KR101445156B1 - 틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기 - Google Patents

틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기 Download PDF

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KR101445156B1
KR101445156B1 KR1020127008338A KR20127008338A KR101445156B1 KR 101445156 B1 KR101445156 B1 KR 101445156B1 KR 1020127008338 A KR1020127008338 A KR 1020127008338A KR 20127008338 A KR20127008338 A KR 20127008338A KR 101445156 B1 KR101445156 B1 KR 101445156B1
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support plate
plasma reactor
floating support
enclosure
shoulder ring
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KR20120073260A (ko
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케네쓰 에스. 콜린스
앤드류 응우옌
제프리 마틴 새리나스
이매드 유시프
밍 수
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어플라이드 머티어리얼스, 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H01J37/3211—Antennas, e.g. particular shapes of coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
KR1020127008338A 2009-09-03 2010-06-11 틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기 Active KR101445156B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23971109P 2009-09-03 2009-09-03
US61/239,711 2009-09-03
US12/787,198 US8414736B2 (en) 2009-09-03 2010-05-25 Plasma reactor with tiltable overhead RF inductive source
US12/787,198 2010-05-25
PCT/US2010/038286 WO2011028312A1 (en) 2009-09-03 2010-06-11 Plasma reactor with tiltable overhead rf inductive source

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020137017437A Division KR101668587B1 (ko) 2009-09-03 2010-06-11 틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기

Publications (2)

Publication Number Publication Date
KR20120073260A KR20120073260A (ko) 2012-07-04
KR101445156B1 true KR101445156B1 (ko) 2014-09-29

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KR1020127008338A Active KR101445156B1 (ko) 2009-09-03 2010-06-11 틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기
KR1020137017437A Active KR101668587B1 (ko) 2009-09-03 2010-06-11 틸팅가능한 오버헤드 알에프 유도형 공급원을 구비한 플라즈마 반응기

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Country Status (6)

Country Link
US (2) US8414736B2 (https=)
JP (2) JP5705224B2 (https=)
KR (2) KR101445156B1 (https=)
CN (2) CN103426711B (https=)
TW (2) TWI446440B (https=)
WO (1) WO2011028312A1 (https=)

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US9016289B2 (en) * 2011-11-28 2015-04-28 Intermolecular, Inc. System and method for reducing particles and marks on wafer surface following reactor processing
TW201405627A (zh) * 2012-07-20 2014-02-01 Applied Materials Inc 具有同軸ｒｆ饋送及同軸遮罩之對稱的感應性耦合電漿源
CN103060778B (zh) * 2013-01-23 2015-03-11 深圳市劲拓自动化设备股份有限公司 平板式pecvd装置
US20140262044A1 (en) * 2013-03-15 2014-09-18 Applied Materials, Inc. Mu metal shield cover
CN105340059B (zh) 2013-06-17 2019-03-22 应用材料公司 用于等离子体反应器的增强等离子体源
US9305748B2 (en) 2013-10-04 2016-04-05 Applied Materials, Inc. Method of matching two or more plasma reactors
US9184021B2 (en) * 2013-10-04 2015-11-10 Applied Materials, Inc. Predictive method of matching two plasma reactors
US10249475B2 (en) * 2014-04-01 2019-04-02 Applied Materials, Inc. Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation
KR101753620B1 (ko) * 2015-03-19 2017-07-19 맷슨 테크놀로지, 인크. 플라즈마 처리 챔버에서의 에칭 프로세스의 방위 방향 균일성 제어
JP5977853B1 (ja) * 2015-03-20 2016-08-24 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラム及び記録媒体
JP6424120B2 (ja) * 2015-03-23 2018-11-14 東京エレクトロン株式会社 電源システム、プラズマ処理装置及び電源制御方法
US10032604B2 (en) 2015-09-25 2018-07-24 Applied Materials, Inc. Remote plasma and electron beam generation system for a plasma reactor
US11749509B2 (en) * 2017-02-20 2023-09-05 Beijing E-Town Semiconductor Technology, Co., Ltd Temperature control using temperature control element coupled to faraday shield
US10190216B1 (en) * 2017-07-25 2019-01-29 Lam Research Corporation Showerhead tilt mechanism
KR102309660B1 (ko) * 2019-11-21 2021-10-07 주식회사 유진테크 기판 처리 장치
JP7680476B2 (ja) * 2020-06-23 2025-05-20 ラム リサーチ コーポレーション 自動シャワーヘッド傾斜調整
EP4238122A4 (en) * 2020-10-29 2024-09-18 Board of Regents, The University of Texas System Equipment and process technologies for catalyst influenced chemical etching

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JP2003234293A (ja) 2002-02-06 2003-08-22 Canon Inc ヘリコン波プラズマ装置及びヘリコン波プラズマ処理方法
US20050034815A1 (en) 2001-12-14 2005-02-17 Shigeru Kasai Plasma processor
US20070256787A1 (en) 2006-05-03 2007-11-08 Applied Materials, Inc. Plasma reactor with a dynamically adjustable plasma source power applicator

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US5280154A (en) * 1992-01-30 1994-01-18 International Business Machines Corporation Radio frequency induction plasma processing system utilizing a uniform field coil
US5433812A (en) * 1993-01-19 1995-07-18 International Business Machines Corporation Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination
US5387288A (en) * 1993-05-14 1995-02-07 Modular Process Technology Corp. Apparatus for depositing diamond and refractory materials comprising rotating antenna
US5855681A (en) * 1996-11-18 1999-01-05 Applied Materials, Inc. Ultra high throughput wafer vacuum processing system
US6229264B1 (en) * 1999-03-31 2001-05-08 Lam Research Corporation Plasma processor with coil having variable rf coupling
KR100291898B1 (ko) * 1999-04-09 2001-06-01 윤종용 스파터 오염원을 감소시키고 플라즈마에 유도 결합을 향상시키기위한 차폐판의 제조방법 및 플라즈마 식각장치
US6507155B1 (en) * 2000-04-06 2003-01-14 Applied Materials Inc. Inductively coupled plasma source with controllable power deposition
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US20050034815A1 (en) 2001-12-14 2005-02-17 Shigeru Kasai Plasma processor
JP2003234293A (ja) 2002-02-06 2003-08-22 Canon Inc ヘリコン波プラズマ装置及びヘリコン波プラズマ処理方法
US20070256787A1 (en) 2006-05-03 2007-11-08 Applied Materials, Inc. Plasma reactor with a dynamically adjustable plasma source power applicator

Also Published As

Publication number Publication date
CN102576672A (zh) 2012-07-11
US8414736B2 (en) 2013-04-09
JP2013211580A (ja) 2013-10-10
KR20120073260A (ko) 2012-07-04
TWI446440B (zh) 2014-07-21
KR101668587B1 (ko) 2016-10-24
US9330887B2 (en) 2016-05-03
CN102576672B (zh) 2015-06-17
KR20130083489A (ko) 2013-07-22
CN103426711B (zh) 2016-04-27
JP5789281B2 (ja) 2015-10-07
US20110048644A1 (en) 2011-03-03
TWI500082B (zh) 2015-09-11
WO2011028312A1 (en) 2011-03-10
CN103426711A (zh) 2013-12-04
JP2013504159A (ja) 2013-02-04
TW201342470A (zh) 2013-10-16
US20130206594A1 (en) 2013-08-15
JP5705224B2 (ja) 2015-04-22
TW201126595A (en) 2011-08-01

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