KR101479930B1 - Multitasking stoker system - Google Patents

Abstract

A multitasking stalking system according to an embodiment of the present invention is characterized in that a plurality of individual shelves capable of storing two or more different kinds of distribution products individually are stored therein and an input and output port for inputting and outputting the products are formed on one side And a transfer robot for transferring the goods between the input / output ports and the individual shelves, wherein the fork unit includes a plurality of transfer units for transferring a plurality of At least one selected from among the forks includes a plurality of fork portions for supporting the goods.

Description

[0001] Multitasking stoker system [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multitasking stocker system, and more particularly, to a multitasking stocker system capable of multipurpose loading and storing of various types of semiconductor logistics products.

Generally, semiconductors are variously known as diodes, transistors, and ICs (integrated circuits), and they are usually called semiconductor elements because they are basic elements for making electronic products.

Diode is the simplest semiconductor device that has a PN junction. It converts the AC into DC, or performs a detection operation to extract the sound from the radio wave. The transistor has a PNP or NPN equation and amplifies the small signal.

Unlike these discrete devices, the integrated circuit that collects the elements plays a role of storage, memory, and operation. Compared to what we call transistors and diodes as discrete devices, we have integrated circuits in which the devices are assembled.

The process for producing such a semiconductor product can be roughly divided into four processes from the initial wafer production to the final product.

That is, a wafer manufacturing process for manufacturing a wafer from a silicon raw stone, a wafer processing process for forming an integrated circuit on the wafer surface using the manufactured wafer, a package for manufacturing a semiconductor chip with the processed wafer, Assembly process and module assembling process to manufacture complete product by attaching package to module.

In a semiconductor production line in which many processes are performed, wafers, semiconductor chips, semiconductor strips, and the like are transported between processes and processes or devices and devices. In order to increase the efficiency of production processes and maintain high cleanliness, , Semiconductor strips and the like are generally carried in a state of being housed in a product such as a cassette, a tray, or a magazine.

On the other hand, the semiconductor production line is provided with a separate line balance stoker system for loading and storing respective products such as wafers, semiconductor chips, and semiconductor strips.

In order to solve the buffering problem caused by the difference between the processing capability and the processing time of each semiconductor manufacturing facility, the line balance stocker system temporarily stores the processed wafer, semiconductor chip, semiconductor strip, And then supplies it to the next process.

In addition, when a failure or maintenance of a facility is required in a specific process, a wafer, a semiconductor chip, or a semiconductor strip that has been subjected to a process before the process is stored, Thereby preventing the entire line from being stopped.

However, the conventional line balance stocker system is designed to load and store only one specific kind of cassette, tray, and magazine, and a line balance stocker system is required separately for each corresponding article. As a result, there is a problem in that space utilization in the semiconductor production line is inferior.

In recent years, the semiconductor industry has introduced a new semiconductor production process for small quantity production of various types of products. However, the conventional line balance stocker system capable of storing and inputting only a single product is not suitable for a new semiconductor production process, loss.

Korean Patent Laid-Open Publication No. 10-2011-0033669 (SFA, Inc.) 2011.03.31

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a cabinet and a transfer robot capable of loading and storing two or more different kinds of goods such as a cassette, a tray, and a magazine, And a multitasking stocker system capable of coping with a semiconductor production process for producing a small quantity of various products.

According to an aspect of the present invention, there is provided a cabinet comprising: a cabinet in which a plurality of mutually different kinds of logistics products are individually stacked and stored, and a plurality of individual shelves are provided therein, and an input / output port for input / output of the goods is formed; And a fork unit for handling the products, and a transfer robot for transferring the products, while moving between the input / output port and the individual shelves, wherein the fork unit comprises: A multitasking stocker system may be provided wherein at least one selected from among a plurality of forks includes a plurality of fork portions for supporting the goods.

Wherein the plurality of fork portions include: a first fork portion for handling any one of the goods; And a second fork portion cooperating with the first fork portion to handle a predetermined one of the goods.

Wherein the fork unit includes a fork main body coupled to the main body of the transfer robot so as to be able to move up and down, And a fork driver for driving the plurality of forks to be relatively movable with respect to the fork main body.

The fork unit may further include a clamping part provided at one side of the plurality of fork parts and clamping the goods in cooperation with the fork part. Wherein the first fork portion is connected to the fork driving portion and is slidably movable with respect to the fork body, the second fork portion is provided to be connected to or disconnected from the first fork portion, And is selectively connected to the first fork portion to handle the designated goods, and can be slidably moved in conjunction with the movement of the first fork portion.

The fork unit may further include a fork connection portion for connecting or disconnecting the first fork portion and the second fork portion, wherein the fork connection portion is provided to be coupled to one side of the first fork portion, Connecting brackets; And a fork connecting actuator provided on one side of the second fork portion and having a connecting shaft that is inserted or released from the through hole of the connecting bracket by being moved toward or away from the connecting bracket .

Wherein the clamping portion comprises: a pressing plate which presses the upper surface of the goods in a vertical direction; And an actuator for pressurizing and moving the pressurizing plate up and down.

Wherein the clamping portion comprises a chucking plate for clamping the flange portion of the product to be packaged, the flange portion having a rectangular flange portion on an upper end surface of the goods, and fixing the flange portion to the fork portion; And a flange chucking actuator for moving the chucking plate toward or away from the flange portion.

Wherein the fork driving unit includes: a ball screw shaft disposed along the X-axis direction that is the direction in which the fork portion is moved; A slider having one side coupled to the fork portion and the other side coupled to the ball screw shaft and moving along the X axis direction; And a driving motor for providing a driving force for rotating the ball screw shaft.

Wherein the ball screw shaft and the driving motor are disposed adjacent to each other, and the fork driving unit further includes a power transmitting unit that transmits a driving force of the driving motor to the ball screw shaft, And a pair of pulleys respectively coupled to the ball screw shaft; And a power transmission belt connected to the pair of pulleys.

The fork main body includes: a body coupled to the main body of the transfer robot; A base plate provided to be rotatable relative to the body; And a guide rail provided on the base plate and guiding the second fork portion in a linear movementable manner.

The fork main body may further include a fixing bracket provided on one side of the base plate and having an insertion hole into which a connection shaft of the fork connection portion is inserted so as to prevent the movement of the second fork portion.

The fork portion may have a flat surface whose width is intermittently narrowed at predetermined intervals along the length direction.

The different kinds of goods may be a cassette, a tray and a magazine for transporting semiconductor components.

Each of the plurality of individual shelves includes a shelf body having at least one forked portion formed by cutting one side corresponding to the shape of the fork portion; And a seating guide unit provided on the upper surface of the shelf body and guiding the goods to be seated while aligning at least one or more of them in different positions on the shelf body based on the kind of the warehouses.

Wherein the seating guide part is provided on both sides of the forking part by a distance corresponding to the width of one kind of the goods to be previously specified so that any one kind of the goods products is aligned on the upper surface of the shelf body adjacent to both sides of the forking part A plurality of seating guide bars spaced apart from each other; And a plurality of seating pads spaced apart from the shelf body in a rectangular configuration with the forked portion interposed therebetween so as to respectively support the lower end corner areas of other kinds of the goods.

The plurality of seating pads include a plurality of common pads respectively disposed in a corner area of the shelf body, and the plurality of seating pads are disposed in a corner area of the shelf body. And a plurality of dedicated pads respectively disposed adjacent to both side portions of the forking portion formed at the central portion of the shelf body among the three forking portions.

According to the present invention, a cabinet and a transfer robot capable of stacking and storing two or more different kinds of logistics such as cassettes, trays, and magazines are provided, so that logistics rationalization can be effectively achieved between semiconductor product production processes. Further, It is possible to provide a multitasking stocker system capable of coping with a semiconductor production process.

1 is a perspective view of a multitasking stocker system according to an embodiment of the present invention.
Figures 2 and 3 are side views schematically illustrating the interior of the multitasking stocker system along the X and Y axes of Figure 1, respectively.
FIG. 4 is a view showing a state in which goods are loaded on a plurality of individual shelves of FIG. 3. FIG.
Figure 5 is a perspective view of the unit individual shelf of Figure 4;
FIG. 6 is a view showing an operating state of the fork unit for transporting trays by the transporting robot of FIG. 3. FIG.
7 is a view showing the operating state of the fork unit for transporting the cassette by the transporting robot shown in Fig.
Fig. 8 is a perspective view showing a fork driving unit of the fork unit of Fig. 5;
Fig. 9 is a main part plan view of the fork driving portion of Fig. 8; Fig.
Figs. 10 to 12 are perspective views showing, in steps, an operation in which a tray is loaded on an individual shelf by a transfer robot.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Before describing the drawings, the different types of logistics products to be described below include a cassette used for storing and transporting a plurality of wafers between a process and a process, a semiconductor chip a tray used to store and transport chips, and a magazine used to store and transport semiconductor strips.

Generally, although not necessarily, the cassette is provided in a rectangular box shape with a structure in which disk-shaped wafers can be stacked inside, and the trays are provided with a plate-shaped body formed with a plurality of pockets according to the type of semiconductor chip, The magazine is provided in a square box shape in which a plurality of semiconductor strips can be stacked therein. When a cassette is stored in the order of volume or size, the cassette for storing the original wafer is the largest, followed by trays and magazines.

Since the cassettes, trays, and magazines are all provided in a rectangular shape, they are different from each other in height and width. Therefore, in the line balance storage system according to the prior art for transferring, Is designed to cope with only one specific product such as a cassette, a tray, or a magazine.

However, the multitasking stocker system of the present invention is designed to handle different types of logistics products, such as cassettes, trays, magazines, etc., of different sizes.

FIG. 1 is a perspective view of a multitasking stocker system according to an embodiment of the present invention, and FIGS. 2 and 3 are side views schematically illustrating the interior of a multitasking stocker system along the X and Y axes of FIG. 1, FIG. 5 is a perspective view showing a unit individual shelf of FIG. 4, and FIG. 6 is a cross-sectional view of the transfer robot shown in FIG. Fig. 7 is a view showing the operating state of the fork unit for transporting the cassette by the transporting robot of Fig. 3, Fig. 8 is a perspective view showing the fork driving unit of the fork unit of Fig. 5 , Fig. 9 is a main part plan view of the fork driving part of Fig. 8, and Figs. 10 to 12 are perspective views showing steps in which the tray is loaded on the individual shelves by the transport robot.

As shown in these drawings, the multitasking stocker system according to the embodiment of the present invention is characterized in that a plurality of individual shelves 3, in which two or more different kinds of goods are stored individually, And a fork unit (6) for handling the goods, and a cabinet (1) having an input / output port (2) for inputting / outputting the input / output port (2) And a transfer robot 5 for transferring the products while moving.

The cabinet 1 has a substantially rectangular container shape, as shown in Fig. On the lower surface of the cabinet 1, a plurality of foot members 7 for supporting the cabinet 1 with respect to the ground are provided. The plurality of foot members 7 serve to support the cabinet 1 against the ground. These foot members 7 may further include means for adjusting the height of the cabinet 1 relative to the ground. In addition, the foot members 7 may be further equipped with vibration damping means or the like for preventing vibration from being formed in the cabinet 1.

The volume of the cabinet 1 can be appropriately designed corresponding to the number of the goods to be loaded therein. 1, the cabinet 1 is shown as a frame, but actually the side surfaces of the cabinet 1 are made of transparent or semi-transparent glass or plastic material so that the operator can observe the inside of the cabinet 1 It can also be done.

The input / output port 2 is provided at one side of the cabinet 1 to allow the goods to be transferred into / out of the cabinet 1. In the case of the present embodiment, the goods can be individually delivered individually and manually through the input / output port 2. However, since the scope of the present invention is not limited thereto, a plurality of goods can be delivered and received at a time through the I / O port 2. Although not shown in the drawing, Or a method of providing a loading section capable of loading a plurality of logistics products in the input / output port 2.

The operation module 4 for controlling the operation of the input / output port 2 and the transfer robot 5 is provided around the input / output port 2 in connection with the input / output of the products. As shown in FIG. 1, the operation module 4 may include a monitor and a plurality of buttons. The operator can input and output the goods through a plurality of buttons. For example, among the plurality of buttons, there may be provided a goods receipt button for goods receipt of the goods and a goods issue button for goods goods delivery. The operator presses the button to control the operations of the goods receipt port 2 and the transfer robot 5 So that it is possible to easily deliver and receive the corresponding article from the individual shelf 3 to the corresponding position or from the individual shelf 3. For reference, the operation module 4 may be implemented by a remote controller capable of remote control.

2 to 5, a plurality of individual shelves 3 provided in the multitasking stocker system according to the present embodiment are vertically long inside the cabinet 1 And are provided on both sides of the cabinet 1 with the transfer robot 5 interposed therebetween in the cabinet 1.

That is, as can be seen from FIG. 2, on the both side surfaces of the cabinet 1 with respect to the X-axis direction of FIG. 1, a plurality of individual shelves 3 are provided like a bookcase. When a plurality of individual shelves 3 are provided on both sides of the cabinet 1, there is an advantage that more and more goods can be stored in a limited space. However, since the scope of the present invention is not limited thereto, the individual shelves 3 may be provided only on one side of the cabinet 1.

4 and 5, each of the plurality of individual shelves 3 has one side corresponding to the shape of the fork portion 30 of the fork unit 6 of the transfer robot 5 according to the present embodiment (1) according to the present invention comprises a shelf body (3a) having at least one forking part (F) cut out and formed on the upper surface of a shelf body (3a) And seat guide portions 3b to 3e for guiding at least one of them to be seated while being aligned at other positions.

The shelf body 3a is a place where the goods are stacked and stored and the forking portion F of the shelf body 3a is provided with a plurality of forks of the transfer robot 5 for loading the goods on the shelf body 3a, Is a space in which the part (30) goes into and out of the shelf body (3a). The fork portion F of the shelf body 3a may be formed to be somewhat larger than the fork portion 30 in order to allow a space in the access space of the fork portion 30 . For reference, the shelf body 3a can be mass-produced by a die casting method.

In the present embodiment, the forking portions F are provided on the shelf body 3a in such a manner as to be spaced equidistantly from each other. 6 and 7, the fork unit 6 of the transfer robot 5 of the present embodiment includes two fork portions 30, which are constituted by a first fork portion 31 and a second fork portion 32, And the two fork portions 30 selectively enter the three fork portions F of the shelf body 3a. That is, in order to stack the cassette M1, which is one of the different kinds of goods in the present embodiment, on the individual shelf 3, both of the forks 30 are used, and the two forks 30, The cassette M1 is placed on the individual shelf 3 while simultaneously entering and exiting the two forking portions F provided on both sides of the body 3a. In order to load the tray M2 or the magazine M3 onto the individual shelf 3, only one first fork 31 is used. Specifically, in the case of the tray M2, The tray M2 is placed on the individual shelf 3 while individually moving in and out of the two forking portions F provided on both sides of the body 3a and in the case of the magazine M3 the first fork portion 31 The magazine M3 is placed on the individual shelf 3 while individually moving in and out of each of the three forking portions F. [

The seat guide portions 3b to 3e allow the goods to be stably mounted on the individual shelves 3 when the goods are lifted by the fork portions 30 on the individual shelves 3, (3) to guide the corresponding position where the other logistics products are aligned.

The seat guide sections 3b to 3e are provided so as to correspond to the widths of one kind of the goods to be previously specified so that any one kind of goods to be specified is aligned on the upper surface of the shelf body 3a adjacent to both sides of the forking section F A plurality of seating guide bars 3b spaced apart from each other on both sides of the forking portions F by a distance, And a plurality of seating pads 3d spaced apart from the body 3a.

More specifically, in the present embodiment, four seating guide bars 3b are provided on the shelf body 3a so as to be alternately arranged with the three forking portions F at intervals of the width of the magazine M3. Accordingly, a total of three magazines (M3) having the smallest size among the products of the present embodiment can be disposed adjacent to each other between the two seating guide bars 3b.

In this embodiment, the plurality of seating pads 3c and 3d are respectively disposed in the outer corner areas of the shelf body 3a so that the cassette M1 having the largest size among the warehouses of the present embodiment can be seated Four common pads 3c and a dedicated pad 3d disposed adjacent to both sides of the forking portion F provided at the center of the shelf body 3a so that the tray M2 can be seated. Here, the cassette M1 can be seated only on the common pad 3c, and the tray M2 is supported by a pair of common pads 3c forming a square configuration and a pair of dedicated pads 3d . Accordingly, one cassette M1 can be loaded for each of the individual shelves 3, and two trays M2 can be loaded.

Each of the individual shelves 3 may further include a seat presence / absence sensor (not shown) for sensing whether or not the articles are seated. The seating sensor can be applied as a contact or non-contact sensor. In the latter case, it may be, for example, a proximity sensor or a laser sensor. In this way, when the seat shelf 3 is provided with the seat presence sensor, it is advantageous in that the quantity of the goods stored or stored in the cabinet 1 can be easily grasped. However, it is not always necessary to provide a sensor for detecting whether or not the individual shelves 3 are seated.

Hereinafter, the transfer robot 5 will be described with reference to Figs. 2 to 3 and Figs. 6 to 12. Fig. The goods are moved between the input / output port 2 and the plurality of individual shelves 3 while moving the goods between the input / output port 2 and the plurality of individual shelves 3, The transfer robot 5 for transferring the transfer robot 5 to the transfer robot 3 is provided in the central region of the cabinet 1 as shown in Fig.

The transfer robot 5 provided in the central area of the cabinet 1 is moved in the central area of the cabinet 1 in the X axis, Y axis and Z axis in Fig. 1, To and from the warehouse.

This transfer robot 5 is provided with a fork unit 6 for supporting the lower surface of the product substantially and a traveling unit 10 for driving the fork unit 6 in the cabinet 1 in the X- And a lifting / lowering unit 20 for lifting and lowering the fork unit 6 in the cabinet 1 in the Z-axis direction of Fig. 1.

In this embodiment, although both the traveling unit 10 and the ascending / descending unit 20 are schematically shown in the drawings, they can be applied to a linear motor which is linearly movable and can be easily controlled in position. However, even if it is not a linear motor, for example, the driving unit 10 may be replaced by a combination structure of a motor and a ball screw, and the up-down unit 20 may be replaced with an up-down cylinder.

The fork unit 6 is provided with a plurality of forks 30 for supporting at least one of the plurality of selected products based on the kind of the goods and a plurality of forks 30, A fork main body 70 provided with a plurality of forks 30 movable relative to the main body of the transfer robot 5 so as to be movable relative to each other, And a fork driver 40 that drives the plurality of fork parts 30 so as to be movable relative to the fork main body 70.

In this embodiment, the plurality of fork portions 30 include a first fork portion 31 for handling any one of the goods, and a first fork portion 31 for handling predetermined pre- And a second fork portion 32 cooperating therewith.

The fork portion 30 has a plate surface that is intermittently narrowed in width at predetermined intervals along the longitudinal direction so as to effectively support mutually different kinds of goods with the plate bodies supporting and holding the lower surface of the goods substantially . However, the scope of the present invention is not limited to these embodiments. Unlike the present embodiment, the fork portion 30 may have a simple cantilever shape or a polygonal shape.

The first fork portion 31 is connected to the fork driving portion 40 so as to be slidable with respect to the fork body 70. The second fork portion 32 is connected to the first fork portion 31, And is selectively connected to the first fork portion 31 to be moved in conjunction with the movement of the first fork portion 31 in order to handle a predetermined distribution product among the goods.

The fork connection portion 60 takes charge of connection or disconnection between the first fork portion 31 and the second fork portion 32. [ The fork connection portion 60 according to the present embodiment includes a connection bracket 61 which is coupled to one side of the first fork portion 31 and has a through hole 61a formed on the side of the first side surface of the second fork portion 32, And a connecting shaft 63 which is coupled to the through hole 61a of the connecting bracket 61 and is driven toward or away from the through hole 61a of the connecting bracket 61 to be inserted or released into the through hole 61a of the connecting bracket 61, (62).

For example, when transferring the tray M2 or the magazine M3 among the products according to the present embodiment to the inside or outside of the individual shelf 3, only the first fork 31 is used, and the tray M2 Both the first fork portion 31 and the second fork portion 32 are used when conveying the cassette M1 having a relatively large width as compared with the magazine M3. For this purpose, when the cassette M1 is fed, the fork connecting actuator 62 is operated to insert the connecting shaft 63 into the through hole 61a of the connecting bracket 61 provided in the first fork portion 31 The first fork portion 31 and the second fork portion 32 can be driven together while the connecting shaft 63 is separated from the connecting bracket 61 when the tray M2 or the magazine M3 is fed. So that only the first fork portion 31 can be driven by actuating the fork portion connecting actuator 62 to operate.

 The clamping portion 50 according to the present embodiment is provided with a pressing plate 51 for pressing the upper surface of the corresponding product to the fork portion 30 from the top downward and a pressing plate 51 provided on the first fork portion 31, And a flange portion P provided with a square flange portion P on the upper surface of the products, and a flange portion P of the cassette M1, A chucking plate 53 provided on the second fork portion 32 and adapted to move the chucking plate 53 toward or away from the flange portion P of the cassette M1, And includes an actuator 54. A pneumatic cylinder can be applied to the pressurizing actuator 52 and the flange chucking actuator 54.

The pressing plate 51 serves to fix all the products to the upper surface of the first and second fork portions 32. The chucking plate 53 serves to fix the cassette M1 having the largest size among the products 1 and the upper surface of the second fork portion 32, respectively. However, the scope of the present invention is not limited thereto. Since the shape of the cassette M1 is not limited to this embodiment, the flange portion P may not be provided on the upper surface of the cassette M1. In this case, the second fork portion 32 The pressure plate 51 may be further provided in place of the chucking plate 53. [

The fork main body 70 includes a body 71 coupled to the lifting unit 20 of the transfer robot 5, a base plate 72 provided to be rotatable relative to the body 71, A guide rail 74 provided on the base plate 72 for guiding the second fork portion 32 to linearly guide the second fork portion 32 and a guide rail 74 provided on one side of the base plate 72 to prevent movement of the second fork portion 32 And an insertion hole 75a into which the connection shaft 63 of the fork connection portion 60 is inserted is formed on the plate surface.

In this embodiment, the base plate 72 is a 'c' shaped plate member protruding in a direction in which the first fork portion 31 and the second fork portion 32 are slidably moved. On the upper surface of the base plate 72, The first fork portion 31, the second fork portion 32, the fork driving portion 40, the guide rail 74 and the fixing bracket 75 are provided. The base plate 72 is coupled to a rotary disk 73 rotatably coupled to the body 71 of the fork body 70 in the forward and reverse directions. The fork portion 30 can rotate in the forward and reverse directions between the plurality of individual shelves 3 provided on both sides of the cabinet 1 together with the base plate 72. [

The guide rail 74 guides the linear motion of the second fork portion 32 so that the second fork portion 32 is connected to the first fork portion 31 and can be moved into and out of the base plate 72 together. Specifically, the second fork portion 32 according to the present embodiment is coupled to the upper surface of the carriage block 33, which is slidably coupled along the guide rail 74. The rear end of the second fork portion 32 is connected to the first fork portion 31 and the second fork portion 32 is connected to the first fork portion 31. [ As shown in FIG.

In other words, when the transfer robot 5 transfers the tray M2 or the magazine M3, the second fork portion 32 is moved to the left side of the base plate 72 And is fixed by a fixing bracket 75 provided on one side surface. 5, the connection shaft 63 of the fork part connecting actuator 62 is connected to the insertion hole 75a of the fixing bracket 75 and is fixed to the base plate 72, 1, the flow of the second fork portion 32 can be prevented even if it moves in the X-axis and Y-axis directions. A double acting double rod type cylinder can be applied to the fork portion connecting actuator 62 so that the connecting shaft 63 can be connected to both the connecting bracket 61 and the fixing bracket 75. [

6 and 7, the fork driver 40 includes a ball screw shaft 42 disposed along the X-axis direction of FIG. 6, in which the first fork portion 31 is moved, The slider 43 is coupled to the first fork portion 31 and the other end is coupled to the ball screw shaft 42 to be moved along the X-axis direction in FIG. 6, a driving force for rotating the ball screw shaft 42 in the forward / And a driving motor 44 for providing the driving force.

The ball screw shaft 42 is a shaft on which the first fork portion 31 is moved. A drive motor 44 for rotating the ball screw shaft 42 is connected to one side of the ball screw shaft 42. In this embodiment, the ball screw shaft 42 is provided inside the shaft housing 41 which forms the outer appearance of the slider 43 along the ball screw shaft 42, and one side of the shaft housing 41 And is coupled to a power transmission box 45c to be described later.

The slider 43 is a structure that is coupled to the ball screw shaft 42 and moves along the X-axis direction of FIG. 6, and moves along the ball screw shaft 42 in the + X- Or in the -X-axis direction. The first fork portion 31 can be coupled to the upper portion of the slider 43 and moved in and out of the base plate 72.

In this embodiment, the drive motor 44 and the ball screw shaft 42 are disposed adjacent to the base plate 72 to increase the space utilization of the base plate 72 (see FIG. 4). The fork driving unit 40 further includes a power transmitting portion 45 for transmitting the driving force of the driving motor 44 to the ball screw shaft 42 between the driving motor 44 and the ball screw shaft 42 do.

The power transmission unit 45 includes a power transmission box 45c that forms an outer appearance and a pair of power transmission boxes 45c provided inside the power transmission box 45c and coupled to the rotation shaft of the drive motor 44 and the ball screw shaft 42, A pulley 45a and a power transmission belt 45b connected to the pair of pulleys 45a. The pair of pulleys 45a are equally spaced along the circumferential direction and the power transmission belt 45b is provided with a timing belt having grooves of the same interval on the inside so as to exactly fit the grooves of the pulley 45a ) May be applied. It is needless to say that the scope of the present invention is not limited to these matters, and the drive transmission unit 45 may be omitted and the drive motor 44 may be directly connected to the ball screw shaft 42. In addition, unlike the present embodiment, the fork driver 40 may be a pneumatic or hydraulic cylinder type or a drive motor 44 and a rack and pinion type.

The following is a brief description of the I / O process of the logistics product with such a configuration.

First, any one of the goods is inserted through the input / output port 2 and the input button of the operation module 4 is pressed.

Then, the transfer robot 5 mounted in the cabinet 1 moves along the X-axis, the Y-axis and the Z-axis in Fig. 1 due to the operation of the driving unit 10, the ascending / descending unit 20, and the fork unit 6 After the movement, the fork portion 30 of the fork unit 6 is supported so as to support the lower surface of the product. At this time, the first fork portion 31 or the first fork portion 31 and the second fork portion 32 can be selectively operated based on the kind of the goods to be received.

Then, the transfer robot 5 moves in the X-axis, the Y-axis and the Z-axis to the individual shelves 3 at positions corresponding to the kind of the goods, and the goods are loaded on the corresponding individual shelves 3, The automatic loading operation is completed.

In the case of the delivery work, information on the goods to be delivered is input to the operation module 4 and the delivery button is pressed. Then, the transfer robot 5 moves in the X-axis, the Y-axis, and the Z-axis in Fig. 1 with the reverse operation of the above-described stocking operation to take out the corresponding products from the individual shelves 3 and deliver them through the input / output ports 2 do.

As described above, according to the present embodiment, two or more mutually different logistics products such as the cassette M1, the tray M2, and the magazine M3 can be stacked and stored, thereby effectively rationalizing the logistics between semiconductor product production processes .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

1: Cabinet 2: I / O port
3: Individual shelf 4: Operation module
5: transfer robot 6: fork unit
7: Foot member 10: Travel unit
20: up / down unit 30: fork part
31: first fork portion 32: second fork portion
40: fork driving part 41: shaft housing
42: Ball screw shaft 43: Slider
44: drive motor 45: power transmission part
45a: Pulley 45b: Power transmission belt
45c: Power transmission box 50: Clamping part
51: pressure plate 52: actuator for pressurizing the product
53: chucking plate 54: flange chucking actuator
60: fork connection part 61: connection bracket
62: actuator for connecting the fork part 70:
71: body 72: base plate
73: rotating disk 74: guide rail
75: Fixed bracket

Claims (17)

A cabinet in which a plurality of individual shelves capable of storing two or more mutually different kinds of goods are individually stacked and stored, and an input / output port for input / output of the goods is formed on one side; And
And a transfer robot for transferring the products, while moving between the input / output ports and the individual shelves, the transfer robot including a fork unit for handling the products,
The fork unit includes:
And a plurality of fork portions for supporting the goods,
At least one fork portion selected from among the plurality of fork portions based on the kind of the goods to be supported supports the goods,
Wherein the plurality of fork portions comprise:
A first fork part for handling any one of the above-mentioned products; And
And a second fork portion connected to the first fork portion and interlocked with the first fork portion when the first fork portion is handled, system. delete The method according to claim 1,
The fork unit includes:
A fork main body coupled to the main body of the transfer robot so as to be able to move up and down, and the plurality of forks being movable relative to each other; And
Further comprising a fork driver for driving the plurality of forks to be movable relative to the fork main body. The method of claim 3,
The fork unit includes:
Further comprising a clamping unit which is provided at one side of the plurality of forks and clamps the products supported by the forks. The method of claim 3,
Wherein the first fork portion is connected to the fork driving portion and is slidably movable with respect to the fork body,
The second fork portion is connected to or disconnected from the first fork portion. The second fork portion is selectively connected to the first fork portion for handling a predetermined one of the goods, And is slidably moved in an interlocking manner. 6. The method of claim 5,
The fork unit includes:
Further comprising a fork connection portion connecting or disconnecting the first fork portion and the second fork portion,
The fork-
A connecting bracket coupled to one side of the first fork portion and having a through hole formed in the plate surface; And
And a connecting shaft provided on one side of the second fork portion and driven toward or away from the connecting bracket so as to be inserted into or released from the through hole of the connecting bracket. A multitasking stocker system. 5. The method of claim 4,
The clamping unit
A pressing plate which presses the upper surface of the above-mentioned products upward and downward; And
And an actuator for pressurizing the product for moving the presser plate up and down. 8. The method of claim 7,
The clamping unit
A chucking plate for clamping the flange portion of the product with a rectangular flange portion on an upper surface thereof and fixing the flange portion to the fork portion; And
Further comprising a flange chucking actuator for moving the chucking plate toward or away from the flange portion. The method of claim 3,
The fork driving unit includes:
A ball screw shaft disposed along the X axis direction which is the direction in which the fork portion is moved;
A slider having one side coupled to the fork portion and the other side coupled to the ball screw shaft and moving along the X axis direction; And
And a drive motor for providing a driving force for rotating the ball screw shaft. 10. The method of claim 9,
Wherein the ball screw shaft and the drive motor are disposed adjacent to each other,
The fork driving unit includes:
And a power transmitting portion for transmitting the driving force of the driving motor to the ball screw shaft,
The power transmission unit includes:
A pair of pulleys coupled to the rotation shaft of the driving motor and the ball screw shaft, respectively; And
And a power transmission belt connected to the pair of pulleys. The method according to claim 6,
The fork main body includes:
A body coupled to the body of the transfer robot;
A base plate provided to be rotatable relative to the body; And
And a guide rail provided on the base plate and guiding the second fork portion in a linear movementable manner. 12. The method of claim 11,
The fork main body includes:
Further comprising a fixing bracket provided on one side of the base plate and having an insertion hole for receiving a connection shaft of the fork connection portion formed on a plate surface so as to prevent movement of the second fork portion. The method according to claim 1,
The fork portion
And a plate surface whose width is intermittently narrowed at predetermined intervals along the longitudinal direction. The method according to claim 1,
The different types of goods,
Characterized in that it is a cassette, a tray and a magazine for transporting semiconductor components. The method according to claim 1,
Each of the plurality of individual shelves comprising:
A shelf body having at least one fork formed by cutting one side corresponding to the shape of the fork;
And a seating guide unit provided on an upper surface of the shelf body and guiding the living products to be seated while aligning at least one or more at different positions on the shelf body based on the kind of the warehouses. Stocker system. 16. The method of claim 15,
The seating guide portion
A predetermined number of the above-mentioned kinds of the above-mentioned goods products are spaced apart from each other on both sides of the forking parts by a distance corresponding to the width of one kind of the above-mentioned goods to be arranged on the upper surface of the shelf body adjacent to both sides of the above- A seating guide bar; And
And a plurality of seating pads spaced apart from the shelf body in a rectangular configuration with the forked portion interposed therebetween to support the lower end corner areas of other kinds of the previously-designated distribution products, respectively. 17. The method of claim 16,
Wherein the forking portion is formed in three parallel to the shelf body at regular intervals,
Wherein the plurality of seating pads comprise:
A plurality of common pads respectively disposed in corner areas of the shelf body; And
And a plurality of dedicated pads disposed adjacent to both sides of the forking portion formed at the center of the shelf body among the three forking portions.

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