KR20230018123A - Workpiece stored and released equipment - Google Patents

Abstract

In accordance with the present invention, disclosed is a workpiece input/output device capable of preventing damage to a stacked workpiece when a workpiece is loaded and unloaded. The workpiece input/output device of the present invention comprises a plurality of trays, a storage silo, and a tray handler. The trays carry and store workpieces mounted thereon. The storage silo includes a storage in which the trays can be stacked and stored, a pair of support racks mounted on both inner walls of the storage at a distance apart from each other so as to support both edges of the lowermost tray of the trays stacked in the storage, and a tray inlet connected to the bottom of the storage so as to unload and load the trays one by one. The tray handler is disposed adjacent to the storage silo, and includes an end effector performing a translation motion along X, Y, and Z-axis directions so as to unload the lowermost tray as well as load another tray between the lowermost tray and the pair of support racks. When unloading the lowermost tray, the tray handler enables the end effector to lift one side part of the second lowermost tray of the trays up from the support racks to support the second tray diagonally on the support racks, drops the end effector to support the second tray horizontally on the support racks, and then, ejects the end effector through the tray inlet. According to the present invention, the workpiece input/output device mounts the workpiece on a tray to automatically load and unload the workpiece into the storage silo due to the operation of the tray handler, thereby making efficient the input/output of the workpiece.

Description

Workpiece storage device {WORKPIECE STORED AND RELEASED EQUIPMENT}

The present invention relates to storage and retrieval technology, and more particularly, to a workpiece loading and unloading device capable of preventing damage to stacked workpieces during loading and unloading of workpieces.

The workpiece loading and unloading device is a device capable of storing and shipping various workpieces into a storage facility, and is also called a workpiece storage device, a stocker, a stacker, and the like. Workpieces that require precise measurement and inspection need to automate loading and unloading of workpieces to minimize physical contact with a rater and peripheral devices that affect measurement values. In addition, the workpiece is mounted on a tray, cassette, carrier, or the like for ease of transportation, storage, and handling.

As an example of a workpiece loading and unloading device, Korea Patent Registration No. 10-1246851 'stacker robot' is configured to load a cassette for storing substrates onto a shelf of a stocker or unload from the shelf. Both ends of the cassette placed on the shelf are supported by the lower plate, so that a part of the lower surface is exposed. An arm of the stacker robot is configured to load or unload the cassette while supporting the lower surface of the cassette by entering through the gap between the lower plates.

As another example of a workpiece loading and unloading device, Korean Patent Publication No. 10-2021-0071933 'Stacker of electronic component test handler and electronic component test handler including the same' is a frame, an upper stacker equipped with a stacker module, and a user tray. It is composed of a lower stacker having a first loading part. The stacker module includes a second loading unit capable of loading user trays. The second loading unit is configured to exchange user trays with the first loading unit in a closed position. The upper stacker is provided with a transfer configured to grip the user tray and transfer it in vertical and horizontal directions. Accordingly, the position of the user tray between the first and second loading units can be moved. The contents disclosed in the above patent documents are incorporated herein by reference.

The above-described workpiece loading and unloading apparatus has a problem in that it is difficult to apply to sequentially loading and unloading workpieces one by one in a state in which the workpieces are stacked and stored. That is, in order to load and unload one of the stacked workpieces, the workpiece must be loaded and unloaded from the top or bottom. In the case of loading and unloading workpieces from the top of the storage, there is a problem in that workability is deteriorated because the working distance of a workpiece handle, a transfer, a robot, or the like increases from the top to the bottom. In particular, when the space for entering the end-effector into the storage is not secured due to the narrow storage, the workpiece must be lifted by a separate lifting apparatus, so the configuration of the storage and retrieval device becomes complicated. However, there is a problem that equipment cost and operating cost increase.

Meanwhile, when workpieces are loaded and unloaded from the bottom of the storage, there is a problem in that the second workpiece is impacted and damaged while falling into an empty space generated during loading and unloading of the bottom workpiece. Therefore, there is a need for a technique capable of preventing damage to the workpieces when loading and unloading the stacked workpieces one by one from the lower side of the storage.

The present invention is to solve the various problems of the above workpiece storage and output device, and an object of the present invention is to mount the workpiece on a tray and operate a tray handler to store a storage silo. ), to provide a new workpiece loading and unloading device capable of efficiently loading and unloading workpieces.

Another object of the present invention is to provide a new workpiece loading and unloading device capable of preventing damage to workpieces and trays during tray loading and unloading.

According to one aspect of the present invention, a workpiece loading and unloading device is provided. A workpiece loading and unloading device according to the present invention includes a plurality of trays for loading, transporting and storing workpieces; A storage compartment capable of stacking and storing a plurality of trays, and a pair of support racks installed parallel to each other and spaced apart from each other on both inner walls of the storage storage to support both edges of the bottom tray among the plurality of trays stacked in the storage , a storage silo having a tray entrance connected to the bottom of the storage so that a plurality of trays can be unloaded and loaded one by one; It is arranged adjacent to the storage silo and is translated along the X-axis, Y-axis, and Z-axis directions to unload the bottom tray and load another tray between the bottom tray and a pair of support racks. Includes a tray handler with an end effector that moves. When the bottom tray is unloaded, the tray handler lifts one part of the second tray from the bottom of the plurality of trays from the pair of support racks by the end effector, supports the second tray at an angle to the pair of support racks, and It is configured to lower the effector, horizontally support the second tray on a pair of support racks, and then withdraw the end effector through the tray entrance.

In addition, in the workpiece input/output device according to the present invention, when loading another tray, the tray handler lifts one part of the bottom tray from the pair of support racks by the end effector to support the pair of bottom trays. Support the rack obliquely, move the end effector forward, support the bottom tray on the upper surface of another tray, support the other tray on a pair of support racks, lower the end effector, and pass through the tray entrance. It is structured to let go.

The workpiece loading and unloading apparatus according to the present invention loads workpieces on trays, stacks and stores them in storage silos, and handles the trays one by one by the operation of the tray handler to automatically load and unload the workpieces. There is an effect that can be implemented efficiently. In addition, there is an effect of preventing damage and disturbance due to impact of the trays during loading and unloading of the trays on which the workpieces are mounted in each of the storage bins.

1 is a front view showing a workpiece loading and unloading device according to the present invention.
2 is a cross-sectional view showing a partially cut away constant temperature and humidity chamber in the workpiece loading and unloading device according to the present invention.
3 is a perspective view showing a filter, a tray, and an end effector in the workpiece loading and unloading device according to the present invention.
4 is a cross-sectional view showing a storage silo partially cut away in the workpiece loading and unloading device according to the present invention.
FIG. 5 is a cross-sectional view along line V-V of FIG. 4 .
6 is a perspective view showing a weight tray and an end effector in the workpiece loading and unloading device according to the present invention.
7 is a front view showing a micro scale and an electromagnetic shielding structure in the workpiece loading and unloading device according to the present invention.
8 is a perspective view showing an electromagnetic shielding structure in the workpiece loading and unloading device according to the present invention.
9 is a perspective view showing a tray handler in the workpiece loading and unloading device according to the present invention.
10 is a perspective view showing a filter, a tray, an electromagnetic shielding structure, and an end effector in the workpiece loading and unloading device according to the present invention.
11 is a cross-sectional view showing a partially cut away thermo-hygrostat main body in the workpiece loading and unloading device according to the present invention.
12 is a block diagram shown to explain the control of the workpiece loading and unloading device according to the present invention.
13 is a view to explain the unloading of the tray in the workpiece loading and unloading device according to the present invention.
14 is a view to explain the loading of the tray in the workpiece loading and unloading device according to the present invention.
15 is a view to explain the loading of the filter in the workpiece loading and unloading device according to the present invention.

Other objects, particular advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments taken in conjunction with the accompanying drawings. In describing the present invention, the size or shape of components shown in the drawings may be exaggerated or simplified for clarity and convenience of explanation. In addition, terms specifically defined in consideration of the configuration and operation of the present invention may vary according to the intentions or customs of users and operators. These terms should be interpreted as meanings and concepts corresponding to the technical spirit of the present invention based on the contents throughout this specification.

Hereinafter, preferred embodiments of the workpiece loading and unloading device according to the present invention will be described in detail based on the accompanying drawings.

First, referring to FIGS. 1 to 3 , the workpiece loading and unloading apparatus 10 according to the present invention includes a plurality of trays 30 (30: 30-1, 30-2, ..., 30-n, 30-n + 1). The workpiece 20 may be, for example, a filter 21 before or after collecting fine dust.

On the other hand, in the Gravimetric measuring method or Gravimetric method, which is one of the methods of measuring or weighing fine dust, a sample of fine dust in the air is collected by a filter 21 using a sampler, A method of calculating the weight difference between the filter 21 before and after collection as mass concentration is used. The weighing unit of fine dust is ㎛/㎥, which is very light in weight, and the weighing value can vary greatly depending on the weighing conditions such as temperature, humidity, and static electricity. Therefore, in order to increase the accuracy and reliability of weighing, the weighing conditions must be kept constant according to the regulations, and considerable care is required in handling the filter.

As shown in FIG. 3 , the filter 21 is composed of a filter element 22 and a melted thin ring 23 surrounding the edge of the filter element 22 . The filter 21 may be made of a synthetic resin, for example, polytetrafluoroethylene (PTFE), and may have static electricity. In FIG. 3, the filter 21 is illustratively shown to be formed in a circular shape. In some embodiments, an identification number, a quick response code (QR code), a bar code, or the like may be displayed on one side of the filter element 21 for information management of the filter 21 .

Each of the trays 30 (30-1, 30-2, ..., 30-n, 30-n+1) or carrying trays is formed on the upper surface to accommodate the filter 21. It has a recess 31, a central hole 32 formed in the center of the recess 31, and an open hole 33 formed on the back side to be connected to the central hole 32. Filter 21 is accommodated in recess 31 . A pair of first supporting side wall surfaces 34 are formed perpendicularly to the rear surface of the tray 30 apart from both sides of the open hole 33 . Each of the first supporting side wall surfaces 34 is formed as a concave curved surface. The second support side wall surface 35 is formed as a plane on the front surface of the tray 30 so as to face the first support side wall surface 34 with each other.

Identification marks 36 and 37 are respectively marked on the upper and lower surfaces of each of the trays 30 . Each of the identification marks 36 and 37 may be used to identify and manage information of the filters 21 mounted on the trays 30 by inputting them into a computer device. Identification marks 36 and 37 may be composed of QR codes, barcodes, serial numbers, and the like. The information of the filter 21 may be the date of manufacture, before and after collection, the place and date of collection, the date and time of weighing, and the weight value of fine dust. In some embodiments, the identification mark may be displayed on only one side of the lower surface of each of the trays 30 .

1, 2, 4 and 5, in the workpiece loading and unloading device 10 according to the present invention, the filter 21 and the storage silo 40 are horizontal with respect to the X axis (width direction) and the X axis. It has a Y-axis (lengthwise direction), which is perpendicularly orthogonal to the X-axis, and a Z-axis (height direction) perpendicularly orthogonal to the Y-axis. The storage silo 40 is a cabinet (Cabinet: 42) in which a plurality of storage compartments 41 are formed along the width direction, and a cabinet (Hinge joint: 43) to open and close each of the storage compartments 41 (Hinge joint: 43). 42) has a plurality of doors 44 connected to the front. Each of the trays 30 is sequentially stacked vertically on each of the storage compartments 41 and stored. It is exemplarily illustrated that five storage bins 41 are arranged along the X-axis direction.

A tray entrance 45 for loading and unloading of each of the trays 30 is formed at the lower part of the rear surface of the cabinet 42 so as to be connected to each of the storage compartments 41 . A pair of support racks 46 are mounted parallel to each other and spaced apart from each other on both inner walls of each of the storage bins 41 so as to support both edges of the tray 30 at the bottom of the trays 30 . The bottom tray 30-1 is placed on the upper surface of the support racks 46 and is lifted from the bottom of each of the storage compartments 41.

A horizontal passage 47 is formed between the support racks 46 so as to be connected to the tray entrance 45 . The width W1 of each of the trays 30 is larger than the width W2 of the horizontal passage 47 so that each of the trays 30 can be supported on the upper surface of the support racks 46 . A vertical passage 48 is formed between the tray entrance 45 and the rear end of each of the support racks 46 so as to be connected to the horizontal passage 47. That is, each of the support racks 46 is arranged to be spaced apart from the rear inner surface of the storage compartment 41 to form a vertical passage 48 . An observation window 49 is formed on the front side of the door 44 so that the trays 30 stored in the storage 41 can be checked.

Referring to FIGS. 1, 2 and 6, the storage silo 40 further includes a weight storage 50 formed on one side of the storage 41 and the front side of the adjacent cabinet 42. The weight storage 50 has a plurality of racks 51 arranged in a vertical direction so as to store a plurality of weight trays 60 in a drawer manner. Each of the weight trays 60 is supported and stored on each of the racks 51 .

The outer shape of the weight trays 60 is similar to that of the trays 30 . Each of the weight trays 60 is formed on the back so as to be connected to a pair of grooves 61 formed on the upper surface, a center hole 62 formed between the grooves 61, and the center hole 62. It has an open hole 63 that is. A pair of first supporting side wall surfaces 64 are formed perpendicularly to the rear surface of the weight tray 60 away from both sides of the open hole 63. The second supporting side wall surface 65 is formed as a flat surface on the front surface of the tray 60 so as to face the first supporting side wall surface 64 . Identification marks 66 and 67 are respectively marked on the upper and lower surfaces of each of the weight trays 60, respectively. The width W4 of each of the weight trays 60 is larger than the width W2 of the horizontal passage 47 . Both portions of the weight 68 are accommodated in the grooves 61 and mounted on each of the plurality of weight trays 60.

Referring to FIGS. 1, 2, 7, 8 and 10, the workpiece loading and unloading device 10 according to the present invention includes a micro scale 70 disposed adjacent to a storage silo 40 and a tray An electromagnetic shielding structure 80 mounted on the micro balance 50 to weigh 30 is provided. The micro balance 70 has a support (Fulcrum: 71) protruding upward on the upper surface. The pedestal 71 is used to combine a measuring dish or the like on which a weighing object can be placed, and is connected to a weighing element 72 such as a load cell. The weighing value of the micro scale 70 is displayed on a display 73 or input to a computer device. In order to ensure accuracy and reliability of the weighing value of the filter 21, the weighing value of the micro balance 70 may be calibrated by weighing the weight 68.

As shown in FIG. 8, the electromagnetic shielding structure 80 is coupled to a pedestal 72 and placed over the microbalance 70, and absorbs and removes electric fields and static electricity. The electromagnetic shielding structure 80 includes a post 81, a conductive weighing pan 82, a conductive upper grid 83, a conductive lower grid 84, and a joint bar ( Joint bar: 85) is provided. Each of the post 81, the weighing pan 82, the upper and lower grids 83 and 84, and the joint bar 85 may be made of a conductive metal such as copper (Cu), aluminum (Al), or silver (Ag). can In addition, each of the post 81, the metering pan 82, the upper and lower grids 83 and 84, and the joint bar 85 is made of a material having excellent conductivity, such as gold ( Au).

A hole 81a is formed at the lower end of the post 81. The upper end of the pedestal 71 is fitted into the hole 81a so that the post 81 is erected vertically. The weighing pan 82 is coupled to the upper end of the post 81 and is formed as a circular plate to stably place the tray 30 thereon. Each of the upper and lower grids 83 and 84 is composed of circular edges 83a and 84a and wires 83b and 84b arranged in a lattice shape to be connected to the edges 83a and 84a.

It is horizontally coupled to the upper end of the middle post 81 of the weighing pan 82, and is formed as a circular plate. The filter 21 is placed on the upper surface of the weighing pan 82 and weighed by the micro balance 70. The measuring pan 92 is formed to pass through the central hole 32 of each of the trays 30 . Upper grids 83 are horizontally arranged at intervals above the weighing pan 82 so as to cover the top of the weighing pan 82 . Lower grids 84 are arranged horizontally at intervals below the weighing pan 82 so as to cover the lower portion of the weighing pan 82 . Each of the upper and lower grids 83 and 84 has a larger diameter than the diameter of the weighing pan 82 . The joint bar 85 is fixed to one side of each of the upper and lower grids 83 and 84 so as to connect the upper and lower grids 83 and 84 .

1 to 3 and 9, the workpiece loading and unloading device 10 according to the present invention loads each of the trays 30 one by one into storage 41 or stores 41. A tray handler 90 for unloading from each is provided. The tray handler 90 is disposed adjacent to the back of the storage silo 40 and the micro scale 70 .

The tray handler 90 includes an X-axis linear actuator 91 for translation motion along the X-axis and a Y-axis linear actuator 92 for translation motion along the Y-axis. It can consist of an X-Y-Z motorized linear stage with a Y-axis linear actuator (93) that translates along the Z-axis or an X-Y-Z motorized translation stage. there is. The X-axis linear actuator 91 is mounted between the storage silo 40 and the micro balance 70 along the X-axis direction. The Y-axis linear actuator 92 is mounted so that the X-axis translational motion can be performed by the operation of the X-axis linear actuator 91 . The Z-axis linear actuator 93 is mounted so as to be capable of Y-axis translational motion by the operation of the Y-axis linear actuator 92 .

Each of the X-axis, Y-axis, and Z-axis linear actuators (91, 92, 93) is a servo motor, lead screw, nut block, slider or carriage, and linear motion guide. (Linear motion guide) or a lead screw linear actuator having a guide rail. In addition, each of the X-axis, Y-axis, and Z-axis linear actuators 91, 92, and 93 includes a belt driven linear actuator, a rack and pinion actuator, a pneumatic cylinder, It may be composed of a solenoid actuator, a pneumatic rodless linear actuator, and the like. In some embodiments, the tray handler 90 is a 4-axis translation stage capable of rotating or tilting the tray 30 by a rotary actuator. stage) and a 4-axis robot.

The tray handler 90 moves in and out of the tray entrance 45 while moving in translation along the X-axis, Y-axis, and Z-axis directions by the operation of the X-axis, Y-axis, and Z-axis linear actuators 91, 92, and 93, respectively. It is equipped with an end-effector (94) capable of The end effector 94 is configured to mount and unload the tray 30 . The width W3 of the end effector 94 is smaller than the width W2 of the horizontal passage 47 shown in FIG. 5 . Thus, the end effector 94 is capable of Y-axis and Z-axis translation along the horizontal passageway 47 .

As shown in FIGS. 3 and 10, the end effector 94 includes an arm 95 connected to the Y-axis linear actuator 92 and an arm 95 to mount the tray 30. A pair of forks (Fork: 96) extending forward, and a pair of support protrusions (97) formed on the upper surface of each of the forks (96) so as to adjoin the front end of each of the forks (96) have Each of the support protrusions 97 supports each of the first support side wall surfaces 34 of the tray 30 placed on the upper surface of each of the forks 96 . Each of the support protrusions 97 protrudes higher than the tray 30 mounted on the upper surface of the end effector 94 . A middle hole 98 is formed in the middle between the forks 96. A supporting wall surface 99 is formed on the rear side of the center hole 98 and the front part of the adjacent arm 95 so as to support the second supporting side wall surface 35 . The tray 30 placed on the upper surface of the end effector 94 is stably disposed between the support protrusions 97 and the support wall 99 . As shown in FIG. 6, the tray handler 90, like the tray 30, mounts each of the weight trays 60 on the end effector 94 and operates to load the weights 68 onto the weighing pan 82. do.

1, 11, and 12, the workpiece loading and unloading device 10 according to the present invention includes a constant temperature and humidity chamber 100 for controlling the constant temperature and humidity around the storage silo 40 and the micro scale 70. provide more The constant temperature and humidity chamber 100 includes a constant temperature and humidity chamber 110, a constant temperature and humidity chamber main body 120 having a blowing chamber 121, a humidifier 130, a heater 140, and a chiller 150. ), a blower 160 and a control unit (Control unit: 170).

The constant temperature and humidity chamber 110 includes a weighing station 111 for weighing the filter 21 . Each of the storage silo 40 , the micro scale 70 , and the tray handler 90 is disposed in the constant temperature and humidity chamber 110 . The door 112 is mounted on the front surface of the constant temperature and humidity chamber 110 to open and close the constant temperature and humidity chamber 110 .

The constant temperature and humidity chamber main body 120 or cabinet is independently disposed adjacent to the constant temperature and humidity chamber 110, and is connected to the constant temperature and humidity chamber 110 to supply constant temperature and humidity air for controlling the constant temperature and humidity of the constant temperature and humidity chamber 110. It has a ventilation chamber 121 connected thereto. The door 122 is mounted on the front surface of the thermo-hygrostat main body 120 so that the thermo-hygrostat main body 120 can be opened and closed. An air supply duct 123 is connected between the constant temperature and humidity chamber 110 and the blowing chamber 121 to supply constant temperature and humidity air from the blowing chamber 121 to the constant temperature and humidity chamber 110 . An exhaust duct 124 is connected between the constant temperature and humidity chamber 110 and the blowing chamber 121 to exhaust constant temperature and humidity air from the constant temperature and humidity chamber 110 to the blowing chamber 121 .

As shown in FIGS. 1 and 11 , the humidifier 130 is mounted in the blowing chamber 121 so as to control the humidity of constant temperature and humidity air. The flow control valve 131 is connected to the humidifier 130 so as to control the amount of water supplied. The flow control valve 131 controls the humidification amount of the humidifier 130 by adjusting the amount of water supplied. The heater 140 is installed in the blowing chamber 121 so as to control the temperature of constant temperature and humidity air.

The cooler 150 is disposed adjacent to the thermo-hygrostat main body 120 to cool the constant-temperature and constant-humidity air. The cooler 150 may be configured as an air-cooled cooler having a cooling coil 151 for cooling the refrigerant. The cooler 150 has a cooling tank 152 disposed in the blowing chamber 121 to cool the constant temperature and humidity air in the blowing chamber 121 and the humidifier 130 by heat exchange. The cooling tank 152 is in close contact with the humidifier 130 and is connected to the cooling coil 151 by pipes 153 and 154 for supply and recovery of refrigerant. The blower 160 is disposed in the blowing chamber 121 to circulate constant temperature and humidity air between the constant temperature and humidity chamber 110 and the blowing chamber 121 through the supply and exhaust ducts 123 and 124 .

The control unit 170 is mounted on the thermo-hygrostat main body 120 to control the operation of each of the humidifier 130, the heater 140, the cooler 150, and the blower 160. The control unit 170 includes a controller 171, a control panel 172 for inputting commands for controlling the thermo-hygrostat 100, and a display 173. The controller 171 is mounted in the thermo-hygrostat main body 120 and may be configured as a proportional-integral-differential controller. Each of the control panel 172 and the display 173 is mounted on an upper front surface of the thermo-hygrostat main body 120 to be connected to the controller 171 .

A water level sensor 180 is mounted on the humidifier 130 to detect the level of water stored in the humidifier 130 . The water level sensor 180 detects the water level of the humidifier 130 and inputs it to the controller 171 . A temperature sensor 181 is mounted on the humidifier 130 to detect the temperature of water stored in the humidifier 130 . The temperature sensor 181 detects the temperature of water and inputs it to the controller 171 . The controller 171 controls the operation of the humidifier 130, the heater 140, and the cooler 150 according to the water level input from the water level sensor 180 and the water temperature input from the temperature sensor 181. A filter 183 is installed in the blowing chamber 121 to filter constant temperature and humidity air.

A surface plate 190 is further installed to support the constant temperature and humidity chamber 110 . The platen 190 maintains the constant temperature and humidity chamber 110 horizontally and prevents transmission of vibration, noise and shock, thereby improving the accuracy and reliability of weighing. The surface plate 190 may be composed of a stone surface plate. The surface plate 190 is mounted on a frame 192 that is free to move by a plurality of casters 191. In some embodiments, the base 190 may be supported by a plurality of isolators that prevent transmission of vibration and noise.

1, 2 and 12, the workpiece loading and unloading device 10 according to the present invention includes a reader 200 that reads identification marks 36 and 37, and information input from the reader 200 is programmed. It is provided with a computer device 210 that processes, manages, and stores by (Program). The reader 190 is disposed in the constant temperature and humidity chamber 110 between the storage silo 40 and the micro scale 70 to read the identification mark 37 formed on the lower surface of each of the trays 30. . The reader 190 reads the identification mark 37 of the tray 30 that is mounted on the end effector 94 of the tray handler 90 and transported between the storage silo 40 and the micro scale 70 . The reader 190 may be composed of a QR code or barcode reader and a camera. In some embodiments, the reader 190 may be disposed in the constant temperature and humidity chamber 110 to read the identification mark 36 formed on the upper surface of each of the trays 30 .

Micro balance 70 , tray handler 90 and reader 200 are each connected to computer device 210 . The computer device 210 processes, manages, and stores data input from the micro scale 70 and the reader 200 by means of a program, and controls the operation of the tray handler 90 . The computer device 210 includes a display 211 as an output device and a keyboard 212, a mouse, and the like as an input device. The computer device 210 stores and manages the information of the filter 21 in a database 213.

From now on, the operation of the workpiece loading and unloading device according to the present invention having such a configuration will be described.

Referring to FIGS. 2 and 12 , the humidity and temperature of constant-temperature and constant-humidity air in the blowing chamber 121 are controlled by each operation of the humidifier 130, heater 140, and cooler 150. The controller 171 controls the operation of each of the humidifier 130, the heater 140, and the cooler 150 according to the water level and the temperature of the water input from the water level sensor 180 and the temperature sensor 181, respectively, to obtain constant temperature and humidity air. Humidity and temperature are controlled by the dew point. The constant weight that sets the temperature and relative humidity, which represents the amount of water vapor present in the atmosphere as a ratio to the amount of saturated water vapor, can have the same relative humidity but different moisture content. That is, when the humidity and temperature of the constant-temperature and constant-humidity air are controlled by constant weight, the moisture content of the filter 21 is different, which can affect the weight value of fine dust. When the humidity and temperature of constant temperature and humidity air are controlled based on the dew point, the moisture content of the filter 21 is kept the same even when the temperature changes, so that accuracy and reliability of the weight value of fine dust can be guaranteed.

Meanwhile, the cooler 150 is disposed independently of the thermo-hygrostat main body 120 to reduce vibration of the thermo-hygrostat main body 120 . The thermo-hygrostat main body 120 is disposed independently of the thermo-hygrostat chamber 110 for weighing the filter 21 to reduce vibration of the thermo-hygrostat chamber 110 . In addition, the surface plate 190 prevents vibration and impact transmitted to the constant temperature and humidity chamber 110 . In this way, by preventing the vibration of the constant temperature and humidity chamber 110 in which the micro scale 70 for weighing the filter 21 is installed, accuracy and reliability of the weighing value of fine dust can be guaranteed.

Referring to FIGS. 3 to 5 , the filters 21 before and after collection of fine dust are accommodated in the recess 31 of the tray 30 and handled. Therefore, exposure and contact of the filter 21 during transportation and storage are minimized, thereby preventing damage. The tray 30 on which the filter 21 is mounted is stacked and stored in each of the storage compartments 41 . Among the trays 30, the bottom tray 30 is stably supported by each of the support racks 46.

10 and 13, each of the trays 30 stacked in each of the storage 41 of the storage silo 40 has an X-axis, Y-axis, and Z-axis linear actuators 91, 92, and 93, respectively. They are unloaded one by one by the operation of and transported to the weighing pan 82 side. When the bottom tray 30-1 is unloaded, the second tray 30-2 from the bottom stacked above the bottom tray 30-1 is unloaded while the bottom tray 30-1 is unloaded. As it descends into the space to be damaged by hitting the support racks 46, the rest of the trays 30 may be disturbed. In particular, damage to the filter 21 makes it impossible to guarantee the accuracy and reliability of weighing. Therefore, it is necessary to minimize the impact of the second tray 30 - 2 against the support racks 46 . In the workpiece loading and unloading apparatus 10 according to the present invention, the bottom tray 30-1 moves in a state where the second tray 30-2 is supported by the support racks 46 by the operation of the tray handler 90. It is possible to prevent damage to the trays 30 and the filter 21 by minimizing the impact by unloading.

An unloading operation of the bottom tray 30-1 by the operation of the tray handler 90 will be described in detail. As shown in (a) and (b) of FIG. 13, the end effector 94 is moved in Y-axis translation through the tray entrance 45 by the operation of the Y-axis linear actuator 92, and the horizontal passage 47 ) and is aligned at the bottom of the bottom tray 30-1. As shown in (c) of FIG. 13 , the end effector 94 is raised through the horizontal passage 47 by the operation of the Z-axis linear actuator 93 . As shown in FIGS. 3 and 13(d), when the end effector 94 is lifted, the tray 30-1 at the bottom extends between the support protrusions 97 of the end effector 94 and the support wall surface ( 99) is mounted between them. Each of the support protrusions 97 supports each of the first support side wall surfaces 34, and the support wall surface 99 supports the second support side wall surface 35 so that the bottom tray 30-1 is an end effector. Make sure not to deviate from the upper surface of (94).

Subsequently, as shown in (d) of FIG. 13 , when the bottom tray 30-1 is mounted on the end effector 94, the front part of the end effector 94 moves along the Y-axis linear actuator 92. By the operation of the back to the vertical passage (48). The end effector 94 is raised through the vertical passage 48 by the operation of the Z-axis linear actuator 93, and the support protrusions 97 move the rear part of the lower surface of the second tray 30-2 to the support rack 46. ) and place the second tray 30-2 at an angle. Accordingly, the front portion of the lower surface of the second tray 30-2 is supported by the support racks 46.

As shown in (e) of FIG. 13, in a state where the front part of the second tray 30-2 is supported by the support racks 46, the end effector 94 is a Z-axis linear actuator 93 ) is lowered through the vertical passage 48 by the operation, and the second tray 30-2 is horizontally supported by the support racks 46. As shown in (f) of FIG. 13, the end effector 94 is withdrawn from each of the storage compartments 41 through the tray entrance 45 by the operation of the Y-axis linear actuator 92.

In this way, when the bottom tray 30-1 is unloaded, the rear part of the lower surface of the second tray 30-2 is lifted and the front part of the lower surface is supported by the support racks 46, and the end effector 94 By lowering the rear part of the lower surface of the supported second tray 30-2 and stably supporting it on the support racks 46, the second tray 30-2 and the bottom tray 30-1 come out. It is possible to prevent the trays 30 and the filter 21 from being damaged by colliding with the support racks 46 while descending into the space generated while going, and preventing the stacked trays 30 from being disturbed.

Referring to FIGS. 3, 9, and 14, in the workpiece loading and unloading device 10 according to the present invention, the tray handler 90 is a storage 41 in which trays 30 are already stacked among storage 41 Another tray 30-n+1, that is, the tray on which fine dust has been weighed, is unloaded in the empty storage 41. The trays 30-n+1 are sequentially stacked from the bottom of the storage 41.

It is raised through the vertical passage 48 by the operation of the Z-axis linear actuator 93, and another tray 30-n + 1 is placed between the lower surface of the bottom tray 30-1 and the upper surface of the support racks 46. ) to explain the loading operation. As shown in (a) and (b) of FIG. 14, the end effector 94 on which the other tray 30-n+1 is mounted moves the tray by the operation of the Y-axis linear actuator 92. Through the entrance 45, it enters the vertical passage 48 so as to be aligned with the rear part of the bottom surface of the bottom tray 30-1. As shown in (c) of FIG. 14, the end effector 94 is raised through the vertical passage 48 by the operation of the Z-axis linear actuator 93, and the support protrusions 97 are on the bottom tray ( 30-1) is lifted from the support racks 46 to support the bottom tray 30-1 at an angle to the support racks 46.

Subsequently, as shown in (d) of FIG. 14, in a state where the bottom tray 30-1 is inclinedly supported by the support racks 46, the end effector 94 is a Y-axis linear actuator 92 ) is moved forward to support the bottom tray 30-1 on the upper surface of another tray 30-n + 1, and the other tray 30-n + 1 is supported by the support rack 46 ) are supported by As shown in (e) and (f) of FIG. 14, after the end effector 94 is lowered through the horizontal passage 47 by the operation of the Z-axis linear actuator 93, the Y-axis linear actuator ( 92), the tray exits through the entrance 45. In this way, when the other tray (30-n + 1) is loaded, the rear part of the lower surface of the lower tray (30-1) is lifted and the front part of the lower surface is supported by the support racks (46), and the lower tray ( 30-1) and the support racks 46 by loading and stacking another tray 30-n+1 between them, it is possible to prevent the stacked trays 30 from being disturbed.

9, 10, 12 and 15, a filter 21 for weighing fine dust is mounted, and the bottom tray 30-1 is stored in the storage 41 by the operation of the tray handler 90 From each of them is conveyed to the weighing pan 82. As shown in (a) and (b) of FIG. 15, each of the X-axis, Y-axis, and Z-axis linear actuators 91, 92, and 93 is formed through the center hole 32 of the bottom tray 30-1. Translate the end effector 94 along the X, Y, and Z axes to align with the top of the metering pan 82. As shown in (c) of FIG. 15, when the center hole 32 of the bottom tray 30-1 is aligned with the top of the weighing pan 82, the end effector 94 is a Z-axis linear actuator ( 93) to descend. As shown in (d) of FIG. 15 , when the end effector 94 descends, the metering pan 82 passes through the center hole 98 of the end effector 94 and the center hole of the bottom tray 30-1. It passes through (32) and supports the filter (21). When the filter 21 is placed on the weighing pan 82, the end effector 94 is free of the microbalance 70.

The micro balance 70 weighs the filter 21 and inputs it to the computer device 210. The computer device 210 calculates the weight concentration of the fine dust by calculating the weight of the filter 21 before and after collecting the fine dust. The filter 21 can be determined as an average value of weight values repeatedly weighed 3 to 4 times. When the filter 21 is weighed, each of the upper and lower grids 83 and 84 absorbs and removes an electric field generated when the purifier of the filter 21 and the tray handler 90 are operated. Therefore, since the lifting of the filter 21 from the weighing pan 82 due to the electric field and static electricity is prevented, the accuracy and reliability of the weighing value can be improved.

On the other hand, as shown in (c) of FIG. 15, when the weighing of the filter 21 is completed, the tray handler 90 removes the center hole 94 of the end effector 94 on which the empty tray 30 is mounted. ) to the underside of the weighing pan 82. When the end effector 94 is aligned with the lower side of the weighing pan 82, the ports 81 pass between the open holes 33 of the tray 30 and the forks 96 while passing the Y of the end effector 94. Allows for axial translational motion.

Subsequently, as shown in (b) of FIG. 15 , when the end effector 94 is raised by the operation of the Z-axis linear actuator 93 , the filter 21 is accommodated in the recess 31 . When the filter 21 is accommodated in the recess 31, the end effector 94 is released from the electromagnetic shielding structure 80 by the operation of the Y-axis linear actuator 92.

The embodiments described above are merely those of the preferred embodiments of the present invention, and the scope of the present invention is not limited to the described embodiments, and within the technical spirit and claims of the present invention, those skilled in the art Various changes, modifications or substitutions will be possible by, and it should be understood that such embodiments fall within the scope of the present invention.

10: Workpiece input/output device 20: Workpiece
30: tray 40: storage silo
41: storage 46: support rack
51: weight storage 60: weight tray
70: micro balance 80: electronic shielding structure
82 weighing pan 83 upper grid
84: lower grid 90: tray handler
94: end effector 100: thermo-hygrostat
110: constant temperature and humidity chamber 120: constant temperature and humidity chamber body
121: ventilation room 130: humidifier
140: heater 150: cooler
160: blower 170: control unit
200 reader 210 computer device

Claims (6)

a plurality of trays for carrying and storing workpieces;
A storage compartment in which the plurality of trays can be stacked and stored, and a pair mounted on both inner walls of the storage compartment parallel to each other and spaced apart from each other to support both edges of the bottom tray among the plurality of trays stacked in the storage compartment. A storage silo having a support rack and a tray entrance connected to the bottom of the storage so that the plurality of trays can be unloaded and loaded one by one;
Arranged adjacent to the storage silo, X-axis, Y-axis, and Z-axis to unload the bottom tray and load another tray between the bottom tray and the pair of support racks a tray handler having an end effector that translates along a direction;
When the bottom tray is unloaded, the tray handler lifts one part of the second tray from the bottom among the plurality of trays from the pair of support racks by the end effector to move the second tray to the pair of support racks. The workpiece loading and unloading device configured to support the rack obliquely, lower the end effector to horizontally support the second tray to the pair of support racks, and then withdraw the end effector through the tray entrance. According to claim 1,
When the other tray is loaded, the tray handler lifts one part of the bottom tray from the pair of support racks by the end effector and tilts the bottom tray to the pair of support racks, The end effector is advanced to support the bottom tray on the upper surface of the other tray, the other tray is supported on the pair of support racks, and the end effector is lowered, and then the tray entrance is opened. A workpiece input/output device configured to be ejected through a workpiece. According to claim 1,
The storage siler connects a horizontal passage formed between the pair of support racks and the storage and the horizontal passage so that the end effector can move in Y-axis and Z-axis translation, so that the end effector moves in Z-axis translation. Workpiece loading and unloading device having a vertical passage formed between the tray entrance and the rear end of each of the pair of support racks. According to any one of claims 1 to 3,
Each of the plurality of trays has a recess formed on an upper surface to accommodate the workpiece, a central hole formed in the center of the recess, and an open hole formed on the rear surface to be connected to the central hole; A pair of first supporting side wall surfaces formed vertically on the rear surface away from both sides of the open hole and a second supporting side wall surface formed on the front surface;
The end effector includes an arm, a pair of forks extending in front of the arm to mount the bottom tray, and an upper surface of each of the pair of forks so as to adjoin the front end of each of the pair of forks. a pair of support protrusions formed on the pair of support protrusions for supporting the pair of first support sidewall surfaces, a center hole formed between the pair of forks, and the end effector to support the second support sidewall surfaces. A workpiece loading and unloading device having a support side wall formed on the rear side of the center hole and the front side of the adjacent arm. According to claim 4,
a constant temperature and humidity chamber accommodating the storage silo and the tray handler;
It is disposed adjacent to the constant temperature and humidity chamber and has an air supply duct and an exhaust duct connected to the constant temperature and humidity chamber so as to circulate constant temperature and humidity air controlling the constant temperature and humidity in the constant temperature and humidity chamber Further comprising a constant temperature and humidity chamber Workpiece loading and unloading device. According to claim 5,
a micro scale disposed in the constant temperature and humidity chamber to be adjacent to the storage silo for weighing the workpiece;
The workpiece loading and unloading device further comprises an electromagnetic shielding structure mounted on the micro scale so as to place the workpiece and removing static electricity from the workpiece.

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