle detection unit and the fine particle detection unit, respectively, wherein the coarse particle detection unit and the coarse particle detection unit are connected to each other through the laminar flow pipe and the branch pipe from the buffer chamber through the suction pressure of the suction pump, The aerosol particles can be respectively introduced into the fine particle detection unit.

According to the present invention, it is possible to simultaneously measure the aerosol particles having a reference size or more and the aerosol particles having a reference size or less, through the coarse particle detection unit and the fine particle detection unit, for the fine aerosol particles mixed with various sizes.

In addition, by mounting a neutralizer on the front and rear of the particle separator in the fine particle detector for measuring the aerosol particles smaller than the reference size, particles passing through the particle separator can be neutralized, It is possible to minimize the loss of the aerosol particles during the inflow process, thereby improving the accuracy of the measurement results of the fine particles.

In addition, by mounting a separate impactor and impactor detection measurement unit in front of the fine particle detection unit, the aerosol particles introduced into the fine particle detection unit can be limited to particles smaller than the reference size, thereby improving the accuracy of measurement results, The number of aerosol particles larger than the reference size captured in the impactor is analyzed and compared with the result of the coarse particle detection section, whereby the measurement result of the coarse particle detection section can be verified once more, enabling more accurate measurement.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the overall configuration of a particle count concentration measuring apparatus according to an embodiment of the present invention;
FIG. 2 conceptually illustrates a structure of a particle separating apparatus according to an embodiment of the present invention. FIG.
FIGS. 3 to 5 are views schematically showing a configuration of a first heavy load and a second heavy load according to an embodiment of the present invention;
FIG. 6 schematically illustrates the construction of a condensing nuclear particle counter according to an embodiment of the present invention; FIG.
7 is a view schematically showing a configuration of an optical particle counter according to an embodiment of the present invention,
8 is a view schematically showing the configuration of an impactor and impactor detection and measurement unit according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram schematically showing the overall configuration of a particle count concentration measuring apparatus according to an embodiment of the present invention; FIG.

An apparatus for measuring the number concentration of particles according to an embodiment of the present invention is an apparatus for measuring the number and concentration of ultrafine particles existing in the form of an aerosol in an air. The apparatus measures a reference particle size, for example, And particles smaller than the particle size can be measured at the same time.

The apparatus for measuring the number of particles includes a particle introducing portion 100 in which aerosol particles flow into the particle introducing portion 100 at a constant velocity and a plurality of aerosol particles measuring a number of aerosol particles having a reference size (for example, 1 μm) A coarse particle detector 200 for measuring the number of aerosol particles emitted from the particle inlet 100 and a coarse particle detector 200 for measuring the number of aerosol particles having a reference size (for example, And a suction pump 400 connected to the fine particle detector 300 to generate a flow of aerosol particles.

The particle introducing portion 100 is located at the front end of the entire apparatus along the inflow flow of the aerosol particles so as to allow the aerosol particles to flow into the apparatus in a stable state. The particle introducing portion 100 is formed such that the aerosol particles flow into the apparatus, It is possible to improve the accuracy of the aerosol particle number concentration measurement result by the coarse particle detection section 200 and the fine particle detection section 300. [

The particle introduction part 100 includes a cushioning chamber 110 formed to allow aerosol particles to flow from the outside and a cushioning chamber 110 connected to the cushioning chamber 110 to allow aerosol particles to flow in from the cushioning chamber 110, And a branch pipe 130 branched from the laminar flow pipe 120 and connected to the entrance sides of the coarse particle detection unit 200 and the fine particle detection unit 300 are connected to the laminar flow pipe 120, .

When the suction pump 400 operates according to this structure, the suction pressure is transmitted to the particle introducing part 100 through the coarse particle detecting part 200 and the fine particle detecting part 300, A negative pressure is formed and external aerosol particles flow into the space inside the buffer chamber 110. The aerosol particles flowing into the buffering chamber 110 are maintained in a stable state inside the buffering chamber 110. That is, it is shielded from the influence of external wind or the like and maintains a relatively stable state. The aerosol particles stored in the buffering chamber 110 then flow along the laminar flow tube 120, which is preferably formed long enough so that the flow of the inner aerosol particles can exhibit a stable flow with laminar flow. Thereafter, the air is introduced into the coarse particle detecting unit 200 and the fine particle detecting unit 300 through the branch pipe 130 branched from the laminar flow pipe 120 and passed through the coarse particle detecting unit 200 and the fine particle detecting unit 300 And is discharged to the suction pump 400 side. At this time, in the process of passing the aerosol particles through the coarse particle detection unit 200 and the fine particle detection unit 300, coarse particles larger than a reference size and fine particles smaller than the reference size are respectively detected.

The coarse particle detector 200 is a device for measuring the number of the aerosol particles flowing in from the particle inlet 100 through the branch pipe 130 and flowing out of the aerosol particles. The coarse particle detector 200 may include an optical particle counter 220 and a particle filter 210 disposed in front of the optical particle counter 220.

The optical particle counter 220 measures the number of aerosol particles by absorbing the scattered light generated by irradiating the aerosol particles with the laser beam. This measurement method is applicable to particles larger than a reference size, for example, It is possible to measure accurately. Therefore, it is possible to measure the number of particles of the aerosol particles discharged from the particle inlet 100 using particles larger than the reference size.

At this time, since the aerosol particles flowing into the optical particle counter 220 from the particle entrance part 100 include not only particles larger than the reference size but also particles smaller than the reference size, for the measurement accuracy of the optical particle counter 220, A separate particle filter 210 for filtering less than the reference size aerosol particles may be mounted in front of the particle filter 220. Of course, even if the particle filter 210 is not mounted, the number of particles larger than the reference size is measured in the optical particle counter 220, but in some cases, noise may be generated due to particles smaller than the reference size. A separate particle filter 210 may be mounted for accuracy of the result.

The fine particle detection unit 300 is an apparatus for measuring the number of aerosol particles that are smaller than the reference size among the introduced aerosol particles so that the aerosol particles branched and discharged from the particle inlet unit 100 through the branch pipe 130 are introduced . The fine particle detection unit 300 includes a first neutralizer 310, a particle separator 330, a second neutralizer 320, and a condensed core particle counter 340, which are sequentially disposed along the aerosol particle flow.

The neutralizer (310, 320) serves to neutralize the aerosol particles flowing from the outside into the charged state. By irradiating the inflowed aerosol particles with soft X-rays, the aerosol particles are electrically charged to have a Maxwell- And then neutralized in the form. These neutralizers 310 and 320 are disposed in front of and behind the particle separator 330, respectively. The first neutralizer 310 disposed in front of the particle separator 330 neutralizes the aerosol particles discharged from the particle inlet 100 and the second neutralizer 320 disposed behind the particle separator 330 The aerosol particles discharged from the particle separating device 330 are neutralized.

The particle separating device 330 is formed such that the neutralized aerosol particles are introduced through the first neutralizer 310 and are separated in size according to the electrical mobility, and then the aerosol particles of a specific size are discharged. The aerosol particles discharged through the particle separating device 330 on the operating structure of the particle separating device 330 are charged particles having a specific size and a specific amount of charge.

The condensed nuclear particle counter 340 is formed to flow neutralized aerosol particles through the second separator 330 after passing through the second neutralizer 320. The aerosol particles are saturated, And condensed and the condensed particles are measured by using an optical particle counter.

According to the structure of the fine particle detector 300, the aerosol particles branched and discharged from the particle inlet 100 flow into the first neutralizer 310. The aerosol particles are naturally polarized or charged to the anode or cathode in their natural state. In the first neutralizer 310, by irradiating the aerosol particles with soft X-rays, the aerosol particles are electrically charged to a Maxwell-Boltzmann distribution .

Then, the aerosol particles neutralized through the first neutralizer 310 are introduced into the particle separator 330. In this case, an electrode is provided in the particle separator 330, so that the attraction force of the electrode acts on the aerosol particles flowing in the particle separator 330, Of the aerosol particles can be selectively discharged to the outside. In accordance with this operating principle, aerosol particles of a certain size are discharged from the particle separating device 330. At this time, the aerosol particles discharged from the particle separating device 330 are discharged as polar charged particles charged to the anode or the cathode, not the neutral particles which are not charged by the operating principle of the particle separator 330. Since the operation principle of such a particle separating apparatus is widely used in general, a detailed description thereof will be omitted here.

Since the aerosol particles passing through the particle separator 330 are charged particles having a polarity as described above, when the particles in the charged state are supplied to the condensing particle counter 340, they are attached to the wall surface of the pipe . That is, when the aerosol particles flow in a neutral state without charging, they can smoothly flow without loss. However, when the aerosol particles are charged in a polarity state, due to the electrical attraction due to polarity, do. When the flow loss is generated in this way, since loss occurs in the aerosol particles supplied to the condensing core particle counter 340, the accuracy of the measurement result of measuring the number of particles is remarkably lowered.

Accordingly, in the present invention, the second neutralizer 320 is installed to neutralize the aerosol particles once passing through the particle separator 330, and the aerosol particles in the polar state are neutralized to have the Maxwell-Boltzmann distribution state And supplied to the condensing nuclear particle counter 340.

Accordingly, the aerosol particles passing through the particle separator 330 are once neutralized through the second neutralizer 320, so that the loss thereof is minimized during the flow of the air to the condensing core particle counter 340, The accuracy of the particle measurement result through the particle counter 340 can be improved.

According to the structure described above, the apparatus for measuring the number of particles according to an embodiment of the present invention simultaneously measures aerosol particles having a reference size or more and aerosol particles having a reference size or less through the coarse particle detection unit 200 and the fine particle detection unit 300 can do. At this time, the particle entrance part 100 is mounted in front of the coarse particle detection part 200 and the fine particle detection part 300 so as to induce uniform velocity flow of the aerosol particles to improve measurement accuracy, The flowing aerosol particles are branched off and flow into the coarse particle detector 200 and the fine particle detector 300.

At this time, since the coarse particle detector 200 is provided with the separate particle filter 210 as described above, it is possible to filter the aerosol particles less than the reference size introduced into the optical particle counter 220, It is possible to more accurately measure the aerosol particles larger than the reference size through the flow path 220.

The fine particle detector 300 may be provided with a separate impactor 500 between the particle inlet 100 and the first neutralizer 310 of the fine particle detector 300. The impactor 500 is configured to collect aerosol particles larger than a reference size among the aerosol particles branched off from the particle inlet 100. As the impactor 500 is mounted, only the particles smaller than the reference size are introduced into the fine particle detector 300. Accordingly, the particles smaller than the reference size can be accurately detected through the fine particle detector 300 Can be measured.

At this time, the impactor 500 may further include an impactor detection measuring unit 510 for measuring the number of aerosol particles by analyzing the aerosol particles collected on the collecting plate of the impactor 500. The method of analyzing the particles collected in the impactor 500 is generally performed through a mass analysis method of particles, which is widely used in an impactor device for analyzing particles, and thus a detailed description thereof will be omitted.

When the aerosol particles larger than the reference size among the aerosol particles flowing into the fine particle detection unit 300 are collected and analyzed by the impactor 500, the impactor 500 and the impactor detection and measurement unit 510 measure the aerosol The number of particles can be measured. Therefore, the measurement result should be within a certain error range from the measurement result through the coarse particle detection unit 200.

Therefore, in the present invention, a comparison operation unit (for comparing and verifying the number of aerosol particles measured by the optical particle counter 220 of the coarse particle detection unit 200 and the number of aerosol particles measured by the impactor detection measurement unit 510 600). At this time, when the comparison and verification value by the comparison operation unit 600 is equal to or greater than the reference error, the operation can be controlled by the controller 700 so that a separate warning signal is output.

According to such a structure, since the particle number concentration measuring apparatus according to an embodiment of the present invention can verify once again whether the measurement result of the coarse particle detecting section 200 is correct through the impactor detecting and measuring section 510, Results can be obtained.

Next, the configurations of the coarse particle detection unit 200 and the fine particle detection unit 300 will be described in detail with reference to FIGS. 2 to 8. FIG.

FIG. 2 is a conceptual view showing the structure of a particle separating apparatus according to an embodiment of the present invention.

The particle separating device 330 includes a cylindrical outer guide duct 331, an inner guide duct 332, an electrode 333 provided inside the inner guide duct 332, And one particle separation duct 334. The electrode 333 is connected to the power supply unit 335 and the outer guide duct 331 is grounded. In the particle separation duct 334, a plurality of particle entry holes 24a having a diameter of about 1 mm are formed at the same height along the outer peripheral surface of the particle separation duct 334.

When the aerosol particles that are positively charged through the first neutralizer 310 enter the particle separator 330, the aerosol particles flow between the outer guide duct 331 and the inner guide duct 332. On the other hand, clean air flows in the inner guide duct 332 in order to smoothly transfer the charged particles. The particles charged to the opposite polarity to the electrode 333 move toward the electrode 333. Accordingly, the charged particles having a small size are attached to the upper end of the electrode 333, and the charged particles having a larger size move to the lower side of the electrode 333. The charged particles moving downward are discharged to the outside of the guide duct 331 because the charged particles having a very large size, which is attached to the lower portion of the electrode 333 or not attached to the electrode 333, At this time, when a small amount of air is sucked through the particle separation duct 334, the particles having a certain size reaching the lower portion of the electrode 333 are allowed to flow through the particle entry hole 334a, (334) and flows out to the outside. The charged particles flowing out by the particle separation duct 334 have a certain range of size. The selected charged particles having a specific size are discharged from the particle separating apparatus 330 and flow into the condensing particle counter 340 through the second neutralizer 320.

3 to 5 are views schematically showing the configurations of the first and second heavy equipment according to an embodiment of the present invention.

The neutralizers 310 and 320 according to an embodiment of the present invention are disposed at the front and the rear of the particle separator 330, respectively. The neutralizers 310 and 320 have the same structure and neutralize the charged particles with a Maxwell-Boltzmann distribution.

The neutralizer 310 and 320 have a neutralizer housing 303 for forming a flow path of the aerosol particles so that the neutralizer housing chamber 303a of the neutralizer housing 303 is formed and the inflow and outflow of aerosols to both sides of the neutralizer housing chamber 323a A chamber inlet 304 and a chamber outlet 305 are disposed. The chamber inlet 304 is in fluid communication with the particle inlet 100 or the particle separator 330 and the chamber outlet 304 is in fluid communication with the particle separator 330 or the condenser core particle counter 340 side. Respectively. A photo-neutralizing device through hole 306 is provided on the outer surface of the neutralizer housing 323 so that the soft X-ray is transmitted from the photo neutralizer 301 disposed on the outer surface of the neutralizer housing 303 to the neutralizer housing chamber 303a do. A photo neutralizer head 309 is disposed at the lower end of the photo neutralizer 301 toward the neutralizer housing chamber 303. The photo neutralizer head 309 is disposed between the photo neutralizer head 309 and the neutralizer housing chamber 303a, The neutralizer window 307 is provided with a slice glass or a slice mica. The neutralizer window 307 is provided with a transient window 307 in order to prevent breakage due to an external impact and ensure proper permeability of the soft X- It is preferable that it is set to an appropriate thickness without being excessively thin or excessively thick.

The neutralizer window 307 is stably disposed in the photo neutralizer through-hole 306 to maintain airtightness in the neutralizer housing chamber 303a through the neutralizer window support ring 308. [ Thus, the aerosol containing particles entering the neutralizer housing chamber 303 through the chamber inlet 304 side is removed by the soft X-ray emitted from the photo neutralizer head 309 through the neutralizer window 307, And is neutralized to have a Boltzmann distribution.

6 is a view schematically showing a configuration of a condensing nuclear particle counter according to an embodiment of the present invention.

6, a general condensing nuclear particle counter 340 includes a reservoir 341 in which a working fluid T such as alcohol is stored, a reservoir 341 for introducing the working fluid T from the reservoir 341, A saturator 342 formed to communicate with the working fluid T and saturated with the working fluid T formed to communicate with the saturator 342 so as to allow the working fluid T to flow from the saturator 342, A condenser 343 for condensing fine particles T as condensation nuclei to be liquid particles P1 and a particle counting unit 344 for counting liquid particles P1 discharged from the condenser 343 .

A particle inlet is formed in the reservoir 341 to allow external air containing fine particles to flow in. The particle counting unit 344 uses an optical device for counting ordinary fine particles. The condenser 343 And a laser generator 344-2 is mounted on one side of the vacuum chamber 344-1 to generate a laser beam and a plurality of laser beams Laser beams are emitted to the liquid particles P1 discharged from the condenser 343 and the energy of the laser beam absorbed or scattered by the liquid particles P1 is detected through the light receiving section 344-3 .

An absorber 342-2 made of a porous material such as a nonwoven fabric is attached to the saturator 342 so that the working fluid T is introduced from the reservoir 341 by the capillary phenomenon and the absorber 342-2 is attached to the outer wall of the saturator 342 A heating device 342-3 for heating the working fluid absorbed by the absorbing material 342-2 to approximately 35 占 폚 is mounted. The condenser 343 is equipped with a cooling device 343-1 for maintaining the temperature of the condenser 343 at about 10 ° C so as to cool and condense the working fluid saturated in the gas state in the saturator 342.

According to this configuration, the fine particles P flow along the reservoir 341, the saturator 342 and the condenser 343 at this time when the working fluid T flows through the saturator 342 and the condenser 343 The liquid particles P1 are condensed with the fine particles P as condensation nuclei and grow into the liquid particles P1 and the liquid particles P1 thus grown are introduced into the vacuum chamber 344-1 of the particle counting unit 344. [ The particle counting unit 344 counts the number of fine particles by counting such liquid particles P1.

7 is a view schematically showing a configuration of an optical particle counter according to an embodiment of the present invention.

In the optical particle counter of the present invention, a light scattering type particle counter is applied. The light scattering method is a method of detecting the scattered light generated by the collision with the particles flowing in the space inside the measurement chamber after the light enters the measurement chamber to grasp the size and the number of the particles.

The principle of such a light scattering type particle measuring apparatus is that the incident light is generated so as to form one focus in the measurement chamber and the scattered light generated by the collision of the incident light with the particles passing through the focus region of the incident light is detected, Size and number. Generally, when the particle size is 0.05 μm to 4 μm, the size of the particle can be theoretically calculated by applying the Mie theory to determine the relationship between the particle size and the intensity of light. The intensities of the scattered light, which are theoretically calculated, are compared with intensities of actually measured scattered light to measure the size and number of particles.

The optical particle counter 220 according to an embodiment of the present invention includes a measurement body 221 that communicates with the branch pipe 130 branching from the particle inlet 100, And a light detection unit 223. The light detection unit 223 detects the light output from the light detection unit 222 and outputs the light detection result.

The light generating unit 222 generates incident light I so that a focus F is formed in the inner space of the measuring main body 221. The light generating unit 222 is installed in communication with the inner space of the measuring main body 221, A laser diode 222-2 for applying laser light to the laser diode 222-2 and a focusing lens 222-3 for focusing laser light generated from the laser diode 222-2. The laser light generated from the laser diode 222-2 has an emission angle of a certain magnitude and is focused through the focusing lens and forms a focus F at a specific point in the inner space of the measurement body 221. [ At this time, a plurality of focusing lenses 222-3 may be mounted, and the number of focusing lenses may be variously changed according to measurement conditions such as the type of the measurement body 221 and the focusing distance. The position of the focus F of the incident light I is preferably formed at the center of the measurement body 221 but may alternatively be formed at the edge of the measurement body 221, .

The light generating unit 222 may further include a light generating unit lens barrel 222-1 to receive and mount the laser diode and the focusing lens. A separate vacuum window 222-4 is further provided so that it can be separated. That is, the light generating unit 222 has a laser diode and a focusing lens arranged in the inner space of the light-generating unit lens barrel, and the inner space of the light-generating unit lens barrel is separated by the vacuum window, Thereby preventing contamination of the inner space of the light generating portion by the particles. At this time, the vacuum window is mounted at one end of the light-generating part tube barrel facing the measuring body 221 so that the light-generating part tube barrel is separated from the inner space of the measuring body 221, And is configured to protect the lens.

The photodetector 223 receives the scattered light S generated by the collision of the incident light I generated by the light generator 222 and the particles passing through the focus F region of the incident light I do. Since the scattered light S is generated in all directions from the particle, the photodetector 223 includes a condenser lens 223-3 for condensing the scattered light S so as to condense and detect a part of the scattered light S, And a detection sensor 223-2 for detecting the scattered light S condensed by the condenser lens 223-3. Therefore, when the incident light I collides with the particles and scattered light S is generated, a part of the scattered light S is condensed by the condenser lens 223-3 and transmitted to the detection sensor 223-2, The intensities of the scattered light S are measured. The intensities of the scattered light S thus measured are compared with the theoretical values applied to the Mie theory or the like through a separate operation unit (not shown) to calculate the particle size. When the particles flow in a constant flow direction in the inner space of the measurement body 221 according to the embodiment of the present invention, scattered light S is scattered every time the particles pass through the focus F region of the incident light I The calculation unit can calculate and measure the number of particles through the number of times the scattered light S is generated.

The photodetector 223 further includes a photodetector lens barrel 223-1 for accommodating therein the condenser lens 223-3 and the detection sensor 223-2 in the same manner as the light generator 222 And a separate vacuum window 223-4 is further provided so that the inner space of the photodetector part 223-1 can be separated. With this structure, the inner space of the photodetector part tube is configured to prevent the contamination of the measuring body 221 with the inner flowing particles. At this time, the vacuum window is mounted at one end of the photodetection unit lens barrel facing the measurement body 221 so that the photodetection unit lens barrel is separated from the inner space of the measurement body 221 and accordingly, the detection sensor and the focusing lens .

The light generating unit for generating incident light and the light detecting unit for receiving and detecting scattered light from the particles are formed in a vacuum state so as not to be contaminated by external particles, thereby minimizing noise generation and improving measurement reliability.

8 is a view schematically showing the configuration of an impactor and impactor detection and measurement unit according to an embodiment of the present invention.

The impactor 500 according to an embodiment of the present invention is mounted in communication with the branch pipe 130 of the particle introducing portion 100. The impactor 500 includes an impactor body 510 and a collection body 520 mounted inside the impactor body 510. A fine flow hole 511 is formed in the impactor body 510 so that the aerosol particles flow. A collecting plate 530 is mounted on the collecting body 520 to collect aerosol particles at the center of the upper end. (521) are formed.

According to such a structure, the aerosol particles flowing through the fine flow holes 511 are collected on the collecting plate, and the particles having small flow inertia force flow through the particle flow holes 521 to the downstream side. At this time, by appropriately designing the size of the fine flow holes 511, aerosol particles having a reference size or larger, for example, 1 μm or more can be collected on the collecting plate 530.

A separate impact detector detection unit 510 is connected to the collecting plate 530 and the number of the aerosol particles can be measured by analyzing the collected aerosol particles on the collecting plate 530.

Since the structure of the impactor 500 and the impact detector detection unit 510 are widely used in the field of fine dust measurement, a detailed description thereof will be omitted.

The foregoing description is merely illustrative of the technical idea of the present invention and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas falling within the scope of the same shall be construed as falling within the scope of the present invention.

100: particle introduction part 110: buffer chamber
120: laminar flow tube 130: branch tube
200: coarse particle detector 210: particle filter
220: optical particle counter 300: fine particle detector
310: first neutralizer 320: second neutralizer
330: particle separator 340: condensing particle counter
400: Suction pump 500: Impactor
510: an impactor detection and measurement unit 600; Comparison operation unit
700:

Claims

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A particle introducing portion in which the aerosol particles flow into the particle introducing portion so as to flow at constant velocity;
A coarse particle detector configured to detect the number of aerosol particles that are larger than a reference size among the inflowed aerosol particles,
A fine particle detection unit formed to allow the aerosol particles branched from the particle introduction unit to flow therein and measuring the number of aerosol particles smaller than a reference size among the introduced aerosol particles; And
A suction pump connected to the coarse particle detection unit and the fine particle detection unit to generate a flow of aerosol particles;
, And the fine particle detection unit
A first neutralizer for neutralizing the aerosol particles branched from the particle introduction portion by irradiating soft X-rays;
A particle separator for separating the neutralized aerosol particles through the first neutralizer into sizes according to electrical mobility and discharging aerosol particles of a specific size;
A second neutralizer for neutralizing the aerosol particles of a specific size emitted from the particle separating device by irradiating soft X-rays; And
A second condenser particle counter configured to receive the neutralized aerosol particles through the second neutralizer and measuring the number of the aerosol particles introduced into the second neutralizer,
Lt; / RTI >
The coarse particle detection unit
An optical particle counter which is formed in such a manner that the aerosol particles branched from the particle introducing portion are introduced and irradiates the introduced aerosol particles with a laser beam to measure the number of aerosol particles,
Wherein the optical particle counter measures the number of aerosol particles that are larger than a reference size among the introduced aerosol particles,
A separate impactor for collecting aerosol particles of a reference size or more among the aerosol particles branching off from the particle introduction portion is mounted between the particle introduction portion and the first neutralizer of the fine particle detection portion,
Wherein the impactor is equipped with an impactor detection measuring unit for measuring the number of aerosol particles by analyzing the aerosol particles collected on the collecting plate of the impactor.

The method of claim 3,
Further comprising a comparison operation unit for comparing and verifying the number of aerosol particles measured by the impact detector detection unit and the number of aerosol particles measured by the optical particle counter of the coarse particle detection unit .

5. The method of claim 4,
Wherein the operation of the particle number concentration measuring device is controlled by a separate controller so that a warning signal is output when the comparison and verification value is equal to or greater than the reference error.

6. The method according to any one of claims 3 to 5,
The particle-
A buffer chamber formed so that the aerosol particles are introduced from the outside;
A laminar flow tube connected to the buffer chamber to allow aerosol particles to flow from the buffer chamber and formed so that the flow of aerosol particles appears in a laminar flow form; And
Wherein the coarse particle detection unit and the fine particle detection unit are connected to the laminar flow tube,
Wherein the aerosol particles are introduced into the coarse particle detection unit and the fine particle detection unit from the buffer chamber through the laminar flow tube and the branch pipe through the suction pressure of the suction pump, respectively.