KR101423976B1 - Image Inspection Apparatus of PLC Chip - Google Patents

Abstract

PLC chip image inspection device.
The present invention provides a jig fixing unit comprising a test jig having a plurality of recesses formed at predetermined intervals in a placement groove on which a PLC chip is placed and a fixing table on which both ends of the test jig are fixed to horizontally move the inspection object; And a first camera disposed vertically movably above the inspection jig. The inspection apparatus includes a first camera for detecting a waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip, A first checking unit for obtaining a video image; And a pair of right and left second cameras disposed to be close to or spaced apart from the left and right sides of the inspection jig to inspect the waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip. A second checking unit for capturing an image at an entrance end and an exit end of the chip; .

Description

[0001] The present invention relates to a PLC chip image inspection apparatus,

The present invention relates to an apparatus for inspecting a PLC chip, and more particularly, to a method and apparatus for inspecting a PLC chip by simultaneously performing surface and internal inspection of a waveguide pattern in addition to cracks, scratches, foreign substances, bubbles, The present invention relates to a PLC chip image inspection apparatus capable of performing a PLC chip image inspection.

(Hereinafter referred to as " PLC chip ") is a PLC (planar lightwave circuit) flat optical waveguide chip (hereinafter referred to as a PLC chip). The PLC chip is manufactured from a PLC wafer, The wafer having the passageway formed thereon is again sliced in the longitudinal direction thereof to form a splitter chip.

PLC wafers are available in many sizes, but most of them are using 150mm round wafers most recently, but their wafer sizes are getting larger.

PLC chip is used to manufacture optical communication core devices such as splitter and wavelength division multiplexing (WDM), and is essential for optical communication such as wireless base station and terminal as well as wire. In other words, it is an essential component for constructing the construction network of FTTH and FTTO

Such a PLC chip is manufactured by cutting a wafer into a chip bar and dicing the chip into individual chips. During the state change, the chip is inspected and the chip is cleaned. Must be subjected to several inspection and cleaning steps.

On the other hand, there are various items to be inspected in the above-mentioned PLC chip, chip bar, and wafer. In the case of the wafer, a fingerprint inspection such as size specification, appearance inspection of warping or surface inspection, foreign matter contamination, It is necessary to perform pattern shape and size inspections such as size, depth and angle. In the case of the chip bar, foreign matter pollution such as straightness and lateral angle state, straightness of cutting portion and angle inspection, degree of foreign matter adhesion, Chipping inspection such as inspection, chipping size and degree measurement, and scratch and crack inspection such as length and depth size discrimination.

In the case of a PLC chip diced individually from the chip bar, inspection of bonding parts such as bonding state and size contamination degree, inspection of a pattern part such as position and degree of a pattern, surface condition such as chipping size and defective size, Cracks, etc.), straightness and angle inspection of the top and bottom straightness and angle measurement shall be carried out.

In other words, the vision inspection should be performed in the process of manufacturing the PLC chip, and the defective product determined to be defective in the vision inspection should not be incorporated into the next process. The vision inspection is performed manually by the operator, There is a problem that the inspection time is long and the productivity is deteriorated.

In addition, depending on the situation, it is necessary to inspect the product through the camera because the inspection standard of the product is difficult and the waveguide part and the side angle are the core parts which are not visible to the naked eye. Therefore, various problems may occur in each process. Therefore, it is necessary to reduce the production loss by continuing to the next process after inspection.

On the other hand, if a lot of manpower is input during the whole inspection, the inspection time can be shortened. However, since the labor cost is increased and the manufacturing cost is increased, fast inspection equipment is needed so that the inspection can be carried out quickly, The inspection and management system is needed to grasp the characteristics of each lot and to identify the characteristics of each product.

Korean Patent Registration No. 10-1153270 (2012.5.30) discloses a method in which light irradiated from the upper side of the waveguide is reflected from the lower side to the waveguide side in the processing state of the PLC chip, the reflected light is interfered through the waveguide, So that it is possible to perform a real-time inspection of the waveguide in the processing equipment itself.

However, in such a conventional apparatus, both ends are cut at an angle of about 8 degrees, and a rectangular PLC chip having a waveguide through which light passes is used to determine the presence or absence of foreign matter and bubbles, whether scratches are generated on the surface, There has been a problem in that it is not possible to carry out the visual inspection at the same time.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a surface and internal inspection of a waveguide pattern along with cracks, scratches, foreign substances, bubbles and chipping generated in a PLC chip manufactured by dicing from a chip bar And to provide a PLC chip image inspection device which can be simultaneously performed.

In order to accomplish the above object, the present invention provides a testing apparatus comprising: a test jig in which a plurality of placement grooves are recessed at regular intervals so that PLC chips are placed upside down; and a fixing table on which both ends of the test jig are fixed, A jig fixing unit for horizontally moving the jig; A jig fixing unit having a fixing table on which both ends of the inspection jig are fixed to horizontally move the inspection object; And a first camera disposed vertically movably above the inspection jig. The inspection apparatus includes a first camera for detecting a waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip, A first checking unit for obtaining a video image; And a pair of right and left second cameras disposed to be close to or spaced apart from the left and right sides of the inspection jig to inspect the waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip. A second checking unit for capturing an image at an entrance end and an exit end of the chip; And a PLC chip image inspection apparatus.

Preferably, the jig fixing unit includes a first rodless cylinder for reciprocating a first reciprocating rod coupled with a moving plate having a pair of vertical bars coupled to both ends of the fixing bar, in a direction parallel to the longitudinal direction of the inspection jig, And a second rodless cylinder for reciprocating a second king cylinder coupled with the first rodless cylinder in a direction orthogonal to the longitudinal direction of the inspection jig.

Preferably, the first inspection unit includes a horizontal support bar having a predetermined length to which both ends are coupled to a pair of left and right vertical bars to which a lower end is fixed, and a mounting groove formed at a middle of the length of the horizontal support bar, And a fixing ring for fixing the first camera to correspond to the PLC chip disposed in the placement groove.

Preferably, the second inspection unit includes a vertical mounting unit having a horizontal mounting base on which the second camera is installed, and a slider having a horizontal movable plate on which the lower end of the vertical mounting unit is fixed, And a motor for rotating the screw shaft of a predetermined length screwed to the female screw portion of the horizontal moving plate in the forward or reverse direction.

More preferably, the second examining unit comprises a variable block having the second camera fixedly mounted thereon, the variable block having a downwardly convex phase-inverted main surface on a lower surface thereof, and a lower engaging groove, And an angle adjuster for varying an angle of a second camera for photographing an entrance end and an exit end of the PLC chip, wherein the angle adjusting unit includes a fixed block fixedly installed on the horizontal mount.

Preferably, the inspection sheet includes an upper plate body having a predetermined length formed by recessing a placement groove in which the PLC chip is mounted and disposed, and an upper through-hole formed in a bottom surface of the placement groove, And a lower plate body formed through the lower through-hole corresponding to the upper through-hole.

The present invention as described above has the following effects.

Through a pair of right and left second cameras arranged so as to correspond to the images acquired through the first camera arranged corresponding to the upper surface of the PLC chip arranged in the plurality of arrangement grooves of the inspection jig and the input and output ends of the PLC chip Chip inspection such as scratches and chipping on the surface of the chip through the image can be performed simultaneously with inspection of the inside of the chip such as foreign substances, bubbles and waveguide patterns inside the chip, thereby improving work productivity, It is possible to improve the reliability of products with accurate criteria for good and defective products.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram of a PLC chip image inspection apparatus according to a preferred embodiment of the present invention; FIG.
FIG. 2 is a perspective view illustrating a jig fixture employed in a PLC chip image inspection apparatus according to a preferred embodiment of the present invention.
3 is a perspective view illustrating a second inspection unit employed in a PLC chip image inspection apparatus according to a preferred embodiment of the present invention.
4A and 4B are an exploded view and an assembled view illustrating a test jig employed in a PLC chip image inspection apparatus according to a preferred embodiment of the present invention.

The above objects, features and advantages of the present invention will become more apparent from the following detailed description. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 to 3, a PLC chip image inspection apparatus 100 according to a preferred embodiment of the present invention includes a plurality of PLC chips 1 diced from a chip bar and formed in a rectangular parallelepiped shape, A first inspection unit 120 and a second inspection unit 130 so as to simultaneously perform a visual inspection such as cracking, scratches, bubbles and waveguide patterns 1a generated in the inside of the chip, .

The jig fixing unit 110 includes a fixing table 114 on which the inspection jig 111 is fixed so that the inspection jig 111 having a plurality of PLC chips 1 to be inspected can be fixed to the second inspection unit 130 and the PLC chip 1 to correspond to each other.

As shown in FIGS. 4A and 4B, the inspection jig 111 is formed by recessing a placement groove 112a on which the PLC chip 1 is placed and placed, And a lower through hole 113a corresponding to the upper through hole 112b is formed on an upper surface of the upper plate 112 where the upper plate 112 is stacked. And a lower plate body 113 formed to penetrate the lower plate body 113. The lower plate body 113 is detachably fixed to the fixing table 114. [

Here, the light provided from the illumination source disposed under the inspection jig is irradiated from the lower part of the inspection jig, and the first camera (first camera) obtained from the upper surface of the PLC chip by the light irradiated through the upper and lower through- 121 can be acquired more precisely.

Both ends of the inspection jig 111 are preferably detachably assembled from the fixing table 114 by fixing screws fastened to both ends of the fixing table.

The jig fixing unit 110 includes a first reciprocating table 116a coupled to a moving plate 115 having a pair of vertical tables 115a and 115b coupled to both ends of the fixing table 114, A first rodless cylinder 116 reciprocating in a direction parallel to the longitudinal direction of the test jig 111 and a second king rod 117a coupled to the first rodless cylinder 116, And a second rodless cylinder 117 reciprocating in a direction perpendicular to the longitudinal direction.

The first rodless cylinder 116 is a cylinder member arranged in parallel with the longitudinal direction of the inspection jig 111 and the second rodless cylinder 117 is a cylinder member disposed in parallel with the longitudinal direction of the inspection jig 111. The first rodless cylinder 116, Is a cylinder member arranged to be orthogonal to the lower portion.

One PLC chip 1 as an object to be inspected among a plurality of PLC chips 1 arranged in each of the plurality of arrangement grooves 112a in the inspection jig 111 is positioned in the second rodless cylinder 117, The upper surface of the PLC chip is aligned with the first camera 121 of the first inspection unit 120 in a one-to-one correspondence with each other by the operation of horizontally moving the second carriage 117a of the first rodless cylinder 117a, The first end of the PLC chip 1 and the second end of the PLC chip 1 are connected to a pair of left and right second cameras 132a and 132b provided on the second inspection unit 130, As shown in FIG.

The first inspection unit 120 detects scratches, cracks, bubbles, chipping, and waveguide patterns generated on the surface and inside of the PLC chip 1, which is an object to be inspected disposed in the arrangement grooves formed in the upper plate of the inspection jig 111 And a first camera 121 disposed above the inspection jig 111 and capable of moving up and down so as to be able to acquire an image of an object to be inspected on the PLC chip 1 so as to be inspected .

The first inspection unit 120 includes a horizontal support bar 123 having both ends connected to a pair of left and right vertical bars 124a and 124b to which a lower end is fixed, The first camera 121 is fixed to the first camera 121 such that the lens unit 121a of the first camera 121 and the PLC chip 1 disposed in the placement groove correspond to the mounting groove 123a, Ring 122 as shown in FIG.

Here, the lens 121a of the first camera 121 may be located close to or spaced from the upper surface of the PLC chip, which is an object to be inspected, to adjust the focus so that the best image can be obtained.

The second inspection unit 130 detects scratches, cracks, bubbles, chipping, and waveguide patterns generated on the surface and inside of the PLC chip 1, which is an object to be inspected disposed in a placement groove formed in the upper plate of the inspection jig 111 And a pair of right and left second cameras (131) disposed on both left and right sides of the test jig so as to be close to or spaced from both right and left sides of the test jig (111) And acquires an image at the exit and the exit end.

The second inspection unit 130 includes a vertical mount 133 having a predetermined height and a horizontal mount 132 disposed at one end of the second camera 131, A horizontal rail 135 on which a slider 134a provided on a horizontal movable plate 134 to be installed is slidably movably assembled and a screw 142 having a predetermined length screwed to the female screw portion 134b of the horizontal movable plate 134, And a motor 137 for horizontally moving the horizontal movable plate 134 such that the second camera is moved closer to or away from the test jig when the shaft 136 is rotated in the normal direction or the reverse direction.

The screw shaft 136 connected to the drive shaft of the motor 137 is preferably rotatably assembled to the pair of bearing blocks 136a and 136b.

The second camera 131 is fixedly mounted on the horizontal mount 132 on which the second camera 131 is mounted. The variable block 138a has a downwardly convex image- And a fixing block (138b) which is recessed downwardly on the upper surface and is fixed to the horizontal mount (132) so that the lower end of the PLC chip And an angle adjusting unit 138 for varying a photographing angle of the second camera for photographing the end.

The PLC chip 1 to be inspected is individually disposed and fixed to each of the plurality of placement grooves 112a formed in the upper plate body 112 of the inspection jig 111, The test jig is fixed to the fixing table 114.

In this state, the lens unit of the first camera fixed to the horizontal support bar 123 of the first inspection unit 120 and the plurality of PLC chips arranged on the inspection jig are aligned with each other in the vertical direction, The test jig 111 is horizontally moved by the operation of the lease cylinder 117. [

When the lens unit of the first camera 121 is positioned so as to be vertically aligned with the upper surface of the PLC chip 1 so as to be able to acquire an image of the upper surface of the PLC chip, The horizontal movement by the rodless cylinder is stopped.

When the horizontal movable plate 134 is horizontally moved to the side of the jig fixing unit 110 by forward rotation of the motor 137, the second movable plate 133 of the vertical mounting plate 133 provided on the left and right horizontal movable plates 134 The camera 131 is arranged close to the entrance and exit ends of the PLC chip disposed in the inspection jig 111 so as to acquire images through it.

In this state, when an image through the upper surface of the PLC chip and an image through the entrance and exit ends of the PLC chip 1 are obtained through the first and second cameras 121 and 131, A surface inspection such as scratches scratched by a sharp material, a cross-sectional condition in which the edge of the chip is broken in the dicing process of the chip bar, The bubble inspection for the bubbles generated inside the chip and the pattern inspection for the waveguide pattern formed inside the chip are simultaneously carried out through the obtained image. Based on this, The defective product is judged.

On the other hand, when chip internal inspection such as scratches and chipping on the surface of the PLC chip 1 as well as foreign matter, bubbles and waveguide patterns inside the chip is completed, the other PLCs The moving plate 115 is horizontally moved in the longitudinal direction of the test jig 111 by the first rodless cylinder 116 so that the surface and the inside of the chip 1 can be inspected. The upper surface corresponds to the first camera 121 and the input and output ends of the PLC chip 1 correspond to the left and right second cameras 131. Then, The inspection of the plurality of PLC chips mounted on the inspection jig 111 is terminated by repeating the surface and internal inspection.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

1: PLC chip
110:
111: inspection jig
112: upper plate body
113:
115: moving plate
116: first rodless cylinder
117: second rodless cylinder
120: First inspection section
121: First camera
121a:
122: Retaining ring
123: Horizontal support bar
130:
131: Second camera

Claims (6)

A jig fixture having a test jig in which a plurality of placement grooves are recessed at predetermined intervals so that the PLC chips are placed upside down and a fixing table on which both ends of the test jig are fixed to horizontally move the inspection object;
And a first camera disposed vertically movably above the inspection jig. The inspection apparatus includes a first camera for detecting a waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip, A first checking unit for obtaining a video image;
And a pair of right and left second cameras disposed to be close to or spaced apart from the left and right sides of the inspection jig to inspect the waveguide pattern along with scratches, cracks, bubbles and chipping generated on the surface and inside of the PLC chip, A second inspection unit for acquiring an image at an entrance end and an exit end of the first inspection unit; Lt; / RTI >
The inspection sheet includes a lower plate body having a predetermined length of an upper plate formed with an upper through hole on a bottom surface of the placement groove and a lower through hole corresponding to the upper through hole on the upper surface of the upper plate, And the PLC chip image inspection apparatus. The method according to claim 1,
The jig fixing unit includes a first rodless cylinder for reciprocating a first reciprocating rod coupled with a moving plate having a pair of vertical bars coupled to both ends of the fixing barrel in a direction parallel to the longitudinal direction of the inspection jig, And a second rodless cylinder for reciprocating a second king cylinder coupled with the rodless cylinder in a direction perpendicular to the longitudinal direction of the inspection jig. The method according to claim 1,
The first inspection unit may include a horizontal support bar having a predetermined length to which both ends are coupled to a pair of left and right vertical bars to which a lower end is fixed and a mounting hole formed in a middle of the length of the horizontal support bar, And a fixing ring for fixing the first camera to correspond to the PLC chip disposed in the placement groove. The method according to claim 1,
The second inspection unit includes a vertical mounting unit having a horizontal mounting base on which the second camera is installed at one end, a horizontal rail on which a slider provided on a horizontal movable plate on which a lower end of the vertical mounting base is fixedly installed, And a motor for rotating the screw shaft of a predetermined length screwed to the female threaded portion of the horizontal movement plate in a forward or reverse direction. 5. The method of claim 4,
The second inspection unit includes a variable block having the second camera fixedly mounted thereon, the variable block having a downwardly convex upwardly revolving main surface on the lower surface thereof, and a lower engaging groove, And an angle adjuster for changing an angle of a second camera for photographing an entrance end and an exit end of the PLC chip, the PLC chip having a fixed block fixedly installed on the horizontal mount, Inspection device. delete

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